CN103822576A - Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase - Google Patents
Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase Download PDFInfo
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- CN103822576A CN103822576A CN201310601121.7A CN201310601121A CN103822576A CN 103822576 A CN103822576 A CN 103822576A CN 201310601121 A CN201310601121 A CN 201310601121A CN 103822576 A CN103822576 A CN 103822576A
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Abstract
The invention discloses a method using a linear Hall sensor group to detect the permanent magnet plane motor rotor coil phase. A rotor coil array comprises 4 drive units. Each drive unit is composed of three coils. First and third drive units generate X axial horizontal thrust. Second and fourth drive units generate Y axial horizontal thrust. A linear Hall sensor group is respectively arranged outside each drive unit. Each linear Hall sensor group is composed of 4 linear Hall sensors. The starting point of each linear Hall sensor is the geometric neutral line of the drive unit corresponding to the linear Hall sensor. The linear Hall sensors are equidistantly arranged at the interval of 1/2 polar distance along the arrangement direction of the coils, so as to measure the X or Y axial horizontal component flux density of the magnetic field of each corresponding arrangement point. According to the horizontal component flux density measured by 4 linear Hall sensors, the phase angle of each rotor coil relative to a stator magnetic field is calculated. A measuring range is not limited by stroke. The method has the advantages of stable and reliable operation and high measuring precision.
Description
Technical field
The invention belongs to power drive technical field, be specifically related to a kind of method that adopts linear hall sensor group to detect permanent-magnet planar motor mover coil phase place, be specially adapted to the modern manufacturing equipment fields such as semiconductor lithography, precision drawing instrument, high-accuracy action platform.
Background technology
Along with advanced manufacturing industry obtains fast-developingly, modern precision, ultrahigh precision manufacturing equipment have urgent demand to height response, high-speed, high-accuracy plane drive unit.Traditional two dimensional surface worktable is formed by electric rotating machine and linear transmission mechanism stack combinations, because this stack combinations mechanism exists the problems such as distortion, friction, sideshake conventionally, table positions precision is difficult to the level that reaches higher, and in movement conversion mechanism, the moving component on driving-chain has also increased the movement inertia of complicacy and the system of structure.Planar motor can directly be exported two-dimensional electromagnetic thrust and two-dimension translational motion by mover, can be used for constructing the novel high-performance planar working table of direct-drive type.Compared with traditional two dimensional surface worktable, simple in structure, the advantage such as positioning precision is high, fast response time that direct-drive type planar working table take planar motor as core structure has has very large application potential in the modern manufacturing equipment of the precisions such as semiconductor lithography, precision drawing instrument, high-accuracy action platform, ultrahigh precision.
The mover of motive loop permanent magnetic planar motor is coil array, stator is permanent magnet array, when work, need pass into corresponding electric current to produce needed horizontal thrust with respect to the position of mover to coil array according to stator, therefore, motive loop permanent magnetic planar motor mover is definite serviceability that is directly connected to motor of mover coil with respect to stator field phase place with respect to the position probing of stator.Motive loop permanent magnetic planar motor mover coil adopts distance element high-precision laser range-finding instrument to detect with respect to the phase place of stator field conventionally, but this equipment price costliness, install and use require high, measurement range is limited, therefore, need a kind of new technical scheme to address the above problem.
Summary of the invention
The deficiency existing for prior art, the present invention proposes a kind of method that adopts linear hall sensor group to detect permanent-magnet planar motor mover coil phase place, and the sensor cost that the method adopts is low, and measurement range is not subject to travel limits, and working stability is reliable.
For achieving the above object, the technical solution adopted in the present invention is: described permanent-magnet planar motor is made up of stator permanent magnet array and mover coil array, mover coil array comprises 4 driver elements, each driver element forms by three coils, the first, the 3rd driver element produces X axis horizontal thrust, the second, 4 wheel driven moving cell produces Y-axis horizontal thrust, adopt again following steps: (1), in a linear hall sensor group of the each layout in each driver element outside, each linear hall sensor group forms by 4 linear hall sensors; (2) each linear hall sensor, take the geometrical neutral line of the driver element corresponding with it as starting point, is arranged equally spacedly along orientation interval 1/2 pole span of coil, to measure the X axis in each corresponding layout points magnetic field or the horizontal component magnetic of Y-axis is close; (3) calculate the phasing degree of mover coil with respect to stator field according to the measured horizontal component magnetic density of 4 linear hall sensors in each linear hall sensor group.
Compared with prior art, the invention has the beneficial effects as follows:
(1) the present invention adopts linear hall sensor group to replace conventional laser range finder permanent-magnet planar motor mover coil phase place is detected, and easy to install, hardware cost is low, and measurement range is not subject to travel limits, and working stability is reliable.
(2) the present invention adopts 4 linear hall sensors equidistantly to arrange along coil orientation interval 1/2 pole span, and is vertically installed by the horizontal component of measuring magnetic field, disturbed by coil current little, and measuring accuracy is high.
Accompanying drawing explanation
Fig. 1 is the composition structural plan schematic diagram with stator and mover in the permanent-magnet planar motor described in linear hall sensor group detection permanent-magnet planar motor mover coil phase method for position provided by the invention;
In Fig. 1: 1-stator permanent magnet array; 2-mover coil array; 3-coil; 4-linear hall sensor group; A, C-produce the driver element of X axis horizontal thrust; B, D-produce the driver element of Y-axis horizontal thrust; HA, HB, HC, HD-and driver element A, B, the corresponding linear hall sensor group of C, D;
-pole span.
Fig. 2 is a linear hall sensor circuit connection diagram of the present invention;
In Fig. 2, H is linear hall sensor.
Fig. 3 is X axis or the close distribution waveform of Y-axis magnetic in permanent magnetism permanent-magnet planar motor permanent magnet array of the present invention magnetic field;
In Fig. 3,
,
,
with
it is the close horizontal component value of magnetic that a linear hall sensor group records.
Embodiment
Further illustrate the present invention below in conjunction with the drawings and specific embodiments.As shown in Figure 1, the present invention is made up of stator and mover with the permanent-magnet planar motor described in linear hall sensor group detection permanent-magnet planar motor mover coil phase method for position.Stator is stator permanent magnet array 1, the permanent magnet array of stator permanent magnet array 1, and the close X axis of the magnetic of permanent magnet array, the horizontal component of Y-axis are cosine distribution.Mover is mover coil array 2, mover coil array 2 non iron-cores, and mover coil array 2 comprises A, B, these 4 driver elements of C, D, and each driver element is made up of three coils 3.Driver element A, C diagonal angle are arranged, driver element A, C generation X axis horizontal thrust; Driver element B, D diagonal angle are arranged, driver element B, D generation Y-axis horizontal thrust.
In each driver element A, B, C, a linear hall sensor group 4 of the each layout in D outside, 4 linear hall sensor groups 4 are respectively linear hall sensor group HA, HB, HC, HD, linear hall sensor group HA layout corresponding to driver element A, linear hall sensor group HB layout corresponding to driver element B, linear hall sensor group HC layout corresponding to driver element C, linear hall sensor group HD layout corresponding to driver element D.
Each linear hall sensor group 4 forms by 4 linear hall sensors, and each linear hall sensor is take driver element A, the B corresponding with it, C, D geometrical neutral line as starting point, along orientation interval 1/2 pole span of coil 3
arrange equally spacedly, for measuring the X axis in each corresponding mounting points magnetic field or the close value of horizontal component magnetic of Y-axis.
As shown in Figure 2, each linear hall sensor is connected respectively to signal conditioning circuit, signal conditioning circuit connects microprocessor, and microprocessor has A/D ALT-CH alternate channel.The output signal of each linear hall sensor is sent into the A/D ALT-CH alternate channel of microprocessor after signal conditioning circuit is processed.
As shown in Figure 3, if the measured horizontal component magnetic density value of 4 linear hall sensors in linear hall sensor group 4 be
,
,
with
, microprocessor calculates mover coil with respect to stator field phase place according to the each linear hall sensor measured value gathering, the phasing degree of driver element corresponding to each linear hall sensor group
computing formula is:
Phasing degree
be that permanent-magnet planar motor mover coil is with respect to stator field phasing degree.
Claims (4)
1. one kind is detected permanent-magnet planar motor mover coil phase method for position by linear hall sensor group, described permanent-magnet planar motor is made up of stator permanent magnet array and mover coil array, it is characterized in that: mover coil array comprises 4 driver elements, each driver element forms by three coils, the first, the 3rd driver element produces X axis horizontal thrust, the second, 4 wheel driven moving cell produces Y-axis horizontal thrust, then adopts following steps:
(1) in a linear hall sensor group of the each layout in each driver element outside, each linear hall sensor group forms by 4 linear hall sensors;
(2) each linear hall sensor, take the geometrical neutral line of the driver element corresponding with it as starting point, is arranged equally spacedly along orientation interval 1/2 pole span of coil, to measure the X axis in each corresponding layout points magnetic field or the horizontal component magnetic of Y-axis is close;
(3) calculate the phasing degree of mover coil with respect to stator field according to the measured horizontal component magnetic density of 4 linear hall sensors in each linear hall sensor group.
2. one according to claim 1 detects permanent-magnet planar motor mover coil phase method for position by linear hall sensor group, it is characterized in that: in step (3), the output signal of each linear hall sensor is sent into microprocessor after signal conditioning circuit is processed, and microprocessor is according to formula
calculate phasing degree
,
,
,
with
respectively 4 horizontal component magnetic densities that linear hall sensor is measured.
3. linear hall sensor group detects permanent-magnet planar motor mover coil phase method for position for one according to claim 1, it is characterized in that: the close X axis of the magnetic of stator permanent magnet array, the horizontal component of Y-axis are cosine distribution.
4. linear hall sensor group detects permanent-magnet planar motor mover coil phase method for position for one according to claim 1, it is characterized in that: the first, the 3rd driver element diagonal angle is arranged second, 4 wheel driven moving cell diagonal angle arranges.
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| CN201310601121.7A CN103822576B (en) | 2013-11-25 | 2013-11-25 | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase |
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| CN201310601121.7A CN103822576B (en) | 2013-11-25 | 2013-11-25 | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase |
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| CN103822576B CN103822576B (en) | 2017-01-18 |
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Cited By (5)
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| CN104330631A (en) * | 2014-10-31 | 2015-02-04 | 华中科技大学 | Magnetic suspension planar motor rotor initial phase positioning method |
| CN104779768A (en) * | 2015-04-01 | 2015-07-15 | 清华大学 | Cylindrical linear motor |
| CN113954955A (en) * | 2021-10-14 | 2022-01-21 | 济南科亚电子科技有限公司 | Implementation method of electric steering wheel motor drive controller |
| CN114370812A (en) * | 2022-01-20 | 2022-04-19 | 哈尔滨工业大学 | Three-degree-of-freedom position measuring device and method for rotor of Y-shaped magnetic levitation planar motor |
| CN115752195A (en) * | 2022-11-09 | 2023-03-07 | 哈尔滨工业大学 | Hall sensor magnetic field position information detection method based on three-phase balance condition |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104779768A (en) * | 2015-04-01 | 2015-07-15 | 清华大学 | Cylindrical linear motor |
| CN113954955A (en) * | 2021-10-14 | 2022-01-21 | 济南科亚电子科技有限公司 | Implementation method of electric steering wheel motor drive controller |
| CN114370812A (en) * | 2022-01-20 | 2022-04-19 | 哈尔滨工业大学 | Three-degree-of-freedom position measuring device and method for rotor of Y-shaped magnetic levitation planar motor |
| CN114370812B (en) * | 2022-01-20 | 2022-09-16 | 哈尔滨工业大学 | Three-degree-of-freedom position measuring device and method for rotor of Y-shaped magnetic levitation planar motor |
| CN115752195A (en) * | 2022-11-09 | 2023-03-07 | 哈尔滨工业大学 | Hall sensor magnetic field position information detection method based on three-phase balance condition |
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Effective date of registration: 20211217 Address after: 212200 No. 168, Zhongdian Avenue, Yangzhong City, Zhenjiang City, Jiangsu Province Patentee after: Yangzhong inspection and Testing Center Address before: Zhenjiang City, Jiangsu Province, 212013 Jingkou District Road No. 301 Patentee before: JIANGSU University |