CN110065926B - Two-degree-of-freedom scott-russell flexible micro-nano positioning platform - Google Patents
Two-degree-of-freedom scott-russell flexible micro-nano positioning platform Download PDFInfo
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- CN110065926B CN110065926B CN201910243175.8A CN201910243175A CN110065926B CN 110065926 B CN110065926 B CN 110065926B CN 201910243175 A CN201910243175 A CN 201910243175A CN 110065926 B CN110065926 B CN 110065926B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
Abstract
The invention discloses a two-degree-of-freedom scott-russell flexible micro-nano positioning platform, which adopts piezoelectric ceramics with higher inherent frequency as a driving element, and simultaneously adopts a bridge type amplification mechanism with large amplification ratio and good decoupling property as a primary displacement amplification mechanism in order to keep good decoupling performance when larger output displacement is realized. The scott-russell mechanism is introduced as a secondary displacement amplification mechanism, and the scott-russell mechanism is adopted as the displacement amplification mechanism, so that the device has the characteristics of excellent motion decoupling performance and good guiding performance; the cross-shaped decoupling structure is introduced and uniformly distributed around the central motion platform, and the cross-shaped decoupling structure has smaller rigidity in the target motion direction and larger rigidity in the non-target motion direction, so that the high-precision positioning device is beneficial to outputting displacement and realizing larger displacement output, has good decoupling performance and ensures higher positioning precision.
Description
Technical Field
The invention relates to a two-degree-of-freedom scott-russell flexible micro-nano positioning platform. The positioning platform is driven by piezoelectric ceramics, has XY two degrees of freedom, can realize independent translational motion in two directions, and can be used for high-resolution microscope scanning, optical equipment position tracking detection and micro-nano component manufacturing and assembling.
Background
A flexible micro-nano positioning platform is a core component of modern high-technology manufacturing equipment and precision motion equipment. The method is widely applied to high and new fields of high-resolution microscope servo scanning, precise optical detection and tracking, manufacturing and assembling of micro-nano scale components and the like, and plays an increasingly important role.
A two-degree-of-freedom micro-nano operation platform based on a flexible plate spring unit is proposed in a Design of a Large Range XY Nanopositioning System, and the linear freedom degree in XY two directions can be realized; similarly, the document Design and Development of a Compact flexible-based XY Precision Positioning System with a centre Range designs a double-layer micro-nano operating platform according to a layered Design method, and realizes the decoupling of the displacement in XY direction by means of a layered structure.
The document Long-range scanning for scanning tunneling microscope develops a two-dimensional nanometer micro-displacement workbench based on a lever amplification mechanism, and the two-dimensional nanometer micro-displacement workbench is successfully applied to STMs, the maximum stroke of the micro-displacement workbench reaches 500 μm, and the resolution is about 1 nm.
Chinese patent 105006255a proposes a flexible micro-positioning platform, which uses piezoelectric ceramic to realize displacement output in a target direction, and combines the characteristics of a spherical flexible hinge to realize high-precision displacement output and avoid coupling in each movement direction, but the platform does not adopt an amplification structure and cannot realize larger displacement output, and the platform has a complex structure, a large volume and difficult processing.
At the present stage, a main flexible micro-nano positioning platform is a flexible motion platform with piezoelectric ceramics as a driving element, wherein most of the motion platforms are directly driven by the piezoelectric ceramics, but the stroke range of the piezoelectric ceramics is small, and the output displacement of the platform often cannot meet the requirement of a larger working space; part of the micro-nano positioning platform adopts a lever mechanism as an amplification mechanism, and the platform is deviated in the motion process and cannot meet the requirement of horizontal independent motion at the cost of sacrificing the decoupling performance of the platform; the currently researched part of two-degree-of-freedom micro-nano platform has a plurality of parts, and each part is processed respectively, so that the error of the assembled micro-nano positioning platform is large, and the positioning precision cannot meet the design requirement. Therefore, the micro-nano positioning platform with the advantages of large stroke, good decoupling performance, high positioning accuracy, multi-degree-of-freedom motion and the like is a main development direction of the current micro-nano flexible positioning technology, has important research value and engineering practical value, and is one of the directions of great development potential of future high and new technologies.
Disclosure of Invention
The invention provides a flexible positioning platform with two degrees of freedom XY parallel motion, aiming at the defects of the existing micro-nano positioning platform. The positioning platform adopts piezoelectric ceramics with higher natural frequency as a driving element, and simultaneously adopts a bridge type amplification mechanism with large amplification ratio and good decoupling property as a primary displacement amplification mechanism in order to keep good decoupling performance when large output displacement is realized. In order to meet the requirement of large output displacement of the micro-nano positioning platform in some application occasions, a scott-russell mechanism is innovatively introduced to serve as a secondary displacement amplification mechanism, and the scott-russell mechanism serves as a displacement amplification mechanism, so that the micro-nano positioning platform has the characteristics of excellent motion decoupling performance and good guiding performance. In order to meet the requirement of higher decoupling of the platform, the cross-shaped decoupling structure is uniformly distributed around the central motion platform, the rigidity of the cross-shaped decoupling structure is smaller in the target motion direction, and the rigidity of the cross-shaped decoupling structure is larger in the non-target motion direction, so that the cross-shaped decoupling structure is beneficial to outputting displacement and realizing larger displacement output, has good decoupling performance and ensures higher positioning precision.
The invention relates to a two-degree-of-freedom scott-russell flexible micro-nano positioning platform, which comprises a base, two scott-russell structures, two bridge type amplification mechanisms, a motion platform and four cross-shaped decoupling structures, wherein the two scott-russell structures are arranged on the base;
the fixed ends of the two bridge type amplification mechanisms are fixed on the base, wherein the output end of the first bridge type amplification mechanism is connected with the input end of the first scott-russell structure through a first flexible hinge; the fixed end of the first scott-russell structure is connected into the base through a second flexible hinge, and the output end of the first scott-russell structure is connected into one side surface of the central motion platform through two flexible plate spring structures; the two flexible plate springs are vertical to the side surface of the central motion platform; the central motion platform is square and is connected into the base through four cross decoupling structures, and the cross decoupling structures are uniformly distributed on the periphery of the central motion platform; a first piezoelectric driver is arranged in the first bridge type amplification mechanism; the output end of the second bridge type amplification mechanism is connected to the input end of the second scott-russell structure through a third flexible hinge; the fixed end of the second scott-russell structure is connected into the base through a fourth flexible hinge, and the output end of the second scott-russell structure is connected into the other side face of the central motion platform through two flexible plate spring structures; wherein one side of the central motion platform is adjacent to the other side.
Preferably, the central motion platform is a hollow structure.
Preferably, the glass ruler is further included; the glass ruler is fixed on the central motion platform.
The two-degree-of-freedom scott-resell micro-nano positioning platform has the following advantages:
1. the two-degree-of-freedom micro-nano positioning platform adopts XY parallel motion, and the whole structure of the platform is compact in size and convenient to process and assemble.
2. The motion structure of the invention is mainly based on the elastic deformation of the flexible hinge, and the nonlinear defect of the parallel mechanism can be avoided due to small hinge stretching and corner change and compact piezoelectric ceramic installation.
3. The positioning platform adopts the bridge type displacement amplification mechanism as a primary displacement amplification mechanism, so that good decoupling performance is considered when large output displacement of the platform is ensured, and the stability is good.
4. The scott-reset mechanism is adopted as a secondary displacement amplification mechanism in the positioning platform, so that large output displacement of the platform is fully ensured, and good decoupling performance and linearity of the positioning platform are ensured.
5. The cross-shaped decoupling structure adopted in the moving platform ensures that the moving platform has small rigidity in the target moving direction and large rigidity in the non-target moving direction, so that the platform has small coupling error, high natural frequency and good motion output stability.
6. The motion platform designed by the invention has high motion precision, good decoupling performance and high response speed, and can meet the requirements of precision scanning, plane positioning, trajectory tracking and the like.
7. The central motion platform adopts a symmetrical arrangement mode, so that the cross coupling of output motion caused by asymmetrical structure is reduced.
8. The whole structure of the positioning platform is integrally processed by a wire cutting technology, so that error loss caused by introducing other procedures is avoided, and the requirements of the system on high positioning precision and high tracking performance are met.
Drawings
FIG. 1 is a structural diagram of a two-degree-of-freedom micro-nano positioning platform in the invention;
FIG. 2 is an enlarged schematic view of the scott-russell structure;
FIG. 3 is a scott-russell structure in accordance with the present invention;
FIG. 4 is a cross-shaped decoupling structure of the present invention;
FIG. 5 is an overall structure diagram of a two-degree-of-freedom micro-nano positioning platform in the invention.
Detailed Description
As shown in fig. 1, the two-degree-of-freedom scott-russell flexible micro-nano positioning platform comprises four base fixing threaded holes 1, one base 2, two scott-russell structures 3, two bridge amplification mechanisms 4, grating support mounting threaded holes 5 on the four bases, a central motion platform 6 and four cross-shaped decoupling structures 7.
As shown in fig. 2, 3 and 4, the base 2 is installed on a workbench through a base fixing threaded hole 1, the fixed end of the bridge type amplification mechanism 4 is connected to the base, the output end is connected to the scott-russell structure 3 through a flexible hinge 303, the scott-russell structure 3 is connected to the base through a hinge 301, two moving parts of the scott-russell structure 3 are connected through a hinge 302, in addition, the scott-russell structure 3 is connected to a central moving platform 6 through plate spring structures 304 and 305, namely, a displacement output point 8 of the scott-russell structure 3 is connected to the central moving platform, the central moving platform 6 is of a square structure and is connected to the base through four uniformly distributed cross decoupling structures 7, and a glass ruler 11 is fixed on the central moving platform 6; the grating seat 9 is fixed on the base 2 through the mounting threaded hole 5, and the grating degree head 10 on the grating seat is aligned with the scale on the glass ruler 11.
The working principle and process of the two-degree-of-freedom scott-russell micro-nano positioning platform are as follows:
as shown in fig. 1 and 5, the piezoelectric actuator for driving the two-degree-of-freedom micro-nano positioning platform in one direction is taken as an example of Y-direction motion. Voltage is applied to two ends of the piezoelectric driver 12, the piezoelectric driver extends to push the bridge type displacement amplification mechanism 4, two input ends move towards two sides, and the flexible hinges on the bridge arms are subjected to small elastic bending and stretching deformation. And one end of the two output ends is fixedly connected with the base 2, the other end of the two output ends outputs displacement and pushes a 303 hinge in the scott-russell structure to move, the scott-russell structure has a special structural mode and good decoupling performance, the displacement of the input end can be converted into output displacement in the vertical direction, and the output displacement is transmitted to the central motion platform 6 through the 304 plate spring and 305 plate spring structures. When the central motion platform moves, the cross-shaped decoupling structures 7 uniformly distributed on the periphery of the central motion platform deform, and play a role in guiding and decoupling the motion of the central motion platform. When the voltage is reduced, the output displacement of the piezoelectric driver is reduced, the elastic deformation of each deformation structure is changed to the direction of the original state, and the output displacement of the central motion platform is reduced.
The X direction has the same motion situation.
When the piezoelectric drivers in two directions of the two-degree-of-freedom micro-nano positioning platform are driven simultaneously. The central motion platform can perform any translation in the plane.
It should be added that the directional words such as "up and down", "left and right" of the above-described structure are shown in the drawings or are customary according to the embodiments, and are for convenience of description and do not represent the uniqueness and necessity of the installation position.
Although the embodiments of the present invention have been described with reference to the accompanying drawings, it is not intended to limit the scope of the present invention, and it should be understood by those skilled in the art that various modifications and variations can be made without inventive efforts by those skilled in the art based on the technical solution of the present invention.
Claims (4)
1. Two-degree-of-freedom scott-russell flexible micro-nano positioning platform is characterized in that: the device comprises a base (2), two scott-russell structures (3), two bridge type amplification mechanisms (4), a moving platform (6) and four cross-shaped decoupling structures;
the fixed ends of the two bridge amplification mechanisms (4) are fixed on the base, wherein the output end of the first bridge amplification mechanism (4) is connected to the input end of the first scott-russell structure through a first flexible hinge (303); the fixed end of the first scott-russell structure is connected into the base through a second flexible hinge (302), and the output end of the first scott-russell structure is connected into one side surface of the central motion platform through two flexible plate spring structures; the two flexible plate springs are vertical to the side surface of the central motion platform; the central motion platform is square and is connected into the base through four cross-shaped decoupling structures, and the cross-shaped decoupling structures are uniformly distributed on the periphery of the central motion platform; a first piezoelectric driver (12) is arranged in the first bridge type amplification mechanism (4); the output end of the second bridge type amplification mechanism is connected to the input end of the second scott-russell structure through a third flexible hinge; the fixed end of the second scott-russell structure is connected into the base through a fourth flexible hinge, and the output end of the second scott-russell structure is connected into the other side face of the central motion platform through two flexible plate spring structures; wherein one side of the central motion platform is adjacent to the other side.
2. The two-degree-of-freedom scott-russell flexible micro-nano positioning platform according to claim 1, wherein: the central motion platform is of a hollow structure.
3. The two-degree-of-freedom scott-russell flexible micro-nano positioning platform according to claim 1, wherein: the glass ruler is also included; the glass ruler is fixed on the central motion platform.
4. The two-degree-of-freedom scott-russell flexible micro-nano positioning platform according to claim 1, wherein: the glass ruler also comprises a grating seat, the grating seat is fixed on the base through a mounting threaded hole, and a grating reading head on the grating seat is aligned with the scales on the glass ruler.
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| CN114337364B (en) * | 2021-01-11 | 2024-04-12 | 西安交通大学 | Differential flexible displacement shrinking mechanism with non-same direction input and output |
| CN113912005B (en) * | 2021-10-08 | 2023-02-03 | 天津大学 | XY full-decoupling micro-motion platform based on flexible hinge structure |
| CN116251731A (en) * | 2023-04-13 | 2023-06-13 | 华中科技大学 | Ultrasonic elliptical vibration cutting system and method coupled with flexible hinge mechanism |
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