CN204835980U - Little displacement driving ware of two dimension piezoelectricity - Google Patents
Little displacement driving ware of two dimension piezoelectricity Download PDFInfo
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- CN204835980U CN204835980U CN201520520043.2U CN201520520043U CN204835980U CN 204835980 U CN204835980 U CN 204835980U CN 201520520043 U CN201520520043 U CN 201520520043U CN 204835980 U CN204835980 U CN 204835980U
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Abstract
The utility model discloses a little displacement driving ware of two dimension piezoelectricity, including bottom plate 1, lens frame 7, bottom plate 1 is through the two -way actuating mechanism of locating piece 5 fixedly connected with two dimension, the two -way actuating mechanism of two dimension includes two -way drive unit of outside one -dimensional and the inside two -way drive unit of one -dimensional, and wherein the outside two -way drive unit of one -dimensional passes through locating piece 5 and fixes on bottom plate 1, on the inside two -way drive unit of one -dimensional passes through the fixed two -way drive unit of one -dimensional externally of connecting piece, the inside two -way drive unit of one -dimensional connects on lens frame 7, outside two -way drive unit of one -dimensional and the inside two -way drive unit of one -dimensional produce the effort of two directions respectively in mutually perpendicular's direction, make lens frame 7 move along two dimensions. The utility model discloses an one kind enlarge the displacement mechanism of amplification of principle based on the triangle, establish ties the enlarged displacement of two orthogonal directions, the displacement of two directions actuate be independent, mutually can not the coupling, reduced the degree of difficulty of control.
Description
Technical field
The utility model relates to Precision Piezoelectric and drives instrument field, specifically a kind of two-dimensional piezoelectric micro-displacement driver.
Background technology
Surely have a wide range of applications in military field, civilian aerial survey and camera chain as technology.In acquisition information, along with the development of countries in the world military technology, military satellite, reconnaissance plane obtain the reinforcement of visual ability, it is directly perceived, abundant and be convenient to obtain, store and the feature such as transmission that particularly image information has, becomes in future war the technical way obtaining information.But because imaging support is subject to the impact of attitudes vibration and vibration, the unintelligible of obtained image will be caused, have a strong impact on effective utilization of image information.Can eliminate or alleviate the impact of Flying Camera carrier on image planes by steady as technology, greatly improve obtain the quality of image information.Therefore the stable problem of steady picture and light beam is current urgent problem.The accurate quick position wherein realizing micrometric displacement is key technology.
The stacked piezoelectric pottery that multilayer piezoelectric ceramic takes electrical parallel mechanical series mode to encapsulate, larger displacement can be exported under less voltage, its displacement output and input voltage linear, its resolution can realize infinitesimal in theory, therefore, better controllability can be obtained with stacked piezoelectric pottery for the actuator of driving element, realize higher precision.But, although stacked piezoelectric pottery has amplification to displacement, distortion size is still restricted, the thrust that the platform that conventional two-dimensional micrometric displacement locating platform adopts lever amplification principle and flexible hinge to produce exports and pulling force differ greatly, and lever and flexible hinge also bring the problem of hesitation.
Utility model content
For the deficiency of above-mentioned background technology, the utility model have employed a kind of displacement amplifying mechanism based on triangle amplification principle, is connected by the displacement enlargement of two orthogonal directions, and the displacement start of both direction is independently, can not be coupled mutually, decrease the difficulty of control.
The utility model is for solving the problems of the technologies described above by the following technical solutions:
A kind of two-dimensional piezoelectric micro-displacement driver, comprise base plate 1, lens frame 7, base plate 1 is fixedly connected with two-dimentional dual direction drive mechanism by locating piece 5; Described two-dimentional dual direction drive mechanism comprises outside one dimension bi-directional drive unit and inner one dimension bi-directional drive unit, the one dimension bi-directional drive unit of its peripheral is fixed on base plate 1 by locating piece 5, inner one dimension bi-directional drive unit is fixed on outside one dimension bi-directional drive unit by connector, and the one dimension bi-directional drive unit of described inside is connected in lens frame 7; Outside one dimension bi-directional drive unit produces the active force of both direction respectively with inner one dimension bi-directional drive unit on orthogonal direction, and lens frame 7 is moved along two dimensions.
The one dimension bi-directional drive unit of described outside comprises outside start frame 6, first activation part, and outside start frame 6 has two ends on the same line, in described end, is connected on locating piece 5 by the first activation part.
Described first activation part comprises the first external activity pretension block 2, fixing pretension block 4 and outside piezoelectric actuating unit 3, described fixing pretension block 4 is connected on locating piece 5, its two ends are connected on the first external activity pretension block 2 respectively by outside piezoelectric actuating unit 3, and the first external activity pretension block 2 is fixed on outside start frame 6.
Inner one dimension bi-directional drive unit is arranged on direction perpendicular with the one dimension bi-directional drive unit of outside on outside start frame 6; The one dimension bi-directional drive unit of described inside comprises internal activity pretension block 8, inner piezoelectric actuating unit, the second external activity pretension block; Connected by inner piezoelectric actuating unit between second external activity pretension block and internal activity pretension block 8, wherein the second external activity pretension block is fixed on outside start frame 6, and internal activity pretension block 8 is fixed on interior lens frame 7.
Described outside piezoelectric actuating unit 3 comprises a piezoelectric stack, two triangle fixed blocks, and piezoelectric stack two ends are connected with the first external activity pretension block 2 and fixing pretension block 4 respectively by triangle fixed block.
Described inside piezoelectric actuating unit comprises a piezoelectric stack, two triangle fixed blocks, and piezoelectric stack two ends are connected with the second external activity pretension block and internal activity pretension block 8 respectively by triangle fixed block.
Described outside piezoelectric actuating unit 3 is provided with two the first external activity pretension blocks, 2, two the first external activity pretension blocks 2 and arranges in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described fixing pretension block 4 are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between first external activity pretension block 2 and fixing pretension block 4, triangle fixed block is stuck in the first external activity pretension block 2 with in the v-depression of fixing pretension block 4 correspondence position.
Described inside piezoelectric actuating unit is provided with two the second external activity pretension blocks, and two the second external activity pretension blocks are arranged in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described internal activity pretension block 8 are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between second external activity pretension block and internal activity pretension block 8, triangle fixed block is stuck in the v-depression of the second external activity pretension block and internal activity pretension block 8 correspondence position.
The utility model adopts above technical scheme compared with prior art, has following technique effect:
In order in the high-resolution situation of guarantee, increase the displacement of driver, this structure devises two-dimensional micro-displacement driver according to triangle amplification principle, and its structure is simple, only has simple relation with amplification angle to the multiple proportion of displacement equations.Avoid and adopt lever amplification principle and employing flexible hinge elasticity that is complicated as the conventional two-dimensional micrometric displacement Positioning platform movement model of revolute pair, dependence material own to carry out the shortcoming of replying.
Rotation between the two-dimensional piezoelectric micro-displacement driver piezoelectric actuating unit 3 of the utility model design and each pretension block is based on the linear contact lay on the limit of the limit of corner block and pretension block V-type groove, simple owing to contacting, rub very little, enable the elongation direct motion being converted into lens frame 7 by triangle amplification principle rapidly of stacked piezoelectric pottery 3a.Damping is very little, fast response time, and motion model is simple, reduces the difficulty to its performance evaluation and control.
Inside and outside one dimension bi-directional drive unit is provided with two groups of piezoelectric actuating unit groups all in opposite directions, and while one group of piezoelectric actuating unit extends, another group shortens simultaneously, and reaching in the start in each direction is initiatively promote instead of passively lean on elastic recovery.
Connected by the displacement enlargement of two orthogonal directions, the displacement start of both direction is independently, can not be coupled mutually, decreases the difficulty of control.The dynamic property of its motion depends on substantially the performance of the stacked piezoelectric pottery 3a of employing can reach the object that fast accurate drives and locates.
Accompanying drawing explanation
Fig. 1 is the vertical view of the utility model displacement driver;
Fig. 2 is the stereogram of the utility model displacement driver;
Fig. 3 is the formation assembling structure exploded view of piezoelectric actuating unit;
Fig. 4 is the driving mechanism unit block stereogram that moving cell is made in outside;
Fig. 5 is the driving mechanism unit block exploded view that moving cell is made in outside;
Fig. 6 is the driving mechanism unit block stereogram that moving cell is made in inside;
Fig. 7 is the driving mechanism unit block exploded view that moving cell is made in inside;
Fig. 8 is the stereogram of outside start frame;
Fig. 9 is the stereogram of interior lens frame;
Figure 10 is the structural representation of the utility model displacement driver;
Figure 11 is the schematic diagram of triangle amplification principle;
Figure 12 is the schematic diagram of one direction drive mechanism;
Wherein: 1-base plate, 2-first external activity pretension block, the outside piezoelectric actuating unit of 3-, 4-fixes pretension block, 5-locating piece, the outside start frame of 6-, 7-lens frame, 8-internal activity pretension block, the inner piezoelectric actuating unit of 9-, 10-second external activity pretension block, 4b, 2a, 8a-V connected in star, 3a-piezoelectric stack, 3b, 3c-triangle fixed block, 2c, 8b-rectangular recess, 2b, 6a, 7a, 8c-screwed hole.
Embodiment
The utility model provides a kind of two-dimensional piezoelectric micro-displacement driver, and for making the purpose of this utility model, technical scheme and effect clearly, clearly, and further describe the utility model with reference to accompanying drawing examples.Should be appreciated that concrete enforcement described herein is only in order to explain the utility model, and be not used in restriction the utility model.
Be described in detail below in conjunction with the technical scheme of accompanying drawing to utility model:
As shown in Figure 1 and Figure 2, the two-dimensional piezoelectric micro-displacement driving mechanism that the utility model provides, comprise base plate 1, lens frame 7, base plate 1 is fixedly connected with two-dimentional dual direction drive mechanism by locating piece 5; Two dimension dual direction drive mechanism comprises outside one dimension bi-directional drive unit and inner one dimension bi-directional drive unit, the one dimension bi-directional drive unit of its peripheral is fixed on base plate 1 by locating piece 5, inner one dimension bi-directional drive unit is fixed on outside one dimension bi-directional drive unit by connector, and the one dimension bi-directional drive unit of described inside is connected in lens frame 7; The one dimension bi-directional drive unit of described outside comprises outside start frame 6, first activation part, and outside start frame 6 has two ends on the same line, in described end, is connected on locating piece 5 by the first activation part.
Specifically, above-mentioned first activation part comprises the first external activity pretension block 2, fixing pretension block 4 and outside piezoelectric actuating unit 3, fixing pretension block 4 is connected on locating piece 5, its two ends are connected on the first external activity pretension block 2 respectively by outside piezoelectric actuating unit 3, and the first external activity pretension block 2 is fixed on outside start frame 6.First external activity pretension block 2 is identical with the mechanism of the second external activity pretension block 10.
Inner one dimension bi-directional drive unit is arranged on direction perpendicular with the one dimension bi-directional drive unit of outside on outside start frame 6; The one dimension bi-directional drive unit of described inside comprises internal activity pretension block 8, inner piezoelectric actuating unit 9, second external activity pretension block 10; Connected by inner piezoelectric actuating unit between second external activity pretension block and internal activity pretension block 8, wherein the second external activity pretension block is fixed on outside start frame 6, and internal activity pretension block 8 is fixed on interior lens frame 7.
Described outside piezoelectric actuating unit 3 comprises a piezoelectric stack, two triangle fixed blocks, and piezoelectric stack two ends are connected with the first external activity pretension block 2 and fixing pretension block 4 respectively by triangle fixed block.
Described inside piezoelectric actuating unit comprises a piezoelectric stack, two triangle fixed blocks, and piezoelectric stack two ends are connected with the second external activity pretension block and internal activity pretension block 8 respectively by triangle fixed block.
Described outside piezoelectric actuating unit 3 is provided with two the first external activity pretension blocks, 2, two the first external activity pretension blocks 2 and arranges in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described fixing pretension block 4 are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between first external activity pretension block 2 and fixing pretension block 4, triangle fixed block is stuck in the first external activity pretension block 2 with in the v-depression of fixing pretension block 4 correspondence position.
Fix as described in Fig. 4, Fig. 5 in the middle part of pretension block 4 and have symmetrical v-depression 4a, also there is v-depression 2a first movable pretension block 2 side, and the first external activity pretension block 2 is connected with triangle fixed block 3b, 3c of piezoelectric actuating unit by v connected in star with fixing pretension block.First external activity pretension block 2 is connected with outside start frame by the rectangular recess 2c of side, and is connected with the screwed hole 6a of outside start frame by hole 2b by screw.
Described inside piezoelectric actuating unit is provided with two the second external activity pretension blocks, and two the second external activity pretension blocks are arranged in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described internal activity pretension block 8 are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between second external activity pretension block and internal activity pretension block 8, triangle fixed block is stuck in the v-depression of the second external activity pretension block and internal activity pretension block 8 correspondence position.
Have symmetrical v connected in star 8a in the middle part of internal activity pretension block 8 as described in Fig. 6, Fig. 7, internal activity pretension block 8 is connected with triangle fixed block 3b, 3c of piezoelectric actuating unit by v-depression with the first external activity pretension block 2.First external activity pretension block 2 is connected with outside start frame by the rectangular recess 2c of side, and is connected with the screwed hole 6a of outside start frame by hole 2b by screw.Internal activity pretension block 8 has rectangular recess 8b to be connected with interior lens frame 7 by side, and is connected with interior lens frame screwed hole 7c by hole 8c by screw.
The x-axis double action of described two-dimensional micro-displacement locating platform outside one dimension bi-directional drive unit drives inner one dimension bi-directional drive whole unit, completes two-way active by the piezoelectric actuating unit group of both sides and promotes.Inner one dimension bi-directional drive unit opposite outer start frame promotes the start of lens frame in y-axis direction and location.
As Figure 10, Figure 11 embody the relative start direction of piezoelectric actuating unit, in present embodiment, outside one dimension bi-directional drive unit is fixed on outside start frame, outside start frame is symmetrical octagon, relative two limits are symmetrically arranged with activation part B and D, are set to x direction with the direction residing for outside one dimension bi-directional drive unit; Inner one dimension bi-directional drive unit arranges and is on its vertical direction, is set to y direction, i.e. activation part A and C with the direction residing for the one dimension bi-directional drive unit of inside; Piezoelectric actuating unit 3 to lens frame 7 driving direction angulation β, when β is greater than 45 degree, when symmetrical piezoelectric actuating unit synchronously extends simultaneously and increases △ C, will be amplified in the displacement δ of driving direction with it.
If Figure 12 two-dimensional micro-displacement locating platform outside one dimension bi-directional drive unit is by the x-axis double action driving inner one dimension bi-directional drive whole unit, X-direction is driven jointly by piezoelectric actuating part B, D group, and Y-direction is driven jointly by piezoelectric actuating unit A, C group.When C group piezoelectric actuating unit co-extensive, A group piezoelectric actuating unit shortens identical amount jointly, moves the distance of δ 1 through triangle principle enlarged internal lens frame 7 entirety along Y-direction, drives interior lens frame 7 to move the distance of δ 1 in X direction; With should A group piezoelectric actuating unit co-extensive time, complete the opposite direction start of Y-direction when C group piezoelectric actuating unit shortens identical amount jointly.
When D group piezoelectric actuating unit co-extensive, B group piezoelectric actuating unit shortens identical amount jointly, amplifies make outside start frame 6 entirety move the distance of δ 2 in X direction through triangle principle, drives interior lens frame 7 to move the distance of δ 2 in X direction.With should B group piezoelectric actuating unit co-extensive time, complete the opposite direction start of X-direction when D group piezoelectric actuating unit shortens identical amount jointly.
The start of both direction is independent mutually, only needs the common start of both direction when needing the common start of X, Y-direction.
Be understandable that; for those of ordinary skills; can be equal to according to the technical solution of the utility model and utility model design thereof and replace or change, and all these change or replace the protection range that all should belong to the claim appended by the utility model.
Claims (8)
1. a two-dimensional piezoelectric micro-displacement driver, is characterized in that: comprise base plate (1), lens frame (7), base plate (1) is fixedly connected with two-dimentional dual direction drive mechanism by locating piece (5); Described two-dimentional dual direction drive mechanism comprises outside one dimension bi-directional drive unit and inner one dimension bi-directional drive unit, the one dimension bi-directional drive unit of its peripheral is fixed on base plate (1) by locating piece (5), inner one dimension bi-directional drive unit is fixed on outside one dimension bi-directional drive unit by connector, and the one dimension bi-directional drive unit of described inside is connected in lens frame (7); Outside one dimension bi-directional drive unit produces the active force of both direction respectively with inner one dimension bi-directional drive unit on orthogonal direction, and lens frame (7) is moved along two dimensions.
2. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 1, it is characterized in that: the one dimension bi-directional drive unit of described outside comprises outside start frame (6), the first activation part, outside start frame (6) has two ends on the same line, in described end, be connected on locating piece (5) by the first activation part.
3. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 2, it is characterized in that: described first activation part comprises the first external activity pretension block (2), fixing pretension block (4) and outside piezoelectric actuating unit (3), described fixing pretension block (4) is connected on locating piece (5), its two ends are connected on the first external activity pretension block (2) respectively by outside piezoelectric actuating unit (3), and the first external activity pretension block (2) is fixed on outside start frame (6).
4. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 1, is characterized in that: inner one dimension bi-directional drive unit is arranged on the upper direction perpendicular with outside one dimension bi-directional drive unit of outside start frame (6); The one dimension bi-directional drive unit of described inside comprises internal activity pretension block (8), inner piezoelectric actuating unit, the second external activity pretension block; Connected by inner piezoelectric actuating unit between second external activity pretension block and internal activity pretension block (8), wherein the second external activity pretension block is fixed on outside start frame (6), and internal activity pretension block (8) is fixed on interior lens frame (7).
5. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 3, it is characterized in that: described outside piezoelectric actuating unit (3) comprises a piezoelectric stack, two triangle fixed blocks, piezoelectric stack two ends are connected with the first external activity pretension block (2) and fixing pretension block (4) respectively by triangle fixed block.
6. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 4, it is characterized in that: described inside piezoelectric actuating unit comprises a piezoelectric stack, two triangle fixed blocks, piezoelectric stack two ends are connected with the second external activity pretension block and internal activity pretension block (8) respectively by triangle fixed block.
7. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 5, it is characterized in that: described outside piezoelectric actuating unit (3) is provided with two the first external activity pretension blocks (2), two the first external activity pretension blocks (2) are arranged in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described fixing pretension block (4) are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between first external activity pretension block (2) and fixing pretension block (4), triangle fixed block is stuck in the first external activity pretension block (2) with in the v-depression of fixing pretension block (4) correspondence position.
8. a kind of two-dimensional piezoelectric micro-displacement driver according to claim 6, it is characterized in that: described inside piezoelectric actuating unit is provided with two the second external activity pretension blocks, two the second external activity pretension blocks are arranged in opposite directions, and opposite face is equipped with v-depression; The both ends of the surface of described internal activity pretension block (8) are also provided with v-depression, be provided with piezoelectric stack and triangle fixed block between second external activity pretension block and internal activity pretension block (8), triangle fixed block is stuck in the v-depression of the second external activity pretension block and internal activity pretension block (8) correspondence position.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105071689A (en) * | 2015-07-17 | 2015-11-18 | 南京航空航天大学 | Two-dimensional piezoelectric micro displacement driver |
CN113513943A (en) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
CN113759540A (en) * | 2020-06-03 | 2021-12-07 | 华为技术有限公司 | Driving device of micro mirror |
-
2015
- 2015-07-17 CN CN201520520043.2U patent/CN204835980U/en not_active Withdrawn - After Issue
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105071689A (en) * | 2015-07-17 | 2015-11-18 | 南京航空航天大学 | Two-dimensional piezoelectric micro displacement driver |
CN105071689B (en) * | 2015-07-17 | 2017-06-13 | 南京航空航天大学 | A kind of two-dimensional piezoelectric micro-displacement driver |
CN113759540A (en) * | 2020-06-03 | 2021-12-07 | 华为技术有限公司 | Driving device of micro mirror |
CN113759540B (en) * | 2020-06-03 | 2022-11-18 | 华为技术有限公司 | Driving device of micro mirror |
CN113513943A (en) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
CN113513943B (en) * | 2021-04-09 | 2022-06-17 | 南京航空航天大学 | Piezoelectric-driven two-dimensional micro-motion imaging platform |
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