CN103128628A - Optical element processing and detecting platform based on multi-degree-of-freedom motor - Google Patents

Optical element processing and detecting platform based on multi-degree-of-freedom motor Download PDF

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Publication number
CN103128628A
CN103128628A CN2013100859542A CN201310085954A CN103128628A CN 103128628 A CN103128628 A CN 103128628A CN 2013100859542 A CN2013100859542 A CN 2013100859542A CN 201310085954 A CN201310085954 A CN 201310085954A CN 103128628 A CN103128628 A CN 103128628A
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China
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motor
freedom
axis
processing
electric motor
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CN2013100859542A
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Chinese (zh)
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CN103128628B (en
Inventor
王振忠
郭隐彪
潘日
梁恺
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厦门大学
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Abstract

The invention provides an optical element processing and detecting platform based on a multi-degree-of-freedom motor, and relates to a processing and detecting platform which is used for the optical element. According to the optical element processing and detecting platform based on the multi-degree-of-freedom motor, the multi-degree-of-freedom motor is adopted to control and replace combined action of multiple conventional motors, multi-degree-of-freedom rotation is achieved, the structure of a machine bed is simplified, meanwhile, the fact that spaces of the multiple motors are overlapped in an error mode is avoided, complexity of a motion control algorithm in a detection process is reduced, and therefore detecting precision of the optical element processing and detecting platform based on the multi-degree-of-freedom motor is improved. According to the optical element processing and detecting platform based on the multi-degree-of-freedom motor, a Y-axis guide rail, Y-axis linear motor, a beam, a vertical column, a workpiece, an operating platform, an electromagnetic chuck, a clamp, a coupling, the multi-degree-of-freedom motor, a motor fixing seat, a sliding plate, a slide block, an X-axis guide rail, a motor connection seat, an X-axis motor, a base seat, a lead screw, a lead screw nut, a Z-axis guide rail, a processing or detection tool, a Z-axis linear motor, a processing or detection connecting base and a control system are arranged.

Description

Optical element processing and detection platform based on multi-freedom electric motor
Technical field
The present invention relates to processing and detection platform for optical element, especially relate to a kind of optical element processing and detection platform based on multi-freedom electric motor.
Background technology
Along with the development of optical element ultraprecise processing, optical element is widely used in various optical systems.Especially the freeform optics element can be corrected multiple aberration in optical system, improves the resolution capability of system, improves the optical system precision, increases operating distance, makes the imaging of optical systems quality greatly improve.Therefore, processing and the detection of optical element are had higher requirement.
Along with the development of the high accuracy complex control systems such as manipulator, day by day improve for the requirement of driving mechanism precision and stability.Because multi-freedom electric motor is simple in structure, motion drives, controls rapidly and coordinate flexibly, has been subject to the extensive concern of Chinese scholars.The multi-freedom electric motor of rare-earth permanent magnet can improve the motor magnetic energy product greatly, effectively improves the operational efficiency of motor, reduces the volume of motor, improves the controllability of motor.The multi-freedom electric motor of rare earth permanent magnet type has overcome the intrinsic relatively relatively poor congenital shortcoming of servo characteristic of asynchronous machine in addition.Yusuf Oner has proposed a kind of novel permanent magnetic multi-freedom electric motor model, has characteristics simple in structure, that reliability is high.(list of references: Lee strives. the three-dimensional magnetic field analysis of a kind of multi-freedom electric motor and Design of Permanent Magnet [J]. and dynamo-electric and control journal, 2012, (07): 65-71.)
in the processing and testing process of optical element especially freeform optics element, often need to guarantee the dead in line of the local normal of surface of the work and processing/testing tool, this relates to the control that rotatablely moves in the space, in General Spatial, rotatablely moving of each direction needs a motor to control realization, because each point normal on the freeform optics element is not identical at three-dimensional, therefore just need at least three electric rotating machines to realize the variation of normal when processing/detection free form surface, this has not only increased the complexity of motion control arithmetic in machine tool mechanical structure and testing process, the also inevitable stack that must introduce a plurality of motor space errors.For above situation, the present invention proposes a kind of optical element processing and detection platform based on multi-freedom electric motor, thus can avoid a plurality of motor space errors superpose when simplifying machine tool structure and reduce testing process in the complexity raising accuracy of detection of motion control arithmetic.
Summary of the invention
The object of the invention is to in the processing of optical element especially freeform optics element and testing process, the situation that needs the dead in line of the local normal of assurance surface of the work and processing/testing tool, provide a kind of and adopt multi-freedom electric motor control to replace traditional a plurality of motor actings in conjunction to realize the multiple degrees of freedom rotation, thus can avoid a plurality of motor space errors superpose when simplifying machine tool structure and reduces testing process in the optical element based on multi-freedom electric motor of complexity raising accuracy of detection of motion control arithmetic process and detection platform.
The present invention is provided with Y-axis guide rail, Y-axis linear electric motors, crossbeam, column, workpiece, workbench, magnechuck, fixture, shaft coupling, multi-freedom electric motor, motor fixing seat, sliding panel, slide block, X-axis guide rail, motor connecting base, X-axis motor, base, screw mandrel, feed screw nut, Z axis guide rail, processing/testing tool, Z axis linear electric motors, processing/testing tool Connection Block, control system.
Workpiece is fixed on workbench by fixture, and workbench is connected with shaft coupling, connects multi-freedom electric motor below shaft coupling, and workpiece can carry out the Three Degree Of Freedom rotation under multi-freedom electric motor drives; Multi-freedom electric motor is fixed on motor fixing seat, and motor fixing seat is connected with base by bolt; Realize that by X-axis motor, screw mandrel, feed screw nut, X-axis guide rail and slide block multi-freedom electric motor is along the back and forth movement of X-direction; Described column is located on base, and Z axis guide rail and Z axis linear electric motors are located on column, is used for driving crossbeam along the back and forth movement of Z-direction; Y-axis guide rail and Y-axis linear electric motors are located on crossbeam, are used for driving probe/polishing tool Connection Block along the back and forth movement of Y direction; Motion by crossbeam and probe/polishing tool Connection Block realizes probe/polishing tool moving along Z axis, Y-axis; Y-axis linear electric motors, Z axis linear electric motors, X-axis motor and multi-freedom electric motor are connected with control system.
Described multi-freedom electric motor can be provided with 8 independently stator coil and the spherical rotors of permanent magnetism, and the spherical rotor of permanent magnetism is provided with 4 utmost point rare earth permanent magnets, and each stator coil is by a corresponding cylindricality supporting unshakable in one's determination and magnetic conduction; Multi-freedom electric motor transmits spherical epitrochanterian moment to workbench by the multi-freedom electric motor axle; Described 8 independently stator coil divide two-layer placement, do 3DOF motion thereby drive spherical rotor.The spherical rotor of permanent magnetism is placed on the geometric center of multi-freedom electric motor.The spherical rotor of permanent magnetism can be done rotation ± 180 ° and deflection ± 45 ° motion, and the direction of motion of multi-freedom electric motor axle and movement velocity are determined by the step mode of 8 stator coils and size of current.
The present invention utilizes traditional frame for movement to realize processing/testing tool and the relative translation campaign of workpiece on X, Y, Z three direction of principal axis, adopt multi-freedom electric motor to control and replace traditional a plurality of motor actings in conjunction realization processing/testing tools rotatablely moving around X, Y, Z three axles, make optical element especially the freeform optics element in processing/testing process, the dead in line of the local normal of processing/test point and processing/testing tool.Thereby can avoid a plurality of motor space errors superpose when simplifying machine tool structure and reduce testing process in the complexity raising accuracy of detection of motion control arithmetic.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the multi-freedom electric motor model schematic diagram that adopts in the embodiment of the present invention.
Fig. 3 be adopt in the embodiment of the present invention the multi-freedom electric motor cross-sectional schematic.
Fig. 4 is the embodiment schematic diagram of the embodiment of the present invention.
Below give the mark of main accessory in publishing picture:
the 1-Y axis rail, 2-Y axle linear electric motors, the 3-crossbeam, the 4-column, the 5-workpiece, the 6-workbench, the 7-magnechuck, the 8-fixture, the 9-shaft coupling, the 10-multi-freedom electric motor, the 11-motor fixing seat, the 12-sliding panel, the 13-slide block, the 14-X axis rail, the 15-motor connecting base, the 16-X spindle motor, the 17-base, the 18-screw mandrel, 19-feed screw nut, the 20-Z axis rail, 21-processing/testing tool, 22-Z axle linear electric motors, 23-processing/testing tool Connection Block, the 24-control system, 25-multi-freedom electric motor axle, the spherical rotor of 26-, the 27-cylindricality is unshakable in one's determination, 28-multi-freedom electric motor shell, the 29-stator coil, 30-freeform optics element.
The specific embodiment
Following examples are further elaborated technical scheme of the present invention in connection with accompanying drawing:
Referring to Fig. 1, the embodiment of the present invention is provided with Y-axis guide rail 1, Y-axis linear electric motors 2, crossbeam 3, column 4, workpiece 5, workbench 6, magnechuck 7, fixture 8, shaft coupling 9, multi-freedom electric motor 10, motor fixing seat 11, sliding panel 12, slide block 13, X-axis guide rail 14, motor connecting base 15, X-axis motor 16, base 17, screw mandrel 18, feed screw nut 19, Z axis guide rail 20, processing/testing tool 21, Z axis linear electric motors 22, processing/testing tool Connection Block 23 and control system 24.
Workpiece 5 is fixed on workbench 6 by fixture 8 and magnechuck 7, and workbench 6 is connected with shaft coupling 9, and shaft coupling 9 belows connect multi-freedom electric motor 10, and workpiece 5 can carry out the Three Degree Of Freedom rotation under multi-freedom electric motor 10 drives; Multi-freedom electric motor 10 is fixed on motor fixing seat 11, and motor fixing seat 11 is connected with base 17 by bolt; Realize that by X-axis motor 16, screw mandrel 18, feed screw nut 19, X-axis guide rail 14 and slide block 13 multi-freedom electric motor 10 is along the back and forth movement of X-direction; Described column 4 is located on base 17, and Z axis guide rail 20 and Z axis linear electric motors 22 are located on column 4, is used for driving crossbeam 3 along the back and forth movement of Z-direction; Y-axis guide rail 1 and Y-axis linear electric motors 2 are located on crossbeam 3, are used for driving probe/polishing tool Connection Block along the back and forth movement of Y direction; Motion by crossbeam 3 and probe/polishing tool Connection Block realizes probe/polishing tool moving along Z axis, Y-axis; Y-axis linear electric motors 2, Z axis linear electric motors 22, X-axis motor 16 are connected with multi-freedom electric motor and are connected with control system 24.
Referring to Fig. 2 and 3, the major part of multi-freedom electric motor 10 is 8 independently spherical rotors 26 of forming of stator coil 29 and 4 utmost point rare earth permanent magnets.Each stator coil 29 has a corresponding cylindricality unshakable in one's determination 27 to play supporting and magnetic conduction effect.This motor arrives workbench 6 by the moment that multi-freedom electric motor axle 25 transmits on spherical rotor 26.8 independently stator coil two-layer placements in 29 minutes are done the 3DOF motion thereby drive spherical rotor 26.The spherical rotor 26 that 4 utmost point rare earth permanent magnets form is placed on the geometric center of motor.The spherical rotor 26 of permanent magnetism can be done rotation ± 180 ° and deflection ± 45 ° motion, and the direction of motion of multi-freedom electric motor axle 25 and movement velocity are determined by the step mode of 8 stator coils 29 and size of current.
The below describes embodiment of the present invention with the detection of any two-phase adjoint point on freeform optics element 30.Processing/testing tool 21 need to be moved on the normal extended line of tested point when detecting due to freeform optics element 30, therefore, measuring process is generally cooperated to complete by two motions: namely rotatablely move and feed motion, wherein rotatablely move for guaranteeing that the normal between two test points changes, feed motion is used for changing the relative space position of processing/testing tool 21 and tested point, drives processing/testing tool 21 Linear-movings to the normal extended line of tested point.be illustrated in figure 4 as two adjacent test point A on freeform optics element 30, the testing process of B, in diagram, processing/testing tool 21 is completed the measurement that A is ordered on the normal extended line that A is ordered, and the B point is next tested point, because processing/testing tool 21 is in vertical direction all the time, and on freeform optics element 30, the normal of arbitrfary point is not identical at three-dimensional, therefore, the local normal direction that B is ordered need to be adjusted to vertical direction (with reference to the direction of rotation of figure 3 multi-freedom electric motors) by rotatablely moving of three directions through multi-freedom electric motor 10, the electrical current size of multi-freedom electric motor 10 in the anglec of rotation of all directions is controlled multi-freedom electric motor stator coil 29 by control system 24 accurately controlled, when regulating B point normal direction by rotatablely moving of multi-freedom electric motor 10, because needs are avoided interfering and the reasons such as processing/testing tool 21 and B point position Existential Space position deviation, need to regulate the relativeness that processing/testing tool 21 and B are ordered by feed motion, namely control X-axis motor 16 by control system 24, Y-axis linear electric motors 2 and Z axis linear electric motors 22 carry out three linear movements on direction, thereby when guarantee measuring on freeform optics element 30 the B point, measurement is completed in processing/testing tool 21 is in that B orders normal extended line top.
Certainly, in the embodiment of the present invention, the installation site of this multi-freedom electric motor 10 is not limited to workbench 6 belows described in specification, also can be arranged on equivalently to be used for driving processing/testing tool 21 on processing/testing tool Connection Block 23.And multi-freedom electric motor 10 drive forms are not limited to the permanent magnet described in specification and drive, and the multi-freedom electric motor that has around three direction rotations of any drive form all is suitable for and the present invention.Simultaneously, the present invention can carry out modularization, can be according to the multi-freedom electric motor 10 of the different choice different model of the class molded dimension of workpiece 5, the parts such as magnechuck 7, workbench 6.

Claims (3)

1. based on optical element processing and the detection platform of multi-freedom electric motor, it is characterized in that being provided with Y-axis guide rail, Y-axis linear electric motors, crossbeam, column, workpiece, workbench, magnechuck, fixture, shaft coupling, multi-freedom electric motor, motor fixing seat, sliding panel, slide block, X-axis guide rail, motor connecting base, X-axis motor, base, screw mandrel, feed screw nut, Z axis guide rail, processing/testing tool, Z axis linear electric motors, processing/testing tool Connection Block, control system;
Workpiece is fixed on workbench by fixture, and workbench is connected with shaft coupling, connects multi-freedom electric motor below shaft coupling, and workpiece can carry out the Three Degree Of Freedom rotation under multi-freedom electric motor drives; Multi-freedom electric motor is fixed on motor fixing seat, and motor fixing seat is connected with base by bolt; Realize that by X-axis motor, screw mandrel, feed screw nut, X-axis guide rail and slide block multi-freedom electric motor is along the back and forth movement of X-direction; Described column is located on base, and Z axis guide rail and Z axis linear electric motors are located on column, is used for driving crossbeam along the back and forth movement of Z-direction; Y-axis guide rail and Y-axis linear electric motors are located on crossbeam, are used for driving probe/polishing tool Connection Block along the back and forth movement of Y direction; Motion by crossbeam and probe/polishing tool Connection Block realizes probe/polishing tool moving along Z axis, Y-axis; Y-axis linear electric motors, Z axis linear electric motors, X-axis motor and multi-freedom electric motor are connected with control system.
2. process and detection platform based on the optical element of multi-freedom electric motor as claimed in claim 1, it is characterized in that described multi-freedom electric motor is provided with 8 independently stator coil and the spherical rotors of permanent magnetism, the spherical rotor of permanent magnetism is provided with 4 utmost point rare earth permanent magnets, and each stator coil is by a corresponding cylindricality supporting unshakable in one's determination and magnetic conduction; Multi-freedom electric motor transmits spherical epitrochanterian moment to workbench by the multi-freedom electric motor axle.
3. as claimed in claim 2 based on the processing of the optical element of multi-freedom electric motor and detection platform, it is characterized in that described 8 independently stator coil divide two-layer placement.
CN201310085954.2A 2013-03-18 2013-03-18 Optical element processing and detecting platform based on multi-degree-of-freedom motor CN103128628B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103273409A (en) * 2013-06-08 2013-09-04 厦门大学 Multi-degree-of-freedom air bag polishing tool
CN104723196A (en) * 2013-12-23 2015-06-24 北京海普瑞森科技发展有限公司 Four-degree-of-freedom adjusting table
CN104960673A (en) * 2015-06-08 2015-10-07 上海交通大学 Multi-functional extensible test platform applicable to biomimetic flapping-wing micro air vehicle
WO2017133124A1 (en) * 2016-02-02 2017-08-10 京东方科技集团股份有限公司 Substrate polishing apparatus
CN107816945A (en) * 2017-10-30 2018-03-20 大连民族大学 Five-coordinate measuring machine
CN108015491A (en) * 2017-11-28 2018-05-11 钟祥长富精密电子科技有限公司 A kind of metal hand casing process equipment and its technique
CN109453928A (en) * 2019-01-08 2019-03-12 河北科技大学 Spraying equipment based on multi-freedom electric motor
CN110434811A (en) * 2019-07-10 2019-11-12 广东华中科技大学工业技术研究院 A kind of vision-based detection monitor station with to object progress multi-orientation detection
CN110948422A (en) * 2019-12-14 2020-04-03 山东科技大学 Novel device capable of realizing integrated measurement of workpiece retention and multiple degrees of freedom

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1658074A (en) * 2005-03-02 2005-08-24 上海微电子装备有限公司 Multifreedom motion and positioning device
CN101281026A (en) * 2008-05-16 2008-10-08 赵宗政 Platform capable of accurately detecting position and using method thereof
CN102480253A (en) * 2011-04-13 2012-05-30 河北科技大学 Permanent-magnet rotor deflection-type three-degree-of-freedom motion motor
CN202693480U (en) * 2012-07-11 2013-01-23 中国地质大学(武汉) Three-dimensional movable observation platform with four degrees of freedom

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1658074A (en) * 2005-03-02 2005-08-24 上海微电子装备有限公司 Multifreedom motion and positioning device
CN101281026A (en) * 2008-05-16 2008-10-08 赵宗政 Platform capable of accurately detecting position and using method thereof
CN102480253A (en) * 2011-04-13 2012-05-30 河北科技大学 Permanent-magnet rotor deflection-type three-degree-of-freedom motion motor
CN202693480U (en) * 2012-07-11 2013-01-23 中国地质大学(武汉) Three-dimensional movable observation platform with four degrees of freedom

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103273409A (en) * 2013-06-08 2013-09-04 厦门大学 Multi-degree-of-freedom air bag polishing tool
CN104723196A (en) * 2013-12-23 2015-06-24 北京海普瑞森科技发展有限公司 Four-degree-of-freedom adjusting table
CN104723196B (en) * 2013-12-23 2017-04-05 北京海普瑞森科技发展有限公司 Four-degree-of-freedom adjusts platform
CN104960673A (en) * 2015-06-08 2015-10-07 上海交通大学 Multi-functional extensible test platform applicable to biomimetic flapping-wing micro air vehicle
CN104960673B (en) * 2015-06-08 2017-06-13 上海交通大学 Suitable for the multi-functional expansible test platform of bionic flapping-wing microreactor technology
WO2017133124A1 (en) * 2016-02-02 2017-08-10 京东方科技集团股份有限公司 Substrate polishing apparatus
US10220483B2 (en) 2016-02-02 2019-03-05 Boe Technology Group Co., Ltd. Substrate grinding device
US20180056471A1 (en) * 2016-02-02 2018-03-01 Boe Technology Group Co., Ltd. Substrate grinding device
CN107816945A (en) * 2017-10-30 2018-03-20 大连民族大学 Five-coordinate measuring machine
CN108015491A (en) * 2017-11-28 2018-05-11 钟祥长富精密电子科技有限公司 A kind of metal hand casing process equipment and its technique
CN109453928A (en) * 2019-01-08 2019-03-12 河北科技大学 Spraying equipment based on multi-freedom electric motor
CN110434811A (en) * 2019-07-10 2019-11-12 广东华中科技大学工业技术研究院 A kind of vision-based detection monitor station with to object progress multi-orientation detection
CN110948422A (en) * 2019-12-14 2020-04-03 山东科技大学 Novel device capable of realizing integrated measurement of workpiece retention and multiple degrees of freedom

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