CN102723298A - Electromagnetic preload XY precision motion platform - Google Patents
Electromagnetic preload XY precision motion platform Download PDFInfo
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- CN102723298A CN102723298A CN2012101454360A CN201210145436A CN102723298A CN 102723298 A CN102723298 A CN 102723298A CN 2012101454360 A CN2012101454360 A CN 2012101454360A CN 201210145436 A CN201210145436 A CN 201210145436A CN 102723298 A CN102723298 A CN 102723298A
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Abstract
The invention provides an electromagnetic preload XY precision motion platform, which comprises a base plate assembly (1). The base plate assembly (1) comprises a base plate (5), wherein an X-axis linear motor assembly (2) a Y- axis linear motor assembly (3), a motion platform connection assembly (4) which are installed on the base plate (5),. An upper end of the motion platform connection assembly (4) is connected with an X-axis linear motor mover connecting rod (25) and a Y- axis linear motor mover connecting rod (28) by a guide connection body (45), and a lower end of the motion platform connection assembly (4) is fixedly installed on a corresponding installation plane of the base plate (5) by a pedestal (36) of a connection body of an magnetic force adjusting rolling support mechanism. The magnetic force adjusting rolling support mechanism comprises 12 groups of electromagnet coil assemblies (43). The platform in the invention possesses greater system rigidity, better motion precision and more simple and suitable X/Y motion decoupling mode. The platform in the invention is suitable for carrying out high speed packaging operation of hyper-scale integrated circuit semiconductor chip.
Description
Technical field
The present invention relates to semiconductor die package equipment; Being specifically related to a kind of with traditional XY motion platform compares; Have the XY precision movement platform of bigger system stiffness, better kinematic accuracy, the simpler X/Y mobile decoupling mode that is suitable for, be useful in the high speed packaging operation that carries out super large radius silicon chip and very lagre scale integrated circuit (VLSIC) semiconductor chip on the production line.
Background technology
In the semiconductor die package field, traditional XY motion platform generally is used for the encapsulation of semiconductor device such as integrated circuit, thus the weight of load generally be several restrain tens the gram between, the weight of anchor clamps is generally in several hectograms in addition; Along with popularizing of super large radius silicon chip Development of Packaging Technology and very lagre scale integrated circuit (VLSIC), the load of motion platform has reached a kilogram rank.Therefore, the load capacity of traditional XY motion platform is obviously not enough, and main difficulty is: the one, and the system stiffness of platform is lower; The 2nd, kinematic accuracy is relatively poor; The 3rd, in mechanism's coupled modes, heavy moving parts and volume are bigger; Four are to use parts more, and the assembling adjustment is comparatively complicated, and manufacturing cost is higher.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructurely, have better load performance, bigger system stiffness, the better XY precision movement platform of kinematic accuracy, the simpler X/Y mobile decoupling mode that is suitable for.
Goal of the invention of the present invention is achieved in that a kind of electromagnetism pretension XY precision movement platform, and bottom deck assembly comprises base plate, and X axle linear motor assembly, Y axle linear motor assembly, motion platform connector assembly are installed on base plate; Wherein, X axle linear motor assembly is installed on the X axle mounting plane of base plate through X axle linear electric motors mount pad screw; Y axle linear motor assembly is installed on the Y axle mounting plane of base plate through Y axle linear electric motors mount pad screw; The upper end of motion platform connector assembly is connected with X axle linear motor rotor connecting rod, Y axle linear motor rotor connecting rod through the guiding connector; The lower end of motion platform connector assembly is regulated the connector fixed base 36 of rolling supporting mechanism and is utilized the fixed base mounting screw to be installed on the corresponding mounting plane of base plate through magnetic force;
In bottom deck assembly, X axle grating ruler reading head corner bracket is installed on the respective planes of base plate through X shaft angle frame mounting screw; X axle grating ruler reading head is installed in the relevant position of X axle grating ruler reading head corner bracket through X axle read head mounting screw; X axle precise motion guide rail is installed in through X axis rail mounting screw on the mounting plane of X axis rail of base plate; X axis rail slide block is slidingly mounted on the X axle precise motion guide rail; Y axle grating ruler reading head corner bracket is installed on the respective planes of base plate through Y shaft angle frame mounting screw; Y axle grating ruler reading head is installed in the relevant position of Y axle grating ruler reading head corner bracket through Y axle read head mounting screw; Y axle precise motion guide rail is installed in through Y axis rail mounting screw on the mounting plane of Y axis rail of base plate; Y axis rail slide block is slidingly mounted on the Y axle precise motion guide rail;
In X axle linear motor assembly, X axle linear electric motors mount pad is installed on the X axle mounting plane of base plate through X axle linear electric motors mount pad screw; X axle linear motor stator electric and housing are inlayed on the mounting plane that is installed in X axle linear electric motors mount pad through the location; X axle linear motor rotor is installed in X axle linear motor stator electric and the housing; X axle linear motor rotor connecting rod is installed in the screw hole of X axle linear motor rotor end face through X spindle motor mover connecting rod screw; X axle grating chi frame is installed in the screw hole of X axle linear motor rotor side through X axle grating chi frame mounting screw;
In Y axle linear motor assembly, Y axle linear electric motors mount pad is installed on the Y axle mounting plane of base plate through Y axle linear electric motors mount pad screw; Y axle linear motor stator electric and housing are inlayed on the mounting plane that is installed in Y axle linear electric motors mount pad through the location; Y axle linear motor rotor is installed in Y axle linear motor stator electric and the housing; Y axle linear motor rotor connecting rod is installed in the screw hole of Y axle linear motor rotor end face through y-axis motor mover connecting rod screw; Y axle grating chi frame is installed in the screw hole of Y axle linear motor rotor side through Y axle grating chi frame mounting screw;
Motion platform connector assembly is regulated rolling supporting mechanism by magnetic force and is constituted with the connector mechanism two parts that lead; The connector fixed base that magnetic force is regulated in the rolling supporting mechanism is installed on the fixed base mounting plane of base plate through the fixed base mounting screw; Fixedly liner plate is fixed in the cavity on the connector fixed base; In the rolling steel ball assembly, respectively have circular port on the steel ball under liner plate, the steel ball on the liner plate; The rolling steel ball liner plate on the steel ball of packing into, liner plate heat seal under liner plate and the steel ball on the steel ball; Movable liner plate is fixed in the cavity of movable pedestal lower surface; 12 groups of electromagnet coil assemblies are fixed in the cavity on four limits, movable pedestal bottom surface; The guiding connector is fixed on the upper surface of movable pedestal; The guiding connector is hinged on X axle linear motor rotor connecting rod and Y axle linear motor rotor connecting rod in the installing hole on the guiding connector through the guiding attachment screw.
Preferably, two groups of X axle precise motion guide rails and two groups of Y axle precise motion guide rails are set.
Preferably, setting is slidingly mounted on 4 X axis rail slide blocks on the X axle precise motion guide rail and is slidingly mounted on 4 Y axis rail slide blocks on the Y axle precise motion guide rail.
Preferably; Two X axle linear motor rotor connecting rods are installed in the screw hole of X axle linear motor rotor end face through X spindle motor mover connecting rod screw with articulated form, and two Y axle linear motor rotor connecting rods are installed in the screw hole of X axle linear motor rotor end face through y-axis motor mover connecting rod screw with articulated form.
Preferably, X axle linear motor rotor can only carry out rectilinear motion within the specific limits along X-direction; Y axle linear motor rotor can only carry out rectilinear motion within the specific limits along Y direction.
Preferably, the connector fixed base in the magnetic force pretension rolling supporting mechanism is processed by carbon steel.
Preferably, fixedly the upper surface of liner plate is and the contacted surface of rolling steel ball group, through quenching and the surface finish processing, very high hardness and fabulous surface roughness is arranged; The lower surface of movable liner plate is and the contacted surface of rolling steel ball group through quenching and the surface finish processing, very high hardness and fabulous surface roughness to be arranged;
Preferably, the used steel ball of rolling steel ball group is the special-purpose steel ball of bearing; On the steel ball under liner plate and the steel ball liner plate process by nonmetallic materials.
Preferably, movable pedestal is processed by non-magnetic lightweight metal material.
Preferably, movable liner plate, electromagnet coil assembly, movable pedestal, guiding connector are bonded into one through adhesive, contact with the rolling steel ball assembly with the lower surface of movable liner plate.
Electromagnetism pretension XY precision movement platform of the present invention has following advantage:
1. because in motion platform connector assembly; Adopt magnetic force to regulate rolling supporting mechanism, through the input current of regulating magnet, the size of control magnetic pretightning force; Thereby control magnetic force is regulated the supporting role of rolling supporting mechanism, and the adaptive load performance of motion platform is improved;
2. support as motion owing to X axle, Y axle linear motor rotor all adopt with precise guide rail and slide block mechanism, do not have the chatter that cantilever beam structure produced of generic linear electric mover, therefore the motion rigidity of system is improved;
3. owing to adopt the unique parallelogram and the decoupling zero mode of free rolling mechanism, when guaranteeing system stiffness, make the decoupling zero campaign not only simply, but also suitable;
4. structure is simple relatively, and production cost is lower.
Description of drawings
Fig. 1 is the schematic three dimensional views of electromagnetism pretension XY precision movement platform of the present invention and defined X/Y/Z coordinate system;
Fig. 2 is the three-dimensional, exploded view of bottom deck assembly;
Fig. 3 is the three-dimensional, exploded view of X axle linear motor assembly;
Fig. 4 is the three-dimensional, exploded view of Y axle linear motor assembly;
Fig. 5 is the three-dimensional, exploded view of motion platform connector assembly.
In Fig. 1, concrete Reference numeral is represented: the 1-bottom deck assembly; 2-X axle linear motor assembly; 3-Y axle linear motor assembly, 4-motion platform connector assembly;
In Fig. 2, concrete Reference numeral is represented: 5-base plate, 6-X axle grating ruler reading head corner bracket, 7-X shaft angle frame mounting screw, 8-X axle grating ruler reading head, 9-X axle read head mounting screw, 10-X axle precise motion guide rail, 11-X axis rail slide block, 12-X axis rail mounting screw, 13-Y axis rail mounting screw, 14-Y axis rail slide block, 15-Y axle precise motion guide rail, 16-Y shaft angle frame mounting screw, 17-Y axle grating ruler reading head corner bracket, 18-Y axle read head mounting screw, 19-Y axle grating ruler reading head;
In Fig. 3, concrete Reference numeral is represented: 20-X axle grating chi frame mounting screw, 21-X axle grating chi frame, 22-X axle linear electric motors mount pad, 23-X axle linear motor stator electric and housing, 24-X axle linear electric motors mount pad screw, 25-X axle linear motor rotor connecting rod, 26-X axle linear motor rotor, 27-X spindle motor mover connecting rod screw;
In Fig. 4, concrete Reference numeral is represented: 28-Y axle linear motor rotor connecting rod, 29-Y spindle motor mover connecting rod screw, 30-Y axle linear motor rotor, 31-Y axle linear motor stator electric and housing, 32-Y axle linear electric motors mount pad screw, 33-Y axle linear electric motors mount pad, 34-Y axle grating chi frame, 35-Y axle grating chi frame mounting screw;
In Fig. 5, concrete Reference numeral is represented: 36-connector fixed base, 37-be liner plate, the movable liner plate of 42-, 43-electromagnet coil assembly, the movable pedestal of 44-, 45-connector, the 46-attachment screw that leads that leads on liner plate, 40-rolling steel ball group, the 41-steel ball under liner plate, 38-fixed base mounting screw, the 39-steel ball fixedly.
Embodiment
In conjunction with accompanying drawing the present invention is described further:
Shown in accompanying drawing 1-5, a kind of electromagnetism pretension XY precision movement platform comprises: bottom deck assembly 1, X axle linear motor assembly 2, Y axle linear motor assembly 3, motion platform connector assembly 4, base plate 5, X axle grating ruler reading head corner bracket 6, X shaft angle frame mounting screw 7, X axle grating ruler reading head 8, X axle read head mounting screw 9, X axle precise motion guide rail 10, X axis rail slide block 11, X axis rail mounting screw 12, Y axis rail mounting screw 13, Y axis rail slide block 14, Y axle precise motion guide rail 15, Y shaft angle frame mounting screw 16, Y axle grating ruler reading head corner bracket 17, Y axle read head mounting screw 18, Y axle grating ruler reading head 19, X axle grating chi frame mounting screw 20, X axle grating chi frame 21, X axle linear electric motors mount pad 22, X axle linear motor stator electric and housing 23, X axle linear electric motors mount pad screw 24, X axle linear motor rotor connecting rod 25, X axle linear motor rotor 26, X spindle motor mover connecting rod screw 27, Y axle linear motor rotor connecting rod 28, y-axis motor mover connecting rod screw 29, Y axle linear motor rotor 30, Y axle linear motor stator electric and housing 31, Y axle linear electric motors mount pad screw 32, Y axle linear electric motors mount pad 33, Y axle grating chi frame 34, Y axle grating chi frame mounting screw 35, connector fixed base 36, fixedly liner plate 41, movable liner plate 42, electromagnet coil assembly 43, movable pedestal 44, reference connector 45, reference attachment screw 46 on liner plate 39, rolling steel ball group 40, the steel ball under liner plate 37, fixed base mounting screw 38, the steel ball.
On the bottom deck assembly 1 of electromagnetism pretension XY precision movement platform of the present invention, X axle linear motor assembly 2, Y axle linear motor assembly 3, motion platform connector assembly 4 are installed; Wherein, X axle linear motor assembly 2 is installed on the X axle mounting plane of base plate 5 through X axle linear electric motors mount pad screw 24; Y axle linear motor assembly 3 is installed on the Y axle mounting plane of base plate 5 through Y axle linear electric motors mount pad screw 32; The upper end of motion platform connector assembly 4 is connected with X axle linear motor rotor connecting rod 25, Y axle linear motor rotor connecting rod 28 through guiding connector 45; The lower end of motion platform connector assembly 4 is regulated the connector fixed base 36 of rolling supporting mechanism and is utilized fixed base mounting screw 38 to be installed on the corresponding mounting plane of base plate 5 through magnetic force.
In bottom deck assembly 1, X axle grating ruler reading head corner bracket 6 is installed on the respective planes of base plate 5 through X shaft angle frame mounting screw 7; X axle grating ruler reading head 8 is installed in the relevant position of X axle grating ruler reading head corner bracket 6 through X axle read head mounting screw 9; Two groups of X axle precise motion guide rails 10 are installed in through X axis rail mounting screw 12 on the mounting plane of X axis rail of base plate 5; 4 X axis rail slide blocks 11 are slidingly mounted on two groups of X axle precise motion guide rails 10; Y axle grating ruler reading head corner bracket 17 is installed on the respective planes of base plate 5 through Y shaft angle frame mounting screw 16; Y axle grating ruler reading head 19 is installed in the relevant position of Y axle grating ruler reading head corner bracket 17 through Y axle read head mounting screw 18; Two groups of Y axle precise motion guide rails 15 are installed in through Y axis rail mounting screw 13 on the mounting plane of Y axis rail of base plate 5; 4 Y axis rail slide blocks 14 are slidingly mounted on two groups of Y axle precise motion guide rails 15.
In X axle linear motor assembly 2, X axle linear electric motors mount pad 22 is installed on the X axle mounting plane of base plate 5 through X axle linear electric motors mount pad screw 24; X axle linear motor stator electric and housing 23 are inlayed on the mounting plane that is installed in X axle linear electric motors mount pad 22 through the location; X axle linear motor rotor 26 is installed in X axle linear motor stator electric and the housing 23; Two X axle linear motor rotor connecting rods 25 are installed in the screw hole of X axle linear motor rotor 26 end faces through X spindle motor mover connecting rod screw 27 with articulated form; X axle grating chi frame 21 is installed in the screw of X axle linear motor rotor 26 sides through X axle grating chi frame mounting screw 20; X axle linear motor rotor 26 can only carry out rectilinear motion within the specific limits along X-direction.
In Y axle linear motor assembly 3, Y axle linear electric motors mount pad 33 is installed on the Y axle mounting plane of base plate 5 through Y axle linear electric motors mount pad screw 32; Y axle linear motor stator electric and housing 31 are inlayed on the mounting plane that is installed in Y axle linear electric motors mount pad 33 through the location; Y axle linear motor rotor 30 is installed in Y axle linear motor stator electric and the housing 31; Two Y axle linear motor rotor connecting rods 28 are installed in the screw hole of Y axle linear motor rotor 30 end faces through y-axis motor mover connecting rod screw 29 with articulated form; Y axle grating chi frame 34 is installed in the screw of Y axle linear motor rotor 30 sides through Y axle grating chi frame mounting screw 35; Y axle linear motor rotor 30 can only carry out rectilinear motion within the specific limits along Y direction.
Motion platform connector assembly 4 is regulated rolling supporting mechanism by magnetic force and is constituted with the connector mechanism two parts that lead; Connector fixed base 36 in the magnetic force adjusting rolling supporting mechanism is installed in through fixed base mounting screw 38 on the fixed base mounting plane of base plate 5 with the carbon steel manufacturing; Fixedly liner plate 37 is bonded in the cavity above the connector fixed base 36 with adhesive; Fixedly the upper surface of liner plate 37 is and the contacted surface of rolling steel ball group, through quenching and the surface finish processing, very high hardness and fabulous surface roughness is arranged; In the rolling steel ball assembly, rolling steel ball group 40 used steel balls are the special-purpose steel balls of bearing; On the steel ball under liner plate 41, the steel ball liner plate 39 respectively have 1 group of spherical pore all with the nonmetallic materials manufacturing; Liner plate 41 rolling steel ball of packing on the steel ball, and with steel ball under after liner plate 39 heat seals, the steel ball of rolling steel ball group 40 can freely roll in the steel ball liner plate after heat seal; The rolling steel ball assembly freely is placed on the fixedly upper surface of liner plate 37, and the rolling steel ball assembly should be able to freely roll from the teeth outwards; Movable liner plate 42 is bonded in the cavity of movable pedestal 44 lower surfaces with adhesive; The lower surface of movable liner plate 42 is and the contacted surface of steel ball group through quenching and the surface finish processing, very high hardness and fabulous surface roughness to be arranged; Movable pedestal 44 is with non-magnetic lightweight metal material manufacturing, and 12 groups of electromagnet coil assemblies 43 are bonded in the cavity on four limits, movable pedestal 44 bottom surfaces with adhesive; Guiding connector 45 is bonded in the upper surface of movable pedestal 44 with adhesive; Above-mentioned movable liner plate 42, electromagnet coil assembly 43, movable pedestal 44, guiding connector 45 assembly after adhesive is bonding are one; Lower surface with movable liner plate 42 contacts with the rolling steel ball assembly; Be placed on the rolling steel ball assembly; Motion parts in this moment rolling steel ball assembly supporting movement platform connector assembly 4 freely rolls at the fixing upper surface of liner plate 37; Guiding connector 45 is through 4 guiding attachment screws 46, and two X axle linear motor rotor connecting rods 25, two Y axle linear motor rotor connecting rods 28 are hinged in 4 installing holes on the guiding connector 45.
The end face of said linear motor rotor is meant when X axle linear motor rotor 26 is in position shown in Figure 3 or the upper surface of Y axle linear motor rotor 30 when being in position shown in Figure 4, and the side is meant when X axle linear motor rotor 26 is in position shown in Figure 3 or the side surface of Y axle linear motor rotor 30 when being in position shown in Figure 4.
The operation principle of electromagnetism pretension XY precision movement platform of the present invention is: be installed in the X axle linear motor assembly 2 on the bottom deck assembly 1; Coil by X axle linear motor rotor 26 provides actuating force; Drive X axle linear motor rotor 26; Through X axle precise motion guide rail 10, X axis rail slide block 11 guiding, move along directions X; Be installed in the Y axle linear motor assembly 3 on the bottom deck assembly 1, actuating force be provided, drive Y axle linear motor rotor 30,, move along the Y direction through Y axle precise motion guide rail 15, Y axis rail slide block 14 guiding by the coil of Y axle linear motor rotor 30; Because X axle linear motor rotor 26, Y axle linear motor rotor 30 all are motions under the support of X axle precise motion guide rail 10, X axis rail slide block 11, Y axle precise motion guide rail 15, Y axis rail slide block 14; Therefore do not have the chatter that cantilever beam structure produced of generic linear electric mover, the motion rigidity of system is improved; The movable pedestal 44 of motion platform connector assembly 4 is with non-magnetic lightweight metal material manufacturing; After with adhesive 12 groups of electromagnet coils 43 being bonded in the cavity on four limits, movable pedestal 44 bottom surfaces, formed the magnetic pole that 4 groups of magnetic field intensitys of symmetry can change with input current; Connector fixed base 36 is with the structural carbon steel manufacturing, has good magnetic conductivity; After placing the rolling steel ball assembly on fixedly liner plate 37 upper surfaces bonding in connector fixed base 36 and being placed on the motion parts of motion platform connector assembly 4 on the rolling steel ball assembly; Under the magnetive attraction effect of the magnetic pole that 4 groups of magnetic field intensitys can change with input current in movable pedestal 44; Attract connector fixed base 36 and formed the magnetic pretightning force; And be one with whole motion platform connector assembly 4 in the Z-direction adhesive through the magnetic pretightning force; And in the certain limit on the XY plane, motion parts then can move arbitrarily; The magnetic field intensity of electromagnet coil assembly 43 changes with electric current, and in working range, the input current of electromagnet coil assembly 43 is big more, and magnetic field intensity is high more, and the magnetic pretightning force of generation is big more; Because of the steel ball in the rolling steel ball group 40 is the special-purpose steel ball of bearing, have very high circularity, hardness and excellent surface roughness; Movable liner plate 42 is with fixedly liner plate 37 is all with the alloy steel products manufacturing, and the surface that contacts with rolling steel ball has very high hardness and surface of good roughness after quenching and polishing; Therefore rolling steel ball group 40 contacting during the rolling of surface at movable liner plate 42 and fixing liner plate 37; Its support stiffness is to be directly proportional with the size of magnetic pretightning force; The electric current of promptly importing electromagnet coil assembly 43 is big more, and the magnetic pretightning force is just big more, and support stiffness is high more; Therefore pass through the size of the input current may command magnetic pretightning force of electromagnet coil assembly 43, thereby adapt to various load weight.Be hinged on two X axle linear motor rotor connecting rods 25 of X-direction, and and its hinged X axle linear motor rotor 26, the guiding connector 45 between, form a unsettled parallelogram; Be hinged on two Y axle linear motor rotor connecting rods 28 of Y direction, and and its hinged Y axle linear motor rotor 30, the guiding connector 45 between, also form a unsettled parallelogram; Because the motion assembly of above-mentioned X axle and Y axle; Drive of the variation of the interior angle of two unsettled parallelogram along jointed shaft; The rolling steel ball assembly drives the free movement of motion parts in the certain limit on XY plane in the motion platform connector assembly 4 in addition; Constitute the unique decoupling zero motion mode of the present invention, thereby made the workpiece of the motion parts institute clamping in the motion platform connector assembly 4, can reach any point on the XY plane in the range of work; The kinematic accuracy of precision movement platform is to carry out accurate measurement and feedback according to the grating chi that is installed in X axle and Y direction, by the computer control completion, can reach very high accuracy class.
Claims (10)
1. an electromagnetism pretension XY precision movement platform is characterized in that bottom deck assembly (1) comprises base plate (5), and X axle linear motor assembly (2), Y axle linear motor assembly (3), motion platform connector assembly (4) are installed on base plate (5); Wherein, X axle linear motor assembly (2) is installed on the X axle mounting plane of base plate (5) through X axle linear electric motors mount pad screws (24); Y axle linear motor assembly (3) is installed on the Y axle mounting plane of base plate (5) through Y axle linear electric motors mount pad screws (32); The upper end of motion platform connector assembly (4) is connected with X axle linear motor rotor connecting rod (25), Y axle linear motor rotor connecting rod (28) through guiding connector (45); The lower end of motion platform connector assembly (4) is regulated the connector fixed base (36) of rolling supporting mechanism and is utilized fixed base mounting screw (38) to be installed on the corresponding mounting plane of base plate (5) through magnetic force;
In bottom deck assembly (1), X axle grating ruler reading head corner bracket (6) is installed on the respective planes of base plate (5) through X shaft angle frame mounting screw (7); X axle grating ruler reading head (8) is installed in the relevant position of X axle grating ruler reading head corner bracket (6) through X axle read head mounting screw (9); X axle precise motion guide rail (10) is installed in through X axis rail mounting screw (12) on the mounting plane of X axis rail of base plate (5); X axis rail slide block (11) is slidingly mounted on the X axle precise motion guide rail (10); Y axle grating ruler reading head corner bracket (17) is installed on the respective planes of base plate (5) through Y shaft angle frame mounting screw (16); Y axle grating ruler reading head (19) is installed in the relevant position of Y axle grating ruler reading head corner bracket (17) through Y axle read head mounting screw (18); Y axle precise motion guide rail (15) is installed in through Y axis rail mounting screw (13) on the mounting plane of Y axis rail of base plate (5); Y axis rail slide block (14) is slidingly mounted on the Y axle precise motion guide rail (15);
In X axle linear motor assembly (2), X axle linear electric motors mount pads (22) are installed on the X axle mounting plane of base plate (5) through X axle linear electric motors mount pad screws (24); X axle linear motor stator electric and housing (23) are inlayed on the mounting plane that is installed in X axle linear electric motors mount pads (22) through the location; X axle linear motor rotor (26) is installed in X axle linear motor stator electric and the housing (23); X axle linear motor rotor connecting rod (25) is installed in the screw hole of X axle linear motor rotor (26) end face through X spindle motor mover connecting rod screw (27); X axle grating chi frame (21) is installed in the screw hole of X axle linear motor rotor (26) side through X axle grating chi frame mounting screw (20);
In Y axle linear motor assembly (3), Y axle linear electric motors mount pads (33) are installed on the Y axle mounting plane of base plate (5) through Y axle linear electric motors mount pad screws (32); Y axle linear motor stator electric and housing (31) are inlayed on the mounting plane that is installed in Y axle linear electric motors mount pads (33) through the location; Y axle linear motor rotor (30) is installed in Y axle linear motor stator electric and the housing (31); Y axle linear motor rotor connecting rod (28) is installed in the screw hole of Y axle linear motor rotor (30) end face through y-axis motor mover connecting rod screw (29); Y axle grating chi frame (34) is installed in the screw hole of Y axle linear motor rotor (30) side through Y axle grating chi frame mounting screw (35);
Motion platform connector assembly (4) is regulated rolling supporting mechanism by magnetic force and is constituted with the connector mechanism two parts that lead; The connector fixed base (36) that magnetic force is regulated in the rolling supporting mechanism is installed on the fixed base mounting plane of base plate (5) through fixed base mounting screw (38); Fixedly liner plate (37) is fixed in the cavity on the connector fixed base (36); In rolling steel ball assembly (40), respectively have circular port on the liner plate (39) under liner plate on the steel ball (41), the steel ball; Liner plate (39) heat seal under the rolling steel ball liner plate (41) on the steel ball of packing into, liner plate on the steel ball (41) and steel ball; Movable liner plate (42) is fixed in the cavity of movable pedestal (44) lower surface; 12 groups of electromagnet coil assemblies (43) are fixed in the cavity on four limits, movable pedestal (44) bottom surface; Guiding connector (45) is fixed on the upper surface of movable pedestal (44); Guiding connector (45) is hinged on X axle linear motor rotor connecting rod (25) and Y axle linear motor rotor connecting rod (28) in the installing hole on the guiding connector (45) through guiding attachment screw (46).
2. XY precision movement platform according to claim 1 is characterized in that, two groups of X axle precise motion guide rails (10) and two groups of Y axle precise motion guide rails (15) are set.
3. XY precision movement platform according to claim 2 is characterized in that, is provided with to be slidingly mounted on 4 the X axis rail slide blocks (11) on the X axle precise motion guide rail (10) and to be slidingly mounted on 4 the Y axis rail slide blocks (14) on the Y axle precise motion guide rail (15).
4. according to any described XY precision movement platform among the claim 1-3; It is characterized in that; Two X axle linear motor rotor connecting rods (25) are installed in the screw hole of X axle linear motor rotor (26) end face through X spindle motor mover connecting rod screw (27) with articulated form, and two Y axle linear motor rotor connecting rods (28) are installed in the screw hole of X axle linear motor rotor (30) end face through y-axis motor mover connecting rod screw (29) with articulated form.
5. according to any described XY precision movement platform among the claim 1-4, it is characterized in that X axle linear motor rotor (26) can only carry out rectilinear motion within the specific limits along X-direction; Y axle linear motor rotor (30) can only carry out rectilinear motion within the specific limits along Y direction.
6. according to any described XY precision movement platform among the claim 1-5, it is characterized in that the connector fixed base (36) in the magnetic force pretension rolling supporting mechanism is processed by carbon steel.
7. according to any described XY precision movement platform among the claim 1-6; It is characterized in that; Fixedly the upper surface of liner plate (37) is and the contacted surface of rolling steel ball group (40), through quenching and the surface finish processing, very high hardness and fabulous surface roughness is arranged; The lower surface of movable liner plate (42) is and the contacted surface of rolling steel ball group (40) through quenching and the surface finish processing, very high hardness and fabulous surface roughness to be arranged.
8. according to any described XY precision movement platform among the claim 1-7, it is characterized in that the used steel ball of rolling steel ball group (40) is the special-purpose steel ball of bearing; Liner plate (39) is processed by nonmetallic materials under liner plate on the steel ball (41) and the steel ball.
9. according to any described XY precision movement platform among the claim 1-8, it is characterized in that movable pedestal (44) is processed by non-magnetic lightweight metal material.
10. according to any described XY precision movement platform among the claim 1-9; It is characterized in that; Movable liner plate (42), electromagnet coil assembly (43), movable pedestal (44), guiding connector (45) are bonded into one through adhesive, contact with rolling steel ball assembly (40) with the lower surface of movable liner plate (42).
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| CN2012101454360A CN102723298A (en) | 2012-05-11 | 2012-05-11 | Electromagnetic preload XY precision motion platform |
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| CN104141758A (en) * | 2014-07-14 | 2014-11-12 | 沈阳化工大学 | Device capable of regulating and controlling axial pre-tightening force of screw rod |
| CN104141759A (en) * | 2014-07-14 | 2014-11-12 | 沈阳化工大学 | Axial pre-tightening device of screw rod nut pair with controllable pre-tightening force |
| CN105485481A (en) * | 2015-12-20 | 2016-04-13 | 华南理工大学 | Displacement-adjustable precision locating platform |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
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| CN104141758A (en) * | 2014-07-14 | 2014-11-12 | 沈阳化工大学 | Device capable of regulating and controlling axial pre-tightening force of screw rod |
| CN104141759A (en) * | 2014-07-14 | 2014-11-12 | 沈阳化工大学 | Axial pre-tightening device of screw rod nut pair with controllable pre-tightening force |
| CN105485481A (en) * | 2015-12-20 | 2016-04-13 | 华南理工大学 | Displacement-adjustable precision locating platform |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
| CN114362471B (en) * | 2021-12-10 | 2023-07-14 | 浙江大学杭州国际科创中心 | Double-stage multi-degree-of-freedom space position precise stabilizing system |
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