CN110246537A - Transmission mechanism for space three-freedom nanopositioning stage - Google Patents
Transmission mechanism for space three-freedom nanopositioning stage Download PDFInfo
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- CN110246537A CN110246537A CN201910265390.8A CN201910265390A CN110246537A CN 110246537 A CN110246537 A CN 110246537A CN 201910265390 A CN201910265390 A CN 201910265390A CN 110246537 A CN110246537 A CN 110246537A
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Abstract
One kind can be used for high-precision locating platform transmission mechanism, including upper transmission plate and under quiet plate, upper transmission plate and under set between quiet plate there are three transmission component, three transmission components are evenly arranged on the circle by three transmission components；Each transmission component includes the setting vertically piezoelectric ceramic actuator in lower stationary. platen, the top of piezoelectric ceramic actuator connects ramuscule cabinet, ramuscule cabinet is equipped with lower Spherical plug, lower Spherical plug is included in the arc groove in arc groove transmission planar bottom surface, the line in the tangential of lower Spherical plug and the arc groove, lower Spherical plug and the center of circle of the arc groove on section is perpendicular to lower stationary. platen；Is driven plate in the top connection of upper arc groove transmission plate, spring be arranged in being parallel to piezoelectric ceramic actuator upper transmission plate and under quiet plate spring support on.Invention increases the positioning accuracies of mechanism, and any freedom degree may be implemented by being applied in combination for different number different direction.
Description
Technical field
Disclosure herein refer to Ultra-precision positionings to adjust equipment, and especially a kind of Three Degree Of Freedom with two rotations, one movement is simultaneously
The transmission mechanism of connection formula ultraprecise nanopositioning stage.
Background technique
In recent years, with the fast development of microelectric technique, precision optics and precision processing technology, existing positioning accurate
Degree is no longer satisfied the demand of people, develops a kind of multiple degrees of freedom, nano grade positioning precision and high flexibility ratio and Gao Ling
The positioning system of sensitivity is extremely urgent.Since piezoelectric ceramic actuator has fast response time, positioning accuracy height, stability
Well, it is widely used in Precision Position Location System without the advantages such as fever and noiseless, which is mostly made pottery with piezoelectricity
Porcelain passes through different number, the piezoelectric ceramics of different location using flexure hinge mechanism as motion guide rail as driving setting element
Driver it is independent flexible, it can be achieved that the multiple freedom degrees in space transformation.
National Bureau of Standards applies the principle of piezoelectric ceramics and flexible hinge earliest, successfully has developed a kind of accurate position
It moves platform and it is used in space technology field, but the platform structure is complicated and can only realize one-dimensional translation, has very big
Limitation.So far after, backroom boys are continuously improved on the basis of National Bureau of Standards, flexible hinge chain type
Piezoelectric ceramics locating platform technology has obtained swift and violent development, stroke from several microns to tens micron, dimension from it is one-dimensional, two-dimentional to
Multidimensional.1992, two-dimentional X-Y hinge type is successfully developed by professor J.Fu of National Institute of Standards and Technology and positions work
Make platform.The then X-Y- θ three dimensional hinge formula workbench that Hitachi, Japan is developed again, but its angular resolution only has 1 μ rad.State
The interior research to this originates from Tsinghua University earliest, and professor Li Qingxiang, which is equal to 1986, successfully has developed sub-micron elastic hinge formula
Micro-displacement work table, precision are poor.Six skilful formula Double tabletop structures of professor Sun Lining of Harbin Institute of Technology is integrated later
Formula six-freedom micro displacement parallel robot, connected by the identical kinematic pair branch parallel way of six structure types pedestal and
Between sports platform, both ends by flexible ball compared with each bar of chain, by Piezoelectric Ceramic rod piece, precision about 10nm,
0.0001 °, but its structure is sufficiently complex, and has the shortcomings that movement is unstable.
So up to the present, the traditional mechanisms such as also multi-purpose flexible hinge of piezoelectric ceramics locating platform are as primary drive
It part can not although flexible hinge greatly reduces quantity, weight, installation step and kinematic accuracy compared with conventional motion pair
Deny, there are also many fatal defects for flexible hinge transmission, especially in precision drive.First, due to flexible member
The movement that deformation is realized receives the limitation of its own intensity, causes its stroke limited；Second, since the energy of flexible motion is deposited
Storage, flexible member are easy to produce axis drift and parasitic error when being driven, and on the one hand cause its precision limited, on the other hand
Increase its complexity for controlling program；Third, Flexible Transmission section stiffness is poor, and is being subjected to stress or high temperature for a long time
Under conditions of, it is easy to produce creep and stress relaxation phenomenon, increases the unstability of its mechanism.
Summary of the invention
In order to make up some inherent shortcomings of the flexible hinge chain type transmission mechanism in existing high-precision, the present invention
A kind of transmission mechanism for space three-freedom nanopositioning stage is provided.
The present invention can overcome drawbacks described above, the transmission mechanism with high rigidity and high-bearing capacity, can be directly used for existing
Precision Position Location System, also can independent according to the actual situation or complete use, realize multiaxial motion.Meanwhile enormously simplifying its biography
Dynamic principle, increases its transmission accuracy.
One kind can be used for high-precision locating platform transmission mechanism, it is characterised in that: quiet flat under including upper transmission plate 2
Plate 8, upper transmission plate 2 and under set between quiet plate 8 there are three transmission component, three transmission components are evenly arranged on through three transmission groups
On the circle of part；Each transmission component includes the setting vertically piezoelectric ceramic actuator 6 in lower stationary. platen 8, and piezoelectric ceramics drives
The top of dynamic device 6 connects ramuscule cabinet 5, and ramuscule cabinet 5 is equipped with lower Spherical plug 4, and lower Spherical plug 4 is included in arc groove transmission
In arc groove on 3 bottom surface of plate, the tangential of lower Spherical plug 4 and the arc groove, lower Spherical plug 4 and institute
The line in the center of circle of the arc groove stated on section is perpendicular to lower stationary. platen 8；The top connection of upper arc groove transmission plate 3
Upper transmission plate 2, spring 7 are parallel to the spring branch that upper transmission plate 2 quiet plate 8 under is arranged in 6 ground of piezoelectric ceramic actuator
On frame 1.
The spherical radius of lower Spherical plug is R, and the radius of the arc groove is R+a, and lower Spherical plug 4 passes through outside
Pressure is embedded in naturally inside the arc groove of transmission plate 2, and the vertical distance d in two centers of circle should be equal to a.
The present invention mainly uses voltage to drive piezoelectric ceramic actuator, when the applied voltage of piezoelectric ceramic actuator occurs
When variation, displacement can also occur to change accordingly, and the variation of power supply voltage directly decides that piezoelectric ceramic actuator is defeated
The variation of displacement out, this displacement are detected to obtain by corresponding sensor-based system, and sensor-based system drives in detection piezoelectric ceramics
One also can be exported accordingly while dynamic device displacement and follows signal, and is timely feedbacked into PID controller, and PID reality is passed through
Now the micro-precision of voltage is adjusted, thus the accurate of piezoelectric ceramics displacement is controlled to adjust to realize, theoretically maximum point
Resolution can achieve its dispatch from the factory resolution ratio 0.1nm, such as Fig. 1.The accurate displacement exported by piezoelectric ceramic actuator, is applied to the biography
In motivation structure, Spherical plug 3 is driven to slide in the arc groove of upper transmission plate 2, the movement of plate 2 is driven in realization and is turned
It is dynamic, the movement of plate 1 and rotation are moved in drive.When three piezoelectric ceramic actuator displacements are all the same and in the same direction, can be considered as
Upper dynamic plate only moves, there is no correspondingly rotating, maximum resolution theoretically with single piezoelectric ceramic actuator
Unanimously, it can reach 0.1nm.When only one piezoelectric ceramic actuator output displacement, upper flat plate can be considered as and rotated,
θ maximum resolution theoretically can achieve 0.01/L (nrad):
Wherein Δ d is the output displacement (nm) of piezoelectric ceramic actuator, and D may be approximately equal to two piezoelectric ceramic actuators
Intermediate distance (m).
Compared with prior art, the present invention having the advantages that following: (1) flexure hinge mechanism to discard tradition is as driver
Structure uses spheroidal top instead with circular groove cooperation as the running part in precision surface plate, by bulb in arc groove
The movement of slide inside implementation mechanism, while being floated without cumulative errors and axis, increase the positioning accuracy of mechanism；(2) by not
Any freedom degree may be implemented with being applied in combination for quantity different direction, structure is simple, and transmission is convenient, and rigidity is much larger than flexible hinge
Chain mechanism, not only simplifies the structure of motion platform, also increases its bearing capacity；It (3), can be with by changing the size of R and a
The movement of implementation mechanism different trips.
Detailed description of the invention
Fig. 1 is the control flow chart of piezoelectric ceramic actuator.
Fig. 2 a and Fig. 2 b are the structural schematic diagrams of the embodiment of the present invention.
Fig. 3 is three free nanopositioning stage structural schematic diagram applied by the present invention.
Fig. 4 is nanopositioning stage cross-sectional view applied by the present invention.
Fig. 5 is measuring device schematic diagram of the invention.
Fig. 5 a is the reflected light path schematic diagram of the glass splitter of the wedge fringes device of this measurement scheme.
Fig. 5 b is the calculating schematic diagram of the micro-displacement amount by side object of this measurement scheme.
The label of each component in figure:
1, spring support 2, upper transmission plate 3, upper arc groove are driven plate 4, lower Spherical plug 5, due to fixed ball
Shape top ramuscule cabinet 6, piezoelectric ceramic actuator 7, spring 8, under quiet plate 9, laser 10, wedge fringes device 11,
Testee 12, light-dividing device (including the first optical path 121 and second optical path 122) 13, optical imaging system 14, data processing
System
Specific embodiment
Technical solution of the present invention is further illustrated with reference to the accompanying drawing.
One kind can be used for high-precision locating platform transmission mechanism, including upper transmission plate 2 quiet plate 8, upper transmission under
Plate 2 and under set between quiet plate 8 there are three transmission component, three transmission components are evenly arranged on the circle by three transmission components；
Each transmission component includes the setting vertically piezoelectric ceramic actuator 6 in lower stationary. platen 8, the top of piezoelectric ceramic actuator 6
Portion connects ramuscule cabinet 5, and ramuscule cabinet 5 is equipped with lower Spherical plug 4, and lower Spherical plug 4 is included in arc groove transmission 3 bottom surface of plate
On arc groove in, the tangential of lower Spherical plug 4 and the arc groove, lower Spherical plug 4 and the circular arc
The line in the center of circle of the groove on section is perpendicular to lower stationary. platen 8；Transmission is flat in the top connection of upper arc groove transmission plate 3
Plate 2, spring 7 be parallel to 6 ground of piezoelectric ceramic actuator be arranged in it is upper transmission plate 2 and under quiet plate 8 spring support 1 on.
When initial position, the vertical arc groove on upper arc groove transmission 3 bottom surface of plate of lower Spherical plug 4
It is interior, descend Spherical plug 4 to be mounted on piezoelectric ceramic actuator in actual use, it can be real by the stretching and contraction of piezoelectric ceramics
The now positive negative sense sliding in the circular arc groove of Spherical plug 4, so that the movement and rotation of plate 2 are driven on realizing, by not
With being applied in combination for quantity different direction, multiaxial motion can also be realized.
The present invention uses voltage mainly to drive piezoelectric ceramic actuator, and piezoelectric ceramic actuator is three English precision control of Tianjin
Company processed is produced, model NS-Z25-01, and closed loop stroke is 25 μm, and closed loop resolution ratio is 0.1nm, and the linearity is
0.03%, driving voltage is -30V -+150V, and maximum load 1kg uses IPD-3303SLU as piezoelectric ceramic actuator
Power supply, when the applied voltage of piezoelectric ceramic actuator changes, displacement can also occur to change accordingly, power supply
The variation of supply voltage directly decides the variation of the displacement of piezoelectric ceramic actuator output, this displacement by passing accordingly
Sensing system detects to obtain, and sensor-based system also can export one while detecting piezoelectric ceramic actuator displacement accordingly and follow
Signal, and timely feedbacking into PID controller realized by PID and adjusted to the micro-precision of voltage, is thus realized to piezoelectricity
The accurate of ceramic displacement controls to adjust, and theoretically maximum resolution can achieve its dispatch from the factory resolution ratio 0.1nm, such as Fig. 1.By pressing
The accurate displacement of electroceramics driver output, is applied in the transmission mechanism, drives Spherical plug 3 in the circle of upper transmission plate 2
It is slided in arc fluting, the movement and rotation of plate 2 is driven in realization, the movement of transmission plate 2 and rotation in drive.When three piezoelectricity
When ceramic driver displacement is all the same and in the same direction, upper dynamic plate can be considered as and only moved, there is no correspondingly rotating,
Its maximum resolution is theoretically consistent with single piezoelectric ceramic actuator, can reach 0.1nm.When only one Piezoelectric Ceramic
When device output displacement, upper flat plate can be considered as and rotated, θ maximum resolution theoretically can achieve 0.01/L (nrad):
Wherein Δ d is the output displacement (nm) of piezoelectric ceramic actuator, and D may be approximately equal to two piezoelectric ceramic actuators
Intermediate distance (m).
Above-mentioned resolution ratio is the maximum resolution being theoretically achievable, and there is also a series of errors in actual use, is
Measure its true resolution, specially accurate displacement transmission mechanism develops a set of nanoscale micro-displacement precision and surveys the present invention thus
Amount scheme, principle are with wedge fringes principle: according to the basic knowledge of equal thickness interference it is found that when vertical with monochromatic collimated beam
When irradiating glass splitter, since two surfaces can generate two beam reflected lights to monochromatic light respectively above and below splitter, this two beams reflected light
Interference, and interference strength can be generated in the upper surface of glass splitter are as follows:
Wherein IR1And IR2The respectively light intensity of two beam reflected lights, δ are reflected light by the light path between medium back reflection light
Difference, λ are lambda1-wavelength.If IR1=IR2, then (1) formula can simplify are as follows:
Wherein optical path difference δ=2ndk+ λ/2, n are medium refraction index, dkAbove and below kth grade interference fringe corresponding position medium
Thickness between interface.Fixed one end is motionless, and dielectric thickness changes at L if testee generates displacement, on medium
Surface kth grade interference fringe will move forward Δ l.
By geometrical relationship it is found that having when θ very little:
Therefore, if measuring the information of interference fringe in its interference spectrum, it is micro- to determine that the refractive index n of medium is just entirely defined
Displacement measurement model can calculate d by the width of interference fringek, so that it is determined that micro-displacement amount Δ d, to obtain platform
True resolution.
The measuring device includes providing the laser 9 in stable monochromatic coherent light source, and the output laser of laser 9 is with 45 degree
The light splitting surface of angular alignment light-dividing device 12, output laser are divided into the first optical path 121 positioned at light splitting surface two sides through light-dividing device 12
With the second optical path 122, the first optical path 121 and the second optical path 122 are each perpendicular to output laser, and the first optical path 121 is directed at splitter
The glass splitter of interference device；
The glass splitter of wedge fringes device 10 connects testee 11, and object under test 11 is placed in nanoscale accurate displacement
Above platform, transmission mechanism applied by platform be it is mentioned in the present invention, platform is driven by three piezoelectric ceramic actuators 6
It is dynamic, the individual power supply driving of each freedom of each piezoelectric ceramic actuator 6, by adjusting piezoelectric ceramic actuator power supply
Voltage, to control piezoelectric ceramic actuator displacement, and transmission mechanism designed through the invention is piezoelectric ceramic actuator
Displacement be transmitted in transmission plate 2, allow transmission plate 2 to occur to move accordingly, cause tested above dynamic plate 2
Object moves, and changing the relative position of wedge fringes device 10, changes optical path with this.
The laser of first optical path 121 will form interference fringe in the upper surface of glass splitter by wedge fringes device, connect
Interference image is sent to optical imaging system 13 by light-dividing device 12, the second optical path 122 to obtain complete laser
Interference image；The output end of optical imaging system 13 connects data processing system 14；Data processing system 14 is surveyed according to micro-displacement
It measures model to calculate by the microdisplacement of side object, the microdisplacement measurement model is specifically:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dkFor
Thickness between kth grade interference fringe corresponding position medium upper and lower interface, L are glass splitter length, and Δ l is medium upper surface the
K grades of interference fringes are by the distance of forward movement.
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, protection of the invention
Range should not be construed as being limited to the specific forms stated in the embodiments, and protection scope of the present invention is also and in art technology
Personnel conceive according to the present invention it is conceivable that equivalent technologies mean.
Claims (1)
1. one kind can be used for high-precision locating platform transmission mechanism, it is characterised in that: including upper transmission plate (2) and under it is quiet flat
Plate (8) is set between upper transmission plate (2) He Xiajing plate (8) there are three transmission component, and three transmission components are evenly arranged on by three
On the circle of transmission component；Each transmission component includes the setting vertically piezoelectric ceramic actuator (6) on lower stationary. platen (8),
The top of piezoelectric ceramic actuator (6) connects ramuscule cabinet (5), and ramuscule cabinet (5) is equipped with lower Spherical plug (4), lower Spherical plug
(4) it is included in the arc groove on arc groove transmission plate (3) bottom surface, lower Spherical plug (4) and the arc groove
Tangential, the line in lower Spherical plug (4) and the center of circle of the arc groove on section is perpendicular to lower stationary. platen
(8)；Plate (2) are driven in the top connection of upper arc groove transmission plate (3), spring (7) is parallel to piezoelectric ceramic actuator
(6) it is arranged on the spring support (1) of upper transmission plate (2) He Xiajing plate (8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910265390.8A CN110246537A (en) | 2019-04-03 | 2019-04-03 | Transmission mechanism for space three-freedom nanopositioning stage |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910265390.8A CN110246537A (en) | 2019-04-03 | 2019-04-03 | Transmission mechanism for space three-freedom nanopositioning stage |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111338037A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111338038A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111600654A (en) * | 2020-05-29 | 2020-08-28 | 西安理工大学 | Efficient space light-optical fiber coupling device and method based on power feedback |
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| DE19715226A1 (en) * | 1997-04-11 | 1998-10-15 | Univ Schiller Jena | Precision micro=positioning method using piezoelectric setting elements |
| US20030106230A1 (en) * | 2001-12-10 | 2003-06-12 | Hennessey C. William | Parallel kinematic micromanipulator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111338037A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111338038A (en) * | 2020-04-10 | 2020-06-26 | 季华实验室 | Optical fiber coupling adjusting device and adjusting method thereof |
| CN111600654A (en) * | 2020-05-29 | 2020-08-28 | 西安理工大学 | Efficient space light-optical fiber coupling device and method based on power feedback |
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