CN102490020B - Simple precision displacement platform - Google Patents
Simple precision displacement platform Download PDFInfo
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- CN102490020B CN102490020B CN 201110366955 CN201110366955A CN102490020B CN 102490020 B CN102490020 B CN 102490020B CN 201110366955 CN201110366955 CN 201110366955 CN 201110366955 A CN201110366955 A CN 201110366955A CN 102490020 B CN102490020 B CN 102490020B
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Abstract
The invention relates to a simple precision displacement platform, which comprises a base, a vibration isolator, an internal hexagonal fastening screw, a linear guide rail, an internal hexagonal set screw, a micro-displacement work table, a piezoelectric actuator, a linear grating bar and a linear motor, wherein the displacement platform is a precision one-dimensional displacement platform. As the displacement platform is provided with the linear motor and the piezoelectric actuator, compared with a traditional ball screw mode, the displacement platform has the advantages that intermediate mechanical transmission links are greatly decreased, and the length of a transmission chain is reduced to be zero. The displacement platform is capable of realizing large-displacement rapid positioning and small-displacement precision effective output. Besides, the displacement platform has the advantages of simple structure, high response speed, high precision, high dynamic stiffness, short acceleration and deceleration process, quietness in movement, low noise, high efficiency and the like, and can be used for the field of precision measurement and precision machining.
Description
Technical field
The invention belongs to the precision engineering technical field, refer in particular to a kind of Simple precision displacement platform, be used for Precision Machining and measurement.
Background technology
Along with the development of the relevant high-end fields such as electronic information, bioengineering, nanometer technology, the importance of Precision Machining and measuring technique highlights day by day.And Precision Machining and measuring technique dependence and Precision Machining and precision measurement equipment.The performance of precise machining equipment and precision measurement equipment directly affects processing and the quality of measuring.High accuracy, high-resolution, large stroke, high response speed, the Precision Machining of high rigidity and measurement device occupy extremely important status in modern sophisticated industry production and field of scientific study.It is the key link of directly impact precision, ultraprecise level of processing and accurate measurement level.A large amount of funds is all dropped into to high precise equipment in countries in the world, in the hope of obtaining larger industrial efficiency.The Heui jae Park of Seoul, South Korea university etc. are installed in the microposition workbench of Piezoelectric Ceramic on the grand positioning table of electric rotating machine driving, use laser interferometer to realize the closed-loop control position feedback of two workbench, have realized higher positioning accuracy.The vertical X-Y-θ Three Degree Of Freedom micro displacement workbench of developing of making of Japan is combined with the grand moving workbench of two-freedom, and oneself is used for projection mask aligner and electron beam exposure apparatus.At home, Xi'an Communications University adopts electric rotating machine and ball-screw to realize the grand driving of 100mm, and adopts piezoelectric actuator to realize that the microposition platform drives, and positioning accuracy is ± 10nm.But ball-screw adds the guided mode of pair of nut and exists such as response speed slowlyer, and processing and assembly precision are high, and reparation property is poor, and need and servomotor such as are used at the problem.It is single that flexible hinge exists again processing method, non-exchange property, the defective such as reparation property is poor, and stroke is limited, and is highly lower.Therefore, design a have simple in structure, high response speed, high accuracy, dynamic stiffness is high, the acceleration and deceleration process is short, the displacement platform of efficient advantages of higher has become the emphasis problem of various countries and each well-known universities and colleges.
Summary of the invention
The object of the present invention is to provide a kind of Simple precision displacement platform.This platform is slow for solving traditional displacement platform response speed, and rigidity is lower, and the problems such as large stroke and high accuracy contradiction have proposed a solution.
This platform can be divided into the two large divisions: linear electric motors and line slideway are realized large stroke, fast the location; Micromotion platform is realized little stroke, hi-Fix.Because required member is few, platform structure is simplified.Displacement platform is owing to introduced linear electric motors and piezoelectric ceramic actuator, compare traditional ball-screw pattern, machine driving link in the middle of having greatly reduced, the driving-chain length reduction is zero, thereby so that whole platform is satisfying under the high-precision basic demand, also had high response speed, the high advantages such as rigidity.The vibration isolator of installing at pedestal can effectively reduce extraneous factor to the impact of whole platform property.The linear grating chi can be realized the Displacement Feedback of linear electric motors, realizes that displacement is controlled.Micromotion platform adopts integral material warp cutting processing to form, thereby has avoided rigging error, has guaranteed simultaneously dimensional accuracy, so that workbench has good displacement output characteristics.This platform can be used for Precision Machining feeding, Error Feedback compensation and accurate measurement field.
This Simple precision displacement platform is divided into pedestal, vibration isolator, fixedly soket head cap screw, line slideway, interior hexagonal holding screw, micro displacement workbench, piezoelectric ceramic actuator, linear grating chi, linear electric motors, the drive part of described precision displacement table adopts linear electric motors and piezoelectric ceramic actuator, because the direct contact movement parts of driving element so that the driving-chain length reduction is zero, effectively raise response speed and integral rigidity; The introducing of line slideway and Rectangular Spring sheet so that the displacement platform overall volume reduces, has been simplified on the structure greatly simultaneously.
The linear electric motors part of described precision displacement table, two linear electric motors about comprising; Two motors are installed on the homonymy of line slideway, adopt Synchronization Control, realize the large stroke of whole micromotion platform; At each linear electric motors the linear grating chi is housed, is used for the FEEDBACK CONTROL of displacement, realize the synchronous shift control of two linear electric motors.
Described precision displacement table has effectively reduced the impact of extraneous factor on whole platform output performance by the mode of vibration isolator is installed under pedestal, reduced to a certain extent the restriction that environmental working condition is used displacement platform.
Described micromotion platform has adopted the Rectangular Spring sheet as director element, and piezoelectric ceramic actuator is as the pattern of driving element, and structure is simplified, and is easy to process; By the spring leaf of the parallel placement in workbench both sides, workbench can obtain good linear displacement output, and has good elastic reset ability.
The present invention has effectively reduced transmission link by adopting linear drive mode, is significantly improved so that the more traditional ball-screw of integral rigidity adds the too many levels transmission mode such as pair of nut; The raising of rigidity means the raising of antijamming capability.
Description of drawings
Fig. 1 is the three-dimensional installation diagram of Simple precision displacement platform.
Fig. 2 is the three-dimensional model diagram of micromotion platform.
Among the figure, 1, pedestal; 2, vibration isolator; 3, fixing soket head cap screw; 4, line slideway; 5, interior hexagonal holding screw; 6, micro displacement workbench; 7, piezoelectric ceramic actuator; 8, the linear grating chi; 9, linear electric motors.
The specific embodiment
The Simple precision displacement platform of invention comprises pedestal 1, vibration isolator 2, fixedly soket head cap screw 3, line slideway 4, interior hexagonal holding screw 5, micro displacement workbench 6, piezoelectric ceramic actuator 7, linear grating chi 8, linear electric motors 9 as shown in Figure 1.
Pedestal 1 has played the effect of supporting of installing as the carrier of whole displacement platform to whole parts.The vibration isolator 2 of installing in pedestal 1 bottom plays the vibration isolation effect, can effectively eliminate extraneous factor, particularly extraneous vibration, on the impact of whole platform property.
Line slideway 4 is fastened on the pedestal 1 by fixing soket head cap screw 3, as the guiding parts of large stroke motion.Install by linear electric motors 9 on the line slideway 4, and be connected by interior hexagonal holding screw 5 with micromotion platform 6.Soket head cap screw is little to requirements of installation space, can effectively reduce the volume of each parts.By the guiding of guide rail 4, can realize the gapless of linear electric motors 9 and micromotion platform 6, be synchronized with the movement.
Linear electric motors 9 have two, are distributed in respectively on the same end inboard of line slideway 4.Linear grating chi 8 is housed on it, and the output shift quantity that is used for linear electric motors 9 detects and feedback.Can by the feedback data of linear grating chi 8, realize the synchronous precise displacement output of two linear electric motors 9.
The threedimensional model of micromotion platform 6, as shown in Figure 2.Platform adopts the method for overall wire cutting to process, thereby has avoided rigging error, has guaranteed simultaneously machining accuracy to have shortened process time.The workbench both sides uniform the Rectangular Spring sheet, the Parallel Symmetric by spring leaf is arranged, has been consisted of parallelogram lindage, thereby guaranteed the linearity of workbench output displacement.Simultaneously, the Rectangular Spring sheet also can be realized the displacement reset function of workbench, has guaranteed that the zero-clearance of workbench and piezoelectric ceramic actuator contacts, and has improved driving rigidity.Workbench in the micromotion platform 6 is provided with threaded mounting hole, can be used for installing and measuring head or min-cutter etc., to be used for accurate measurement and Precision Machining.
Piezoelectric ceramic actuator 7 guarantee its with situation that the workbench zero-clearance contacts under, be fixedly mounted in the draw-in groove of micromotion platform 6.Piezoelectric ceramic actuator has the advantages such as volume is little, and response speed is high, and rigidity is high, and antijamming capability is strong, has greatly improved the performance of fine motion displacement platform.
Among the present invention, as to select minimum resolution be 0.001mm, range is that linear electric motors and the minimum resolution of 50mm is 0.01 μ m, range is the piezoelectric ceramic actuator of 0.2mm, realize the displacement output of 12.45811mm, its step is as follows: at first, this Simple precision displacement platform is fixedly mounted on equipment needed thereby or the position by 4 vibration isolators 2.Then, by the Synchronization Control to two linear electric motors 9, realize that micromotion platform 6 is along moving on line slideway 4 directions.By the feedback signal of linear grating chi 8, the displacement X1=12.458mm of control linear electric motors 9.Keep motor input shift invariant, by piezoelectric ceramic actuator 7 input displacement X2=0.11 μ m=0.00011mm.As can be known, the output shift quantity X of workbench is the displacement output quantity X2 sum of displacement output quantity X1 and the piezoelectric ceramic actuator 7 of linear electric motors 9, so X=X1+X2=12.458+0.00011=12.45811mm is arranged.Required displacement is achieved, and whole process control is simple, fast response time.
Claims (1)
1. Simple precision displacement platform, it is characterized in that, comprise pedestal (1), vibration isolator (2), fixedly soket head cap screw (3), line slideway (4), interior hexagonal holding screw (5), micro displacement workbench (6), piezoelectric ceramic actuator (7), linear grating chi (8), linear electric motors (9);
Described pedestal (1) is the carrier of whole displacement platform, vibration isolator (2) is installed in pedestal (1) bottom, two line slideways (4) are fastened on the pedestal (1) by fixing soket head cap screw (3), two linear electric motors (9) are distributed in respectively on the same end inboard of line slideway (4), and linear electric motors (9) are connected by interior hexagonal holding screw (5) with micro displacement workbench (6); Linear grating chi (8) is housed on two linear electric motors (9); By the feedback data of linear grating chi (8), two linear electric motors (9) are exported accurate displacement synchronously; By the guiding of guide rail (4), linear electric motors (9) and micro displacement workbench (6) gapless, be synchronized with the movement;
Described micro displacement workbench (6) adopts " III " font to arrange that the housing of workbench links to each other with linear electric motors (9) by interior hexagonal holding screw (5), makes the displacement output of linear electric motors (9) pass to micro displacement workbench (6); The workbench both sides of micro displacement workbench (6) central authorities uniform the Rectangular Spring sheet of isometric uniform thickness, the Parallel Symmetric of spring leaf is arranged and is consisted of parallelogram lindage; Piezoelectric ceramic actuator (7) guarantee its with situation that the workbench zero-clearance contacts under, be fixedly mounted in the draw-in groove of micro displacement workbench (6); Workbench in the micro displacement workbench (6) is provided with threaded mounting hole, can be used for installing and measuring head or min-cutter, to be used for accurate measurement and Precision Machining;
Described line slideway (4) adopts " worker " font guide rail, and each guide rail respectively has both sides, a side by uniform three fixedly soket head cap screw (3) be fastened on the pedestal (1), opposite side then is equipped with linear electric motors (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110366955 CN102490020B (en) | 2011-11-18 | 2011-11-18 | Simple precision displacement platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110366955 CN102490020B (en) | 2011-11-18 | 2011-11-18 | Simple precision displacement platform |
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| CN102490020A CN102490020A (en) | 2012-06-13 |
| CN102490020B true CN102490020B (en) | 2013-10-23 |
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| CN 201110366955 Active CN102490020B (en) | 2011-11-18 | 2011-11-18 | Simple precision displacement platform |
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| CN102818688B (en) * | 2012-08-27 | 2015-05-20 | 中国矿业大学 | Loading device and method of vibration test of imitating flexible member |
| CN102830711B (en) * | 2012-09-14 | 2014-07-16 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102922309B (en) * | 2012-09-29 | 2015-03-04 | 黑龙江科技学院 | Precise micro motion platform based on shape memory material coarse motion driver |
| CN103219049B (en) * | 2013-03-04 | 2015-04-29 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103273328B (en) * | 2013-05-08 | 2015-11-18 | 武汉科技大学 | Large-stroke micro-drive precise two-dimensional worktable |
| CN104440343B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN105222713A (en) * | 2015-08-10 | 2016-01-06 | 西安盛佳光电有限公司 | A kind of utilize fiber grating to carry out accurate displacement method and device |
| CN106002312B (en) * | 2016-06-29 | 2018-01-23 | 广东工业大学 | A kind of single driving Coupled Rigid-flexible precision movement platform and its implementation and application |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN106371464A (en) * | 2016-08-31 | 2017-02-01 | 无锡信欧光电科技有限公司 | Electronically controlled precision displacement platform |
| CN106891306B (en) * | 2017-04-25 | 2019-05-28 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN109531184B (en) * | 2018-12-13 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling platform with rigidity adjusted on two sides and motion platform |
| CN109675781B (en) * | 2019-01-31 | 2020-08-14 | 天津大学 | Auxiliary machining platform for plane ultrasonic vibration |
| CN110031027B (en) * | 2019-03-22 | 2021-07-13 | 中国科学院微电子研究所 | Detection apparatus with vibration isolation nested structure |
| CN110722523B (en) * | 2019-08-29 | 2023-01-20 | 广东工业大学 | Macro-micro composite motion platform based on piezoelectric ceramic measurement and compensation and application |
| CN110587552B (en) * | 2019-09-09 | 2023-08-11 | 辽宁工业大学 | Rotary moving workbench |
| CN111169918A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | High-speed and high-precision material transmission system driven by piezoelectricity and electromagnetism in combined mode |
| CN112405108B (en) * | 2020-09-17 | 2022-08-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113327490A (en) * | 2021-07-06 | 2021-08-31 | 广州中科博约医疗科技有限公司 | Precision simulation device for human body surface physiological micromotion |
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| CN101804568A (en) * | 2010-03-19 | 2010-08-18 | 中国电子科技集团公司第二研究所 | Linear motor driven air suspension motion platform |
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| JPH064210B2 (en) * | 1987-10-20 | 1994-01-19 | 日本電気株式会社 | Positioning mechanism |
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| US4575942A (en) * | 1982-10-18 | 1986-03-18 | Hitachi, Ltd. | Ultra-precision two-dimensional moving apparatus |
| US5302873A (en) * | 1991-12-24 | 1994-04-12 | Nippon Thompson Co., Ltd. | Linear pulse motor having a high resolution |
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| CN102490020A (en) | 2012-06-13 |
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Address after: 212005 No. 8 Shangdang Eco-automobile Complementary Industrial Park, Dantu District, Zhenjiang City, Jiangsu Province Patentee after: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. Address before: 212005 101 South Xu Road, Zhenjiang, Jiangsu Patentee before: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. |
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Effective date of registration: 20191223 Address after: 225200 No. 88 Wenchang East Road, Jiangdu District, Yangzhou, Jiangsu. Patentee after: Yangzhou (Jiangdu) New Energy Automobile Industry Research Institute of Jiangsu University Address before: 212005 No.8 Shangdang ecological automobile supporting industrial park, Dantu District, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. |
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