CN103982756A - Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform - Google Patents
Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform Download PDFInfo
- Publication number
- CN103982756A CN103982756A CN201410240498.9A CN201410240498A CN103982756A CN 103982756 A CN103982756 A CN 103982756A CN 201410240498 A CN201410240498 A CN 201410240498A CN 103982756 A CN103982756 A CN 103982756A
- Authority
- CN
- China
- Prior art keywords
- axis
- platform
- motor
- slide block
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention provides a serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform which comprises a base. The base is provided with a macro and micro XY positioning platform capable of moving in the X-axis direction and the Y-axis direction, four sides of the macro and micro XY positioning platform are provided with a first X-axis motor, a second X-axis motor, a first Y-axis motor and a second Y-axis motor respectively through connection frames, the first X-axis motor, the second X-axis motor, the first Y-axis motor and the second Y-axis motor are identical in structure, the first X-axis motor and the second X-axis motor are coaxial and carry out acceleration positioning motions in the X-axis direction, the first Y-axis motor and the second Y-axis motor are coaxial and carry out acceleration positioning motions in the Y-axis direction, and the bottom end of the first X-axis motor, the bottom end of the second X-axis motor, the bottom end of the first Y-axis motor and the bottom end of the second Y-axis motor are all fixedly connected with the base. Acceleration and long strokes in the X-axis direction and the Y-axis direction are achieved, meanwhile, errors of the motors are compensated by compensating a piezoelectric actuator in the positioning platform, and ultimately, super-high-acceleration, long-stroke and ultraprecise positioning two-dimensional motions are achieved.
Description
Technical field:
The present invention relates to a kind of platform, relate in particular to a kind of tandem superelevation acceleration ultraprecise location two-dimensional stage.
Background technique
Along with ultraprecise processing, the fast development of the precision engineerings such as microelectronic manufacture, large Range Ultraprecise location highlights day by day as the significance of locator key equipment, particularly in photoetching, in the microelectronics such as bonding, equipment need to do the accurate setting movement of the platform carrying out under fast state.At present, locating platform high-speed motion has developed into the limit, and this has restricted the raising of locating platform manufacturing efficiency.Under the condition that meets predetermined accuracy, improve platform speed and acceleration, shorten machine time, effectively enhancing productivity is the direction of locating platform development.
The location of at present domestic high speed and precision is mainly that linear electric motor and piezoelectric actuator etc. complete, although these location improve for speed, acceleration can be restricted; By tandem, two voice coil motors and locating platform are coupled together, the restriction of tempo of penetration, realizes superelevation acceleration, and this application for modern field of microelectronic fabrication has certain application value.
Summary of the invention
For above-mentioned defect or deficiency, the invention provides a kind of tandem superelevation acceleration ultraprecise location two-dimensional stage, this precision positioning two-dimensional stage has solved prior art and cannot break through the precision positioning problem of higher acceleration.
For reaching above object, technological scheme of the present invention is:
Comprise base, grand micro-XY locating platform that can move along X-axis direction and Y direction is installed on base, on four limits of grand micro-XY locating platform, by link press span, X-axis the first motor, X-axis the second motor, Y-axis the first motor that structure is identical is installed, and Y-axis the second motor; Wherein, X-axis the first motor and X-axis the second motor coaxle setting, carry out X-axis direction and accelerate setting movement, and Y-axis the first motor and Y-axis the second motor coaxle setting are carried out Y direction and accelerated setting movement; X-axis the first motor, X-axis the second motor, Y-axis the first motor, and the bottom of Y-axis the second motor is all fixedly connected with base.
Described grand micro-XY locating platform comprises: grand moving X platform and grand moving Y platform, wherein, the both sides of grand moving X platform are provided with X-axis the first cross slideway and X-axis the 3rd cross slideway, the both sides of grand moving Y platform are provided with X-axis the second cross slideway and X-axis the 4th cross slideway, X-axis the first cross slideway matches with X-axis the second cross slideway, and X-axis the 3rd cross slideway matches with X-axis the 4th cross slideway.
The both sides of described grand moving X platform are provided with Y-axis the first slide block guide rail and Y-axis the second slide block guide rail, Y-axis the first slide block is installed on Y-axis the first slide block guide rail, Y-axis the second slide block is installed on Y-axis the second slide block guide rail, and Y-axis the first slide block guide rail and Y-axis the second slide block guide rail and X-axis the first cross slideway be arranged in parallel; The both sides of X platform are also provided with X-axis the first grating scale and X-axis the second grating scale; The lower surface both sides of grand moving X platform are provided with Y-axis the first grating scale and Y-axis the second grating scale, and Y-axis the first grating scale and Y-axis the second grating scale and vertical setting of X-axis the first cross slideway.
The bottom of described grand moving X platform is provided with the grand micro-XY platform base fixing with base, Y-axis the first grating ruler reading head matching with Y-axis the first grating scale is installed on grand micro-XY platform base, and Y-axis the second grating ruler reading head matching with Y-axis the second grating scale.
Described grand micro-XY platform base both sides are provided with Y-axis the first cross slideway and Y-axis the 3rd cross slideway, the bottom of grand moving X platform is provided with Y-axis the second cross slideway matching with Y-axis the first cross slideway, and Y-axis the 4th cross slideway matching with Y-axis the 3rd cross slideway.
X-axis the first slide block guide rail and X-axis the second slide block guide rail are installed on the both sides of described grand moving Y platform, X-axis the first slide block is installed on X-axis the first slide block guide rail, X-axis the second slide block is installed, X-axis the first slide block guide rail and X-axis the second slide block guide rail and vertical setting of Y-axis the first cross slideway on X-axis the second slide block guide rail; On the other both sides of grand moving Y platform, be installed with X-axis the first grating scale read head that X-axis the first grating scale matches, and X-axis the second grating scale read head matching with X-axis the second grating scale.
The center of described grand moving Y platform is provided with fine motion XY platform, and grand moving Y platform is connected with fine motion XY platform with fine motion Y Piezoelectric Driving by fine motion X Piezoelectric Driving.
Described X-axis the first motor comprises voice coil motor and is fixedly connected on the voice coil motor base plate on base, the bottom of voice coil motor is provided with voice coil motor slide block, voice coil motor slide block guide rail is installed on voice coil motor base plate, and voice coil motor slide block is installed on voice coil motor slide block guide rail.
On described voice coil motor, be provided with for absorbing and alleviating the vibration damper in X-axis and the residual vibration of Y direction acceleration movement.
Described vibration damper comprises fixture, flotator, and guide shaft, wherein, fixture is fixedly installed on voice coil motor base plate, guide shaft is fixedly installed on fixture through after fixture, one end of guide shaft is arranged with the first catch, the first spring and the second catch, and the other end of guide shaft is arranged with the 3rd catch, the second spring and the 4th catch; Flotator is U-shaped structure, and the two ends of flotator offer guide shaft hole, and guide shaft is installed in guide shaft hole.
Compared with the prior art, of the present invention produce effect into:
The invention provides a kind of tandem superelevation acceleration ultraprecise location two-dimensional stage, X-axis the first motor is connected and is fastenedly connected with X-axis the first link press span, X-axis the second motor is connected and is fastenedly connected with X-axis the second link press span, described X-axis the first link press span and described X-axis the second link press span are all connected in series on directions X with grand micro-XY locating platform, Y-axis the first motor is connected and is fastenedly connected with Y-axis the first link press span, Y-axis the second motor is connected and is fastenedly connected with Y-axis the second link press span, described Y-axis the first link press span and described Y-axis the second link press span are all connected in series in the Y direction with grand micro-XY locating platform, Y-axis the second motor is connected in series in the Y direction by Y-axis the second link press span and grand micro-XY locating platform, and motion and vibration damping equipment are fastenedly connected, realize the increase at double of locating platform acceleration.
Further, X and Y direction the first motor and the second motor realize that superelevation is accelerated and long stroke in, compensate the error of the first motor and the second motor by the piezoelectric actuator in compensation locating platform, eliminate the first motor and the vibration of the second motor in movement process by vibration damping equipment simultaneously, finally realize the two dimensional motion of superelevation acceleration, long stroke and ultraprecise location.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technological scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is tandem ultra-speed precise of the present invention location two-dimensional stage structural representation;
Grand micro-XY locating platform structure for amplifying schematic diagram that Fig. 2 provides for the embodiment of the present invention;
The grand micro-grand moving Y platform structure for amplifying schematic diagram that Fig. 3 provides for the embodiment of the present invention;
The grand moving X platform structure for amplifying schematic diagram that Fig. 4 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the XY platform base that Fig. 5 provides for the embodiment of the present invention;
The grand moving drive amplification structural representation that Fig. 6 provides for the embodiment of the present invention;
The flotator structure for amplifying schematic diagram that Fig. 7 provides for the embodiment of the present invention;
The fixture structure for amplifying schematic diagram that Fig. 8 provides for the embodiment of the present invention.
In figure, 1 is X-axis the first motor, 2 is X-axis the second motor, 3 is Y-axis the first motor, 4 is Y-axis the second motor, 5 is X-axis the first link press span, 6 is X-axis the second link press span, 7 is Y-axis the first link press span, 8 is Y-axis the second link press span, 9 is the first base plate, 10 is the second base plate, 11 is grand micro-XY locating platform, 12 is base, 13 is grand micro-XY platform base, 14 is grand moving X platform, 15 is grand moving Y platform, 16 is fine motion X Piezoelectric Driving, 17 is fine motion Y Piezoelectric Driving, 18 is X-axis the first slide block, 19 is X-axis the first slide block guide rail, 20 is loading installation tapped hole, 21 is X-axis the first grating scale read head, 22 is fine motion XY platform, 23 is X-axis the second grating scale read head, 24 is X-axis the second slide block guide rail, 25 is X-axis the second slide block, 26 is Y-axis the first grating scale, 27 is Y-axis the first slide block guide rail, 28 is Y-axis the first slide block, 29 is X-axis the first grating scale, 30-1 is X-axis the first cross slideway, 30-2 is X-axis the 3rd cross slideway, 31 is Y-axis the second slide block guide rail, 32 is Y-axis the second slide block, 33-1 is X-axis the second cross slideway, 33-2 is X-axis the 4th cross slideway, 34 is X-axis the second grating scale, 35 is Y-axis the second grating scale, 36-1 is Y-axis the first cross slideway, 36-2 is Y-axis the 3rd cross slideway, 37 is Y-axis the first grating ruler reading head, 38 is Y-axis the second grating scale read head, 39-1 is Y-axis the second cross slideway, 39-2 is Y-axis the 4th cross slideway, 40 voice coil motor base plates, 41 is voice coil motor slide block guide rail, 42 is voice coil motor slide block, 43 is voice coil motor, 44 is vibration damper, 45 is flotator, 46 is guide shaft hole, 47 is guide shaft, 48 is the first catch, 49 is the first spring, 50 is the second catch, 51 is fixed hole, 52 is the 3rd catch, 53 is the second spring, 54 is the 4th catch, 55 is fixture.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technological scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment who obtains under creative work prerequisite, belong to the scope of protection of the invention.
As Fig. 1, shown in 2, the invention provides a kind of tandem superelevation acceleration ultraprecise location two-dimensional stage, comprise base 12, grand micro-XY locating platform 11 that can move along X-axis direction and Y direction is installed on base 12, on four limits of grand micro-XY locating platform 11, by link press span, X-axis the first motor 1 that structure is identical is installed, X-axis the second motor 2, Y-axis the first motor 3, and Y-axis the second motor 4, concrete, X-axis the first link press span 5 is installed on X-axis the first motor 1, X-axis the second link press span 6 is installed on X-axis the second motor 2, Y-axis the first link press span 7 is installed on Y-axis the first motor 3, Y-axis the second link press span 8 is installed on Y-axis the second motor 4, Y-axis the first motor 3 is fastenedly connected with base 12 by the first base plate 9, and Y-axis the second motor 4 is fastenedly connected with base 12 by the second base plate 10, wherein, X-axis the first motor 1 coaxially arranges with X-axis the second motor 2, carries out X-axis direction and accelerates setting movement, and Y-axis the first motor 3 coaxially arranges with Y-axis the second motor 4, carries out Y direction and accelerates setting movement, X-axis the first motor 1, X-axis the second motor 2, Y-axis the first motor 3, and the bottom of Y-axis the second motor 4 is all fixedly connected with base 12, in the present invention, base 12 adopts marble base.Described X-axis the first motor 1 and described X-axis the second motor 2 carry out superelevation by grand micro-XY locating platform 11 described in tandem drive at directions X and accelerate setting movement; Described Y-axis the first motor 3 and described Y-axis the second motor 4 carry out superelevation by grand micro-XY locating platform 11 described in tandem drive in Y-direction and accelerate setting movement.
As Fig. 2, 3, shown in 4, described grand micro-XY locating platform 11 comprises: grand moving X platform 14 and grand moving Y platform 15, wherein, the both sides of grand moving X platform 14 are provided with X-axis the first cross slideway 30-1 and X-axis the 3rd cross slideway 30-2, the both sides of grand moving Y platform 15 are provided with X-axis the second cross slideway 33-1 and X-axis the 4th cross slideway 33-2, X-axis the first cross slideway 30-1 matches with X-axis the second cross slideway 33-1, X-axis the 3rd cross slideway 30-2 matches with X-axis the 4th cross slideway 33-2, the both sides of grand moving X platform 14 are provided with Y-axis the first slide block guide rail 27 and Y-axis the second slide block guide rail 31, Y-axis the first slide block 28 is installed on Y-axis the first slide block guide rail 27, Y-axis the second slide block 32 is installed on Y-axis the second slide block guide rail 31, Y-axis the first slide block guide rail 27 and Y-axis the second slide block guide rail 31 be arranged in parallel with X-axis the first cross slideway 30-1, the both sides of X platform 14 are also provided with X-axis the first grating scale 29 and X-axis the second grating scale 34, the lower surface both sides of grand moving X platform 14 are provided with Y-axis the first grating scale 26 and Y-axis the second grating scale 35, and Y-axis the first grating scale 26 and Y-axis the second grating scale 35 and X-axis first cross slideway 30-1 is vertical arranges.Grand micro-XY platform base 13 both sides are provided with Y-axis the first cross slideway 36-1 and Y-axis the 3rd cross slideway 36-2, the bottom of grand moving X platform 14 is provided with Y-axis the second cross slideway 39-1 matching with Y-axis the first cross slideway 36-1, and Y-axis the 4th cross slideway 39-2 matching with Y-axis the 3rd cross slideway 36-2.
As shown in Figure 4,5, the bottom of grand moving X platform 14 is provided with the grand micro-XY platform base 13 fixing with base 12, X-axis the first slide block guide rail 19 and X-axis the second slide block guide rail 24 are installed on the both sides of described grand moving Y platform 15, X-axis the first slide block 18 is installed on X-axis the first slide block guide rail 19, X-axis the second slide block 25 is installed on X-axis the second slide block guide rail 24, and cross slideway 36-1 is vertical arranges for X-axis the first slide block guide rail 19 and X-axis the second slide block guide rail 24 and Y-axis first; On the other both sides of grand moving Y platform 15, be installed with X-axis the first grating scale read head 21 that X-axis the first grating scale 29 matches, and X-axis the second grating scale read head 23 matching with X-axis the second grating scale 34, Y-axis the first grating ruler reading head 37 matching with Y-axis the first grating scale 26 is installed on grand micro-XY platform base 13, and Y-axis the second grating ruler reading head 38 matching with Y-axis the second grating scale 35.X-axis the first grating scale read head 21 obtains the micron order location of directions X by reading X-axis the first grating scale 29, X-axis the second grating scale read head 23 obtains nanometer positioning error by reading X-axis the second grating scale 34, and fine motion X Piezoelectric Driving 16 positions error compensation and ultraprecise location according to nanometer error at directions X.Y-axis the first grating scale read head 37 obtains the micron order location of Y-direction by reading Y-axis the first grating scale 26, Y-axis the second grating scale read head 38 obtains nanometer positioning error by reading Y-axis the second grating scale 35, and fine motion Y Piezoelectric Driving 17 positions error compensation and ultraprecise location according to nanometer error in Y-direction.
Further, as shown in Figure 2, grand moving Y platform 15 of the present invention center is provided with fine motion XY platform 22, grand moving Y platform 15 is connected with fine motion XY platform 22 with fine motion Y Piezoelectric Driving 17 by fine motion X Piezoelectric Driving 16, carry out accuracy compensation and ultraprecise location, tapped hole is installed in the loading offering on fine motion XY platform 22 for loading is installed.
As shown in Figure 6, X-axis the first motor 1 comprises voice coil motor 43 and is fixedly connected on the voice coil motor base plate 40 on base 12, the bottom of voice coil motor 43 is provided with voice coil motor slide block 42, voice coil motor slide block guide rail 41 is installed on voice coil motor base plate 40, voice coil motor slide block 42 is installed on voice coil motor slide block guide rail 41, on voice coil motor 43, be provided with for absorbing and alleviating the vibration damper 44 in X-axis and the residual vibration of Y direction acceleration movement, concrete, vibration damper 44 comprises fixture 55, flotator 45, and guide shaft 47, wherein, fixture 55 is fixedly installed on voice coil motor base plate 40, guide shaft 47 is fixedly installed on fixture 55 by fixed hole 51 and screw through after fixture 55, one end of guide shaft 47 is arranged with the first catch 48, the first spring 49 and the second catch 50, the other end of guide shaft 47 is arranged with the 3rd catch 52, the second spring 53 and the 4th catch 54, flotator 45 is U-shaped structure, and the two ends of flotator 45 offer guide shaft hole 46, and guide shaft 47 is installed in guide shaft hole 46.
Working procedure of the present invention is:
X-axis the first motor 1 and X-axis the second motor 2 are realized superelevation acceleration micron location in X-axis direction by the grand micro-XY locating platform 11 of tandem drive, and Y-axis the first motor 3 and Y-axis the second motor 4 are realized superelevation acceleration micron location in Y direction by the grand micro-XY locating platform 11 of tandem drive.Grand moving Y platform 15 center is provided with fine motion XY platform 22, and grand moving Y platform 15 drives fine motion XY platform 22 by fine motion X Piezoelectric Driving 16 and fine motion Y Piezoelectric Driving 17, carries out accuracy compensation and ultraprecise location.X-axis the first grating scale read head 21 obtains the micron order location of directions X by reading X-axis the first grating scale 29, X-axis the second grating scale read head 23 obtains nanometer positioning error by reading X-axis the second grating scale 34, and fine motion X Piezoelectric Driving 16 positions error compensation and ultraprecise location according to nanometer error at directions X.Y-axis the first grating scale read head 37 obtains the micron order location of Y-direction by reading Y-axis the first grating scale 26, Y-axis the second grating scale read head 38 obtains nanometer positioning error by reading Y-axis the second grating scale 35, and fine motion Y Piezoelectric Driving 17 positions error compensation and ultraprecise location according to nanometer error in Y-direction.X-axis the first motor 1 comprises voice coil motor 43 and is fixedly connected on the voice coil motor base plate 40 on base 12, the bottom of voice coil motor 43 is provided with voice coil motor slide block 42, voice coil motor slide block guide rail 41 is installed on voice coil motor base plate 40, voice coil motor slide block 42 is installed on voice coil motor slide block guide rail 41, on voice coil motor 43, be provided with for absorbing and alleviating the vibration damper 44 in X-axis and the residual vibration of Y direction acceleration movement
X-axis the first link press span 5 is installed on X-axis the first motor 1, X-axis the second link press span 6 is installed on X-axis the second motor 2, Y-axis the first link press span 7 is installed on Y-axis the first motor 3, Y-axis the second link press span 8 is installed on Y-axis the second motor 4; Y-axis the first motor 3 is fastenedly connected with base 12 by the first base plate 9, and Y-axis the second motor 4 is fastenedly connected with base 12 by the second base plate 10; Wherein, X-axis the first motor 1 coaxially arranges with X-axis the second motor 2, carries out X-axis direction and accelerates setting movement, and Y-axis the first motor 3 coaxially arranges with Y-axis the second motor 4, carries out Y direction and accelerates setting movement; X-axis the first motor 1, X-axis the second motor 2, Y-axis the first motor 3, and the bottom of Y-axis the second motor 4 is all fixedly connected with base 12.On the other both sides of grand moving Y platform 15, be installed with X-axis the first grating scale read head 21 that X-axis the first grating scale 29 matches, and X-axis the second grating scale read head 23 matching with X-axis the second grating scale 34, Y-axis the first grating ruler reading head 37 matching with Y-axis the first grating scale 26 is installed on grand micro-XY platform base 13, and Y-axis the second grating ruler reading head 38 matching with Y-axis the second grating scale 35.X-axis the first link press span 5 is installed on X-axis the first motor 1, X-axis the second link press span 6 is installed on X-axis the second motor 2, Y-axis the first link press span 7 is installed on Y-axis the first motor 3, Y-axis the second link press span 8 is installed on Y-axis the second motor 4; Vibration damper 44 comprises fixture 55, flotator 45, and guide shaft 47, wherein, fixture 55 is fixedly installed on voice coil motor base plate 40, guide shaft 47 is fixedly installed on fixture 55 by fixed hole 51 and screw through after fixture 55, one end of guide shaft 47 is arranged with the first catch 48, the first spring 49 and the second catch 50, and the other end of guide shaft 47 is arranged with the 3rd catch 52, the second spring 53 and the 4th catch 54; Flotator 45 is U-shaped structure, and the two ends of flotator 45 offer guide shaft hole 46, and guide shaft 47 is installed in guide shaft hole 46.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any amendment of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. a tandem superelevation acceleration ultraprecise location two-dimensional stage, it is characterized in that, comprise base (12), grand micro-XY locating platform (11) that can move along X-axis direction and Y direction is installed on base (12), on four limits of grand micro-XY locating platform (11), by link press span, X-axis the first motor (1), X-axis the second motor (2), Y-axis the first motor (3) that structure is identical is installed, and Y-axis the second motor (4); Wherein, X-axis the first motor (1) coaxially arranges with X-axis the second motor (2), carry out X-axis direction and accelerate setting movement, Y-axis the first motor (3) coaxially arranges with Y-axis the second motor (4), carries out Y direction and accelerates setting movement; X-axis the first motor (1), X-axis the second motor (2), Y-axis the first motor (3), and the bottom of Y-axis the second motor (4) is all fixedly connected with base (12).
2. tandem superelevation acceleration ultraprecise according to claim 1 location two-dimensional stage, it is characterized in that, described grand micro-XY locating platform (11) comprising: grand moving X platform (14) and grand moving Y platform (15), wherein, the both sides of grand moving X platform (14) are provided with X-axis the first cross slideway (30-1) and X-axis the 3rd cross slideway (30-2), the both sides of grand moving Y platform (15) are provided with X-axis the second cross slideway (33-1) and X-axis the 4th cross slideway (33-2), X-axis the first cross slideway (30-1) matches with X-axis the second cross slideway (33-1), X-axis the 3rd cross slideway (30-2) matches with X-axis the 4th cross slideway (33-2).
3. tandem superelevation acceleration ultraprecise according to claim 2 location two-dimensional stage, it is characterized in that, the both sides of described grand moving X platform (14) are provided with Y-axis the first slide block guide rail (27) and Y-axis the second slide block guide rail (31), Y-axis the first slide block (28) is installed on Y-axis the first slide block guide rail (27), Y-axis the second slide block (32) is installed on Y-axis the second slide block guide rail (31), and Y-axis the first slide block guide rail (27) and Y-axis the second slide block guide rail (31) be arranged in parallel with X-axis the first cross slideway (30-1); The both sides of X platform (14) are also provided with X-axis the first grating scale (29) and X-axis the second grating scale (34); The lower surface both sides of grand moving X platform (14) are provided with Y-axis the first grating scale (26) and Y-axis the second grating scale (35), and Y-axis the first grating scale (26) and Y-axis the second grating scale (35) setting vertical with X-axis the first cross slideway (30-1).
4. tandem superelevation acceleration ultraprecise according to claim 2 location two-dimensional stage, it is characterized in that, the bottom of described grand moving X platform (14) is provided with the grand micro-XY platform base (13) fixing with base (12), Y-axis the first grating ruler reading head (37) matching with Y-axis the first grating scale (26) is installed on grand micro-XY platform base (13), and Y-axis the second grating ruler reading head (38) matching with Y-axis the second grating scale (35).
5. tandem superelevation acceleration ultraprecise according to claim 4 location two-dimensional stage, it is characterized in that, described grand micro-XY platform base (13) both sides are provided with Y-axis the first cross slideway (36-1) and Y-axis the 3rd cross slideway (36-2), the bottom of grand moving X platform (14) is provided with Y-axis the second cross slideway (39-1) matching with Y-axis the first cross slideway (36-1), and Y-axis the 4th cross slideway (39-2) matching with Y-axis the 3rd cross slideway (36-2).
6. tandem superelevation acceleration ultraprecise according to claim 5 location two-dimensional stage, it is characterized in that, X-axis the first slide block guide rail (19) and X-axis the second slide block guide rail (24) are installed on the both sides of described grand moving Y platform (15), X-axis the first slide block (18) is installed on X-axis the first slide block guide rail (19), X-axis the second slide block (25) is installed, X-axis the first slide block guide rail (19) and X-axis the second slide block guide rail (24) setting vertical with Y-axis the first cross slideway (36-1) on X-axis the second slide block guide rail (24); On the other both sides of grand moving Y platform (15), be installed with X-axis the first grating scale read head (21) that X-axis the first grating scale (29) matches, and X-axis the second grating scale read head (23) matching with X-axis the second grating scale (34).
7. tandem superelevation acceleration ultraprecise is located two-dimensional stage according to claim 1 or 5, it is characterized in that, the center of described grand moving Y platform (15) is provided with fine motion XY platform (22), and grand moving Y platform (15) is connected with fine motion XY platform (22) with fine motion Y Piezoelectric Driving (17) by fine motion X Piezoelectric Driving (16).
8. tandem superelevation acceleration ultraprecise according to claim 1 location two-dimensional stage, it is characterized in that, described X-axis the first motor (1) comprises voice coil motor 43 and is fixedly connected on the voice coil motor base plate (40) on base (12), the bottom of voice coil motor 43 is provided with voice coil motor slide block (42), voice coil motor slide block guide rail (41) is installed on voice coil motor base plate (40), and voice coil motor slide block (42) is installed on voice coil motor slide block guide rail (41).
9. tandem superelevation acceleration ultraprecise according to claim 8 location two-dimensional stage, it is characterized in that, on described voice coil motor (43), be provided with for absorbing and alleviating the vibration damper (44) in X-axis and the residual vibration of Y direction acceleration movement.
10. tandem superelevation acceleration ultraprecise according to claim 9 location two-dimensional stage, it is characterized in that, described vibration damper 44 comprises fixture (55), flotator (45), and guide shaft (47), wherein, fixture (55) is fixedly installed on voice coil motor base plate (40), guide shaft (47) is fixedly installed on fixture (55) through after fixture (55), one end of guide shaft (47) is arranged with the first catch (48), the first spring (49) and the second catch (50), the other end of guide shaft (47) is arranged with the 3rd catch (52), the second spring (53) and the 4th catch (54), flotator (45) is U-shaped structure, and the two ends of flotator (45) offer guide shaft hole (46), and guide shaft (47) is installed in guide shaft hole (46).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410240498.9A CN103982756A (en) | 2014-05-30 | 2014-05-30 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410240498.9A CN103982756A (en) | 2014-05-30 | 2014-05-30 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103982756A true CN103982756A (en) | 2014-08-13 |
Family
ID=51274841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410240498.9A Pending CN103982756A (en) | 2014-05-30 | 2014-05-30 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103982756A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN106393070A (en) * | 2016-10-31 | 2017-02-15 | 山东大学 | Antisymmetric parallel connection direct drive motion decoupling high-precision servo platform |
| CN107504895A (en) * | 2017-08-03 | 2017-12-22 | 山东大学 | Towards the zero point micromatic setting of grating type micro-nano locating platform |
| CN107971765A (en) * | 2017-12-29 | 2018-05-01 | 河南工业大学 | A kind of adjustable superelevation acceleration macro/micromotion platform |
| CN108151648A (en) * | 2017-12-27 | 2018-06-12 | 苏州乐佰图信息技术有限公司 | Double guide rail measuring tables and its method for measuring coordinates of targets |
| CN108637714A (en) * | 2018-07-27 | 2018-10-12 | 广东工业大学 | A kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated |
| CN110450014A (en) * | 2019-08-15 | 2019-11-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of high frequency micro amplitude vibration device applied to the complex-curved ultrafast polishing of heavy caliber |
| CN112363310A (en) * | 2020-11-13 | 2021-02-12 | 殷跃锋 | Transmission mechanism and high-precision microscope |
| CN113023659A (en) * | 2021-03-04 | 2021-06-25 | 广东工业大学 | XY macro-micro motion platform and tail end feedback method thereof |
| CN113917798A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Movement device for Z-axis direction macro movement of workbench |
| US11365960B1 (en) | 2022-01-21 | 2022-06-21 | Guangdong University Of Technology | XY macro-micro motion stage and control method thereof based on end feedback |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1323300A (en) * | 1970-04-14 | 1973-07-11 | Heidenhain Johannes Dr | Device for the measurable displacement of an object |
| CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
| CN201373219Y (en) * | 2008-11-28 | 2009-12-30 | 清溢精密光电（深圳）有限公司 | XY positioning platform device |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN202394848U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Double-axis floating stator linear platform |
| CN103216711A (en) * | 2013-03-28 | 2013-07-24 | 河北工业大学 | Flexible micro-positioning platform |
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN203927275U (en) * | 2014-05-30 | 2014-11-05 | 西安交通大学 | A kind of tandem superelevation acceleration ultraprecise location two-dimensional stage |
-
2014
- 2014-05-30 CN CN201410240498.9A patent/CN103982756A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1323300A (en) * | 1970-04-14 | 1973-07-11 | Heidenhain Johannes Dr | Device for the measurable displacement of an object |
| CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
| CN201373219Y (en) * | 2008-11-28 | 2009-12-30 | 清溢精密光电（深圳）有限公司 | XY positioning platform device |
| CN202394848U (en) * | 2011-12-15 | 2012-08-22 | 东莞华中科技大学制造工程研究院 | Double-axis floating stator linear platform |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103216711A (en) * | 2013-03-28 | 2013-07-24 | 河北工业大学 | Flexible micro-positioning platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN203927275U (en) * | 2014-05-30 | 2014-11-05 | 西安交通大学 | A kind of tandem superelevation acceleration ultraprecise location two-dimensional stage |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN104656682B (en) * | 2014-12-30 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of grand micro- two-stage drive precision positioning mechanism |
| CN106272364A (en) * | 2016-10-31 | 2017-01-04 | 山东大学 | A kind of symmetric parallel directly drives mobile decoupling high-precision servo platform |
| CN106393070A (en) * | 2016-10-31 | 2017-02-15 | 山东大学 | Antisymmetric parallel connection direct drive motion decoupling high-precision servo platform |
| CN107504895B (en) * | 2017-08-03 | 2019-11-15 | 山东大学 | Zero point micromatic setting towards grating type micro-nano locating platform |
| CN107504895A (en) * | 2017-08-03 | 2017-12-22 | 山东大学 | Towards the zero point micromatic setting of grating type micro-nano locating platform |
| CN108151648A (en) * | 2017-12-27 | 2018-06-12 | 苏州乐佰图信息技术有限公司 | Double guide rail measuring tables and its method for measuring coordinates of targets |
| CN107971765A (en) * | 2017-12-29 | 2018-05-01 | 河南工业大学 | A kind of adjustable superelevation acceleration macro/micromotion platform |
| CN107971765B (en) * | 2017-12-29 | 2023-06-27 | 河南工业大学 | Adjustable ultra-high acceleration macro-micro motion platform |
| CN108637714A (en) * | 2018-07-27 | 2018-10-12 | 广东工业大学 | A kind of macro micro- bilingual coupling motion platform that five degree of freedom is coordinated |
| CN108637714B (en) * | 2018-07-27 | 2023-08-22 | 广东工业大学 | Five-degree-of-freedom coordinated macro-micro double-decoupling motion platform |
| CN110450014A (en) * | 2019-08-15 | 2019-11-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of high frequency micro amplitude vibration device applied to the complex-curved ultrafast polishing of heavy caliber |
| CN112363310A (en) * | 2020-11-13 | 2021-02-12 | 殷跃锋 | Transmission mechanism and high-precision microscope |
| CN113023659A (en) * | 2021-03-04 | 2021-06-25 | 广东工业大学 | XY macro-micro motion platform and tail end feedback method thereof |
| CN113023659B (en) * | 2021-03-04 | 2021-11-02 | 广东工业大学 | XY macro-micro motion platform and tail end feedback method thereof |
| CN113917798A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Movement device for Z-axis direction macro movement of workbench |
| US11365960B1 (en) | 2022-01-21 | 2022-06-21 | Guangdong University Of Technology | XY macro-micro motion stage and control method thereof based on end feedback |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103982756A (en) | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform | |
| CN203927275U (en) | A kind of tandem superelevation acceleration ultraprecise location two-dimensional stage | |
| CN102490020B (en) | Simple precision displacement platform | |
| CN104019332B (en) | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform | |
| CN103170845B (en) | Accuracy compensation method of coaxial macro-micro composite linear motion platform device | |
| CN103604028B (en) | Precision positioning tandem one-dimensional platform | |
| CN100535765C (en) | 6-freedom micro-motion platform capable of isolating exterior vibration | |
| CN108214423B (en) | Motion platform for OLED detection equipment | |
| CN101533226B (en) | Leveling and focusing mechanism and microstage and workpiece stage using same | |
| CN103318839A (en) | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method | |
| CN203092144U (en) | Coaxial macro-micro composite linear motion platform device | |
| CN103226296B (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| CN108206155B (en) | Layered-type decoupling XY high-speed motion platform | |
| CN102360160B (en) | 2R1T three degree of freedom space flexible precision positioning platform | |
| CN103219049B (en) | Precise positioning one-dimensional platform | |
| CN103226287A (en) | Two-in-parallel parallel decoupling flexible microposition mechanism | |
| KR101996293B1 (en) | Mounting apparatus | |
| CN104464838A (en) | One-dimensional precision positioning platform with Z axis enlarged in negative direction | |
| CN103116250B (en) | Masking platform system with laser interferometer measurement and six-freedom-degree coarse movement platform | |
| CN203179557U (en) | Precise positioning one-dimensional platform | |
| CN102708930B (en) | Three-dimensional decoupled micro-displacement stage with floating driver | |
| CN104656682A (en) | Macro and micro two-stage driving precision positioning mechanism | |
| CN107979223B (en) | Portable high-acceleration macro-micro motion platform | |
| CN105023869A (en) | Semi-automatic aligning machine | |
| CN203927276U (en) | The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140813 |