CN210108265U - Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time - Google Patents
Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time Download PDFInfo
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- CN210108265U CN210108265U CN201920448327.3U CN201920448327U CN210108265U CN 210108265 U CN210108265 U CN 210108265U CN 201920448327 U CN201920448327 U CN 201920448327U CN 210108265 U CN210108265 U CN 210108265U
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Abstract
The three-degree-of-freedom nanometer positioning platform is used for reading displacement rotation information in real time and comprises an upper transmission flat plate and a lower static flat plate, three transmission assemblies are arranged between the upper moving flat plate and the lower static flat plate and are uniformly distributed on the circumference passing through the three transmission assemblies in an angle of 120 degrees, the top of a piezoelectric ceramic driver is connected with a lower spherical top head, and a hemispherical top head of the lower spherical top head is embedded into an arc-shaped groove of the upper arc-shaped groove transmission flat plate; the upper arc groove transmission flat plate is arranged in a circular groove of the upper moving flat plate, and the springs are parallel to the piezoelectric ceramic driver and are uniformly distributed on the spring supports of the upper moving flat plate and the lower static flat plate at 120 degrees. The micro-motion inclined platform displacement angle measurement device comprises a micro-motion inclined platform, a wedge interference device, a three-degree-of-freedom nanometer positioning platform and a three-degree-of-freedom nanometer positioning platform, wherein the micro-motion inclined platform is used for reading displacement angle information of the micro-motion inclined platform in real time, output laser of a laser is aligned to a reflecting surface of a reflecting device at an angle of 45 degrees and is vertically transmitted into the.
Description
Technical Field
The utility model relates to an ultra-precision positioning adjustment equipment, especially a three degree of freedom parallel that has two rotations one and remove can read displacement rotation information's nanometer location platform in real time.
Background
In recent years, with the rapid development of microelectronic technology, precision optics and precision machining technology, the existing positioning precision cannot meet the requirements of people, and a positioning system with multiple degrees of freedom, nanometer positioning precision, high flexibility and high sensitivity is developed and is urgently used for realizing high-precision operation and experimental research. The existing nano positioning platform mostly uses piezoelectric ceramics as a driving positioning element, uses a flexible hinge mechanism as a motion guide rail, drives a piezoelectric ceramic driver, and uses the flexible hinge as a precision transmission mechanism to realize nano-scale displacement. Although flexible hinges have considerably reduced number, weight, assembly steps and precision of movement compared to traditional kinematic pairs, it is undeniable that flexible hinge transmissions have a number of fatal drawbacks, especially in precision transmissions. First, the movement achieved due to the deformation of the flexible member is limited by its own strength, resulting in a limited stroke; secondly, due to the energy storage of the flexible movement, the flexible member is easy to generate shaft drift and parasitic errors during transmission, so that on one hand, the precision of the flexible member is limited, and on the other hand, the complexity of a control program of the flexible member is increased; third, the flexible transmission part is less rigid and is prone to creep and stress relaxation under long-term stress or high temperature conditions, increasing the instability of its mechanism. In order to realize real-time precise control on the platform in high-precision operation, sometimes the motion information of the precise platform needs to be read in real time so as to be fed back to a control system to realize the real-time precise control on the platform, so that no multi-dimensional nano-scale platform capable of reading the motion information in real time is used for high-precision operation and experimental research so far, and therefore, the development of a nano-scale multi-dimensional positioning platform capable of reading the motion information in real time becomes very important.
Disclosure of Invention
In order to make up the defect that the existing high-precision nanoscale positioning platform cannot read angle information in real time, the utility model provides a three-degree-of-freedom nanoscale positioning platform capable of reading displacement rotation information in real time.
The utility model discloses can overcome above-mentioned defect, this three degree of freedom nanometer location platforms can realize the location measurement of high accuracy high sensitivity through the real-time displacement angle information that reads of the method of optical interference.
The three-freedom-degree nanometer positioning platform for reading displacement rotation information in real time is characterized by comprising a three-freedom-degree nanometer positioning platform for bearing a measured object and enabling the measured object to generate displacement and a measuring device for reading measured displacement angle information in real time:
the three-degree-of-freedom nanometer positioning platform comprises an upper transmission flat plate 2 and a lower static flat plate 8, wherein three transmission assemblies are arranged between the upper moving flat plate 2 and the lower static flat plate 8, the three transmission assemblies are uniformly distributed on the circumference passing through the three transmission assemblies in an angle of 120 degrees, each transmission assembly comprises a piezoelectric ceramic driver 6 vertically installed on the lower static flat plate 8, the top of the piezoelectric ceramic driver 6 is connected with a small supporting moment 5, and the small supporting moment 5 presses a lower spherical top head 4; the hemispherical top of the lower spherical top 4 is embedded into the arc-shaped groove of the upper transmission flat plate 3, the lower spherical top 4 is tangent to the top of the arc-shaped groove, and the connecting line of the circle centers of the lower spherical top 4 and the arc-shaped groove on the section plane is vertical to the lower static flat plate 8; the upper transmission flat plate 3 is arranged in a circular groove of the upper moving flat plate 2, and the springs 7 are parallel to the piezoelectric ceramic driver 6 and are uniformly distributed on the spring supports 1 of the upper moving flat plate 2 and the lower static flat plate 8 in an angle of 120 degrees.
The displacement angle information of the three-degree-of-freedom nanometer positioning platform can be read in real time by an optical interference method, according to the equal thickness interference principle, when monochromatic parallel light is used for vertically irradiating the glass wedge, because the monochromatic light can respectively generate two beams of reflected light on the upper surface and the lower surface of the wedge, the two beams of reflected light can generate interference on the upper surface of the glass wedge, and the interference intensity is as follows:
wherein IR1And IR2The two beams of reflected light have light intensity, delta is the optical path difference between the reflected light after the reflected light passes through the medium, and lambda is the wavelength of the incident light. In the course of the actual experiment, IR1>>IR2Then, equation (1) can be simplified as:
wherein the optical path difference delta is 2n (d)kx)/L, n is the refractive index of the medium, dkIf the measured object is displaced and the thickness of the medium at the position L is changed, the kth-level interference fringe on the upper surface of the medium moves forwards △ L, so that when the upper surface is lifted △ d:
therefore, if the interference is measuredThe micro-displacement measurement model is completely determined by determining the refractive index n of the medium according to the information of the interference fringes in the spectrum, and d can be calculated according to the width of the interference fringeskThereby determining the amount of fine displacement △ d.
The measuring device comprises a laser 9 for providing a stable monochromatic coherent light source for the measuring device, wherein the output laser of the laser 9 is aligned to the reflecting surface of the reflector 12 at an angle of 45 degrees, the output laser is reflected by the reflecting device 12 and vertically transmitted into the wedge interference device to form a light path 121, and the light path 121 is aligned to the glass wedge of the wedge interference device.
The glass wedge of the wedge interference device 10 is connected with an object to be measured 11, the object to be measured 11 is placed on the three-degree-of-freedom nanometer positioning platform, and the three-degree-of-freedom nanometer positioning platform is connected with a voltage-stabilized power supply; laser incident along the first light path 121 is transmitted through the wedge interference device 10 to form interference fringes on the upper surface of the glass wedge, and then an interference image is transmitted to the lens group 13 through the reflector 12 and the second light path 122 and then output to the CMOS imaging 14, so that a complete laser interference image is obtained; the output end of the CMOS imaging 14 is connected with a data processing system 15; the data processing system 15 calculates the micro displacement of the object to be measured according to a micro displacement measurement model, wherein the micro displacement measurement model specifically comprises:
wherein, IinterTo interference intensity, IR1Is the intensity of the reflected light, λ is the wavelength of the incident light, n is the refractive index of the medium, dkThe thickness between the upper interface and the lower interface of the medium at the position corresponding to the kth-order interference fringe, L is the glass wedge length, and △ L is the distance that the kth-order interference fringe on the upper surface of the medium will move forward.
By measuring information of interference fringes in its interference spectrum (interference intensity I)interIntensity of reflected light IR1The distance which the k-th order interference fringe on the upper surface of the medium moves forwards), the refractive index n of the medium is determined, the micro-displacement measurement model is completely determined, and d can be calculated according to the width of the interference fringekFromTo determine the micro displacement △ d1、△d2、△d3Namely the output displacements of the three piezoelectric ceramic drivers respectively.
According to △ d1、△d2、△d3That is, the z and θ of the three-degree-of-freedom positioning platform can be obtained by analyzing the kinematics and kinematics of the platformx、θy。
In order to analyze the kinematic characteristics of the platform, a motion diagram of the platform is drawn (taking the movable plate 2) as shown in fig. 5, and (a) in fig. 5 is the initial position of the movable plate 2 in the platform. The three points a, B, and C respectively represent the positions of the three piezoelectric ceramic actuators 3, 2, and 1 (the distance from the center of the movable plate 2 is r), and perpendicular lines (corresponding to the lines connecting the three points with the center of the movable plate) are respectively drawn to obtain points a1, B1, and C1 (where the line segment AA1 is L), and the kinematic characteristics of the three-degree-of-freedom nano-positioning platform can be equivalent to those of the line segments AA1, BB1, and CC 1. Under the combined action of the three piezoelectric ceramic drivers, the movable plate 2 of the positioning platform is supposed to move along the Z-axis direction to generate a displacement Z and rotate around the X-axis to generate a thetaxFinally, a rotation about the y-axis produces a θyAnd finally, the position of fig. 5(b) is reached, in the coordinate O-XY, the coordinates of the point O, A, A1 are (0,0), (r, 0) and (r, -L), respectively, and when the above three-dimensional platform is moved by the driving of the piezoceramic driver, the position of the center O is moved to O ', the coordinates are (x, y, α), and the points a and a1 are moved to a ' and a1 ', respectively.
From the geometrical relationship in FIG. 5(a), points A (-r, 0), A1(-r, -L)
In the O-XY coordinate system, the coordinates of the point A 'and the point A1' are respectively obtained according to the geometrical relationship:
(Ax’，Ay’)＝(x-rcosα，y+rsinα)
(A1x’A1y’)＝(Ax’-Lsinα,Ay’-Lcosα)
from the motion characteristics, it can be derived:
A1x’＝Ax’-Lsinα＝A1x＝-r
thus deltaA1'-A1＝||A1'-A1||＝L+y+rsinα-Lcosα
Like
So that:
And because of
Thus:
T-1can be expressed as:
from the spatial kinematics model
Therefore, it is not only easy to use
The rotation angle of the three-degree-of-freedom nanometer positioning platform is in the mu rad level, and the resolution is in the n rad level:
therefore, it is not only easy to use
△d1、△d2、△d3The micro displacement of the three piezoelectric ceramic drivers C, B, A; r is the distance from the piezoelectric ceramic driver to the circle center of the movable platform 2.
The measuring device for reading the displacement angle information of the micro-motion inclined platform in real time comprises a light path part and a micro-displacement measuring part, wherein a laser provides a stable monochromatic coherent light source for the measuring device, laser forms interference fringes on the upper surface of a glass wedge through the glass wedge, and then an interference image is transmitted to an optical imaging system through a reflector so as to obtain a complete laser interference image. The displacement measuring method comprises the steps that a voltage-stabilizing voltage source provides stable voltage for a displacement platform, the change of the displacement platform is controlled through the change of the voltage, when the displacement changes, the measured micro displacement causes the change of the wedge angle of a wedge interference device through a mechanical structure, so that the space cycle length of a laser interference pattern is changed, and an imaging system and a data processing system extract the length information and calculate the measured displacement.
The utility model discloses the piezoceramics driver that three degree of freedom nanometer location platforms used in well adopts voltage drive, and closed loop resolution is 0.1nm, and the linearity is 0.03%, and driving voltage is-30V- +150V, and the biggestThe load is 1kg, a voltage source is used as a power supply of the piezoelectric ceramic driver, the output displacement of the piezoelectric ceramic driver can be controlled by changing the control voltage of the piezoelectric ceramic driver, the maximum displacement resolution of the piezoelectric ceramic driver can reach 0.1nm, when the three piezoelectric ceramic drivers have the same displacement and are in the same direction, the upper moving plate can be regarded as only moving without corresponding rotation, and the maximum resolution is consistent with that of a single piezoelectric ceramic driver and can reach 0.1 nm. When only one piezoelectric ceramic driver outputs displacement, the upper flat plate can be regarded as rotating, and z and theta can be calculated according to the formula (5)x、θyTheta of whichx、θyThe maximum resolution can reach 0.1nm/r theoretically, when r is>At 10mm, the rotation resolution of the platform can reach 10nrad, and the maximum resolution of z can reach 0.1nm theoretically.
The utility model has the advantages that: the utility model provides a three degree of freedom nanometer location platforms through optical interference method real-time reading displacement rotation information possess very high motion precision on the one hand, its thetax、θyThe maximum resolution can reach 0.1nm/r, and the maximum resolution of z can reach 0.1 nm. On the other hand, the difference from the traditional precision positioning platform is that the motion information (theta x, theta y, z) can be read in real time by an optical interference method, the whole system is very simple to realize, the read motion information can be fed back to a closed-loop control system in real time, and the platform can be controlled more precisely and conveniently.
Drawings
Fig. 1a and 1b are schematic structural diagrams of an embodiment of the present invention.
Fig. 2 is a schematic structural view of the three-degree-of-freedom nano positioning platform of the present invention.
Fig. 3 is a sectional view of the three-degree-of-freedom nano positioning platform of the present invention.
Fig. 4 is the utility model discloses read three degree of freedom nanometer fine motion tilt platform displacement angle information's measuring device in real time.
FIG. 4a is a schematic diagram of the reflected light path of the glass wedge of the wedge interference device of the present measurement apparatus.
Fig. 4b is a schematic diagram illustrating calculation of the micro displacement amount of the object to be measured in the present measuring apparatus.
Fig. 5a and 5b are schematic diagrams of motion models of the three-degree-of-freedom nano positioning platform.
Part number in the figure:
1. spring support 2, upper moving flat plate 3, upper arc groove transmission flat plate 4 and lower spherical plug
5. Small support moment 6 for fixing spherical top, piezoelectric ceramic driver 7 and spring
8. Lower static flat plate 9, laser 10, wedge interference device 11 and object to be measured
12. Reflecting mirror (including light path first light path 121 and second light path 122) 13, lens group
14. CMOS imaging 15 and data processing system
Detailed Description
The technical scheme of the utility model is further explained in the following with the attached drawings.
The utility model discloses a three degree of freedom nanometer location platforms through optical interference method real-time reading displacement rotation information, including a three freedom nanometer location platforms that bear the weight of the testee and make the testee produce the displacement and the measuring device who reads the testee displacement angle information in real time:
the three-degree-of-freedom nanometer positioning platform comprises an upper transmission flat plate 2 and a lower static flat plate 8, wherein three transmission assemblies are arranged between the upper moving flat plate 2 and the lower static flat plate 8, the three transmission assemblies are uniformly distributed on the circumference passing through the three transmission assemblies at 120 degrees, each transmission assembly comprises a piezoelectric ceramic driver 6 vertically arranged on the lower static flat plate 8, the top of the piezoelectric ceramic driver 6 is connected with a small support moment 5, and the small support moment 5 presses a lower spherical top head 4 downwards, and the three-degree-of-freedom nanometer positioning platform is characterized in that: the hemispherical top of the lower spherical top 4 is embedded into the arc-shaped groove of the upper transmission flat plate 3, the lower spherical top 4 is tangent to the top of the arc-shaped groove, and the connecting line of the circle centers of the lower spherical top 4 and the arc-shaped groove on the section plane is vertical to the lower static flat plate 8; the upper transmission flat plate 3 is arranged in a circular groove of the upper movable flat plate 2, and the springs 7 are parallel to the piezoelectric ceramic driver 6 and are uniformly distributed on the spring support 1 of the upper movable flat plate 2 and the lower static flat plate 8 in an angle of 120 degrees;
the measuring device comprises a laser 9 for providing a stable monochromatic coherent light source for the measuring device, wherein the output laser of the laser 9 is aligned to the reflecting surface of a reflecting device 12 at an angle of 45 degrees, the output laser is reflected by the reflecting device and vertically transmitted into a wedge interference device 10 to form a first light path 121, and the first light path 121 is aligned to the glass wedge of the wedge interference device;
the glass wedge of the wedge interference device 10 is connected with an object to be measured 11, the object to be measured 11 is placed on the three-degree-of-freedom nanometer positioning platform, and the three-degree-of-freedom nanometer positioning platform is connected with a voltage-stabilized power supply; the laser of the first optical path 121 forms interference fringes on the upper surface of the glass wedge through the wedge interference device, and then transmits an interference image to the optical imaging system 13 through the reflection device 12 and the second optical path 122 so as to obtain a complete laser interference image; the output end of the optical imaging system 13 is connected with a data processing system 14.
When the spherical plug is at the initial position, the lower spherical plug 4 is vertically embedded in the arc groove on the bottom surface of the upper arc groove transmission flat plate 3, the lower spherical plug 4 is installed on the piezoelectric ceramic driver in actual use, and the lower spherical plug 4 can slide in the arc groove in the positive and negative directions by stretching and shrinking of the piezoelectric ceramic as shown in fig. 1a and fig. 1b, so that the upper transmission flat plate 2 can move and rotate.
The utility model discloses mainly adopt voltage to drive piezoceramics driver, closed loop resolution ratio is 0.1nm, and the linearity is 0.03%, and driving voltage is-30V- +150V, and maximum load is 1kg, uses the power supply of voltage source as piezoceramics driver. Initially, assuming that a forward voltage is applied to a single piezoelectric ceramic driver 6 through a power supply, the single piezoelectric ceramic driver 6 is stretched in the forward direction of the z axis, so as to push the lower spherical top 4 to slide forward in the arc-shaped groove of the transmission flat plate 3 as shown in fig. 1b, thereby realizing forward rotation of the upper flat plate 2, the forward rotation of the upper flat plate 2 pushes the forward rotation of the object to be measured 11, thereby causing the relative position of the wedge interference device 10 to change as shown in fig. 4, 4a and 4b, thereby changing the optical path, the laser transmission of the optical path 121 forms interference fringes on the upper surface of the glass wedge through the wedge interference device 10, and then transmits the interference image to the lens group 13 through the reflection device 12 and the optical path 122, and then outputs the interference image to the CMOS imaging 14, thereby obtaining a complete laser interference image; the output end of the CMOS imaging 14 is connected with a data processing system 15; the data processing system 15 calculates the micro displacement of the object to be measured according to a micro displacement measurement model, wherein the micro displacement measurement model specifically comprises:
by measuring the information of interference fringes in the interference spectrum (the interference intensity I _ inter, the reflected light intensity I _ R1 and the distance of the forward movement of the kth-level interference fringe on the upper surface of the medium), the refractive index n of the medium is determined, and then the micro-displacement measurement model is completely determined, and d can be calculated by the width of the interference fringeskSo as to respectively determine the micro displacement △ d of the three piezoelectric ceramic drivers1、△d2、△d3。
Then according to the transformation matrix N, the z and theta of the three-degree-of-freedom nano positioning platform can be respectively solvedx、θy。
Can calculate z and theta in real timex、θySo as to read the motion information of the three-freedom-degree nanometer positioning platform in real time, wherein thetax、θyThe maximum resolution of the optical sensor can reach 0.1nm/r, the maximum resolution of z can reach 0.1nm, (△ d)1、△d2、△d3The micro displacement of the three piezoelectric ceramic drivers C, B, A; r is the distance from the piezoelectric ceramic driver to the circle center of the movable platform 2. )
The embodiments described in this specification are merely illustrative of implementations of the inventive concepts, and the scope of the invention should not be considered limited to the specific forms set forth in the embodiments, but rather the scope of the invention is intended to include equivalent technical means as would be understood by those skilled in the art from the inventive concepts.
Claims (1)
1. The three-freedom-degree nanometer positioning platform for reading displacement rotation information in real time is characterized by comprising a three-freedom-degree nanometer positioning platform for bearing a measured object and enabling the measured object to generate displacement and a measuring device for reading measured displacement angle information in real time:
the three-degree-of-freedom nanometer positioning platform comprises an upper movable flat plate (2) and a lower static flat plate (8), three transmission assemblies are arranged between the upper movable flat plate (2) and the lower static flat plate (8), the three transmission assemblies are uniformly distributed on the circumference passing through the three transmission assemblies at 120 degrees, each transmission assembly comprises a piezoelectric ceramic driver (6) vertically installed on the lower static flat plate (8), the top of the piezoelectric ceramic driver (6) is connected with a small supporting moment (5), and the small supporting moment (5) presses a lower spherical top head (4) downwards; the hemispherical top of the lower spherical top (4) is embedded into the arc-shaped groove of the upper arc-shaped groove transmission flat plate (3), the lower spherical top (4) is tangent to the top of the arc-shaped groove, and the connecting line of the circle centers of the lower spherical top (4) and the arc-shaped groove on the section plane is vertical to the lower static flat plate (8); the upper arc groove transmission flat plate (3) is arranged in a circular groove of the upper movable flat plate (2), and the springs (7) are parallel to the piezoelectric ceramic driver (6) and are uniformly distributed on the spring supports (1) of the upper movable flat plate (2) and the lower static flat plate (8) at an angle of 120 degrees;
the measuring device comprises a laser (9) which provides a stable monochromatic coherent light source for the measuring device, wherein output laser of the laser (9) is aligned to a reflecting surface of a reflector (12) at an angle of 45 degrees, the output laser is reflected by the reflector (12) and vertically transmitted into a wedge interference device to form a light path (121), and the light path (121) is aligned to a glass wedge of the wedge interference device;
the glass wedge of the wedge interference device (10) is connected with a measured object (11), the measured object (11) is placed on the three-degree-of-freedom nanometer positioning platform, and the three-degree-of-freedom nanometer positioning platform is connected with a voltage-stabilized power supply; laser incident along a first light path (121) is transmitted through a wedge interference device (10) to form interference fringes on the upper surface of a glass wedge, then an interference image is transmitted to a lens group (13) through a reflector (12) and a second light path (122) and then output to a CMOS imaging (14), and therefore a complete laser interference image is obtained; the output end of the CMOS imaging (14) is connected with a data processing system (15); the data processing system (15) calculates the micro displacement of the object to be measured according to a micro displacement measurement model, wherein the micro displacement measurement model is as follows:
wherein, IinterTo interference intensity, IR1Is the intensity of the reflected light, λ is the wavelength of the incident light, n is the refractive index of the medium, dkThe thickness between the upper interface and the lower interface of the medium at the position corresponding to the kth-order interference fringe, L is the glass wedge length, and △ L is the distance that the kth-order interference fringe on the upper surface of the medium will move forward.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110243290A (en) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method |
| CN113513943A (en) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110243290A (en) * | 2019-04-03 | 2019-09-17 | 浙江工业大学 | Read the Three Degree Of Freedom nanopositioning stage of displacement rotation information in real time by optical interference method |
| CN110243290B (en) * | 2019-04-03 | 2023-11-17 | 浙江工业大学 | Three-degree-of-freedom nanometer positioning platform capable of reading displacement rotation information in real time through optical interference method |
| CN113513943A (en) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
| CN113513943B (en) * | 2021-04-09 | 2022-06-17 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |