CN104765382A - Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform - Google Patents

Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform Download PDF

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Publication number
CN104765382A
CN104765382A CN201510135371.5A CN201510135371A CN104765382A CN 104765382 A CN104765382 A CN 104765382A CN 201510135371 A CN201510135371 A CN 201510135371A CN 104765382 A CN104765382 A CN 104765382A
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China
Prior art keywords
worktable
platform
speed
electric motors
fixed
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CN201510135371.5A
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Chinese (zh)
Inventor
马立
李丰甜
高英龙
金宁博
米林涛
周辅君
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Priority to CN201510135371.5A priority Critical patent/CN104765382A/en
Publication of CN104765382A publication Critical patent/CN104765382A/en
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Abstract

The invention relates to a cross-scale two-dimensional large-stroke high-speed and high-precision motion platform. The cross-scale two-dimensional large-stroke high-speed and high-precision motion platform is of an H-shaped structure and is composed of a Y-direction working platform on the upper layer, an X-direction dual-edge driving working platform on the lower layer, a marble platform and a support. The Y-direction working platform on the upper layer is connected with the X-direction dual-edge driving working platform on the lower layer in series, a high-speed rolling linear guideway is used for guiding, and a grating ruler is adopted for position feedback. The Y-direction working platform on the upper layer is driven by a linear motor and is fixed to a movable platform of the X-direction dual-edge driving working platform on the lower layer through an adapter plate; the X-direction dual-edge driving working platform on the lower layer is driven by two linear motors at the same time and is fixed to the marble platform through screws; the marble platform is placed on the support. By means of the cross-scale two-dimensional large-stroke high-speed and high-precision motion platform, a two-dimensional motion platform driven by the linear motors, fed back by the grating ruler and guided by the rolling guideway is adopted, the structure is high, the rigidity is high, the bearing capacity is large, the positioning accuracy is high, and the two-dimensional large-stroke high-speed and high-precision motion can be achieved.

Description

Across yardstick two-dimensional large-stroke high-speed, high precision motion platform
Technical field
The present invention relates to a kind of across yardstick two-dimensional large-stroke high-speed, high precision motion platform.
Background technology
Along with the develop rapidly of computer science and technology, the integrated level of semi-conductor chip manufacture improves constantly, and existing photoetching technique cannot meet the requirement of high-level efficiency and high precision due to self intrinsic limitation, therefore, proposes nanometer embossing.But in the application of large area imprinting technology, realize Long Distances or super large stroke, higher travelling speed and positioning precision, under current high-speed condition, the inertia problem of electrical system, mechanical system etc. is still difficult to solve; On the other hand in Long Distances or super large stroke range, the system parasitic error such as flatness, the depth of parallelism of mechanical system will inevitably make the realization of nano grade positioning precision become very difficulty.
At present, industry generally adopts grand-microposition technology to realize high-precision location, realizes Long Distances, rough grade is located, realize micro travel, high-precision location by micromotion platform by macro-moving stage.But due to the contradiction existed between Long Distances and high precision, the large multiple-pass of existing macro-moving stage less (<=300mm), the motion platform of the H type physical construction of the linear motor direct drive of the present invention's design, adopt serial mechanism mentality of designing, the Long Distances of 500mm can be realized, there is high travelling speed and positioning precision simultaneously.
Summary of the invention
The object of the invention is to the problem that can not simultaneously take into account for the Long Distances existing for the grand dynamic platform of existing grand micro-dual-positioning platform and high position precision and invent a kind of based on linear motor direct drive, H type cascaded structure across yardstick two-dimension moving platform, can realize simultaneously Long Distances, at a high speed, high precision, and rigidity is high, load-bearing capacity is large, is conducive to the manufacturing precision improving micro-nano field.
For achieving the above object, thinking of the present invention is as follows:
Build conveniently because H type cascaded structure has, control the many advantages such as simple, rigidity is large, load-bearing capacity is high, therefore, the present invention devises the locating platform based on H type cascaded structure; Realize Long Distances or super large stroke, traditional servomotor adds ball-screw and drives and be difficult to meet the demands, and therefore select linear motor direct drive, can realize large thrust-weight ratio, stroke is unrestricted, and saves the driving error that intermediate transmission link causes; The raising of speed can bring micro-vibration of platform, and the present invention adopts marble material as platform, has the advantages such as good flatness of the response, vibration resistance and less thermal expansivity.
Based on above thinking, the present invention adopts following technical scheme:
A kind of across yardstick two-dimensional large-stroke high-speed, high precision motion platform, comprise a upper strata Y-direction worktable, a lower floor X to bilateral driving worktable, marble platform and support, described upper strata Y-direction worktable is connected to bilateral driving worktable in a series arrangement with lower floor X, is placed in marble platform; Described upper strata Y-direction worktable is driven by Y-direction linear electric motors, two Y-direction high speed scroll line slideway guiding, and completes Y-direction position feedback by a Y-direction grating scale; Upper strata Y-direction worktable is fixed on lower floor X on bilateral driving worktable by XY card extender; Described lower floor X is synchronously driven to linear electric motors to bilateral driving worktable by two X, and two X to high speed scroll line slideway guiding, and complete X-direction bilateral position feedback by two X to grating scale; Lower floor X is fixed by screws in marble platform to bilateral driving worktable; Marble platform is supported by support, and described support comprises four adjusting bolts, four supporting bases, four rack beams and four support foots pad, and support, by the height of four adjusting bolts adjustment marble platform, makes itself and ground keeping parallelism.
Described upper strata Y-direction worktable comprises: operator's console, dust cover, Y-direction worktable, Y-direction linear electric motors, two Y-direction high speed scroll line slideways, four Y-direction guide rail slide blocks, a Y-direction grating scale, a Y-direction read head, a L-type support, a grid foot pin plate, XY card extender, two dust cover baffle plates, four Y-direction mechanical position limitations, a Y-direction tank chain and four fish belly sills, operator's console, connect with screw respectively between dust cover and Y-direction worktable, dust cover selects stainless steel material, play dustproof effect at work, Y-direction worktable is fixed by screws on four Y-direction guide rail slide blocks, under Y-direction linear motor rotor drives, realize Y-direction along two Y-direction high speed scroll line slideways move, the stator of Y-direction linear electric motors, two Y-direction high speed scroll line slideways are all fixed by screws on XY card extender, Y-direction read head is connected with L-type support, L-type support is fixed on Y-direction worktable, realize the Real-time Feedback of the Y-direction positional information of operator's console, the Y-direction sports limiting function of four Y-direction mechanical position limitation realizations to operator's console, four fish belly sills respectively between two symmetry be fixed on XY card extender both sides, be used for improving the rigidity of XY card extender.
Described lower floor X comprises two X to linear electric motors to bilateral driving worktable, two X are to connecting plate for electric motor, four X are to motor gasket, two X are to high speed scroll line slideway, four X direction guiding rail slide blocks, two X are to grating scale, two X are to read head, two read head contiguous blocks, two Z-type grid chi dust covers, four X are to mechanical position limitation, two X are to tank chain, two X connect to tank chain, four X are to tank chain limiting plate, four organ covers, four the first organ cover baffle plates and four the second organ cover baffle plates, described XY card extender is fixed by screws on four X direction guiding rail slide blocks, X is realized to precision positioning along two X to high speed scroll line slideway under two X synchronously drive to the mover of linear electric motors, two X must ensure parallel to high speed scroll line slideway when mounted, two X are fixed on marble platform in by four X to linear electric motors backing plate to linear electric motors, two X are fixed by screws in marble platform to high speed scroll line slideway, two X are connected to connecting plate for electric motor with two read head contiguous blocks, two read head contiguous blocks are connected to read head with two X, thus realize the feedback of X to bilateral positional information, two Z-type dust covers are connected with XY card extender, it is made up of stainless steel material, for realizing the protective effect of two X to grating scale, two X to be fixed in marble platform to grid chi and must to ensure simultaneously parallel to the stator of linear electric motors with two X to high speed scroll line slideway with two X, four X realize X to limit function to mechanical position limitation, two X are connected to tank chain connection with XY card extender to tank chain by two X, move in X direction, four organ covers are by spacing before and after four the second organ cover baffle plates and four the first organ cover baffle plates, to motor in the course of work, the parts such as guide rail play dustproof effect.
Compared with prior art, the present invention has following outstanding substantive distinguishing features and significant advantage:
The present invention adopts the two-dimension moving platform that linear electric motors drive, grating scale feedback, rolling guide lead, and structure is simple, and rigidity is high, and load-bearing capacity is large, and positioning precision is high, can realize the motion of two-dimensional large-stroke high-speed, high precision.
Accompanying drawing explanation
Fig. 1 is a kind of one-piece construction schematic diagram across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention.
Fig. 2 is a kind of upper strata Y-direction motion platform structural representation across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention.
Fig. 3 is a kind of XY card extender across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention and Y-direction grating measuring structural representation.
Fig. 4 is the structural representation of a kind of lower floor X across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention to bilateral driving platform.
Fig. 5 is that a kind of X across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention is to grating measuring structural representation.
Fig. 6 is a kind of supporting structure schematic diagram across yardstick two-dimensional large-stroke high-speed, high precision motion platform of the present invention.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, technical scheme of the present invention is described further.
As shown in figures 1 to 6, a kind of across yardstick two-dimensional large-stroke high-speed, high precision motion platform, comprise a upper strata Y-direction worktable 1, lower floor X to bilateral driving worktable 2, marble platform 3 and support 4, described upper strata Y-direction worktable 1 is connected to bilateral driving worktable 2 in a series arrangement with lower floor X, is placed in marble platform 3; Described upper strata Y-direction worktable 1 is driven by Y-direction linear electric motors 25, and two Y-direction high speed scroll line slideways 8 lead, and completes Y-direction position feedback by a Y-direction grating scale 28; Upper strata Y-direction worktable 1 is fixed on lower floor X on bilateral driving worktable 2 by XY card extender 5; Described lower floor X is synchronously driven to linear electric motors 6 to bilateral driving worktable 2 by two X, and two X lead to high speed scroll line slideway 7, and completes X-direction bilateral position feedback by two X to grating scale 13; Lower floor X is fixed by screws in marble platform 3 to bilateral driving worktable 2; Marble platform 3 is supported by support 4, described support 4 comprises four adjusting bolts, 37, four supporting bases, 35, four rack beams 36 and four support foots pad 38, support 4 adjusts the height of marble platform 3 by four adjusting bolts 37, makes itself and ground keeping parallelism.
As shown in Figures 2 and 3, described upper strata Y-direction worktable 1 comprises: operator's console 22, dust cover 23, Y-direction worktable 24, Y-direction linear electric motors 25, two Y-direction high speed scroll line slideways 8, four Y-direction guide rail slide blocks 27, a Y-direction grating scale 28, a Y-direction read head 30, a L-type support 26, a grid foot pin plate 29, XY card extender 5, two dust cover baffle plates 31, four Y-direction mechanical position limitations 32, a Y-direction tank chain 33 and four fish belly sills 34, operator's console 22, connect with screw respectively between dust cover 23 and Y-direction worktable 24, dust cover 23 selects stainless steel material, play dustproof effect at work, Y-direction worktable 24 is fixed by screws on four Y-direction guide rail slide blocks 27, under Y-direction linear electric motors 25 mover drives, realize Y-direction along two Y-direction high speed scroll line slideways 8 move, the stator of Y-direction linear electric motors 25, two Y-direction high speed scroll line slideways 8 are all fixed by screws on XY card extender 5, Y-direction read head 30 is connected with L-type support 26, L-type support 26 is fixed on Y-direction worktable 24, realize the Real-time Feedback of the Y-direction positional information of operator's console 22, four Y-direction mechanical position limitations 32 realize the Y-direction sports limiting function to operator's console 22, four fish belly sills 34 respectively between two symmetry be fixed on XY card extender 5 both sides, be used for improving the rigidity of XY card extender.
As shown in Figure 4 and Figure 5, described lower floor X comprises two X to linear electric motors 6 to bilateral driving worktable 2, two X are to connecting plate for electric motor 12, four X are to motor gasket 9, two X are to high speed scroll line slideway 7, four X direction guiding rail slide blocks 10, two X are to grating scale 13, two X are to read head 15, two read head contiguous blocks 14, two Z-type grid chi dust covers 21, four X are to mechanical position limitation 11, two X are to tank chain 17, two X connect 16 to tank chain, four X are to tank chain limiting plate 18, four organ covers 19, four the first organ cover baffle plates 20 and four the second organ cover baffle plates 39, described XY card extender 5 is fixed by screws on four X direction guiding rail slide blocks 10, X is realized to precision positioning along two X to high speed scroll line slideway 7 under two X synchronously drive to the mover of linear electric motors 6, two X must ensure parallel to high speed scroll line slideway 7 when mounted, two X are fixed on marble platform 3 in by four X to linear electric motors backing plate 9 to linear electric motors 6, two X are fixed by screws in marble platform 3 to high speed scroll line slideway 7, two X are connected to connecting plate for electric motor 12 with two read head contiguous blocks 14, two read head contiguous blocks 14 are connected to read head 15 with two X, thus realize the feedback of X to bilateral positional information, two Z-type dust covers 21 are connected with XY card extender 5, it is made up of stainless steel material, for realizing the protective effect of two X to grating scale 13, two X to be fixed in marble platform 3 to grid chi 13 and must to ensure simultaneously parallel to the stator of linear electric motors 6 with two X to high speed scroll line slideway 7 with two X, four X realize X to limit function to mechanical position limitation 11, two X connect 16 by two X to tank chain to tank chain 17 and are connected with XY card extender 5, move in X direction, four organ covers are by spacing before and after four the second organ cover baffle plates 39 and four the first organ cover baffle plates 20, to motor in the course of work, the parts such as guide rail play dustproof effect.
The course of work of the present invention is:
The mover of Y-direction linear electric motors 26 drives operator's console 22 to realize Y-direction precision positioning, and two X drive operator's console 22 to realize X-direction precision positioning to the mover of linear electric motors 6 by synchronous driving.Wherein, in order to ensure the serviceability of linear electric motors 6 and 26, the clean of assembly environment will be guaranteed when assembling its stator, prevent micronic dust, iron filings etc. from entering, simultaneously again because two X are provided with backing plate 96 times to linear electric motors, the mismachining tolerance of backing plate 9 itself can cause the rigging error of motor stator, therefore needs constantly to adjust pad quantity to reduce rigging error; X, the Y-axis guiding of operator's console 22 are completed by high speed scroll line slideway 7 and 8 respectively, in assembling process, are measured linearity and the depth of parallelism of high speed scroll line slideway 7 and 8 by laser interferometer respectively; Upper strata Y-direction worktable 1 and lower floor X are rigidly connected by XY card extender 5 in the middle of bilateral driving worktable 2, ensure the stationarity of Movement transmit; Y-direction grating scale 28 obtains the positional information feedback of Y-direction by Y-direction grating reading head 30, two X respectively obtain X to bilateral positional information feedback, by judge the reading of the two read heads whether equal synchronizing characteristics of weighing bilateral driving by two X to read head 15 to grating scale 13; Four fish belly sills 34 respectively between two symmetry arrangement at the right and left of XY card extender 5, for increasing the rigidity of XY card extender 5; Marble platform 3 and support 4 can ensure the stability in Platform movement process.

Claims (3)

1. one kind across yardstick two-dimensional large-stroke high-speed, high precision motion platform, comprise upper strata Y-direction worktable (1), a lower floor X to bilateral driving worktable (2), marble platform (3) and support (4), it is characterized in that, described upper strata Y-direction worktable (1) is connected to bilateral driving worktable (2) in a series arrangement with lower floor X, is placed in marble platform (3); Described upper strata Y-direction worktable (1) is driven by a Y-direction linear electric motors (25), two Y-direction high speed scroll line slideway (8) guiding, and completes Y-direction position feedback by a Y-direction grating scale (28); Upper strata Y-direction worktable (1) is fixed on lower floor X on bilateral driving worktable (2) by XY card extender (5); Described lower floor X is synchronously driven to linear electric motors (6) to bilateral driving worktable (2) by two X, and two X to high speed scroll line slideway (7) guiding, and complete X-direction bilateral position feedback by two X to grating scale (13); Lower floor X is fixed by screws in marble platform (3) to bilateral driving worktable (2); Marble platform (3) is supported by support (4), described support (4) comprises four adjusting bolts (37), four supporting bases (35), four rack beams (36) and four supports foot pad (38), support (4), by the height of four adjusting bolts (37) adjustment marble platform (3), makes itself and ground keeping parallelism.
2. according to claim 1 across yardstick two-dimensional large-stroke high-speed, high precision motion platform, it is characterized in that: described upper strata Y-direction worktable (1) comprising: operator's console (22), dust cover (23), Y-direction worktable (24), a Y-direction linear electric motors (25), two Y-direction high speed scroll line slideways (8), four Y-direction guide rail slide blocks (27), a Y-direction grating scale (28), a Y-direction read head (30), a L-type support (26), a grid foot pin plate (29), XY card extender (5), two dust cover baffle plates (31), four Y-direction mechanical position limitations (32), a Y-direction tank chain (33) and four fish belly sills (34), operator's console (22), connect with screw respectively between dust cover (23) and Y-direction worktable (24), dust cover (23) selects stainless steel material, play dustproof effect at work, Y-direction worktable (24) is fixed by screws on four Y-direction guide rail slide blocks (27), Y-direction motion is realized along two Y-direction high speed scroll line slideways (8) under Y-direction linear electric motors (25) mover drives, the stator of Y-direction linear electric motors (25), two Y-direction high speed scroll line slideways (8) are all fixed by screws on XY card extender (5), Y-direction read head (30) is connected with L-type support (26), L-type support (26) is fixed on Y-direction worktable (24), realize the Real-time Feedback of the Y-direction positional information of operator's console (22), the Y-direction sports limiting function of four Y-direction mechanical position limitation (32) realizations to operator's console (22), four fish belly sills (34) respectively between two symmetry be fixed on XY card extender (5) both sides, be used for improving the rigidity of XY card extender.
3. according to claim 1 across yardstick two-dimensional large-stroke high-speed, high precision motion platform, it is characterized in that: described lower floor X comprises two X to linear electric motors (6) to bilateral driving worktable (2), two X are to connecting plate for electric motor (12), four X are to motor gasket (9), two X are to high speed scroll line slideway (7), four X direction guiding rail slide blocks (10), two X are to grating scale (13), two X are to read head (15), two read head contiguous blocks (14), two Z-type grid chis dust cover (21), four X are to mechanical position limitation (11), two X are to tank chain (17), two X connect (16) to tank chain, four X are to tank chain limiting plate (18), four organ covers (19), four the first organ cover baffle plates (20) and four the second organ cover baffle plates (39), described XY card extender (5) is fixed by screws on four X direction guiding rail slide blocks (10), X is realized to precision positioning along two X to high speed scroll line slideway (7) under two X synchronously drive to the mover of linear electric motors (6), two X must ensure parallel to high speed scroll line slideway (7) when mounted, two X are fixed on marble platform (3) in by four X to linear electric motors backing plate (9) to linear electric motors (6), two X are fixed by screws in marble platform (3) to high speed scroll line slideway (7), two X are connected to connecting plate for electric motor (12) with two read head contiguous blocks (14), two read head contiguous blocks (14) are connected to read head (15) with two X, thus realize the feedback of X to bilateral positional information, two Z-type dust covers (21) are connected with XY card extender (5), it is made up of stainless steel material, for realizing the protective effect of two X to grating scale (13), two X are fixed on marble platform (3) to grid chi (13) and go up and must ensure simultaneously parallel to the stator of linear electric motors (6) with two X to high speed scroll line slideway (7) with two X, four X realize X to limit function to mechanical position limitation (11), two X connect (16) by two X to tank chain to tank chain (17) and are connected with XY card extender (5), move in X direction, four organ covers are by spacing before and after four the second organ cover baffle plates (39) and four the first organ cover baffle plates (20), to motor in the course of work, the parts such as guide rail play dustproof effect.
CN201510135371.5A 2015-03-26 2015-03-26 Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform Pending CN104765382A (en)

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CN108151648A (en) * 2017-12-27 2018-06-12 苏州乐佰图信息技术有限公司 Double guide rail measuring tables and its method for measuring coordinates of targets
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CN105081589A (en) * 2015-07-23 2015-11-25 深圳市铭镭激光设备有限公司 Synchronous horizontal dustproof cover structure of cross slide table
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CN108151648A (en) * 2017-12-27 2018-06-12 苏州乐佰图信息技术有限公司 Double guide rail measuring tables and its method for measuring coordinates of targets
CN110422202A (en) * 2019-06-28 2019-11-08 吉林省计量科学研究院 A kind of large span two dimension linkage compensation system and method for train wheel detection
CN110422202B (en) * 2019-06-28 2020-10-23 吉林省计量科学研究院 Large-span two-dimensional linkage compensation system and method for locomotive wheel pair detection

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