CN104046952A - Substrate Carrying Tray And Film Forming Apparatus - Google Patents
Substrate Carrying Tray And Film Forming Apparatus Download PDFInfo
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- CN104046952A CN104046952A CN201310643678.7A CN201310643678A CN104046952A CN 104046952 A CN104046952 A CN 104046952A CN 201310643678 A CN201310643678 A CN 201310643678A CN 104046952 A CN104046952 A CN 104046952A
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- substrate
- delivery tray
- substrate delivery
- driving roll
- vacuum chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a substrate carrying tray and a film forming apparatus. A structure for substrate carrying can be simplified and film forming efficiency can be improved. The substrate carrying tray (20) is provided with a support part (22) arranged on the upper end side of the frame body (21); the support part (22) is provided with a guide rail part (31) contacting a driving roller (63) imposed with driving force used for carrying; and even if particles are produced on the driving roller (63) or on a contact part of the driving roller (63) caused by peeling off of a film, a lower wall part (32) extending in the thickness direction is capable of receiving the particles. In this way, although just contacting the guide rail part (31) of the support part (22) with the driving roller (63), carrying for a substrate (101) can also be performed and disperse of the particles can be restrained.
Description
Technical field
The application advocates the right of priority of No. 2013-053259th, Japanese patent application based on March 15th, 2013 application.The full content of its application is by reference to being applied in this specification sheets.
The present invention relates to substrate delivery tray and film deposition system that a kind of film deposition system is used.
Background technology
In the past, the substrate delivery tray using as transmit substrate in the vacuum chamber of film deposition system time, known have a substrate delivery tray shown in patent documentation 1.The transmission of this substrate delivery tray adopts tooth bar/pinion(gear) mode.That is, be provided with the driving part with pinion(gear) at the upside of vacuum chamber, be provided with mode to engage with the pinion(gear) of driving part by the be arranged in a straight line tooth bar of shape of tooth in the upper end side of substrate delivery tray.By this structure, keep substrate with substrate delivery tray, and make the pinion(gear) rotation of driving part, thus this substrate delivery tray and tooth bar one in the same way delivery direction move.Thus, in the vacuum chamber of film deposition system, substrate is transmitted with the state that is held in substrate delivery tray.
Patent documentation 1: Japanese kokai publication hei 1-268870 communique
But, as the transfer approach of substrate delivery tray, in the time adopting tooth bar/pinion(gear) mode, exist the structure of film deposition system transport unit and the structure of substrate delivery tray to become complicated problem as mentioned above.And, while transmitting substrate delivery tray from a vacuum chamber to adjacent vacuum chamber, control as follows sometimes (catching up with control), the substrate delivery tray being transmitted from a vacuum chamber can catch up with the substrate delivery tray being transmitted in adjacent vacuum chamber.While adopting tooth bar/pinion(gear) mode, there are the following problems, the relation engaging because of the tooth of tooth bar and the tooth of pinion(gear), under state at substrate delivery tray near the driving part of a vacuum chamber and the driving part of another vacuum chamber, the poor of transfer rate cannot be set between the driving part of each vacuum chamber, be difficult to reply and catch up with control.When be difficult to reply catch up with control time, in the part of carrying out film forming, sometimes exist substrate delivery tray interval each other to become large situation, can affect film forming efficiency.According to more than, pursue the designs simplification that substrate is transmitted, and improve the film deposition system of film forming efficiency.
Summary of the invention
The present invention proposes in order to address this is that, and its object is to provide a kind of can simplify the structure transmitting for substrate, and can improve substrate delivery tray and the film deposition system of film forming efficiency.
Substrate delivery tray involved in the present invention is a kind of delivery direction to intersecting with the thickness direction of substrate while transmitting substrate, can keep the film deposition system substrate delivery tray of substrate, and it possesses: framework, and can installation base plate; And support, be located at the distolateral of framework, supporting frame when transmission, support has: part 1, is connected in the distolateral of framework, and at least extends along the thickness direction of framework; And part 2, contact with the driving roll of giving the motivating force for transmitting.
Substrate delivery tray involved in the present invention possesses a distolateral support of the framework of being arranged at, and this support has the part 2 contacting with the driving roll of giving the motivating force for transmitting.Thus, framework that can installation base plate, via the support with part 2, is given motivating force by driving roll, and can with substrate one in the same way delivery direction move.And support has the part 1 being connected with framework, this part 1 is extended to the thickness direction of framework.Therefore, wait even if the part contacting at driving roll or with this driving roll produces because film peels off the particle that produces, also can receive this particle to the part 1 of thickness direction extension.So, although the simple structure that just makes the part 2 of support contact with driving roll also can be carried out the transmission of substrate and suppress dispersing of particle.And, not as tooth bar/pinion(gear) mode, make the tooth of rack bar side engage with the tooth of pinion(gear) side and give motivating force, but by using driving roll, even there is the poor of transfer rate between the driving part of a vacuum chamber and the driving part of another vacuum chamber, also can transmit, therefore can tackle and catch up with control.Thus, can transmit efficiently substrate, and can improve film forming efficiency.According to more than, can simplify the structure transmitting for substrate, and can improve film forming efficiency.
In substrate delivery tray involved in the present invention, the end of the part 2 of delivery direction can have along with the shape towards delivery direction narrowed width.Part 2 contacts with the driving roll of giving the motivating force for transmitting, but driving roll for support part 2 sometimes the both end sides on thickness direction there is flange part.In this case, the end of part 2 has along with the shape towards delivery direction narrowed width, and the end of part 2 does not disturb the flange part of driving roll just can successfully contact with driving roll thus.
In substrate delivery tray involved in the present invention, can have along with the shape towards delivery direction narrowed width in the end of another distolateral delivery direction of framework.Distolateral at another of framework, another distolateral such side support portion in two sides of this framework of supporting is set sometimes.In this case, by having along with the shape towards delivery direction narrowed width in the end of framework delivery direction, the end of the delivery direction of framework does not disturb side support portion just can successfully move to delivery direction thus.
In substrate delivery tray involved in the present invention, while observation from delivery direction, part 1 is formed as " コ " word shape, at the internal surface of this " コ " word shape, part 2 can be installed.Thus, by " コ " word shape of part 1, can surround the driving roll contacting with part 2.Therefore, can be received in reliably near the particle producing driving roll and suppress to disperse.
Film deposition system involved in the present invention possesses: vacuum chamber, can hold aforesaid substrate delivery tray and the substrate of the state that kept by substrate delivery tray; And transport unit, so that the upright state of substrate or the state that tilts from upright state transmit, wherein, transport unit has the driving roll that is disposed at the upside of vacuum chamber and gives motivating force to substrate delivery tray, driving roll contacts with part 2 while being configured in the space being surrounded by the part 1 of support and part 2, and gives motivating force to substrate delivery tray.
In film deposition system involved in the present invention, due to the driving roll of the upside that is configured in vacuum chamber is disposed in the part 1 of support and the space of part 2 encirclement by substrate delivery tray, thereby can contact with part 2 and give motivating force to substrate delivery tray.Thus, by driving roll being configured in the simple structure in the space being surrounded by part 1 and the part 2 of support, can bring into play the effect of substrate delivery tray as above.
In film deposition system involved in the present invention, while supporting and drive substrate delivery tray by driving roll, the bottom of substrate delivery tray can be on above-below direction separates from the works of the bottom side of vacuum chamber.Thus, by being made as the structure by the weight of the driving roll hanger bearing substrate delivery tray of vacuum chamber upside, thus the impact that can bring transmission when direction is extended up and down by eliminations substrate delivery traies such as heats.In addition, in the time of the downside taking the weight of of substrate delivery tray, because the center of gravity of substrate delivery tray is positioned at the relation of support upside, must be made as the high structure of intensity of substrate delivery tray itself, but by only supporting at upside, center of gravity is positioned at compares support side more on the lower, can simplify the structure of substrate delivery tray.
In film deposition system involved in the present invention, transport unit can possess the side support portion of two sides of the bottom side of supporting substrates delivery tray.Thus, although there is the situation that becomes large of rocking of thickness direction in the bottom side of a side contrary with the upper end side that is supported with substrate delivery tray, can suppress this by side support portion and rock.
Invention effect:
According to the present invention, can simplify the structure transmitting for substrate, and can improve the efficiency of film forming.
Brief description of the drawings
Fig. 1 is the vertical view that represents the basic structure of the related film deposition system of embodiments of the present invention.
Fig. 2 is the figure that observes the related substrate delivery tray of embodiments of the present invention from evaporation source.
Fig. 3 is the sectional view along the III-III line shown in Fig. 2.
Fig. 4 is the enlarged view of the structure of the superstructure periphery shown in presentation graphs 3.
Fig. 5 is the enlarged view of the structure of the substructure periphery shown in presentation graphs 3.。
Fig. 6 is the figure that observes the basic structure of drive system from top.
Fig. 7 is the sketch chart that represents the shape of the end of the end of the rail portion on delivery direction and the framework of bottom side.
Fig. 8 is the enlarged view that is illustrated in the basic structure of the superstructure periphery of the related substrate delivery tray of variation.
Nomenclature:
In figure: 10-transport unit, 20-substrate delivery tray, 21-framework, 22-support, 30-main part (part 1), 31-rail portion (part 2), 61-driving roll, 81-side support portion, 100-film deposition system, 150-vacuum chamber.
Embodiment
Below with reference to accompanying drawing, the embodiment based on substrate delivery tray of the present invention and film deposition system is elaborated.In addition, in brief description of the drawings, identical important document is marked to identical symbol, and omit repeat specification.
Fig. 1 is the vertical view that represents the basic structure of the related film deposition system of present embodiment 100.Film deposition system 100 shown in Fig. 1 is for the such as glass substrate of substrate 101(to as film forming object) implement the processing such as film forming.Film deposition system 100 is for carrying out the device of film forming according to for example RPD method (reactive plasma vapour deposition method).Film deposition system 100 possesses the plasma gun that generates plasma body, uses the plasma body generating, and makes film forming material (vapor deposition source 140) carry out ionization, and carries out film forming by the surface that makes the particle of film forming material be attached to substrate 101.For convenience of explanation, XYZ coordinate shown in Figure 1 is.Y direction is to transmit the direction of substrate 101.X-direction is the direction that substrate 101 is relative with vapor deposition source 140.Z-direction is and X-direction and the orthogonal direction of Y direction.The related film deposition system 100 of present embodiment for the thickness direction that makes substrate 101 in horizontal direction, make substrate 101 state upright or that tilt from upright state, substrate 101 is disposed to the so-called vertical film formation apparatus transmitting in vacuum chamber, and Z-direction is equivalent to above-below direction.
Film deposition system 100 possesses load locking cavity 121, buffer chamber 122, film forming chamber 123, buffer chamber 124 and load locking cavity 125.These chambers 121～125 with as above order alignment arrangements.All chambers 121～125 are configured to vacuum chamber 150, are provided with chamber door 135 in the gangway of chamber 121～125.Film deposition system 100 can be the structure that is arranged with multiple buffer chamber 122,124, film forming chamber 123.And, can be also the film deposition system being formed by a series of chamber.
In each chamber 121～125, be connected with the vacuum pump (not shown) for inside being made as to suitable pressure.And, in each chamber 121～125, be provided with the vacuscope (not shown) for monitoring the pressure in chamber.In each chamber 121～125, be communicated with the Vacuum exhaust tube being connected with vacuum pump, on this Vacuum exhaust tube, be provided with vacuscope.
In film deposition system 100, be provided with the transport unit 10 for transmitting the substrate delivery tray 20 that keeps substrate 101.Transport unit 10 has in chamber 121～125 so that the function that substrate 101 and the upright state of substrate delivery tray 20 transmit.In addition, carry out aftermentioned for the detailed structure of transport unit 10 and substrate delivery tray 20.
In film deposition system 100, the outlet side of a vacuum chamber 150 is connected with the inlet side of another vacuum chamber 150 of adjacency on delivery direction D1 at substrate 101 via chamber door 135.One vacuum chamber 150 is communicated with another vacuum chamber 150 of adjacency by open chamber door 135.And substrate 101 and substrate delivery tray 20 are by open chamber door 135, another vacuum chamber 150 from a vacuum chamber 150 to adjacency moves thus.After the mobile end of substrate 101 and substrate delivery tray 20, close chamber door 135.
Then, with reference to figure 2～Fig. 6, the transport unit 10 of the related substrate delivery tray 20 of present embodiment and film deposition system 100 is described.Substrate delivery tray 20 can keep substrate 101 in the time that substrate 101 is transmitted with upright state.Make thickness direction D2 that the upright state of substrate 101 refers to substrate 101 state (in this case, thickness direction D2 is consistent with X-direction) in horizontal direction.Now, the film forming face 101e of substrate 101 configures along the vertical direction.In addition, can be the structure that keeps substrate 101 with substrate 101 from the state of upright state inclination.The thickness direction D2 of substrate 101 can be the direction of approximate horizontal, also can tilt from horizontal direction.In addition, the delivery direction D1(of substrate 101 is consistent with Y direction) be the direction of and level orthogonal with the thickness direction D2 of substrate.In addition, using the film forming face 101e of the substrate on thickness direction D2 101 towards a side as " front side ", the back side 101f of substrate 101 towards a side as " rear side ".
(vacuum chamber)
As shown in Figures 2 and 3, vacuum chamber 150 is the box that can hold substrate delivery tray 20, and possesses upper wall portions 51, lower wall portion 52, front wall portion (not shown), rear wall parts 54, enters side end wall 55 and go out side end wall 56.Upper wall portions 51 and lower wall portion 52 are the above-below direction wall body of configuration relatively.Enter side end wall 55 and go out the wall body of side end wall 56 for relatively configuring along delivery direction D1.Entering side end wall 55 is that the side that substrate 101 and substrate delivery tray 20 are moved in vacuum chamber 150 is the wall body of inlet side.Going out side end wall 56 is that substrate 101 and substrate delivery tray 20 are the wall body of outlet side to the outer side of being taken out of of vacuum chamber 150.Front wall portion and rear wall parts 54 are the thickness direction D2 wall body of configuration relatively along substrate 101.Entering in side end wall 55, to be formed with the hole portion 57 for substrate 101 and substrate delivery tray 20 are passed through.Going out in side end wall 56, to be formed with the hole portion 58 for substrate 101 and substrate delivery tray 20 are passed through.
(substrate delivery tray)
As shown in Figures 2 and 3, substrate delivery tray 20 possesses framework 21 that can installation base plate 101 and is arranged at the support 22 of the upper end side of framework 21.The substrate delivery tray 20 of present embodiment is configured to and keeps 1 substrate 101.Substrate delivery tray 20 also can be configured to and can keep multiple (for example 2) substrate 101.Substrate delivery tray 20 both can keep the complete cycle of the edge part of substrate 101, also can the local edge part that keeps substrate 101.Material as substrate delivery tray 20 can adopt for example stainless steel.
Framework 21 has the periphery larger than this substrate 101 while observation for the thickness direction D2 from substrate 101, and has the rectangular ring parts of the peristome 23 less than substrate 101.Framework 21 possesses: upper end maintaining part 21A, the upper end 101a of maintenance substrate 101; Bottom maintaining part 21B, the bottom 101b of maintenance substrate 101; And side end maintaining part 21C, 21D, side end 101c, the 101d of maintenance substrate 101.
Upper end maintaining part 21A possesses from the supporting plate 24A of a part of the upper end 101a of contrary this substrate 101 of a side bearing of the film forming face 101e of substrate 101.Supporting plate 24A is the sheet material extending along delivery direction D1 in the upper end of substrate 101 101a side.The thickness direction of supporting plate 24A is consistent with the thickness direction D2 of substrate 101, and at least thick than substrate 101.Supporting plate 24A is at the upper end 101a of the edge part supporting substrates 101 of lower end side.On supporting plate 24A, be provided with the substrate pressing component 26(of upper end 101a that presses substrate 101 from film forming face 101e side with reference to figure 4).Thus, the upper end 101a of substrate 101 is supported plate 24A and substrate pressing component 26 and clamps and support from the both sides of thickness direction D2.
Bottom maintaining part 21B possesses from the supporting plate 24B of a part of the bottom 101b of contrary this substrate 101 of a side bearing of the film forming face 101e of substrate 101.Supporting plate 24B is the sheet material extending along delivery direction D1 in the bottom of substrate 101 101b side.The thickness direction of supporting plate 24B is consistent with the thickness direction D2 of substrate 101, and at least thick than substrate 101.Supporting plate 24B is at the bottom 101b of the edge part supporting substrates 101 of upper end side.On supporting plate 24B, be provided with the substrate pressing component 26(of bottom 101b that presses substrate 101 from film forming face 101e side with reference to figure 5).Thus, the bottom 101b of substrate 101 is supported plate 24B and substrate pressing component 26 and clamps and support from the both sides of thickness direction D2.
On the bottom 24Ba of the supporting plate 24B of bottom maintaining part 21B, be provided with frame parts 27B.Frame parts 27B extends to delivery direction D1 in the mode in the whole region of the bottom 24Ba of supporting supporting plate 24B.It is rectangular shape that frame parts 27B is the cross section of extending to thickness direction D2, is fixed in the bottom 24Ba of supporting plate 24B at the mid-way place of the thickness direction D2 of upper surface 27Ba.(with reference to figure 5).
Side end maintaining part 21C, 21D possess respectively from supporting plate 24C, the 24D of a part of side end 101c, the 101d of contrary this substrate 101 of a side bearing of the film forming face 101e of substrate 101.Supporting plate 24C, 24D are the sheet material extending along the vertical direction in the side end 101c of substrate 101,101d side.The thickness direction of supporting plate 24C, 24D is consistent with the thickness direction D2 of substrate 101, and at least thick than substrate 101.Supporting plate 24C, 24D are at side end 101c, the 101d of the edge part supporting substrates 101 of peristome 23 sides.On supporting plate 24C, 24D, be provided with the substrate pressing component (though not shown, there is the structure identical with substrate pressing component 26) of pressing side end 101c, the 101d of substrate 101 from film forming face 101e side.Thus, side end 101c, the 101d of substrate 101 are supported plate 24C, 24D from the both sides of thickness direction D2 and substrate pressing component is clamped and supported.
On side end 24Ca, the 24Da in supporting plate 24C, the 24D outside of side end maintaining part 21C, 21D, be provided with frame parts 27C, 27D.Frame parts 27C, 27D extend along the vertical direction in the mode in the whole region of side end 24Ca, the 24Da of supporting supporting plate 24C, 24D.It is rectangular shape that frame parts 27C, 27D are the cross section of extending to thickness direction D2, and mid-way place on the thickness direction D2 of medial surface 27Ca, 27Da is fixed in side end 24Ca, the 24Da of supporting plate 24C, 24D.
In addition, above-mentioned supporting plate 24A, 24B, 24C, 24D both can one form by peristome 23 being set on 1 sheet material, also can make each sheet material mutually link.
Then, with reference to figure 2 and Fig. 4, the structure of the support 22 to substrate delivery tray 20 describes.As shown in Figures 2 and 4, support 22 is arranged at the upper end side of framework 21, and for supporting frame 21 in the time transmitting substrate 101.Support 22 possesses the main part (part 1) 30 of framework of being linked to 21, and carries out aftermentioned with the driving roll 63(detailed structure of transport unit 10) rail portion (part 2) 31 that contacts.
As shown in Figure 4, main part 30 is for being formed as cross section for " コ " word shape in the time that delivery direction D1 observes, and the parts that extend at the upper lateral delivery direction D1 of framework 21.Particularly, main part 30 possesses: lower wall portion 32, be fixed on the upside maintaining part 21A of framework 21 supporting plate 24A upper end 24Aa and extend to thickness direction D2; Front wall portion 33, extends upward from the end 32a of the front side of lower wall portion 32; And upper wall portions 34, extend to rear side towards thickness direction D2 from the upper end 33a of front wall portion 33.Lower wall portion 32, front wall portion 33 and upper wall portions 34 spread all over from the whole region of end to another end of the delivery direction D1 of framework 21 and extend (with reference to figure 2) to delivery direction D1.
As shown in Figure 4, the roughly mid-way of lower wall portion 32 on the thickness direction D2 of lower surface 32b is fixed in the upper end 24Aa of supporting plate 24A.In the present embodiment, the end 32c of the rear side of lower wall portion 32 and frame parts 27C(and frame parts 27D) end 27Cb on thickness direction D2, be disposed at same position, but can not be also same position.And the anterior end 32a(of lower wall portion 32 is the front surface 33b of front wall portion 33) than frame section 27C(and frame section 27D) end 27Cc more forward side configuration on thickness direction D2, but also can be according to the size configure of driving roll 63 in Anywhere.
Upper wall portions 34 is set in above-below direction up and down wall portion 32 relative, on its lower surface 34a, rail portion 31 is installed.Upper wall portions 34 is not particularly limited with the fixing means of rail portion 31, but is bolted in the present embodiment.The end 34b of upper wall portions 34 rear sides is than the configuration of the more forward side of the end 32c of lower wall portion 32, but can fully guarantee and the fixing surplus of rail portion 31, and only otherwise disturb installation parts 73, is configured in Anywhere and all can.
The shape that is rectangle that rail portion 31 is the cross section of extending to thickness direction D2, and extend to delivery direction D1 along the lower surface 34a of the upper wall portions 34 of main part 30.Rail portion 31 spreads all over the whole region of end to another end on the delivery direction D1 of upper wall portions 34 of main part 30 and extends.The upper surface 31a of rail portion 31 contacts with the lower surface 34a of upper wall portions 34, and the lower surface 31b of rail portion 31 contacts with the periphery 63a of driving roll 63.
(transport unit)
As shown in Figures 2 and 3, transport unit 10 possesses the superstructure 60 in the upper end side region that is arranged at vacuum chamber 150, and is located at the substructure 61 in the region of the lower end side of vacuum chamber 150.The mode that superstructure 60 has to hang supports the substrate delivery tray 20 that keeps substrate 101 and the function of giving motivating force to substrate delivery tray 20.Substructure 61 has the movement in guiding substrate delivery tray 20 downward end side, and limits the function moving to thickness direction D2.
The detailed structure of the superstructure 60 with reference to figure 4 to transport unit 10 describes.As shown in Figure 4, superstructure 60 possesses: driving roll 63, give motivating force to substrate delivery tray 20; Axial region 64, can support driving roll 63 rotatably; The 1st bearing portion 66, can support axial region 64 rotatably in the running through partly of rear wall parts 54 of vacuum chamber 150; The 2nd bearing portion 67 can support rotatably axial region 64 in vacuum chamber 150; And drive system 68, via axial region 64, driving roll 63 is rotarilyd actuate.In addition, in superstructure 60, driving roll 63, axial region 64, the 1st bearing portion 66 and the 2nd bearing portion 67 form one group of roller unit 70.The spaced predetermined distance of roller unit 70 is provided with multiple (with reference to figure 2) along delivery direction D1.Each roller unit 70 is disposed at same position on above-below direction.
Driving roll 63 is for being disposed at the upside in vacuum chamber 150, and centered by the axis CL1 extending in parallel to thickness direction D2 rotatable columnar parts.Driving roll 63 is configured to separate downwards from the upper wall portions 51 of vacuum chamber 150, and separates from rear wall parts 54 to thickness direction D2.Driving roll 63 has the periphery 63a contacting with the rail portion 31 of the support 22 of substrate delivery tray 20.The periphery 63a of driving roll 63 contacts with the lower surface 31b of rail portion 31, and via rail portion 31, substrate delivery tray 20 is given to the motivating force of delivery direction D1.On two ends of the axis direction of driving roll 63, be formed with the flange part 71 that restriction rail portion 31 moves at thickness direction D2.Flange part 71 expands to have the external diameter that is greater than periphery 63a to outer circumferential side.Each flange part 71 is relative with two ends on the thickness direction D2 of rail portion 31 respectively.Size on flange part 71 thickness direction D2 is each other greater than the size on the thickness direction D2 of rail portion 31.
Be supported in the state of the driving roll 63 of transport unit 10 at substrate delivery tray 20, under the state that the periphery 63a of driving roll 63 and the lower surface 31b of rail portion 31 contact, between the lower end of driving roll 63 and the upper surface 32d of lower wall portion 32, gap be set.Between 33c, gap is set below at the front end of driving roll 63 and front wall portion 33.
In addition, as shown in Figure 7 (a), the end 31c side of rail portion 31 is hull bottom shape to avoid end 31c to hang over the flange part 71 of driving roll 63., the end 31c of rail portion 31 has the shape narrowing along with the front width towards delivery direction D1 (size of thickness direction D2).The end 31c side of rail portion 31 is formed with the scarp 31d, the 31d that tilt to delivery direction.
As shown in Figure 4, axial region 64 is the circular bar-like member extending to thickness direction D2 centered by axis CL1.Axial region 64 runs through the rear wall parts 54 of vacuum chamber 150.Axial region 64 is fixing at end and the driving roll 63 of the inner side of vacuum chamber 150, is connected with drive system 68 in the end in outside.Axial region 64 is by together rotating from motivating force and the driving roll 63 of drive system 68.
The 1st bearing portion 66 is arranged at the part that the axial region 64 in the rear wall parts 54 of vacuum chamber 150 runs through.Use magnetic fluid bearings etc. are as the 1st bearing portion 66.Thus, the 1st bearing portion 66 supports axial region 64 in the mode that can rotate, and can guarantee the resistance to air loss of the part that the axial region 64 in rear wall parts 54 runs through.
The 2nd bearing portion 67 supports the front of axial region 64 in the mode that can rotate.The 2nd bearing portion 67 possesses the bearing 72 that can support rotatably axial region 64, and for the installation parts 73 of bearing 72 is installed.Installation parts 73 extends downwards from the upper wall portions 51 of vacuum chamber 150, and in lower end side, bearing 72 is installed.The upper end of installation parts 73 is connected with the plate-shaped member 74 that is fixed on upper wall portions 51.Bearing 72 and installation parts 73 more configure by rear side than driving roll 63.Thus, the upper wall portions 51 of vacuum chamber 150 can put on by supporting substrates delivery tray 20 load of driving roll 63 and axial region 64 via the 2nd bearing portion supporting.
Drive system 68 is given rotary driving force to axial region 64 and the driving roll 63 of each roller unit 70.Drive system 68 is disposed at the outside of vacuum chamber 150.Drive system 68 is as long as making the axial region 64 of each roller unit 70 and the structure that driving roll 63 rotarilys actuate, and its structure is not particularly limited, but is preferably the structure of the motivating force constant speed being produced by a motor being distributed to each axial region 64 and driving roll 63.
Specifically as shown in Figure 6, motor 76 uses Timing Belt 77 and synchronous pulley 78 to make axial region 64 and driving roll 63 constant speed rotation simultaneously of each roller unit 70.On the end in the outside of the vacuum chamber 150 of axial region 64, synchronous pulley 78 is installed, is linked by Timing Belt 77 each other with the synchronous pulley 78 of the axial region 64 of delivery direction D1 adjacency.In addition, on the end of axial region 64, through-thickness D2 is provided with two segment sync belt wheels 78, for the Timing Belt 77 that links from another roller unit 70 of adjacency on delivery direction D1 and mutually different on thickness direction D2 for the Timing Belt 77 linking with another roller unit 70 of the contrary side adjacency at delivery direction D1.And, the tightening device (not shown) of tension force of adjusting Timing Belt 77 also can be set each other at the roller unit 70 of adjacency.
The roller unit 70 in the downstream side on delivery direction D1 is given motivating force (wherein, can be also the roller unit 70 of upstream side, the roller unit 70 in mid-way) by motor 76.Motor 76 is disposed at the downside (upside or side also can) of roller unit 70, and the wall portion of being fixed on vacuum chamber 150 via not shown support.On the front end of the axial region of motor 76, be provided with synchronous pulley, the synchronous pulley of this motor 76 links via Timing Belt 79 and the synchronous pulley 78 of the axial region 64 of roller unit 70.Wherein, the axial region of roller unit 70 64 links on axis direction with the axial region of motor 76, and the axial region 64 that motor 76 can way roller unit 70 is directly given motivating force.
In addition, if the axial region 64 that the motor 76 in drive system 68 can way roller unit 70 is given revolving force, install and all can by any way.For example, the axial region of motor 76 also can extend along the vertical direction, gives motivating force via the axial region 64 of crowngear way roller unit 70.
The detailed structure of the substructure 61 with reference to figure 5 to transport unit 10 describes.Substructure 61 shown in Fig. 5 possesses: side support portion 81, two sides relative with thickness direction D2 of the bottom side of supporting substrates delivery tray 20; And base portion 82, for fixation side surface bearing portion 81.In addition, in substructure 61, side support portion 81 and base portion 82 these groups are spaced from each other predetermined distance and are provided with multiple (with reference to figure 2) along delivery direction D1.
Base portion 82 is to extend upward from the lower wall portion 52 of vacuum chamber 150, and the rectangular-shaped parts that extend to thickness direction D2.Base portion 82 is disposed at the below of the substrate delivery tray 20 of the state that driven rolls 63 supports.An end 82b on the thickness direction D2 of base portion 82 more extends to front side than the side of the front side of substrate delivery tray 20 (the in this case side 27Bb of frame parts 27B), and the other end 82c more extends to rear side than the side of the rear side of substrate delivery tray 20 (the in this case side 27Bc of frame parts 27B).On the upper surface 82a of base portion 82, side support portion 81 is set.
Side support portion 81 has the movement in the lower end side region of restricting substrate delivery tray 20 on thickness direction D2, and the function that moves to the delivery direction D1 in the lower end side region of substrate delivery tray 20 of guiding.Side support portion 81 possesses: a pair of idle pulley bearing 83A, 83B arrange interval and configure on thickness direction D2; And a pair of axial region 84A, 84B, support respectively idle pulley bearing 83A, 83B.The periphery 83Aa of idle pulley bearing 83A, 83B, the part of 83Ba side can be rotated centered by axis CL2, the CL3 of vertical extension along the vertical direction.Axial region 84A, 84B are the columniform parts that extend along the vertical direction centered by central axis C L2, CL3 respectively.The upper end of axial region 84A, 84B is embedded into the inner peripheral surface 83Ab of idle pulley bearing 83A, 83B, the part of 83Bb side.The bottom of axial region 84A, 84B is fixed on the upper surface 82a of base portion 82.
The side (the in this case side 27Bb of frame parts 27B) of the front side of idle pulley bearing 83A supporting substrates delivery tray 20, the side (the in this case side 27Bc of frame parts 27B) of idle pulley bearing 83B supporting substrates delivery tray 20 rear sides.The frame parts 27B of the lower end side of the substrate delivery tray 20 of the state that idle pulley bearing 83A, 83B and driven rolls 63 support is disposed at same position on above-below direction.And idle pulley bearing 83A, 83B configure in the mode of clamping frame parts 27B on thickness direction D2.The periphery 83Aa of idle pulley bearing 83A is relative on thickness direction D2 across minimum gap with the side 27Bb of frame parts 27B.The periphery 83Ba of idle pulley bearing 83B is relative on thickness direction D2 across minimum gap with the side 27Bc of frame parts 27B.
By driving roll 63 supporting substrates delivery traies 20 and while giving motivating force, the bottom (being the lower surface 27Bd of frame parts 27B in present embodiment) of substrate delivery tray 20 is from works (the in this case base portion 82 of vacuum chamber 150 bottom sides, even but be provided with the situation of the works of giving prominence to upward from vacuum chamber bottom surface side, and also separate at above-below direction from these works) separate at above-below direction.That is, the weight of substrate delivery tray 20 is only supported by superstructure 60 in upper end side, and does not become and fly at aerial state by being arranged at the parts carry of vacuum chamber 150 in lower end side.In present embodiment, be equivalent to the bottom of substrate delivery tray 20 frame parts 27B lower surface 27Bd from be arranged at vacuum chamber 150 bottom side base portion 82 upper surface 82a separate.In addition, idle pulley bearing 83A, 83B can be in the movements of thickness direction D2 upper support substrate delivery tray 20(limited thickness direction D2), but weight that cannot supporting substrates delivery tray 20.
In addition, as shown in Figure 7 (b) shows, the end 27Be side of frame parts 27B is hull bottom shape successfully to enter idle pulley bearing 83A, 83B each other., the end 27Be of frame parts 27B has the shape narrowing along with the front width towards delivery direction D1 (size of thickness direction D2).The end 27Be side of frame parts 27B is formed with the scarp 27Bf, the 27Bf that tilt to delivery direction D1.
Then, effect, the effect of the related film deposition system 100 of present embodiment and substrate delivery tray 20 are described.
In the past, as the mechanism that transmits substrate in film deposition system, adopted tooth bar/pinion(gear) mode.That is, there is the driving part of pinion(gear) in the upside setting of vacuum chamber, be formed as mode to engage with the pinion(gear) of driving part by the be arranged in a straight line tooth bar of shape of tooth in the upper end side setting of substrate delivery tray.By this structure, keep substrate with substrate delivery tray, by making the pinion(gear) rotation of driving part, this substrate delivery tray and tooth bar one in the same way delivery direction move.Thus, in the vacuum chamber of film deposition system, substrate is transmitted with the state that is maintained at substrate delivery tray.But, when adopting when this tooth bar/pinion(gear) mode, existing the structure of substrate delivery tray self to become complicated, and also become complicated to the structure that this substrate delivery tray is given the driving part side of motivating force, complex structure and the scale of entirety become large problem.
On the other hand, the related substrate delivery tray 20 of present embodiment possesses the support 22 of the upper end side of framework of being arranged at 21, and this support 22 has the rail portion 31 contacting with the driving roll 63 of giving the motivating force for transmitting.Thus, framework 21 that can installation base plate 101 is endowed motivating force via the support 22 with rail portion 31 by driving roll 63, and can on delivery direction D1, together move with substrate 101.And support 22 has the main part 30 being connected with framework 21, its upper surface of the lower wall portion 32(32d being connected with framework 21 in this main part 30) extend to the thickness direction D2 of framework 21.Therefore,, even if the part contacting at driving roll 63 or with this driving roll 63 produces the particle because of generations such as film peel off, the lower wall portion 32 extending to thickness direction also can receive this particle.Now, in the face of lower wall portion 32 at least to thickness direction D2 extend upper surface 32d with play a role as particle receiving plane towards the end 32c of drive system 68 sides.By receiving particle at particle receiving plane, can suppress particle the film forming face that is attached to substrate 101, the quality that can be suppressed to face by contact is low.So, although the simplified construction that just makes the rail portion 31 of support 22 contact with driving roll 63 also can transmit substrate 101, and can suppress dispersing of particle.
And, in film deposition system 100 as shown in Figure 1, while transmitting substrate delivery tray 20 from a vacuum chamber 150 to adjacent vacuum chamber 150, control as follows sometimes (catching up with control), make the substrate delivery tray 20 being transmitted from a vacuum chamber 150 can catch up with the substrate delivery tray 20 being transmitted in adjacent vacuum chamber 150.Specifically, in film forming chamber 123, need to transmit substrate delivery tray 20 with constant speed (in order to ensure the accumulation time, the speed of the velocity ratio of film in film forming chamber 123 in other vacuum chambers 150 is slow) in order to obtain uniform thickness.On the other hand, while transmitting substrate delivery tray 20 from buffer chamber 122 to film forming chamber 123, for fear of and the interval that has been sent in film forming chamber 123 and between the substrate delivery tray 20 being transmitted with constant speed become large (to catch up with substrate delivery tray 20 in advance), preferably make substrate delivery tray 20 accelerate and be sent in film forming chamber 123 from buffer chamber 122.
At this, while adopting tooth bar/pinion(gear) mode in the past, the relation engaging due to the tooth of tooth bar and the tooth of pinion(gear), have that between the driving part of a vacuum chamber 150 and the driving part of another vacuum chamber 150, cannot to set transfer rate poor, and be difficult to reply and catch up with the problem of controls (for example, becoming very complexity etc. because of structure).Be difficult to reply and catch up with while control, in the part of carrying out film forming, exist substrate delivery tray interval each other to become large situation, and affect the efficiency of film forming.
For example, as shown in Figure 1, film forming chamber 123 has: reception zone EA1, receives substrate delivery tray 20 from buffer chamber 122; Constant velocity region EA2, transmits substrate delivery tray 20 in the position relative with vapor deposition source 140 with constant speed; And handover region EA3, joining substrate delivery tray 20 to buffer chamber 124, each region EA1, EA2, EA3 have the drive system 68 of independent drive respectively.While catching up with control with this structure, in constant velocity region EA2, drive system 68 transmits substrate delivery tray 20 with constant speed, and on the other hand, the drive system 68 of reception zone EA1 and buffer chamber 122 is in order to enter into fast in film forming chamber 123, so that the mode that substrate delivery tray 20 accelerates operates.But, while adopting tooth bar/pinion(gear) mode, the tooth of the tooth bar of the substrate delivery tray 20 transmitting at constant velocity region EA2 is as long as when some engages with the tooth of the pinion(gear) in the EA1 of reception zone, reception zone EA1 also needs to coordinate with the speed of constant velocity region EA2.Thus, if do not wait until, substrate delivery tray 20 is completely to constant velocity region EA2 side shifting, and the drive system 68 in reception zone EA1 and buffer chamber 122 just cannot make substrate delivery tray 20 accelerate.So, in tooth bar/pinion(gear) mode in the past, be difficult to reply and catch up with control.
And the related substrate delivery tray 20 of present embodiment transmits by giving motivating force by driving roll 63.Thus, a part for the substrate delivery tray 20 being transmitted at constant velocity region EA2 is close under the state of the driving roll 63 in the EA1 of reception zone, even if the driving roll 63 of reception zone EA1 and buffer chamber 122 is accelerated, the driving roll 63 contacting with a part for the substrate delivery tray 20 transmitting with constant speed also just skids and dallies, and can as tooth bar/pinion(gear) mode, cannot not transmit.Therefore, even if do not wait until that substrate delivery tray 20 in advance transmits to constant velocity region EA2 completely, also can make follow-up substrate delivery tray 20 accelerate rapidly from buffer chamber 122 to film forming chamber 123 and transmit.So, in the present embodiment, owing to using driving roll 63, even there is the poor of transfer rate between the drive system 68 of a vacuum chamber 150 and the drive system 68 of another vacuum chamber 150, also can transmit, catch up with control so can tackle.Thus, can effectively transmit substrate 101, and can improve film forming efficiency.In sum, the structure transmitting for substrate can be simplified, and the efficiency of film forming can be improved.
And, in film deposition system 100, be disposed at the driving roll 63 of vacuum chamber 150 upsides by being disposed in the space being surrounded by lower wall portion 32, front wall portion 33, upper wall portions 34 and the rail portion 31 of the support 22 of substrate delivery tray 20, can give motivating force to substrate delivery tray 20 contiguously with rail portion 31.So, can bring into play just driving roll 63 is disposed to the simple structure in the space in support 22 effect of substrate delivery tray 20 described above.
In addition, in the related substrate delivery tray 20 of present embodiment, the end 31c of the rail portion 31 on delivery direction D1 has along with the shape towards delivery direction D1 narrowed width.Thus, the end 31c of rail portion 31 does not disturb the flange part 71 of driving roll 63 just can successfully contact with driving roll 63.
In the related substrate delivery tray 20 of present embodiment, in the lower end side of framework 21, the end 27Be on the direct of travel of delivery direction D1 has along with the shape towards delivery direction D1 narrowed width.Thus, the end 27Be of the delivery direction D1 of framework 21 does not disturb side support portion 81 just can successfully move to delivery direction.
In the related substrate delivery tray 20 of present embodiment, while observation from delivery direction D1, main part 30 is formed as " コ " word shape, at the inner face (the in this case lower surface 34a of upper wall portions 34) of this " コ " word shape, rail portion 31 is installed.Thus, by " コ " word shape of main part 30, can surround the driving roll 63 contacting with rail portion 31.Therefore, can be received in reliably near the particle producing driving roll 63 and suppress dispersing to the film forming face 101e of substrate 101.Now, in main part 30, at least a part of the internal surface 33c of the upper surface 32d of lower wall portion 32 and end 32c, front wall portion 33 and the lower surface 34a of upper wall portions 34 plays a role as particle receiving plane.Receive particle with this particle receiving plane, thus can be by particle being attached to the film forming face of substrate 101 and passing through contact, the quality that is suppressed to face is low.
In the related film deposition system 100 of present embodiment, by driving roll 63 supporting substrates delivery traies 20 and while giving motivating force, the bottom of substrate delivery tray 20 separates at above-below direction from the works of vacuum chamber bottom side.Thus, by being made as the structure of driving roll 63 hanger bearings of the upside of the weight of substrate delivery tray 20 vacuum chamber 150, the impact on transmission can extend along the vertical direction by elimination substrate delivery traies 20 such as heats time.And, for example, in the time of the downside taking the weight of of substrate delivery tray 20, because the center of gravity of substrate delivery tray 20 is positioned at than the more top side of the supporting-point of substrate delivery tray 20, so become unstable (easy vibrative state).In addition, if at downside supporting substrates delivery tray 20, substrate delivery tray 20 must bear own wt (must bear the bending being produced by own wt), therefore needs to improve intensity.But in the present embodiment, by the upside supporting substrates delivery tray 20 at vacuum chamber 150 only, thereby center of gravity is positioned at than the support of substrate delivery tray 20 22 side more on the lower, therefore can stably support.And, because without the distortion of excessively considering to produce because of the own wt of substrate delivery tray 20, so without improving intensity, can simplify the structure of substrate delivery tray 20.
In the related film deposition system 100 of present embodiment, transport unit 10 possesses the side support portion 81 of two side 27Bb, 27Bc of the bottom side of supporting substrates delivery tray 20.In the bottom side of a side contrary with the upper end side of supporting substrates delivery tray 20, there is the situation that becomes large of rocking of thickness direction D2, rock but can suppress this by side support portion 81.
And, in the related film deposition system 100 of present embodiment, for driving roll 63 being made as to the cantilever design at rear wall parts 54 side bearings of vacuum chamber 150, and substrate delivery tray 20 is hung on to the structure on this driving roll 63.Therefore, can make about drive works (for example, the 2nd bearing portion 67 and the drive system 68 etc. of supporting driving roll 63) more close to rear side than substrate delivery tray 20, also can be not above the film forming face 101e of substrate 101, driving part and sliding part be set, the particle that can be suppressed to peel off generation by film by these works is towards film forming face 101e.
The present invention is not limited to above-mentioned embodiment.For example, the shape/size of framework and number and the configuration etc. of driving roll are only an example, also can be according to the size and shape of substrate, and size and the type etc. of film deposition system suitably change.For example, can adopt the spherical roller unit 270 shown in Fig. 8.Correspondingly, the shape of the main part 270 of substrate delivery tray side also becomes the shape that the pair of rollers spherical with this answered.
Claims (7)
1. a film deposition system substrate delivery tray, in the time transmitting described substrate to the delivery direction intersecting with the thickness direction of substrate, can keep described substrate, and this film deposition system possesses with substrate delivery tray:
Framework, can install described substrate; And
Support, is located at the distolateral of described framework, supports described framework when transmission,
Described support has:
Part 1, with described distolateral a connection of described framework, and at least extends along the thickness direction of described framework; And
Part 2, contacts with the driving roll of giving the motivating force for transmitting.
2. substrate delivery tray according to claim 1, wherein,
End in the described part 2 of described delivery direction has along with the shape towards described delivery direction narrowed width.
3. substrate delivery tray according to claim 1 and 2, wherein,
Distolateral at another of described framework, the end on described delivery direction has along with the shape towards described delivery direction narrowed width.
4. according to the substrate delivery tray described in any one in claim 1～3, wherein,
Described in while observation from described delivery direction, part 1 is formed as " コ " word shape, at the internal surface of this " コ " word shape, described part 2 is installed.
5. a film deposition system, it possesses:
Vacuum chamber, can hold the substrate delivery tray described in any one and the described substrate by the state of described substrate delivery tray maintenance in claim 1～4; And
Transport unit, so that the upright state of described substrate or the state that tilts from upright state transmit, wherein,
Described transport unit has and is disposed at the upside of described vacuum chamber and gives the driving roll of motivating force to described substrate delivery tray,
When described driving roll is disposed in the space being surrounded by the described part 1 of described support and described part 2, contacts with described part 2, and give motivating force to described substrate delivery tray.
6. film deposition system according to claim 5, wherein,
In the time supporting and drive described substrate delivery tray by described driving roll, the bottom of described substrate delivery tray works from the bottom side of described vacuum chamber on above-below direction separates.
7. according to the film deposition system described in claim 5 or 6, wherein,
Described transport unit possesses the side support portion of two sides of the bottom side of the described substrate delivery tray of supporting.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013053259A JP2014177683A (en) | 2013-03-15 | 2013-03-15 | Substrate conveyance tray and deposition apparatus |
| JP2013-053259 | 2013-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104046952A true CN104046952A (en) | 2014-09-17 |
Family
ID=51500338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310643678.7A Pending CN104046952A (en) | 2013-03-15 | 2013-12-03 | Substrate Carrying Tray And Film Forming Apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2014177683A (en) |
| KR (1) | KR20140113289A (en) |
| CN (1) | CN104046952A (en) |
| TW (1) | TW201434725A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106746720A (en) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | A kind of glass substrate film-coating mechanism |
| CN109207954A (en) * | 2018-10-19 | 2019-01-15 | 布勒莱宝光学设备（北京）有限公司 | Polychrome film glass and its production method and equipment |
| CN113122827A (en) * | 2021-03-19 | 2021-07-16 | 苏州晟成光伏设备有限公司 | Equipment and process for preparing back-passivated solar cell |
| CN113445050A (en) * | 2021-05-27 | 2021-09-28 | 苏州晟成光伏设备有限公司 | Device and process for preparing Topcon solar cell |
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| JP2000142389A (en) * | 1998-11-17 | 2000-05-23 | Mitsubishi Heavy Ind Ltd | Base board conveying device |
| CN100564577C (en) * | 2005-01-05 | 2009-12-02 | 三星移动显示器株式会社 | The device that is used for delivery tray |
| WO2012043150A1 (en) * | 2010-09-30 | 2012-04-05 | トッキ株式会社 | Film-forming apparatus |
| CN102549190A (en) * | 2009-08-26 | 2012-07-04 | 佳能安内华股份有限公司 | Film-forming apparatus |
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2013
- 2013-03-15 JP JP2013053259A patent/JP2014177683A/en active Pending
- 2013-11-25 TW TW102142841A patent/TW201434725A/en unknown
- 2013-11-29 KR KR1020130147070A patent/KR20140113289A/en not_active Application Discontinuation
- 2013-12-03 CN CN201310643678.7A patent/CN104046952A/en active Pending
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| JP2000142389A (en) * | 1998-11-17 | 2000-05-23 | Mitsubishi Heavy Ind Ltd | Base board conveying device |
| CN100564577C (en) * | 2005-01-05 | 2009-12-02 | 三星移动显示器株式会社 | The device that is used for delivery tray |
| CN102549190A (en) * | 2009-08-26 | 2012-07-04 | 佳能安内华股份有限公司 | Film-forming apparatus |
| WO2012043150A1 (en) * | 2010-09-30 | 2012-04-05 | トッキ株式会社 | Film-forming apparatus |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106746720A (en) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | A kind of glass substrate film-coating mechanism |
| CN106746720B (en) * | 2016-12-02 | 2019-01-22 | 徐州市凯诺机械有限公司 | A kind of glass substrate film-coating mechanism |
| CN109207954A (en) * | 2018-10-19 | 2019-01-15 | 布勒莱宝光学设备（北京）有限公司 | Polychrome film glass and its production method and equipment |
| CN109207954B (en) * | 2018-10-19 | 2021-04-20 | 布勒莱宝光学设备（北京）有限公司 | Multi-colour film glass and its production method and equipment |
| CN113122827A (en) * | 2021-03-19 | 2021-07-16 | 苏州晟成光伏设备有限公司 | Equipment and process for preparing back-passivated solar cell |
| CN113445050A (en) * | 2021-05-27 | 2021-09-28 | 苏州晟成光伏设备有限公司 | Device and process for preparing Topcon solar cell |
| CN113445050B (en) * | 2021-05-27 | 2024-03-26 | 苏州晟成光伏设备有限公司 | Equipment for preparing Topcon solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201434725A (en) | 2014-09-16 |
| KR20140113289A (en) | 2014-09-24 |
| JP2014177683A (en) | 2014-09-25 |
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Application publication date: 20140917 |