CN103909427A - Mixed excitation magnetic suspension feeding platform - Google Patents

Mixed excitation magnetic suspension feeding platform Download PDF

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Publication number
CN103909427A
CN103909427A CN201410153734.3A CN201410153734A CN103909427A CN 103909427 A CN103909427 A CN 103909427A CN 201410153734 A CN201410153734 A CN 201410153734A CN 103909427 A CN103909427 A CN 103909427A
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CN
China
Prior art keywords
feeding platform
suspension
excitation magnetic
magnetic suspension
composite excitation
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Granted
Application number
CN201410153734.3A
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Chinese (zh)
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CN103909427B (en
Inventor
余思佳
杨红兵
戴跃洪
杨仁杰
孙诚
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN201410153734.3A priority Critical patent/CN103909427B/en
Publication of CN103909427A publication Critical patent/CN103909427A/en
Application granted granted Critical
Publication of CN103909427B publication Critical patent/CN103909427B/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Machine Tool Units (AREA)

Abstract

The invention discloses a mixed excitation magnetic suspension feeding platform. The mixed excitation magnetic suspension feeding platform is composed of a suspended working table, a V-shaped guide rail and two linear motors, wherein the suspended working table is a frame structure which is structurally matched with the V-shaped guide rail; the suspended working table and the V-shaped guide rail are symmetrically about a central axis; the two linear motors are mounted on the suspended working table and the V-shaped guide rail and are symmetrically about the central axis. Each linear motor comprises an iron core rotor and an iron core stator, wherein the iron core rotor is connected with the suspended working table, and the iron core stator is mounted on the V-shaped guide rail. According to the mixed excitation magnetic suspension feeding platform, by arranging a simple structure without any electromagnet, the suspension power consumption can be reduced, the cost can be saved, meanwhile, the equipment complexity can be reduced, and the suspension stability and the positioning precision can be improved.

Description

A kind of composite excitation magnetic suspension feeding platform
Technical field
The present invention relates to a kind of Digit Control Machine Tool feeding platform technology, relate in particular to a kind of composite excitation magnetic suspension feeding platform.
Background technology
In Digit Control Machine Tool feeding process, between moving component and guide rail, exist friction, and the existence of this friction has much more harms than benefits for feed motion.First, it has increased the power attenuation of drive system, has reduced efficiency, kinematic accuracy and service life, and has improved maintenance cost.Secondly, it can produce motion artifacts and system heating, even can make precise part distortion.Owing to existing non-linear relation between friction and movement velocity, especially in small quantity, low speed feeding situation, this non-linear relation be difficult to hold, even may produce creeping phenomenon, heavy damage the performance requirement of drive system to high accuracy, highly-responsive.
Industry research staff is devoted to magnetic levitation technology to be applied to NC machine tool feed system, wishes all the problems referred to above can be readily solved.Rong-Jong Wai etc. has developed a kind of long stroke magnetic suspension linear setting movement platform, can realize the straight-line feed motion of large stroke, but this platform can not be realized ultraprecise motion.Chia-Hsiang Menq etc. has developed the floating platform of a kind of high accuracy magnetic, attempted various advanced persons' control method and the most at last the suspension precision of platform brought up to about tens nanometer, but this platform can only be realized the micromotion of little stroke the straight-line feed motion of large stroke can not be provided.
The patent " commercial Application type active magnetic suspension machine tool guide linear motor feeding platform " of people's applications such as Zhang Gang, it includes the guide rail that is fixed on support, is sleeved on mobile platform and linear motor on guide rail, linear motor is positioned on the center line of guide rail, and the guide rail top and bottom of its both sides arrange levitating electromagnet, the two sides of guide rail arrange guiding electromagnet, levitating electromagnet is fixedly connected with mobile platform with guiding electromagnet, and their middle parts are provided with displacement transducer and are connected to mobile platform position control system.The patent " a kind of Novel numerical control machine magnetic suspension linear feed of numerical-control machine tool magnetic suspension linear feeding system system " of the people such as Ge Yanjun application mainly comprises support, two guide rails, the linear motor rotor parts that are fixed thereon, be arranged on the differential levitating electromagnet of four couples at four angles, workbench bottom, be arranged on levitating electromagnet side two pairs of guiding electromagnets, be arranged on linear motor mover component below workbench, be arranged on optical grating measuring system and bracing or strutting arrangement on guide rail.
Above-mentioned magnetic suspension feeding platform mainly adopts high-speed double electromagnet magnetic suspension, deposits defect both ways.One, vertical suspension power, level guidance force and the horizontal actuator force of suspension system are independently to be produced by different systems, structure relative complex, and need at least three controllers such as suspension controller, guide controller, driving governor, required controlling unit is various, cost costliness.They are two years old, except providing the electromagnetic actuation force of use, also there is intrinsic normal direction magnetic attraction in linear motor, normal direction magnetic attraction is often much bigger than electromagnetic actuation force, and can change along with the variation of armature supply, thereby affect suspension stability and the positioning precision of floating platform.
Summary of the invention
The technical problem that the present invention mainly solves is to provide a kind of composite excitation magnetic suspension feeding platform, its feed mechanism using a kind of novel composite excitation magnetic suspension mechanism as high speed and super precision Digit Control Machine Tool, structure is relative simple with control, can improve positioning precision and the suspension stability of feeding platform.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: a kind of composite excitation magnetic suspension feeding platform is provided, and it comprises suspension workbench, V-type rail, two linear motors.Wherein, suspension workbench is the frame structure matching with V-type rail structure, and suspension workbench and V-type rail are about a central axis symmetry; Two linear motors are arranged on suspension workbench and V-type rail, and about described central axis symmetry.Each linear motor comprises mover core and stator core, and described mover core is connected with suspension workbench; Described stator core is arranged on V-type rail.
In a preferred embodiment of the present invention, described composite excitation magnetic suspension feeding platform also comprises first direction current vortex sensor, grating sensor, second direction current vortex sensor, first direction current vortex sensor and second direction current vortex sensor are arranged on suspension workbench, and grating sensor is arranged on V-type track.
In a preferred embodiment of the present invention, described V-type rail comprises a body, and it comprises end face, side and bottom surface, and its bottom surface is formed by complete centrosymmetric two inclined-planes.
In a preferred embodiment of the present invention, described stator core is arranged on the body bottom surface of V-type rail, and its inside is provided with Exciting Windings for Transverse Differential Protection, and surface is provided with permanent magnet.
In a preferred embodiment of the present invention, described suspension workbench is the non-closed frame being formed by upper beam, curb girder and cantilever; Wherein, end face, side and the bottom surface of the upper beam of suspension workbench, curb girder and cantilever and V-type rail body are corresponding and keep suitably distance to be arranged in parallel respectively.
In a preferred embodiment of the present invention, described mover core is connected with the cantilever of suspension workbench, and its inside is provided with armature winding.
In a preferred embodiment of the present invention, the curb girder inner surface of described suspension workbench is symmetrically arranged with described first direction current vortex sensor.
In a preferred embodiment of the present invention, the upper beam inner surface of described suspension workbench arranges symmetry described second direction current vortex sensor.
In a preferred embodiment of the present invention, on the body end face of described V-type rail, be symmetrically arranged with described grating sensor.
In a preferred embodiment of the present invention, described composite excitation magnetic suspension feeding platform also comprises control system, and described Exciting Windings for Transverse Differential Protection, armature winding, first direction current vortex sensor, second direction current vortex sensor and grating sensor are connected to described control system.
The invention has the beneficial effects as follows: the present invention proposes a kind of V-structure guide rail, two linear motors of symmetric configuration; Be inverted by linear motor, adopt the feeding of magnetic suspension mode, provide suspending power and guiding force by linear motor simultaneously; Control for simplifying, adopt composite excitation synchronous linear electric motor; Be combined with the composite excitation linear motor being arranged symmetrically with by feeding platform special construction, realized the simple structure of magnetic suspension platform without additional any electromagnet.Thereby, reduce and realized the power consumption suspending, save cost, reduced the complexity of device simultaneously; Utilize the linear motor normal direction magnetic attraction that affects suspension system stability and positioning precision as suspending power and guiding force, can improve suspension stability and positioning precision.Because driving force, suspending power and the guiding force of suspension system are all produced by linear motor, it is one that drive system, suspension system and guidance system close three, simplifies the structure, and has reduced controlling unit.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing, wherein:
Fig. 1 is the structural representation of composite excitation magnetic suspension feeding platform of the present invention.
Fig. 2 is the cutaway view of Fig. 1 along dotted line A-A.
In accompanying drawing, the mark of each parts is as follows: 1, mover core; 2, stator core; 3, suspension workbench; 31, upper beam; 32, curb girder; 33, cantilever; 4, V-type rail; 41, end face; 42, side; 43, bottom surface; 5, armature winding; 6, permanent magnet; 7, Exciting Windings for Transverse Differential Protection; 8, first direction current vortex sensor; 9, grating sensor; 10, second direction current vortex sensor.
The specific embodiment
To the technical scheme in the embodiment of the present invention be clearly and completely described below, obviously, described embodiment is only a part of embodiment of the present invention, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making all other embodiment that obtain under creative work prerequisite, belong to the scope of protection of the invention.
The object of the invention is the defect existing for prior art, a kind of composite excitation magnetic suspension feeding platform structure is provided, its feed mechanism using a kind of novel composite excitation magnetic suspension mechanism as high speed and super precision Digit Control Machine Tool, structure is relative simple with control, the problem of simultaneously well having avoided again linear motor normal direction magnetic attraction to bring, can improve positioning precision and the suspension stability of feeding platform.
As shown in Figure 1, 2, composite excitation magnetic suspension feeding platform of the present invention comprises V-type rail 4, suspension workbench 3, linear motor (figure is mark not), first direction current vortex sensor 8, grating sensor 9, second direction current vortex sensor 10.The body of V-type rail 4 comprises end face 41, side 42 and bottom surface 43, and its bottom surface is formed by complete centrosymmetric two inclined-planes.
Suspension workbench 3 is the frame structure matching with V-type rail 4 structures, and suspension workbench and V-type rail are about a central axis B-B symmetry.As illustrated in fig. 1 and 2, the non-closed frame of suspension workbench 3 for being formed by upper beam 31, curb girder 32 and cantilever 33.Wherein, end face 41, side 42 and the bottom surface 43 of the upper beam 31 of suspension workbench 3, curb girder 32 and cantilever 33 and V-type rail 4 bodies are corresponding and be arranged in parallel.In Fig. 1 and Fig. 2, under suspension workbench 3 duties, in suspended state, after energising, can be just namely the state shown in Fig. 1,2, the workbench 3 that suspends while work be to be placed on the end face 41 of V-type rail 4 bodies.
Two linear motors are symmetrical along central axis B-B.Two linear motor structures are identical, and this linear motor of sentencing a side is that example describes.Stator core 2 is arranged on the body bottom surface 43 of V-type rail 4, and its inside is provided with Exciting Windings for Transverse Differential Protection 7, and surface is provided with permanent magnet 6.Mover core 1 is connected with the cantilever 33 of suspension workbench 3, and its inside is provided with armature winding 5.
Curb girder 32 inner surfaces of suspension workbench 3 are symmetrically arranged with first direction current vortex sensor 8, and upper beam 31 inner surfaces arrange symmetry second direction current vortex sensor 10, on the body end face 41 of V-type rail 4, are symmetrically arranged with grating sensor 9.Second direction current vortex sensor 10 is for measuring the suspension displacement of the vertical z direction of suspension workbench, first direction current vortex sensor 8 is for measuring the guiding displacement of the horizontal y direction of suspension workbench, and grating sensor 9 is for measuring the feeding displacement of the horizontal x direction of suspension workbench.
The present embodiment provides suspending power by the vertical component Fz of the normal direction magnetic attraction Fn of two linear motors, and horizontal component Fy provides level guidance force, and the electromagnetic push Fx of linear motor provides horizontal actuator force.Characteristic by composite excitation linear motor: normal direction magnetic attraction mainly determines by exciting current, electromagnetic push is mainly determined by armature supply.Therefore regulate exciting current can control normal direction magnetic attraction, and then realize stable suspersion; Regulate the armature supply can level of control driving force, realize feed motion.
Described Exciting Windings for Transverse Differential Protection 7, armature winding 5, first direction current vortex sensor 8, second direction current vortex sensor 10 and grating sensor 9 are connected to control system, pass through Uncoupling Control Based, the motion of three directions of this feeding platform x, y, z can realize full decoupled control, the i.e. suspension of this magnetic suspension feeding platform, guiding, feeding be separate, be independent of each other, three reverse motions can be controlled respectively and not disturb the motion of other directions, can improve suspension stability and positioning precision.
It should be noted that: composite excitation magnetic suspension feeding platform structure of the present invention is symmetrical, only the structure of half is wherein had been described in detail here, second half structure is identical.
The present invention directly drives the structure of feeding platform and control as basic goal to simplify Digit Control Machine Tool, has proposed a kind of V-structure guide rail, two linear motors of symmetric configuration; And adopt the feeding of magnetic suspension mode, provide suspending power and guiding force by linear motor simultaneously; Control for simplifying, adopt composite excitation synchronous linear electric motor.Be inverted by linear motor, suspending power and guiding force are provided simultaneously; Be combined with the composite excitation linear motor being arranged symmetrically with by feeding platform special construction, realized the simple structure of magnetic suspension platform without additional any electromagnet.
The novel composite excitation magnetic suspension feeding platform that the present invention proposes in sum has the following advantages:
(1) do not need electromagnet suspension system, reduced and realized the power consumption suspending, thereby saved cost, reduced the complexity of device simultaneously.
(2) utilize the linear motor normal direction magnetic attraction that affects suspension system stability and positioning precision as suspending power and guiding force, can improve suspension stability and positioning precision.
(3) driving force of suspension system, suspending power and guiding force are all produced by linear motor, and it is one that drive system, suspension system and guidance system close three, simplifies the structure, and has reduced controlling unit.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes description of the present invention to do; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.

Claims (10)

1. a composite excitation magnetic suspension feeding platform, it is characterized in that, it comprises suspension workbench (3), V-type rail (4), two linear motors, wherein, suspension workbench is the frame structure matching with V-type rail structure, and suspension workbench and V-type rail are about a central axis symmetry; Two linear motors are arranged on suspension workbench and V-type rail, and about described central axis symmetry; Each linear motor comprises mover core (1) and stator core (2); Described mover core is connected with suspension workbench; Described stator core is arranged on V-type rail.
2. composite excitation magnetic suspension feeding platform according to claim 1, it is characterized in that, described composite excitation magnetic suspension feeding platform also comprises first direction current vortex sensor (8), grating sensor (9), second direction current vortex sensor (10), first direction current vortex sensor and second direction current vortex sensor are arranged on suspension workbench, and grating sensor is arranged on V-type track.
3. composite excitation magnetic suspension feeding platform according to claim 1 and 2, is characterized in that, described V-type rail comprises a body, and it comprises end face (41), side (42) and bottom surface (43), and its bottom surface is formed by complete centrosymmetric two inclined-planes.
4. composite excitation magnetic suspension feeding platform according to claim 3, is characterized in that, described stator core is arranged on the body bottom surface of V-type rail, and its inside is provided with Exciting Windings for Transverse Differential Protection (7), and surface is provided with permanent magnet (6).
5. composite excitation magnetic suspension feeding platform according to claim 3, is characterized in that, described suspension workbench is the non-closed frame being formed by upper beam (31), curb girder (32) and cantilever (33); Wherein, end face, side and the bottom surface of the upper beam of suspension workbench, curb girder and cantilever and V-type rail body are corresponding and keep suitably distance to be arranged in parallel respectively.
6. composite excitation magnetic suspension feeding platform according to claim 5, is characterized in that, described mover core is connected with the cantilever of suspension workbench, and its inside is provided with armature winding (5).
7. composite excitation magnetic suspension feeding platform according to claim 5, is characterized in that, the curb girder inner surface of described suspension workbench is symmetrically arranged with described first direction current vortex sensor.
8. composite excitation magnetic suspension feeding platform according to claim 5, is characterized in that, the upper beam inner surface of described suspension workbench arranges symmetry described second direction current vortex sensor.
9. composite excitation magnetic suspension feeding platform according to claim 5, is characterized in that, on the body end face of described V-type rail, is symmetrically arranged with described grating sensor.
10. composite excitation magnetic suspension feeding platform according to claim 6, it is characterized in that, described composite excitation magnetic suspension feeding platform also comprises control system, and described Exciting Windings for Transverse Differential Protection, armature winding, first direction current vortex sensor, second direction current vortex sensor and grating sensor are connected to described control system.
CN201410153734.3A 2014-04-17 2014-04-17 A kind of composite excitation magnetic suspension feeding platform Expired - Fee Related CN103909427B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105522400A (en) * 2016-01-22 2016-04-27 缪雪峰 Permanent magnet suspension slide guide for mini-type machine tool
CN106516758A (en) * 2015-07-13 2017-03-22 南通大学 Self-driven type magnetic levitation curved and straight compound circulation type conveying unit with application field expanded
CN109870261A (en) * 2019-03-01 2019-06-11 西北工业大学 A kind of lower resistance magnetic suspension platform for microdriver thrust measurement
CN113084536A (en) * 2021-04-12 2021-07-09 南通佳润精密科技有限公司 Magnetic suspension guide rail for angle-adjustable machine tool equipment
CN113293523A (en) * 2021-05-17 2021-08-24 杭州奇丰科技有限公司 Reciprocating type water thorn device of magnetic suspension

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1415456A (en) * 2002-08-30 2003-05-07 中国科学院长春光学精密机械与物理研究所 Magnetic suspension method for guide rail with ultra precise and micro displacement
CN1528559A (en) * 2003-10-16 2004-09-15 上海大学 Industrial-application type active magnetic suspension machine tool guide linear motor feeding platform
CN101024270A (en) * 2006-12-12 2007-08-29 大连交通大学 Numerical-control machine tool magnetic suspension linear feeding system
CN201224044Y (en) * 2008-07-09 2009-04-22 大连交通大学 Repulsion force type magnetic floating linear feed system for numerical control machine tool
CN101972933A (en) * 2010-11-19 2011-02-16 沈阳工业大学 Magnetic suspension motion platform of precision heavy machine tool driven by double linear synchronous motors
CN102001014A (en) * 2010-11-19 2011-04-06 沈阳工业大学 Magnetic suspension feeding platform of long stator hybrid excitation linear synchronous motor
US20120319505A1 (en) * 2010-03-04 2012-12-20 Kabushiki Kaisha Yaskawa Denki Stage apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1415456A (en) * 2002-08-30 2003-05-07 中国科学院长春光学精密机械与物理研究所 Magnetic suspension method for guide rail with ultra precise and micro displacement
CN1528559A (en) * 2003-10-16 2004-09-15 上海大学 Industrial-application type active magnetic suspension machine tool guide linear motor feeding platform
CN101024270A (en) * 2006-12-12 2007-08-29 大连交通大学 Numerical-control machine tool magnetic suspension linear feeding system
CN201224044Y (en) * 2008-07-09 2009-04-22 大连交通大学 Repulsion force type magnetic floating linear feed system for numerical control machine tool
US20120319505A1 (en) * 2010-03-04 2012-12-20 Kabushiki Kaisha Yaskawa Denki Stage apparatus
CN101972933A (en) * 2010-11-19 2011-02-16 沈阳工业大学 Magnetic suspension motion platform of precision heavy machine tool driven by double linear synchronous motors
CN102001014A (en) * 2010-11-19 2011-04-06 沈阳工业大学 Magnetic suspension feeding platform of long stator hybrid excitation linear synchronous motor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
孙宝玉等: "直线驱动磁悬浮进给机构的研究", 《光学精密工程》 *
宋文荣等: "磁悬浮进给机构的磁力耦合", 《光学精密工程》 *
马苏扬等: "直接驱动型磁悬浮直线进给单元", 《机床与液压》 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106516758A (en) * 2015-07-13 2017-03-22 南通大学 Self-driven type magnetic levitation curved and straight compound circulation type conveying unit with application field expanded
CN106516758B (en) * 2015-07-13 2018-08-10 南通大学 Expand the right and wrong combined-circulation type transmission unit of self-driving type magnetic suspension of application field
CN105522400A (en) * 2016-01-22 2016-04-27 缪雪峰 Permanent magnet suspension slide guide for mini-type machine tool
CN105522400B (en) * 2016-01-22 2019-05-21 江苏赐福科技有限公司 A kind of permanent magnet suspension Miniature machine tool guide rail
CN109870261A (en) * 2019-03-01 2019-06-11 西北工业大学 A kind of lower resistance magnetic suspension platform for microdriver thrust measurement
CN113084536A (en) * 2021-04-12 2021-07-09 南通佳润精密科技有限公司 Magnetic suspension guide rail for angle-adjustable machine tool equipment
CN113293523A (en) * 2021-05-17 2021-08-24 杭州奇丰科技有限公司 Reciprocating type water thorn device of magnetic suspension

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