CN106746720B - A kind of glass substrate film-coating mechanism - Google Patents
A kind of glass substrate film-coating mechanism Download PDFInfo
- Publication number
- CN106746720B CN106746720B CN201611094908.9A CN201611094908A CN106746720B CN 106746720 B CN106746720 B CN 106746720B CN 201611094908 A CN201611094908 A CN 201611094908A CN 106746720 B CN106746720 B CN 106746720B
- Authority
- CN
- China
- Prior art keywords
- cover plate
- tooth
- fixed
- glass substrate
- slideway
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Specific Conveyance Elements (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a kind of glass substrate film-coating mechanisms, including plated film case, cover plate slideway is installed in the inner bottom surface of the plated film case, the right side upper end of cover plate slideway is fixed with substrate fixed frame slideway, the lower end sleeve of cover plate is on cover plate slideway, the lower end sleeve of substrate fixed frame is on substrate fixed frame slideway, glass substrate driving mechanism is installed on the right side of the plated film case, cover plate driving mechanism is installed on the left of plated film case, pawling for the glass substrate driving mechanism is pressed against on the front side wall of substrate fixed frame, the cam of the cover plate driving mechanism is pressed against on the rear wall of cover plate.Coated basal plate can be pushed into or be pulled out automatically by the present invention, and can rapidly and efficiently move cover plate, and cover plate is made accurately to block non-coating film area.
Description
Technical field:
The present invention relates to field of photoelectric technology, and in particular to the ancillary equipment of glass substrate plated film.
Background technique:
Coated glass (Coated glass) is also referred to as reflecting glass.Coated glass be glass surface coating one or more layers
Metal, alloy or metal compound film meet certain particular requirement to change the optical property of glass.Coated glass is by production
The different characteristics of product can be divided into following a few classes: heat-reflecting glass, low emissivity glass (Low-E), electropane etc..
To meet specific requirement, one piece of glass substrate needs to plate two different films, two different films on same surface
It is disposed adjacent, every kind of film is in paliform on the glass substrate.
By above-mentioned requirements, when plating the first film, staff needs the area for blocking second of film of preplating with cover plate by hand
Domain；When plating second of film, staff needs to block the region for having plated the first film with cover plate by hand, and staff pushes away by hand
It is too low to move efficiency.
Summary of the invention:
The purpose of the present invention is overcoming the deficiencies of the prior art and provide a kind of glass substrate film-coating mechanism, it can be by plated film
Substrate is pushed into or pulls out automatically, and can rapidly and efficiently move cover plate, and cover plate is made accurately to block non-coating film area.
The solution to the technical problem of the present invention is as follows:
It is sliding to be equipped with cover plate in the inner bottom surface of the plated film case for a kind of glass substrate film-coating mechanism, including plated film case
Road, cover plate slideway right side upper end be fixed with substrate fixed frame slideway, the lower end sleeve of cover plate is on cover plate slideway, base
The lower end sleeve of plate fixed frame is equipped with glass substrate driving mechanism on the right side of the plated film case on substrate fixed frame slideway,
Cover plate driving mechanism is installed, pawling for the glass substrate driving mechanism is pressed against substrate fixed frame on the left of plated film case
On front side wall, the cam of the cover plate driving mechanism is pressed against on the rear wall of cover plate.
The bottom of the cover plate forms multiple half slots, multiple half slot linear arrays, is socketed in half slot flat
Slide bar is moved, the left and right sides of the cover plate slideway forms linear sliding slot, translates slide bar sleeve in linear sliding slot.
The cam and the inside pawled are equipped with electromagnet, form the boss extended outward, boss on the right side of cam
End face be pressed against on the left side of cover plate.
The glass substrate driving mechanism includes being fixed with guide way, guide way with the sliding block being fixedly connected of pawling, sliding block
Sleeve is fixed with hinge bar in the guide groove of guiding trestle on the right side of sliding block, the one end for being driven item is hinged on hinge bar, separately
One end is hinged in the cylinder protrusion of the outer rim of guide wheel, and ring gear, ring gear and the second driving gear are fixed on the periphery of guide wheel
Engagement, the second driving gear are fixed on the output shaft of motor；The guiding trestle and motor are fixed on the top of plated film case, institute
Guide wheel is stated to be fixed on the right side wall of plated film case.
The cover plate driving mechanism includes motor, and the output shaft of motor is fixedly connected with driving gear, driving gear with
The gear ring being fixed in the first driving wheel engages, and is fixed with lower layer section tooth, middle interval tooth and upper layer on the outer wall of the first driving wheel
Section three interval tooth of tooth, the upper half-turn section tooth engagement of middle two interval tooth of interval tooth and the second driving wheel, the inside of the second driving wheel at
Type has spline, and the spline segment of connecting shaft is socketed in spline, and the left side extension end that spline segment passes through spline forms circle
Platform, the intermediary form of rotary table have cylindrical projection, and the top of cylindrical projection is pressed against on cylindrical cam, and cylindrical cam and pinion gear are solid
Fixed connection, the right end of the connecting shaft pass through substrate and are fixedly connected with cam；First driving wheel and the second driving wheel are hinged
On substrate, the motor is fixed on electric machine support, and pinion gear is hinged on pinion carrier, electric machine support and pinion gear branch
Frame is fixed on substrate, and substrate is fixed on the left side wall of plated film case.
The lower layer section tooth and middle interval tooth are respectively one section of continuous section tooth and the number of teeth is equal, lower layer section tooth and middle interval tooth
Be staggered 180 degree；The upper interval tooth is two sections of continuous section teeth, and the number of teeth of two sections of section teeth of upper interval tooth is equal and the number of teeth is small
Two sections of section teeth of the half of the number of teeth of gear, upper interval tooth are in sustained height and the 180 degree that is staggered；
Second driving wheel includes two interval tooth of upper half-turn section tooth and lower branch section tooth, upper half-turn section tooth and lower branch section
The tooth number of teeth is equal and the 180 degree that is staggered, and the number of teeth of lower branch section tooth is equal with the number of teeth of middle interval tooth, the outer circle of the cylindrical cam
K level, highest plane and two curved surfaces for connecting k level and highest plane, k level and song are formed on circumferential surface
The round and smooth connection between highest plane and curved surface between face, the top of cylindrical projection are pressed against k level, the rotary table and
Spring is equipped between two driving wheels, spring is socketed on spline segment, and one end of spring is pressed against on rotary table and the other end is pressed against
On second driving wheel.
The top of the plated film case is fixed with third slideway, and the left side of cover plate upper end is pressed against the left side of third slideway
On face, the right side of substrate fixed frame upper end is pressed against on the right side of third slideway.
Compared with prior art, can coated basal plate be pushed into or is pulled out automatically, and can rapidly and efficiently move coverage
Plate makes cover plate accurately block non-coating film area.
Detailed description of the invention:
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the front view for removing plated film case of the invention；
Fig. 3 is the lateral side view for removing plated film case of the invention；
Fig. 4 is the structural schematic diagram of the first driving wheel of the invention；
Fig. 5 is the structural schematic diagram of the second driving wheel of the invention；
Fig. 6 is the structural schematic diagram of connecting shaft of the invention；
Fig. 7 is the structural schematic diagram of cylindrical cam of the invention.
Specific embodiment:
Embodiment is shown in as shown in Figures 1 to 7, a kind of glass substrate film-coating mechanism, including plated film case 1, the plated film case 1
Inner bottom surface on cover plate slideway 11 is installed, the right side upper end of cover plate slideway 11 is fixed with substrate fixed frame slideway 12,
The lower end sleeve of cover plate 4 on cover plate slideway 11, the lower end sleeve of substrate fixed frame 5 on substrate fixed frame slideway 12,
The right side of the plated film case 1 is equipped with glass substrate driving mechanism 2, and the left side of plated film case 1 is equipped with cover plate driving mechanism 3,
Pawling for the glass substrate driving mechanism 2 21 is pressed against on the front side wall of substrate fixed frame 5, the cover plate driving mechanism 3
Cam 38 be pressed against on the rear wall of cover plate 4.
Furthermore, the bottom of the cover plate 4 forms multiple half slots, multiple half slot linear arrays, and half
Translation slide bar 41 is socketed in circular groove, the left and right sides of the cover plate slideway 11 forms linear sliding slot 111, translates slide bar 41
Sleeve is in linear sliding slot 111.
Furthermore, the cam 38 and 21 inside of pawling are equipped with electromagnet, and the right side molding of cam 38 is oriented
The boss 381 that outside extends, the end face of boss 381 is pressed against on the left side of cover plate 4.
Furthermore, the glass substrate driving mechanism 2 includes and 21 sliding blocks 22 being fixedly connected of pawling, sliding block 22
It is fixed with guide way 221, in the guide groove 231 of guiding trestle 23, the right side of sliding block 22 is fixed with hingedly 221 sleeve of guide way
One end of bar 222, transmission item 24 is hinged on hinge bar 222, and the other end is hinged on the cylinder protrusion 251 of the outer rim of guide wheel 25
On, ring gear 26 is fixed on the periphery of guide wheel 25, ring gear 26 is engaged with the second driving gear 27, and the second driving gear 27 is fixed
On the output shaft of motor 28；The guiding trestle 23 and motor 28 are fixed on the top of plated film case 1, and the guide wheel 25 is fixed on
On the right side wall of plated film case 1.
Furthermore, the cover plate driving mechanism 3 includes motor 31, and the output shaft of motor 31 is fixedly connected with drive
Moving gear 32, driving gear 32 is engaged with the gear ring 331 being fixed in the first driving wheel 33, solid on the outer wall of the first driving wheel 33
Surely there is 334 3 interval tooth of lower layer section tooth 332, middle interval tooth 333 and upper interval tooth, 333 liang of interval teeth of middle interval tooth and second pass
The upper half-turn section tooth 342 of driving wheel 34 engages, and the inside of the second driving wheel 34 forms spline 341, the spline segment of connecting shaft 35
351 are socketed in spline 341, and the left side extension end that spline segment 351 passes through spline 341 forms rotary table 352, rotary table 352
Intermediary form have cylindrical projection 353, the top of cylindrical projection 353 is pressed against on cylindrical cam 36, cylindrical cam 36 and small tooth
Wheel 37 is fixedly connected, and the right end of the connecting shaft 35 passes through substrate 39 and is fixedly connected with cam 38；First driving wheel, 33 He
Second driving wheel 34 is hinged on substrate 39, and the motor 31 is fixed on electric machine support 391, and pinion gear 37 is hinged on pinion gear
On bracket 392, electric machine support 391 and pinion carrier 392 are fixed on substrate 39, and substrate 39 is fixed on the left side of plated film case 1
On wall.
Furthermore, the lower layer section tooth 332 and middle interval tooth 333 are respectively one section of continuous section tooth and number of teeth phase
It is staggered 180 degree Deng, lower layer section tooth 332 and middle interval tooth 333；The upper interval tooth 334 is two sections of continuous section teeth, upper interval tooth
The number of teeth of 334 two sections of section teeth is equal and the number of teeth be pinion gear 37 the number of teeth half, two sections of section teeth of upper interval tooth 334 are in
Sustained height and the 180 degree that is staggered；
Second driving wheel 34 includes 343 liang of interval teeth of upper half-turn section tooth 342 and lower branch section tooth, upper half-turn section tooth
342 and be staggered 180 degrees equal with lower branch section 343 numbers of teeth of tooth, the number of teeth of the number of teeth of lower branch section tooth 342 and middle interval tooth 333
It is equal, k level 361, highest plane 362 and connection k level 361 are formed on the outer circumference surface of the cylindrical cam 36
With two curved surfaces 363 of highest plane 362, between k level 361 and curved surface 363 between highest plane 362 and curved surface 363
Round and smooth connection, the top of cylindrical projection 353 are pressed against k level 361, are equipped between the rotary table 352 and the second driving wheel 34
Spring, spring are socketed on spline segment 351, and one end of spring is pressed against on rotary table 352 and the other end is pressed against the second driving wheel
On 34.
Furthermore, the top of the plated film case 1 is fixed with third slideway 13, the left side face pressure of 4 upper end of cover plate
On the left side for leaning against third slideway 13, the right side of 5 upper end of substrate fixed frame is pressed against on the right side of third slideway 13.
Working principle: first, glass substrate is put on substrate fixed frame 5, glass substrate driving mechanism 2 starts, and pawls
21 push substrate fixed frames 5 to push along substrate fixed frame slideway 12 to front side, shift onto behind bottom to pawl and 21 automatically disengage substrate and fix
Frame, glass substrate driving mechanism 2 stop；
Second, cover plate driving mechanism 3 starts, and motor 31 starts, and upper half-turn section tooth 342 is engaged with middle interval tooth 333, convex
Wheel 38 turns over 180 degree and drives cover plate 4 after side moves a certain distance backward, and pinion gear 37 is engaged with upper interval tooth 334, and cylinder is convex
Wheel 36 turns over 180 degree, and cam 38 pushes cover plate to move close to ilm substrate to be plated to the right, and motor 31 stops operating, at this point, the
One coating film area reserves the second coating film area and is occluded, and starts plated film the first filming region；
Third, after the completion of the plated film of the first filming region, cover plate 4, motor 31 is sucked in the electromagnet opening inside cam 38
It starts, lower branch section tooth 343 is engaged with lower layer section tooth 332, and cam 38 turns over 180 degree drive cover plate 4, and side is mobile certain forward
After distance, motor 31 stops operating, and is occluded at this point, the second coating film area reserves the first filming region, starts plated film second and plates
Diaphragm area；
4th, after the completion of the second coating film area plated film, glass substrate driving mechanism 2 is started, and the electromagnetism pawled in 21 is stable
Open and substrate fixed frame 5 be sucked, take the pull-out of substrate fixed frame 5 away glass substrate, while clicking 31 and starting, pinion gear 37 again with
Upper interval tooth 334 engages, and cylindrical cam 36 turns over 180 degree, drives cover plate 4 to return to original in the elastic force operating cam 38 of spring
Position.
Finally, the above embodiments are only used to illustrate the present invention, and not limitation of the present invention, related technical field
Those of ordinary skill can also make a variety of changes and modification without departing from the spirit and scope of the present invention, therefore
All equivalent technical solutions also belong to scope of the invention, and scope of patent protection of the invention should be defined by the claims.
Claims (7)
1. a kind of glass substrate film-coating mechanism, including plated film case (1), it is characterised in that: in the inner bottom surface of the plated film case (1)
Cover plate slideway (11) is installed, the right side upper end of cover plate slideway (11) is fixed with substrate fixed frame slideway (12), cover plate
(4) lower end sleeve is on cover plate slideway (11), and the lower end sleeve of substrate fixed frame (5) is in substrate fixed frame slideway (12)
On, it is equipped with glass substrate driving mechanism (2) on the right side of the plated film case (1), cover plate drive is installed on the left of plated film case (1)
Pawl (21) of motivation structure (3), the glass substrate driving mechanism (2) are pressed against on the front side wall of substrate fixed frame (5), described
The cam (38) of cover plate driving mechanism (3) is pressed against on the rear wall of cover plate (4).
2. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that: the bottom of the cover plate (4)
Form multiple half slots, multiple half slot linear arrays are socketed with translation slide bar (41), the cover plate slideway in half slot
(11) the left and right sides forms linear sliding slot (111), and translation slide bar (41) sleeve is in linear sliding slot (111).
3. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that: the cam (38) and pawl
(21) inside is equipped with electromagnet, forms the boss (381) extended outward, the end of boss (381) on the right side of cam (38)
Face pressure leans against on the left side of cover plate (4).
4. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that: the glass substrate driving mechanism
It (2) include being fixed with guide way (221) with the sliding block (22) that (21) be fixedly connected of pawling, sliding block (22), guide way (221) sleeve
It in the guide groove (231) of guiding trestle (23), is fixed on the right side of sliding block (22) hinge bar (222), the one of transmission item (24)
End is hinged on hinge bar (222), and the other end is hinged on the cylinder raised (251) of the outer rim of guide wheel (25), guide wheel (25)
It is fixed on periphery ring gear (26), ring gear (26) is engaged with the second driving gear (27), and the second driving gear (27) is fixed on
On the output shaft of motor (28)；The guiding trestle (23) and motor (28) are fixed on the top of plated film case (1), the guide wheel
(25) it is fixed on the right side wall of plated film case (1).
5. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that: the cover plate driving mechanism
It (3) include motor (31), the output shaft of motor (31) is fixedly connected with driving gear (32), driving gear (32) and is fixed on the
Gear ring (331) in one driving wheel (33) engages, and is fixed with lower layer section tooth (332), middle layer on the outer wall of the first driving wheel (33)
Section tooth (333) and (334) three interval tooth of upper interval tooth, the upper half of middle interval tooth (333) two interval tooth and the second driving wheel (34)
Section tooth (342) engagement is enclosed, the inside of the second driving wheel (34) forms spline (341), the spline segment (351) of connecting shaft (35)
It is socketed in spline (341), the left side extension end that spline segment (351) passes through spline (341) forms rotary table (352), circle
The intermediary form of platform (352) has cylindrical projection (353), and the top of cylindrical projection (353) is pressed against on cylindrical cam (36), cylinder
Cam (36) is fixedly connected with pinion gear (37), and the right end of the connecting shaft (35) passes through substrate (39) and is fixedly connected with cam
(38)；First driving wheel (33) and the second driving wheel (34) are hinged on substrate (39), and the motor (31) is fixed on electricity
On machine support (391), pinion gear (37) is hinged on pinion carrier (392), electric machine support (391) and pinion carrier
(392) it is fixed on substrate (39), substrate (39) is fixed on the left side wall of plated film case (1).
6. a kind of glass substrate film-coating mechanism according to claim 5, it is characterised in that: the lower layer section tooth (332) and
Middle interval tooth (333) respectively for one section of continuous section tooth and the number of teeth it is equal, lower layer section tooth (332) and middle interval tooth (333) are staggered 180
Degree；The upper interval tooth (334) is two sections of continuous section teeth, and the number of teeth of two sections of section teeth of upper interval tooth (334) is equal and the number of teeth
It is the half of the number of teeth of pinion gear (37), two sections of section teeth of upper interval tooth (334) are in sustained height and the 180 degree that is staggered；
Second driving wheel (34) includes (343) two interval tooth of upper half-turn section tooth (342) and lower branch section tooth, upper half-turn section tooth
(342) and lower branch section tooth (343) number of teeth is equal and the 180 degree that is staggered, the number of teeth of lower branch section tooth (342) and middle interval tooth
(333) the number of teeth is equal, and k level (361), highest plane (362) are formed on the outer circumference surface of the cylindrical cam (36)
With two curved surfaces (363) of connection k level (361) and highest plane (362), k level (361) and curved surface (363) it
Between the round and smooth connection between highest plane (362) and curved surface (363), the top of cylindrical projection (353) is pressed against k level
(361), spring is equipped between the rotary table (352) and the second driving wheel (34), spring is socketed on spline segment (351), spring
One end be pressed against on rotary table (352) and the other end is pressed against on the second driving wheel (34).
7. a kind of glass substrate film-coating mechanism according to claim 1, it is characterised in that: the top of the plated film case (1)
It is fixed with third slideway (13), the left side of cover plate (4) upper end is pressed against on the left side of third slideway (13), and substrate is fixed
The right side of frame (5) upper end is pressed against on the right side of third slideway (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611094908.9A CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611094908.9A CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106746720A CN106746720A (en) | 2017-05-31 |
| CN106746720B true CN106746720B (en) | 2019-01-22 |
Family
ID=58884382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611094908.9A Expired - Fee Related CN106746720B (en) | 2016-12-02 | 2016-12-02 | A kind of glass substrate film-coating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106746720B (en) |
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| CN101648649A (en) * | 2009-09-03 | 2010-02-17 | 东莞宏威数码机械有限公司 | Vacuum basal plate transmitting system |
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| CN104046952A (en) * | 2013-03-15 | 2014-09-17 | 住友重机械工业株式会社 | Substrate Carrying Tray And Film Forming Apparatus |
| CN204221303U (en) * | 2014-09-27 | 2015-03-25 | 昆山允升吉光电科技有限公司 | A kind of metal mask plate assembling components equipment |
| CN104891818A (en) * | 2015-05-18 | 2015-09-09 | 合肥京东方光电科技有限公司 | A clamp and a carrier used in a coating device |
| US9435020B2 (en) * | 2013-04-15 | 2016-09-06 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of forming thin film using the same |
| EP2775009B1 (en) * | 2010-10-18 | 2016-09-21 | Samsung Display Co., Ltd. | Crucible unit for a thin film deposition apparatus |
-
2016
- 2016-12-02 CN CN201611094908.9A patent/CN106746720B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101648649A (en) * | 2009-09-03 | 2010-02-17 | 东莞宏威数码机械有限公司 | Vacuum basal plate transmitting system |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| EP2775009B1 (en) * | 2010-10-18 | 2016-09-21 | Samsung Display Co., Ltd. | Crucible unit for a thin film deposition apparatus |
| CN104046952A (en) * | 2013-03-15 | 2014-09-17 | 住友重机械工业株式会社 | Substrate Carrying Tray And Film Forming Apparatus |
| US9435020B2 (en) * | 2013-04-15 | 2016-09-06 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of forming thin film using the same |
| CN204221303U (en) * | 2014-09-27 | 2015-03-25 | 昆山允升吉光电科技有限公司 | A kind of metal mask plate assembling components equipment |
| CN104891818A (en) * | 2015-05-18 | 2015-09-09 | 合肥京东方光电科技有限公司 | A clamp and a carrier used in a coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106746720A (en) | 2017-05-31 |
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Effective date of registration: 20181207 Address after: 221100 ho Qiao village, Ho Qiao Town, Copper Mt. District, Xuzhou, Jiangsu, China Applicant after: Xuzhou Kainuo Machinery Co. Ltd. Address before: 523000 201D, 2 / F, building 11, innovation and Technology Park, Songshan Lake high tech Industrial Development Zone, Dongguan, Guangdong Applicant before: Dongguan Tianhe electromechanical Development Co. Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20190122 Termination date: 20191202 |