CN110065926A - Two degrees of freedom scott-russell flexibility micro-nano locating platform - Google Patents
Two degrees of freedom scott-russell flexibility micro-nano locating platform Download PDFInfo
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- CN110065926A CN110065926A CN201910243175.8A CN201910243175A CN110065926A CN 110065926 A CN110065926 A CN 110065926A CN 201910243175 A CN201910243175 A CN 201910243175A CN 110065926 A CN110065926 A CN 110065926A
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- scott
- russell
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- decoupling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
Abstract
The invention discloses a kind of two degrees of freedom scott-russell flexibility micro-nano locating platforms, the present invention is using the higher piezoelectric ceramics of intrinsic frequency as driving element, simultaneously in order to keep good decoupling performance when realizing biggish output displacement, the bridge-type enlarger big using amplification ratio, decoupling is good is as level-one displacement amplifying mechanism.Present invention introduces scott-russell mechanisms as second level displacement amplifying mechanism, using scott-russell mechanism as displacement amplifying mechanism, has the characteristics that mobile decoupling superior performance, steering capability are good；Present invention introduces cross decoupling-structures to be distributed in center movement platform surrounding, cross decoupling-structure rigidity in target direction of motion is smaller, rigidity is larger in the non-targeted direction of motion, output displacement is not only improved in this way, realize biggish displacement output, there is good decoupling performance again, it is ensured that higher positioning accuracy.
Description
Technical field
The present invention relates to a kind of two degrees of freedom scott-russell flexibility micro-nano locating platforms.The locating platform is by piezoelectricity
Ceramic driving has two freedom degrees of XY, it can be achieved that the independent translational motion of both direction, can be used for high resolution microscope and sweep
It retouches, the detection of optical equipment position tracking, micro-nano component manufactures and assembly.
Background technique
Flexible micro-nano locating platform is the core component of Modern High-Tech's manufacturing equipment and precise motion equipment.It is in high score
The scanning of microscope servo, the manufacture of precision optics detection and tracking, micro/nano-scale component and the contour frontier of assembly of resolution
In have a wide range of applications, and will play an increasingly important role.
Document Design of a Large Range XY Nanopositioning System proposes a kind of based on soft
The two degrees of freedom micro-nano operating platform of property leaf spring unit, may be implemented the linear degrees of freedom of XY both direction；Similar, document
Design and Development of a Compact Flexure-based XY Precision Positioning
System with Centimeter Range devises a kind of double-deck micro-nano operating platform according to hierarchical design method, by point
Layer structure realizes the decoupling of the direction XY displacement.
Document Long-range scanning for scanning tunneling microscopy has developed based on thick stick
The two-dimensional nano micro-displacement work table of bar enlarger, is successfully applied in STM, which reaches
500 μm, resolving power is about 1nm.
Chinese patent 105006255A proposes a kind of flexible micro-positioning platform, and platform realizes target side using piezoelectric ceramics
To displacement output realize high-precision displacement in conjunction with the characteristics of spherical flexible hinge and export, while avoiding each movement side
To coupling, but the platform does not use enlarged structure to can not achieve biggish displacement output, and furthermore the platform structure is complicated, body
Product is big, processing difficulties.
Flexible micro-nano locating platform main at this stage is flexible motion platform of the piezoelectric ceramics as driving element, wherein
Most of motion platform directlys adopt Piezoelectric Ceramic, but the stroke range of piezoelectric ceramics is smaller, and the output displacement of platform is normal
Biggish working space requirement cannot often be reached；Part uses micro-nano locating platform of the regulations and parameters mechanism as enlarger, usually
Decoupling performance to sacrifice platform causes platform to shift during the motion as cost, is unable to satisfy horizontal independent fortune
Dynamic demand；Existing studied part two degrees of freedom micro-nano platform components are more, and each components are processed respectively, after leading to assembly
Micro-nano locating platform error is larger, and positioning accuracy cannot reach design requirement.Therefore, big stroke, good decoupling and height are had both
The micro-nano locating platform of the advantages that positioning accuracy, multifreedom motion is the main development side of current micro-nano flexibility location technology
To, have important researching value and engineering practical value, be one of the direction of the following new and high technology with development potential.
Summary of the invention
The present invention is directed to the deficiency of existing micro-nano locating platform, and the flexibility for proposing a kind of two degrees of freedom XY parallel kinematic is fixed
Bit platform.The locating platform uses the higher piezoelectric ceramics of intrinsic frequency as driving element, while in order to biggish in realization
Good decoupling performance is kept when output displacement, the bridge-type enlarger big using amplification ratio, decoupling is good is displaced as level-one
Enlarger.In order to meet the needs of certain applications occasion is big to micro-nano locating platform output displacement, innovative introducing
Scott-russell mechanism has as second level displacement amplifying mechanism, scott-russell mechanism as displacement amplifying mechanism
The good feature of mobile decoupling superior performance, steering capability.In order to meet the higher decoupling demand of platform, present invention introduces cross
Decoupling-structure is distributed in center movement platform surrounding, and cross decoupling-structure rigidity in target direction of motion is smaller, non-
Rigidity is larger in target direction of motion, not only improves output displacement in this way, realizes biggish displacement output, and have good solution
Coupling performance, it is ensured that higher positioning accuracy.
Two degrees of freedom scott-russell flexibility micro-nano locating platform of the present invention, including pedestal, two scott-
Russell structure, two bridge-type enlargers, motion platform, four cross decoupling-structures；
The fixing end of two bridge-type enlargers is fixed on the base, wherein the output of the first bridge-type enlarger
The input terminal of the first scott-russell structure is accessed at end by the first flexible hinge；First scott-russell structure is consolidated
Fixed end is connected by the second flexible hinge into pedestal, and output end is connected by two flexible plate spring structures into center movement platform
One side；The flexible leaf spring of described two is vertical with the side of center movement platform；The center movement platform is square
Shape, and connected by four cross decoupling-structures into pedestal, the cross decoupling-structure is distributed in the four of center movement platform
Week；The first piezoelectric actuator is equipped in the first bridge-type enlarger；The output end of second bridge-type enlarger passes through
Third flexible hinge connects the input terminal into the 2nd scott-russell structure；The fixing end of 2nd scott-russell structure
It is connected by the 4th flexible hinge into pedestal, output end is connected by two flexible plate spring structures into the another of center movement platform
A side；Wherein a side of center movement platform is adjacent with another side.
Preferably, the center movement platform is hollow structure.
Preferably, further including glass ruler；The glass ruler is fixed on center movement platform.
Two degrees of freedom scott-ressell micro-nano locating platform of the present invention has the advantages that
1, two degrees of freedom micro-nano locating platform, using XY parallel kinematic, platform overall structure compact dimensions, it is easy to process and
Assembly.
2, motion structure of the present invention is based primarily upon the flexible deformation of flexible hinge, due to hinge stretch and corner variation it is small,
Piezoelectric ceramics install compact, can be to avoid the non-linear disadvantage of parallel institution.
3, locating platform using bridge-type displacement amplifying mechanism be used as level-one displacement amplifying mechanism, ensure that platform greatly it is defeated
Good decoupling performance is taken into account when being displaced out, stability is good.
4, use scott-ressell mechanism innovative in locating platform is as second level displacement amplifying mechanism, both sufficiently
It ensure that the big output displacement of platform, while in turn ensuring that the decoupling performance of locating platform, the linearity are good.
5, the cross decoupling-structure used in motion platform keeps motion platform rigidity in target direction of motion small, non-
Rigidity is big in target direction of motion, so that platform coupling error is small, intrinsic frequency is high, and movement output stability is good.
6, the motion platform kinematic accuracy that the present invention designs is high, decoupling performance is good, fast response time is, it can be achieved that precision is swept
It retouches, plane positioning, track following etc. require.
7, center movement platform uses asymmetrical arrangement, reduces and exports motor decussation as caused by structure asymmetry
Coupling.
8, locating platform overall structure is integrally machined completion by line cutting technology, avoids caused by introducing other processes
Error loss, meets requirement of the system to high position precision and high tracking performance.
Detailed description of the invention
Fig. 1 is the structure chart of two degrees of freedom micro-nano locating platform in the present invention；
Fig. 2 is the amplification principle figure of scott-russell structure；
Fig. 3 is the scott-russell structure in the present invention；
Fig. 4 is the cross decoupling-structure in the present invention；
Fig. 5 is the overall structure figure of two degrees of freedom micro-nano locating platform in the present invention.
Specific embodiment
As shown in Figure 1, two degrees of freedom scott-russell flexibility micro-nano locating platform of the present invention, including four pedestals are solid
Determine the grating on 3, two, the scott-russell structure pedestal of bridge-type enlarger 4, four of pedestal 2, two of threaded hole 1, one
Support installs threaded hole 5, center movement platform 6, four cross decoupling-structures 7.
The pedestal 2 as shown in Figure 2, Figure 3, Figure 4 is installed on the workbench by pedestal fixing screwed hole 1, the bridge-type
On the base, output end is connected to scott-russell structure 3 by flexible hinge 303 for the fixing end connection of enlarger 4
On, scott-russell structure 3 is connected on the base by hinge 301, and 3 liang of motion parts of scott-russell structure pass through
Hinge 302 connects, and furthermore scott-russell structure 3 is connected on center movement platform 6 by plate spring structure 304 and 305,
I.e. scott-russell structure 3 is displaced output point 8 and connect with center movement platform, and the center movement platform 6 is square knot
Structure, and on the base by four uniformly distributed connections of cross decoupling-structure 7, glass ruler 11 is fixed on revenue centre motion platform
On 6；The grating seat 9 is fixed on the base 2 by installation threaded hole 5, grating degree head 10 and glass ruler on grating seat
Scale alignment on 11.
The working principle and process of two degrees of freedom scott-russell micro-nano locating platform of the present invention:
As shown in Figure 1, shown in Figure 5, the piezoelectric actuator in one direction of two degrees of freedom micro-nano locating platform is driven, only with Y-direction
For movement.12 both ends of piezoelectric actuator apply voltage, and piezoelectric actuator elongation pushes bridge-type displacement amplifying mechanism 4, two inputs
It holds to, each bridge arm on flexible hinge generation small bending and stretcher strain mobile to two sides.Two output ends, one end and pedestal 2
It is connected and fixed, other end output displacement, and pushes 303 hinge movements in scott-russell structure, scott-russell
Structure has special tactic pattern, has good decoupling performance, can convert the displacement of input terminal in vertical direction
Output displacement, and be transmitted on center movement platform 6 by 304 leaf springs and 305 plate spring structures.It is moved in center movement platform
When, the cross decoupling-structure 7 for being distributed in its surrounding deforms, and plays guiding and decoupling to the movement of center motion platform
Effect.When voltage reduces, piezoelectric actuator output displacement reduces, and each distressed structure flexible deformation becomes to restorable direction
Change, the output displacement of center movement platform reduces.
X-direction case of motion having the same.
When driving the piezoelectric actuator in two degrees of freedom micro-nano locating platform both direction simultaneously.Center movement platform can
Carry out any translation in plane.
It should be added that the nouns of locality such as " upper and lower " of foregoing description structure, " left and right " are according to embodiment attached drawing
It is not represent the uniqueness and indispensability of the installation site to describe conveniently for shown or habit.
Above-mentioned, although the foregoing specific embodiments of the present invention is described with reference to the accompanying drawings, not protects model to the present invention
The limitation enclosed, those skilled in the art should understand that, based on the technical solutions of the present invention, those skilled in the art are not
Need to make the creative labor the various modifications or changes that can be made still within protection scope of the present invention.
Claims (4)
1. two degrees of freedom scott-russell flexibility micro-nano locating platform, it is characterised in that: including pedestal (2), two scott-
Russell structure (3), two bridge-type enlargers (4), motion platform (6), four cross decoupling-structures；
The fixing end of two bridge-type enlargers (4) is fixed on the base, wherein the first bridge-type enlarger (4) is defeated
Outlet accesses the input terminal of the first scott-russell structure by the first flexible hinge (303)；First scott-russell
The fixing end of structure is connected by the second flexible hinge (302) into pedestal, output end by two flexibility plate spring structures connect into
One side of center movement platform；The flexible leaf spring of described two is vertical with the side of center movement platform；The center fortune
Moving platform is square shape, and is connected by four cross decoupling-structures into pedestal, during the cross decoupling-structure is distributed in
The surrounding of heart motion platform；The first piezoelectric actuator (12) are equipped in the first bridge-type enlarger (4)；Second bridge-type is put
The output end of great institutions connects the input terminal into the 2nd scott-russell structure by third flexible hinge；Second
The fixing end of scott-russell structure is connected by the 4th flexible hinge into pedestal, and output end passes through two flexible leaf spring knots
Structure connects another side into center movement platform；Wherein a side of center movement platform is adjacent with another side.
2. two degrees of freedom scott-russell flexibility micro-nano locating platform according to claim 1, it is characterised in that: institute
Stating center movement platform is hollow structure.
3. two degrees of freedom scott-russell flexibility micro-nano locating platform according to claim 1, it is characterised in that: also
Including glass ruler；The glass ruler is fixed on center movement platform.
4. two degrees of freedom scott-russell flexibility micro-nano locating platform according to claim 1, it is characterised in that: also
Including grating seat, grating seat is fixed on the base by installation threaded hole, on the grating degree head and glass ruler on grating seat
Scale alignment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910243175.8A CN110065926B (en) | 2019-03-28 | 2019-03-28 | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform |
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|---|---|---|---|
| CN201910243175.8A CN110065926B (en) | 2019-03-28 | 2019-03-28 | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform |
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| CN110065926A true CN110065926A (en) | 2019-07-30 |
| CN110065926B CN110065926B (en) | 2021-11-02 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113912005A (en) * | 2021-10-08 | 2022-01-11 | 天津大学 | XY full-decoupling micro-motion platform based on flexible hinge structure |
| CN114337364A (en) * | 2021-01-11 | 2022-04-12 | 西安交通大学 | Differential flexible displacement reducing mechanism with input and output in different directions |
| CN116251731A (en) * | 2023-04-13 | 2023-06-13 | 华中科技大学 | Ultrasonic elliptical vibration cutting system and method coupled with flexible hinge mechanism |
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| CN116251731A (en) * | 2023-04-13 | 2023-06-13 | 华中科技大学 | Ultrasonic elliptical vibration cutting system and method coupled with flexible hinge mechanism |
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