CN113513943A - Piezoelectric-driven two-dimensional micro-motion imaging platform - Google Patents
Piezoelectric-driven two-dimensional micro-motion imaging platform Download PDFInfo
- Publication number
- CN113513943A CN113513943A CN202110381841.1A CN202110381841A CN113513943A CN 113513943 A CN113513943 A CN 113513943A CN 202110381841 A CN202110381841 A CN 202110381841A CN 113513943 A CN113513943 A CN 113513943A
- Authority
- CN
- China
- Prior art keywords
- side wall
- upright column
- upright
- tip cone
- fixing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F41—WEAPONS
- F41G—WEAPON SIGHTS; AIMING
- F41G3/00—Aiming or laying means
- F41G3/22—Aiming or laying means for vehicle-borne armament, e.g. on aircraft
Abstract
The invention discloses a piezoelectric-driven two-dimensional micro-motion imaging platform which comprises a sighting telescope and an adjusting module, wherein the sighting telescope is arranged on the adjusting module and is adjusted by the adjusting module to move for imaging, and the adjusting module comprises a shell and four driving units; the driving units comprise connecting rods, piezoelectric stacks and two tip cones and can freely stretch and retract. The shell comprises two fixed plates and four upright posts; four drive unit set up respectively between four stands, and set up the recess on four stands and form gentle hinge, make two-dimentional fine motion displacement take place between two fixed plates through four drive unit of drive. The control platform of the aerial sighting telescope is simple in structure and flexible in arrangement, and solves the problems of complex structure, insufficient precision and the like of the existing control platform of the aerial sighting telescope.
Description
Technical Field
The invention relates to the technical field of piezoelectric driving, in particular to a piezoelectric-driven two-dimensional micro-motion imaging platform.
Background
At present, all advanced fire control systems in the world are almost provided with driving control devices, such as sighting devices of ground cannons and air guns, night vision sighting devices of tanks, anti-pilot systems for navy and the like, which are pets of modern wars. With the further development of the above-mentioned fields, a driving device capable of realizing large-scale and nano-scale positioning accuracy becomes a bottleneck restricting the further development of the above-mentioned technical fields, and has received extensive attention and research. In modern air combat, the rapid and accurate positioning of aerial sighting telescope has become an effective means for meeting the requirements of novel fighter fighters of 'first enemy firing and first hit' and improving the fighting performance of the novel fighter.
Although the traditional electromagnetic driving technology is mature, the problems that the positioning accuracy is insufficient, the response speed is slow, the electromagnetic interference is serious and the like are difficult to solve when the airborne tracking aiming system is used for positioning still exist, and therefore the novel driving principle, particularly the piezoelectric driving technology, is greatly applied to the airborne tracking aiming system. The piezoelectric driving technology mainly utilizes the inverse piezoelectric effect of a piezoelectric material to realize the conversion of electric energy to mechanical energy, and has the advantages of flexible and various structural design, no electromagnetic interference, high response speed, high positioning precision and the like due to the principle characteristics of the piezoelectric driving technology.
In applications such as airborne tracking and aiming systems, optical fiber docking, cell manipulation, microelectronic device processing, etc., a platform capable of realizing two-dimensional movement has wide application requirements. However, the existing two-degree-of-freedom object stage driven by electromagnetism generally has the problems of low positioning precision and poor dynamic characteristics, so that the piezoelectric-driven two-dimensional micro-motion imaging platform capable of realizing large-scale and nano-scale positioning precision has a very wide application prospect.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric-driven two-dimensional micro-motion imaging platform aiming at the defects involved in the background technology.
The invention adopts the following technical scheme for solving the technical problems:
the piezoelectric-driven two-dimensional micro-motion imaging platform comprises a sighting telescope and an adjusting module, wherein the sighting telescope is arranged on the adjusting module and is adjusted by the adjusting module to move for imaging, and the adjusting module comprises a shell and first to fourth driving units;
the first to fourth driving units comprise a first tip cone, a second tip cone, a connecting rod and a piezoelectric stack, wherein the first tip cone and the second tip cone have the same structure and are both cones; the piezoelectric stack is a cylinder, a through hole for the connecting rod to pass through is formed in the piezoelectric stack along the axis, and one end of the piezoelectric stack is coaxially and fixedly connected with the end face of the second tip cone; one end of the connecting rod is coaxially and fixedly connected with the end face of the first tip cone, and the other end of the connecting rod extends into the through hole of the piezoelectric stack from one end, far away from the second tip cone, of the piezoelectric stack; the connecting rod is in clearance fit with the piezoelectric stack and can freely slide mutually;
the shell comprises a first fixing plate, a second fixing plate and first to fourth upright posts, wherein the first fixing plate and the second fixing plate are rectangular plates with the same size; two ends of the first to fourth upright columns are respectively and vertically fixedly connected with the first fixing plate and the second fixing plate at four corners thereof in a one-to-one correspondence manner, so that the shell is in a cuboid shape; the first upright column, the second upright column, the third upright column and the fourth upright column are made of elastic materials, the first upright column and the third upright column are arranged on one diagonal line of the first fixing plate, and the second upright column and the fourth upright column are arranged on the other diagonal line of the first fixing plate; the first to fourth upright columns comprise first to fourth side walls which are sequentially connected end to end;
the center of the first fixing plate is provided with a mounting hole for mounting a sighting telescope, and the center of the second fixing plate is provided with a perspective hole for allowing light in the sighting telescope to pass through for imaging;
the intersection point of the axis of the first upright column and the first fixing plate is taken as an origin, the straight line where the connecting lines of the first upright column and the second upright column on the first fixing plate are located is an X axis, and the straight line where the connecting lines of the first upright column and the fourth upright column on the first fixing plate are located is a Y axis; the first fixing plate is positioned above the second fixing plate;
the first side wall and the third side wall of each of the first upright column, the second upright column, the third upright column and the fourth upright column are parallel to the X axis, and the second side wall and the fourth side wall of each of the first upright column, the second upright column and the fourth upright column are parallel to the Y axis; the second side wall of the first upright column is opposite to the fourth side wall of the second upright column, the third side wall of the second upright column is opposite to the first side wall of the third upright column, the fourth side wall of the third upright column is opposite to the second side wall of the fourth upright column, and the first side wall of the fourth upright column is opposite to the third side wall of the first bead;
the upper parts of the first side wall, the first side wall and the fourth side wall of the first upright post are respectively provided with a semi-cylindrical groove which is positioned on the same plane, so that flexible hinges capable of bending along the X axis and the Y axis are formed at the upper parts of the first upright post;
the lower parts of the first side wall, the second side wall and the fourth side wall of the third upright post are respectively provided with a groove which is in a semi-cylindrical shape and is in the same plane, so that a flexible hinge capable of bending along an X axis and a Y axis is formed at the lower part of the third upright post;
the upper parts of the first side wall and the third side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, and the lower parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
the upper parts of the first side wall and the third side wall of the fourth upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, and the upper parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
conical grooves are formed in the lower portion of the second side wall of the first upright column and the upper portion of the fourth side wall of the second upright column, a first tip cone of the first driving unit is abutted to the conical groove in the lower portion of the second side wall of the first upright column, and a second tip cone of the first driving unit is abutted to the conical groove in the upper portion of the fourth side wall of the second upright column;
conical grooves are formed in the lower portion of the third side wall of the second upright column and the upper portion of the first side wall of the third upright column, a first tip cone of the second driving unit is abutted against the conical groove in the lower portion of the third side wall of the second upright column, and a second tip cone of the second driving unit is abutted against the conical groove in the upper portion of the first side wall of the third upright column;
conical grooves are formed in the upper portion of the fourth side wall of the third upright column and the lower portion of the second side wall of the fourth upright column, a first tip cone of the third driving unit is abutted against the conical groove in the upper portion of the fourth side wall of the third upright column, and a second tip cone of the third driving unit is abutted against the conical groove in the lower portion of the first side wall of the third upright column;
the upper part of the first side wall of the fourth upright column and the lower part of the third side wall of the first upright column are both provided with conical grooves, a first tip cone of the fourth driving unit is propped against the conical groove at the upper part of the first side wall of the fourth upright column, and a second tip cone of the fourth driving unit is propped against the conical groove at the lower part of the third side wall of the first upright column.
As a further optimization scheme of the piezoelectric-driven two-dimensional micro-motion imaging platform, the first upright column, the second upright column, the third upright column and the fourth upright column are all made of elastic steel.
As a further optimization scheme of the piezoelectric-driven two-dimensional micro-motion imaging platform, threaded holes are formed in the centers of the end faces of the first tip cone and the second tip cone; one end of the piezoelectric stack is provided with an external thread which is fixedly connected with a threaded hole on the end face of the second tip cone through threaded connection; and one end of the connecting rod is provided with an external thread, and the external thread is fixedly connected with the threaded hole on the end surface of the first tip cone through threaded connection.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
the invention utilizes the characteristic that the piezoelectric stacks in the four directions which are perpendicular to each other extend after being electrified, the shell with the flexible hinges arranged on the periphery is deformed by the pressure of the piezoelectric stacks, the position of the sighting telescope moves along with the shell, and then the position of the sighting telescope is accurately changed.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the coupling rod and the first tip cone of the present invention;
FIG. 3 is a schematic view of the structure of the housing of the present invention;
FIG. 4 is a schematic comparison of the deformation of the present invention along the X-axis;
FIG. 5 is a schematic diagram showing the variation of the voltage signals in the X-axis direction and the Y-axis direction with time during driving of the present invention.
In the figure, 1-sighting telescope, 2-first fixing plate, 3-second fixing plate, 4-first side wall of first upright post, 5-fourth side wall of first upright post, 6-first side wall of second upright post, 7-fourth driving unit, 8-first driving unit, 9-first tip cone, 10-connecting rod, 11-mounting hole, 12-perspective hole, 13-semi-cylindrical groove on second side wall of third upright post, and 14-semi-cylindrical groove on third side wall of second upright post.
Detailed Description
The technical scheme of the invention is further explained in detail by combining the attached drawings:
the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
As shown in FIG. 1, the invention discloses a piezoelectric-driven two-dimensional micro-motion imaging platform, which comprises a sighting telescope and an adjusting module, wherein the sighting telescope is arranged on the adjusting module and is adjusted by the adjusting module to move for imaging, and the adjusting module comprises a shell and first to fourth driving units;
the first to fourth driving units comprise a first tip cone, a second tip cone, a connecting rod and a piezoelectric stack, wherein the first tip cone and the second tip cone have the same structure and are both cones; the piezoelectric stack is a cylinder, a through hole for the connecting rod to pass through is formed in the piezoelectric stack along the axis, and one end of the piezoelectric stack is coaxially and fixedly connected with the end face of the second tip cone; one end of the connecting rod is coaxially and fixedly connected with the end face of the first tip cone, as shown in fig. 2, and the other end of the connecting rod extends into the through hole of the piezoelectric stack from one end, far away from the second tip cone, of the piezoelectric stack; the connecting rod is in clearance fit with the piezoelectric stack and can freely slide mutually;
as shown in fig. 3, the housing includes a first fixing plate, a second fixing plate, and first to fourth pillars, wherein the first fixing plate and the second fixing plate are rectangular plates with the same size; two ends of the first to fourth upright columns are respectively and vertically fixedly connected with the first fixing plate and the second fixing plate at four corners thereof in a one-to-one correspondence manner, so that the shell is in a cuboid shape; the first upright column, the second upright column, the third upright column and the fourth upright column are made of elastic materials, preferably made of elastic steel, and are arranged on one diagonal line of the first fixing plate, and the second upright column and the fourth upright column are arranged on the other diagonal line of the first fixing plate; the first to fourth upright columns comprise first to fourth side walls which are sequentially connected end to end;
the center of the first fixing plate is provided with a mounting hole for mounting a sighting telescope, and the center of the second fixing plate is provided with a perspective hole for allowing light in the sighting telescope to pass through for imaging;
the intersection point of the axis of the first upright column and the first fixing plate is taken as an origin, the straight line where the connecting lines of the first upright column and the second upright column on the first fixing plate are located is an X axis, and the straight line where the connecting lines of the first upright column and the fourth upright column on the first fixing plate are located is a Y axis; the first fixing plate is positioned above the second fixing plate;
the first side wall and the third side wall of each of the first upright column, the second upright column, the third upright column and the fourth upright column are parallel to the X axis, and the second side wall and the fourth side wall of each of the first upright column, the second upright column and the fourth upright column are parallel to the Y axis; the second side wall of the first upright column is opposite to the fourth side wall of the second upright column, the third side wall of the second upright column is opposite to the first side wall of the third upright column, the fourth side wall of the third upright column is opposite to the second side wall of the fourth upright column, and the first side wall of the fourth upright column is opposite to the third side wall of the first bead;
the upper parts of the first side wall, the first side wall and the fourth side wall of the first upright post are respectively provided with a semi-cylindrical groove which is positioned on the same plane, so that flexible hinges capable of bending along the X axis and the Y axis are formed at the upper parts of the first upright post;
the lower parts of the first side wall, the second side wall and the fourth side wall of the third upright post are respectively provided with a groove which is in a semi-cylindrical shape and is in the same plane, so that a flexible hinge capable of bending along an X axis and a Y axis is formed at the lower part of the third upright post;
the upper parts of the first side wall and the third side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, and the lower parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
the upper parts of the first side wall and the third side wall of the fourth upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, and the upper parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
conical grooves are formed in the lower portion of the second side wall of the first upright column and the upper portion of the fourth side wall of the second upright column, a first tip cone of the first driving unit is abutted to the conical groove in the lower portion of the second side wall of the first upright column, and a second tip cone of the first driving unit is abutted to the conical groove in the upper portion of the fourth side wall of the second upright column;
conical grooves are formed in the lower portion of the third side wall of the second upright column and the upper portion of the first side wall of the third upright column, a first tip cone of the second driving unit is abutted against the conical groove in the lower portion of the third side wall of the second upright column, and a second tip cone of the second driving unit is abutted against the conical groove in the upper portion of the first side wall of the third upright column;
conical grooves are formed in the upper portion of the fourth side wall of the third upright column and the lower portion of the second side wall of the fourth upright column, a first tip cone of the third driving unit is abutted against the conical groove in the upper portion of the fourth side wall of the third upright column, and a second tip cone of the third driving unit is abutted against the conical groove in the lower portion of the first side wall of the third upright column;
the upper part of the first side wall of the fourth upright column and the lower part of the third side wall of the first upright column are both provided with conical grooves, a first tip cone of the fourth driving unit is propped against the conical groove at the upper part of the first side wall of the fourth upright column, and a second tip cone of the fourth driving unit is propped against the conical groove at the lower part of the third side wall of the first upright column.
Threaded holes are formed in the centers of the end faces of the first tip cone and the second tip cone; one end of the piezoelectric stack is provided with an external thread which is fixedly connected with a threaded hole on the end face of the second tip cone through threaded connection; and one end of the connecting rod is provided with an external thread, and the external thread is fixedly connected with the threaded hole on the end surface of the first tip cone through threaded connection.
The first driving unit and the third driving unit are transverse driving units, the second driving unit and the fourth driving unit are longitudinal driving units, and the camera lens movement is divided into the following steps:
step one, applying direct current voltage signals to the piezoelectric stacks of the transverse driving unit and the piezoelectric stacks of the longitudinal driving unit so as to adjust pre-pressure between the piezoelectric stacks and the elastic shell;
secondly, applying slowly rising direct current excitation voltage signals to the piezoelectric stacks of the transverse driving unit and the piezoelectric stacks of the longitudinal driving unit, extending the piezoelectric stacks, driving the positions above the shell to deform towards the positive direction of the X axis and the positive direction of the Y axis under the action of thrust, driving the sighting telescope to slowly move to the limit positions along the positive directions of the X axis and the Y axis by the deformation above the shell, and generating linear displacement output along the positive direction, as shown in fig. 4;
and step three, applying a rapidly-reduced excitation voltage signal to the piezoelectric stacks of the transverse driving unit and the longitudinal driving unit, gradually recovering to the initial shape, changing the shape of the shell to the initial position under the action of plasticity, returning the sighting telescope to the initial position along with the shell, and finally keeping the sighting telescope still under the action of inertia.
And step four, repeating the step two to the step three to realize that the sighting telescope does the ultra-precise linear motion along the X axis and the Y axis.
FIG. 5 is a schematic diagram showing the variation of the voltage signals in the X-axis direction and the Y-axis direction with time during driving of the present invention.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The piezoelectric driving two-dimensional micro-motion imaging platform comprises a sighting telescope and an adjusting module, wherein the sighting telescope is arranged on the adjusting module, and the adjusting module is used for adjusting the sighting telescope to move for imaging;
the first to fourth driving units comprise a first tip cone, a second tip cone, a connecting rod and a piezoelectric stack, wherein the first tip cone and the second tip cone have the same structure and are both cones; the piezoelectric stack is a cylinder, a through hole for the connecting rod to pass through is formed in the piezoelectric stack along the axis, and one end of the piezoelectric stack is coaxially and fixedly connected with the end face of the second tip cone; one end of the connecting rod is coaxially and fixedly connected with the end face of the first tip cone, and the other end of the connecting rod extends into the through hole of the piezoelectric stack from one end, far away from the second tip cone, of the piezoelectric stack; the connecting rod is in clearance fit with the piezoelectric stack and can freely slide mutually;
the shell comprises a first fixing plate, a second fixing plate and first to fourth upright posts, wherein the first fixing plate and the second fixing plate are rectangular plates with the same size; two ends of the first to fourth upright columns are respectively and vertically fixedly connected with the first fixing plate and the second fixing plate at four corners thereof in a one-to-one correspondence manner, so that the shell is in a cuboid shape; the first upright column, the second upright column, the third upright column and the fourth upright column are made of elastic materials, the first upright column and the third upright column are arranged on one diagonal line of the first fixing plate, and the second upright column and the fourth upright column are arranged on the other diagonal line of the first fixing plate; the first to fourth upright columns comprise first to fourth side walls which are sequentially connected end to end;
the center of the first fixing plate is provided with a mounting hole for mounting a sighting telescope, and the center of the second fixing plate is provided with a perspective hole for allowing light in the sighting telescope to pass through for imaging;
the intersection point of the axis of the first upright column and the first fixing plate is taken as an origin, the straight line where the connecting lines of the first upright column and the second upright column on the first fixing plate are located is an X axis, and the straight line where the connecting lines of the first upright column and the fourth upright column on the first fixing plate are located is a Y axis; the first fixing plate is positioned above the second fixing plate;
the first side wall and the third side wall of each of the first upright column, the second upright column, the third upright column and the fourth upright column are parallel to the X axis, and the second side wall and the fourth side wall of each of the first upright column, the second upright column and the fourth upright column are parallel to the Y axis; the second side wall of the first upright column is opposite to the fourth side wall of the second upright column, the third side wall of the second upright column is opposite to the first side wall of the third upright column, the fourth side wall of the third upright column is opposite to the second side wall of the fourth upright column, and the first side wall of the fourth upright column is opposite to the third side wall of the first bead;
the upper parts of the first side wall, the first side wall and the fourth side wall of the first upright post are respectively provided with a semi-cylindrical groove which is positioned on the same plane, so that flexible hinges capable of bending along the X axis and the Y axis are formed at the upper parts of the first upright post;
the lower parts of the first side wall, the second side wall and the fourth side wall of the third upright post are respectively provided with a groove which is in a semi-cylindrical shape and is in the same plane, so that a flexible hinge capable of bending along an X axis and a Y axis is formed at the lower part of the third upright post;
the upper parts of the first side wall and the third side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, and the lower parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
the upper parts of the first side wall and the third side wall of the fourth upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the third upright post, and the upper parts of the second side wall and the fourth side wall of the second upright post are provided with semi-cylindrical grooves which are in the same plane with the grooves on the side wall of the first upright post, so that the upper part of the second upright post is provided with a flexible hinge which can be bent along the Y axis, and the lower part of the second upright post is provided with a flexible hinge which can be bent along the X axis;
conical grooves are formed in the lower portion of the second side wall of the first upright column and the upper portion of the fourth side wall of the second upright column, a first tip cone of the first driving unit is abutted to the conical groove in the lower portion of the second side wall of the first upright column, and a second tip cone of the first driving unit is abutted to the conical groove in the upper portion of the fourth side wall of the second upright column;
conical grooves are formed in the lower portion of the third side wall of the second upright column and the upper portion of the first side wall of the third upright column, a first tip cone of the second driving unit is abutted against the conical groove in the lower portion of the third side wall of the second upright column, and a second tip cone of the second driving unit is abutted against the conical groove in the upper portion of the first side wall of the third upright column;
conical grooves are formed in the upper portion of the fourth side wall of the third upright column and the lower portion of the second side wall of the fourth upright column, a first tip cone of the third driving unit is abutted against the conical groove in the upper portion of the fourth side wall of the third upright column, and a second tip cone of the third driving unit is abutted against the conical groove in the lower portion of the first side wall of the third upright column;
the upper part of the first side wall of the fourth upright column and the lower part of the third side wall of the first upright column are both provided with conical grooves, a first tip cone of the fourth driving unit is propped against the conical groove at the upper part of the first side wall of the fourth upright column, and a second tip cone of the fourth driving unit is propped against the conical groove at the lower part of the third side wall of the first upright column.
2. A piezo-electrically driven two-dimensional micro-motion imaging platform according to claim 1, wherein said first to fourth posts are all made of elastic steel.
3. The piezoelectric driven two-dimensional micromotion imaging platform according to claim 1, wherein the centers of the end faces of the first tip cone and the second tip cone are provided with threaded holes; one end of the piezoelectric stack is provided with an external thread which is fixedly connected with a threaded hole on the end face of the second tip cone through threaded connection; and one end of the connecting rod is provided with an external thread, and the external thread is fixedly connected with the threaded hole on the end surface of the first tip cone through threaded connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110381841.1A CN113513943B (en) | 2021-04-09 | 2021-04-09 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110381841.1A CN113513943B (en) | 2021-04-09 | 2021-04-09 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113513943A true CN113513943A (en) | 2021-10-19 |
| CN113513943B CN113513943B (en) | 2022-06-17 |
Family
ID=78061292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110381841.1A Active CN113513943B (en) | 2021-04-09 | 2021-04-09 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113513943B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101726997A (en) * | 2009-12-11 | 2010-06-09 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN204835980U (en) * | 2015-07-17 | 2015-12-02 | 南京航空航天大学 | Little displacement driving ware of two dimension piezoelectricity |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN207410248U (en) * | 2017-11-21 | 2018-05-25 | 吉林大学 | Piezoelectricity rotation positioning platform with grand microring array kinetic characteristic |
| US20190353507A1 (en) * | 2017-09-13 | 2019-11-21 | Nanjing Univ. Of Aeronautics And Astronautics | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| CN210108265U (en) * | 2019-04-03 | 2020-02-21 | 浙江工业大学 | Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time |
| CN111245290A (en) * | 2020-01-20 | 2020-06-05 | 哈尔滨工业大学 | Single-degree-of-freedom piezoelectric turntable and excitation method thereof |
-
2021
- 2021-04-09 CN CN202110381841.1A patent/CN113513943B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101726997A (en) * | 2009-12-11 | 2010-06-09 | 天津大学 | Six-freedom-degree precision positioning table for nano-imprint lithography system |
| CN204835980U (en) * | 2015-07-17 | 2015-12-02 | 南京航空航天大学 | Little displacement driving ware of two dimension piezoelectricity |
| CN106710637A (en) * | 2016-11-30 | 2017-05-24 | 南京航空航天大学 | Micrometric displacement positioning mechanism based on piezoelectric stack |
| US20190353507A1 (en) * | 2017-09-13 | 2019-11-21 | Nanjing Univ. Of Aeronautics And Astronautics | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN207410248U (en) * | 2017-11-21 | 2018-05-25 | 吉林大学 | Piezoelectricity rotation positioning platform with grand microring array kinetic characteristic |
| CN210108265U (en) * | 2019-04-03 | 2020-02-21 | 浙江工业大学 | Three-freedom-degree nanometer positioning platform for reading displacement and rotation information in real time |
| CN111245290A (en) * | 2020-01-20 | 2020-06-05 | 哈尔滨工业大学 | Single-degree-of-freedom piezoelectric turntable and excitation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113513943B (en) | 2022-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103913838B (en) | Two-dimensional quick-deflection reflector actuating mechanism and actuating method thereof | |
| CN105301761A (en) | Two-dimensional deflection apparatus based on macro fiber composites, and deflection method thereof | |
| CN100546775C (en) | Dual drive four-freedom space parallel mechanism | |
| US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
| CN105301762A (en) | Low-thickness two-dimensional rapid deflection apparatus including secondary amplification, and deflection method thereof | |
| KR20140138107A (en) | Mems-based zoom lens system | |
| CN101518898A (en) | Parallel mechanism with three freedom degrees of twice rotation and once motion | |
| Zhang et al. | Development of a low capacitance two-axis piezoelectric tilting mirror used for optical assisted micromanipulation | |
| CN109723945B (en) | Precise pointing platform based on flexible parallelogram mechanism | |
| US4664488A (en) | Light reflecting apparatus including a multi-aberration light reflecting surface | |
| CN109129494B (en) | Parallel micro-compensation device | |
| CN104849858A (en) | Control mechanism for rapid deflection reflection mirror with rotation center arranged at reflection surface and method thereof | |
| CN113513943B (en) | Piezoelectric-driven two-dimensional micro-motion imaging platform | |
| CN103823275B (en) | Based on the adaptive optic fiber collimating apparatus of flexible hinge | |
| CN102218734A (en) | Double parallel four-bar two-dimensional rotating parallel mechanism with virtual moving center | |
| US11745334B2 (en) | Spatial large-stroke compliant hinge with hybrid structure | |
| TW202018367A (en) | Cascaded mirror array and scanning system thereof | |
| CN104229145A (en) | Lead screw push rod type aircraft head deflection driving device | |
| CN110497397A (en) | Rope and spring driven Three-degree-of-freedom bionic eye executing agency | |
| CN106772889B (en) | Six-dimensional adjusting support | |
| CN112327503B (en) | Light path pointing precision adjusting device | |
| CN105301763A (en) | Two-dimensional rapid deflection apparatus and method based on secondary bridge type displacement amplifier | |
| CN112468628A (en) | Telescopic zoom lens | |
| CN110454656B (en) | Frame type dual mechanism and using method thereof | |
| CN113791493B (en) | Quick reflector based on macro-micro two-stage composite actuation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |