KR102179235B1 - Feeding device for conveying products and feeding methods the same - Google Patents

Abstract

A conveying material conveying device is disclosed. The conveyed object conveying apparatus according to the present invention comprises a first grasping unit for grasping a conveyed material, a second grasping unit disposed spaced apart from the first grasping unit and grasping the conveyed material, a first grasping unit and a second grasping unit A transfer unit connected to and transferring the gripped material, and a first pitch adjustment unit coupled to the transfer unit to support the first gripping unit and moving the first gripping unit in a direction approaching and spaced apart from the second gripping unit. Includes.

Description

{Feeding device for conveying products and feeding methods the same}

The present invention relates to a conveying device and a conveying method, and more particularly, to a conveying device and a conveying method capable of holding a conveyed material loaded on a tray and transferring it to a next process.

In recent years, as the electronic display industry has developed rapidly among the semiconductor industries, flat panel displays (FPDs) have begun to appear.

Such flat panel display devices include a liquid crystal display, a plasma display panel, and an organic light emitting diode display.

Among them, the OLED display has a fast response speed, lower power consumption than a conventional liquid crystal display (LCD), light weight, and can be made ultra-thin since it does not require a separate backlight device. It has very good advantages such as high luminance, so it is attracting attention as a next-generation display device.

Organic light-emitting diode displays can be divided into passive PMOLED and active AMOLED depending on the driving method. In particular, AMOLED is a self-luminous display, which has the advantage of faster response speed than conventional displays, natural color sense and low power consumption.

Such an organic light emitting diode display includes an anode and a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least an emission layer, and may further include a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer in addition to the emission layer.

In addition, an OLED display is an ultra-thin display device that emits a color image by self-emission of an organic material, and has an advantage of having a simple structure and high light efficiency.

The process of manufacturing a substrate for such an organic light emitting diode display includes a pattern formation process, an organic thin film deposition process, an encapsulation process, a bonding process in which the substrate on which the organic thin film is deposited and the substrate after the sealing process are attached, and the panel There are various processes such as a functional film attachment process to attach a functional film such as a polarizing film.

During the movement of these processes and processes, the substrate for an OLED display is temporarily loaded on a tray, stored and transported. A protective film is attached to such a substrate to protect the substrate.

In order to reduce the tact time of substrate transfer, a plurality of substrates are stacked and loaded into a plurality of pockets spaced apart from the tray and transferred. When entering into the process, the stacked substrates must be separated and held one by one and then individually put into the process. do.

However, there is a problem in that it takes a lot of time to transfer all the substrates loaded in the entire tray by holding and transferring the substrates stacked in the pocket portion sequentially for each pocket portion, thereby increasing the tack time.

Republic of Korea Patent Publication No. 10-0800636, (2008.01.28.)

The problem to be solved by the present invention is to be placed in a plurality of pockets by adjusting the spacing between the holding units for holding the transported object according to the spacing of the pocket portion for loading the transported object provided spaced apart from each other It is to provide a conveyed material conveying device and a conveying method capable of reducing tack time by simultaneously transferring the grasped conveyed material to the next process after grasping the conveyed material.

According to an aspect of the present invention, a first gripping unit for gripping a transport material; A second gripping unit disposed to be spaced apart from the first gripping unit and gripping the conveyed material; A transfer unit connected to the first gripping unit and the second gripping unit and transferring the gripped material; And a first pitch adjustment unit coupled to the transfer unit and supporting the first gripping unit, and moving the first gripping unit in a direction approaching and spaced apart from the second gripping unit. Can be provided.

The gap between the first gripping unit and the second gripping unit may be adjusted based on the gap between pocket portions provided on a tray in which the conveyed material is loaded.

The first pitch adjustment unit may include a first pitch adjustment movable block to which the first gripping unit is coupled; A first pitch adjustment guide part connected to the first pitch adjustment movable block part and guiding the movement of the first pitch adjustment movable block part; And a first pitch adjustment driving unit connected to the first pitch adjustment movable block unit and moving the first pitch adjustment movable block unit.

The first holding unit and the second holding unit may be a vacuum suction type holding unit that vacuum suctions the conveyed material.

The vacuum adsorption type holding unit includes: a head frame; A support part for an adsorption part connected to the head frame; And an adsorption part supported by the support part for the adsorption part to vacuum-adsorb the conveyed material.

A plurality of adsorption units may be provided and may be spaced apart from each other.

The adsorption unit may include an adsorption pad unit in contact with the conveyed material; And an adsorption body part connected to the support for the adsorption part, the adsorption pad part being coupled to the adsorption pad part, and a suction pipe for supplying a suction force to the adsorption pad part therein.

Each of the first gripping unit and the second gripping unit may further include a tilting module coupled to the head frame and configured to rotate the conveyed material relative to the head frame.

The tilting module may include a tilting central shaft portion supported by the head frame and rotatably coupled to the support portion for the suction portion; And a tilting driving unit disposed to be spaced apart from the tilting central axis, supported by the head frame, connected to the support for the adsorption unit, and rotate the support for the adsorption unit by pressing the support for the adsorption unit.

The tilting driving unit may include a pressure cylinder body rotatably coupled to the head frame; And a pressure cylinder rod part which is relatively movably connected to the pressurizing cylinder body part and rotatably coupled to the support part for the adsorption part.

The transfer unit includes: a vertical direction moving unit configured to move the first gripping unit and the second gripping unit up/down in a vertical direction; And a horizontal moving part connected to the vertical moving part and moving the first gripping unit and the second gripping unit in a horizontal direction.

It may further include a second pitch control unit coupled to the transfer unit, supporting the second gripping unit, and moving the second gripping unit in a direction approaching and spaced apart from the first gripping unit.

The second pitch adjustment unit may include a second pitch adjustment movable block to which the second gripping unit is coupled; A second pitch adjusting guide part connected to the second pitch adjusting moving block part and guiding the movement of the second pitch adjusting moving block part; And a second pitch adjustment driving unit connected to the second pitch adjustment movable block unit and moving the second pitch adjustment movable block unit.

The transfer material is provided by stacking a plurality of pieces, and is connected to the first gripping unit, and another transfer connected to the transfer material gripped by the first gripping unit so that one transferred material is gripped by the first gripping unit. A first separation unit for separating water; And a second separating unit connected to the second holding unit and separating another transported object connected to the transported object held by the second holding unit so that one transported object is held by the second holding unit. Including, each of the first separation unit and the second separation unit, an air nozzle unit for injecting air in the lateral direction of the transport material; And a nozzle support part coupled to the holding unit and supporting the air nozzle part.

The air nozzle part may be coupled to the nozzle support part so that the spray angle of the air sprayed from the air nozzle part may be variable, so that the nozzle support part may be relatively rotatable.

A first sheet counting unit connected to the first gripping unit and sensing the number of transported objects gripped by the first gripping unit; And a second sheet counting unit connected to the second gripping unit and sensing the number of objects to be conveyed held by the second gripping unit.

Each of the first and second sheet detection units may include: a light emitting unit that irradiates a sensing beam toward the conveyed object; And a light-receiving unit that is spaced apart from the light-emitting unit and receives the sensing beam that has passed through the transport, wherein each of the first and second sheets sensing units passes through the transported object. It is possible to detect the number of pieces of transported material gripped by the gripping unit through the transmission amount of the sensing beam.

According to another aspect of the present invention, a pitch adjustment step in which the first gripping unit is moved in a direction approaching and spaced apart from the second gripping unit to adjust the distance between the first gripping unit and the second gripping unit; A gripping step of each of the first gripping unit and the second gripping unit gripping the conveyed object; And a transfer step of transferring the conveyed material held by each of the first holding unit and the second holding unit.

The gap between the first gripping unit and the second gripping unit may be adjusted based on the gap between pocket portions provided on a tray in which the conveyed material is loaded.

It may further include a number of sheets detecting step of detecting the number of transported objects gripped by the first gripping unit and the second gripping unit.

The transfer material is provided by stacking a plurality of the transfer material, and the transfer material gripped by each of the first gripping unit and the second gripping unit so that one transfer material is gripped by each of the first gripping unit and the second gripping unit. A separation step of separating the other conveyed material to be contacted may be further included, and the number of sheets detection step may be performed after the separation step.

The transfer material is provided by stacking a plurality of the transfer material, and the transfer material gripped by each of the first gripping unit and the second gripping unit so that one transfer material is gripped by each of the first gripping unit and the second gripping unit. A separation step of separating the other conveyed material to be contacted may be further included, and the separation step may be performed after the number of sheets detection step.

The separating step may include an air injection step of injecting air in a lateral direction of the conveyed object.

The separating step may further include a tilting step of rotating the conveyed object gripped by each of the first gripping unit and the second gripping unit by a predetermined angle, and the air spraying step may be performed after the tilting step.

In the separating step, before the first holding unit and the second holding unit grip the transported object, air is injected from the first holding unit and the second holding unit toward the transported object to vibrate the transported object. It may further include a step.

The transfer step may include a return step of rotating the conveyed object gripped by each of the first gripping unit and the second gripping unit by a predetermined angle in a direction opposite to the direction rotated in the tilting step.

The transfer step may include a moving step of integrally moving the first gripping unit and the second gripping unit to move the transported object gripped by the gripping unit to a predetermined position; And a loading step of loading the conveyed object gripped in the holding unit at the predetermined position.

The gripping step may include a vacuum adsorption step of applying a vacuum negative pressure to each of the first gripping unit and the second gripping unit in contact with the conveyed material; A vacuum degree measuring step of measuring the magnitude of the vacuum sound pressure applied to each of the first holding unit and the second holding unit; And an error transmission step of transmitting a vacuum level error signal when the level of the vacuum sound pressure is out of the range of the previously input reference sound pressure.

Embodiments of the present invention include a first pitch adjustment unit for moving the first gripping unit in a direction approaching and spaced apart from the second gripping unit, thereby reducing the distance between the first gripping unit and the second gripping unit. It can be adjusted based on the distance between the pockets provided in the tray to be loaded, and accordingly, the first and second gripping units each grip the transported material loaded in the pocket, and then simultaneously perform the next process. It can be delivered to reduce the tac time.

1 is a view showing a conveyed material conveying apparatus according to a first embodiment of the present invention.
2 is a plan view of FIG. 1.
3 is a side view showing the first gripping unit in FIG. 1.
4 is a side view illustrating a second gripping unit in FIG. 1.
5 is a view showing a tray for loading the conveyed material conveyed by the conveyed material conveying device of FIG. 1.
6 is a plan view of FIG. 5.
7 is a diagram illustrating a first gripping unit, a first separating unit, and a first sheet counting unit of FIG. 1.
8 is a diagram illustrating the first separation unit of FIG. 7.
9 is a view showing a tilted state of the conveyed material vacuum-adsorbed in the gripping portion of FIG. 7.
10 to 15 are operational state diagrams of the transport device of FIG. 1.
16 is a flowchart illustrating a method of transporting a transported object according to the transporting device of FIG. 1.
17 is a flow chart showing a method of transporting a transported material according to a second embodiment of the present invention.
18 is a view showing a conveying material conveying apparatus according to a third embodiment of the present invention.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the implementation of the present invention, reference should be made to the accompanying drawings illustrating preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, the present invention will be described in detail by describing a preferred embodiment of the present invention with reference to the accompanying drawings. However, in describing the present invention, a description of a function or configuration that is already known will be omitted in order to clarify the gist of the present invention.

1 is a view showing a transport device according to a first embodiment of the present invention, Figure 2 is a plan view of Figure 1, Figure 3 is a side view showing the first gripping unit in Figure 1, Figure 4 1 is a side view showing the second gripping unit, FIG. 5 is a view showing a tray for loading the conveyed material transferred by the conveyed material conveying device of FIG. 1, FIG. 6 is a plan view of FIG. 5, and FIG. 7 1 is a view showing the first gripping unit, the first separation unit, and the first sheet counting unit, FIG. 8 is a view showing the first separation unit of FIG. 7, and FIG. 9 is a vacuum in the gripping part of FIG. It is a diagram showing a tilted state of the adsorbed conveyed material, FIGS. 10 to 15 are diagrams illustrating an operation state of the conveyed material conveying device of FIG. Is a flow chart.

The conveying material conveying apparatus according to this embodiment includes a first grasping unit 110 for grasping the conveyed material G from a plurality of conveyed material G stacked, as shown in FIGS. 1 to 15, and 1 Another transport object connected to the holding unit 110 and connected in contact with the transport object G held by the first holding unit 110 so that one transport object G is held by the first holding unit 110 A first separating unit 120 separating G), and a first sheet counting unit connected to the first gripping unit 110 and detecting the number of transported objects G gripped by the first gripping unit 110 130), a second gripping unit 110a for gripping the conveyed material G from a plurality of conveyed materials G that are disposed and spaced apart from the first gripping unit 110 and stacked, and a second gripping unit 110a ) Is connected to the second gripping unit 110a so that one conveyed material G is gripped by the second gripping unit 110a to separate the other conveyed material G that is in contact with the conveyed material G gripped by the second gripping unit 110a. A second separation unit (120a), a second sheet number detection unit (130a) connected to the second gripping unit (110a) and sensing the number of transported objects (G) gripped by the second gripping unit (110a), The transfer unit 140 is coupled to the 1 gripping unit 110 and the second gripping unit 110a to transfer the gripped conveyed object (G), and the first gripping unit 110 is coupled to the transfer unit 140 A first pitch adjustment unit 150 supporting and moving the first gripping unit 110 in a direction approaching and spaced apart from the second gripping unit 110a, the first gripping unit 110 and the first separation unit ( 120), the first sheet counting unit 130, the second gripping unit 110a, the second separating unit 120a, the second sheet counting unit 130a, the transfer unit 140, and the first pitch control unit 150 ) And a control unit (not shown) for controlling.

In this embodiment, the first holding unit 110, the first separating unit 120, and the first sheet counting unit 130 are provided to be integrally movable by the transfer unit 140. In addition, the second holding unit 110a, the second separating unit 120a, and the second sheet counting unit 130a are provided to be integrally movable by the transfer unit 140.

As described above, the first holding unit 110, the first separating unit 120, and the first sheet counting unit 130 are provided to be movable integrally by the transfer unit 140, so that a plurality of stacked conveyed objects (G ) To separate the transported object (G) individually, detect the number of separated transported object (G), and deliver the confirmed number of transported object (G) to the next process, and can be performed in one device. Accordingly, the device's footprint and tack time are reduced.

Similarly, the second holding unit 110a, the second separating unit 120a, and the second sheet counting unit 130a are provided to be integrally movable by the transfer unit 140, so that a plurality of stacked conveyed objects (G) Separating the conveyed material (G) individually in the process, detecting the number of separated conveyed material (G), and delivering the confirmed number of conveyed material (G) to the next process can be performed in one device, accordingly. The device footprint and tack time are reduced.

A plurality of conveyed objects (G) are stacked and loaded on the tray (T). In this embodiment, a glass substrate for an organic light-emitting diode display is used as the conveyed material G, but the scope of the present invention is not limited, and various products such as a flexible film are used as the conveyed material G ).

The tray (T) loads the conveyed material (G). In this tray (T), as shown in FIGS. 5 and 6, six pocket portions (P) for accommodating the stacked transport materials (G) are provided, the number of pocket portions (P) and the pocket portions (P) Intervals may be provided in various ways.

In this embodiment, the first holding unit 110 and the second holding unit 110a are provided with the same structure. Accordingly, the structure of the first gripping unit 110 will be described in detail below, and the structure of the second gripping unit 110a will be omitted for convenience of description.

Each of the first gripping unit 110 and the second gripping unit 110a grips the conveyed material G from the stacked plurality of conveyed materials G. Each of the first gripping unit 110 and the second gripping unit 110a according to the present exemplary embodiment includes a vacuum suction type gripping unit that vacuum sucks the conveyed material G.

This vacuum suction type holding unit, as shown in detail in FIG. 7, is supported by the head frame 111 and the support unit 112 for the suction unit connected to the head frame 111 and the support unit 112 for the suction unit and transfers Includes an adsorption unit 113 for vacuum adsorption of water (G), and a tilting module (117, 118, 119) that is coupled to the head frame 111 and rotates the conveyed material (G) relative to the head frame 111 do.

The support unit 112 for the adsorption unit is connected to the head frame 111. As shown in detail in FIG. 7, the support part 112 for the adsorption part is disposed in the lower area of the head frame 111. In this embodiment, the support part 112 for the adsorption part is provided in a rectangular plate shape.

The adsorption unit 113 is supported by the support unit 112 for the adsorption unit to vacuum-adsorb the conveyed material G. In this embodiment, a plurality of adsorption units 113 are provided and are disposed to be spaced apart from each other.

This adsorption unit 113, as shown in detail in FIG. 7, is connected to the adsorption pad part 114 in contact with the conveyed material (G) and the support part 112 for the adsorption part, and the adsorption pad part 114 is coupled And a suction pipe (not shown) for supplying suction force to the suction pad part 114 is provided therein.

The adsorption pad portion 114 is in contact with the upper surface of the conveyed material (G). The lower end of the suction pad part 114 is provided in an inverted cup shape as shown in detail in FIG. 7.

The body portion for adsorption 115 is connected to the support portion 112 for the adsorption unit. The body portion for adsorption 115 is provided in a long bar shape as shown in detail in FIG. 7. The suction pad part 114 is coupled to the lower end of the suction body part 115.

In this embodiment, a suction pipe (not shown) for supplying suction force to the suction pad part 114 is provided in the suction body part 115. This suction pipe (not shown) is connected to a connection pipe (not shown) through which air flows, and the connection pipe (not shown) is connected to an air pump (not shown). The adsorption pad unit 114 can inhale air by forward pumping of an air pump (not shown), and conversely, the adsorption pad unit 114 can inject air by reverse pumping by an air pump (not shown). .

The air suction from the suction pad part 114 serves to adsorb the conveyed material G to the suction pad part 114.

On the other hand, air injection from the suction pad part 114 acts to destroy the vacuum negative pressure in the suction pipe (not shown). In addition, air injection from the adsorption pad unit 114 located in the upper area of the stacked transfer material G causes vibration to the stacked transfer material G disposed in the lower area of the adsorption pad unit 114 It facilitates the separation of the transferred material (G).

In addition, a pressure sensor (not shown) for measuring the vacuum sound pressure of a suction pipe (not shown) is provided in the body portion 115 for adsorption. This pressure sensor (not shown) measures the magnitude of the vacuum negative pressure applied to the suction pipe (not shown) when the suction pad unit 114 vacuums the conveyed material G.

The tilting modules 117, 118, and 119 are coupled to the head frame 111. These tilting modules 117, 118, and 119 rotate the conveyed material G relative to the head frame 111.

The tilting modules 117, 118, and 119 according to the present embodiment are supported by the head frame 111 and the tilting center to which the support part 112 for the adsorption part is rotatably coupled, as shown in detail in FIGS. 7 and 9 The shaft part 117 and the tilting central shaft part 117 are spaced apart from each other and are supported by the head frame 111 and connected to the support part 112 for the adsorption part, and the support part 112 for the adsorption part by pressing the support part 112 for the adsorption part. It includes a tilting driving unit (118, 119) for rotating.

The tilting central axis portion 117 is fixed to the head frame 111. A support part 112 for an adsorption part is rotatably coupled to the tilting central shaft part 117.

The tilting driving units 118 and 119 are arranged to be spaced apart from the tilting central axis 117 as shown in FIGS. 7 and 9. These tilting driving units 118 and 119 are supported by the head frame 111 and connected to the support unit 112 for the suction unit to pressurize the support unit 112 for the suction unit to rotate the support unit 112 for the suction unit.

In this embodiment, the tilting drive unit 118, 119, as shown in detail in Figs. 7 and 9, a pressure cylinder body portion 118 rotatably coupled to the head frame 111, and a pressure cylinder body portion ( It includes a pressurizing cylinder rod part 119 which is connected to 118 so as to be movable and rotatably coupled to the support part 112 for the adsorption part.

The distal region of the pressure cylinder body portion 118 is rotatably coupled to the head frame 111.

The pressure cylinder rod portion 119 is connected to the pressure cylinder body portion 118 in a relative movable manner. The end region of the pressure cylinder rod portion 119 is rotatably coupled to the support portion 112 for the adsorption portion.

In this embodiment, by the relative movement of the pressure cylinder rod part 119 to the cylinder body part, the support part 112 for the adsorption part is rotated with the tilting central axis part 117 as a rotational axis, and accordingly, the adsorption part 113 The adsorbed conveyed material G is rotated relative to the head frame 111.

On the other hand, the first pitch adjustment unit 150 It is coupled to the transfer unit 140. The first pitch adjustment unit 150 is connected to the first gripping unit 110 to support the first gripping unit 110.

In this embodiment, the first pitch adjustment unit 150 moves the first gripping unit 110 in a direction approaching and spaced apart from the second gripping unit 110a.

The first pitch adjustment unit 150, as shown in detail in FIGS. 1 to 3, a first pitch adjustment movable block unit 151 to which the first gripping unit 110 is coupled, and a first pitch adjustment movable block It is connected to the unit 151, the first pitch adjustment guide unit 152 for guiding the movement of the first pitch adjustment movable block unit 151, and the first pitch adjustment movable block unit 151 is connected to the first pitch It includes a first pitch adjustment driving unit 153 for moving the adjustment movable block unit 151.

The first gripping unit 110 is coupled to the first pitch adjustment movable block unit 151. The first pitch adjustment movable block unit 151 is moved in a horizontal direction to move the first gripping unit 110 in a direction approaching and spaced apart from the second gripping unit 110a.

The first pitch adjustment guide portion 152 is connected to the first pitch adjustment movement block portion 151 to guide the movement of the first pitch adjustment movement block portion 151.

The first pitch adjustment driving unit 153 is connected to the first pitch adjustment movement block unit 151 to move the first pitch adjustment movement block unit 151. In the present embodiment, a first pitch adjustment driving unit 153, a movable nut (not shown) coupled to the first pitch adjustment movable block unit 151, and a ball screw (not shown) engaged with the movable nut (not shown) , And a servo motor for rotating the ball screw (not shown).

As described above, the conveyed material conveying device according to this embodiment includes a first pitch adjustment unit 150 for moving the first gripping unit 110 in a direction approaching and spaced apart from the second gripping unit 110a, The first gripping unit 110 and the first gripping unit 110 are moved in a direction approaching and spaced apart from the second gripping unit 110a to correspond to the gap between the pocket portions P provided on the tray T. The interval between the second holding units 110a can be adjusted, and accordingly, it is possible to actively respond to various intervals of the pocket portion P.

On the other hand, in this embodiment, the first separation unit 120 and the second separation unit 120a are provided with the same structure. Accordingly, the structure of the first separation unit 120 will be described in detail below, and the structure of the second separation unit 120a will be omitted for convenience of description.

Each of the first separation unit 120 and the second separation unit 120a is connected to the first holding unit 110 and the second holding unit 110a, respectively. Each of the first separation unit 120 and the second separation unit 120a includes a first holding unit (G) to be held in each of the first holding unit 110 and the second holding unit 110a. 110) and the second gripping unit 110a, the other conveyed material G that is in contact with the conveyed material G gripped by each of the second gripping units 110a are separated.

When each of the first holding unit 110 and the second holding unit 110a vacuum-adsorbs the transported object G disposed at the top and then rises, the surface tension of the liquid deposited on the stacked transported object G and Only the transported object G vacuum-adsorbed to the holding unit due to electrostatic force between the stacked transported objects G is not moved upward, and the entire stacked transported object G rises.

Each of the first separation unit 120 and the second separation unit 120a described above separates another conveyed material G that is in contact with the lower surface of the conveyed material G gripped by the gripping unit.

The first separating unit 120 according to the present embodiment, as shown in Figs. 7 to 13, is coupled to an air nozzle unit 121 that injects air in the lateral direction of the conveyed object (G), and the holding unit And it includes a nozzle support unit 125 for supporting the air nozzle unit 121.

The air nozzle unit 121 injects air in the lateral direction of the conveyed object (G). As shown in FIG. 8, the air nozzle unit 121 is provided to protrude from the outer circumferential surface of the injection body 122 provided in a cylindrical shape, and a plurality of injection nozzles through which air is injected ( 123) are spaced apart from each other.

The nozzle support 125 is coupled to the gripping unit. The air nozzle unit 121 is supported on the nozzle support unit 125.

In the present embodiment, the air nozzle unit 121 is coupled to the nozzle support unit 125 so that the injection angle of the air injected from the air nozzle unit 121 can be variable, so that the nozzle support unit 125 is relatively rotatable.

In this way, the air nozzle unit 121 is coupled to the nozzle support unit 125 so as to be relatively rotatable, so that the injection angle of the air injected from the air nozzle unit 121 can be matched with the tilting angle of the conveyed object (G). .

The air nozzle unit 121 injects air at the same angle as the tilting angle of the transported object G, thereby increasing the amount of air penetrating into the gap between the stacked transported objects G. Facilitates separation.

On the other hand, in the present embodiment, the first sheet number detection unit 130 and the second sheet number detection unit 130a are provided with the same structure. Accordingly, the structure of the first sheet detection unit 130 will be described in detail below, and the structure of the second sheet detection unit 130a will be omitted for convenience of description.

Each of the first sheet number detection unit 130 and the second sheet number detection unit 130a is connected to the first holding unit 110 and the second holding unit 110a, respectively. Each of the first and second sheet detection units 130 and 130a detects the number of conveyed objects G gripped by the first and second gripping units 110 and 110a.

In the present embodiment, each of the first sheet counting unit 130 and the second sheet counting unit 130a separates the transport material G in which the first separation unit 120 and the second separation unit 120a are stacked. Afterwards, the number of conveyed objects G gripped in each of the first and second gripping units 110 and 110a may be sensed, and the first separation unit 120 and the second separation unit 120a are stacked. Before separating the transferred material G, the number of transferred materials G gripped by each of the first gripping unit 110 and the second gripping unit 110a may be detected.

In addition, the number of sheets detecting unit may detect the number of transported objects G gripped by the holding unit both before and after separating the transported objects G in which the separation unit is stacked.

As shown in detail in FIG. 14, the first number of sheets detection unit 130 is disposed to be spaced apart from the light-emitting unit 131 and the light-emitting unit 131 to irradiate a sensing beam toward the transported object (G). The light-receiving unit 133 that receives the sensing beam that has passed through the conveyed object G, the light-emitting unit 131 and the light-receiving unit 133 are connected to each other, ) And a calculation unit (not shown) for calculating the transmission amount of the sensing beam by comparing the amount of light received by the sensing beam.

The sensing beam irradiated from the light emitting unit 131 passes through the tilted transport material G and reaches the light receiving unit 133. At this time, by comparing the amount of light of the sensing beam irradiated by the light emitting unit 131 and the amount of light for sensing received by the light receiving unit 133, it is possible to know the amount of transmission of the sensing beam that has passed through the transport material G. The number of transported objects G gripped by the first holding unit 110 is compared with the transmission amount data according to the number of transported objects G previously input to the calculation unit (not shown).

On the other hand, the transfer unit 140 is connected to the first gripping unit 110 and the second gripping unit 110a to transfer the gripped material (G). The transfer unit 140 transfers the gripped object G based on the results sensed by the first and second sheets detection unit 130 and the second sheet detection unit 130a. That is, when only one transported object G is held in each of the first holding unit 110 and the second holding unit 110a, the transported object G is transferred.

In this embodiment, the first holding unit 110, the first separating unit 120, and the first sheet counting unit 130 are provided to be integrally movable by the transfer unit 140. In addition, the second holding unit 110a, the second separating unit 120a, and the second sheet counting unit 130a are provided to be integrally movable by the transfer unit 140.

As described above, the first holding unit 110, the first separating unit 120, and the first sheet counting unit 130 are provided to be movable integrally by the transfer unit 140, so that a plurality of stacked conveyed objects (G ) To separate the transported object (G) individually, detect the number of separated transported object (G), and deliver the confirmed number of transported object (G) to the next process, and can be performed in one device. Accordingly, the device's footprint and tack time are reduced.

Similarly, the second holding unit 110a, the second separating unit 120a, and the second sheet counting unit 130a are provided to be integrally movable by the transfer unit 140, so that a plurality of stacked conveyed objects (G) Separating the conveyed material (G) individually in the process, detecting the number of separated conveyed material (G), and delivering the confirmed number of conveyed material (G) to the next process can be performed in one device, accordingly. The device footprint and tack time are reduced.

The transfer unit 140 according to the present embodiment includes vertical moving parts 141 and 142 that move the first gripping unit 110 and the second gripping unit 110a up/down in the vertical direction. 143) and a horizontal direction moving part 145, 146, 147 connected to the vertical moving part 141, 142, 143 and moving the holding unit in the horizontal direction.

The vertical direction moving parts 141, 142, and 143 move the first gripping unit 110 and the second gripping unit 110a up/down in the vertical direction. These vertical moving parts 141, 142, 143 include a moving block part 141 for vertical movement to which the first gripping unit 110 and the second gripping unit 110a are connected, and a moving block part for vertical movement ( 141, the vertical movement guide portion 142 for guiding the movement of the vertical movement movement block portion 141, and the vertical movement movement block portion 141 connected to the vertical movement movement block portion 141 It includes a driving unit 143 for vertical movement to move.

The horizontal moving parts 145, 146, 147 are connected to the vertical moving parts 141, 142, 143. The horizontal moving parts 145, 146, 147 move the vertical moving parts 141, 142, 143 in the horizontal direction to move the holding unit connected to the vertical moving parts 141, 142, 143 in the horizontal direction. .

These horizontal moving parts 145, 146, 147 are connected to the moving block part 145 for horizontal movement to which the vertical moving parts 141, 142, 143 are coupled, and the moving block part 145 for moving horizontally. It is connected to the guide part 146 for horizontal direction movement to guide the movement of the movement block part 145 for horizontal direction movement and the movement block part 145 for horizontal direction movement, and moves the movement block part 145 for horizontal direction movement. It includes a driving unit 147 for direction movement.

Hereinafter, a method of transporting a transported object according to the transporting device according to the present embodiment will be described with reference to FIGS. 1 to 16.

In this embodiment, as shown in FIG. 16, the first gripping unit 110 is moved in a direction approaching and spaced apart from the second gripping unit 110a, and the first gripping unit 110 The pitch adjustment step (S100) in which the interval between the and the second gripping unit 110a is adjusted, and the first gripping unit 110 is transferred to the second gripping unit 110a in a plurality of stacked transfer objects G The gripping step (S110) of gripping the water (G), and the first gripping unit 110 so that the first gripping unit 110 holds one conveyed material G to each of the second gripping units 110a. 2 Separation step (S120) of separating the other conveyed material (G) in contact with the conveyed material (G) held in each of the gripping units (110a), and the first gripping unit 110 is a second gripping unit (110a) The number of sheets detecting step (S130) of sensing the number of the conveyed objects G held in each, and the transfer in which the first grasping unit 110 transfers the conveyed objects G held in each of the second grasping units 110a It includes step S140.

In the pitch adjustment step (S100), the first gripping unit 110 is moved in a direction approaching and spaced apart from the second gripping unit 110a, so that the gap between the first gripping unit 110 and the second gripping unit 110a Is regulated.

The gap between the first gripping unit 110 and the second gripping unit 110a is adjusted based on the gap between the pocket portions P provided on the tray T in which the stacked transfer materials G are loaded. That is, the first gripping unit 110 is moved in a direction approaching and spaced apart from the second gripping unit 110a to correspond to the gap between the pocket portions P provided on the tray T, so that the first gripping unit 110 ) And the second gripping unit 110a is adjusted.

In the gripping step (S110), the gripping unit grips the transferred material G from the plurality of transferred materials G to be stacked. The gripping step (S110) includes a vacuum adsorption step (S111) in which a vacuum negative pressure is applied to each of the first gripping unit 110 and the second gripping unit 110a in contact with the conveyed material (G), and the first gripping unit. A vacuum level measurement step (S112) of measuring the level of the vacuum sound pressure applied to each of the 110 and the second gripping units 110a, and a vacuum level error signal when the level of the vacuum sound pressure is out of the range of the previously input reference sound pressure. It includes an error transmission step (S113) of transmitting.

In the vacuum adsorption step (S111), the first gripping unit 110 and the second gripping unit 110a descend to contact the upper surface of the transfer material G on which the adsorption unit 113 is stacked, and the transfer material G A vacuum negative pressure is applied to the adsorption unit 113 in contact with.

In the vacuum degree measurement step (S112), the magnitude of the vacuum negative pressure applied to the adsorption unit 113 is measured. The magnitude of the vacuum sound pressure applied to the adsorption unit 113 is measured by a pressure sensor (not shown) provided in the adsorption body unit 115.

In the error transmission step S113, when the level of the vacuum sound pressure is out of the preset range of the standard sound pressure, a vacuum degree error signal is transmitted. The control unit receives information on the magnitude of the vacuum sound pressure measured by a pressure sensor (not shown), compares it with the magnitude of the reference sound pressure previously input, and transmits an error signal when the magnitude of the vacuum sound pressure is out of the good range of the reference sound pressure. The entire facility is stopped and an alarm sounds according to the error signal.

In the separating step (S120), the first holding unit 110 and the second holding unit 110a so that one transported material G is held in each of the first holding unit 110 and the second holding unit 110a. The other conveyed material (G) connected in contact with the conveyed material (G) held in each is separated.

In this separation step (S120), each of the first holding unit 110 and the second holding unit 110a before each of the first holding unit 110 and the second holding unit 110a grips the transported material G In the step of vibrating the transported object G by spraying air toward the transported object G, and the transported object G gripped in each of the first holding unit 110 and the second holding unit 110a is determined in advance. It includes a tilting step of rotating by an angle and an air spraying step of injecting air in a lateral direction of the conveyed object (G).

As shown in FIG. 10, in the step of vibrating the conveyed material G, air is injected toward the stacked conveyed material G from the adsorption pad part 114 located in the upper region of the stacked conveyed material G. . This air injection induces vibration in the stacked conveyed material G disposed in the lower region of the adsorption pad part 114 to facilitate separation of the stacked conveyed material G.

As shown in detail in FIG. 13, in the tilting step, the conveyed material G gripped by the gripping unit is rotated by a predetermined angle. As the conveyed object G is rotated by a predetermined angle, the tilted lower portion of the conveyed object G is disposed inside the pocket portion P and does not deviate from the pocket portion P. The lower part of the conveyed object G tilted in this way is placed inside the pocket part P, so that the conveyed object G that is in contact with the lower surface of the conveyed object G vacuum-adsorbed by the holding unit is separated. It is located inside the pocket part P without leaving the pocket part P.

As shown in FIG. 13, in the air injection step, air is injected in the lateral direction of the conveyed object G. In this embodiment, the air nozzle unit 121 injects air at the same angle as the tilting angle of the transported object G, thereby increasing the amount of air penetrating into the gap between the stacked transported objects G. It is easy to separate water (G).

In the number of sheets detecting step S130, the number of conveyed objects G gripped by each of the first gripping unit 110 and the second gripping unit 110a is sensed. In this embodiment, the number of sheets detecting step (S130) is performed by comparing the amount of light of the sensing beam irradiated from the light emitting unit 131 and the amount of light of the sensing beam received by the light receiving unit 133, The transmission amount of the sensing beam is sensed, and the transmission amount data according to the number of transported objects G input in advance into the calculation unit (not shown) is compared to each of the first holding unit 110 and the second holding unit 110a. The number of gripped objects G is detected.

In the transfer step (S140), the gripped object (G) is transferred based on the detection result detected in the number of sheets detection step (S130). The transfer step (S140) includes a return step of rotating the conveyed material G gripped by the gripping unit by a predetermined angle in a direction opposite to the direction rotated in the tilting step, and the first gripping unit 110 and the second gripping A moving step of moving the unit 110a integrally to move the transported object G gripped by the first gripping unit 110 and the second gripping unit 110a to a predetermined position, and a first gripping at a predetermined position It includes a loading step of loading the conveyed material (G) gripped in the unit 110 and the second gripping unit (110a).

In the return step, the conveyed object held by the first gripping unit 110 and the second gripping unit 110a is rotated in a direction opposite to the direction rotated in the tilting step, thereby having a horizontal posture before the tilting step.

In the moving step, the transported material G gripped by each of the first gripping unit 110 and the second gripping unit 110a by the operation of the horizontal moving parts 145, 146, and 147 is a predetermined position for the next process. Is moved to.

In the loading step, the transported material G gripped by each of the first gripping unit 110 and the second gripping unit 110a is lowered and transferred to the next process by the operation of the vertical movement parts 141, 142, and 143. .

As described above, the conveying material conveying device according to the present embodiment includes a first pitch adjustment unit 150 for moving the first gripping unit 110 in a direction approaching and spaced apart from the second gripping unit 110a, The gap between the first gripping unit 110 and the second gripping unit 110a can be adjusted based on the gap between the pockets P provided on the tray T in which the transported material G is loaded, and accordingly Each of the first gripping unit 110 and the second gripping unit 110a grips the transported material G loaded in the pocket and simultaneously transfers it to the next process, thereby reducing tack time.

17 is a flow chart illustrating a method of transporting a transported material according to a second embodiment of the present invention.

Compared with the first embodiment, the present embodiment has only a difference in the order of the separating step (S30) and the number of sheets detecting step (S220), and in other configurations, it is the same as the configuration of the first embodiment of FIGS. In the following, the same reference numerals are used for the same configuration and description thereof will be omitted.

In this embodiment, the number of sheets detection step (S220) is performed before the separation step (S230). As described above, in the conveying method according to the present embodiment, the number of sheets detecting step S220 is performed before the separating step S230, so that one conveyed material G is added to the first gripping unit 100 and the second gripping unit 110a. ) Is gripped, the separation step (S120) may be omitted, and accordingly, the tack time may be reduced.

18 is a view showing a conveying material conveying apparatus according to a third embodiment of the present invention.

Compared with the first embodiment, this embodiment has only a difference in that the second pitch control unit 160 is added, and in other configurations, it is the same as the configuration of the first embodiment of FIGS. For the same configuration, the same reference numerals are used and the description thereof is omitted.

The conveyed material conveying device according to the present embodiment is coupled to the transfer unit 140 and supports the second gripping unit 110a, and the second gripping unit 110a is approached and spaced apart from the first gripping unit 110. It further includes a second pitch control unit 160 to move in the direction that is.

This second pitch adjustment unit 160, as shown in detail in FIG. 18, a second pitch adjustment movable block portion 161 to which the second gripping unit 110a is coupled, and a second pitch adjustment movable block portion ( 161, the second pitch adjustment guide portion 162 for guiding the movement of the second pitch adjustment movement block portion 161, and the second pitch adjustment movement block connected to the second pitch adjustment movement block portion 161 It includes a second pitch adjustment driving unit 163 for moving the unit 161.

A second gripping unit 110a is coupled to the second pitch adjustment movable block part 161. The second pitch adjustment movable block unit 161 is moved in a horizontal direction to move the second gripping unit 110a in a direction approaching and spaced apart from the first gripping unit 110.

The second pitch adjustment guide unit 162 is connected to the second pitch adjustment movement block unit 161 to guide the movement of the second pitch adjustment movement block unit 161.

The second pitch adjustment driving unit 163 is connected to the second pitch adjustment movement block unit 161 to move the second pitch adjustment movement block unit 161. In this embodiment, a second pitch adjustment driving unit 163, a moving nut (not shown) coupled to the second pitch adjustment moving block unit 161, and a ball screw (not shown) engaged with the moving nut (not shown) , And a servo motor for rotating the ball screw (not shown).

As described above, the conveyed material conveying device according to the present embodiment further includes a second pitch adjustment unit 160 for moving the second gripping unit 110a in a direction approaching and spaced apart from the first gripping unit 110. , There is an advantage in that the tack time can be further reduced by further shortening the interval adjustment time between the first holding unit 110 and the second holding unit 110a.

Although the present embodiment has been described in detail with reference to the drawings above, the scope of the present embodiment is not limited to the above-described drawings and description.

As described above, the present invention is not limited to the described embodiments, and it is obvious to those of ordinary skill in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, such modifications or variations will have to belong to the scope of the claims of the present invention.

110: first gripping unit 110a: second gripping unit
111: head frame
112: adsorption part support part 113: adsorption part
114: adsorption pad part 115: adsorption body part
117: tilting central axis portion 118: pressurized cylinder body portion
119: pressure cylinder rod part 120: first separation unit
120a: second separation unit
121: air nozzle unit 122: spray body
123: spray nozzle 125: nozzle support
130: first sheet detection unit 130a: second sheet detection unit
131: light emitting unit
133: light receiving unit 140: transfer unit
141: moving block part for vertical movement
142: guide portion for vertical movement
143: driving part for vertical movement
145: moving block part for horizontal movement
146: guide portion for transverse movement
147: driving part for horizontal movement
150: first pitch adjustment unit 151: first pitch adjustment moving block unit
152: first pitch adjustment guide unit 153: first pitch adjustment drive unit
160: second pitch adjustment unit 161: second pitch adjustment moving block unit
162: second pitch adjustment guide unit 163: second pitch adjustment drive unit
G: Transfer material T: Tray
P: pocket

Claims (28)

A first gripping unit for gripping a transport material provided by stacking a plurality of them;
A second gripping unit disposed to be spaced apart from the first gripping unit and gripping the conveyed material;
A transfer unit connected to the first gripping unit and the second gripping unit and transferring the gripped material;
A first pitch control unit coupled to the transfer unit, supporting the first gripping unit, and moving the first gripping unit in a direction approaching and spaced apart from the second gripping unit;
A first sheet counting unit connected to the first gripping unit and sensing the number of transported objects gripped by the first gripping unit;
A second sheet counting unit connected to the second gripping unit and sensing the number of transported objects gripped by the second gripping unit;
A first separating unit connected to the first gripping unit and separating another conveyed material connected to the conveyed material held by the first gripping unit so that one conveyed material is gripped by the first gripping unit; And
A second separation unit connected to the second holding unit and separating another transported object connected to the transported object held by the second holding unit so that one transported object is held by the second holding unit, and ,
The first gripping unit and the second gripping unit are vacuum suction type gripping units that vacuum suck the conveyed material,
The vacuum adsorption type holding unit,
Head frame;
A support part for an adsorption part connected to the head frame; And
It is supported by the support for the adsorption part and includes an adsorption part for vacuum adsorption of the conveyed material,
Each of the first holding unit and the second holding unit,
It is coupled to the head frame, further comprising a tilting module for rotating the transport relative to the head frame,
Each of the first separation unit and the second separation unit,
An air nozzle unit for injecting air in a lateral direction of the conveyed object; And
It is coupled to the holding unit and includes a nozzle support portion supporting the air nozzle portion,
The first holding unit, the first separating unit, and the first sheet counting unit are provided to be integrally movable by the transfer unit,
And the second holding unit, the second separating unit, and the second sheet counting unit are provided to be integrally movable by the transfer unit. The method of claim 1,
The distance between the first holding unit and the second holding unit is adjusted based on the distance between the pockets provided on the tray in which the transported object is loaded. The method of claim 1,
The first pitch adjustment unit,
A first pitch adjustment movable block unit to which the first gripping unit is coupled;
A first pitch adjustment guide part connected to the first pitch adjustment movable block part and guiding the movement of the first pitch adjustment movable block part; And
The conveyed material conveying device including a first pitch adjustment driving unit connected to the first pitch adjustment movable block unit and moving the first pitch adjustment movable block unit. delete delete The method of claim 1,
The transfer material transfer device, characterized in that provided in a plurality of the adsorption unit and disposed to be spaced apart from each other. The method of claim 1,
The adsorption unit,
An adsorption pad part in contact with the conveyed material; And
A transported material conveying device comprising a body for adsorption connected to the support for the adsorption unit, the adsorption pad unit coupled to the adsorption pad unit, and a suction pipe for supplying a suction force to the adsorption pad unit. delete The method of claim 1,
The tilting module,
A tilting central shaft part supported by the head frame and rotatably coupled to the support part for the adsorption part; And
The conveyed material conveying device comprising a tilting driving unit disposed spaced apart from the tilting central axis, supported by the head frame and connected to the support for the adsorption unit, and pressurizes the support for the adsorption unit to rotate the support for the adsorption unit. The method of claim 9,
The tilting driving unit,
A pressure cylinder body portion rotatably coupled to the head frame; And
The conveyed material conveying device including a pressure cylinder rod part which is connected to the pressure cylinder body part so as to be relatively movable, and which is rotatably coupled to the support part for the adsorption part. The method of claim 1,
The transfer unit,
A vertical direction moving part for moving the first gripping unit and the second gripping unit up/down in a vertical direction; And
The conveyed material conveying device including a transverse moving part connected to the longitudinal moving part and moving the first gripping unit and the second gripping unit in a horizontal direction. The method of claim 1,
A transfer material transfer device comprising a second pitch adjustment unit coupled to the transfer unit and supporting the second gripping unit, and moving the second gripping unit in a direction approaching and spaced apart from the first gripping unit. The method of claim 12,
The second pitch adjustment unit,
A second pitch adjustment movable block unit to which the second gripping unit is coupled;
A second pitch adjusting guide part connected to the second pitch adjusting moving block part and guiding the movement of the second pitch adjusting moving block part; And
Conveyed material conveying apparatus including a second pitch adjustment driving unit connected to the second pitch adjustment movable block unit, and moving the second pitch adjustment movable block unit. delete The method of claim 1,
The air nozzle unit,
The conveyed material conveying device, characterized in that the relative rotation is coupled to the nozzle support so that the injection angle of the air injected from the air nozzle unit can be varied. The method of claim 1,
A first sheet counting unit connected to the first gripping unit and sensing the number of transported objects gripped by the first gripping unit; And
The conveyed material conveying device further comprises a second sheet number detecting unit connected to the second grasping unit and sensing the number of conveyed objects grasped by the second grasping unit. The method of claim 16,
Each of the first sheet number detection unit and the second sheet number detection unit,
A light emitting unit that irradiates a sensing beam toward the transported object; And
It is disposed to be spaced apart from the light emitting unit, and includes a light receiving unit for receiving the sensing beam passing through the transport,
Each of the first sheet number detection unit and the second sheet number detection unit detects the number of sheets of the conveyed object gripped by the holding unit through the amount of transmission of the sensing beam passing through the conveyed object. A pitch adjusting step in which the first gripping unit is moved in a direction approaching and spaced apart from the second gripping unit so that the distance between the first gripping unit and the second gripping unit is adjusted;
A gripping step of each of the first gripping unit and the second gripping unit gripping the conveyed object;
A sheet counting step of detecting the number of pieces to be conveyed by the first gripping unit and the second gripping unit by the first sheet counting unit and the second sheet counting unit respectively;
Separation step of separating another transported object connected to the transported object held by each of the first holding unit and the second holding unit so that one transported object is held by each of the first holding unit and the second holding unit ; And
A transfer step of transferring, by a transfer unit, the transported material gripped by each of the first holding unit and the second holding unit,
The transport is provided by stacking a plurality,
The first gripping unit grips the conveyed material;
The second gripping unit is disposed to be spaced apart from the first gripping unit to grip the conveyed object,
The transfer unit is connected to the first gripping unit and the second gripping unit and transfers the gripped conveyed material,
The first pitch control unit is coupled to the transfer unit and supports the first gripping unit, and moves the first gripping unit in a direction approaching and spaced apart from the second gripping unit,
The first separating unit is connected to the first holding unit to separate the other transported object connected to the transported object held by the first holding unit so that one transported object is held by the first holding unit,
The second separating unit is connected to the second gripping unit to separate the other conveyed material connected in contact with the conveyed material held by the second gripping unit so that one conveyed material is gripped by the second gripping unit,
The first gripping unit and the second gripping unit are vacuum suction type gripping units that vacuum suck the conveyed material,
The vacuum adsorption type holding unit,
Head frame;
A support part for an adsorption part connected to the head frame; And
It is supported by the support for the adsorption part and includes an adsorption part for vacuum adsorption of the conveyed material,
Each of the first holding unit and the second holding unit,
It is coupled to the head frame, further comprising a tilting module for rotating the transport relative to the head frame,
Each of the first separation unit and the second separation unit,
An air nozzle unit for injecting air in a lateral direction of the conveyed object; And
It is coupled to the holding unit and includes a nozzle support portion supporting the air nozzle portion,
The first holding unit, the first separating unit, and the first sheet counting unit are provided to be integrally movable by the transfer unit,
And the second holding unit, the second separating unit, and the second sheet counting unit are provided to be integrally movable by the transfer unit. The method of claim 18,
The transported material transfer method wherein the distance between the first gripping unit and the second gripping unit is adjusted based on a gap between pocket portions provided on a tray in which the transferred material is loaded. delete delete delete The method of claim 18,
The separation step,
Transport method comprising an air injection step of spraying air in the lateral direction of the transport object. The method of claim 23,
The separation step,
Further comprising a tilting step of rotating the conveyed object gripped by each of the first holding unit and the second holding unit by a predetermined angle,
A transport method in which the air spraying step is performed after the tilting step. The method of claim 23,
The separation step,
Before the first holding unit and the second holding unit grip the transported object, further comprising: vibrating the transported object by injecting air from the first holding unit and the second holding unit toward the transported object. Transport method of transported material. The method of claim 24,
The transfer step,
And a return step of rotating the transported object held by each of the first holding unit and the second holding unit by a predetermined angle in a direction opposite to the direction rotated in the tilting step. The method of claim 25,
The transfer step,
A moving step of moving the first gripping unit and the second gripping unit integrally to move the conveyed object gripped by the gripping unit to a predetermined position; And
The transported material transport method further comprising a loading step of loading the conveyed material gripped in the gripping unit at the predetermined position. The method of claim 18,
The gripping step,
A vacuum adsorption step of applying a vacuum negative pressure to each of the first gripping unit and the second gripping unit in contact with the conveyed material;
A vacuum degree measuring step of measuring the magnitude of the vacuum sound pressure applied to each of the first holding unit and the second holding unit; And
And an error transmission step of transmitting a vacuum level error signal when the level of the vacuum sound pressure is out of the range of the previously input standard sound pressure.

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