CN201373219Y

CN201373219Y - XY positioning platform device

Info

Publication number: CN201373219Y
Application number: CN200820214135U
Authority: CN
Inventors: 林琳
Original assignee: QINGYI PRECISION MASK MAKING (SHENZHEN) CO Ltd
Current assignee: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd.
Priority date: 2008-11-28
Filing date: 2008-11-28
Publication date: 2009-12-30
Anticipated expiration: 2018-11-28

Abstract

The utility model provides an XY positioning platform device, which is suitable for being used in the field of ultraprecise positioning equipment. The XY positioning platform device comprises an installing base, a Y platform and an XY platform, wherein the Y platform and the XY platform are arranged on the installing base, and are in a mutually vertical mode for movement; both the Y platform and the XY platform are provided with light transmission ports which are used for passing transmitted light or back lighting light; an X guide rail is arranged on the Y platform, the XY platform is arranged in the middle of the X guide rail. Light can smoothly pass through the light transmission ports formed on the Y platform and the XY platform, and some production requirements can be met; and the XY platform arranged in the XY positioning platform device is arranged in the middle of the Y platform, the stress of the XY platform and that of the Y platform can be uniform, and the gravity center does not offset, so the problems of large local microcosmic beating and low accuracy caused by long distance of the gravity center of the XY positioning platform from the guide rail of the Y platform are solved.

Description

A kind of XY locating platform device

Technical field

The utility model belongs to ultraprecise positioning equipment field, relates in particular to a kind of XY locating platform device.

Background technique

XY locating platform device is the base apparatus of a lot of automatic productions and measuring equipment.For many years, in order to satisfy different application needs, people have been developed the XY locating platform of a variety of structural types.Wherein, in some high-precision application, there is a kind of XY platform to hold concurrently when slide block and guide rail by criss-cross intermediate member.But the XY platform of these common cross slider types has following shortcoming:

1, some application as measuring, need provide transmission light or back lighting below workpiece, and the ejaculation that traditional crosshead shoe can obstruct the light is difficult to satisfy in some technology to transmission light or back lighting light needs.

2, some platform in order to reach the purpose that crosshead shoe does not keep off transmission light, is put the guide rail of its middle and upper part of crosshead shoe by the mid-side that changes into, cross becomes the T word, and this has caused the monolateral guiding of guide rail, and is bigger from the microcosmic beat of guide rail platform part at a distance, the precise decreasing of crosshead shoe.

3, when platform top other application component need be installed, during as the measuring basis mirror of anchor clamps or laser interferometer, because the level height of the driving force of separating the lotus root device that traditional X-ray Y platform is provided with is higher than the XY platform, it is bigger to cause the height of C.G. of XY platform and load component thereof to depart from driving force, is unfavorable for the raising of precision.

The model utility content

The purpose of this utility model is to provide a kind of XY locating platform device, be intended to solve transmission light or back lighting light that the XY platform that exists in the prior art has blocked to be needed in some technology, be difficult to meet the needs of production and other the putting of the guide rail of its middle and upper part of crosshead shoe causes that the local microcosmic beat of whole XY platform is big, the problem of precise decreasing.

The utility model is to realize like this, a kind of XY locating platform device, the Y platform and the XY platform that comprise mounting base and the mutual vertical motion of device on mounting base, described Y platform and XY platform all offer the light openings that supplies transmission light or back lighting light to pass through, described Y platform is provided with the X guide rail, places on the X guide rail in the described XY platform.

After adopting above technological scheme, the light openings that Y platform and XY platform are offered can make light pass through smoothly, satisfies the needs of some production; XY locating platform device is provided with on the mid-Y of the being installed on platform rail of XY platform, in the time of can making the Y platform drive the XY platform motion, XY platform center of gravity is no longer setovered, and causes away from the Y platform rail that local microcosmic beat is big, the problem of precise decreasing thereby effectively solved the XY locating platform.

Description of drawings

Fig. 1 is the schematic perspective view of the XY locating platform device that provides of the utility model embodiment.

Fig. 2 is the exploded perspective view of the XY locating platform device that provides of the utility model embodiment.

Fig. 3 is the cross-sectional schematic of the XY locating platform device X-axis direction that provides of the utility model embodiment.

Fig. 4 is the cross-sectional schematic of the XY locating platform device Y direction that provides of the utility model embodiment.

Embodiment

In order to make the purpose of this utility model, technological scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.

See also Fig. 1, Fig. 2 and Fig. 4, the utility model XY locating platform device comprises mounting base 10, Y platform 20, XY platform 30, X-axis friction wheel friction lever friction drive device 31 and Y-axis friction wheel friction lever friction drive device 22; Described Y platform 20 is provided with and is used for two X guide rails 21 that are parallel to each other that confession XY platform 30 moves, described X guide rail 21 is positioned at the neutral position of Y platform 20, be provided with Y platform loophole 25 and the Y deck hole 26 passed through for light between this X guide rail 21, it is wherein, described that to offer Y deck hole 26 at Y platform 20 be in order to alleviate the weight of Y platform 20.The both ends of the surface of Y platform 20 respectively are provided with a pneumatic bearing mounting base 24, and described pneumatic bearing mounting base 24 is provided with several and mounting base 10 surperficial contacted pneumatic bearing 4.Be provided with in the Y direction of Y platform 20 and be used to drive the Y-axis friction wheel friction lever friction drive device 22 that Y platform 20 moves, described Y-axis friction wheel friction lever friction drive device 22 is provided with the Y-axis friction lever 23 that is used to connect Y platform 20.Be provided with in the X-axis direction of XY platform 30 and be used to drive the X-axis friction wheel friction lever friction drive device 31 that XY platform 30 moves, described X-axis friction wheel friction lever friction drive device 31 is provided with the X-axis friction lever 32 that is used to connect XY platform 30.

See also Fig. 1, Fig. 2 and Fig. 3, the X-axis direction of described XY platform 30 belows offers and is used for the XY platform square groove 35 suitable with X guide rail 21, described XY platform square groove 35 is positioned at the neutral position of XY platform 30, size adapts with X guide rail 21, and the fitting surface of itself and X guide rail 21 is provided with several pneumatic bearing 4.The central authorities of described XY platform 30 also offer light openings 36, described light openings 36 is square, the Y platform loophole 25 that light openings 36 that this XY platform 30 offers and Y platform 20 are offered can make the transmission light or the back lighting fairing profit of 10 times emissions of base station pass through from Y platform 20 and XY platform 30, what overcome that crosshead shoe exists in the prior art blocks the problem that transmission light or back lighting light pass through, and satisfies the needs of production technology.

See also Fig. 1, Fig. 2 and Fig. 3, the weight of described XY platform 30 is transferred to mounting base 10 by its four jiaos of pneumatic bearing that are provided with 4, and therefore, Y platform 20 is not born the weight of XY platform 30.This XY platform 30 is by on the X guide rail 21 that places Y platform 20 in the XY platform square groove 35 that neutral position thereunder is set and be provided with, and can move freely on X guide rail 21, is provided with several pneumatic bearing 4 between XY platform square groove 35 and X guide rail 21.When XY platform 30 drives Y platform 20 when the Y direction that base station 10 is installed moves, the center of gravity of XY platform 30 can not setovered, its stressed also comparing on average each other, thereby effectively solved XY platform in the prior art other place that the Y platform causes drive XY platforms 30 when the Y directions that base station 10 is installed move when Y platform 20, the centre offset of XY platform 30 and Y platform 20, each other the XY platform 30 that brings of stressed inequality away from the local microcosmic beat of Y platform 20 greatly, the problem of precise decreasing.

See also Fig. 1, Fig. 2 and Fig. 3, described XY platform 30 is provided with two

XY platform rails

34,37, and wherein XY platform rail 34 is as supplying to separate the guide rail that lotus root device 33 moves.XY

platform rail

34 and 37 is set makes XY platform 30 on its intensity based of maintenance, reduce its thickness, thereby reduce its center of gravity, make it more steady in motion.

See also Fig. 1, Fig. 2 and Fig. 3, also be provided with between X-axis friction lever 32 that X-axis friction wheel friction lever friction drive device 31 is provided with and the XY platform 30 and separate lotus root device 33, the described lotus root device 33 of separating is overall structure, and it is connected with X-axis friction lever 32, be the inverted groove type, on XY platform rail 34, move.Be provided with several pneumatic bearing 4 on this mating face of separating lotus root device 33 and XY platform rail 34, described pneumatic bearing 4 separate lotus root device 33 play on XY platform rail 34, move transmission X to the thrust of friction lever and Y to leading role.

See also Fig. 1, Fig. 2 and Fig. 3, it is described that to separate the level height that lotus root device 33 is connected with X-axis friction lever 32 suitable with XY platform 30 heights of C.G., therefore, when X-axis friction lever 32 reconciliation lotus root devices 33 drive XY platforms 30 move, XY platform 30 can be more steady, running precision is higher, effectively overcome and separated the top that the lotus root device is arranged at the XY platform in the prior art, when separating the lotus root device and drive the XY platform and move, be higher than the problem that the XY platform moves steadily, mobile accuracy reduces that the height of C.G. of XY platform is brought owing to separate the level height of lotus root device.

See also Fig. 1 and Fig. 2, offer in the middle of described mounting base 10 upper surfaces and be used for the square groove 11 that Y platform 20 is installed, its X-axis direction is provided with and is used for the X-axis friction drive device fitting seat 13 that X-axis friction wheel friction lever friction drive device is installed, its Y direction is provided with and is used for the Y-axis friction drive device fitting seat 12 that Y-axis friction wheel friction lever friction drive device is installed, described X-axis friction wheel friction lever friction drive device 31 is installed on the X-axis friction drive device fitting seat 13, and described Y-axis friction wheel friction lever friction drive device 23 is installed on the Y-axis friction drive device fitting seat 12.

See also Fig. 1, Fig. 2 and Fig. 4, described mounting base 10 and Y platform 20 form by the granite integral production, the integrative-structure that described XY platform rail and XY platform are also made for granite, this structure just can avoid it to be made by different materials because different thermal distortions that cause of the thermal expansion coefficient of different materials and thermal stress cause its distortion and the problem of the bulk strength reduction that brought by the assembling of different materials part.

See also Fig. 2 and Fig. 4, two pneumatic bearing mounting bases 24 that Y platform 20 has split the both sides in the Y direction of Y platform, described pneumatic bearing mounting base 24 is made by alloy material, owing to do not connect between two pneumatic bearing mounting bases 24, therefore this pneumatic bearing mounting base 24 is because the local deformation of the Y platform both sides that thermal expansion causes is measured very for a short time, and this micro-strain can not cause the distortion of Y platform 20 and the XY platform 30 above Y platform 20, can not destroy the planeness and the parallelism of two slideway 21 of Y platform 20.

During the operation of XY stage apparatus, the square groove 11 that Y platform 20 places mounting base 10 to offer, the pneumatic bearing 4 that Y platform below is provided with makes it be movably connected on mounting base 10, and its weight also is delivered on the mounting base 10 by pneumatic bearing 4; XY platform 30 moves on the X guide rail 21 that Y platform 20 is provided with by the XY platform square groove 35 that its below is provided with, and the pneumatic bearing 4 that XY platform square groove 35 inboards are provided with can play the guiding role in XY platform 30 and Y platform 20 move; X-axis friction wheel friction lever friction drive device 31 drives XY platform 30 by its X-axis that is provided with friction friction lever 32 and moves in X-axis direction, Y-axis friction wheel friction lever friction drive device 22 drives the Y platform by its Y-axis friction lever that is provided with 23 and moves in Y direction, thereby reaches the accurate location of XY locating platform device.

The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.

Claims

1, a kind of XY locating platform device, the Y platform and the XY platform that comprise mounting base and the mutual vertical motion of device on mounting base, it is characterized in that: described Y platform and XY platform all offer the light openings that supplies transmission light or back lighting light to pass through, described Y platform is provided with the X guide rail, places on the described X guide rail in the described XY platform.

2, XY locating platform device as claimed in claim 1 is characterized in that: also comprise with XY platform center of gravity is in same or approximate same level height and separate the lotus root device, the described lotus root device of separating is connected with the XY platform.

3, XY locating platform device as claimed in claim 1, it is characterized in that: described XY platform is provided with the XY platform rail, and described XY platform rail and XY platform are overall structure.

4, XY locating platform device as claimed in claim 1, it is characterized in that: described mounting base, Y platform and XY platform are made with same material.

5, XY locating platform device as claimed in claim 4, it is characterized in that: described mounting base, Y platform and XY platform all are made with granite.

6, XY locating platform device as claimed in claim 4, it is characterized in that: the both sides of described Y platform also are respectively equipped with the pneumatic bearing mounting base that is made with alloy material, do not connect between the described pneumatic bearing mounting base.

7, XY locating platform device as claimed in claim 1 is characterized in that: also be provided with and be used to drive the friction drive device that Y platform and XY platform move.

8, XY locating platform device as claimed in claim 7 is characterized in that: described friction drive device is a friction wheel friction lever friction drive device.