CN107504895A - Towards the zero point micromatic setting of grating type micro-nano locating platform - Google Patents
Towards the zero point micromatic setting of grating type micro-nano locating platform Download PDFInfo
- Publication number
- CN107504895A CN107504895A CN201710655583.5A CN201710655583A CN107504895A CN 107504895 A CN107504895 A CN 107504895A CN 201710655583 A CN201710655583 A CN 201710655583A CN 107504895 A CN107504895 A CN 107504895A
- Authority
- CN
- China
- Prior art keywords
- grating
- base
- zero point
- towards
- micromatic setting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000033001 locomotion Effects 0.000 claims abstract description 33
- 241000826860 Trapezium Species 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a kind of zero point micromatic setting towards grating type micro-nano locating platform, including platform body, motion parts；The present invention adds the free degree of the grating reading head in actual application by the cooperation of base and returning spring, introduce differential head and wedge simultaneously, the fine setting of base motions is realized by inclined-plane transmission, and the operability for improving user can be directly read by differential head reading by finely tuning displacement.Simultaneously, positioning strip structure is introduced respectively in the side that motion parts and grating scale coordinate in technical scheme, the positioning precision of grating scale is realized, does not need special fixtures that the high accuracy assembling of grating scale can be achieved in practical set, meets the requirement to grating scale dead-center position precision in the present invention.
Description
Technical field
The present invention relates to zero mark means in a kind of micro-nano operating process, and in particular to flat towards the positioning of grating type micro-nano
The zero point micromatic setting of platform, belongs to micro-nano field operation.
Background technology
With the development of nanometer technology, the research field of the natural science such as physics, chemistry, biology and the visual field have obtained effectively
Widen, or even expedite the emergence of new subject.Since 21 century, the rapid development of nanometer technology drastically increases people
To the human-subject test of microcosmos, and generating can support the mankind to probe into material principle under micro-scale on this basis
Technological means, and be new breakthrough of the microelectronics information industry rear mole of epoch, national defence aerospace field equipment manufacturing exists
Lifting on yardstick, accuracy and speed, the innovation of minute manufacturing equipment bring opportunity to develop.Wherein, micro-nano locating platform conduct
The carrier that nanometer technology is realized, obtains and gives more sustained attention and study both at home and abroad.Grating is flat in micro-nano positioning as displacement transducer
It is used widely in platform, and because the impulse stroke of platform is generally in 100 microns, therefore, typically platform is moved
Initial position causes the problem of zero point is inconsistent in repeating motion as zero point.
The content of the invention
Exist for the grating type micro-nano locating platform that existing literature discloses and marked without fixed zero, zero point during repeating motion
The problem of inconsistent, the present invention provide the zero point micromatic setting towards grating type micro-nano locating platform, and its is simple in construction, by knot
Structure design carries out grating zero point fine setting.
The technical scheme that the present invention takes is：
Towards the zero point micromatic setting of grating type micro-nano locating platform, including platform body, motion parts, grating reading
Head, grating scale, wedge, differential head, base and returning spring；
Described platform body is square structure, is motion parts in described platform body center；The motion
Two partial adjacent side elevations are provided with grating scale, and a receiving grating is provided between the two side elevations and platform body
The cavity of ruler reading head, described grating ruler reading head are installed on a base, and the cross section of described base is right-angled trapezium
Structure, the right-angle side texture edge center of base are provided with the blind round hole for accommodating returning spring, the inserting of returning spring one end
In the blind hole, the other end, which is inserted on cavity inner wall, is in compressive state；The hypotenuse texture edge of the base is provided with one
Wedge, the inclined-plane of described wedge coordinate with the hypotenuse texture edge, and a concave surface is provided with the wedge, described micro-
One end of parted hair coordinates with the concave surface, and the other end of differential head is provided with screw thread, in the screwed hole of platform body；Pass through rotation
Turn the front and rear sliding that differential head realizes base.
Further, described platform body is square Al alloy block structure, and the motion parts are that platform body is overall
Wire cutting forms.
Further, described cavity floor is provided with two screwed holes coordinated with fastening screw, and the base passes through two
Individual fastening screw is arranged on platform body in corresponding square cavity with the cooperation of two screwed holes of square cavity bottom surface, institute
State two and annular gasket has been respectively cooperating between fastening screw and base.
Further, a vertical type square post is respectively equipped with the both ends of the top surface long side side of the base, it is described vertical
The screwed hole coordinated with fastening screw is respectively equipped with formula steering column, the grating reading head passes through fastening screw and vertical type square
The cooperation of post is arranged on base.
Further, the top surface short side side of base bottom trapezoid block is provided with two oval elongated holes, the ellipse
Elongated hole coordinates with fastening screw for gap, and the oval elongated hole center corresponds to the two of platform body square cavity bottom surface
The individual screwed hole center coordinated with fastening screw.
Further, described grating scale is pasted onto on motion parts side elevation by gum, grating scale center of working face
Position is provided with zero point groove.
Further, the square cavity lateral wall that grating reading head is accommodated on the platform body is provided with and spiral shell outside differential head
The screwed hole that line coordinates, the differential head end is hemisphere head dummy structure.
Further, the side bottom and side that the motion parts coordinate with grating scale are respectively equipped with positioning strip, described
Positioning strip and motion parts are integral type structure, and through wire cutting, integrally cutting forms.
Further, the wedge section is right-angled trapezium, the inclined-plane and base engagement of wedge, and the wedge is oblique
Polishing is passed through in face, and the center side position of wedge broadside side is provided with half ball impression coordinated with differential head end bulb
Face.
Further, described blind hole coordinates with returning spring for gap, and the returning spring drift is more than described
Blind hole hole depth, accommodate on base bottom trapezoid block and platform body and match somebody with somebody for gap between the square cavity lateral wall of grating reading head
Close.
Beneficial effect acquired by the present invention：
Due to present invention employs above-mentioned technical proposal, wherein, add grating by the cooperation of base and returning spring
The free degree of the reading head in actual application, while differential head and wedge are introduced, realize that base is transported by inclined-plane transmission
Dynamic fine setting, and the operability for improving user can be directly read by differential head reading by finely tuning displacement.Meanwhile technology
Positioning strip structure is introduced respectively in the side that motion parts and grating scale coordinate in scheme, realizes the positioning precision of grating scale,
Do not need special fixtures that the high accuracy assembling of grating scale can be achieved in practical set, meet in the present invention to grating scale zero point
The requirement of positional precision.
The general principle and principal character and advantages of the present invention of the present invention has been shown and described above.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the simply explanation described in above-described embodiment and specification is originally
The principle of invention, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes
Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its
Equivalent thereof.
Brief description of the drawings
The Figure of description for forming the part of the application is used for providing further understanding of the present application, and the application's shows
Meaning property embodiment and its illustrate be used for explain the application, do not form the improper restriction to the application.
Fig. 1 is the overall structure figure of the present invention.
Fig. 2 is the lateral partial structurtes sectional view of the present invention.
Fig. 3 is the explosive view of the present invention.
Fig. 4 is the design of part figure of the present invention.
In figure：1- platform bodies, 2- motion parts, 3- grating reading heads, 4- grating scales, 5- fastening screws, 6- wedges,
7- differential head, 8- bases, the right-angle side texture edge of 8-1 bases, 8-2 hypotenuse texture edges, 9- returning springs, 10- air rings
Piece.
Embodiment
It is noted that described further below is all exemplary, it is intended to provides further instruction to the application.It is unless another
Indicate, all technologies used herein and scientific terminology are with usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
Term explains part:Heretofore described " the right-angle side texture edge of base " is that right-angle side erects in right-angled trapezium
Vertical pulling stretches the face to be formed；Heretofore described " hypotenuse texture edge " is the face that hypotenuse stretches formation vertically in right-angled trapezium.
With reference to specific embodiment, the invention will be further described, the illustrative examples and explanation invented herein
For explaining the present invention, but it is not as a limitation of the invention.
The zero point micromatic setting towards grating type micro-nano locating platform in the present invention, it is zero in a kind of micro-nano operating process
Point indicia meanses, and in particular to towards the zero point micromatic setting of grating type micro-nano locating platform, belong to micro-nano field operation, by
The cooperation of base and returning spring adds the free degree of the grating reading head in actual application, at the same introduce differential head with
Wedge, the fine settings of base motions is realized by inclined-plane transmission, and finely tune displacement and can be directly read by differential head reading and carried
The high operability of user.Meanwhile positioning is introduced respectively in the side that motion parts and grating scale coordinate in technical scheme
Bar structure, the positioning precision of grating scale is realized, do not need special fixtures that the high-precision of grating scale can be achieved in practical set
Degree assembling, meet the requirement to grating scale dead-center position precision in the present invention；Concrete structure is as follows：
As shown in Figure 1, 2, 3, including：Platform body 1, motion parts 2, grating reading head 3, grating scale 4, fastening screw 5,
Wedge 6, differential are first 7, base 8, returning spring 9, annular gasket 10；
Platform body 1 is square Al alloy block structure, and the center of platform body 1 is motion parts 2, the motion parts
2 be that 1 overall wire cutting of platform body forms, and is realized and connected by flexible hinge between motion parts 2 and platform body 1, motion
The platform body 1 of the side of part 2 is provided with the square cavity for accommodating grating reading head 3, and square cavity bottom surface is provided with two and tight
Gu the screwed hole that screw 5 coordinates, base 8 is pacified by the cooperation of two fastening screws 5 and two screwed holes of square cavity bottom surface
In corresponding square cavity on platform body 1, annular gasket 10 has been respectively cooperating between two fastening screws 5 and base 8,
The bottom of base 8 is provided with the trapezoidal block structure that section is right-angled trapezium, and trapezoidal block structure one end is inclined-plane, and inclined-plane is by polishing
Reason, the trapezoidal block structure other end are straight flange structure, and straight flange texture edge center is provided with the circle for accommodating returning spring 9
Blind hole, the top surface long side side both ends of the bottom trapezoid block of base 8 are respectively equipped with a vertical type square post, distinguished on vertical steering column
Provided with the screwed hole coordinated with fastening screw 5, grating reading head 3 is arranged on by fastening screw 5 and the cooperation of vertical type square post
On base 8, the top surface short side side of the bottom trapezoid block of base 8 is provided with two oval elongated holes, oval elongated hole and fastening screw 5
Coordinate for gap, oval elongated hole center correspond to two of the square cavity bottom surface of platform body 1 and the cooperation of fastening screw 5
Screwed hole center, grating scale 4 are pasted onto on the side elevation of motion parts 2 by gum, and the center of working face position of grating scale 4 is provided with zero
Groove is put, the square cavity lateral wall that grating reading head 3 is accommodated on the platform body 1 coordinates provided with 7 external screw thread first with differential
Screwed hole, first 7 end of differential is hemisphere head dummy structure.
The side bottom and side that motion parts 2 coordinate with grating scale 4 are respectively equipped with positioning strip, the positioning strip and motion
Part 2 is integral type structure, and through wire cutting, integrally cutting forms.
The inclined-plane of trapezoid block one end of the bottom of base 8 coordinates with wedge 6, and the section of wedge 6 is right-angled trapezium, wedge
The inclined-plane of shape block 6 coordinates with base 8, and the inclined-plane of wedge 6 passes through polishing, the center side of the broadside side of wedge 6
Position is provided with half spherical-concave-surface that 7 end bulb first with differential coordinates.
What the straight flange one end side center of the bottom trapezoid block of base 8 was provided with accommodates the circular blind of returning spring 9
Hole coordinates with returning spring 9 for gap, and the drift of returning spring 9 is more than the blind hole hole depth, the bottom trapezoid block of base 8
Coordinate between square cavity lateral wall with accommodating grating reading head 3 on platform body 1 for gap.
As shown in figure 4, being the structure chart of base 8, it includes trapezoidal column and two vertical type squares being arranged in trapezoidal column
Post；The right-angle side texture edge for the base that 8-1 is represented in figure, what 8-2 was represented is hypotenuse texture edge.
The present invention adds freedom of the grating reading head in actual application by the cooperation of base and returning spring
Degree, while differential head and wedge are introduced, the fine setting of base motions is realized by inclined-plane transmission, and displacement is finely tuned by differential head
Reading can directly read the operability for improving user.Meanwhile coordinate in technical scheme in motion parts and grating scale
Side introduce positioning strip structure respectively, realize the positioning precision of grating scale, in practical set do not need special fixtures
The high accuracy assembling of grating scale can be achieved, meet the requirement to grating scale dead-center position precision in the present invention.
In practical application, specific installation and application method are as follows：
First, grating reading head 3 is arranged on to the vertical of the top surface both ends of the bottom trapezoid block of base 8 by fastening screw 5
In square column；
Then, the appearance that the straight flange one end side center of the bottom trapezoid block of base 8 is provided with is filled in into the one end of returning spring 9
Receive in the blind round hole of returning spring 9, then base 8 is put into the square cavity that grating reading head 3 is accommodated on platform body 1
It is interior, need artificially to compress the outer end of returning spring 9 in installation course and withstand on the square cavity inwall, now by wedge
6 inclined-planes towards being put into the square cavity behind the inclined-plane of the bottom trapezoid block of base 8 vertically, now, the broadside side of wedge 6
Center side position is provided with half spherical-concave-surface towards the square cavity lateral surface, and differential first 7 is screwed on platform body 1 and accommodates light
In the screwed hole that 7 external screw thread first with differential that the square cavity lateral wall of grid reading head 3 is provided with coordinates, by rotating differential first 7
Its end bulb and the spherical-concave-surface of wedge 6 half are coordinated, positioning strip of the side of grating scale 4 respectively with the side of motion parts 2 is matched somebody with somebody
Merging bonds by gum, and the size of grating scale 4 and zero mark initial position need to ensure that zero point is located at grating reading head 3 effective
In monitoring range.
After assembling, the front and rear sliding of base 8 is realized by rotating differential first 7, the zero point carried by grating scale 4 is supervised
Indicator lamp Real Time Observation dead-center position is surveyed, the grating scale 4 after dead-center position is by unilateral enter in the monitoring range of grating reading head 3
Zero point monitoring indicator lamp can light, and can now complete zero point fine setting operation, and the invention can be directed to micro-nano locating platform simultaneously
Middle different demand can carry out the fine setting of zero point ad-hoc location.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, model not is protected to the present invention
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need to pay various modifications or deformation that creative work can make still within protection scope of the present invention.
Claims (10)
1. towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that including platform body, motion parts,
Grating reading head, grating scale, wedge, differential head, base and returning spring；
Described platform body is square structure, is motion parts in described platform body center；The motion parts
Two adjacent side elevations grating scale is installed, and one be provided between the two side elevations and platform body accommodate grating scale and read
The cavity of several, described grating ruler reading head are installed on a base, and the cross section of described base is ladder structure of right angle,
The right-angle side texture edge center of base is provided with the blind round hole for accommodating returning spring, and it is blind that returning spring one end is inserted into this
In hole, the other end, which is inserted on cavity inner wall, is in compressive state；The hypotenuse texture edge of the base is provided with a wedge,
The inclined-plane of described wedge coordinates with the hypotenuse texture edge, and a concave surface is provided with the wedge, the differential head
One end coordinates with the concave surface, and the other end of differential head is provided with screw thread, in the screwed hole of platform body；By rotating differential
Head realizes the front and rear sliding of base.
2. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described
Platform body is square Al alloy block structure, and the motion parts are that platform body entirety wire cutting forms.
3. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described
Cavity floor is provided with two screwed holes coordinated with fastening screw, and the base passes through two fastening screws and square cavity bottom surface
The cooperations of two screwed holes be arranged on platform body in corresponding square cavity, between described two fastening screws and base
It has been respectively cooperating with annular gasket.
4. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described
The both ends of the top surface long side side of base are respectively equipped with a vertical type square post, are respectively equipped with and fasten on the vertical steering column
The screwed hole that screw coordinates, the grating reading head are arranged on base by the cooperation of fastening screw and vertical type square post.
5. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that the bottom
The top surface short side side of seat bottom trapezoid block is provided with two oval elongated holes, and the oval elongated hole is matched somebody with somebody with fastening screw for gap
Close, the oval elongated hole center corresponds to two screwed holes coordinated with fastening screw of platform body square cavity bottom surface
Center.
6. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described
Grating scale is pasted onto on motion parts side elevation by gum, and grating scale center of working face position is provided with zero point groove.
7. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described flat
The square cavity lateral wall that grating reading head is accommodated on playscript with stage directions body is provided with the screwed hole coordinated with differential head external screw thread, the differential
Head end is hemisphere head dummy structure.
8. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that the fortune
The side bottom and side that dynamic part coordinates with grating scale are respectively equipped with positioning strip, and the positioning strip and motion parts are integral type
Structure, through wire cutting, integrally cutting forms.
9. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that the wedge
Shape block section is right-angled trapezium, the inclined-plane and base engagement of wedge, and the wedge inclined-plane passes through polishing, and wedge is wide
The center side position of side side is provided with half spherical-concave-surface coordinated with differential head end bulb.
10. as claimed in claim 1 towards the zero point micromatic setting of grating type micro-nano locating platform, it is characterised in that described
Blind hole and returning spring be gap cooperation, the returning spring drift is more than the blind hole hole depth, and base bottom is trapezoidal
Coordinate on block and platform body between the square cavity lateral wall of receiving grating reading head for gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710655583.5A CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710655583.5A CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107504895A true CN107504895A (en) | 2017-12-22 |
| CN107504895B CN107504895B (en) | 2019-11-15 |
Family
ID=60690161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710655583.5A Active CN107504895B (en) | 2017-08-03 | 2017-08-03 | Zero point micromatic setting towards grating type micro-nano locating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107504895B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593154A (en) * | 2018-04-20 | 2018-09-28 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
| CN105572830A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Five-degree-of-freedom adjusting device |
| US20190024842A1 (en) * | 2016-01-06 | 2019-01-24 | Micro-Contrôle - Spectra-Physics Sas | System for generating the movement of a support plate in six degrees of freedom |
-
2017
- 2017-08-03 CN CN201710655583.5A patent/CN107504895B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN104595642A (en) * | 2015-01-06 | 2015-05-06 | 山东大学 | Two-degree-of-freedom piezoelectric driving nanometer positioning platform |
| CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
| CN105572830A (en) * | 2015-12-21 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Five-degree-of-freedom adjusting device |
| US20190024842A1 (en) * | 2016-01-06 | 2019-01-24 | Micro-Contrôle - Spectra-Physics Sas | System for generating the movement of a support plate in six degrees of freedom |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593154A (en) * | 2018-04-20 | 2018-09-28 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
| CN108593154B (en) * | 2018-04-20 | 2019-08-20 | 山东大学 | A kind of three-dimensional precise piezoelectric sensing device |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
| CN110189791B (en) * | 2019-05-31 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Initial corner error adjustable micro-nano platform based on bidirectional pre-tightening |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107504895B (en) | 2019-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107504895A (en) | Towards the zero point micromatic setting of grating type micro-nano locating platform | |
| CN108031890A (en) | A kind of grooved bit of adjustable aperture | |
| CN103983234B (en) | Rock stratum attitude measurement method based on intelligent mobile equipment | |
| CN206756055U (en) | A kind of instrument for the measurement of auger pore structure size factor | |
| CN104029192A (en) | Multipoint positioning auxiliary device | |
| CN106052534A (en) | Drilling rock core level dip meter | |
| CN107984631A (en) | A kind of construction wall punching positioner | |
| CN204461264U (en) | Special portable folding chi is surveyed and drawn in a kind of construction work | |
| CN205936584U (en) | Perpendicular timing appearance of well drilling | |
| CN208059776U (en) | Portable core structural plane inclination angle field measurement device | |
| CN105082005B (en) | A kind of stationary fixture measuring distance over bar value | |
| CN108489363A (en) | Portable core structural plane inclination angle field measurement device | |
| CN204421815U (en) | Geologic body revolves depth gauge | |
| CN213629744U (en) | Multifunctional measurement supporting device suitable for engineering survey | |
| CN211031930U (en) | Ellipse diagraph teaching aid for blackboard | |
| CN201442456U (en) | Plotter | |
| CN210198222U (en) | Measuring tool for planar design | |
| CN208952865U (en) | A kind of bending angle measuring device | |
| CN202943564U (en) | Assembly tool | |
| CN208164600U (en) | Multi-functional higher mathematics plotter | |
| CN205439703U (en) | Multi -purpose drawing teaching aid | |
| JP3134209U (en) | Blackboard compass | |
| CN201646149U (en) | Scroll-type protractor | |
| CN105059020B (en) | The instrument and its application method of a kind of circumference in equal parts | |
| CN111460680B (en) | Method for describing geometric characteristics of curved-flow river-phase composite sand body configuration unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
|
| CI03 | Correction of invention patent | ||
| CI03 | Correction of invention patent |
Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |