CN107504895A - Towards the zero point micromatic setting of grating type micro-nano locating platform - Google Patents
Towards the zero point micromatic setting of grating type micro-nano locating platform Download PDFInfo
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- CN107504895A CN107504895A CN201710655583.5A CN201710655583A CN107504895A CN 107504895 A CN107504895 A CN 107504895A CN 201710655583 A CN201710655583 A CN 201710655583A CN 107504895 A CN107504895 A CN 107504895A
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- 230000033001 locomotion Effects 0.000 claims abstract description 33
- 241000826860 Trapezium Species 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710655583.5A CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
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CN201710655583.5A CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
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CN107504895A true CN107504895A (en) | 2017-12-22 |
CN107504895B CN107504895B (en) | 2019-11-15 |
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CN201710655583.5A Active CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108593154A (en) * | 2018-04-20 | 2018-09-28 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
CN105572830A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Five-degree-of-freedom adjusting device |
US20190024842A1 (en) * | 2016-01-06 | 2019-01-24 | Micro-Contrôle - Spectra-Physics Sas | System for generating the movement of a support plate in six degrees of freedom |
-
2017
- 2017-08-03 CN CN201710655583.5A patent/CN107504895B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
CN105572830A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Five-degree-of-freedom adjusting device |
US20190024842A1 (en) * | 2016-01-06 | 2019-01-24 | Micro-Contrôle - Spectra-Physics Sas | System for generating the movement of a support plate in six degrees of freedom |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108593154A (en) * | 2018-04-20 | 2018-09-28 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
CN108593154B (en) * | 2018-04-20 | 2019-08-20 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
CN110189791B (en) * | 2019-05-31 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Initial corner error adjustable micro-nano platform based on bidirectional pre-tightening |
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CN107504895B (en) | 2019-11-15 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |