CN203927276U - The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke - Google Patents
The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke Download PDFInfo
- Publication number
- CN203927276U CN203927276U CN201420288677.5U CN201420288677U CN203927276U CN 203927276 U CN203927276 U CN 203927276U CN 201420288677 U CN201420288677 U CN 201420288677U CN 203927276 U CN203927276 U CN 203927276U
- Authority
- CN
- China
- Prior art keywords
- connecting plate
- ultralong
- track
- linear motor
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Linear Motors (AREA)
Abstract
The utility model provides a kind of ultralong-stroke the high high-accuracy location one-dimensional platform of accelerating, and comprises base, linear motor rotor, coarse positioning platform, piezoelectric actuator, high-accuracy locating platform, the first linear motor stator electric, the first buffering connecting plate, the second linear motor stator electric, the second buffering connecting plate.Coarse positioning platform connects high-accuracy locating platform by piezoelectric actuator, coarse positioning platform is connected with described ultralong-stroke linear motor stator electric, the first ultralong-stroke linear motor stator electric and the second ultralong-stroke linear motor stator electric are connected in series, the first buffering connecting plate and the second buffering connecting plate are by being connected in series to realize coarse positioning platform ultralong-stroke, the first ultralong-stroke linear motor stator electric is connected with marble base by the first buffering connecting plate, and the second buffering connecting plate is connected with marble base by the second buffering connecting plate.The high-accuracy location of the high acceleration of this ultralong-stroke one-dimensional platform has solved prior art cannot break through the high precision positioning problem of accelerating of longer stroke.
Description
Technical field:
The utility model relates to a kind of one-dimensional platform, relates in particular to the high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke.
Background technique
At ultraprecise, process, the precision engineering fields such as microelectronic manufacture, large stroke, high acceleration and high-accuracy locating platform play very important effect as key equipment, along with development in Hi-Tech and the market demand increase, when meeting high acceleration and high-accuracy location, had higher requirement in the location of ultralong-stroke.Design ultralong-stroke, the high-accuracy locating platform of high acceleration, for improving platform speed and acceleration, shorten machine time, effectively boost productivity significant.
It is mainly that voice coil motor and piezoelectric actuator etc. complete that current domestic height accelerates high-accuracy location, although these location improve for accelerating velocity, the stroke of location can be restricted; By ultralong-stroke linear electric motor, can break through the restriction of location stroke, realize ultralong-stroke, and meet the high high-accuracy location of accelerating, this application for modern field of microelectronic fabrication has certain application value.
Model utility content
For above-mentioned defect or deficiency, provide ultralong-stroke the high high-accuracy location one-dimensional platform of accelerating, this precision positioning one-dimensional platform has solved prior art cannot break through the high high-accuracy orientation problem of accelerating of ultralong-stroke.
For reaching above object, the technical solution of the utility model is:
Comprise, the the first buffering connecting plate and the second buffering connecting plate that are in series are installed on base, on the first buffering connecting plate, the first linear motor stator electric is installed, on the second buffering connecting plate, the second linear motor stator electric is installed, the first linear motor stator electric and the second linear motor stator electric are connected in series, formed ultralong-stroke motor linear motor stator electric, on ultralong-stroke motor linear motor stator electric, by track, coarse positioning platform is installed, the central authorities of coarse positioning platform are provided with high-accuracy locating platform, between coarse positioning platform and high-accuracy locating platform, by piezoelectric actuator, be connected, being provided with for the linear motor rotor of power is provided below of coarse positioning platform.
The first guide rail and the 3rd guide rail are installed on described the first linear motor stator electric, the second guide rail and the 4th guide rail are installed on the second linear motor stator electric, the first guide rail and the second guide rail are connected in series, formed the first super-long guiding rail, the 3rd guide rail and the 4th guide rail are connected in series, and have formed the second super-long guiding rail; The lower surface both sides of coarse positioning platform are provided with the first slide block matching with the first super-long guiding rail and the second super-long guiding rail.
The two ends of described the first super-long guiding rail and the second super-long guiding rail are provided with for the first guide rail block of displacement restriction and the second guide rail block.
On coarse positioning platform, be provided with for reading the coarse grating ruler reading head of coarse positioning platform moving displacement, and for reading the smart grating ruler reading head of high-accuracy locating platform moving displacement.
On described linear motor rotor, offer screw mouth, coarse positioning platform is fastenedly connected by screw mouth and linear motor rotor.
The two ends of described ultralong-stroke motor linear motor stator electric are provided with the first baffle plate and the second baffle moving in subscribing stroke for straight limit electric mover.
The first track and the second track are installed in one side of described base, the first track is in series and is connected with the second track, formed the first overlength track, the 3rd track and the 4th track are installed on the opposite side of base, the 3rd track is in series and is connected with the 4th track, formed the second overlength track, the first overlength track parallels with the second overlength track, and the outside of the first overlength track and the second overlength track is provided with some guide rod blocks; The the first buffering connecting plate being in series is identical with the second buffering connecting board structure, wherein, the both sides of the lower surface of the first buffering connecting plate are provided with the second slide block matching with the first overlength track and the second overlength track, the both sides of the first buffering connecting plate are provided with guide rod, the two ends of guide rod are arranged with spring, when the first buffering connecting plate is installed on base, the sheathed spring in two ends of guide rod is sticked in the both sides of guide rod block.
On described base, be provided with for limiting the first buffering connecting plate block and the second buffering connecting plate block of the first buffering connecting plate and the second buffering connecting plate displacement.
Compared with the prior art, of the present utility model produce effect into:
The utility model provides a kind of ultralong-stroke the high high-accuracy location one-dimensional platform of accelerating, the first ultralong-stroke linear motor stator electric and the second ultralong-stroke linear motor stator electric are connected in series, and can increase as required same straight line motor stator and connect, finally realize ultralong-stroke motion, in addition, due to the first buffering connecting plate and the second buffering connecting plate being installed between base and linear motor stator electric, and the first buffering connecting plate and the second buffering connecting plate are by being connected in series to realize motor vibration weakening or vibration isolation in movement process, finally realize the high one dimensional motion of accelerating high-accuracy location of ultralong-stroke.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technological scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the high high-accuracy location one-dimensional platform structural representation that accelerates of the utility model ultralong-stroke;
The one dimension locating platform structural representation that Fig. 2 provides for the utility model embodiment;
The linear motor rotor structure for amplifying schematic diagram that Fig. 3 provides for the utility model embodiment;
Fig. 4 provides the structure for amplifying schematic diagram of ultralong-stroke motor stator for the utility model embodiment;
The structure for amplifying schematic diagram of the cushion plate that Fig. 5 provides for the utility model embodiment;
The marble base structure for amplifying schematic diagram that Fig. 6 provides for the utility model embodiment.
In figure, 1 is base, 2 is linear motor rotor, 3 is coarse positioning platform, 4 is piezoelectric actuator, 5 is high-accuracy locating platform, 6 is the first linear motor stator electric, 7 is the first buffering connecting plate, 8 is the second linear motor stator electric, 9 is the second buffering connecting plate, 10 is the first slide block, 11 is coarse grating ruler reading head, 12 is smart grating ruler reading head, 13 is screw mouth, 14 is the first baffle plate, 15 is the first guide rail block, 16-1 is the first guide rail, 16-2 is the 3rd guide rail, 17-1 is the second guide rail, 17-2 is the 4th guide rail, 18 is the second guide rail block, 19 is second baffle, 20 is screw, 21 is fixed hole, 22 is spring, 23 is guide rod, 24 is the second slide block, 25 is the first block, 26 is guide rod block, 27-1 is the first track, 27-2 is the 3rd track, 28-1 is the second track, 28-2 is the 4th track, 29 is the second block.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technological scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiments.Embodiment based in the utility model, those of ordinary skills are not making the every other embodiment who obtains under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, the utility model provides a kind of ultralong-stroke the high high-accuracy location one-dimensional platform of accelerating, comprise, the the first buffering connecting plate 7 and the second buffering connecting plate 9 that are in series are installed on base 1, on the first buffering connecting plate 7, the first linear motor stator electric 6 is installed, on the second buffering connecting plate 9, the second linear motor stator electric 8 is installed, the first linear motor stator electric 6 and the second linear motor stator electric 8 are connected in series, formed ultralong-stroke motor linear motor stator electric, in the utility model, in the selection of stroke, can connect to expand movement travel by increasing identical linear motor stator electric, finally realize the moving displacement of ultralong-stroke, on ultralong-stroke motor linear motor stator electric, by track, coarse positioning platform 3 is installed, the central authorities of coarse positioning platform 3 are provided with high-accuracy locating platform 5, between coarse positioning platform 3 and high-accuracy locating platform 5, by piezoelectric actuator 4, be connected, being provided with for the linear motor rotor 2 of power is provided below of coarse positioning platform 3, wherein, base of the present utility model is marble base, and the first buffering connecting plate 7 and the second buffering connecting plate 9 are all fixedly installed on marble base by positioning hole 21.
As shown in Figure 2,4, the first guide rail 16-1 and the 3rd guide rail 16-2 are installed on described the first linear motor stator electric 6, the second guide rail 17-1 and the 4th guide rail 17-2 are installed on the second linear motor stator electric 8, the first guide rail 16-1 and the second guide rail 17-1 are connected in series, formed the first super-long guiding rail, the 3rd guide rail 16-2 and the 4th guide rail 17-2 are connected in series, and have formed the second super-long guiding rail; The lower surface both sides of coarse positioning platform 3 are provided with the first slide block 10 matching with the first super-long guiding rail and the second super-long guiding rail, on coarse positioning platform 3, be provided with for reading the coarse grating ruler reading head 11 of coarse positioning platform 3 moving displacements, and for reading the smart grating ruler reading head 12 of high-accuracy locating platform 5 moving displacements; Further, the two ends of the first super-long guiding rail and the second super-long guiding rail are provided with for the first guide rail block 15 of displacement restriction and the second guide rail block 18, the two ends of ultralong-stroke motor linear motor stator electric are provided with the first baffle plate 14 of moving in subscribing stroke for straight limit electric mover 6 and second baffle 19, the first guide rail blocks 15 and the second guide rail block 18 and are installed on the first baffle plate 14 and second baffle 19.
As shown in Figure 3, offer screw mouth 13 on linear motor rotor 2, coarse positioning platform 3 is fastenedly connected by screw mouth 13 and linear motor rotor 2.
As shown in Figure 5,6, the first track 27-1 and the second track 28-1 are installed in one side of base 1, the first track 27-1 is in series and is connected with the second track 28-1, formed the first overlength track, the 3rd track 27-2 and the 4th track 28-2 are installed on one opposite side of base 1, the 3rd track 27-2 is in series and is connected with the 4th track 28-2, formed the second overlength track, the first overlength track parallels with the second overlength track, and the outside of the first overlength track and the second overlength track is provided with some guide rod blocks 26, the the first buffering connecting plate 7 being in series is identical with the second buffering connecting plate 9 structures, wherein, the both sides of the lower surface of the first buffering connecting plate 7 are provided with the second slide block 24 matching with the first overlength track and the second overlength track, the both sides of the first buffering connecting plate 7 are provided with guide rod 23, and it is fixing by screw, to pass fixed hole 21, the two ends of guide rod 23 are arranged with spring 22, when the first buffering connecting plate 7 is installed on base 1, the sheathed spring 22 in two ends of guide rod 23 is sticked in the both sides of guide rod block 26, by spring 22, absorb or lower the vibrational energy of platform.On described base 1, be provided with for limiting the first block 25 of the first buffering connecting plate and second block 29 of the second buffering connecting plate of the first buffering connecting plate 7 and the second buffering connecting plate 9 displacements, to prevent from exceeding displacement restriction, the two ends of the first buffering connecting plate 7 and the second buffering connecting plate 9 offer for the screw 20 of the first baffle plate 14 and second baffle 19 is installed.
Working procedure of the present utility model is:
Linear motor rotor 2 drives coarse positioning platform 3 to carry out micron location on ultralong-stroke motor linear motor stator electric, by coarse grating chi plug 11, read coarse positioning platform positioning precision, read smart grating scale positioning precision simultaneously, obtain fine positioning platform positioning error, by voltage actuation device 4, drive fine positioning platform to carry out nanometer positioning.The vibration producing in coarse positioning platform high-speed motion process weakens by cushion plate and absorbs.The height of finally realizing ultralong-stroke accelerates ultraprecise position fixing process.
The utility model forms the power section of coarse positioning platform linear motor rotor 2 with first linear motor stator electric 6 of connecting and the second linear motor stator electric 8.Between coarse positioning platform 3 and high-accuracy locating platform 5, by piezoelectric actuator 4, improve micro-driving.On coarse positioning platform 3, be provided with for reading the coarse grating ruler reading head 11 of coarse positioning platform 3 moving displacements, and for reading the smart grating ruler reading head 12 of high-accuracy locating platform 5 moving displacements.The both sides of the lower surface of the first buffering connecting plate 7 are provided with the second slide block 24 matching with the first overlength track and the second overlength track, the both sides of the first buffering connecting plate 7 are provided with guide rod 23, and it is fixing by screw, to pass fixed hole 21, the two ends of guide rod 23 are arranged with spring 22, when the first buffering connecting plate 7 is installed on base 1, the sheathed spring 22 in two ends of guide rod 23 is sticked in the both sides of guide rod block 26, is absorbed or lowered the vibrational energy of platform by spring 22.The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (8)
1. a ultralong-stroke height accelerates high-accuracy location one-dimensional platform, it is characterized in that, comprise, the the first buffering connecting plate (7) and the second buffering connecting plate (9) that are in series are installed on base (1), on the first buffering connecting plate (7), the first linear motor stator electric (6) is installed, on the second buffering connecting plate (9), the second linear motor stator electric (8) is installed, the first linear motor stator electric (6) is connected in series with the second linear motor stator electric (8), formed ultralong-stroke motor linear motor stator electric, on ultralong-stroke motor linear motor stator electric, by track, coarse positioning platform (3) is installed, the central authorities of coarse positioning platform (3) are provided with high-accuracy locating platform (5), between coarse positioning platform (3) and high-accuracy locating platform (5), by piezoelectric actuator (4), be connected, linear motor rotor (2) for power is provided is installed below coarse positioning platform (3).
2. ultralong-stroke height according to claim 1 accelerates high-accuracy location one-dimensional platform, it is characterized in that, the first guide rail (16-1) and the 3rd guide rail (16-2) are installed on described the first linear motor stator electric (6), the second guide rail (17-1) and the 4th guide rail (17-2) are installed on the second linear motor stator electric (8), the first guide rail (16-1) is connected in series with the second guide rail (17-1), formed the first super-long guiding rail, the 3rd guide rail (16-2) is connected in series with the 4th guide rail (17-2), has formed the second super-long guiding rail; The lower surface both sides of coarse positioning platform (3) are provided with the first slide block (10) matching with the first super-long guiding rail and the second super-long guiding rail.
3. ultralong-stroke height according to claim 2 accelerates high-accuracy location one-dimensional platform, it is characterized in that, the two ends of described the first super-long guiding rail and the second super-long guiding rail are provided with for the first guide rail block (15) of displacement restriction and the second guide rail block (18).
4. ultralong-stroke height according to claim 1 and 2 accelerates high-accuracy location one-dimensional platform, it is characterized in that, on coarse positioning platform (3), be provided with for reading the coarse grating ruler reading head (11) of coarse positioning platform (3) moving displacement, and for reading the smart grating ruler reading head (12) of high-accuracy locating platform (5) moving displacement.
5. ultralong-stroke height according to claim 1 and 2 accelerates high-accuracy location one-dimensional platform, it is characterized in that, on described linear motor rotor (2), offer screw mouth (13), coarse positioning platform (3) is fastenedly connected by screw mouth (13) and linear motor rotor (2).
6. ultralong-stroke height according to claim 1 accelerates high-accuracy location one-dimensional platform, it is characterized in that, the two ends of described ultralong-stroke motor linear motor stator electric are provided with the first baffle plate (14) and the second baffle (19) moving in subscribing stroke for straight limit electric mover (6).
7. ultralong-stroke height according to claim 1 accelerates high-accuracy location one-dimensional platform, it is characterized in that, the first track (27-1) and the second track (28-1) are installed in one side of described base (1), the first track (27-1) is in series and is connected with the second track (28-1), formed the first overlength track, the 3rd track (27-2) and the 4th track (28-2) are installed on the opposite side of base (1), the 3rd track (27-2) is in series and is connected with the 4th track (28-2), formed the second overlength track, the first overlength track parallels with the second overlength track, the outside of the first overlength track and the second overlength track is provided with some guide rod blocks (26), the the first buffering connecting plate (7) being in series is identical with the second buffering connecting plate (9) structure, wherein, the both sides of the lower surface of the first buffering connecting plate (7) are provided with the second slide block (24) matching with the first overlength track and the second overlength track, the both sides of the first buffering connecting plate (7) are provided with guide rod (23), the two ends of guide rod (23) are arranged with spring (22), when the first buffering connecting plate (7) is installed on base (1), the sheathed spring (22) in two ends of guide rod (23) is sticked in the both sides of guide rod block (26).
8. ultralong-stroke height according to claim 1 accelerates high-accuracy location one-dimensional platform, it is characterized in that, on described base (1), be provided with for limiting the first buffering connecting plate block (25) and the second buffering connecting plate block (29) of the first buffering connecting plate (7) and the second buffering connecting plate (9) displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420288677.5U CN203927276U (en) | 2014-05-30 | 2014-05-30 | The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420288677.5U CN203927276U (en) | 2014-05-30 | 2014-05-30 | The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203927276U true CN203927276U (en) | 2014-11-05 |
Family
ID=51823087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420288677.5U Expired - Fee Related CN203927276U (en) | 2014-05-30 | 2014-05-30 | The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203927276U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019332A (en) * | 2014-05-30 | 2014-09-03 | 西安交通大学 | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform |
| CN106514298A (en) * | 2016-11-28 | 2017-03-22 | 洛阳利维科技有限公司 | Dual-table series connection type combined sliding table |
| CN107560978A (en) * | 2016-06-30 | 2018-01-09 | 中国航发商用航空发动机有限责任公司 | The dynamic property apparatus for evaluating of particle detections sensor |
-
2014
- 2014-05-30 CN CN201420288677.5U patent/CN203927276U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019332A (en) * | 2014-05-30 | 2014-09-03 | 西安交通大学 | Super-long-stroke high-acceleration high-precision-positioning one-dimensional platform |
| CN104019332B (en) * | 2014-05-30 | 2015-12-02 | 西安交通大学 | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform |
| CN107560978A (en) * | 2016-06-30 | 2018-01-09 | 中国航发商用航空发动机有限责任公司 | The dynamic property apparatus for evaluating of particle detections sensor |
| CN106514298A (en) * | 2016-11-28 | 2017-03-22 | 洛阳利维科技有限公司 | Dual-table series connection type combined sliding table |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104019332B (en) | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform | |
| CN108206155B (en) | Layered-type decoupling XY high-speed motion platform | |
| CN103318839B (en) | The grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and changing method | |
| CN103982756A (en) | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform | |
| CN103604028B (en) | Precision positioning tandem one-dimensional platform | |
| CN203927276U (en) | The high high-accuracy location one-dimensional platform of accelerating of a kind of ultralong-stroke | |
| CN106891306B (en) | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure | |
| CN103021473A (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN204179920U (en) | Linear electric motors module | |
| CN203092144U (en) | Coaxial macro-micro composite linear motion platform device | |
| CN103926805A (en) | Planar motor-driven coarse motion and fine motion integrated mask platform | |
| CN103219049B (en) | Precise positioning one-dimensional platform | |
| CN203179557U (en) | Precise positioning one-dimensional platform | |
| CN105765663B (en) | A kind of high precision plane alignment system | |
| CN103580444B (en) | Linear motor | |
| CN108173408B (en) | Three-degree-of-freedom positioning platform | |
| CN103909427A (en) | Mixed excitation magnetic suspension feeding platform | |
| CN206568154U (en) | Coordinates robot | |
| CN101610022A (en) | A kind of planar motor that adopts groove-type coil | |
| CN202028928U (en) | Low-loading and high-speed XY working table | |
| CN101888163B (en) | Direct-drive switched reluctance planar motor | |
| CN204221751U (en) | XY worktable | |
| CN207732608U (en) | A kind of Three Degree Of Freedom locating platform | |
| CN203827153U (en) | Linear motor and motor platform | |
| CN208045466U (en) | A kind of XY high-speed motion platforms of tier rack type decoupling |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141105 Termination date: 20160530 |