CN102501224A - Planar maglev linear-motion platform - Google Patents
Planar maglev linear-motion platform Download PDFInfo
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- CN102501224A CN102501224A CN2011102916184A CN201110291618A CN102501224A CN 102501224 A CN102501224 A CN 102501224A CN 2011102916184 A CN2011102916184 A CN 2011102916184A CN 201110291618 A CN201110291618 A CN 201110291618A CN 102501224 A CN102501224 A CN 102501224A
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Abstract
The invention discloses a planar maglev linear-motion platform device with two-dimensional large stoke. Each electromagnetic bearing of the device consists of two differential driving electromagnets and is used for controlling current in coils to enable a maglev operation platform to suspend stably under the action of electromagnetic force and in no mechanical contact with a bearing block and a linear driving system. The platform and a linear motor driving unit are mutually independent, and two horizontally perpendicular linear motors drive the maglev platform in planar two-dimensional linear motion under the action of non-contact electromagnetic force of lateral guide suspended electromagnets. Two lateral linear guide and driving mechanisms of the maglev platform are completely identical in structure, and each guide mechanism consists of two electromagnetic bearings and mechanical rolling bearings. The two guide mechanisms are not in coupling relation, when the platform moves at high acceleration, the rigid rolling bearings assist in guiding and drive the maglev operation platform, and when the platform is in stable state and requires small driving force, the flexible electromagnetic bearings can directly drive the maglev operation platform.
Description
Technical field
The present invention relates to the accurate magnetic suspension linear kinetic control system in the microelectronics manufacturing equipment, particularly relate to a kind of big stroke two-dimensional plane sports type magnetic suspension linear motion platform.
Technical background
Make and biological manufacturing field at some microelectronic chips, like the high speed wire bonder etc., make that Equipment Requirement has at a high speed, high accuracy, high-cleanness, high kinematic system.But the kinematic system of present chip manufacturing equipment all adopts line slideway or air-bearing supporting, receives the influence of mechanical friction or air-flow, and positioning accuracy and dynamic property are limited, is difficult to adapt to the close and environment friendly requirement of high speed and super precision.Adopting the magnetic suspension bearing linear motion system that does not have the machinery contact is a kind of new selection.In the design of traditional multidimensional magnetic transportation by driving moving platform, linear electric motors and magnetic bearing integrate, and the kinematic system on each free degree direction coupling each other is strong, and the plane motion stroke is limited.The magnetic suspension platform that the present invention will have operating load keeps balance through the electromagnetic force and the load of the generation of control suspension magnet on vertical gravity direction, keep the floating workbench stable suspersion of magnetic; Two the side direction straight-line guidances and the driving mechanism structure of the floating platform of magnetic are identical, and each guiding mechanism is formed by two electromagnetic bearings and two mechanical rolling bearings.The driving force that provides through linear electric motors; Rigidity rolling bearing driver part or flexible electrical magnetic bearing driver part driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane rapid movement and planar have bigger travel range, realize magnetic suspension guide to and drive between integrated.Stroke on each direction only depends on the linear electric motors stroke, can infinitely increase in theory.
Summary of the invention
Technical problem to be solved by this invention provides a kind of large-range plane type magnetic suspension linear motion platform of realizing not having the machinery contact; Effectively improve working space, kinematic accuracy and the dynamic response performance of kinematic system, the bidimensional magnetic suspension linear motion platform of a kind of cleaning, high speed and super precision is provided for microelectronic chip manufacturing equipment
In order to solve the problems of the technologies described above; Plane magnetic suspension linear motion platform provided by the invention; Mainly comprise: base, electromagnet bearing, magnetic suspension workbench, the vertical current vortex sensor of quadruplet, operating load, the four pairs of differential DMs, be used to detect two cover linear grating chis, the location-plate of displacement motor, driving arm, vertically place two linear electric motors that move along the XY direction respectively, two pairs of closed slides consistent, spacing detection optoelectronic switch, limited block with the motor movement direction, each ties up respectively to have on direction of motion that two pairs of horizontally-guided electromagnet are respectively arranged on two rolling bearings, each guide direction.
The technical characterictic that plane magnetic suspension linear motion platform of the present invention solves big route problem comprises: 1, the electromagnet of four pairs of vertical winding arounds is formed four differential type ACTIVE CONTROL electromagnetic bearings; Positional information through detecting near the current vortex sensor of installing every pair of electromagnet is as feedback control signal; The electromagnetic force that electric current in the control coil produces with the control magnetic bearing; Can make magnetic float workbench and stably be suspended in above the electromagnet bearing, not have mechanical the contact when the floating platform of assurance magnetic is worked with between vertical bracing frame.2, support is a non-magnet material, and the floating workbench of electromagnet and magnetic is a high-permeability material, and the floating workbench of magnetic is the square groove shape structure of hollow, and adjacent both sides are vertical each other, wherein have two adjacent vertical edges to play guide rail effect; Two rectilinear motion motors are fixed on above the base; The connection driving arm of each motor is equipped with two guiding and drives with rolling bearing and two electromagnetic bearings, and the guide rail limit of the floating platform of magnetic places between the right space of magnet, under two electric mover driving action; The floating platform of magnetic can move along orthogonal two-dimensional plane direction; Receive the guide effect of two pairs of horizontal direction electromagnet, two-dimensional motion does not have mechanism's coupling, thereby can make the magnetic suspension workbench realize large-scale plane motion.3, each driving arm that links to each other with electric mover is a non-magnet material, comprises two rigidity driver parts (rolling bearing) and two pairs of soft drive parts (differential type electromagnetic bearing) on the support respectively.The flexible electrical magnetic bearing carries out position servo feedback through eddy current displacement sensor, and controlled making is used in electromagnetic force and the air gap position of the relative magnet of guide rail on the floating platform guide edge of magnetic.The rolling bearing external diameter is littler from its distance than electromagnet outer surface from the minimum distance on the floating platform rail of magnetic surface; Can protect electromagnetic bearing; Under height acceleration, high thrust driving action; When the electromagnetic push deficiency of electromagnetic bearing and size of gaps are difficult to keep constant, can directly promote the floating platform motion of magnetic by rolling bearing.Two rolling bearings and two horizontal electromagnetic bearings are accomplished the guiding on each dimension direction jointly and are driven function.4, the integrated mode of operation of rigidity rolling bearing and flexible magnetism bearing is: when the magnetic suspension workbench needs bigger acceleration; The direct driven magnetic suspension of rigidity driver part workbench, wherein the soft drive parts play the effect that cushions and avoid rigid collision; When the magnetic suspension workbench needed smaller driving force, the soft drive parts are driven magnetic suspension workbench directly, realize magnetic suspension guide to and driving between integrated; 5, linear electric motors are servomotor, and high accuracy feedback element linear grating chi is housed respectively, can realize its precise motion control.Optoelectronic switch and limited block are carried out automatically controlled to its extreme position and the two position-limiting actions of mechanical system.
Compare with background technology, the invention has the beneficial effects as follows:
1, the magnetic suspension platform that has operating load makes the floating workbench in the vertical direction stable suspersion of magnetic in the operating position through electromagnetic force and load maintenance balance that four pairs of differential type DMs of control produce; The driving force that provides through linear electric motors; Rigidity driver part or soft drive parts driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane, produce rapid movement and have bigger plane travel range, realize magnetic suspension guide to and drive between integrated;
2, when the magnetic suspension workbench needs stable suspersion, four pairs of electromagnet of suspension magnet unit and soft drive parts make it be suspended in settling position through the position feedback of current vortex sensor, realize magnetic suspension guide to drive between separate.When being steady operation, do not have mechanical the contact between the floating platform of magnetic and pedestal and linear drive system, avoided bringing because of mechanical friction creep, problems such as lubricant pollution, wearing and tearing, have higher dynamic response performance and kinematic accuracy.
Description of drawings
Fig. 1 is a structural representation of the present invention, and Fig. 1 (a) is a front view, and 1 (b) is vertical view.Among Fig. 1: base (1); Electromagnet bearing (2); Magnetic suspension workbench (3); The vertical current vortex sensor of quadruplet (4); Operating load (5); Four to the differential DM of " U " shape (6); Be used to detect two cover linear grating chis (7) of displacement motor; Location-plate (8); Driving arm (9); Vertical two linear electric motors (10) that move along the XY direction respectively of placing; The two pair closed slides (11) consistent with the motor movement direction; Optoelectronic switch (12); Limited block (13); Two rolling bearings (14) on each dimension direction of motion; Two pairs of horizontally-guided electromagnet (15) are respectively arranged on each guide direction.
The specific embodiment
Below in conjunction with the accompanying drawing and the specific embodiment the present invention is described further.
Referring to Fig. 1; Plane magnetic suspension linear motion platform according to the invention; Critical piece comprises: a base (1), an electromagnet stent (2) (supporting four pairs of vertical electromagnet), magnetic suspension workbench (3), the vertical current vortex sensor of quadruplet (4), operating load (5), four pairs of differential DMs (6), be used to detect two cover linear grating chis (7), the location-plate (8) of displacement motor, driving arm (9), vertically place two linear electric motors (10) of moving along the XY direction respectively, two pairs of closed slides (11) consistent, optoelectronic switch (12), limited block (13) with the motor movement direction, each is tieed up on two rolling bearings (14) on direction of motion, each guide direction that two pairs of horizontally-guided electromagnet (15) are respectively arranged.Two linear electric motors can be identical, also can be different, require to decide according to concrete stroke.Two linear electric motors actings in conjunction are on the floating platform of magnetic; The floating platform of magnetic is under floating guiding of the magnetic of driving arm and push-and-pull action, and with respect to self guide groove moving linearly, the two-dimensional direction motion is separate; No machinery and electrical couplings make platform can produce plane motion on a large scale.
The present invention has four to " U " type electromagnet 6 on the floating gravity direction of platform perpendicular to ground of magnetic, be wrapped with the water conservancy diversion coil around electromagnet " U " shape iron core, the every pair of electromagnet opening surface over against, middlely be the floating platform plate face of magnetic, and keep definite gap.When in coil, switching on, relative power-on and power-off magnet produces electromagnetic attraction, utilizes the position feedback information of current vortex sensing to carry out position servo control, can make the floating platform of magnetic keep stable suspersion and does not contact with iron core.Vertical belt coil electromagnet 6 is formed four ACTIVE CONTROL electromagnetic bearings; Electric current in the coil makes each magnetic bearing produce definite electromagnetic force with balancing gravity and external disturbance power with plug-type Differential Control mode; Can make magnetic float workbench and stably be suspended in above the electromagnet bearing, not have mechanical the contact when the floating platform of assurance magnetic is worked with between vertical bracing frame.
For improving magnetic bearing magnetic conduction efficient, reduce magnetic interference and leak and grow, avoid magnet short-cut path, support adopts non-magnet material, and the floating workbench of electromagnet and magnetic is a high-permeability material.The floating workbench of magnetic is the square groove shape structure of hollow, and adjacent both sides are vertical each other, wherein has two adjacent vertical edges to play guide rail and bears the effect of linear motor driving power; Two rectilinear motion motors are fixed on above the base; The connection driving arm of each motor is equipped with two guiding and drives with rolling bearing and two electromagnetic bearings, and the guide rail limit of the floating platform of magnetic places between the right space of magnet, under two electric mover driving action; The floating platform of magnetic can move along orthogonal two-dimensional plane direction; Receive the guide effect of two pairs of horizontal direction electromagnet, two-dimensional motion does not have mechanism's coupling, thereby can make the magnetic suspension workbench realize large-scale plane motion.
Each driving arm that links to each other with electric mover also adopts non-magnet material, comprises two rigidity driver parts (rolling bearing) and two pairs of soft drive parts (differential type electromagnetic bearing) on the support respectively.Place the guide edge of the floating platform of magnetic between the relative air gap of flexible electrical magnetic bearing, carry out the position servo feedback through eddy current displacement sensor, controlled making is used in electromagnetic force and the size of gaps of the relative magnet of guide rail on the floating platform guide edge of magnetic.The rolling bearing external diameter is littler from its distance than electromagnet outer surface from the minimum distance on the floating platform rail of magnetic surface; Can protect electromagnetic bearing; Under height acceleration, high thrust driving action; When the electromagnetic push deficiency of electromagnetic bearing and size of gaps are difficult to keep constant, can directly promote the floating platform motion of magnetic by rolling bearing.And when the floating platform stable of magnetic is worked, under the effect of electromagnetic force, also keeping contactless suspended state between platform vertical direction two guide edges and driving arm, this moment, rolling bearing was inoperative.Two rolling bearings and two horizontal electromagnetic bearings are accomplished the guiding on each dimension direction jointly and are driven function.
The cooperative work mode of rigidity rolling bearing and flexible magnetism suspension bearing is: before the rectilinear motion, at first keep the floating platform of magnetic to be in the stable suspersion state.In the linear drives process; When the magnetic suspension workbench needs bigger acceleration; The temporary transient unstability because electromagnetic force is limited, the rigidity driver part direct driven magnetic suspension of contact guide rail earlier workbench, wherein the soft drive parts play the effect that cushions and avoid rigid collision; When the magnetic suspension workbench needs smaller driving force; The soft drive parts are driven magnetic suspension workbench directly; The floating platform of magnetic this moment is in contactless suspension duty with linear drive system, realized magnetic suspension guide to and driving between integrated.Wherein rolling bearing plays the process auxiliary drive effect.
The linear electric motors that linear drives adopts are servomotor, and high accuracy feedback element (linear grating chi) is housed respectively, can realize its precise motion control.Each is tieed up and all is provided with optoelectronic switch and limited block on the forward and reverse direction of motion, carries out automatically controlled and the two position-limiting actions of mechanical system to its extreme position.Optoelectronic switch detects extreme position earlier and sends to the bit switch signal, and the control system takes spacing action according to detected information.
Operating load on the magnetic suspension platform is the target job system, and a typical application instance shown in the figure is to place a cover lead bonding joint, and driven magnetic is floating can carry out the high speed bonding that goes between to chip.
During the platform operate as normal; The magnetic suspension platform that has operating load at first keeps balance through electromagnetic force and the load gravity that the control system produces the floating electromagnet of vertical direction magnetic, the balance operating position that the floating workbench in the vertical direction stable suspersion of magnetic is being confirmed; The also first steady operation of the guiding electromagnetic bearing of horizontal direction makes the platform guide edge be in the air gap centre position, thereby makes the suspension duty fully that whole workbench is in does not have the machinery contact.
When carrying out the operation of acceleration, deceleration rectilinear motion; The driving force that provides through linear electric motors; Rigidity driver part or soft drive parts driven magnetic suspension workbench by driver element; Make the magnetic suspension workbench in horizontal plane, produce rapid movement and have bigger plane travel range, realize magnetic suspension guide to and drive between integrated;
When the floating platform stable of magnetic is worked; Separate between the floating operating system of magnetic and the linear drive system; There is not mechanical the contact between the floating platform of magnetic and pedestal and linear drive system; Avoided in the rectilinear motion process creeping because of mechanical friction brings, problem such as lubricant pollution, wearing and tearing, have higher dynamic response performance and kinematic accuracy, have better cleaning ambient.
Claims (7)
1. plane magnetic suspension linear motion platform; Critical piece comprises: base (1), electromagnet bearing (2), magnetic suspension workbench (3), the vertical current vortex sensor of quadruplet (4), operating load (5), four pairs of differential DMs (6), be used to detect two cover linear grating chis (7), the location-plate (8) of displacement motor, driving arm (9), vertically place two linear electric motors (10) of moving along the XY direction respectively, two pairs of closed slides (11) consistent, optoelectronic switch (12), limited block (13) with the motor movement direction, each is tieed up on two rolling bearings (14) on direction of motion, each guide direction that two pairs of horizontally-guided electromagnet (15) are respectively arranged.
2. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: four pairs of vertical belt coil electromagnet 6 are formed four ACTIVE CONTROL electromagnetic bearings; Positional information through detecting near the current vortex sensor of installing every pair of electromagnet is as feedback control signal; The electromagnetic force that electric current in the control coil produces with the control magnetic bearing; Can make the floating workbench of magnetic stably be suspended in above the electromagnet bearing and make the floating workbench in the vertical direction stable suspersion of magnetic, not have mechanical the contact when guaranteeing the floating platform work of magnetic with between vertical bracing frame in the balance operating position of confirming.
3. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: support is a non-magnet material; The floating workbench of electromagnet and magnetic is a high-permeability material; The floating workbench of magnetic is the square groove shape structure of hollow; Adjacent both sides are vertical each other, wherein have two adjacent vertical edges to play guide rail effect; Two rectilinear motion motors are fixed on above the base; The connection driving arm of each motor is equipped with two guiding and drives with rolling bearing and two electromagnetic bearings; The guide rail limit of the floating platform of magnetic places between the right space of magnet, and under two electric mover driving action, the floating platform of magnetic can move along orthogonal two-dimensional plane direction; Receive the guide effect of two pairs of horizontal direction electromagnet; Two-dimensional motion does not have mechanism coupling, thereby can make the magnetic suspension workbench realize large-scale plane motion, realize magnetic suspension guide to and drive between integrated.
4. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: each driving arm that links to each other with electric mover is a non-magnet material, comprises two rigidity driver parts (rolling bearing) and two pairs of soft drive parts (differential type electromagnetic bearing) on the support respectively.The flexible electrical magnetic bearing carries out position servo feedback through eddy current displacement sensor, and controlled making is used in electromagnetic force and the air gap position of the relative magnet of guide rail on the floating platform guide edge of magnetic.The rolling bearing external diameter is littler from its distance than electromagnet outer surface from the minimum distance on the floating platform rail of magnetic surface; Can protect electromagnetic bearing; Under height acceleration, high thrust driving action; When the electromagnetic push deficiency of electromagnetic bearing and size of gaps are difficult to keep constant, can directly promote the floating platform motion of magnetic by rolling bearing.Two rolling bearings and two horizontal electromagnetic bearings are accomplished the guiding on each dimension direction jointly and are driven function.
5. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: the integrated mode of operation of rigidity rolling bearing and flexible magnetism bearing is: when the magnetic suspension workbench needs bigger acceleration; The direct driven magnetic suspension of rigidity driver part workbench, wherein the soft drive parts play the effect that cushions and avoid rigid collision; When the magnetic suspension workbench needed smaller driving force, the soft drive parts are driven magnetic suspension workbench directly, realize magnetic suspension guide to and driving between integrated;
6. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: linear electric motors are servomotor, and high accuracy feedback element linear grating chi is housed respectively, can realize its precise motion control.Optoelectronic switch and limited block are carried out automatically controlled to its extreme position and the two position-limiting actions of mechanical system.
7. a kind of plane magnetic suspension linear motion platform according to claim 1 is characterised in that: when the magnetic suspension workbench needs stable suspersion; Four pairs of electromagnet of suspension magnet unit and soft drive parts make it be suspended in settling position through the position feedback of eddy current sensor, realize magnetic suspension guide to drive between separate.
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| CN201110291618.4A CN102501224B (en) | 2011-09-30 | 2011-09-30 | A kind of planar maglev linear-motion platform |
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| CN201110291618.4A CN102501224B (en) | 2011-09-30 | 2011-09-30 | A kind of planar maglev linear-motion platform |
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| CN102501224A true CN102501224A (en) | 2012-06-20 |
| CN102501224B CN102501224B (en) | 2016-01-27 |
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| CN104533887A (en) * | 2014-12-10 | 2015-04-22 | 马继刚 | Method of utilizing hydraulic servo principle for conducting hydraulic suspension on shaft parts |
| CN105452812A (en) * | 2013-08-06 | 2016-03-30 | 不列颠哥伦比亚大学 | Displacement devices and methods and apparatus for detecting and estimating motion associated with same |
| CN105890913A (en) * | 2016-05-30 | 2016-08-24 | 清华大学苏州汽车研究院（相城） | Stroke-variable trolley return photoelectric detection mechanism and collision simulation trolley device |
| CN106499588A (en) * | 2016-12-24 | 2017-03-15 | 重庆宙盾新能源技术开发有限公司 | Magnetic suspending wind turbine generator group |
| CN106640483A (en) * | 2016-12-24 | 2017-05-10 | 重庆宙盾新能源技术开发有限公司 | Magnetic suspension water turbine-generator set |
| CN106762427A (en) * | 2016-12-24 | 2017-05-31 | 重庆宙盾新能源技术开发有限公司 | Wind-power electricity generation is used for sea water desalinating unit |
| CN107030656A (en) * | 2017-05-09 | 2017-08-11 | 广东工业大学 | A kind of plane air-flotation workbench and control method based on bulk of optical feedback |
| CN109099898A (en) * | 2018-08-17 | 2018-12-28 | 北京理工大学 | A kind of mobile service system based on self-stabilization platform |
| CN113555197A (en) * | 2021-07-29 | 2021-10-26 | 哈尔滨工业大学 | Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof |
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| CN107030656B (en) * | 2017-05-09 | 2024-05-14 | 广东工业大学 | Optical feedback-based planar air-floatation workbench and control method |
| CN109099898A (en) * | 2018-08-17 | 2018-12-28 | 北京理工大学 | A kind of mobile service system based on self-stabilization platform |
| CN113555197A (en) * | 2021-07-29 | 2021-10-26 | 哈尔滨工业大学 | Moving magnetic steel type self-driven magnetic suspension guide rail device and control method thereof |
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