KR100639004B1 - Device for sensing and transfering of tray - Google Patents

Abstract

The present invention relates to a tray, and relates to a tray detecting and transferring device configured to detect entry and exit of a tray while a granular tray is smoothly transferred.

The present invention is a granular tray having a rod-shaped adhesion member installed at the bottom while the substrate and the mask is fixed; and a plurality of pulleys that form a transfer path while being in close contact with the adhesion member for the transfer of the tray is rotated by the drive source Provided is a tray detection and transfer device provided with; a transfer device comprising a transfer unit, and a sensor is installed on the transfer path of the tray to detect the entry and discharge of the tray.

According to the present invention, since the non-contact sensor is disposed on the side of the path in which the granular tray is moved, the presence or absence of the tray is detected, the damage of the sensor for detecting the tray is eliminated, and the life is extended, as well as the replacement cost is reduced. And, the feed speed of the tray is adjusted upward, the transport work time of the tray is shortened, the progress speed of the entire process is improved by that much productivity to be increased over time.

Tray, Sensor

Description

Device for sensing and transfering of tray             

1 is a schematic view showing a state where the deposition source is located in the buffer region of the vacuum deposition system according to the present invention,

2 is a schematic view showing a state where the deposition source is located in the deposition region of the vacuum deposition system according to the present invention,

3 is a perspective view schematically showing a tray detection and transfer apparatus according to the present invention,

4 is a partial side view schematically showing an embodiment of an extract of the sensing unit of the sensing and transporting apparatus shown in FIG. 3;

5 is a side view schematically showing another embodiment of the sensing unit shown in FIG. 4;

FIG. 6 is a diagram illustrating an operation relationship between the sensing device and the peripheral device shown in FIG. 5.

<Description of Symbols for Main Parts of Drawings>

100..Tray detection and conveying device 110 ...

112, tray 114, pulley,

120 sensor 122 contact sensor,

124 ... Non-contact sensor.

The present invention relates to a tray, and more particularly, to a sensing and conveying apparatus for a tray configured to sense entry and exit of a tray while the tray is transferred in a granular state.

In general, an electroluminescent display device, which is one of flat panel displays, is classified into an inorganic electroluminescent display device and an organic electroluminescent display device according to a material used as a light emitting layer, and the organic electroluminescent display device can be driven at low voltage and is light in weight. It is attracting attention because of its thinness and wide viewing angle as well as fast response speed.

The organic light emitting device of the organic light emitting display device includes an anode, an organic material layer, and a cathode that are stacked on a substrate. The organic material layer includes an organic material layer of an organic light emitting layer that recombines holes and electrons to form excitons and emits light, and also between the cathode and the organic light emitting layer to smoothly transport holes and electrons to the organic light emitting layer to improve luminous efficiency. The organic material layer of the hole injection layer and the electron transport layer is interposed between the anode and the organic light emitting layer while interposing the organic material layer of the electron injection layer and the electron transport layer.

The organic light emitting device having the above-described structure is generally manufactured by a physical vapor deposition method such as a vacuum deposition method, an ion plating method and a sputtering method or a chemical vapor deposition method by a gas reaction. In particular, in order to form the organic material layer of the organic EL device, a vacuum deposition method in which an organic vapor material formed by evaporating an organic material in a vacuum chamber is sprayed from a deposition source and deposited on a substrate is widely used.

Recently, in response to the increase in size of the display, the size of the substrate has been enlarged, and in order to deposit the organic material layer on such a large substrate, a deposition system has been developed in which an evaporation source is sprayed while vertically moving up and down in a vacuum chamber.

Such a deposition system is provided with a drive shaft for moving the deposition source in the vertical direction, and the drive shaft is rotated by the drive means. Due to the axial rotation of the drive shaft, the deposition source injects the organic vapor material formed by evaporating the organic material while moving in the vertical vertical direction.

In addition, a vertical alignment system has been studied in which the substrate and the mask are aligned in a granular state so that a warp phenomenon of the substrate is removed while the substrate coated with the material sprayed from the evaporator is large.

The substrate tray holder installed reciprocally to be fixed in the granular state requires a holder plate disposed in the same shape as the substrate tray while the fastening member is fastened to the substrate.

In addition, in order to control and improve the conditions such as the transfer speed and the transfer position of the substrate to be transferred to the granular, it is required to detect the advance and exit of the substrate.

The present invention devised to meet the above demands, the tray is moved by a plurality of pulleys rotated by a drive source, so that the entry and exit of the tray is sensed by a sensor installed on the transfer path of the tray Therefore, the object of the present invention is to provide a detection and transfer device for a tray, in which damage to the sensor is prevented, a lifespan is extended, replacement costs are reduced, and a transfer speed of the tray is significantly increased to shorten the transfer work time.

The tray detection and transfer apparatus according to the present invention for achieving the above object is a granular tray having a rod-like adhesion member installed at the bottom while the substrate and the mask is fixed; and the adhesion member for the transfer of the tray; A transfer device including a transfer unit configured to rotate while being in close contact with a plurality of pulleys forming a transfer path, and a sensor installed on the transfer path of the tray to detect entry and exit of the tray; It is done.

In addition, the non-contact sensor is preferably any one selected from an ultrasonic sensor, an optical sensor, an optical fiber sensor, an infrared sensor, an ultraviolet sensor, an optical fiber sensor.

In addition, it is preferable that the input and discharge timing of the tray, the transfer time, etc. are converted into data by the sensor of the sensing unit, and a control unit for controlling the transfer unit is further included.

Hereinafter, with reference to the accompanying drawings, the sensing and transfer apparatus of the tray according to the present invention will be described in detail.

1 is a schematic diagram showing a state where the deposition source is located in the buffer region of the vacuum deposition system according to the present invention, Figure 2 is a schematic diagram showing a state where the deposition source is located in the deposition region of the vacuum deposition system according to the present invention.

Referring to FIG. 1, a vacuum chamber 10 of a vacuum deposition system includes a substrate 30 on which an organic layer is to be formed, a mask 40 positioned in front of the substrate 30, and a predetermined interval from the mask 40. The spaced apart deposition source 20 is installed. The mask 40 and the substrate 30 are fixed in close contact with the chuck 50 in an aligned state by an alignment system (not shown).

The mask 40 includes a pattern forming part (indicated by a virtual line) in which a pattern corresponding to an organic layer to be formed on the substrate 30 is formed, and a fixing part fixed by welding to a mask frame (not shown). . At this time, the vacuum chamber 10 is divided into a film forming area B corresponding to the installation position of the mask 40 and the substrate 30 and a buffer area A corresponding to a position other than the film forming area B.

The deposition source 20 is movably mounted to a drive shaft that is axially rotated by an operation of a moving means (not shown), and moves vertically in the vacuum chamber 10 along the rotational direction of the drive shaft.

On the other hand, Figure 3 is a perspective view schematically showing a sensing and conveying apparatus of the tray according to the present invention, Figure 4 is a partial side view schematically showing an embodiment of the sensing portion of the sensing and conveying apparatus shown in Figure 1 5 is a side view schematically showing another embodiment of the sensing unit shown in FIG. 4, and FIG. 6 is a diagram illustrating an operation relationship between the sensing unit and the peripheral apparatus illustrated in FIG. 5.

As shown in FIG. 3, the tray sensing and conveying apparatus 100 according to the present invention includes a plurality of pulleys 114 to be in contact with the lower surface of the tray 112 for smooth transfer of the tray 112 on which the substrate and mask are fixed. ) Includes a transfer unit 110, and a detection unit 120 installed on the transfer path of the tray 112 to detect entry and exit of the tray 112.

The tray 112 is formed such that a plurality of pulleys 114 are positioned below the tray 112 so that the rod-shaped contact member is seated at the bottom, and the tray 112 is transported while the pulley 114 is rotated. Is done.

4 and 5, any one of the contact sensor 122 and the non-contact sensor 124 is preferably selected and used.

In the case of the touch sensor 122, the detection sensor is installed in a contact manner between a plurality of pulleys 114 in contact with the bottom surface of the tray 112 for the transfer of the tray 112.

The contact sensor 122 is disposed such that the front lower end of the tray 112 to be transferred is in contact with the head of the sensor 122, and the upper end surface of the head of the sensor 122 is flush with the bottom surface of the tray 112. Or it may be arranged slightly higher, the elasticity is given to the head portion of the sensor 122, if the tray 112 passes, it could be disposed in the initial position.

In addition, when the detection sensor is a non-contact sensor 124, it is installed on the lower side of the tray 112 to detect the entry and exit of the tray 112 by detecting the bottom of the tray 112 to enter.

In addition, the non-contact sensor 124 may be installed to detect the side or top of the tray 112.

At this time, it is a matter of course that a separate mounting member (not shown) is provided so that the non-contact sensor 124 is protected from an external shock and the external environment, and also the non-contact sensor 124 side by the mounting member from the tray 112, It can be fixed in an adjacent position below or above.

The non-contact sensor 124 may be used a variety of materials including ultrasonic waves, radio waves, light, infrared rays, ultraviolet rays, magnetic, and the like, ultrasonic sensors, optical sensors, Any one of various types of sensors including an optical fiber sensor, an optical fiber sensor, an infrared sensor, a magnetic sensor, and an ultraviolet sensor may be selected and used, and an ultrasonic sensor is most preferable.

On the other hand, the control unit 130 is separately configured to include a control device for receiving the data of the non-contact sensor 124 to read the moving position and the moving speed of the tray 112 to adjust the working speed of other processes, etc., The controller 130 controls the transfer unit 110 for transferring the tray 112 by recognizing a transfer speed and a transfer position of the tray 112.

Hereinafter, the operation of the tray detection and transfer apparatus according to the present invention will be briefly described.

When the tray 112 transported by the plurality of transfer pulleys 114 interlocked with the driving source 116 enters a predetermined position and the tray 112 is detected by the contact sensor 122 and the non-contact sensor 124. When the control unit 130 recognizes and the tray 112 is discharged, it is detected that the tray 112 is out of position by the contact sensor 122 and the non-contact sensor 124, and the control unit 130 recognizes that the next process is performed. The control will be switched to the ready state.

On the other hand, since the entry and discharge of the tray 112 is sensed by the contact sensor 122 and the non-contact sensor 124, the transfer unit 110 is controlled by the controller 130, the transfer speed of the tray 112 Up to increase the speed of the overall process.

According to the present invention configured as described above, while the damage of the sensor for detecting the tray is removed, the life is extended, as well as the replacement cost is reduced, the feed rate of the tray is adjusted upward, the transfer time of the tray is shortened, the overall process The progress of the speed is improved so that the productivity is increased over time.

Claims (5)

A transfer part configured to rotate a plurality of pulleys that form a transfer path while the lower part of the granular tray to which the substrate and the mask are fixed are rotated by the driving source; A sensor installed on a transport path of the tray to detect entry and exit of the tray; Sensing and transporting the tray comprising a. The method of claim 1, The sensor is a sensor for detecting and transporting the tray, characterized in that the non-contact sensor any one selected from the ultrasonic sensor, optical sensor, optical fiber sensor, magnetic sensor, infrared sensor, ultraviolet sensor, optical fiber sensor. The method of claim 2, The non-contact sensor is installed on the lower side of the tray for detecting and transporting the tray, characterized in that for detecting the lower surface of the tray. The method of claim 1, And the sensor is a contact sensor installed in a contact manner between a plurality of pulleys in contact with a lower surface of the tray. The method of claim 1, Tray input and discharge time, the transfer time, etc. by the sensor of the detection unit is data is formed, the detection and transfer device of the tray further comprises a control unit for controlling the transfer unit based on this data.

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