CN204221303U - A kind of metal mask plate assembling components equipment - Google Patents
A kind of metal mask plate assembling components equipment Download PDFInfo
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- CN204221303U CN204221303U CN201420559205.9U CN201420559205U CN204221303U CN 204221303 U CN204221303 U CN 204221303U CN 201420559205 U CN201420559205 U CN 201420559205U CN 204221303 U CN204221303 U CN 204221303U
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- mask plate
- axis guide
- guide rail
- outer frame
- metal mask
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Abstract
The utility model discloses a kind of metal mask plate assembling components equipment, it comprises: board, stretch tight screen component, mask plate microscope carrier, mask outer frame microscope carrier, motion guide rail, laser beveller, laser soldering device, same equipment system has concentrated making and the assembling of mask plate, integration mode can shorten the processing procedure of mask plate component, effectively can ensure the precision of finished metal mask plate, the metal mask plate assembling components equipment that the utility model provides can cut out mask plate that opening sidewalls is inclined plane and form mask plate component, the opening section of described mask plate is trapezium structure, it can avoid mask plate to produce evaporation effect when vapor deposition organic material.
Description
Technical field
The utility model belongs to technical field of mechanical equipment, is specifically related to a kind of metal mask plate assembling components equipment.
Background technology
OLED (Organic Light-Emitting Diode, be called for short OLED) be follow-on Display Technique, with liquid crystal display (the Liquid Crystal Display used at present, being called for short LCD) Display Technique compares, there is angle of visibility large, beautiful in colour, the advantage such as low in energy consumption, can substitute the lcd technology of current main flow gradually.
In the manufacturing process of OLED display panel, wherein the deposition of organic layer can use metal mask board component, Figure 1 shows that the schematic diagram adopting mask plate component evaporation organic material.Metal mask board component is made up of metal mask plate 10 and mask outer frame 11, metal mask plate 10 is due to thinner, can be fixed in mask outer frame 11 by related process before evaporation, Figure 2 shows that metal mask plate is fixed on the floor map in mask outer frame 11.During evaporation, metal mask plate 10 is fixed on brace table 12 by mask outer frame 11, organic material in vapor deposition source 13 is by below evaporation and diffusion to mask plate 10, mask plate 10 is provided with opening 100 in certain position, organic material is deposited on position corresponding in deposition substrate 14 by opening 100, forms deposited organic layer.
In technical requirement, the deposition quality of deposited organic layer has very large impact to later product quality, and the port quality of the deposition quality of deposited organic layer and metal mask plate, aperture position precision are closely related, wherein the aperture position precision of metal mask plate is except being determined by opening manufacturing process, is also assembled into metal mask plate 10 process mask outer frame 11 being formed metal mask unit and links directly.
A kind of metal mask plate kludge disclosed in the Chinese patent application file be application number shown in Fig. 3 being 201110079282.5, described kludge comprises: frame 31; Stretch tight screen component 32, described in the screen component that stretches tight be arranged in frame and draw metal mask plate for stretching tight; Measuring unit 33, described measuring unit is arranged in described frame movably for measuring metal mask plate; And control unit, described control unit is used for control survey unit and draws stretching tight of metal mask plate the measurement of metal mask plate and the screen component that stretches tight, and regulates the screen component that stretches tight to draw stretching tight of metal mask plate according to the measuring-signal received from measuring unit.But when adopting this equipment to carry out metal mask plate assembling, be not loaded in the metal mask plate stretched tight on screen component and easily occur folding line (causing metal mask plate directly to be scrapped) due to middle without supporting; In addition, in this patent application document, the position adjustments of mask outer frame is more difficult, is unfavorable for the welding assembly of mask plate.
Based on this, industry wishes to design a kind of mounting equipment with better function, can meet the assembling of high-test metal mask plate component preferably.
Utility model content
In view of this, the utility model provides a kind of metal mask plate assembling components equipment, to better meet the requirement of metal mask plate assembled with high precision.
The utility model provides a kind of metal mask plate assembling components equipment, and it comprises: board, and described board is as the support base station of described metal mask plate assembling components equipment; Stretch tight screen component, described in the screen component that stretches tight be fixedly mounted on described board, be provided with some clamping devices, described metal mask plate side by the described screen component that stretches tight gripper mechanism grips and stretch tight to draw and reach surfacing; Mask plate microscope carrier, described mask plate microscope carrier to stretch tight the metal mask sheet drawn without the described screen component that stretches tight for carrying, described mask plate microscope carrier comprises mask support plate and gripper shoe drive unit, described mask support plate can move in vertical direction under the driving of described gripper shoe drive unit, thus adjust described mask support plate upper surface relatively described in stretch tight screen component clamping face position; Mask outer frame microscope carrier, described mask outer frame microscope carrier is for carrying mask outer frame, and described mask outer frame is used for fixing described metal mask plate, described mask outer frame microscope carrier can adjust described mask outer frame level height; Motion guide rail, described motion guide rail comprises X-axis guide rail, Y-axis guide rail and Z axis guide rail, described Y-axis guide rail directly or is indirectly fixedly mounted on described board, described X-axis guide rail is arranged on described Y-axis guide rail, and the motion of Y direction can be carried out on described Y-axis guide rail, described Z axis guide rail is arranged on described X-axis guide rail, and described Z axis guide rail can carry out the motion of X-direction on X-axis guide rail; Laser soldering device, described laser soldering device is directly or indirectly arranged on described Z axis guide rail, the motion of X, Y-axis can be carried out on described X-axis guide rail, Y-axis guide rail with Z axis guide rail, also the motion of Z-direction can be done on Z axis guide rail, described laser soldering device comprises a laser welding system, and described metal mask plate is fixed in described mask outer frame by the laser weld that described laser welding system is launched.
Further, mask outer frame microscope carrier of the present utility model comprises: pedestal, levelling gear and housing loading plate, and described pedestal is made up of base plate and the side plate be arranged on described base plate, for installing described levelling gear; Described levelling gear is vertically set on YE on described pedestal base plate by several and the leveling board be arranged on above each YE is formed; Described housing loading plate is arranged on above the leveling board of described levelling gear, and by coordinating the horizontal level regulating the described YE of described levelling gear can adjust described housing loading plate, described housing loading plate is used for directly carrying described mask outer frame.
Be loaded on described mask outer frame microscope carrier for the ease of mask outer frame, described mask outer frame microscope carrier also comprises jacking mechanism, described jacking mechanism is made up of with at least 2 top boards be horizontally set on above described lifting drive the lifting drive that at least 4 are vertically set on described pedestal, described top board completes rising or down maneuver by the motion of described lifting drive, the housing loading plate upper surface of described levelling gear is provided with the sunk structure adapted with the top board of described jacking mechanism, when making described top board drop to minimum point, the upper surface of described top board is not higher than the upper surface of described housing loading plate.
Further, described mask outer frame microscope carrier also comprises detent mechanism, described detent mechanism is made up of locating piece and cylinder assembly, described detent mechanism is arranged on the top board of described housing loading plate or described jacking mechanism, described mask outer frame to be positioned on described housing loading plate allocation really by described detent mechanism, thus ensures the stability of mask plate component assembling process.
For the automaticity of strengthening the utility model metal mask plate assembling components equipment, metal mask plate assembling components equipment described in the utility model also comprises control unit, for stretching tight described in controlling, screen component draws stretching tight of described metal mask plate described control unit, the motion path of described motion guide rail, the action of described mask plate microscope carrier gripper shoe drive unit, the adjustment action of described mask outer frame microscope carrier and the welding manner of described laser soldering device.
Further, the screen component that stretches tight involved by the utility model comprises four groups of clamping devices and the mount pad for installing clamping device, described mount pad is provided with attachment rail, be provided with operation slide block bottom described clamping device, described four groups of clamping devices are installed on the described attachment rail of described mount pad by described operation slide block.
Further, described metal mask plate assembling components equipment also comprises crossbeam and X/Z axle is dull and stereotyped, described crossbeam is arranged on Y-axis guide rail by the slide block one being arranged on two ends, described X-axis guide rails assembling is on described crossbeam, described X/Z axle flat board is arranged on described X-axis guide rail by slide block two, described Z axis guide rails assembling is on described X/Z axle flat board, and the supporting mechanism of described laser beveller is arranged on described Z axis guide rail by slide block three.
Further, described metal mask plate assembling components equipment also comprises Y-axis guide supporting, described Y-axis guide supporting is directly installed on described board, described Y-axis guide rails assembling is in described Y-axis guide supporting, and described Y-axis guide rail is indirectly fixedly mounted on described board by described Y-axis guide supporting.
For the ease of the port quality of monitoring mask plate opening, described metal mask plate assembling components equipment also comprises machine vision assembly and roughness measurement assembly, and described machine vision assembly and roughness measurement assembly are arranged on described slide block three.Described machine vision assembly is for capturing the pattern of described metal mask plate upper shed and matching track motion measurement mask plate needing the size of measured zone, and described machine vision assembly can be high-precision CCD camera; Described roughness measurement assembly, for measuring the flat condition on metal mask plate surface, can adopt high-precision height sensor as roughness measurement assembly.
Further, the described gripper shoe drive unit forming described mask plate microscope carrier is driven by motor, and motor drives the described mask support plate be arranged on above described gripper shoe drive unit to move in vertical direction by leading screw.
Further, the described mask support plate upper surface forming described mask plate microscope carrier is glass plate, and described glass plate bottom is provided with light source, and as a kind of preferred embodiment, glass plate is frosted glass, and the light source be arranged on below frosted glass is equally distributed light bar.
Further, the utility model metal mask plate assembling components equipment is also provided with a rim charge buster structure, rim charge excision mechanism can be arranged on slide block three, controlled Systematical control, to realize the excision of the peripheral metal sheet material of the mask outer frame of the mask assembly after to welding, rim charge excision mechanism can be laser cutting head, also can be the cutter that can realize metal sheet cutting.
Further, described metal mask plate assembling components equipment also comprises mask outer frame feed mechanism, described material loading delivery platform can move in the Y-axis direction, and described mask outer frame is placed in described material loading support platform, is clamped and be sent to above described mask outer frame microscope carrier by described material loading delivery platform.
In addition, described metal mask plate assembling components equipment also comprises debris collection device, it is inner that it is arranged on described base station, for collecting the chip produced in assembling process, scrap collecting process timely, prevent from chip in mask plate manufacturing process from normally running equipment to have an impact, such as, chip falls can affect orbital motion precision on orbit.
Because metal mask plate assembling components equipment of the present utility model has degree of precision requirement, it requires that board has higher stability, and in the utility model, described board comprises granite platform and pedestal, described granite platform is arranged on described pedestal, and described pedestal contacts with support base.
In the utility model, each component parts of metal mask plate assembling components equipment all can control separately, and in same control system, control each component parts by coordinating, metal mask plate can ensure higher welding precision.
Concrete structure of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:
Figure 1 shows that the schematic diagram adopting mask plate evaporation organic material;
Figure 2 shows that the floor map of mask plate;
Figure 3 shows that a kind of metal mask plate kludge schematic diagram of prior art;
Fig. 4 is the signal of a kind of embodiment solid of metal mask plate assembling components equipment provided by the utility model;
Fig. 5 is the front view of the utility model metal mask plate assembling components equipment;
It is the utility model metal mask plate assembling components equipment top view described in Fig. 6;
Fig. 7 is the stereogram that laser soldering device is assemblied on motion guide rail;
Figure 8 shows that the screen component that stretches tight, mask plate microscope carrier and mask outer frame microscope carrier are assemblied in the schematic diagram on board;
Figure 9 shows that a kind of embodiment schematic diagram of the clamping device forming this screen component;
Figure 10 is a kind of embodiment schematic diagram of mask plate microscope carrier;
Figure 11 is a kind of embodiment schematic diagram of mask outer frame microscope carrier;
Figure 12 is a kind of embodiment schematic diagram that mask outer frame microscope carrier loads mask outer frame;
Figure 13 is I enlarged schematic partial view in Figure 15;
Figure 14 is the schematic diagram that mask plate microscope carrier coordinates with mask outer frame microscope carrier;
Figure 15 is metal mask plate view to be held;
Figure 16 is that metal mask plate clamps through the screen component that stretches tight the view tightened;
Figure 17 stretches tight by the screen component that stretches tight to draw the schematic diagram of metal mask plate;
Figure 18 is view metal mask plate being welded to mask outer frame;
Figure 19 is the view of the metal mask plate cutting outside be welded in mask outer frame;
Figure 20 is the schematic diagram that the metal mask unit of assembled formation is in detected state;
Figure 21 is the metal mask plate assembling components equipment schematic diagram being provided with feed mechanism
Figure 22 is the schematic perspective view of feed mechanism;
Figure 23 be form feed mechanism the schematic perspective view of material loading support platform;
Figure 24 is the enlarged diagram of II part in Figure 23;
Figure 25 is process schematic mask outer frame being loaded into material loading support platform;
Figure 26 be form feed mechanism the schematic perspective view of material loading delivery platform.
In figure,
10 is metal mask plate, and 100 is mask plate opening, 11 mask outer frame of fixing for mask plate, and 12 is brace table, and 13 is vapor deposition source, and 14 is deposition substrate;
51 is board, 511 for forming the granite platform of board 51, 512 for forming the pedestal of board 51, 52 is the screen component that stretches tight, 521 for forming the clamping device of the screen component 52 that stretches tight, 5211 is the chuck of clamping device 521, 5212 is the base plate of clamping device 521, 5213 is the chuck approach rail of clamping device 521, 5214 is the motor of clamping device 521, 5215 is the base plate slide block of clamping device 521, 5216 is the pulling force sensor of clamping device 521, 5217 is the motor movement position-limit mechanism of clamping device 521, 522 for installing the mount pad of clamping device 521, 523 for being arranged on the mounting guide rail on mount pad 522, 53 is motion guide rail, 531 for forming the X-axis guide rail of motion guide rail 53, 532 for forming the Y-axis guide rail of motion guide rail 53, 533 for forming the Z axis guide rail of motion guide rail 53, 55 is Y-axis guide supporting, 56 debris collection devices, 57 is mask plate microscope carrier, 571 for forming the mask support plate of mask plate microscope carrier 57, 572 for forming the gripper shoe drive unit of mask plate microscope carrier, 5721 is motor, 5722 is leading screw, 58 is mask outer frame microscope carrier, 581 for forming the pedestal of mask outer frame microscope carrier 58, 5811 for forming the base plate of pedestal 581, 5812 for forming the side plate of pedestal 581, 582 for forming the levelling gear of mask outer frame microscope carrier 58, 5821 for forming the YE of levelling gear 582, 5822 for forming the leveling board of levelling gear 582, 5823 is leveling guider, 583 for forming the housing loading plate of mask outer frame microscope carrier 58, 584 for forming the detent mechanism of mask outer frame microscope carrier 58, 5841 for form detent mechanism 584 hold out against cylinder, 5842 is fast for forming the location of detent mechanism 584, 585 for forming the jacking mechanism of mask outer frame microscope carrier 58, 5851 for forming the lifting drive of jacking mechanism 585, 5852 for forming the top board of jacking mechanism 585, 5853 is jack-up guider, 586 for being arranged on the shading cloth on mask outer frame microscope carrier 58, 59 is feed mechanism, 591 is material loading support platform, 5911 is material loading support platform pedestal, 5912 is material loading support platform base, 5913 is material loading support platform slide assemblies, 5914 is material loading support platform guiding mechanism, 5915 is material loading support platform detent mechanism, 592 is material loading delivery platform, 5921 is delivery platform clamping head, 5922 is delivery platform pedestal, 5923 delivery platform connecting rods, 5924 is delivery platform crossbeam, 5925 is delivery platform moving slide block, 14a is guide slide mechanism,
71 is X-axis guide rail fixed cross beam, 72 for the slide block one, 73 being arranged on crossbeam 71 two ends be linear electric motors;
91 is that X/Z axle is dull and stereotyped, and 92 for being arranged on slide block two, 93 on X/Z axle flat board 91 for being arranged on Z axis guide rail 533 top shoe three, 94 is machine vision assembly, and 95 is roughness measurement assembly, and 96 is laser soldering device, 97 is X-axis drag chain, and 98 is the drag chain fixed head fixing drag chain, and 99 is stepper motor;
190 is rim charge excision mechanism.
Detailed description of the invention
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not being interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " on ", D score, the orientation of the instruction such as " side " or position relationship be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of the device of instruction or hint indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection ", " cooperation " should be interpreted broadly, and such as, can be fixedly connected with, connecting integratedly, also can be removably connect; It can be the connection of two element internals; Can be directly be connected, also indirectly can be connected by intermediary; " cooperation " can be face and the coordinating of face, and also can be point and the coordinating of face or line and face, also comprise the cooperation of hole axle, for the ordinary skill in the art, concrete condition can understand the concrete meaning of above-mentioned term in the utility model.
As shown in Figure 4, it comprises a kind of embodiment schematic perspective view of metal mask plate assembling components equipment provided by the utility model: board 51, and board 51 is as the support base station of described metal mask plate assembling components equipment; Stretch tight screen component 52, and the screen component 52 that stretches tight is fixedly mounted on board 51, and the screen component 52 that stretches tight is provided with some clamping devices 521, and the side of metal mask plate 10 clamps by the clamping device 521 of the screen component 52 that stretches tight and stretches tight to draw and reaches surfacing; Mask plate microscope carrier 57, mask plate microscope carrier 57 to stretch tight the metal mask sheet drawn without the screen component 52 that stretches tight for carrying, mask plate microscope carrier 57 comprises mask support plate 571 and gripper shoe drive unit 572, mask support plate 571 can move in vertical direction under the driving of gripper shoe drive unit 572, the screen component 52 clamping face position thus adjustment mask support plate 571 upper surface stretches tight relatively; Mask outer frame microscope carrier 58, mask outer frame microscope carrier 58 is for carrying mask outer frame 11, and mask outer frame 11 is for fixing metal mask plate 10, and mask outer frame microscope carrier 58 can adjust the level height of mask outer frame 11; Motion guide rail 53, motion guide rail 53 comprises X-axis guide rail 531, Y-axis guide rail 532 and Z axis guide rail 533, what Y-axis guide rail 532 was direct or indirect is fixedly mounted on board 51, X-axis guide rail is arranged on Y-axis guide rail 532, and the motion of Y direction can be carried out on Y-axis guide rail 532, Z axis guide rail 533 is arranged on X-axis guide rail 531, and Z axis guide rail 533 can carry out the motion of X-direction on X-axis guide rail 531; Metal mask plate assembling components equipment also comprises laser soldering device 96, laser soldering device 96 is directly or indirectly arranged on Z axis guide rail 533, the motion of X, Y direction can be carried out on X-axis guide rail 531, Y-axis guide rail 532 with Z axis guide rail 533, also the motion of Z-direction can be done on Z axis guide rail 533, laser soldering device 96 comprises a laser welding system, and the laser weld that metal mask plate 10 is launched by the laser welding system of laser soldering device 96 is fixed in mask outer frame 11.Be front view and the top view of the utility model metal mask plate assembling components equipment described in Fig. 5, Fig. 6, composition graphs 4, Fig. 5 and Fig. 6, better can show the overall structure of the present embodiment metal mask plate assembling components equipment.
Below that the present embodiment associated mechanisms is described in further detail.
Figure 7 shows that laser soldering device is assemblied in the schematic perspective view on motion guide rail.In the present embodiment, metal mask plate assembling components equipment comprises crossbeam 71 and X/Z axle flat board 91, crossbeam 71 is shown in shown in Fig. 6 by slide block one 72(being arranged on two ends) be arranged on Y-axis guide rail 532, X-axis guide rail 531 is arranged on crossbeam 71, X/Z axle flat board 91 is arranged on X-axis guide rail 531 by slide block 2 92, and Z axis guide rail 533 is arranged on X/Z axle flat board 91.Laser soldering device 96 is arranged on slide block 3 93, and slide block 3 93 is slidably arranged on Z axis guide rail 533.
In embodiments more of the present utility model, the X-axis guide rail 531 and the Z axis guide rail 533 that form operation guide rail 53 all at least respectively comprise a guide rail, and as shown in Figure 7 in embodiment, X-axis guide rail 531 and Z axis guide rail 533 all comprise two guide rails be arranged in parallel.In addition, in the utility model, the operation forming X-axis guide rail 531, Y-axis guide rail 532 and the Z axis guide rail 533 running guide rail 53 is all realized by the motor being arranged on guide rail side.As shown in Figure 6, crossbeam 71 is at the control realization moving through the linear electric motors 73 being arranged on Y-axis guide rail 532 side of Y direction; As shown in Figure 7, X/Z axle flat board 91 is provided with stepper motor 99, to control the motion of slide block 3 93 in Z-direction.
In the utility model, because orbital motion can drive the motion of various wire, therefore the drag chain placing wire is provided with in some specific regions, bring unnecessary interference to prevent the operation of wire to equipment or prevent the motion of equipment from causing accident around disconnected wire, as shown in Figure 7, the drag chain fixed head 98 of X-axis drag chain 97 and fixing drag chain is provided with above crossbeam 71.
In the present embodiment, metal mask plate assembling components equipment also comprises Y-axis guide supporting 55, as shown in Figure 4, Figure 5, Y-axis guide supporting 55 is directly installed on board 51, Y-axis guide rail 532 is arranged in Y-axis guide supporting 55, and Y-axis guide rail 532 is indirectly fixedly mounted on board 51 by Y-axis guide supporting 55.
Figure 8 shows that the screen component that stretches tight, mask plate microscope carrier and mask outer frame microscope carrier are assemblied in the schematic diagram on board, the screen component 52 that stretches tight is fixedly mounted on board 51, it is arranged on the periphery of mask plate microscope carrier 57 and mask outer frame microscope carrier 58, in the present embodiment, the screen component 52 that stretches tight comprises four groups of clamping devices and the mount pad 522 for installing clamping device 521, often organize clamping device and comprise some clamping devices 521, mount pad 522 is provided with attachment rail 523, the operation slide block (namely in Fig. 9 5215) mated with attachment rail 523 is provided with bottom clamping device 521, clamping device 521 can be slided by the operation slide block 5215 being arranged on bottom on attachment rail 523.In the present embodiment, four groups of clamping devices 521 and mount pad 522 are symmetrical set on board 51, and specifically as shown in Figure 8, four groups are arranged on clamping device 521 on mount pad 522 and are separately positioned on 4 limits of rectangle.
As shown in Figure 8, two groups of clamping devices of screen component 52 1 opposite side that stretches tight are all containing 3 clamping devices 521, and the often group clamping device in two groups of clamping devices of another opposite side is all containing 4 clamping devices 521; In another specific embodiment (without view), the often group clamping device in two groups of clamping devices of an opposite side is all containing 7 clamping devices 521, and the often group clamping device in two groups of clamping devices of another opposite side is all containing 8 clamping devices 521.In actual applications, the quantity that the often group clamping device stretched tight in the often group clamping device of screen component 52 comprises clamping device 521 is generally 1 ~ 10, concrete quantity is determined according to the size of metal mask plate 10, when metal mask plate 10 size is larger, the quantity that often group clamping device comprises clamping device 521 can more than 10; In addition, in embodiments more of the present utility model, each clamping device 521 forming the screen component 52 that stretches tight is fixed on attachment rail 523 by fixed mechanism determines position (not shown).
In addition, consider the stability of installation in certain embodiments, each mount pad 522 is at least provided with on each mount pad 522 shown in 2 attachment rails 523, Fig. 8 and namely has 2 attachment rails 523.
It is a kind of embodiment schematic diagram of clamping device 521 shown in Fig. 9, clamping device 521 comprises chuck 5211, base plate 5212, chuck approach rail 5213, motor 5214, base plate slide block 5215, chuck approach rail 5213 is fixedly installed on base plate 5212, what slided by the slide block (not identifying in figure) matched with chuck approach rail 5213 in chuck 5211 lower end is arranged on chuck approach rail 5213, and on the mount pad 522 of the overall base plate slide block 5215 with the screen component 52 that stretches tight by being arranged on base plate 5212 bottom of clamping device, attachment rail 523 matches.Chuck 5211 under the drive of motor 5214 can on chuck approach rail 5213 back and forth movement; In addition, chuck 5211 self realizes clamping and loosening up by air cylinder driven.Form the clamping device of the screen component that stretches tight by realizing tightening of metal mask plate by motor 5214 after chuck 5211 grip mask plate 10.In embodiments more of the present utility model, base plate 5212 is provided with several tapped through holes, what match is provided with some screw rods be of convenient length, screw rod can be realized by rotary screw and mount pad 522 upper surface holds out against, thus realize each clamping device 521 and be fixed on and a certainly on attachment rail 523 determine position (not shown).
In embodiments more of the present utility model, for ease of the control of the screen component 52 that stretches tight, pulling force sensor 5216 and motor movement position-limit mechanism 5217 between the motor 5214 of clamping device 521 and chuck 5211, can also be provided with.
Figure 10 shows that a kind of embodiment schematic diagram of mask plate microscope carrier, mask plate microscope carrier 57 comprises mask support plate 571 and gripper shoe drive unit 572, the upper surface of mask support plate 571 is glass plate, glass plate bottom is provided with light source (not shown), the gripper shoe drive unit 572 forming mask plate microscope carrier 57 is driven by motor 5721, and motor 5721 drives the mask support plate 571 being arranged on 572 sides on gripper shoe drive unit to move in vertical direction by leading screw 5722.As the reasonable embodiment of one, the glass plate of the upper surface of mask support plate 571 is frosted glass, and the light source arranged thereunder is the light bar evenly arranged, thus the uniform light that reasonable guarantee is launched above mask support plate 571 is consistent.
Figure 11 is a kind of embodiment schematic diagram of mask outer frame microscope carrier, in the present embodiment, pedestal 581, levelling gear 582 and housing loading plate 583 form mask outer frame microscope carrier 58 basic structure (mask outer frame microscope carrier can only thus three parts form).In other embodiments of mask outer frame microscope carrier, mask outer frame microscope carrier 58 can also comprise detent mechanism 584 and jacking mechanism 585, Figure 12 shows that mask outer frame microscope carrier loads a kind of embodiment schematic diagram of mask outer frame by jacking mechanism, Figure 13 is I enlarged schematic partial view in Figure 12.Below in conjunction with Figure 11, Figure 12, Figure 13, to the detailed description of mask outer frame microscope carrier 58 structure.
Described pedestal 581 is made up of base plate 5811 and the side plate 5812 be arranged on base plate 5811, and it is for installing levelling gear 582; Levelling gear 582 is vertically set on the YE 5821 on described pedestal base plate 5811 by 4 and the leveling board 5822 be arranged on above each YE 5821 is formed; Housing loading plate 583 is arranged on above the leveling board 5822 of levelling gear 582, regulate the YE 5821 of levelling gear 582 can adjust the horizontal level being arranged on housing loading plate 583 above leveling board 5822 by coordinating, housing loading plate 583 is for directly carrying mask outer frame 11.In some embodiments of the utility model, the YE 5821 forming levelling gear 582 is connected with leveling board 5822 by floating junction (not shown), YE 5821 provides power for levelling gear 582, and leveling board 5822 is as the external tapping of levelling gear 582; Each YE 5821 both sides are also provided with a leveling guider 5823, by the mating reaction of YE 5821 both sides leveling guider 5823, effectively can control the direction of motion of leveling board 5822 on levelling gear 582.
Be loaded on mask outer frame microscope carrier 58 for the ease of mask outer frame 11, mask outer frame microscope carrier 58 is provided with jacking mechanism 585, jacking mechanism 585 is vertically set on lifting drive 5851 on pedestal 581 by 4 and 2 top boards 5852 be horizontally set on above lifting drive 5851 are formed, top board 5852 completes rising or down maneuver by the motion of lifting drive 5851, housing loading plate 583 is provided with the through-hole structure matched with jacking mechanism 585, housing loading plate 583 upper surface is provided with the sunk structure adapted with the top board 5852 of jacking mechanism 585, when making top board 5852 drop to minimum point, the upper surface of top board 5852 is not higher than the upper surface of housing loading plate 583, as shown in figure 11.In addition, the top board 5852 forming jacking mechanism 585 needs to move in vertical direction, namely lifting drive 5851 can only drive top board 5852 to move in vertical direction, can move by preset path to make jacking mechanism 585, lifting drive 5851 side is supporting is provided with jack-up guider 5853 for each of jacking mechanism 585, and the upper end of the lifting drive 5851 of jacking mechanism 585 is connected with top board 5852 by floating junction (not shown).
Mask outer frame microscope carrier 58 also comprises detent mechanism 584, detent mechanism is made up of cylinder assembly 5841 and locating piece 5842, detent mechanism 584 is arranged on the top board 5851 of housing loading plate 583 or jacking mechanism 585, mask outer frame 11 to be placed on housing loading plate 583 allocation really by detent mechanism 584, thus ensures the stability of mask plate component assembling process.As shown in Figure 11,12, housing loading plate 583 two adjacent edges be respectively provided with two cylinder assemblies 5841, be provided with locating piece 5842 not arranging another two adjacent edges of cylinder assembly 5841, in the present embodiment, locating piece 5842 is strip structure, is arranged on the top board 5852 of housing loading plate 583 or jacking mechanism 585.Mask outer frame 11 is placed in after on housing loading plate 583, cylinder assembly 5841 pairs of mask outer frame 11 of detent mechanism 584 provide certain pressure, mask outer frame 11 is made to hold out against the locating piece 5852 of detent mechanism 585, thus reach detent mechanism 585 pairs of mask outer frame 11 and fix, make mask outer frame 11 to be placed on housing loading plate 583 allocation really.
In the utility model, the top board 5852 of jacking mechanism 585 is done by the motion of lifting drive 5851 and rises or down maneuver, thus the realization mask outer frame 11 be placed in above top board 5852 is loaded on the housing loading plate 583 of microscope carrier.Consider the effect essence of jacking mechanism 585, as other embodiments of the present utility model, in the utility model, jacking mechanism 585 can comprise more than 4 lifting drives 5851 or the top board 5852 that is horizontally set on more than 2 above lifting drive 5851, and lifting drive 5851 can adopt cylinder or electric cylinder to drive.In other embodiments of the present utility model, because the size of mask outer frame 11 is comparatively large, the quantity of the YE that levelling gear 43 adopts can also more than 4.
In the utility model, all adopt floating junction between the lifting drive 5851 of jacking mechanism 585 and top board 5852, between the YE 5821 of levelling gear 582 and leveling board 5822, the joint of bascule is conducive to mechanical adjustment process.
In order to better understand the working method of mask outer frame microscope carrier 58 in the utility model, below the method for work of mask outer frame microscope carrier is explained in detail.
The method of adjustment of mask outer frame microscope carrier involved by the utility model, it comprises the following steps:
A, mask outer frame load step, as shown in Figure 12, the lifting drive 5851 of jacking mechanism 585 drives top board 5852 to rise, after arriving correct position, mask outer frame 11 is placed on above top board 5852, lifting drive 5851 drives top board 5852 to decline, and mask outer frame 11 is supported by described housing loading plate 583;
B, mask outer frame positioning step, by adjustment detent mechanism 584, namely by the action of cylinder 5841, make mask outer frame 11 hold out against on the locating piece 5842 of detent mechanism 584, thus arrive stereoplasm frame 11 and to be positioned on housing loading plate 44 allocation really;
C, mask outer frame leveling step, by coordinating the YE 5821 regulating leveling structure 582, make mask outer frame 11 be in certain height and position, and the upper surface of mask outer frame 11 has good flatness.
Figure 14 shows that the schematic diagram that mask plate microscope carrier coordinates with mask outer frame microscope carrier; mask plate microscope carrier 57 is arranged on the inside of mask outer frame microscope carrier 58; movable shading cloth 586 is also provided with in mask outer frame microscope carrier 58 inside; shading cloth 586 covers above mask support plate 571 after regulating, and forms the protection to mask support plate 571.
In embodiment of the present utility model, for the automaticity of strengthening the utility model metal mask plate assembling components equipment, metal mask plate assembling components equipment also comprises control unit (not shown), control unit for controlling to stretch tight, draw by stretching tight of screen component 52 pairs of metal mask plates 10, the motion path of motion guide rail 53, the action of the gripper shoe drive unit 572 of mask plate microscope carrier 57, the adjustment action of mask outer frame microscope carrier 58 and laser soldering device 96 welding manner etc.; In addition, in the utility model, the motion of motion guide rail 53 all matches with high-accuracy grating scale, to reach the effect that high accuracy controls.
For the ease of the port quality of monitoring mask plate opening, metal mask plate assembling components equipment also comprises machine vision assembly 94 and roughness measurement assembly 95, as shown in Figure 7, machine vision assembly 94 and roughness measurement assembly 95 are arranged on slide block 3 93, machine vision assembly 94 is for capturing the pattern of described metal mask plate upper shed and matching track motion measurement mask plate needing the size of measured zone, machine vision assembly 94 can be high-resolution CCD camera, in machine vision assembly 94 use procedure, according to demand can mask support plate 571 internal light source auxiliary under complete, roughness measurement assembly 95 can be high accuracy height sensor.In the utility model, control unit can also carry out according to the measurement result of machine vision assembly 94 and roughness measurement assembly 95 stretch tight screen component 52 and other mechanisms that regulate metal mask plate 10.
In addition, laser soldering device 96 in the present embodiment is directly fixed on slide block 3 93, in some other embodiment of the present utility model, machine vision assembly 94, roughness measurement assembly 95 and laser soldering device 96 are indirectly arranged on (not shown) on slide block 3 93 by other bindiny mechanism.
The utility model metal mask plate assembling components equipment is also provided with a rim charge buster structure in addition, assemble not shown, rim charge excision mechanism can be arranged on slide block 93, controlled Systematical control, to realize the excision of the peripheral metal sheet material of the mask outer frame 11 of the mask assembly after to welding, rim charge excision mechanism can be laser cutting head, also can be the cutter that can realize metal sheet cutting.
The utility model metal mask plate assembling components equipment also comprises debris collection device 56, it is inner that it is arranged on described base station, for collecting the various chips produced in assembling process, scrap collecting process timely, prevent from chip in mask plate manufacturing process from normally running equipment to have an impact, such as, chip falls can affect orbital motion precision on orbit 53.In debris collection device 56, can adsorption plant be set.
Because metal mask plate assembling components equipment of the present utility model has degree of precision requirement, it requires that board 51 has higher stability, as shown in Figure 4, Figure 5, in the utility model, board 51 comprises granite platform 511 and pedestal 512, granite platform 511 is arranged on pedestal 512, pedestal 512 is steelframe mechanism, and pedestal 512 directly or by foot pad contacts with support base indirectly.
In addition, the utility model metal mask plate assembling components equipment also comprises the mechanisms such as laser generator, display, instruction input, to form a full package system.
For the ease of to understanding of the present utility model, following examples disclose the using method of the utility model metal mask plate assembling components equipment.
Figure 15 shows that metal mask plate 10 is in view to be held, above the mask support plate 571 metal mask plate 10 being placed on mask plate microscope carrier 57, utilize gripper shoe drive unit 572 to adjust mask support plate 571 upper surface relatively to stretch tight screen component 52 clamping face position, specifically, namely motor 5721 drives leading screw 5722 to adjust mask support plate 571 position height, and the metal sheet edge be placed in above mask support plate 571 is stretched tight in the chuck 5211 of screen component 52 clamping device 521 than being easier to be arranged on.
Figure 16 shows that metal mask plate clamps through the screen component that stretches tight the view tightened, chuck 5211 realizes the clamping to metal sheet edge by air cylinder driven; Reduce mask support plate 571 position height (preventing from affecting stretching tight of subsequent metal sheet material to draw); Driven by the motor 5214 of clamping device 521, the clamping device of the screen component 52 that stretches tight coordinate metal sheet stretched tight move to smooth.Figure 17 shows that is stretched tight by the screen component that stretches tight draws the schematic diagram of metal mask plate, and mask plate 10 stretches tight to leave behind and realizes surface tension the screen component 52 that stretches tight and even up.
Figure 18 is view metal mask plate being welded to mask outer frame, the laser weld that metal mask plate 10 is launched by laser soldering device 96 is in mask outer frame 11, when laser weld fixing metal mask plate, mask outer frame 11 upper surface be arranged on mask outer frame microscope carrier 58 is close to the lower surface (mask outer frame 11 holds out against metal mask plate 10) of the metal mask plate 10 tightened through the screen component 52 that stretches tight under the adjustment of levelling gear 582, metal mask plate 10 is weldingly fixed in mask outer frame 11 according to certain welding manner by laser soldering device 96 under the control unit of machine, be weldingly fixed in the process of mask outer frame 11 at metal mask plate 10, regulate shading cloth 586, shading cloth 586 is made to cover above mask support plate 571, form the protection to mask support plate 571.
What Figure 19 showed is be welded on the view outside the metal mask plate cutting in mask outer frame, as shown in the figure, rim charge excision mechanism 190 is laser cutting head, laser cutting head 190 pairs of metal mask plates 10 are stayed mask outer frame 11 outer peripheral areas and are excised, thus form metal mask board component.
Figure 20 is the schematic diagram that the metal mask unit of assembled formation is in detected state, in this step, the motion of routing motion track 53 adopts the pattern of machine vision assembly 94 pairs of metal mask plates 10 upper shed, area size, parameter on the metal mask plates such as positional precision 10 on X-Y plane is measured, the plate face sag of chain of roughness measurement assembly 95 pairs of metal mask plates 10 is adopted to measure, when measuring open area relevant parameter, the shading cloth 586 above the mask support plate 571 covering mask plate microscope carrier 57 can be removed and open the internal light source being arranged on mask support plate 571.
The using method of the utility model metal mask plate assembling components equipment more than disclosed is intended to strengthen understanding of the present utility model, and the actual use of the utility model metal mask plate assembling components equipment is not limited to so.Such as, the measurement links of metal mask plate surface parameter generally can be increased before being weldingly fixed in mask outer frame 11 by the metal mask plate 10 with opening figure, namely, before being weldingly fixed in mask outer frame 11 by metal mask plate 10, need first to adopt machine vision assembly 94 and flatness measurement components 95 to measure key parameters such as the sag of chains in the port quality of the metal mask plate 10 tightened, aperture position precision, plate face.The result obtained and product requirement are contrasted, if port quality has problems, then scrap this metal mask plate, if the aperture position precision of metal mask plate or the sag of chain value scope against regulation in plate face, can by coordinating the levelling gear 582 regulating stretch tight screen component 52 and mask outer frame microscope carrier 58, when relevant parameter reaches setting scope, then metal mask plate 10 is welded and fixed in mask outer frame 11.
Because mask outer frame 11 generally all has larger quality, completely larger by manually moving difficulty on mask outer frame microscope carrier 58, therefore be provided with feed mechanism 59 in some embodiments of the utility model metal mask plate assembling components equipment, feed mechanism 59 is for the carrying of mask outer frame 11, be sent on mask outer frame microscope carrier 58 by mask outer frame 11 by board outside, its a kind of embodiment overall schematic as shown in figure 21
For ease of the understanding to feed mechanism in the utility model, Figure 22 provides a kind of schematic diagram of feed mechanism, feed mechanism 59 is made up of material loading support platform 591 and material loading delivery platform 592, material loading delivery platform 592 can move in the Y-axis direction, mask outer frame 11 is placed in material loading support platform 591, clamped by material loading delivery platform 592 and be sent to above mask outer frame microscope carrier 58, being below described in further detail.
Figure 23 be form feed mechanism the schematic perspective view of material loading support platform, material loading support platform 591 comprises: material loading support platform pedestal 5911, material loading support platform base 5912, material loading support platform slide assemblies 5913, material loading support platform guiding mechanism 5914, material loading support platform detent mechanism 5915.Figure 24 is the enlarged diagram of II part in Figure 23, shown in Figure 21, Figure 22, Figure 23, Figure 24, the structure of material loading support platform pedestal 5911 adapts with screen component 52 structure that stretches tight, in the present embodiment, the inside of material loading support platform pedestal 5911 is full engraved structure, can not bring interference to the operation of the screen component 52 that stretches tight; The bottom of material loading support platform pedestal 5911 is provided with material loading support platform base 5912, and material loading support platform 591 is arranged on board 51 by material loading support platform base 5912; Material loading support platform slide assemblies 5913 is made up of by certain distribution mode some steel ball rollers, and the profile of its distribution mode and mask outer frame 11 adapts, and in some other embodiment, roller steel ball can be replaced with the part that other plays phase same-action; As shown in the figure, material loading support platform guiding mechanism 5914 is arranged on the both sides of material loading support platform pedestal 5911, the profile of itself and mask outer frame 11 adapts, in certain embodiments, for ease of the loading of mask outer frame 11, the inner side of material loading support platform guiding mechanism 5914 is also provided with guide slide mechanism 14a, and guide slide mechanism 14a can be ball; Material loading support platform detent mechanism 5915 is arranged on material loading support platform pedestal 5911, makes mask outer frame 11 to be loaded in material loading support platform 591 allocation really by support platform detent mechanism 5915.
Figure 25 is depicted as process schematic mask outer frame being loaded into material loading support platform, mask outer frame 11 is loaded by the direction of arrow as shown in the figure, mask outer frame 11 is led by material loading support platform guiding mechanism 5914, material loading support platform slide assemblies 5913 slides until end thereof contacts material loading support platform detent mechanism 5915, namely completes the loading in material loading support platform 591.In embodiments more of the present utility model, material loading support platform guiding mechanism 5914 can carry out position adjustments perpendicular to (namely in X-direction shown in figure) on the direction of guide direction, thus adapts to the loading of different width dimensions mask outer frame.
Figure 26 be form feed mechanism the schematic perspective view of material loading delivery platform, material loading delivery platform 592 comprises: delivery platform clamping head 5921, delivery platform pedestal 5922, delivery platform connecting rod 5923, delivery platform crossbeam 5924, delivery platform moving slide block 5925.Delivery platform clamping head 5921 is for clamping mask outer frame 11, and mask outer frame 11 can be increased to certain position, specifically, after delivery platform clamping head 5921 clamps mask outer frame 11, mask outer frame 11 is mentioned, make the lower surface of mask outer frame 11 leave material loading support platform 591, delivery platform clamping head 5921 is by electronic or pneumatic control; What in the present embodiment, material loading delivery platform 592 comprised that 4 delivery platform clamping heads, 5921,4 delivery platform clamping heads 5921 disperse is arranged on delivery platform pedestal 5922; Delivery platform pedestal 5922 is linked at delivery platform crossbeam 5924 by delivery platform connecting rod 5923, and delivery platform crossbeam 5924 two ends are provided with delivery platform moving slide block 5925, and delivery platform moving slide block 5925 can slide on Y-axis guide rail 532.
In conjunction with above embodiment, flow process mask outer frame be loaded on mask outer frame microscope carrier 58 is:
A, mask outer frame 11 to be loaded are being loaded into ad-hoc location in material loading support platform 591, as shown in figure 25;
B, control material loading delivery platform 592, delivery platform clamping head 5921 clamps mask outer frame 11 and mask outer frame 11 is mentioned and leaves material loading support platform 591;
C, manually propelling movement or Electronic control, material loading delivery platform 592 slides into above mask outer frame microscope carrier 58 on Y-axis guide rail 532;
The top board 5852 of d, mask outer frame microscope carrier jacking mechanism 585 rises to certain altitude (contact or the lower surface near mask outer frame 11) under the driving of lifting drive 5851;
E, release delivery platform clamping head 5921, the top board 5852 of jacking mechanism 585 declines under the driving of lifting drive 5851, mask outer frame 11 is supported by housing loading plate 583, and is moved on near Y-axis rail end by material loading delivery platform 592.
Be more than flow process mask outer frame be loaded on mask outer frame microscope carrier 58, the mask plate component after assembling can also realize the unloading of mask plate component by the inverse process of above flow process.
As integrated equipment, the utility model is integrated with the function such as the net that stretches tight, welding, measurement, rim charge excision of metal mask plate, rational configuration ensure that in the assembling process of metal mask plate, should not folding line be there is in metal mask plate, that can reduce that human factor brings scraps, and effectively can ensure the quality of finished metal mask plate.
Concrete component, structure or the feature mentioning that " embodiment ", " embodiment ", " illustrative examples " etc. mean to describe in conjunction with this embodiment any in the utility model is contained at least one embodiment of the present utility model.At this description, this schematic representation everywhere not necessarily refers to identical embodiment.And when describing concrete component, structure or feature in conjunction with any embodiment, advocate, the embodiment in conjunction with other realizes such component, structure or feature and all drops within the scope of those skilled in the art.
Although be described in detail detailed description of the invention of the present utility model with reference to multiple illustrative examples of the present utility model, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, these improve and embodiment by drop on the utility model principle spirit and scope within.Specifically, within the scope of aforementioned open, accompanying drawing and claim, rational modification and improvement can be made in the layout of parts and/or sub-combination layout, and spirit of the present utility model can not be departed from.Except modification and the improvement of parts and/or layout aspect, its scope is by claims and equivalents thereof.
Claims (12)
1. a metal mask plate assembling components equipment, it comprises:
Board, described board is as the support base station of described metal mask plate assembling components equipment;
Stretch tight screen component, described in the screen component that stretches tight be fixedly mounted on described board, be provided with some clamping devices, described metal mask plate side by the described screen component that stretches tight gripper mechanism grips and stretch tight to draw and reach surfacing;
Mask plate microscope carrier, described mask plate microscope carrier to stretch tight the metal mask sheet drawn without the described screen component that stretches tight for carrying, described mask plate microscope carrier comprises mask support plate and gripper shoe drive unit, described mask support plate can move in vertical direction under the driving of described gripper shoe drive unit, thus adjust described mask support plate upper surface relatively described in stretch tight screen component clamping face position;
Mask outer frame microscope carrier, described mask outer frame microscope carrier is for carrying mask outer frame, and described mask outer frame is used for fixing described metal mask plate, described mask outer frame microscope carrier can adjust described mask outer frame level height;
Motion guide rail, described motion guide rail comprises X-axis guide rail, Y-axis guide rail and Z axis guide rail, described Y-axis guide rail directly or is indirectly fixedly mounted on described board, described X-axis guide rail is arranged on described Y-axis guide rail, and the motion of Y direction can be carried out on described Y-axis guide rail, described Z axis guide rail is arranged on described X-axis guide rail, and described Z axis guide rail can carry out the motion of X-direction on described X-axis guide rail;
Laser soldering device, described laser soldering device is directly or indirectly arranged on described Z axis guide rail, the motion of X, Y direction can be carried out on described X-axis guide rail, Y-axis guide rail with Z axis guide rail, also the motion of Z-direction can be done on Z axis guide rail, described laser soldering device comprises a laser welding system, and described metal mask plate is fixed in described mask outer frame by the laser weld that described laser welding system is launched.
2. metal mask plate assembling components equipment according to claim 1, it is characterized in that, described mask outer frame microscope carrier comprises: pedestal, levelling gear and housing loading plate, and described pedestal is made up of base plate and the side plate be arranged on described base plate, for installing described levelling gear; Described levelling gear is vertically set on YE on described pedestal base plate by several and the leveling board be arranged on above each YE is formed; Described housing loading plate is arranged on above the leveling board of described levelling gear, and by coordinating the horizontal level regulating the described YE of described levelling gear can adjust described housing loading plate, described housing loading plate is used for directly carrying described mask outer frame.
3. metal mask plate assembling components equipment according to claim 2, it is characterized in that, described mask outer frame microscope carrier also comprises jacking mechanism, described jacking mechanism is made up of with at least 2 top boards be horizontally set on above described lifting drive the lifting drive that at least 4 are vertically set on described pedestal, described top board completes rising or down maneuver by the motion of described lifting drive, the housing loading plate upper surface of described levelling gear is provided with the sunk structure adapted with the top board of described jacking mechanism, when making described top board drop to minimum point, the upper surface of described top board is not higher than the upper surface of described housing loading plate.
4. metal mask plate assembling components equipment according to claim 3, it is characterized in that, described mask outer frame microscope carrier also comprises detent mechanism, described detent mechanism is made up of locating piece and cylinder assembly, described detent mechanism is arranged on the top board of described housing loading plate or described jacking mechanism, and described mask outer frame to be placed on described housing loading plate allocation really by described detent mechanism.
5. the metal mask plate assembling components equipment according to claim 1,2 or 3, is characterized in that, described metal mask plate assembling components equipment also comprises control unit.
6. metal mask plate assembling components equipment according to claim 1, it is characterized in that, the described screen component that stretches tight comprises four groups of clamping devices and the mount pad for installing clamping device, described mount pad is provided with attachment rail, be provided with operation slide block bottom described clamping device, described four groups of clamping devices are installed on the described attachment rail of described mount pad by described operation slide block.
7. the metal mask plate assembling components equipment according to claim 1,2 or 3, it is characterized in that, described metal mask plate assembling components equipment also comprises crossbeam and X/Z axle is dull and stereotyped, described crossbeam is arranged on described Y-axis guide rail by the slide block one being arranged on described crossbeam two ends, described X-axis guide rails assembling is on described crossbeam, described X/Z axle flat board is arranged on described X-axis guide rail by slide block two, described Z axis guide rails assembling is on described X/Z axle flat board, and the supporting mechanism of described laser soldering device is arranged on described Z axis guide rail by slide block three.
8. metal mask plate assembling components equipment according to claim 7, it is characterized in that, described metal mask plate assembling components equipment also comprises Y-axis guide supporting, described Y-axis guide supporting is directly installed on described board, described Y-axis guide rails assembling is in described Y-axis guide supporting, and described Y-axis guide rail is indirectly fixedly mounted on described board by described Y-axis guide supporting.
9. metal mask plate assembling components equipment according to claim 7, it is characterized in that, described metal mask plate assembling components equipment also comprises machine vision assembly and roughness measurement assembly, and described machine vision assembly and described roughness measurement assembly are arranged on described slide block three.
10. the metal mask plate assembling components equipment according to claim 1,2,8 or 9, it is characterized in that, the described gripper shoe drive unit forming described mask plate microscope carrier is driven by motor, motor drives the described mask support plate be arranged on above described gripper shoe drive unit to move in vertical direction by leading screw, the described mask support plate upper surface forming described mask plate microscope carrier is glass plate, and described glass plate bottom is provided with light source.
11. metal mask plate assembling components equipment according to claim 9, it is characterized in that, described metal mask plate assembling components equipment is also provided with a rim charge buster structure, described rim charge excision mechanism is arranged on slide block three, to realize the excision of the peripheral metal sheet material of the described mask outer frame of the mask assembly after to welding, described rim charge excision mechanism is laser cutting head or cutter.
12. metal mask plate assembling components equipment according to claim 1,2,8 or 9, it is characterized in that, described metal mask plate assembling components equipment also comprises mask outer frame feed mechanism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420559205.9U CN204221303U (en) | 2014-09-27 | 2014-09-27 | A kind of metal mask plate assembling components equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420559205.9U CN204221303U (en) | 2014-09-27 | 2014-09-27 | A kind of metal mask plate assembling components equipment |
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| CN204221303U true CN204221303U (en) | 2015-03-25 |
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| CN201420559205.9U Expired - Fee Related CN204221303U (en) | 2014-09-27 | 2014-09-27 | A kind of metal mask plate assembling components equipment |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104294213A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Metal mask plate component assembly device |
| CN106746720A (en) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | A kind of glass substrate film-coating mechanism |
| CN106826397A (en) * | 2017-03-06 | 2017-06-13 | 陈红霞 | A kind of moulding integrated equipment of circuit soft board stamping mold |
| CN109848613A (en) * | 2017-11-30 | 2019-06-07 | 株式会社汉松新科技 | Manufacture single tension-type welder of AMOLED movable type solder mask frame component and the manufacturing method using it |
| CN110394560A (en) * | 2019-06-22 | 2019-11-01 | 恩利克(上海)激光科技有限公司 | Flexible OLED display panel is at box diced system |
| CN110961805A (en) * | 2019-12-19 | 2020-04-07 | 安徽隆源成型科技有限公司 | Adjustable positioning device for laser processing center |
| CN113369714A (en) * | 2021-06-29 | 2021-09-10 | 张志东 | Intelligent laser beveling device |
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2014
- 2014-09-27 CN CN201420559205.9U patent/CN204221303U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294213A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Metal mask plate component assembly device |
| CN106746720A (en) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | A kind of glass substrate film-coating mechanism |
| CN106746720B (en) * | 2016-12-02 | 2019-01-22 | 徐州市凯诺机械有限公司 | A kind of glass substrate film-coating mechanism |
| CN106826397A (en) * | 2017-03-06 | 2017-06-13 | 陈红霞 | A kind of moulding integrated equipment of circuit soft board stamping mold |
| CN109848613A (en) * | 2017-11-30 | 2019-06-07 | 株式会社汉松新科技 | Manufacture single tension-type welder of AMOLED movable type solder mask frame component and the manufacturing method using it |
| CN109848613B (en) * | 2017-11-30 | 2021-10-19 | 株式会社汉松新科技 | Single-sheet-force type welding device for manufacturing AMOLED (active matrix/organic light emitting diode) movable mask frame assembly and manufacturing method using same |
| CN110394560A (en) * | 2019-06-22 | 2019-11-01 | 恩利克(上海)激光科技有限公司 | Flexible OLED display panel is at box diced system |
| CN110961805A (en) * | 2019-12-19 | 2020-04-07 | 安徽隆源成型科技有限公司 | Adjustable positioning device for laser processing center |
| CN113369714A (en) * | 2021-06-29 | 2021-09-10 | 张志东 | Intelligent laser beveling device |
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