CN104401713A - Carrying device of mask frame - Google Patents

Carrying device of mask frame Download PDF

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Publication number
CN104401713A
CN104401713A CN201410501848.2A CN201410501848A CN104401713A CN 104401713 A CN104401713 A CN 104401713A CN 201410501848 A CN201410501848 A CN 201410501848A CN 104401713 A CN104401713 A CN 104401713A
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CN
China
Prior art keywords
mask frame
support platform
fixed
supporting mechanism
handling device
Prior art date
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Pending
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CN201410501848.2A
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Chinese (zh)
Inventor
魏志凌
张炜平
许镭芳
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Kunshan Power Stencil Co Ltd
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Kunshan Power Stencil Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Kunshan Power Stencil Co Ltd filed Critical Kunshan Power Stencil Co Ltd
Priority to CN201410501848.2A priority Critical patent/CN104401713A/en
Publication of CN104401713A publication Critical patent/CN104401713A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a carrying device of a mask frame. The carrying device comprises a clamping mechanism, a supporting mechanism, a connecting mechanism, a bearing mechanism and a conveying mechanism. The clamping mechanism is fixed to the supporting mechanism which is connected with the bearing mechanism through the connecting mechanism; the bearing mechanism conveys a mask frame fixed to the clamping mechanism through the conveying mechanism; the clamping mechanism comprises at least three clamping devices; the supporting mechanism comprises at least three supporting sides; the connecting mechanism comprises at least three connecting rods; each of the bearing mechanism and the supporting mechanism comprises at least three hinge bases; one end of each connecting rod is connected with the corresponding hinge base on the bearing mechanism; and the other ends of the connecting rods are connected with the corresponding hinge bases on the supporting mechanism. The carrying device of the mask frame can well solve the problem that due to the fact that the mask frame is heavy, manual carrying is difficult.

Description

A kind of Handling device of mask frame
Technical field
The invention belongs to plane display industry, relate to OLED display screen industry, particularly relate to a kind of Handling device of OLED mask frame.
 
Background technology
OLED is follow-on technique of display, compared with the LCD technique of display used at present, has the advantages such as angle of visibility is large, beautiful in colour, low in energy consumption, can substitute the lcd technology of current main flow gradually.In OLED display screen manufacturing process, there is one organic luminorphor evaporation process, need to use high-precision OLED evaporation mask assembly, the quality of mask assembly to the quality of read-out, yield rate has extreme influence, is the key factor of restriction OLED display screen development.
OLED evaporation mask assembly comprises mask plate and mask frame two parts, mask plate has precision graphic, precision graphic is the benchmark of evaporation graph transfer printing, by mesh stretching body, the mask plate with precision graphic is carried out stretching tight net, make mask plate have certain tension force, by laser welding, the mask plate with some tension is fixed on mask frame.The precision of mask plate directly affects the quality of OLED display screen, usual precision prescribed deviation is within several micrometer range, for ensureing the precision of mask plate, reduce the deviation of mask plate precision in carrying and evaporate process, mask frame needs enough intensity, for the quality comparation of the intensity mask frame entirety ensureing mask frame is large.
Along with the in large size of OLED display screen and the needs produced in enormous quantities, the quality of mask frame also increases thereupon, and because mask frame quality is comparatively large, mask frame to be transported to or to be moved away from the service platforms such as welding, measurement more difficult by artificial usually.
The present invention proposes a kind of Handling device of mask frame mainly for above problem, solves the above problem preferably.
 
Summary of the invention
In view of this, for overcoming the problem because of the heavier a dead lift difficulty of mask frame in prior art, the invention provides a kind of Handling device of mask frame, comprise clamping device, supporting mechanism, bindiny mechanism, load carrier and connecting gear, described clamping device is fixed on described supporting mechanism, described supporting mechanism is connected with described load carrier by described bindiny mechanism, and described load carrier is fixed on the described mask frame on described clamping device by described connecting gear transmission;
Described clamping device comprises at least three holding devices, described supporting mechanism comprises at least three support edges, described bindiny mechanism comprises at least three connecting rods, described load carrier, described supporting mechanism comprise at least three hinge seats respectively, one end of each described connecting rod is connected with the described hinge seat of on described load carrier, and the described hinge seat that the other end is corresponding with on described supporting mechanism connects.
Further, described connecting gear is two parallel transmission guide rails, and described load carrier is crossbeam, and the two ends of described crossbeam are provided with slide block, and described slide block can at described transmission slide on rails.
Further, described holding device comprises the grip block being provided with counter sink, described grip block to be coordinated with described counter sink by screw and is fixed on described holding device, by adjusting described screw in the position that described counter sink is fixed to adapt to the described mask frame of different-thickness.
Further, described crossbeam two Side symmetrical be fixed with four described hinge seats;
Described supporting mechanism comprises four described support edges and four described hinge seats, and four described support edges form two groups of opposite side, the one group of opposite side being fixed on described supporting mechanism of four described hinge seat symmetries;
Described clamping device comprises four described holding devices, four described holding device symmetries be fixed on one group of opposite side that described supporting mechanism is fixed with described hinge seat;
Described bindiny mechanism comprises four described connecting rods, and one end of four described connecting rods is individually fixed in four described hinge seats on described crossbeam, and the other end is individually fixed in four described hinge seats corresponding on described supporting mechanism.
Described holding device and described support edge are formed in one structure or be fixed on described supporting mechanism by fixed mechanism.
Described hinge seat on described crossbeam and described crossbeam are formed in one structure or be fixed on described crossbeam by fixed mechanism; Described hinge seat on described support edge and described support edge are formed in one structure or be fixed on described support edge by fixed mechanism.
Described crossbeam is entity structure or hollow structure, and the crossbeam of hollow structure can reduce the weight of crossbeam, thus reduces the pressure to service platform.
Further, described supporting mechanism is formed in one structure or be formed by connecting by discrete support edge.
Further, described supporting mechanism can stretch the described mask frame adapting to different size dimension.
Further, the side of described transmission guide rail is provided with linear electric motors, automatically can control described crossbeam slide on described transmission guide rail by described linear electric motors.
Further, the two ends of described connecting rod are provided with through hole, and described connecting rod two ends are connected with described hinge seat by fastener, and the described through hole of one end that described connecting rod is connected with described hinge seat on described supporting mechanism is rectangular through hole.
Further, the Handling device of described mask frame also comprises support platform, described support platform comprises support platform pedestal, support platform base, support platform slide assemblies, support platform guiding mechanism, support platform detent mechanism, described support platform pedestal is fixed on described support platform base, and described support platform slide assemblies, support platform guiding mechanism, support platform detent mechanism are all arranged on described support platform pedestal.
Further, described support platform slide assemblies is made up of by certain distribution mode some steel ball rollers, the distribution mode of described steel ball roller and the profile of described mask frame adapt, described support platform guiding mechanism is arranged on the both sides of described support platform pedestal, the profile of described support platform guiding mechanism and described mask frame adapts, the inner side of described support platform guiding mechanism is also provided with guide slide mechanism, and described guide slide mechanism is ball; Described support platform detent mechanism is arranged on described support platform pedestal, makes described mask frame be loaded in described support platform allocation really, enable described clamping device clamp described mask frame allocation really by described support platform detent mechanism.
Mask frame Handling device provided by the invention can solve the problem because of the larger difficult of mask frame quality in tradition carrying OLED mask frame process.
The aspect that the present invention adds and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:
Figure 1 shows that the structural representation of the Handling device of a kind of mask frame of the present invention;
Figure 2 shows that the structural representation by Handling device carrying mask frame of the present invention;
Figure 3 shows that the structural representation of the Handling device of the another kind of mask frame of the present invention;
Figure 4 shows that the structural representation of the Handling device of the another kind of mask frame of the present invention;
Figure 5 shows that 18 enlarged schematic partial view in Fig. 1;
Figure 6 shows that 21 enlarged schematic partial view in Fig. 2;
Figure 7 shows that the structural representation of the support platform of mask frame Handling device of the present invention;
Figure 8 shows that 70 enlarged schematic partial view in Fig. 7;
Figure 9 shows that the process schematic in the present invention, mask frame being loaded into support platform;
Figure 10 shows that the process schematic of mask frame Handling device of the present invention carrying mask frame;
Figure 11 shows that the Handling device of mask frame in the present invention carries the process schematic of mask frame on concrete operations base station;
Figure 12 shows that mask frame stage structure schematic diagram;
Figure 13 shows that the process schematic by mask frame Handling device of the present invention, mask frame being loaded into mask frame microscope carrier;
Figure 14 shows that 130 enlarged schematic partial view in Figure 13.
 
In Fig. 1,11 is the holding device forming clamping device, and 12 is supporting mechanism, and 120,121 is the support edge of supporting mechanism, and 13 is connecting rod, and 14 is load carrier, and 15 is connecting gear, and 16 is hinge seat, and 17 is slide block, and 18 is observation part to be amplified;
In Fig. 2,20 is mask frame, and 21 is observation part to be amplified;
In Fig. 5,51 is grip block, and 511 is grip block side plate, and 512 is grip block lower plate, and 52 is counter sink, and 53 is Pneumatic assembly, and 54 is holding device guide plate, and 55 is holding device pilot bar;
In Fig. 7,7 represent support platform, and 70 is observation part to be amplified, and 71 is support platform pedestal, and 72 is support platform base, and 73 is the steel ball roller forming support platform slide assemblies, and 74 is support platform guiding mechanism, and 75 is support platform detent mechanism;
In Fig. 8,741 is guide slide mechanism;
In Figure 11,111 is mask frame microscope carrier, and 112 is the net self-clamping module that stretches tight, and 113 is linear electric motors, and 114 is base station.1141 is base station support foundation, and 1142 is granite surface plate, and 115 for transmitting guide supporting;
In Figure 12,1111 is mask frame microscope carrier pedestal, and 1112 is levelling gear, 1113 is mask frame loading plate, and 1114 is mask frame microscope carrier detent mechanism, and 11141 is the locating piece forming detent mechanism, 11142 for form detent mechanism hold out against cylinder, 11151 is lifting drive, and 11152 is top board;
In Figure 13,130 is observation part to be amplified;
In Figure 14,11111 is the base plate of mask frame microscope carrier pedestal, and 11112 is the side plate of mask frame microscope carrier pedestal, and 11121 is electric actuator, and 11122 is the leveling board for forming levelling gear 1112, and 11123 is leveling guide piece, and 11153 is jack-up guide piece.
 
detailed description of the invention
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " is fixed ", " connection " should be interpreted broadly, such as, " connection " can be fixedly connected with, and connects integratedly, also can be removably connect; It can be integrated fixing for " fixing ", also can be fixed by bindiny mechanism.For the ordinary skill in the art, particular case above-mentioned term concrete meaning in the present invention can be understood.
Inventive concept of the present invention is as follows, as as described in technical background, for ensureing that mask plate has higher precision, the quality comparation of mask frame is large, again due to the in large size of OLED display screen and produce in enormous quantities needs, the quality of mask frame also increases thereupon, usually more difficult by manually mask frame being transported to or being moved away from the platforms such as welding, measurement.The Handling device of mask frame provided by the invention, can solve because mask frame is heavier, the problem of a dead lift difficulty, easily heavy mask frame can be transported to or move away from welding mechanism and measuring mechanism by Handling device provided by the invention, liberation labour power is enhanced productivity simultaneously.
The Handling device of mask frame of the present invention is described below with reference to accompanying drawings.
According to embodiments of the invention, the Handling device that the invention provides a kind of mask frame comprises clamping device, supporting mechanism 12, bindiny mechanism, load carrier and connecting gear, clamping device is fixed on supporting mechanism, supporting mechanism is connected with load carrier by bindiny mechanism, and load carrier is fixed on the mask frame 20 on clamping device by connecting gear transmission;
Clamping device comprises at least three holding devices 11, supporting mechanism comprises at least three support edges, bindiny mechanism comprises at least three connecting rods 13, load carrier, supporting mechanism comprise at least three hinge seats 16 respectively, one end of each connecting rod 13 is connected with the hinge seat of on load carrier 16, and the hinge seat 16 that the other end is corresponding with on supporting mechanism connects.
According to some embodiments of the present invention, as shown in Fig. 1 ~ Fig. 4, connecting gear is two parallel transmission guide rails 15, load carrier is crossbeam 14, the two ends of crossbeam 14 are provided with slide block 17, and slide block 17 can slide on transmission guide rail 15, transmits guide rail 15 and is installed on above the support of corresponding platform, as the support of measuring table or the support of jig, mask frame is transported to corresponding platform by Handling device.
According to some embodiments of the present invention, as shown in Fig. 1 ~ Fig. 4, holding device 11 comprises the grip block 51 being provided with counter sink 52, and grip block 51 to be coordinated with counter sink 52 by screw and is fixed on holding device 11, by adjustment screw in the fixing position of counter sink 52 to adapt to the mask frame of different-thickness.Figure 5 shows that 18 part structure for amplifying schematic diagrams in Fig. 1, grip block 51 has counter sink 52, the setting of counter sink 52 can adapt to the mask frame of different-thickness.Preferably, holding device also comprises Pneumatic assembly 53, Pneumatic assembly 53 and stay bearing plate 120 are screwed, Pneumatic assembly is connected with pilot bar 55, guide plate 54 is fixed on one end of pilot bar 55, grip block 51 is fixed on guide plate 55 by counter sink 52 and screw fit, during clamping mask frame, Pneumatic assembly 53 drives pilot bar 55 that grip block 51 is moved to the direction contrary with Pneumatic assembly 53, in the space that mask frame 20 can be moved between the upper side of grip block lower plate 512 and the downside of support edge 120, then grip block 51 is driven to move near the direction of Pneumatic assembly 53 by Pneumatic assembly 53, grip block side plate 511 is contacted with the side of stay bearing plate 120 and the outer side edges of mask frame 20, mask frame 20 is gripped by grip block 51 by holding device 11 like this.The Pneumatic assembly 53 of holding device 11 can be replaced to the fixed block be fixedly connected with support edge 120, manually make grip block 51 that mask frame is gripped holding device 11.
According to embodiments of the invention, the Handling device 10 of mask frame as shown in Figure 1, its structure is:
Two Side symmetrical of crossbeam 14 be fixed with four hinge seats 16;
Supporting mechanism 12 comprises four support edges and four hinge seats 16, four support edges 12 form two groups of opposite side, one group of opposite side is made up of two support edges 120, another group opposite side is made up of two support edges 121, the one group of opposite side being fixed on supporting mechanism 12 of four hinge seat symmetries, in Fig. 1, four hinge seats 16 are fixed on one group of opposite side being made up of support edge 120;
What clamping device comprised four holding devices, 11, four holding device 11 symmetries is fixed on one group of opposite side that supporting mechanism 12 is fixed with hinge seat 16, as shown in Figure 1, four holding device 11 symmetries be fixed on two support edges 120;
One end that bindiny mechanism comprises four connecting rods, 13, four connecting rods 13 is individually fixed in four hinge seats 16 on crossbeam 14, and the other end is individually fixed in four hinge seats 16 corresponding on supporting mechanism 12.
As shown in Fig. 1 ~ Fig. 4, crossbeam 14 is hollow structure, under ensureing that crossbeam has the prerequisite of sufficient intensity, is set to hollow structure, makes its weight saving, can reduce the burden of corresponding platform, also saves raw MAT'L simultaneously.
As shown in Fig. 1 ~ 4, holding device 11 and support edge 120 are formed in one structure or be fixed on support edge 120 by fixed mechanism (as screw), and the hinge seat 16 on crossbeam 14 and crossbeam 16 are formed in one structure or be fixed on crossbeam by fixed mechanism (as screw or bolt etc.); Hinge seat on support edge 120 16 and support edge 120 are formed in one structure or be fixed on support edge 120 by fixed mechanism (as screw or bolt etc.).
Figure 2 shows that the structural representation by the Handling device carrying mask frame shown in Fig. 1, Figure 6 shows that 21 part structure for amplifying schematic diagrams in Fig. 2, mask frame 20 is fixed on supporting mechanism 12 by four holding devices 11 of clamping device, by the grip block 51 of holding device 11, the downside of mask frame 20 is held up, by screw, grip block 51 is fixed on holding device 11.In the process of carrying mask frame 20 as shown in Figure 2, the support edge 120 be connected by hinge seat 16 with connecting rod 13 has the trend to central motion because of the Action of Gravity Field of self and mask frame 20, therefore certain power is produced to mask frame, by the support of 121 pairs of support edges 120, support edge, the power of the 120 pairs of mask frames in support edge is transferred on support edge 121, thus avoids mask frame 20 to be out of shape because of stressed.
According to some embodiments of the present invention, as shown in Fig. 1 ~ Fig. 4, supporting mechanism 12 is formed in one structure or be formed by connecting by discrete support edge.
According to some embodiments of the present invention, as shown in Fig. 1 ~ Fig. 4, supporting mechanism 12 can stretch the mask frame 20 adapting to different size dimension, stretching structure is all arranged in the middle part that supporting mechanism 12 can be arranged in two groups of support edges (support edge 120 and support edge 121), simultaneously different in two sides of crossbeam 14 positional symmetry hinge seat is set, to adapt to the mask frame 20 of different length size and width dimensions; Also only one group of opposite side wherein can be arranged to stretching structure, preferably, stretching structure is arranged in support edge 121, support edge 120 length is fixed.
When supporting mechanism 12 is formed by connecting by discrete support edge, also fixed measure can be arranged in support edge, change support edge 121 from the position that support edge 120 is fixedly connected with to adapt to the mask frame of different size dimension.
According to some embodiments of the present invention, as shown in figure 11, the side transmitting guide rail 15 is provided with linear electric motors 113, automatically can control crossbeam 14 slide on transmission guide rail 15 by linear electric motors 113.
According to some embodiments of the present invention, as shown in Fig. 1 ~ Fig. 6, the two ends of connecting rod 13 are provided with through hole 131, connecting rod 13 two ends are connected with hinge seat by fastener, the through hole of one end that connecting rod 13 is connected with support edge 12 upper hinge seat 16 is rectangular through hole 131, the through hole that connecting rod 13 is connected with the hinge seat 16 on support edge 120 is set to rectangular through hole 131, arranging of rectangular through hole 131 can make connecting rod 13 opposing fastener inserts slide along rectangular through hole 131, makes the more convenient to operate of grip block 51 permanent mask frame 20 step.Fastener can being combined for thru-bolt or screw and nut.
According to embodiments of the invention, mask frame Handling device as shown in Figure 3, its structure is:
Two sides of crossbeam 14 are fixed with three hinge seats 16, wherein the side being fixed on crossbeam 14 of two hinge seat 16 symmetries, and another hinge seat 16 is fixed on the middle part of crossbeam 14 another side;
Supporting mechanism 12 comprises four support edges, four support edges form two groups of opposite side, one group of opposite side is made up of two support edges 120, another group opposite side is made up of support edge 121, supporting mechanism 12 comprises three hinge seats 16, three hinge seats 16 are fixed on one group of supporting mechanism 12 on 120, symmetrically on a support edge are fixed with two hinge seats 16, and another hinge seat 16 is fixed at the middle part of another support edge;
The supporting mechanism 12 that is fixed on that clamping device comprises four holding devices, 11, four holding device 11 symmetries is fixed with on the support edge 120 of one group of opposite side of hinge seat 16; One end that bindiny mechanism comprises three connecting rods, 13, three connecting rods 13 is individually fixed in three hinge seats 16 on crossbeam 14, and the other end is individually fixed in three hinge seats 12 corresponding on support edge 120.
According to another embodiment of the present invention, mask frame Handling device as shown in Figure 4, its structure is:
Two Side symmetrical of crossbeam 14 be fixed with four hinge seats 16;
Supporting mechanism 12 comprises four support edges and four hinge seats, 16, four support edges and forms two groups of opposite side, and one group of opposite side is made up of two support edges 120, another group opposite side be made up of support edge 121, four hinge seat 16 symmetries be fixed on support edge 120;
Clamping device comprises three holding devices 11, three holding devices 11 are fixed on supporting mechanism and are fixed with on the support edge 120 of one group of opposite side of hinge seat 16, wherein symmetrically on a support edge 120 fix two holding devices 11, another holding device 11 is fixed at the middle part of another support edge 120;
One end that bindiny mechanism comprises four connecting rods, 13, four connecting rods 13 is individually fixed in four hinge seats on crossbeam 14, and the other end is individually fixed in four hinge seats 16 corresponding on supporting mechanism 12.
According to embodiments of the invention, as shown in Figure 7, the Handling device 10 of mask frame also comprises support platform 7, support platform 7 comprises support platform pedestal 71, support platform base 72, support platform slide assemblies 73, support platform guiding mechanism 74, support platform detent mechanism 75, support platform pedestal 71 is fixed on support platform base 72, and support platform slide assemblies 73, support platform guiding mechanism 74, support platform detent mechanism 75 are all arranged on support platform pedestal 71.
With reference to figure 7, Fig. 8, support platform slide assemblies is made up of by certain distribution mode some steel ball rollers 73, the distribution mode of steel ball roller 73 and the profile of mask frame 20 adapt, support platform guiding mechanism 74 is arranged on the both sides of support platform pedestal 71, support platform guiding mechanism 74 adapts with the profile of mask frame 20, the inner side of support platform guiding mechanism 74 is also provided with guide slide mechanism 741, and guide slide mechanism is ball; Support platform detent mechanism 75 is arranged on support platform pedestal 71, makes mask frame 20 be loaded in support platform 7 allocation really, enable clamping device clamp mask frame 20 allocation really by support platform detent mechanism 75.
As shown in figure 11, Handling device for mask frame carries the process schematic of mask frame on concrete operations base station, this operation base station is mainly used in the making of OLED evaporation mask plate and the service platform of mask assembly assembling, it comprises measurement, welding, assembling, the functions such as laser beam cutting, in Figure 11, 111 is mask frame microscope carrier, 112 is self-clamping module, 113 is linear electric motors, 114 is base station, 1141 (are generally metal or metal alloy for base station support foundation, be preferably square steel frame), 1142 is that (accuracy requirement that mask plate assembling and mask plate make is higher for granite surface plate, so select more stable granite as service platform), 115 (transmit guide supporting 115 to be mainly used in installing device such as transmission guide rail and linear electric motors 113 etc. for transmitting guide supporting, the laser beam cutting head unit making mask plate opening also indirectly can be installed on and transmit in guide supporting, laser cutting device precision and stability when cutting mask plate opening requires higher, so the material transmitting guide supporting 115 is preferably granite), transmit guide rail 15 and be installed on transmission guide supporting 115 upper side, some self-clamping modules 112 composition be arranged on granite surface plate 1142 stretches tight, and (mask frame microscope carrier 111 is arranged on the granite surface plate 1142 of the zone line that the screen component that stretches tight surrounds screen component, support platform 7 is mounted on the upper side of granite surface plate 1142 by support platform base 72, the inside of support platform pedestal 71 is full engraved structure, interference can not be brought to the operation of the screen component that stretches tight.Mask frame 20 grips by the clamping device of mask frame Handling device 10 by mask frame support platform 7, carries mask frame 20 move to above mask frame microscope carrier 111 along transmission guide rail 15 by crossbeam.
Figure 12 shows that as mask frame stage structure schematic diagram, mask frame microscope carrier pedestal 1111, levelling gear 1112 and mask frame loading plate 1113 form the basic structure (mask frame microscope carrier can only be formed thus) of mask frame microscope carrier 111.In other embodiments of mask frame microscope carrier, mask frame microscope carrier 111 can also comprise mask frame microscope carrier detent mechanism 1114 and jacking mechanism 1115, Figure 13 shows that mask frame microscope carrier loads a kind of embodiment schematic diagram of mask frame by jacking mechanism 1115, Figure 14 is 130 enlarged schematic partial view in Figure 13.Below in conjunction with Figure 12, Figure 13, Figure 14, to the detailed description of mask frame microscope carrier 111 structure.
Described mask frame microscope carrier pedestal 1111 is made up of base plate 11111 and the side plate 11112 be arranged on base plate 11111, and it is for installing levelling gear 1112; Levelling gear 1112 is vertically set on electric actuator 11121 on described mask frame microscope carrier pedestal base plate 11111 by 4 and the leveling board 11122 be arranged on above each electric actuator 11121 is formed; Mask frame loading plate 1113 is arranged on above the leveling board 11122 of levelling gear 1112, regulate the electric actuator 11121 of levelling gear 1112 can adjust the level attitude being arranged on mask frame loading plate 1113 above leveling board 11122 by coordinating, mask frame loading plate 1113 is for directly carrying mask frame 20.In some embodiments of the invention, the electric actuator 11121 forming levelling gear 1112 is connected with leveling board 11122 by floating junction (not shown), electric actuator 11121 provides power for levelling gear 1112, and leveling board 11122 is as the external tapping of levelling gear 1112; Each electric actuator 11121 both sides are also provided with a leveling guide piece 11123, by the mating reaction of electric actuator 11121 both sides leveling guide piece 11123, can control the sense of motion of leveling board 11122 on levelling gear 1112 by actv..
For the ease of mask frame 20 being loaded on mask frame microscope carrier 111, mask frame microscope carrier 111 is provided with jacking mechanism 1115, jacking mechanism 1115 is vertically set on lifting drive 11151 on pedestal 1111 by 4 and 2 top boards 11152 be horizontally set on above lifting drive 11151 are formed, top board 11152 completes rising or down maneuver by the motion of lifting drive 11151, mask frame loading plate 1113 is provided with the through-hole structure matched with jacking mechanism 1115, mask frame loading plate 1113 upper surface is provided with the sunk structure adapted with the top board 11152 of jacking mechanism 1115, when making top board 11152 drop to nadir, the upper surface of top board 11152 is not higher than the upper surface of mask frame loading plate 1113.In addition, the top board 11152 forming jacking mechanism 1115 needs to move in vertical direction, namely lifting drive 11151 can only drive top board 11152 to move in vertical direction, can move by preset path to make jacking mechanism 1115, lifting drive 11151 side is supporting is provided with jack-up guide piece 11153 for each of jacking mechanism 1115, and the upper end of the lifting drive 11151 of jacking mechanism 1115 is connected with top board 11152 by floating junction (not shown).
Mask frame microscope carrier 111 also comprises detent mechanism 1114, detent mechanism is made up of cylinder assembly 11142 and locating piece 11141, detent mechanism 1114 is arranged on the top board 11151 of mask frame loading plate 1113 or jacking mechanism 1115, mask frame 20 to be positioned on mask frame loading plate 1113 allocation really by detent mechanism 1114, thus ensures the stability of mask plate component assembling process.As shown in Figure 12,13, mask frame loading plate 1113 two adjacent edges be respectively provided with two cylinder assemblies 11142, be provided with locating piece 11141 not arranging another two adjacent edges of cylinder assembly 11142, in the present embodiment, locating piece 11141 is strip structure, is arranged on the top board 11152 of mask frame loading plate 1113 or jacking mechanism 1115.Mask frame 20 is placed in after on mask frame loading plate 1113, cylinder assembly 11142 pairs of mask frames 20 of detent mechanism 1114 provide certain pressure, mask frame 20 is made to hold out against the locating piece 11141 of detent mechanism 1115, thus reach detent mechanism 1115 pairs of mask frames 20 and fix, make mask frame 20 to be positioned on mask frame loading plate 1113 allocation really.
In the present invention, the top board 11152 of jacking mechanism 1115 is done by the motion of lifting drive 11151 and rises or down maneuver, thus realizes being placed in mask frame 20 above top board 11152 and being loaded on the mask frame loading plate 1113 of microscope carrier.Consider the effect essence of jacking mechanism 1115, as other embodiments of the present invention, in the present invention, jacking mechanism 1115 can comprise more than 4 lifting drives 11151 or the top board 11152 that is horizontally set on more than 2 above lifting drive 11151, and lifting drive 11151 can adopt cylinder or electric cylinder to drive.In other embodiments of the present invention, because the size of mask frame 20 is comparatively large, the quantity of the electric actuator that levelling gear 1112 adopts can also more than 4.
In the present invention, all adopt floating junction between the lifting drive 11151 of jacking mechanism 1115 and top board 11152, between the electric actuator 11121 of levelling gear 1112 and leveling board 11122, the joint of bascule is conducive to mechanical adjustment process.
With reference to figure 9 ~ Figure 14, the flow process be loaded into by mask frame 20 on mask frame microscope carrier 111 is:
A, mask frame to be loaded, 20 determine position being loaded in support platform 7, as shown in Figure 9;
B, grip block 51 clamp mask frame 20 and mask frame 20 is mentioned by crossbeam 14 carry along transmit guide rail 15 leave support platform 111, as shown in Figure 10, Figure 11;
C, manually propelling movement or Electronic control, crossbeam 14 slides into above mask frame microscope carrier 111 on transmission guide rail 15;
The top board 11152 of d, mask frame microscope carrier 111 jacking mechanism 1115 rises to certain altitude (contact or the lower surface near mask frame 20), with reference to Figure 12 under the driving of lifting drive 11151;
E, release grip block 51, the top board 11152 of jacking mechanism 1115 declines under the driving of lifting drive 11151, mask frame 20 is supported by mask frame loading plate 1113, then crossbeam 14 is manually controlled or electronic control move on to transmit guide rail 15 end near.
The Handling device of mask frame provided by the invention, by the clamping device (holding device as shown in Fig. 1 ~ Fig. 4) being fixed on supporting mechanism, mask frame 20 is clamped, supporting mechanism is connected with bogey 14 by connecting rod 13, bogey 14 slides and moves or move away from heavy mask frame 20 to corresponding platform (as jig, mask assembly detection platform, mask plate assembly platform) on transmission guide rail 15, well solve the problem because of the heavier a dead lift difficulty of mask frame, improve production efficiency.
Although be described in detail the specific embodiment of the present invention with reference to multiple illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, these improve and embodiment will drop within spirit and scope.Specifically, within the scope of aforementioned open, accompanying drawing and claim, rational modification and improvement can be made in the layout of parts and/or sub-combination layout, and spirit of the present invention can not be departed from.Except modification and the improvement of parts and/or layout aspect, its scope is by claims and equivalents thereof.

Claims (10)

1. a Handling device for mask frame, comprises clamping device, supporting mechanism, bindiny mechanism, load carrier and connecting gear, it is characterized in that:
Described clamping device is fixed on described supporting mechanism, and described supporting mechanism is connected with described load carrier by described bindiny mechanism, and described load carrier is fixed on the described mask frame on described clamping device by described connecting gear transmission;
Described clamping device comprises at least three holding devices, described supporting mechanism comprises at least three support edges, described bindiny mechanism comprises at least three connecting rods, described load carrier, described supporting mechanism comprise at least three hinge seats respectively, one end of each described connecting rod is connected with the described hinge seat of on described load carrier, and the described hinge seat that the other end is corresponding with on described supporting mechanism connects.
2. the Handling device of mask frame according to claim 1, it is characterized in that: described connecting gear is two parallel transmission guide rails, described load carrier is crossbeam, and the two ends of described crossbeam are provided with slide block, and described slide block can at described transmission slide on rails.
3. the Handling device of mask frame according to claim 2, it is characterized in that: described holding device comprises the grip block being provided with counter sink, described grip block to be coordinated with described counter sink by screw and is fixed on described holding device, by adjusting described screw in the position that described counter sink is fixed to adapt to the described mask frame of different-thickness.
4. the Handling device of the mask frame according to Claims 2 or 3, is characterized in that:
Two Side symmetrical of described crossbeam be fixed with four described hinge seats;
Described supporting mechanism comprises four described support edges and four described hinge seats, and four described support edges form two groups of opposite side, the one group of opposite side being fixed on described supporting mechanism of four described hinge seat symmetries;
Described clamping device comprises four described holding devices, four described holding device symmetries be fixed on one group of opposite side that described supporting mechanism is fixed with described hinge seat;
Described bindiny mechanism comprises four described connecting rods, and one end of four described connecting rods is individually fixed in four described hinge seats on described crossbeam, and the other end is individually fixed in four described hinge seats corresponding on described supporting mechanism.
5. the Handling device of the mask frame according to claim 1 or 2 or 3, is characterized in that: described supporting mechanism is formed in one structure or be formed by connecting by discrete support edge.
6. the Handling device of mask frame according to claim 5, is characterized in that: described supporting mechanism can stretch the described mask frame adapting to different size dimension.
7. the Handling device of the mask frame according to Claims 2 or 3, is characterized in that: the side of described transmission guide rail is provided with linear electric motors, automatically can control described crossbeam slide on described transmission guide rail by described linear electric motors.
8. the Handling device of the mask frame according to claim 1 or 2 or 3, it is characterized in that: the two ends of described connecting rod are provided with through hole, described connecting rod two end fastener is connected with described hinge seat, and the described through hole of one end that described connecting rod is connected with described hinge seat on described supporting mechanism is rectangular through hole.
9. the Handling device of the mask frame according to claim 1 or 2 or 3, it is characterized in that: the Handling device of described mask frame also comprises support platform, described support platform comprises support platform pedestal, support platform base, support platform slide assemblies, support platform guiding mechanism, support platform detent mechanism, described support platform pedestal is fixed on described support platform base, and described support platform slide assemblies, support platform guiding mechanism, support platform detent mechanism are all arranged on described support platform pedestal.
10. the Handling device of mask frame according to claim 9, it is characterized in that: described support platform slide assemblies is made up of by certain distribution mode some steel ball rollers, the distribution mode of described steel ball roller and the profile of described mask frame adapt, described support platform guiding mechanism is arranged on the both sides of described support platform pedestal, the profile of described support platform guiding mechanism and described mask frame adapts, the inner side of described support platform guiding mechanism is also provided with guide slide mechanism, and described guide slide mechanism is ball; Described support platform detent mechanism is arranged on described support platform pedestal, makes described mask frame be loaded in described support platform allocation really, enable described clamping device clamp described mask frame allocation really by described support platform detent mechanism.
CN201410501848.2A 2014-09-27 2014-09-27 Carrying device of mask frame Pending CN104401713A (en)

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CN107351334A (en) * 2017-09-07 2017-11-17 惠州市维尔康精密部件有限公司 Firm mobile slim big deckle board mechanism
CN108584793A (en) * 2018-05-14 2018-09-28 安徽工程大学 A kind of novel cargo automatic dischargingapparatus

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CN107351334A (en) * 2017-09-07 2017-11-17 惠州市维尔康精密部件有限公司 Firm mobile slim big deckle board mechanism
CN108584793A (en) * 2018-05-14 2018-09-28 安徽工程大学 A kind of novel cargo automatic dischargingapparatus

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