CN106746720A - A kind of glass substrate film-coating mechanism - Google Patents
A kind of glass substrate film-coating mechanism Download PDFInfo
- Publication number
- CN106746720A CN106746720A CN201611094908.9A CN201611094908A CN106746720A CN 106746720 A CN106746720 A CN 106746720A CN 201611094908 A CN201611094908 A CN 201611094908A CN 106746720 A CN106746720 A CN 106746720A
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- China
- Prior art keywords
- tooth
- fixed
- drive
- glass substrate
- slideway
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Specific Conveyance Elements (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a kind of glass substrate film-coating mechanism, including plated film case, coverage plate slideway is installed in the inner bottom surface of the plated film case, the right side upper end for covering plate slideway is fixed with substrate fixed mount slideway, the lower end sleeve of coverage plate is on plate slideway is covered, the lower end sleeve of substrate fixed mount is on substrate fixed mount slideway, glass substrate drive mechanism is installed on the right side of the plated film case, coverage plate drive mechanism is installed on the left of plated film case, pawling for the glass substrate drive mechanism is pressed against on the front side wall of substrate fixed mount, the cam for covering plate drive mechanism is pressed against on the rear wall for covering plate.Coated basal plate can automatically be pushed or pulled out by the present invention, and can rapidly and efficiently move coverage plate, coverage plate is blocked non-coating film area exactly.
Description
Technical field：
The present invention relates to field of photoelectric technology, and in particular to the auxiliary equipment of glass substrate plated film.
Background technology：
Coated glass (Coated glass) is also referred to as reflecting glass.Coated glass be glass surface coating one or more layers
Metal, alloy or metal compound film, to change the optical property of glass, meet certain particular requirement.Coated glass is by product
The different qualities of product, can be divided into following a few classes：Heat-reflecting glass, low emissivity glass (Low-E), electropane etc..
To meet specific requirement, one piece of glass substrate needs to plate two kinds of different films, two kinds of different films on same surface
It is disposed adjacent, every kind of film is on the glass substrate paliform.
By above-mentioned requirements, when the first film is plated, staff needs craft coverage plate to block the area of second film of preplating
Domain；When second film is plated, staff needs craft coverage plate to block the region for having plated the first film, and staff pushes away by hand
Move efficiency too low.
The content of the invention：
The purpose of the present invention is to overcome the deficiencies in the prior art, there is provided a kind of glass substrate film-coating mechanism, and it can be by plated film
Substrate push-in or pull-out automatically, and coverage plate can be rapidly and efficiently moved, coverage plate is blocked non-coating film area exactly.
The scheme that the present invention solves the technical problem is：
A kind of glass substrate film-coating mechanism, including plated film case, are provided with coverage plate and slide in the inner bottom surface of the plated film case
Road, the right side upper end for covering plate slideway are fixed with substrate fixed mount slideway, cover the lower end sleeve of plate on plate slideway is covered, base
The lower end sleeve of plate fixed mount is provided with glass substrate drive mechanism on substrate fixed mount slideway on the right side of the plated film case,
Coverage plate drive mechanism is installed, pawling for the glass substrate drive mechanism is pressed against substrate fixed mount on the left of plated film case
On front side wall, the cam for covering plate drive mechanism is pressed against on the rear wall for covering plate.
The bottom for covering plate forms multiple half slots, and multiple half slot linear arrays are socketed with flat in half slot
Slide bar is moved, the left and right sides of the coverage plate slideway is molded linear chute, and translation slide bar sleeve is in linear chute.
The cam and the inside pawled are provided with electromagnet, and the boss for extending laterally, boss are formed on the right side of cam
End face be pressed against cover plate left surface on.
The glass substrate drive mechanism includes being fixed with guide way, guide way with the sliding block that is fixedly connected of pawling, sliding block
Sleeve is fixed with hinge bar in the gathering sill of guiding trestle on the right side of sliding block, the one end for being driven bar is hinged on hinge bar, separately
One end is hinged in the cylinder of the outer rim of guide wheel projection, and ring gear, ring gear and the second drive gear are fixed with the periphery of guide wheel
Engagement, the second drive gear is fixed on the output shaft of motor；The guiding trestle and motor are fixed on the top of plated film case, institute
Guide wheel is stated to be fixed on the right side wall of plated film case.
The coverage plate drive mechanism includes motor, and the output shaft of motor is fixedly connected with drive gear, drive gear with
The gear ring engagement in the first drive is fixed on, lower layer section tooth, middle interval tooth and upper strata are fixed with the outer wall of the first drive
The section interval tooth of tooth three, the upper half-turn section tooth of the interval tooth of middle interval tooth two and the second drive is engaged, the inside of the second drive into
The spline segment that type has spline, connecting shaft is socketed in spline, and spline segment forms circle through the left side external part of spline
Platform, the top that the intermediary form of round platform has cylindrical projection, cylindrical projection is pressed against on cylindrical cam, and cylindrical cam is consolidated with little gear
Fixed connection, the right-hand member of the connecting shaft is fixedly connected with cam through substrate；First drive and the second drive are hinged
On substrate, the motor is fixed on electric machine support, and little gear is hinged on pinion carrier, electric machine support and little gear branch
Frame is fixed on substrate, and substrate is fixed on the left side wall of plated film case.
The lower layer section tooth and middle interval tooth are respectively the one section of continuous section tooth and number of teeth is equal, lower layer section tooth and middle interval tooth
Stagger 180 degree；The upper interval tooth is two sections of continuous section teeth, and the number of teeth of two sections of section teeth of upper interval tooth is equal and the number of teeth is small
The half of the number of teeth of gear, two sections of section teeth of upper interval tooth are in sustained height and the 180 degree that staggers；
Second drive includes upper half-turn section tooth and the lower branch section interval tooth of tooth two, upper half-turn section tooth and lower branch section
The tooth number of teeth is equal and the 180 degree that staggers, and the number of teeth of lower branch section tooth is equal with the number of teeth of middle interval tooth, the cylindrical cam it is cylindrical
Two curved surfaces of k level, highest plane and connection k level and highest plane, k level and song are formed on side face
The round and smooth connection and highest plane and curved surface between face, the top of cylindrical projection is pressed against k level, the round platform and
Spring is provided between two drives, spring is socketed on spline segment, one end of spring is pressed against on round platform and the other end is pressed against
On second drive.
The top of the plated film case is fixed with the 3rd slideway, and the left surface for covering plate upper end is pressed against the left side of the 3rd slideway
On face, the right flank of substrate fixed mount upper end is pressed against on the right flank of the 3rd slideway.
Compared with prior art, coated basal plate can automatically be pushed or pulled out by it, and can rapidly and efficiently move coverage
Plate, makes coverage plate block non-coating film area exactly.
Brief description of the drawings：
Fig. 1 is structural representation of the invention；
Fig. 2 is the front view for removing plated film case of the invention；
Fig. 3 is the lateral side view for removing plated film case of the invention；
Fig. 4 is the structural representation of the first drive of the invention；
Fig. 5 is the structural representation of the second drive of the invention；
Fig. 6 is the structural representation of connecting shaft of the invention；
Fig. 7 is the structural representation of cylindrical cam of the invention.
Specific embodiment：
Embodiment, is shown in as shown in Figures 1 to 7, a kind of glass substrate film-coating mechanism, including plated film case 1, the plated film case 1
Inner bottom surface on be provided with cover plate slideway 11, the right side upper end of covering plate slideway 11 is fixed with substrate fixed mount slideway 12,
The lower end sleeve of plate 4 is covered on plate slideway 11 is covered, the lower end sleeve of substrate fixed mount 5 on substrate fixed mount slideway 12,
The right side of the plated film case 1 is provided with glass substrate drive mechanism 2, and the left side of plated film case 1 is provided with coverage plate drive mechanism 3,
Pawling for the glass substrate drive mechanism 2 21 is pressed against on the front side wall of substrate fixed mount 5, the coverage plate drive mechanism 3
Cam 38 be pressed against cover plate 4 rear wall on.
Furthermore, the bottom for covering plate 4 forms multiple half slots, multiple half slot linear arrays, half
Translation slide bar 41 is socketed with circular groove, the left and right sides for covering plate slideway 11 is molded linear chute 111, translates slide bar 41
Sleeve is in linear chute 111.
Furthermore, the cam 38 and 21 inside of pawling are provided with electromagnet, and the right side shaping of cam 38 is oriented
The boss 381 that outside extends, the end face of boss 381 is pressed against on the left surface for covering plate 4.
Furthermore, the glass substrate drive mechanism 2 includes and 21 sliding blocks 22 being fixedly connected, sliding block 22 of pawling
Guide way 221 is fixed with, in the gathering sill 231 of guiding trestle 23, the right side of sliding block 22 is fixed with and is hinged the sleeve of guide way 221
Bar 222, one end for being driven bar 24 is hinged on hinge bar 222, and the other end is hinged on the cylinder projection 251 of the outer rim of guide wheel 25
On, ring gear 26 is fixed with the periphery of guide wheel 25, ring gear 26 is engaged with the second drive gear 27, and the second drive gear 27 is fixed
On the output shaft of motor 28；The guiding trestle 23 and motor 28 are fixed on the top of plated film case 1, and the guide wheel 25 is fixed on
On the right side wall of plated film case 1.
Furthermore, the coverage plate drive mechanism 3 includes motor 31, and the output shaft of motor 31 is fixedly connected with drive
Moving gear 32, drive gear 32 is engaged with the gear ring 331 being fixed in the first drive 33, solid on the outer wall of the first drive 33
Surely there are lower layer section tooth 332, middle interval tooth 333 and the interval tooth of upper interval tooth 334 3,333 liang of interval teeth of middle interval tooth and second pass
The upper half-turn section tooth 342 of driving wheel 34 is engaged, and the inside of the second drive 34 forms spline 341, the spline segment of connecting shaft 35
351 are socketed in spline 341, and spline segment 351 forms round platform 352, round platform 352 through the left side external part of spline 341
The intermediary form top that has cylindrical projection 353, cylindrical projection 353 be pressed against on cylindrical cam 36, cylindrical cam 36 and small tooth
Wheel 37 is fixedly connected, and the right-hand member of the connecting shaft 35 is fixedly connected with cam 38 through substrate 39；The He of first drive 33
Second drive 34 is hinged on substrate 39, and the motor 31 is fixed on electric machine support 391, and little gear 37 is hinged on little gear
On support 392, electric machine support 391 and pinion carrier 392 are fixed on substrate 39, and substrate 39 is fixed on the left side of plated film case 1
On wall.
Furthermore, the lower layer section tooth 332 and middle interval tooth 333 are respectively one section of continuous section tooth and number of teeth phase
Stagger 180 degree Deng, lower layer section tooth 332 and middle interval tooth 333；The upper interval tooth 334 is two sections of continuous section teeth, upper interval tooth
The number of teeth of 334 two sections of section teeth is equal and the number of teeth be little gear 37 the number of teeth half, two sections of section teeth of upper interval tooth 334 are in
Sustained height and the 180 degree that staggers；
Second drive 34 includes upper half-turn section tooth 342 and lower branch section 343 liang of interval teeth of tooth, upper half-turn section tooth
342 and stagger 180 degrees equal with the lower branch section number of teeth of tooth 343, the number of teeth of lower branch section tooth 342 and the number of teeth of middle interval tooth 333
It is equal, k level 361, highest plane 362 and connection k level 361 are formed on the outer circumference surface of the cylindrical cam 36
With two curved surfaces 363 of highest plane 362, between k level 361 and curved surface 363 and highest plane 362 and curved surface 363 between
Round and smooth connection, the top of cylindrical projection 353 is pressed against k level 361, is provided between the drive 34 of the round platform 352 and second
Spring, spring is socketed on spline segment 351, and one end of spring is pressed against on round platform 352 and the other end is pressed against the second drive
On 34.
Furthermore, the top of the plated film case 1 is fixed with the 3rd slideway 13, covers the left side face pressure of the upper end of plate 4
Lean against on the left surface of the 3rd slideway 13, the right flank of the upper end of substrate fixed mount 5 is pressed against on the right flank of the 3rd slideway 13.
Operation principle：First, glass substrate is put on substrate fixed mount 5, glass substrate drive mechanism 2 is started, and is pawled
21 promote substrate fixed mounts 5 to be promoted to front side along substrate fixed mount slideway 12, to shift onto pawl behind bottom 21 and automatically disengage substrate and fix
Frame, glass substrate drive mechanism 2 stops；
Second, to cover plate drive mechanism 3 and start, motor 31 is started, and upper half-turn section tooth 342 is engaged with middle interval tooth 333, convex
Wheel 38 turns over 180 degree and drives covers plate 4 backward after side shifting certain distance, and little gear 37 is engaged with upper interval tooth 334, and cylinder is convex
Wheel 36 turns over 180 degree, and cam 38 promotes coverage plate to move close to ilm substrate to be plated to the right, and motor 31 stops operating, now, the
One coating film area reserves the second coating film area and is occluded, and starts plated film the first filming region；
3rd, after the completion of the plated film of the first filming region, the electromagnet inside cam 38 is opened and holds coverage plate 4, motor 31
Start, lower branch section tooth 343 is engaged with lower layer section tooth 332, cam 38 turns over 180 degree drive coverage plate 4, and side shifting is certain forward
After distance, motor 31 stops operating, and now, the second coating film area reserves the first filming region and is occluded, and starts plated film second and plates
Diaphragm area；
4th, after the completion of the second coating film area plated film, glass substrate drive mechanism 2 is started, and the electromagnetism pawled in 21 is stable
Open and hold substrate fixed mount 5, by substrate fixed mount 5 pull out take glass substrate away, while click on 31 start, little gear 37 again with
Upper interval tooth 334 is engaged, and cylindrical cam 36 turns over 180 degree, drives coverage plate 4 to return to original in the elastic force operating cam 38 of spring
Position.
Finally, embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, relevant technical field
Those of ordinary skill, without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore
All equivalent technical schemes fall within scope of the invention, and scope of patent protection of the invention should be defined by the claims.
Claims (7)
1. a kind of glass substrate film-coating mechanism, including plated film case (1), it is characterised in that：In the inner bottom surface of the plated film case (1)
Coverage plate slideway (11), the right side upper end of coverage plate slideway (11) are installed and are fixed with substrate fixed mount slideway (12), cover plate
(4) on plate slideway (11) is covered, the lower end sleeve of substrate fixed mount (5) is in substrate fixed mount slideway (12) for lower end sleeve
On, glass substrate drive mechanism (2) is installed on the right side of the plated film case (1), coverage plate is installed on the left of plated film case (1) and is driven
Motivation structure (3), pawl (21) of the glass substrate drive mechanism (2) are pressed against on the front side wall of substrate fixed mount (5), described
The cam (38) for covering plate drive mechanism (3) is pressed against on the rear wall for covering plate (4).
2. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that：The bottom for covering plate (4)
Multiple half slots are formed, multiple half slot linear arrays are socketed with translation slide bar (41), the coverage plate slideway in half slot
(11) the left and right sides is molded linear chute (111), and translation slide bar (41) sleeve is in linear chute (111).
3. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that：The cam (38) and pawl
(21) inside is provided with electromagnet, and the boss (381) for extending laterally, the end of boss (381) are formed on the right side of cam (38)
Face pressure is leaned against on the left surface for covering plate (4).
4. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that：The glass substrate drive mechanism
(2) including with the sliding block (22) that (21) be fixedly connected of pawling, sliding block (22) is fixed with guide way (221), guide way (221) sleeve
In the gathering sill (231) of guiding trestle (23), hinge bar (222), the one of transmission bar (24) are fixed with the right side of sliding block (22)
End is hinged on hinge bar (222), and the other end is hinged on the cylinder of the outer rim of guide wheel (25) projection (251), guide wheel (25)
Ring gear (26) is fixed with periphery, ring gear (26) is engaged with the second drive gear (27), and the second drive gear (27) is fixed on
On the output shaft of motor (28)；The guiding trestle (23) and motor (28) are fixed on the top of plated film case (1), the guide wheel
(25) it is fixed on the right side wall of plated film case (1).
5. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that：The coverage plate drive mechanism
(3) including motor (31), the output shaft of motor (31) is fixedly connected with drive gear (32), drive gear (32) be fixed on
Gear ring (331) engagement in one drive (33), is fixed with lower layer section tooth (332), middle level on the outer wall of the first drive (33)
The upper half of section tooth (333) and the interval tooth of upper interval tooth (334) three, the interval tooth of middle interval tooth (333) two and the second drive (34)
Circle section tooth (342) engagement, the inside of the second drive (34) forms spline (341), the spline segment (351) of connecting shaft (35)
It is socketed in spline (341), spline segment (351) forms round platform (352) through the left side external part of spline (341), circle
The top that the intermediary form of platform (352) has cylindrical projection (353), cylindrical projection (353) is pressed against on cylindrical cam (36), cylinder
Cam (36) is fixedly connected with little gear (37), and the right-hand member of the connecting shaft (35) is fixedly connected with cam through substrate (39)
(38)；First drive (33) and the second drive (34) are hinged on substrate (39), and the motor (31) is fixed on electricity
On machine support (391), little gear (37) is hinged on pinion carrier (392), electric machine support (391) and pinion carrier
(392) it is fixed on substrate (39), substrate (39) is fixed on the left side wall of plated film case (1).
6. a kind of glass substrate film-coating mechanism according to claim 4, it is characterised in that：The lower layer section tooth (332) and
Middle interval tooth (333) is respectively the one section of continuous section tooth and number of teeth is equal, and lower layer section tooth (332) and middle interval tooth (333) stagger 180
Degree；The upper interval tooth (334) is two sections of continuous section teeth, and the number of teeth of two sections of section teeth of upper interval tooth (334) is equal and the number of teeth
It is the half of the number of teeth of little gear (37), two sections of section teeth of upper interval tooth (334) are in sustained height and the 180 degree that staggers；
Second drive (34) includes upper half-turn section tooth (342) and the lower branch section interval tooth of tooth (343) two, upper half-turn section tooth
(342) and lower branch section tooth (343) number of teeth is equal and the 180 degree that staggers, the number of teeth and middle interval tooth of lower branch section tooth (342)
(333) the number of teeth is equal, and k level (361), highest plane (362) are formed on the outer circumference surface of the cylindrical cam (36)
With connection k level (361) and two curved surfaces (363) of highest plane (362), k level (361) and curved surface (363) it
Between the round and smooth connection and highest plane (362) and curved surface (363) between, the top of cylindrical projection (353) is pressed against k level
(361) spring, is provided between the round platform (352) and the second drive (34), spring is socketed on spline segment (351), spring
One end be pressed against on round platform (352) and the other end is pressed against on the second drive (34).
7. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that：The top of the plated film case (1)
The 3rd slideway (13) is fixed with, the left surface for covering plate (4) upper end is pressed against on the left surface of the 3rd slideway (13), and substrate is fixed
The right flank of frame (5) upper end is pressed against on the right flank of the 3rd slideway (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611094908.9A CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611094908.9A CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106746720A true CN106746720A (en) | 2017-05-31 |
| CN106746720B CN106746720B (en) | 2019-01-22 |
Family
ID=58884382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611094908.9A Expired - Fee Related CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106746720B (en) |
Citations (8)
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| CN101648649A (en) * | 2009-09-03 | 2010-02-17 | 东莞宏威数码机械有限公司 | Vacuum basal plate transmitting system |
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| CN104046952A (en) * | 2013-03-15 | 2014-09-17 | 住友重机械工业株式会社 | Substrate Carrying Tray And Film Forming Apparatus |
| CN204221303U (en) * | 2014-09-27 | 2015-03-25 | 昆山允升吉光电科技有限公司 | A kind of metal mask plate assembling components equipment |
| CN104891818A (en) * | 2015-05-18 | 2015-09-09 | 合肥京东方光电科技有限公司 | A clamp and a carrier used in a coating device |
| US9435020B2 (en) * | 2013-04-15 | 2016-09-06 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of forming thin film using the same |
| EP2775009B1 (en) * | 2010-10-18 | 2016-09-21 | Samsung Display Co., Ltd. | Crucible unit for a thin film deposition apparatus |
-
2016
- 2016-12-02 CN CN201611094908.9A patent/CN106746720B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101648649A (en) * | 2009-09-03 | 2010-02-17 | 东莞宏威数码机械有限公司 | Vacuum basal plate transmitting system |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| EP2775009B1 (en) * | 2010-10-18 | 2016-09-21 | Samsung Display Co., Ltd. | Crucible unit for a thin film deposition apparatus |
| CN104046952A (en) * | 2013-03-15 | 2014-09-17 | 住友重机械工业株式会社 | Substrate Carrying Tray And Film Forming Apparatus |
| US9435020B2 (en) * | 2013-04-15 | 2016-09-06 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of forming thin film using the same |
| CN204221303U (en) * | 2014-09-27 | 2015-03-25 | 昆山允升吉光电科技有限公司 | A kind of metal mask plate assembling components equipment |
| CN104891818A (en) * | 2015-05-18 | 2015-09-09 | 合肥京东方光电科技有限公司 | A clamp and a carrier used in a coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106746720B (en) | 2019-01-22 |
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