CN108206155A - A kind of XY high-speed motion platforms of tier rack type decoupling - Google Patents
A kind of XY high-speed motion platforms of tier rack type decoupling Download PDFInfo
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- CN108206155A CN108206155A CN201810188240.7A CN201810188240A CN108206155A CN 108206155 A CN108206155 A CN 108206155A CN 201810188240 A CN201810188240 A CN 201810188240A CN 108206155 A CN108206155 A CN 108206155A
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 28
- 241000272165 Charadriidae Species 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000004377 microelectronic Methods 0.000 description 5
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- 230000008878 coupling Effects 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
The present invention provides a kind of tier rack type decoupling XY high-speed motion platforms, including：First pedestal, the second pedestal, x-axis motion module, y-axis motion module and moving platform；The x-axis motion module is mounted on first pedestal；The y-axis motion module is mounted on second pedestal；First pedestal, which is maked somebody a mere figurehead, to be arranged on the second pedestal；The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or carry out y-axis direction linear motion based on the y-axis motion module.The present invention uses parallel-connection decoupling mode, it is simple in structure, it is easier to ensure that moving platform in the consistent of the direction of motion at work, be conducive to the track contour accuracy of control plane movement, and the motion platform is separated x-axis motion module, y-axis motion module in the different plane of height from moving platform by a kind of simply firm frame mode, reduce the complexity of moving parts and its related movement, realize the optimal utilization in X/Y plane space.
Description
Technical field
The present invention relates to the High-speed machining sports equipments of micro-electronic manufacturing manufacture field more particularly to a kind of tier rack type to decouple
XY high-speed motion platforms.
Background technology
With the high speed development of microelectronics manufacturing industry, the manufacture of the high production capacity of microelectronic product high quality, micro-electronic manufacturing dress
It is standby that its nucleus movement platform and system are proposed in space availability ratio, stroke, speed, acceleration, kinetic stability etc.
High comprehensive requirement.The mode combinations of the two motor series connection of use of traditional XY decouplings platform substantially form, structure system
System is not compact, and space availability ratio is not high, and there is related link is lengthy and jumbled, and moving parts are more, load the defects of big, it is difficult to very well
The requirement for meeting high speed stable motion.It is L-shaped that it is mostly in overall structure, which to decouple platform, by existing parallel connection XY, and " L " type is put down
Two motors in platform extend and occupy the XY axial spaces of motion platform, and driving motor is seriously limited in the placement of XY axial directions
The stroke of moving platform XY axial directions could not realize the optimal utilization in X/Y plane space.In addition, " L " type platform assembly barycenter disperses, group
Part mass-dispersion causes equipment gravity biased, does not concentrate, and serious equipment is brought to microelectronics nanoscale precision manufactureing and is missed
Difference.Therefore the optimal utilization in XY decoupling platform planes space in parallel how is realized, expanding the stroke of moving platform becomes this field
The technical issues of technical staff's urgent need to resolve.
Invention content
In view of this, the present invention provides a kind of XY high-speed motion platforms of tier rack type decoupling, solves existing parallel connection XY solutions
Coupling platform seriously limits the stroke of moving platform XY axial directions, the problem of could not realizing the optimal utilization in X/Y plane space.
The present invention provides a kind of XY high-speed motion platforms of tier rack type decoupling, including：First pedestal, the second pedestal, x-axis fortune
Dynamic model block, y-axis motion module and moving platform；
The bottom surface of the x-axis motion module is the first plane, and first base top surface is attached with first plane to be connected
It connects；
The bottom surface of the y-axis motion module is the second plane, and second base top surface is attached with second plane to be connected
It connects；
First pedestal, which is maked somebody a mere figurehead, to be arranged in the second base top surface；
The top surface of the moving platform is third plane, and first plane and second plane are vertical on different height
In the central shaft of the third plane；
The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or moved based on the y-axis
Module carries out y-axis direction linear motion.
Preferably, the y-axis motion module includes：Second motor control part and the 2nd y guide rails；
Second motor control part includes the second connector and the second motor, second connector and described second
Electric mover is fixedly connected；
The top of second motor stator is located at the bottom of second connector；
The bottom surface of second motor stator is second plane；
The 2nd y guide rails are mounted in second base top surface；
Second connector is slidably connected with the 2nd y guide rails.
Preferably, second connector is groove connecting；
The groove connecting outer bottom is fixedly mounted with second electric mover；
Two the 2nd y guide rail parallels and it is separated by preset distance mounted on the groove connecting outer bottom；
The first x guide rails are located at the top of the groove connecting and are connected across the opening of the groove connecting.
Preferably, the x-axis motion module includes：First motor and the 2nd x guide rails；
The bottom surface of first motor stator is first plane；
The 2nd x guide rails are mounted in first base top surface；
First electric mover is slidably connected with the 2nd x guide rails.
Preferably, two the 2nd x guide rail parallels and it is separated by preset distance in first base top surface；
First electric mover is connected across in the y-direction between two the 2nd x guide rails；
The first electric mover top surface attaches and is equipped with the first y guide rails.
Preferably, the moving platform is slidably connected with two the first x guide rails；
The moving platform, which is equipped with groove matched with the first y guide rails and is slided with two the first y guide rails, to be connected
It connects；
First motor stator drives the moving platform on the first x guide rails and first electric mover is in institute
It states on the 2nd x guide rails while does x-axis direction linear motion；
Second motor stator drives the moving platform on the first y guide rails and second electric mover is in institute
It states on the 2nd y guide rails while does y-axis direction linear motion.
Preferably, first motor and second motor are U-type groove linear motor.
Preferably, the bottom of the groove connecting is arranged in a crossed manner in the Stilt layer of first pedestal.
Preferably, the XY high-speed motion platforms of above-mentioned tier rack type decoupling further include：X directions grating scale；
X directions grating scale, which attaches, to be mounted on the 2nd x guide rails, for detecting the moving platform in x-axis direction
Displacement.
Preferably, the XY high-speed motion platforms of above-mentioned tier rack type decoupling further include：Y directions grating scale；
Y directions grating scale, which attaches, to be mounted on the 2nd y guide rails, for detecting the moving platform in y-axis direction
Displacement.
The present invention provides a kind of tier rack type decoupling XY high-speed motion platforms, including：First pedestal, the second pedestal, x-axis
Motion module, y-axis motion module and moving platform；The bottom surface of the x-axis motion module be the first plane, first base top surface
It attaches and connects with first plane；The bottom surface of the y-axis motion module be the second plane, second base top surface with it is described
Second plane attaches connection；First pedestal, which is maked somebody a mere figurehead, to be arranged in the second base top surface；The top surface of the moving platform is third
Plane, first plane and second plane are on different height perpendicular to the central shaft of the third plane；It is described dynamic
Platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or carry out y-axis direction based on the y-axis motion module
Linear motion.
The XY high-speed motion platforms of tier rack type decoupling provided by the invention, using parallel decoupling mode, make moving platform straight
It connects and is slidably connected with the first x guide rails with the first y guide rails, it is simple in structure, it is easier to ensure that moving platform in the direction of motion at work
It is consistent, be conducive to control plane movement track contour accuracy.The XY high-speed motions platform of tier rack type decoupling is electric by first
Machine, the second motor separate from moving platform in the different plane of height, different from the linear motor of existing parallel-connection decoupling platform
Put due to L-shaped, driving motor made seriously to limit the stroke of moving platform XY axial directions in placement axial XY, avoid due to
The problem of motor extension occupies motion platform displacement realizes the optimal utilization of XY spaces.
Description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
To obtain other attached drawings according to these attached drawings.
Fig. 1 is the structure diagram of the XY high-speed motion platforms of tier rack type of the present invention decoupling；
Fig. 2 is the internal structure schematic diagram of the XY high-speed motion platforms of tier rack type of the present invention decoupling；
Fig. 3 is the explosive view of the XY high-speed motion platforms of tier rack type of the present invention decoupling；
Wherein, reference numeral, the second pedestal 1, y-axis is to reading head 2, the 2nd y guide rails 3, and y-axis is to grating scale 4, and y-axis is to reading
Several installed parts 5, the second motor control part 6, the first motor stator 7, the first x guide rails 8, the first y guide rails 9, moving platform 10, x
Axial reading head installed part 11, x-axis is to grating scale 12, and x-axis is to reading head 13, and the 2nd x guide rails 14, the first pedestal 15, second is electric
Machine stator 16, the first electric mover 17.
Specific embodiment
The technical solution in the embodiment of the present invention is clearly and completely described below, it is clear that described embodiment
Only part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field
Art personnel all other embodiments obtained without making creative work belong to the model that the present invention protects
It encloses.
In order to which the present invention is described in more detail, with reference to embodiment to a kind of XY high of tier rack type decoupling provided by the invention
Fast motion platform is specifically described.
It please refers to Fig.1, Fig. 2 and Fig. 3, the present invention provides first of a kind of XY high-speed motion platforms of tier rack type decoupling
Embodiment, including the first pedestal 15, the second pedestal 1, x-axis motion module, y-axis motion module and moving platform 10；First pedestal 15
It makes somebody a mere figurehead and is in that right-angled intersection formula is fixed on the second pedestal 1, the top surface of moving platform 10 is third plane, wherein, x-axis motion module
The second plane belonging to the first affiliated plane and y-axis motion module is on different height perpendicular to 10 third plane of moving platform
Central shaft.
It is put it should be noted that the linear motor of conventional parallel-connection decoupling platform is L-shaped, driving motor is in XY axial directions
Placement seriously limit the strokes of moving platform XY axial directions.
And the first pedestal 15 is aerial in the present embodiment and is fixed on the second pedestal 1, forms tier rack type space, transports x-axis
Dynamic model block, y-axis motion module and moving platform 10 are in the plane of different height, have been reached saving space and have been expanded moving platform 10
The purpose of stroke.
Further, y-axis motion module includes the second motor control part and the 2nd y guide rails 3, the second motor control part
Including the second motor and the second connector 6.Wherein, the bottom surface of the y-axis motion module i.e. bottom surface of the second motor stator is flat for second
The top surface of face, the second plane and the second pedestal 1, which attaches, to be connected.Second connector 6 be fluted body, the outer bottom of the second connector 6
It is fixedly mounted with the second electric mover of L-type.Two article of the 2nd y guide rail 3 is mounted on the top surface of the second pedestal 1, parallel and be separated by
Preset distance is mounted on the outer bottom of the second connector 6 so that the second connector 6 can slidably reciprocate on the 2nd y guide rails 3.
Two article of the first x guide rail 8 is located at the top of the second connector 6 and is connected across its opening, moving platform 10 by the first x guide rails 8 with
The both sides connection of second connector 6.
Further, x-axis motion module includes：The bottom surface of first motor and the 2nd x guide rails 14, wherein x-axis motion module
I.e. the bottom surface of the first motor stator 7 is the first plane, and the top surface of the first pedestal 15 is attached with the first plane to be connected, two article of the 2nd x
Guide rail 14 is parallel and is separated by the both sides that preset distance is mounted on the first motor stator 7.First electric mover 17 is connected across in the y-direction
Between two the 2nd x guide rails 14 so that the first electric mover 17 can slidably reciprocate on the 2nd x guide rails 14, the first motor
The top surface of son 17 attaches and is equipped with two article of the first y guide rail 9, and moving platform 10 is connected by the first y guide rails 9 and the first electric mover 17
It connects.
Further, the first motor and the second motor are U-type groove linear motor, and there are two between metallic plate and all
Against the first electric mover 17 and the parallel track of the second electric mover of L-type, the L-type second of 6 lower surface of the second connector connection
Electric mover and the first electric mover 17 are put in the second motor stator 16 and the first motor stator 7 respectively so as to generate magnetic force,
Wherein the first electric mover 17 and the second electric mover put in the part of the first motor stator 7 and the second motor stator 16 using forever
Magnetic material or epoxy resin are made, and other parts are obtained using cast iron or steel.When the second motor 16 of lower floor is powered, production
The second connector of raw magnetic force moving 6 does y-axis direction straight line along the first y guide rails 9 along the 2nd y guide rails 3 and moving platform 10 and transports simultaneously
It is dynamic.When first motor 7 on upper strata is powered, the first electric mover of magnetic force moving 17 is generated along the 2nd x guide rails 14 and is moved flat
Platform 10 does x-axis direction linear motion simultaneously along the first x guide rails 8.When two layers of motor works independently, the movement of moving platform 10 completes
Decoupling in x-axis direction Yu y-axis direction.When the first motor and the second motor are powered work simultaneously, moving platform 10 is moved in x-axis
Direction forms x/y plane with the y-axis direction of motion, i.e. moving platform does plane motion in x/y plane, completes in x-axis direction and y-axis
The coupling of direction movement.
In embodiments of the present invention, moving platform 10 is directly slidably connected with the first x guide rails 8 with the first y guide rails 9, using simultaneously
Join decoupling mode, it is simple in structure, it is easier to ensure that moving platform 10 in the consistent of the direction of motion, is conducive to control plane at work
The track contour accuracy of movement.First motor stator 7, the second motor stator 16 and moving platform 10 separate in the different plane of height
It is interior, it avoids since motor extends the problem of occupying motion platform displacement, realizes the optimal utilization in X/Y plane space.
In addition, the setting of the 2nd y guide rails 3 and the 2nd x guide rails 14 can carry the second motor control part 6 and first respectively
The gravity of of electric mover 17 itself, on the one hand reduce the second connector 6 do y-axis direction movement when and the first electric mover 17
The power vertical with the direction of motion generated when doing x-axis direction linear motion improves the second motor control part 6 and the first electricity
The precision of motor-driven sub 17 movement, since the second motor control part 6, the first electric mover 17 are respectively in the 2nd y guide rails 3, the 2nd x
It is moved under the support of guide rail 14, without chatter caused by the cantilever beam structure of generic linear electric mover, and cross friendship
The first x guide rails 8 and the first y guide rails 9 of fork effectively can mutually inhibit the vibration of moving platform 10 during High acceleration motion, most
Eventually so that system high-speed stable motion.It improves the second connector 6, the first electric mover 17 and moving platform 10 and is doing y-axis direction
Or the stability of x-axis direction movement.
It is above a kind of one embodiment of the XY high-speed motion platforms of tier rack type decoupling provided in an embodiment of the present invention,
During below by way of second embodiment of XY high-speed motion platforms that a kind of tier rack type decouples to progress x-axis direction and direction displacement
Embodiment be specifically described.
As shown in figures 1 and 3, y-axis is mounted on the side wall of the second connector 6, y-axis to reading head installed part 5 by screw
Y-axis on reading head installed part 5 is installed to reading head 2, attaches to be equipped on the 2nd y guide rails 3 and match with y-axis to reading head 2
The y-axis of conjunction does y-axis direction linear motion as a whole to grating scale 4, y-axis to 2 and second motor control part 6 of reading head, and
It is recorded from y-axis to grating scale 4.Similarly, x-axis is mounted on the side of the first electric mover 7 to reading head installed part 11, in the 2nd x
It attaches and is equipped with x-axis to the x-axis that reading head 13 coordinates to grating scale 12 on guide rail 14.X-axis is to 13 and first motor of reading head
Mover 17 does x-axis direction linear motion as a whole, and is recorded from x-axis to grating scale 12.X-axis is to grating scale 12 and y-axis to light
Grid ruler 4 decouples xy directions or x directions displacement information feeds back to computer with y directions displacement information during the coupled motions of xy directions,
And then achieve the purpose that carry out precision measure and feedback to movement of the moving platform 10 in y-axis direction or x-axis direction.
The above, the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to before
Embodiment is stated the present invention is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or carry out equivalent replacement to which part technical characteristic；And these
Modification is replaced, the spirit and scope for various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of XY high-speed motion platforms of tier rack type decoupling, which is characterized in that including：First pedestal, the second pedestal, x-axis fortune
Dynamic model block, y-axis motion module and moving platform；
The bottom surface of the x-axis motion module is the first plane, and first base top surface is attached with first plane and connected；
The bottom surface of the y-axis motion module is the second plane, and second base top surface is attached with second plane and connected；
First pedestal, which is maked somebody a mere figurehead, to be arranged in the second base top surface；
The top surface of the moving platform is third plane, and first plane and second plane are on different height perpendicular to institute
State the central shaft of third plane；
The moving platform is based on the x-axis motion module and carries out x-axis direction linear motion and/or based on the y-axis motion module
Carry out y-axis direction linear motion.
A kind of 2. XY high-speed motion platforms of tier rack type decoupling according to claim 1, which is characterized in that the y-axis fortune
Dynamic model block includes：Second motor control part and the 2nd y guide rails；
Second motor control part includes the second connector and the second motor, second connector and second motor
Mover is fixedly connected；
The top of second motor stator is located at the bottom of second connector；
The bottom surface of second motor stator is second plane；
The 2nd y guide rails are mounted in second base top surface；
Second connector is slidably connected with the 2nd y guide rails.
3. the XY high-speed motion platforms of a kind of tier rack type decoupling according to claim 2, which is characterized in that described second connects
Fitting is groove connecting；
The groove connecting outer bottom is fixedly mounted with second electric mover；
Two the 2nd y guide rail parallels and it is separated by preset distance mounted on the groove connecting outer bottom；
The first x guide rails are located at the top of the groove connecting and are connected across the opening of the groove connecting.
4. a kind of XY high-speed motion platforms of tier rack type decoupling according to claims 1 to 3 any one, feature exist
In the x-axis motion module includes：First motor and the 2nd x guide rails；
The bottom surface of first motor stator is first plane；
The 2nd x guide rails are mounted in first base top surface；
First electric mover is slidably connected with the 2nd x guide rails.
5. the XY high-speed motion platforms of a kind of tier rack type decoupling according to claim 4, which is characterized in that two described the
Two x guide rail parallels and it is separated by preset distance in first base top surface；
First electric mover is connected across in the y-direction between two the 2nd x guide rails；
The first electric mover top surface attaches and is equipped with the first y guide rails.
A kind of 6. XY high-speed motion platforms of tier rack type decoupling according to claim 5, which is characterized in that the moving platform
It is slidably connected with two the first x guide rails；
The moving platform is equipped with groove matched with the first y guide rails and is slidably connected with two the first y guide rails；
First motor stator drives the moving platform on the first x guide rails and first electric mover is described the
X-axis direction linear motion is done on two x guide rails simultaneously；
Second motor stator drives the moving platform on the first y guide rails and second electric mover is described the
Y-axis direction linear motion is done on two y guide rails simultaneously.
A kind of 7. XY high-speed motion platforms of tier rack type decoupling according to claim 1, which is characterized in that first electricity
Machine is U-type groove linear motor with second motor.
8. the XY high-speed motion platforms of a kind of tier rack type decoupling according to claim 3, which is characterized in that the groove connects
The bottom of fitting is arranged in a crossed manner in the Stilt layer of first pedestal.
9. the XY high-speed motion platforms of a kind of tier rack type decoupling according to claim 8, which is characterized in that further include x side
To grating scale；
X directions grating scale, which attaches, to be mounted on the 2nd x guide rails, for detecting the moving platform in the position of x-axis direction
It moves.
10. the XY high-speed motion platforms of a kind of tier rack type decoupling according to claim 8, which is characterized in that further include y side
To grating scale；
Y directions grating scale, which attaches, to be mounted on the 2nd y guide rails, for detecting the moving platform in the position in y-axis direction
It moves.
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| CN201810188240.7A CN108206155B (en) | 2018-03-07 | 2018-03-07 | Layered-type decoupling XY high-speed motion platform |
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| CN201810188240.7A CN108206155B (en) | 2018-03-07 | 2018-03-07 | Layered-type decoupling XY high-speed motion platform |
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Cited By (7)
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| CN111761552A (en) * | 2020-06-30 | 2020-10-13 | 中南大学 | Motion platform suitable for optical communication device encapsulation |
| CN113334357A (en) * | 2021-06-17 | 2021-09-03 | 北京航空航天大学 | Series-parallel robot system and virtual RCM motion control method |
| CN113576592A (en) * | 2020-07-06 | 2021-11-02 | 深圳市鑫君特智能医疗器械有限公司 | Orthopedic surgery device and orthopedic surgery robot system |
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| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
| CN114487121A (en) * | 2021-12-15 | 2022-05-13 | 中国科学院深圳先进技术研究院 | Detection device |
| CN114865878A (en) * | 2022-05-05 | 2022-08-05 | 苏州艾科瑞思智能装备股份有限公司 | High-speed XYZ motion platform suitable for chip taking and placing of chip loader |
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