CN103216711B - Flexible micro-positioning platform - Google Patents
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- CN103216711B CN103216711B CN201310103681.XA CN201310103681A CN103216711B CN 103216711 B CN103216711 B CN 103216711B CN 201310103681 A CN201310103681 A CN 201310103681A CN 103216711 B CN103216711 B CN 103216711B
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Abstract
The invention discloses a flexible micro-positioning platform, which is characterized in that the positioning platform comprises a movable platform, four pairs of arched leaf springs, two flexible lever displacement amplification mechanisms, two piezoelectric ceramic drivers and a base, wherein the movable platform is in a square structure and is supported by the four pairs of amplified arched leaf springs distributed on four edges of the movable platform; the fixed ends of the flexible lever displacement amplification mechanisms are in rigid connection with the base by threads; the input ends of the flexible lever displacement amplification mechanisms are abutted against the working ends of the two piezoelectric ceramic drivers; the directions of the two flexible lever displacement amplification mechanisms are respectively parallel with the edge directions of the movable platform connected with the flexible lever displacement amplification mechanisms; the working ends of the two piezoelectric ceramic drivers are supported on the input ends of the two flexible lever displacement amplification mechanisms; the non-working ends of the two piezoelectric ceramic drivers are supported on ''L''-shaped rigid blocks extending from the fixed ends of the flexible lever displacement amplification mechanisms; and the ''L''-shaped rigid blocks are provided with threaded holes used for connecting with the piezoelectric ceramic drivers and the base.
Description
Technical field
The invention belongs to the micro OS of mechanical field, be specially a kind of flexible micro-positioning platform.This mini positioning platform, based on lever displacement equations, is mainly used in micro-nano field operation, has two degrees of freedom, can realize two rectilinear translation actions in working plane.
Background technique
Micromanipulator mechanism is an important branch of micro-electromechanical technology, has broad application prospects and important researching value in fields such as micromechanical parts assembling, the assembling of MEMS and encapsulation, bioengineering, micro-operation, coupling fiber operations.Current, be widely used in the molecule flying-spot microscope in the fields such as molecule operating, bioengineering and medical treatment are visual, Wicresoft, microcam, micro actuator, microsensor and tele-micromanipulating robot etc. and all belong to this field category.At present, the development trend main manifestations of micromanipulator is: in mechanism, and in conjunction with paralleling mechanism highi degree of accuracy, high rigidity advantage and integrated type flexible structure gapless, frictionless feature, exploitation volume is little, the new structure of compact structure, flexible operation; In driving mode, piezoelectric constant so that its volume is little, lightweight, resolution is high, respond the advantages such as fast, and is widely applied.As the micro-nano manipulation positioning system P-611 series of multiaxis being mainly used in optical system detection, micro Process, micro assemby that German PI Corp. develops, adopt Piezoelectric Ceramic, resolution can reach 1nm, Sun Li is peaceful, based on the design (W.Dong of the accurate flexible parallel connection positioning work piece of double piezoelectric ceramic driver drives, L.N.Sun, Z.J.Du, Design of a precision compliantparallel positioner driven by dual piezoelectric actuators.Sensorsand Actuators, 2007, 135 (1): 250-256) in, describe the six-freedom parallel micro-operation hand of Piezoelectric Ceramic, Piezoelectric Ceramic mode is adopted to realize grand micro-two-stage drive, a kind of column flexible hinge of novelty is adopted to increase rigidity and the Work space scope of operational tip in fine motion system, Li Yangmin etc. put forth effort on the flexible micromanipulator of exploitation different structure form, its modeling at a kind of flexible XY parallel operation device and Performance Evaluation (Yangmin Li, Qingsong Xu.Modeling and performanceevaluation of a flexure-based XY parallel micromanipulator, Mechanismand Machine Theory, 2009, 44 (12): 2127-2152) in, describe the parallel micro-manipulator device realizing two degrees of freedom in conjunction with leverage and parallelogram lindage feature, at design and analysis (the Yangmin Li of a kind of full decoupling flexible XY parallel operation device, Qingsong Xu.Design andanalysis of a totally decoupled flexure-based XY parallelmicromanipulator, IEEE Transactions on Robotics, 2009, 25 (3): 645-657) with at design and analysis (the Jiming Huang of full decoupling flexible parallel connection XY micromotion platform, Yangmin Li, Design and analysis of a completely decoupled compliant parallel XYmicro-motion stage.Proceedings of the2010IEEE InternationalConference on Robotics and Biomimetics, December14-18, 2010, Tianjin, China, 1008 ~ 1013) in, describe two kinds in conjunction with two-in-parallel Agency fourbar linkage features, adopt the parallel micro-manipulator device of different structure form, based on flexible hinge and orthogonal arrangement mode, above-mentioned two kinds of flexible micromanipulators all achieve the full decoupled of two translational degree of freedom in face, JimingHuang etc., based on the analysis (JimingHuang of the novel 2DOF flexible parallel connection micromanipulator of polar coordinate system, Yangmin Li, Analysis of a novel2-DOF flexure hinge-basedparallel micromanipulator in a polar coordinate system.Proceedingsof the2010IEEE International Conference on Automation and Logistics, August16-20, 2010, Hong Kong and Macau, 323-327), describe the flexible micromanipulator adopting linkage mechanism to form with two fourbar linkage, a translation and a rotational freedom in face can be realized.
In sum, flexible micromanipulator mechanism many employings piezoelectric constant direct drive mode that Most current is known, the displacement that being limited to piezoelectrics can provide exports, perform end be difficult to reach enough operating spaces, although and introduce certain displacement amplifying mechanism in some micromanipulator, operating space scope is increased to some extent, but make mechanism complicated, be easy to accumulated error, and cause the reduction of integral rigidity, be easy in the course of the work cause vibration; In addition, although consider that the concrete object of micro-nano operation is different, but basic sequence of operation is identical, accurate Motor ability is the most basic requirement that should possess micromanipulator flexibly, but because the general volume of operand is small, structure weak, the micromanipulator that accurately will complete some complexity still has certain difficulty, therefore, have the micromanipulator mechanism of high-accuracy, high rigidity and more freedom action fulfillment capability design and develop and with the mutual fusion of other associative operation technology, be the Main way of current micro-nano accurate operation technology.
Summary of the invention
For the deficiencies in the prior art, the technical problem that quasi-solution of the present invention is determined is, a kind of flexible micro-positioning platform is provided, this mini positioning platform introduces lever displacement amplifying mechanism, adopt Piezoelectric Ceramic, two-freedom translation motion in working plane can be realized, and make Work Space Range obtain effective amplification, there is the features such as highi degree of accuracy, compact structure, error free accumulation, mechanical friction and gapless.
The technological scheme that the present invention solve the technical problem is: design a kind of flexible micro-positioning platform, it is characterized in that this mini positioning platform comprises a moving platform, four pairs of arcuate tab springs, two flexible lever displacement amplifying mechanisms, two piezoelectric ceramic actuators and bases;
Described moving platform is square structure, is supported by the four pairs of arcuate tab springs be distributed on its four edges; The midline position of moving platform four edges all stretches out a projection, in described four projections, two projections be positioned in the lower edge of moving platform and left side edge are vacant, and the top edge being positioned at moving platform is connected with the output terminal of two flexible lever displacement amplifying mechanisms respectively with the projection of two in right side edge; Fixed end and the base of described flexible lever displacement amplifying mechanism are rigidly connected, and the working end of its input end and two piezoelectric ceramic actuators is inconsistent, and the edge direction of the moving platform that the direction of two flexible lever displacement amplifying mechanisms is coupled is respectively parallel; The working end of described two piezoelectric ceramic actuators withstands on the input end of described two flexible lever displacement amplifying mechanisms, its non-operative end withstands on " L " shape Stiff Block that flexible lever displacement amplifying mechanism fixed end extends, the sidewall of " L " shape Stiff Block is processed with tapped hole, and the non-operative end of piezoelectric ceramic actuator is rigidly connected by this tapped hole and " L " shape Stiff Block; The upper-end surface of each described " L " Stiff Block is processed with a tapped hole, and by this tapped hole, " L " shape Stiff Block is connected with base;
Described four pairs of arcuate tab spring structure forms are identical, symmetry is arranged on the center line of moving platform four edges edge respectively, and the closed end of often pair of arcuate tab spring is near the center line at described edge, opening end is then away from the center line at described edge, in the Liang Ge branch of described often pair of arcuate tab spring opening end, a branch is connected with moving platform, another branch stretches out, and increase width simultaneously, and be connected in the corner position of moving platform another branch with the arcuate tab spring opening end on neighboring edge, three tapped holes are processed with at described widened portion, be connected with bolt of lower base by this tapped hole,
Described two flexible lever displacement amplifying mechanism structures composition is identical, and one is positioned at outside the top edge of moving platform, and horizontal positioned is called horizontal flexibility lever displacement amplifying mechanism, another is positioned at outside the right side edge of moving platform, vertically places, and is called vertical flexible lever displacement amplifying mechanism, described flexible lever displacement amplifying mechanism is formed by a rigid beam, three flexible beams and " L " shape Stiff Block, in described horizontal flexibility lever displacement amplifying mechanism, rigid beam is positioned at the topmost part, and horizontal positioned, the first vertical flexible beam, the second vertical flexible beam and the 3rd vertical flexible beam is distributed with from left to right successively between the rigid beam of described horizontal positioned and described arcuate tab spring, three vertical flexible beams all have one group of semicircle groove, left and right two semicircle grooves of each group are symmetrically distributed on left and right two end faces of vertical flexible beam, the groove shapes of three groups of described semicircle grooves is consistent, and relative to the symmetrical distribution of center line of the vertical flexible beam in respective place, described first vertical flexible beam upper-end surface is connected with described horizontal stiffness beam, lower end surface and first " L " shape Stiff Block is connected, the upper-end surface of the described second vertical flexible beam is connected with described horizontal stiffness beam, the working end of lower end surface and the first piezoelectric ceramic actuator is inconsistent, described 3rd vertical flexible beam upper-end surface is connected with horizontal stiffness beam, lower end surface is connected with the projection on moving platform top edge midline position, described first vertical flexible beam is the fixed end of described horizontal flexibility lever displacement amplifying mechanism, described second vertical flexible beam is the input end of described horizontal flexibility lever displacement amplifying mechanism, described 3rd vertical flexible beam is the output terminal of described horizontal flexibility lever displacement amplifying mechanism, as a same reason, in described vertical flexible lever displacement amplifying mechanism, rigid beam is positioned at most right part, and vertically place, the first horizontal flexibility beam is distributed with from bottom to top successively between the rigid beam of described vertical placement and described arcuate tab spring, second horizontal flexibility beam and the 3rd horizontal flexibility beam, three horizontal flexibility beams all have one group of semicircle groove, it is upper that each is organized, lower two semicircle grooves are symmetrically distributed in the upper of horizontal flexibility beam, on lower two end faces, the groove shapes of three groups of described semicircle grooves is consistent, and it is symmetrical up and down relative to the center line of respective place horizontal flexibility beam, the right side of described first horizontal flexibility beam is connected with described vertical rigid beam, left side and second " L " shape Stiff Block is connected, the right side of described second horizontal flexibility beam is connected with described vertical rigid beam, the working end of left side and the second piezoelectric ceramic actuator is inconsistent, the right side of described 3rd horizontal flexibility beam is connected with vertical rigid beam, left side is connected with the projection on described moving platform right part edge midline position, described first horizontal flexibility beam is the fixed end of described vertical flexible lever displacement amplifying mechanism, described second horizontal flexibility beam is the input end of described vertical flexible lever displacement amplifying mechanism, described 3rd horizontal flexibility beam is the output terminal of described vertical flexible lever displacement amplifying mechanism,
Described two piezoelectric ceramic actuator structures composition is identical, and the first piezoelectric ceramic actuator is positioned between the second vertical flexible beam of described horizontal flexibility lever displacement amplifying mechanism and described first " L " shape Stiff Block; Described second piezoelectric ceramic actuator is positioned between the second horizontal flexibility beam of described vertical flexible lever displacement amplifying mechanism and described second " L " shape Stiff Block; First piezoelectric ceramic actuator is vertically placed, its working end is against on the lower end surface of the described second vertical flexible beam, non-operative end is then against on the upper side of described first " L " shape Stiff Block horizontal component, the downside of described first " L " shape Stiff Block horizontal component has tapped hole, by described tapped hole, described first piezoelectric ceramic actuator and described first " L " shape Stiff Block are threaded; As a same reason, the second piezoelectric ceramic actuator horizontal positioned, its installation Placement is rotated counterclockwise 90 degree and is same as described first piezoelectric ceramic actuator;
Described base is square structure, base has two class tapped holes: on four positions of the base corresponding with described moving platform four drift angles, have first kind tapped hole, described first kind tapped hole has four groups, and each group tapped hole is by three measure-alike tapped hole compositions; In addition, in base and first, second " L " shape Stiff Block upper-end surface described open on two corresponding positions of tapped hole and have Equations of The Second Kind tapped hole, described Equations of The Second Kind tapped hole has two, consistent size, lays respectively at the lower position of described first " L " shape Stiff Block and described second " L " shape Stiff Block; Tapped hole one_to_one corresponding on two class tapped holes on described base and moving platform and flexible lever displacement amplifying mechanism, when mounted, described moving platform and flexible lever displacement amplifying mechanism are rigidly secured on described base by screw thread.
Compared with prior art, flexible micro-positioning platform tool of the present invention has the following advantages:
1. adopt flexible parallel connection structure, there is two degrees of freedom, two rectilinear translation actions can be realized, there is the advantages such as highi degree of accuracy, compact structure, error free accumulation;
2., based on the micro-resiliently deformable of single-freedom and flexible hinge and arcuate tab spring, can effectively eliminate the shortcomings such as paralleling mechanism unintentional nonlinearity;
3. introduce flexible lever enlarger, make Work Space Range obtain effective amplification, achieve the effective amplification to the limited output of piezoelectric ceramic actuator, increase the Work Space Range that mechanism exports end, and resolution is high, rapid dynamic response speed;
4. adopt piezoelectric ceramic actuator to promote to drive link, the active accommodation of moving platform, microfeed and precision positioning can be realized, can be used as the auxiliary positioning platform of nano-imprint lithography location, micro-nano operation system.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of a kind of embodiment of flexible micro-positioning platform of the present invention;
Fig. 2 is the flexible body structural representation of a kind of embodiment of flexible micro-positioning platform of the present invention;
Fig. 3 is the rigid base structural representation of a kind of embodiment of flexible micro-positioning platform of the present invention;
Fig. 4 is the section shape structural representation of flexible body structure shown in a kind of embodiment Fig. 2 of flexible micro-positioning platform of the present invention.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof, technical solution of the present invention is described in further details.
The flexible micro-positioning platform based on lever displacement equations of the present invention's design (is called for short locating platform, see Fig. 1-4), it is characterized in that, this locating platform comprises a moving platform, four pairs of arcuate tab springs, two flexible lever displacement amplifying mechanisms, two piezoelectric ceramic actuators and a base, described moving platform is square structure, supported by the four pairs of arcuate tab springs be distributed on its four edges, the midline position of described moving platform four edges all stretches out a projection, in described four projections, two projections be positioned in the lower edge of described moving platform and the left side edge of described moving platform are vacant, two projections be positioned in the top edge of described moving platform and the right side edge of described moving platform are connected with the output terminal of two flexible lever displacement amplifying mechanisms respectively, the fixed end of described flexible lever displacement amplifying mechanism is rigidly connected by screw thread and described base, the working end of its input end and described two piezoelectric ceramic actuators is inconsistent, the edge direction of the described moving platform that the direction of described two flexible lever displacement amplifying mechanisms is coupled is respectively parallel, the working end of described two piezoelectric ceramic actuators withstands on the input end of described two flexible lever displacement amplifying mechanisms, non-operative end withstands on " L " shape Stiff Block that described flexible lever displacement amplifying mechanism fixed end extends, described " L " shape Stiff Block sidewall is processed with tapped hole, and the non-operative end of described piezoelectric ceramic actuator is connected with described " L " shape Stiff Block by described tapped hole, a processing tapped hole on the upper-end surface of each described " L " shape Stiff Block, makes described " L " shape Stiff Block be connected with described bolt of lower base by this tapped hole.
Further specifically, the flexible micro-positioning platform of the present invention's design (is called for short mini positioning platform, see Fig. 1-4), it is characterized in that this positioning means mainly comprises a moving platform 1, four pairs of arcuate tab springs 2, two flexible lever displacement amplifying mechanisms 3, two piezoelectric ceramic actuators and a base 5.
It is four right that described arcuate tab spring 2 comprises, four pairs of structural types are identical, be distributed on four edges of described moving platform 1, each edge of i.e. moving platform 1 all comprises arcuate tab spring 2 described in a pair, arcuate tab spring 2 described in every a pair is all about the symmetrical distribution of center line at place moving platform 1 edge, the closed end of each described arcuate tab spring 2 is near described edge center line, opening end is then positioned at the position far away apart from described edge center line, in the Liang Ge branch of described each arcuate tab spring 2 opening end, a branch is connected with described moving platform 1, another branch is outward extending increases width simultaneously, be connected with the described arcuate tab spring 2 opening end branch being distributed in described moving platform 1 neighboring edge at described moving platform 1 four corner positions, and process four groups of worm structures 11 at widened portion, 12, 13 and 14, described worm structure of often organizing forms by three tapped holes, by described four groups of worm structures 11, 12, 13 are connected with described base 5 bolt with 14,
Described flexible lever displacement amplifying mechanism 3 comprises two: horizontal flexibility lever displacement amplifying mechanism 31 and a vertical flexible lever displacement amplifying mechanism 32, horizontal flexibility lever displacement amplifying mechanism 31 is arranged on the top edge of described moving platform 1, and horizontal positioned, vertical flexible lever displacement amplifying mechanism 32 is arranged on outside the right side edge of described moving platform 1, and vertically places, described horizontal flexibility lever displacement amplifying mechanism 31 is by a rigid beam 314, three flexible beams 311, 312, 313 and " L " shape Stiff Block 315 form, described rigid beam 314 is positioned at the topmost part of described horizontal flexibility lever displacement amplifying mechanism 31, and horizontal positioned, distribute below described horizontal stiffness beam 314 first vertical flexible beam 311 from left to right successively, second vertical flexible beam 312 and the 3rd vertical flexible beam 313, three described flexible beams 311, 312, 313 all vertically place, three described flexible beams 311, 312, one group of semicircle groove is all had on 313, first vertical flexible beam 311 has first group of semicircle groove 3111, second vertical flexible beam 312 has second group of semicircle groove 3121, 3rd vertical flexible beam 313 has the 3rd group of semicircle groove 3131, a left side for each group, right two semicircle grooves are symmetrically distributed in a left side for vertical flexible beam, in right both ends of the surface, three groups of described semicircle grooves 3111, 3121, the groove shapes of 3131 is consistent, and relative to the vertical flexible beam 311 in respective place, 312, the symmetrical distribution of center line of 313, described first vertical flexible beam 311 upper-end surface is connected with described horizontal stiffness beam 314, lower end surface and first " L " shape Stiff Block 315 is connected, described second vertical flexible beam 312 upper-end surface is connected with described horizontal stiffness beam 314, lower end surface and described first piezoelectric ceramic actuator 41 working end inconsistent, described 3rd vertical flexible beam 313 upper-end surface is connected with described horizontal stiffness beam 314, lower end surface is connected with the projection on described moving platform 1 top edge midline position, described first vertical flexible beam 311 is the fixed end of described horizontal flexibility lever displacement amplifying mechanism 31, described second vertical flexible beam 312 is described horizontal flexibility lever displacement amplifying mechanism 31 input end, described 3rd vertical flexible beam 313 is described horizontal flexibility lever displacement amplifying mechanism 31 output terminal, described horizontal flexibility lever displacement amplifying mechanism 31 fixed end extends first " L " shape Stiff Block 315 downwards, the upper end of described first " L " shape Stiff Block 315 vertical portion is connected with the left end of described horizontal stiffness beam 314 with the lower end of the described first vertical flexible beam 311 simultaneously, the right-hand member of described first " L " shape Stiff Block 315 horizontal component is connected with described worm structure 11, described first " L " shape Stiff Block 315 vertical portion upper-end surface has tapped hole 3151, be connected with described base 5 bolt by described tapped hole 3151, downside has tapped hole 3152 to described first " L " shape Stiff Block 315 horizontal component, be connected with described first piezoelectric ceramic actuator 41 by described tapped hole 3152,
As a same reason, described vertical flexible lever displacement amplifying mechanism 32 is by a rigid beam 324, three flexible beams 321, 322, 323 and " L " shape Stiff Block 325 form, described rigid beam 324 is positioned at the most right part of described flexible lever displacement amplifying mechanism 32, and vertically place, distribute on the left of described vertical rigid beam 324 first horizontal flexibility beam 321 from bottom to top successively, second horizontal flexibility beam 322 and the 3rd horizontal flexibility beam 323, three described flexible beams 321, 322, 323 equal horizontal positioned, three described flexible beams 321, 322, one group of semicircle groove is all had on 323, first horizontal flexibility beam 321 has the 4th group of semicircle groove 3211, second horizontal flexibility beam 322 has the 5th group of semicircle groove 3221, 3rd horizontal flexibility beam 323 has the 6th group of semicircle groove 3231, it is upper that each is organized, lower two semicircle grooves are symmetrically distributed in the upper of horizontal flexibility beam, in lower both ends of the surface, three groups of described semicircle grooves 3211, 3221, the groove shapes of 3231 is consistent, and relative to respective place horizontal flexibility beam 321, 322, the center line of 323 is symmetrical up and down, described first horizontal flexibility beam 321 right side is connected with described vertical rigid beam 324, left side is connected with described second " L " shape Stiff Block 325, described second horizontal flexibility beam 322 right side is connected with described vertical rigid beam 324, left side and described second piezoelectric ceramic actuator 42 working end inconsistent, described 3rd horizontal flexibility beam 323 right side is connected with described vertical rigid beam 324, left side is connected with the projection on described moving platform 1 right side edge midline position, described first horizontal flexibility beam 321 is the fixed end of described vertical flexible lever displacement amplifying mechanism 32, described second horizontal flexibility beam 322 is described vertical flexible lever displacement amplifying mechanism 32 input end, described 3rd horizontal flexibility beam 323 is described vertical flexible lever displacement amplifying mechanism 32 output terminal, described vertical flexible lever displacement amplifying mechanism 32 fixed end extends second " L " shape Stiff Block 325 left, the upper end of described second " L " shape Stiff Block 325 vertical portion is connected with described worm structure 13, the right-hand member of described second " L " shape Stiff Block 325 horizontal component is connected with the lower end of described vertical rigid beam 324 with the left end of described first horizontal flexibility beam 321 simultaneously, described second " L " shape Stiff Block 325 horizontal component upper-end surface has tapped hole 3251, be connected with described base 5 bolt by described tapped hole 3251, the left surface of described second " L " shape Stiff Block 325 vertical portion has tapped hole 3252, be connected with described second piezoelectric ceramic actuator 42 by described tapped hole 3252,
Described piezoelectric ceramic actuator comprises the two: first piezoelectric ceramic actuator 41 and the second piezoelectric ceramic actuator 42, first piezoelectric ceramic actuator 41 is positioned between the second vertical beam 312 of described horizontal flexibility lever displacement amplifying mechanism 31 and described first " L " shape Stiff Block 315, described first piezoelectric ceramic actuator 41 is vertically placed, described first piezoelectric ceramic actuator 41 working end is against on the lower end surface of the described second vertical flexible beam 312, non-operative end is against on the upper side of described first " L " shape Stiff Block 315 horizontal component, the downside of described first " L " shape Stiff Block 315 horizontal component has tapped hole 3152, by described tapped hole 3152, described first piezoelectric ceramic actuator 41 and described first " L " shape Stiff Block 315 are rigidly connected, described second piezoelectric ceramic actuator 42 is positioned between the second horizontal flexibility beam 322 of described vertical flexible lever displacement amplifying mechanism 32 and described second " L " shape Stiff Block 325, described second piezoelectric ceramic actuator 42 horizontal positioned, described second piezoelectric ceramic actuator 42 working end is against on the left side of described second horizontal flexibility beam 322, non-operative end is against on the right flank of described second " L " shape Stiff Block 325 vertical portion, the left surface of described second " L " shape Stiff Block 325 vertical portion has tapped hole 3252, by described tapped hole 3252, described second piezoelectric ceramic actuator 42 and described second " L " shape Stiff Block 325 are threaded,
Described base 5 is square structure (see Fig. 3), and base 5 has two class tapped holes, and first kind tapped hole 51 is for connecting base 5 and described four groups of worm structures 11,12,13 and 14, Equations of The Second Kind tapped hole 52 is for connecting base 5 and described two " L " shape Stiff Blocks 315 and 325, described first kind tapped hole 51 has four groups, namely 511,512,513 and 514, and each organize described tapped hole by three the measure-alike and tapped hole of distribution triangular in shape composition, described first group of tapped hole 511 is opened on the position that base 5 is corresponding with worm structure 11 on described moving platform, described second group of tapped hole 512 is opened on the position that base 5 is corresponding with worm structure 12 on described moving platform, described 3rd group of tapped hole 513 is opened on the position that base 5 is corresponding with worm structure 13 on described moving platform, and described 4th group of tapped hole 514 is opened on the position that base 5 is corresponding with worm structure 14 on described moving platform, described Equations of The Second Kind tapped hole 52 is made up of two measure-alike tapped holes 521 and 522, the position of described tapped hole 521 is corresponding with described tapped hole 3151 position that described first " L " shape Stiff Block 315 is opened, the position of described tapped hole 522 is corresponding with described tapped hole 3251 position that described second " L " shape Stiff Block 325 is opened, during installation, base 5 is installed on the below of described moving platform 1 and described flexible lever displacement amplifying mechanism 3, tapped hole one_to_one corresponding on two class tapped holes 51 and 52 on described base 5 and described moving platform 1 and described flexible lever displacement amplifying mechanism 3, and be rigidly connected respectively by bolt.
The further feature of positioning means of the present invention is a described moving platform 1, four pairs of arcuate tab springs 2 with two flexible lever displacement amplifying mechanisms 3 and is connected and adopts the disposable acquisition of overall processing mode (see Fig. 4).This will be conducive to the precision improving nano-positioning stage itself, and significantly cuts down finished cost.
Positioning means of the present invention can be used as micro-/receive the auxiliary positioning platform of field operation, realize micro-/receive the microfeed of field operation and precision positioning.But do not get rid of in other navigation systems being applied to similar techniques requirement.
Positioning means of the present invention can realize the active accommodation of x, y two translational degree of freedom.In order to its working method is described, first set x-axis, y-axis is positioned at horizontal plane, makes the center of moving platform 1 be the initial point of system of coordinates, the direction of getting the lower edge place being parallel to moving platform 1 is x-axis direction, then along perpendicular to this limit and to cross the direction at moving platform 1 center be y-axis.
The working procedure of nano-positioning stage of the present invention is as follows:
Only drive the piezoelectric ceramic actuator 42 of the horizontal positioned parallel with x-axis that its length is increased, another piezoelectric ceramic actuator 41 does not drive, so, piezoelectric ceramic actuator 42 working end promotes the single-freedom and flexible hinge 3221 inconsistent with it and produces Horizontal displacement, thus drive vertical flexible lever displacement amplifying mechanism 32 to make the single-freedom and flexible hinge 3211 being positioned at its fixed end produce corresponding bending deflection, realize the displacement equations effect of its working end, moving platform 1 is dragged by the single-freedom and flexible hinge 3231 being positioned at vertical flexible lever displacement amplifying mechanism 32 working end, under the dragging of single-freedom and flexible hinge 3231, be distributed in moving platform 1 left, two pairs of arcuate tab springs 2 on right two edges produce main elastic strain, thus make moving platform 1 produce linear translation along horizontal x direction.
Only drive the piezoelectric ceramic actuator 41 of the vertical placement parallel with y-axis that its length is increased, another piezoelectric ceramic actuator 42 does not drive, so, piezoelectric ceramic actuator 41 working end promotes the straight-line displacement that the single-freedom and flexible hinge 3121 inconsistent with it produces vertical direction, thus drive horizontal flexibility lever displacement amplifying mechanism 31 to make the single-freedom and flexible hinge 3111 being positioned at its fixed end produce corresponding bending deflection, realize the displacement equations effect of its working end, moving platform 1 is dragged by the single-freedom and flexible hinge 3131 being positioned at horizontal flexibility lever displacement amplifying mechanism 31 working end, under the dragging of single-freedom and flexible hinge 3131, be distributed on moving platform 1, two pairs of arcuate tab springs 2 on lower two edges produce main elastic strain, thus make moving platform 1 produce linear translation along vertical y direction.
The present invention does not address part and is applicable to prior art.
It should be added that, the installation position word of the component such as " upper and lower ", " forward and backward ", " left and right " described in description scheme of the present invention is according to embodiment's accompanying drawing Suo Shi or custom, only there is relativity, or be only convenient in order to describe, not represent uniqueness and the indispensability of this mounting point.
Claims (2)
1. a flexible micro-positioning platform, is characterized in that this mini positioning platform comprises a moving platform, four pairs of arcuate tab springs, two flexible lever displacement amplifying mechanisms, two piezoelectric ceramic actuators and bases;
Described moving platform is square structure, is supported by the four pairs of arcuate tab springs be distributed on its four edges; The midline position of moving platform four edges all stretches out a projection, in described four projections, two projections be positioned in the lower edge of moving platform and left side edge are vacant, and the top edge being positioned at moving platform is connected with the output terminal of two flexible lever displacement amplifying mechanisms respectively with the projection of two in right side edge; Fixed end and the base of described flexible lever displacement amplifying mechanism are rigidly connected, and the working end of its input end and two piezoelectric ceramic actuators is inconsistent, and the edge direction of the moving platform that the direction of two flexible lever displacement amplifying mechanisms is coupled is respectively parallel; The working end of described two piezoelectric ceramic actuators withstands on the input end of described two flexible lever displacement amplifying mechanisms, its non-operative end withstands on " L " shape Stiff Block that flexible lever displacement amplifying mechanism fixed end extends, the sidewall of " L " shape Stiff Block is processed with tapped hole, and the non-operative end of piezoelectric ceramic actuator is rigidly connected by this tapped hole and " L " shape Stiff Block; The upper-end surface of each described " L " Stiff Block is processed with a tapped hole, and by this tapped hole, " L " shape Stiff Block is connected with base;
Described four pairs of arcuate tab spring structure forms are identical, symmetry is arranged on the center line of moving platform four edges edge respectively, and the closed end of often pair of arcuate tab spring is near the center line at described edge, opening end is then away from the center line at described edge, in the Liang Ge branch of described often pair of arcuate tab spring opening end, a branch is connected with moving platform, another branch stretches out, and increase width simultaneously, and be connected in the corner position of moving platform another branch with the arcuate tab spring opening end on neighboring edge, three tapped holes are processed with at described widened portion, be connected with bolt of lower base by this tapped hole,
Described two flexible lever displacement amplifying mechanism structures composition is identical, and one is positioned at outside the top edge of moving platform, and horizontal positioned is called horizontal flexibility lever displacement amplifying mechanism, another is positioned at outside the right side edge of moving platform, vertically places, and is called vertical flexible lever displacement amplifying mechanism, described flexible lever displacement amplifying mechanism is formed by a rigid beam, three flexible beams and " L " shape Stiff Block, in described horizontal flexibility lever displacement amplifying mechanism, rigid beam is positioned at the topmost part, and horizontal positioned, the first vertical flexible beam, the second vertical flexible beam and the 3rd vertical flexible beam is distributed with from left to right successively between the rigid beam of described horizontal positioned and described arcuate tab spring, three vertical flexible beams all have one group of semicircle groove, left and right two semicircle grooves of each group are symmetrically distributed on left and right two end faces of vertical flexible beam, the groove shapes of three groups of described semicircle grooves is consistent, and relative to the symmetrical distribution of center line of the vertical flexible beam in respective place, described first vertical flexible beam upper-end surface is connected with described horizontal stiffness beam, lower end surface and first " L " shape Stiff Block is connected, the upper-end surface of the described second vertical flexible beam is connected with described horizontal stiffness beam, the working end of lower end surface and the first piezoelectric ceramic actuator is inconsistent, described 3rd vertical flexible beam upper-end surface is connected with described horizontal stiffness beam, lower end surface is connected with the projection on moving platform top edge midline position, described first vertical flexible beam is the fixed end of described horizontal flexibility lever displacement amplifying mechanism, described second vertical flexible beam is the input end of described horizontal flexibility lever displacement amplifying mechanism, described 3rd vertical flexible beam is the output terminal of described horizontal flexibility lever displacement amplifying mechanism, as a same reason, in described vertical flexible lever displacement amplifying mechanism, rigid beam is positioned at most right part, and vertically place, the first horizontal flexibility beam is distributed with from bottom to top successively between the rigid beam of described vertical placement and described arcuate tab spring, second horizontal flexibility beam and the 3rd horizontal flexibility beam, three horizontal flexibility beams all have one group of semicircle groove, it is upper that each is organized, lower two semicircle grooves are symmetrically distributed in the upper of horizontal flexibility beam, on lower two end faces, the groove shapes of three groups of described semicircle grooves is consistent, and it is symmetrical up and down relative to the center line of respective place horizontal flexibility beam, the right side of described first horizontal flexibility beam is connected with described vertical rigid beam, left side and second " L " shape Stiff Block is connected, the right side of described second horizontal flexibility beam is connected with described vertical rigid beam, the working end of left side and the second piezoelectric ceramic actuator is inconsistent, the right side of described 3rd horizontal flexibility beam is connected with vertical rigid beam, left side is connected with the projection on moving platform right part edge midline position, described first horizontal flexibility beam is the fixed end of described vertical flexible lever displacement amplifying mechanism, described second horizontal flexibility beam is the input end of described vertical flexible lever displacement amplifying mechanism, described 3rd horizontal flexibility beam is the output terminal of described vertical flexible lever displacement amplifying mechanism,
Described two piezoelectric ceramic actuator structures composition is identical, and the first piezoelectric ceramic actuator is positioned between the second vertical flexible beam of described horizontal flexibility lever displacement amplifying mechanism and described first " L " shape Stiff Block; Described second piezoelectric ceramic actuator is positioned between the second horizontal flexibility beam of described vertical flexible lever displacement amplifying mechanism and described second " L " shape Stiff Block; First piezoelectric ceramic actuator is vertically placed, its working end is against on the lower end surface of the second vertical flexible beam, non-operative end is then against on the upper side of described first " L " shape Stiff Block horizontal component, the downside of described first " L " shape Stiff Block horizontal component has tapped hole, by described tapped hole, described first piezoelectric ceramic actuator and described first " L " shape Stiff Block are threaded; As a same reason, the second piezoelectric ceramic actuator horizontal positioned, its installation Placement is rotated counterclockwise 90 degree and is same as described first piezoelectric ceramic actuator;
Described base is square structure, base has two class tapped holes: on four positions of the base corresponding with described moving platform four drift angles, have first kind tapped hole, described first kind tapped hole has four groups, and each group tapped hole is by three measure-alike tapped hole compositions; In addition, in base and first, second " L " shape Stiff Block upper-end surface described open on two corresponding positions of tapped hole and have Equations of The Second Kind tapped hole, described Equations of The Second Kind tapped hole has two, consistent size, lays respectively at the lower position of described first " L " shape Stiff Block and described second " L " shape Stiff Block; Tapped hole one_to_one corresponding on two class tapped holes on described base and moving platform and flexible lever displacement amplifying mechanism, when mounted, described moving platform and flexible lever displacement amplifying mechanism are rigidly secured on described base by screw thread.
2. flexible micro-positioning platform according to claim 1, is characterized in that a described moving platform, the four pairs of arcuate tab springs and two flexible lever displacement amplifying mechanisms and is connected adopting the disposable acquisition of overall processing mode.
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| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN104626111B (en) * | 2015-01-06 | 2016-03-16 | 北京航空航天大学 | A kind of parallel alignment platform with long-range center of rotation based on flexible parallel-crank mechanism |
| CN105904443B (en) * | 2016-06-17 | 2018-07-20 | 华南理工大学 | A kind of two-freedom compliant parallel mechanism of mobile decoupling |
| CN106057250B (en) * | 2016-07-05 | 2018-07-24 | 昆明理工大学 | A kind of two degrees of freedom mini positioning platform |
| CN106251910B (en) * | 2016-08-24 | 2019-11-08 | 广东工业大学 | One kind receives mini positioning platform |
| CN106782674B (en) * | 2017-02-07 | 2022-10-25 | 广东工业大学 | Micro-displacement amplifier and nano positioning device |
| CN107068201B (en) * | 2017-04-24 | 2019-09-20 | 天津大学 | The pure rotation mini positioning platform of single-driving type |
| CN107237872B (en) * | 2017-06-22 | 2019-08-20 | 山东大学 | Displacement resolution based on lever drive refines micro-nano operating platform |
| CN109215730B (en) * | 2018-10-15 | 2024-05-28 | 安徽理工大学 | Displacement reversing amplifying mechanism based on flexible hinge |
| CN111326208B (en) * | 2018-12-13 | 2022-06-24 | 北航（天津武清）智能制造研究院有限公司 | Flexible mobile device |
| CN114198481B (en) * | 2021-12-16 | 2023-11-10 | 北京航空航天大学 | Parallel two-degree-of-freedom precise motion executing mechanism based on flexible hinge |
| WO2024000776A1 (en) * | 2022-06-30 | 2024-01-04 | 北京华卓精科科技股份有限公司 | Positioning apparatus for loading and unloading and lithography device |
| CN116013402B (en) * | 2022-12-26 | 2023-09-26 | 齐鲁工业大学 | Two-dimensional micro-positioning platform |
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| CN101738855A (en) * | 2009-12-23 | 2010-06-16 | 天津大学 | Flexible micro-positioning stage with two degrees of freedom |
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| CN101738855A (en) * | 2009-12-23 | 2010-06-16 | 天津大学 | Flexible micro-positioning stage with two degrees of freedom |
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