CN100564577C - The device that is used for delivery tray - Google Patents

The device that is used for delivery tray Download PDF

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Publication number
CN100564577C
CN100564577C CNB2006100025837A CN200610002583A CN100564577C CN 100564577 C CN100564577 C CN 100564577C CN B2006100025837 A CNB2006100025837 A CN B2006100025837A CN 200610002583 A CN200610002583 A CN 200610002583A CN 100564577 C CN100564577 C CN 100564577C
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China
Prior art keywords
pallet
sensor
roller
unit
transmitter
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CNB2006100025837A
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Chinese (zh)
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CN1800437A (en
Inventor
郑星和
黄珉婷
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Samsung Display Co Ltd
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Samsung Display Co Ltd
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Publication of CN1800437A publication Critical patent/CN1800437A/en
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C25F3/22—Polishing of heavy metals
    • C25F3/24—Polishing of heavy metals of iron or steel
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

A kind of being used for transmitting at a high speed the device of vertical tray, what this device can this pallet of perception entering and unloading.This device comprises delivery unit, and this delivery unit has by the drive source driving to form the pulley of transfer path.These pulleys contact with fixing part, and this fixing part is attached on the base of the substrate that is fixed on the pallet and cover plate.This device also comprises sensing unit, and this sensing unit has and is installed under this transfer path to survey the transmitter that enters and unload of pallet.This device can also comprise be arranged with the roller of pallet top contact both sides, and these rollers can be connected with the moving parts that embeds along the guide rail of transfer path, through between two rollers the time, roller can translation with convenient pallet.These can symmetric arrangement or alternately arrange with zig-zag along the roller of pallet both sides.

Description

The device that is used for delivery tray
The cross reference of related application
The application requires the korean patent application No.2005-000950 that submits on January 5th, 2005 and the right of priority of the korean patent application No.2005-000951 that submits on January 5th, 2005, and benefit from these applications, for various purposes they are incorporated herein by reference herein, state at this as their full text.
Technical field
The present invention relates to pallet, more particularly, relate to a kind of be used to the transmit pallet that is positioned at the vertical position and the device that enters and unload that can the perception pallet.
Background technology
Electroluminescence display device is one type a flat-panel monitor, and it can be categorized as inorganic EL display equipment or organic electro-luminescence display device according to the starting material that are used to form luminescent layer.Organic electro-luminescence display device has some advantage that is better than the inorganic EL display equipment.Specifically, organic electroluminescent device can be by low voltage drive, in light weight, thin thickness, the visual angle is wide and pictorial display reaction times with the microsecond of being as short as.
The organic electroluminescent of organic electro-luminescence display device (EL) equipment can comprise: the anode, organic material layer and the negative electrode that form by layer on substrate.Organic material layer comprises the luminous organic luminous layer by making hole and electron recombination.Luminous for hole and electronics effectively are transferred to organic luminous layer, electron injecting layer and electron transfer layer can be between negative electrode and organic luminous layer, formed, and hole injection layer and hole transmission layer can be between anode and organic luminous layer, formed.These layers that increased can improve the luminous efficiency of organic el device.
Adopt the organic electroluminescent device of said structure perhaps to utilize the chemical vapor deposition method preparation of gas reaction by the physical vapor deposition such as vacuum deposition method, ion plating and sputtering process.In these methods, vacuum deposition method is extensively used.In the vacuum deposition method that is to carry out in the vacuum chamber, organic materials is vaporized in the deposit source, and organic materials steam is deposited on the substrate from the ejection of deposit source.
Along with indicating meter becomes greatly gradually, the size of substrate also increases thereupon.Therefore, deposition system has developed into the deposit source and can move up and down in vacuum chamber, and sprays organic materials steam so that form organic material layer on bigger substrate.
In this deposition system, the deposit source can move up and down by the drive shaft of axial rotation.When the deposit source moved up and down, the organic materials steam that forms by the vaporization organic materials was ejected in the deposit source.
Along with substrate becomes greatly gradually, be used to make the substrate and the cover plate aligned perpendicular alignmnet system that are positioned at plumbness also to be developed.The perpendicular alignmnet system can prevent that large substrates is crooked in deposition process, thereby higher-quality deposit is provided.
In order to make the substrate vertically orient, can installation base plate pallet fixer and make it to-and-fro movement.The fixing part that is attached on the substrate is outstanding from this substrate tray fixer.In addition, can be arranged vertically a retaining plate.
And, can control and improve such as conditions such as the transfer rate of substrate and positions, so that make transport unit can the perception substrate entering and unloading.In addition, can also comprise being used to transmit the transport unit that this is connected to the vertical tray on glass substrate and the cover plate, and the guidance device that is used for this pallet of vertical fixing.
Summary of the invention
The invention provides a kind of be used to transmit pallet when being in vertical position and the device that enters and unload that can the perception pallet.
Further feature of the present invention will describe in the following description, and Partial Feature wherein can be clear that from these are described, and perhaps learn by implementing the present invention.
The present invention discloses a kind of device that is used for delivery tray, this device comprises: comprise that a plurality of pulleys are to form the delivery unit of transfer path, the drive source that is connected with first pulley, and have on the transfer path that is installed in this pallet sensing unit with the transmitter that enters and unload of perception pallet.In addition, the bottom surface of first pulley or second pulley contact pallet, substrate and cover plate are fixed to this pallet.
The present invention also discloses a kind of device that is used for delivery tray, comprising: first guide unit of contact vertical tray, and in order to driving the driver element of this first guide unit, and in order to guide second guide unit of this first guide unit.
Be appreciated that top summary description and following detailed all are exemplary and indicative, purpose is the present invention of explaining that further claim is protected.
Description of drawings
Below included accompanying drawing be used for further helping to understand the present invention, and be merged in a part that constitutes specification sheets in the specification sheets, these accompanying drawings are used for the illustration embodiments of the invention, and with specification sheets in order to explain principle of the present invention.
Fig. 1 illustrates the synoptic diagram in the deposit source of the buffer area that is arranged in vacuum deposition system, and the device that is used for delivery tray according to an embodiment of the invention is installed in this vacuum deposition system.
Fig. 2 illustrates the synoptic diagram that the layer that is arranged in vacuum deposition system forms the deposit source in zone, and the device that is used for delivery tray according to an embodiment of the invention is installed in this vacuum deposition system.
Fig. 3 illustrates the perspective schematic view according to the device that is used for delivery tray of first embodiment of the invention.
Fig. 4 illustrates the schematic partial side of an embodiment of the sensing unit of the device that is used for delivery tray shown in Figure 1.
Fig. 5 illustrates the schematic side elevation of another embodiment of sensing unit shown in Figure 1.
Fig. 6 illustrates the block diagram that is used for the connection between illustration Fig. 4 or sensing unit shown in Figure 5 and the peripherals.
Fig. 7 illustrates the perspective schematic view according to the device that is used for delivery tray of second embodiment of the invention.
Fig. 8 illustrates the sectional view of transport unit shown in Figure 7.
Fig. 9 illustrates the partial enlarged view of the top area of pallet according to an embodiment of the invention.
Figure 10 illustrates the perspective schematic view according to the device that is used for delivery tray of third embodiment of the invention.
Figure 11 illustrates the skeleton view of the zig-zag layout of roller.
Embodiment
With reference to the accompanying drawing that the embodiment of the invention is shown the present invention is described more all sidedly below.Yet the present invention can be by multiple multi-form the realization, and the embodiment that should not be understood that to only limit to here and set forth.On the contrary, it is for fully open that these embodiment are provided, and passes on scope of the present invention to those skilled in the art comprehensively.In the accompanying drawings, for the sake of clarity, the size and the relative dimension in layer and zone are exaggerated.Identical Reference numeral is represented identical or similar parts.
Fig. 1 illustrates the synoptic diagram in the deposit source of the buffer area that is arranged in vacuum deposition system, and the device that is used for delivery tray according to an embodiment of the invention is installed in this vacuum deposition system.Fig. 2 illustrates the synoptic diagram that the layer that is arranged in vacuum deposition system forms the deposit source in zone, and the device that is used for delivery tray according to an embodiment of the invention is installed in this vacuum deposition system.
Referring to Fig. 1, in the vacuum chamber 10 of vacuum deposition system 100, be furnished with: form thereon organic material layer substrate 30, place the cover plate 40 in substrate 30 the place aheads and the deposit source 20 that separates with cover plate 40.Cover plate 40 and substrate 30 are aimed at by the alignment system (not shown), and are fixed on the chuck 50, so that cover plate 40 and substrate 30 separate less distance.
Cover plate 40 is divided into pattern and forms part (shown in dotted line) and remain to be secured to by for example welding process etc. the fixed part of (not shown) on the cover plate frame.Pattern forms part corresponding to the part that remains to be formed organic material layer on the substrate 30.Similarly, vacuum chamber 10 is divided into: layer forms area B and the regional A of buffering, and wherein, layer forms area B corresponding to the zone that cover plate 40 and substrate 30 are installed therein, and buffer area A is corresponding to the whole vacuum chamber except that layer forms area B.
Deposit source 20 can be installed on the drive shaft that rotates by the running gear (not shown).Deposit source 20 can move upward to layer according to the turning direction of this drive shaft and form in the area B (as shown in Figure 2) and move downward.
Fig. 3 illustrates the perspective schematic view according to the device that is used for delivery tray of first embodiment of the invention.Fig. 4 illustrates the schematic partial side of an embodiment of the sensing unit of the device that is used for delivery tray shown in Figure 1.Fig. 5 illustrates the schematic side elevation of another embodiment of sensing unit shown in Figure 1.Fig. 6 illustrates the block diagram that is connected that is used between illustration Fig. 4 or sensing unit shown in Figure 5 and the peripherals.
As shown in Figure 3, the device 100 that is used for delivery tray comprises delivery unit 110, and this delivery unit 110 comprises a plurality of pulleys 114 that contact with the bottom surface of pallet 112 with delivery tray 112 that are arranged.This device 100 also comprises sensing unit 120, and this sensing unit 120 comprises the transmitter that enters and unload with perception pallet 112 on the transfer path that is positioned at pallet 112.Though not shown in Figure 3, substrate and cover plate are secured on the pallet 112.
Pallet 112 is set on the rod fixing part 302, and a plurality of pulley 114 is set at pallet 112 times, so that the rotation of pallet 112 by pulley 114 is transmitted.Pulley 114 can pass through engine rotation, thus delivery tray 112.
As shown in Figure 4 and Figure 5, transmitter can be a touch sensor 122 as shown in Figure 4, or non-contacting sensor as shown in Figure 5 124.
Be used as at touch sensor 122 under the situation of this transmitter, touch sensor 122 can be placed in and the pulley 114 of the bottom surface of pallet 112 contact between, and can contact pallet.
Touch sensor 122 can be arranged to the bottom surface that makes pallet 112 and contact with the head of this transmitter 122.Transmitter 122 can be arranged to and make its head top surface consistent with the bottom surface of pallet 112, the bottom surface of perhaps a little higher than pallet 112.Be placed at head under the situation of bottom surface of a little higher than pallet 112, when pallet 112 these heads of contact, this head can elastic deflection or vertical movement.Then, when pallet 112 these heads of process, this head can be returned to its original position.
Be used as at non-contacting sensor 124 under the situation of this transmitter, non-contacting sensor 124 should place the below of pallet 112, and the entering and unloading of bottom surface that can perception pallet 112.
Perhaps, this non-contacting sensor 124 can be positioned at can perception pallet 112 the side or the position of end face.
Can provide additional installation parts to avoid external collision or external environment influence with protection non-contacting sensor 124; and non-contacting sensor 124 can be placed on the fixed position by installation parts, and this position can be corresponding to side, bottom surface or the end face of the pallet 112 that is transmitted.
The various elements that can produce such as ultrasonic wave, radiowave, light, infrared rays, ultraviolet ray, magnetic and combination thereof may be used to make non-contacting sensor 124, and utilizing the various transmitters of one of element listed above can both be used as non-contacting sensor, these transmitters comprise: for example ultrasonic transducer, optical sensor, Fibre Optical Sensor, infrared sensor, Magnetic Sensor or UV sensor.
As shown in Figure 6, wherein provide control unit 130, it is used to receive the data that transmit from sensing unit 120, with position and movement velocity and the control processing speed of knowing pallet 112.Control unit 130 is discerned the position and the movement velocity of pallets 112, and can correspondingly control the delivery unit 110 of delivery tray 112.
Below the concise and to the point principle of work of describing according to the device that is used for delivery tray of second embodiment of the invention.
Fig. 7 illustrates the perspective schematic view according to the device that is used for delivery tray of second embodiment of the invention.Fig. 8 illustrates the sectional view of transport unit shown in Figure 7.Fig. 9 illustrates the partial enlarged view of the top area of pallet according to an embodiment of the invention.
As shown in Figure 7 and Figure 8, the device that is used for delivery tray 200 according to second embodiment of the invention comprises: contact with vertical tray 112 and make this pallet remain on first guide unit 210 of vertical position; Be used to make this guide unit 210 reciprocating driver elements 220; And be used for along second guide unit 230 of paths guiding by driver element 220 driven vertical pallets 112.
Pallet 112 can transmit by other drive unit that comprises a plurality of pulleys 114 that rotated by engine (engine 116 as shown in Figure 3).Each pulley can have the annular recesses that forms on its outer circumference surface, and a rod fixing part 302 can be attached on the bottom surface of pallet 112 and places in the annular recesses of pulley 114.
In addition, first guide unit 210 can comprise a plurality of rollers 212, and the moving parts 214 that roller 212 is installed thereon.This moving parts can be driven and can to-and-fro movement by driver element 220.
Roller 212 can be arranged in pallet 112 both sides and can with the contacts side surfaces of pallet 112.Roller can be arranged symmetrically in the both sides of pallet 112, perhaps can alternately arrange with zig-zag.Zig-zag is shown specifically in Figure 11.
When pallet 112 entered between the roller 212, roller 212 can be along from the outside direction translation of pallet 112, with contact pallet 112, when pallet 112 when 212 of rollers leave, roller 212 can translation go back to its original position.
Moving parts 214 can be installed and is connected on the drive source 222 of driver element 220.This moving parts may be provided on the guide rail 232 of second guide unit 230, and the motion of this moving parts 214 can be guided by this guide rail.
Driver element 220 comprises moving parts 214 and drive source 222.Drive source 222 can comprise cylinder or engine, and can provide reciprocating power to moving parts 214.
Engine is being used as under the situation of drive source 222, the motivating force of this engine can be by being passed to moving parts 214 such as interconnecting pieces such as band or chains, and cylinder is being used as under the situation of drive source 222, moving parts 214 can be directly mounted on the operating stick of this cylinder.
Second guide unit 230 can be used to provide movement path, and moving parts 214 drives the stable motion smoothly in this path, lower edge at drive source 222.
Drive source 222 can also be included in the guide unit 230.
As shown in Figure 9, reinforcement feature 113 can be attached to the part that pallet 112 1 sides or both side surface upper roller 212 are contacted.Thereby, can avoid because the caused friction and wear of contact between pallet 112 and the roller 212.
Figure 10 illustrates the perspective schematic view according to the device that is used for delivery tray of third embodiment of the invention.Figure 11 illustrates the skeleton view of the zig-zag arrangement states of roller.
As shown in Figure 10 and Figure 11, be used for the device of delivery tray, a plurality of rollers 310 are set at the both sides of vertical tray, and when this vertical tray 112 transmitted between roller, roller intermittently contacted with the surface of pallet 112 both sides.
Spacing between two rollers 310 respect to one another of position can be chosen as and make roller 310 allow pallet 112 to transmit between roller, and roller 310 can not hinder the transmission of pallet 112.And the largest interval between relative two rollers 310 in position can be chosen as and make the pallet 112 that transmits between two relative rollers 310 be unlikely significantly, and can keep its positions on pulley 114 by fixing part 302.
Roller 310 can be arranged symmetrically in the both sides of pallet 112 as shown in figure 10, perhaps can alternately be arranged in the both sides of pallet 112 as shown in figure 11 with zig-zag.
Below the concise and to the point principle of work of describing according to the device that is used for delivery tray of the 3rd embodiment.
Before vertical tray 112 entered 212 of rollers, this vertical tray 112 was driven by independent drive unit, and this drive unit is connected with the pulley 114 that provides below pallet 112.In case this vertical tray 112 enters between two rollers 212, the plumbness of pallet 112 is just kept by a plurality of rollers 212 of contact pallet 112 top both side surface.
And, as shown in Figure 9, being attached to the reinforcement feature 113 of pallet 112 both side surface part, can prevent because the wearing and tearing of caused pallet 112 parts of contact between pallet 112 and each roller 212.
When pallet 112 is between roller 212, because pallet 112 is supported by roller 212, therefore can avoid pallet 112 to roll, and pallet 112 can transmit with the speed that increases.
As above the present invention who is constructed can avoid the damage to sensing unit 120, and can prolong the expected service life of transmitter.This can reduce the spending of replacing sensing unit 120 with new sensing unit.And, can improve the transfer rate of pallet 112, to reduce the required time of delivery tray, can reduce a whole set of treatment time of handling simultaneously, thereby boost productivity.
Those skilled in the art will be clear: under the situation that does not deviate from the spirit and scope of the present invention, can carry out various modifications and conversion to the present invention.Therefore, the invention is intended to cover in claims and the replacement scope of equal value thereof various modifications and conversion to the present invention did.

Claims (20)

1, a kind of device that is used for delivery tray comprises:
First guide unit of contact vertical tray;
In order to drive the driver element of this first guide unit; And
In order to guide second guide unit of this first guide unit;
Wherein said first guide unit comprises:
First roller on a plurality of first sides that are arranged in pallet;
Second roller on a plurality of second sides that are arranged in pallet; And
Be installed to the moving parts of described second guide unit,
In wherein said a plurality of first roller one is connected with this moving parts, and this driver element is connected with this moving parts, so that this moving parts translation.
2, device as claimed in claim 1, wherein this driver element comprises the drive source that is connected with this second guide unit.
3. device as claimed in claim 1, wherein this second guide unit comprises in order to formation and makes this pallet by the guide rail along the transfer path of its guiding.
4, device as claimed in claim 1, wherein this driver element comprises the drive source that is connected with described moving parts.
5, device as claimed in claim 1, wherein this second guide unit comprises described moving parts is embedded, and makes this moving parts by the guide rail along the transfer path of its guiding with formation.
6, device as claimed in claim 1, wherein said a plurality of first roller arrangements are on first side of pallet, and described a plurality of second roller is arranged on second side of pallet symmetrically with described a plurality of first rollers.
7, device as claimed in claim 1, wherein said a plurality of first roller arrangements are on first side of pallet, and described a plurality of second roller alternately is arranged on second side of pallet with zig-zag with described a plurality of first rollers.
8, device as claimed in claim 1 further comprises:
Sensing unit has on the transfer path that is installed in pallet the transmitter that enters and unload with the perception pallet.
9, device as claimed in claim 8, wherein this transmitter is a non-contacting sensor, this non-contacting sensor comprises ultrasonic transducer, optical sensor, Fibre Optical Sensor or Magnetic Sensor.
10, device as claimed in claim 8, wherein this transmitter is a non-contacting sensor, this non-contacting sensor comprises infrared sensor or UV sensor.
11, as claim 9 or 10 described devices, wherein this non-contacting sensor is positioned at the pallet below, with the bottom surface of perception pallet.
12, device as claimed in claim 1, wherein said a plurality of first roller contacts are fixed to the first lateral reinforcement feature of pallet.
13, device as claimed in claim 1 also comprises:
A plurality of pulleys are to form the delivery unit of transfer path;
With the drive source that first pulley is connected, described first pulley is in described a plurality of pulley;
Have on the transfer path that is installed in pallet sensing unit with the transmitter that enters and unload of this pallet of perception,
Wherein this first pulley or second pulley contact the rod fixing part, and described rod fixing part is connected to the bottom surface of described pallet, and substrate and cover plate are fixed to this pallet.
14, device as claimed in claim 13, wherein this transmitter is a non-contacting sensor, this non-contacting sensor comprises that ultrasonic transducer, light pass transmitter, Fibre Optical Sensor or Magnetic Sensor.
15, device as claimed in claim 13, wherein this transmitter is a non-contacting sensor, this non-contacting sensor comprises infrared sensor or UV sensor.
16, as claim 14 or 15 described devices, wherein this non-contacting sensor is positioned at this pallet below, with the bottom surface of this pallet of perception.
17, device as claimed in claim 13, wherein this non-contacting sensor is positioned at the pallet below, with the bottom surface of this pallet of perception.
18, device as claimed in claim 13, wherein said drive source drive this first pulley and rotate.
19, device as claimed in claim 13 further comprises:
Control unit, be used to receive from this sensing unit about the entering or the signal of takedown time of pallet, and based on described delivery unit of described signal control or described driver element.
20, as claim 14 or 15 described devices, further comprise:
Control unit, in order to receiving from this sensing unit about the entering or the signal of takedown time of pallet, and based on described delivery unit of described signal control or described driver element.
CNB2006100025837A 2005-01-05 2006-01-05 The device that is used for delivery tray Active CN100564577C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020050000951 2005-01-05
KR1020050000950A KR100639004B1 (en) 2005-01-05 2005-01-05 Device for sensing and transfering of tray
KR1020050000950 2005-01-05

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CN1800437A CN1800437A (en) 2006-07-12
CN100564577C true CN100564577C (en) 2009-12-02

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CN103526156A (en) * 2012-07-05 2014-01-22 住友重机械工业株式会社 Film forming apparatus and carrier tray for the same
CN104046952A (en) * 2013-03-15 2014-09-17 住友重机械工业株式会社 Substrate Carrying Tray And Film Forming Apparatus

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CN102312212B (en) * 2010-06-30 2013-12-04 上方能源技术(杭州)有限公司 Scanning coating device and scan coating assembly
CN102373422A (en) * 2010-08-24 2012-03-14 鸿富锦精密工业（深圳）有限公司 Vacuum coating system
CN103014635A (en) * 2011-09-22 2013-04-03 吉富新能源科技(上海)有限公司 Photovoltaic glass sputtering carrier plate conveyer
DE102016205606A1 (en) * 2016-04-05 2017-10-05 SATEG Steuerungs- und Automatisierungstechnik GmbH Horizontal conveyor and associated pallet and device for parking vehicles
CN109484794A (en) 2017-09-13 2019-03-19 京东方科技集团股份有限公司 A kind of base plate transfer device
JP2020500255A (en) * 2017-10-27 2020-01-09 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Carrier for non-contact conveyance in deposition system, apparatus for non-contact conveyance of carrier, and method for non-contact conveyance of carrier in deposition system
CN108445653B (en) * 2018-03-27 2021-01-15 武汉华星光电技术有限公司 Transfer apparatus for transferring substrate and control method thereof

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Publication number Priority date Publication date Assignee Title
CN103526156A (en) * 2012-07-05 2014-01-22 住友重机械工业株式会社 Film forming apparatus and carrier tray for the same
CN104046952A (en) * 2013-03-15 2014-09-17 住友重机械工业株式会社 Substrate Carrying Tray And Film Forming Apparatus

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CN1800437A (en) 2006-07-12
KR100639004B1 (en) 2006-10-26

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