CN101769981B - Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array - Google Patents
Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array Download PDFInfo
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Abstract
A phase searching detection method for a permanent-magnet planar motor by adopting a linear Hall array is characterized in that each coil corresponds to a Hall array and the Hall array is placed perpendicular to the horizontal output direction of each driving unit of the coil; linear Hall sensors in the Hall array are distributed in equal space in the even-multiple polar distance, are placed parallel with a permanent magnet array and are used for measuring the magnetic flux density component perpendicular to the movement direction of the planar motor; and the output signal of the Hall array is generated by adding all the signals of the linear Hall sensors in the Hall array. The output signal is basically changeless when the Hall array moves perpendicular to the horizontal thrust direction of the corresponding coil, and the signal carries out positive-negative alternation in the horizontal thrust direction of the corresponding coil and changes close to the sinusoidal waveform. The position relations between the coils and the permanent magnet array when the current in the coils of the driving units is zero (phase-change point) are determined. The phase searching detection of the permanent-magnet planar motor in two dimensions becomes superposition of two one-dimensional phase searching detection, thus realizing planar phase searching detection.
Description
Technical field
The present invention relates to a kind of permanent-magnet planar motor and seek phase method, particularly a kind of measuring method of utilizing linear Hall array to confirm the coil current commutation point of permanent-magnet planar motor.
Background technology
Fast development along with advanced manufacturing industry; The hi-Fix platform technology has obtained deep research and development; Have broad application prospects in fields such as semiconductor industry, little stereolithography, nanometer worktable, high precision plotting apparatuss, wherein most important applications is the high precision photoetching locating platform in the semiconductor industry.The demand that modern precision, ultraprecise process unit have ripple to cut to height response, high-speed, high-precision plane drive unit.Initial plane drive unit is realized that by two direct driving linear motor adopt range upon range of Drive Structure, this structure has increased the complicacy of kinematic train, from not breaking away from the pattern of low dimension motion stack formation higher-dimension motion in essence.For the linear electric motors of bottom, carry the gross mass of upper strata linear electric motors and associated mechanical components thereof, thereby have a strong impact on location and control accuracy.And directly utilize electromagnetic force to produce the planar motor of plane motion; Have the characteristics of the high and low hear rate of force density, high-speed and high reliability; Because of having saved the intermediate conversion device that is linearly moved to plane motion; Can be controlling object with being made of one of motor structure, have that reaction is fast, highly sensitive, servo-actuated property reaches advantages of simple structure and simple well.
Along with the technical development of advanced manufacturing industry, some accurate opertaing devices such as litho machine need carry out precise motion control in the spatial dimension of an almost plane.Therefore, planar motor particularly has broad application prospects in modern semiconductors microfabrication equipment and other ultraprecise process equipment at two dimensional surface location processing unit (plant).
It is a kind of through preestablishing the direct driving of direction and electromagnetic force to form the two dimensional motion in the plane that the permanent-magnet planar motor electromagnetic force directly drives.A driver element becomes with upper set of coils by two, and the electric current that under the situation of the relative position of confirming coil and permanent magnet array, feeds specific size is the size and Orientation of may command electromagnetic force, makes the permanent-magnet planar motor mover produce the motion of respective direction.The relative position measurement of driver element and permanent magnet array generally is to utilize increment type position transducers such as grating chi; Can't confirm the commutation point (coil that current zero-crossing point is corresponding in the coil and the position of permanent magnet array) of driver element coil like this, promptly can't confirm the phase relation of the initial position of coil and permanent magnet array.
Summary of the invention
The objective of the invention is to provide a kind of phase hunting detection method of coil for permanent-magnet planar motor; Promptly the commutation point of drive coil in permanent magnet array of permanent-magnet planar motor measured; The signal that produces when Hall array is moved on perpendicular to corresponding coil horizontal thrust direction is constant basically; The signal that produces when on corresponding coil horizontal thrust direction, moving is positive and negative alternately, changes near sinusoidal waveform; The position of coil and permanent magnet array relation when confirming current zero-crossing point in the drive coil (commutation point).
In order to achieve the above object, the technical scheme of the present invention's employing is:
A kind of phase hunting detection method for permanent magnet planar motor that adopts linear Hall array; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil; And Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed; Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion;
C. with the output signal of each linear hall sensor of Hall array respectively through separately sampling operational amplifier modulation; Voltage signal after making obtains the output signal of Hall array through the sum operational amplifier addition, perhaps the output signal of each linear hall sensor of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through sampling operational amplifier modulation back separately;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
The another kind of phase hunting detection method for permanent magnet planar motor that adopts linear Hall array provided by the invention; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, has two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and on the horizontal thrust direction, differ the coil of 2N pole span p, corresponding a Hall array, wherein N=0,1,2,3 Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion;
C. each linear hall sensor output signal of Hall array is modulated through the operational amplifier of sampling separately respectively; Voltage signal after making obtains the output signal of Hall array by the sum operational amplifier addition, perhaps each linear hall sensor output signal of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through the operational amplifier modulation back of sampling separately;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
In the technique scheme, described permanent-magnet planar motor is motive loop permanent magnetic planar motor or moving-iron type permanent-magnet planar motor, said coil ribbon core or ribbon core not.
The present invention has the following advantages and the high-lighting effect: the present invention is the method that the commutation point of drive coil in permanent magnet array of permanent-magnet planar motor measured for permanent-magnet planar motor provides a kind of phase method of seeking of coil; The signal that produces when Hall array is moved on perpendicular to corresponding coil horizontal thrust direction is constant basically, and the signal that produces when on corresponding coil horizontal thrust direction, moving is positive and negative alternately, changes near sinusoidal waveform; The position of coil and permanent magnet array relation when confirming current zero-crossing point in the drive coil (commutation point) detects permanent-magnet planar motor seeking in two dimension mutually to have become two one dimensions and seeks the stack that detects mutually, and detection is achieved to make the plane seek mutually; Can't confirm the commutation point of driver element coil (coil that current zero-crossing point is corresponding in the coil and the position of permanent magnet array) thereby efficiently solve increment type position transducers such as utilizing the grating chi in the prior art, promptly can't confirm the technical matters of the initial position phase relation of coil and permanent magnet array.
Description of drawings
Fig. 1 is a kind of floor map that adopts the phase hunting detection method for permanent magnet planar motor embodiment of linear Hall array provided by the invention.
Fig. 2 is the location diagram of neutral line Hall array of the present invention and permanent magnet array.
Fig. 3 is the A-A sectional view of Fig. 2.
Fig. 4 is that the circuit of a Hall array connects synoptic diagram.
Fig. 5 is the Hall array that adopts 6 linear hall sensors and the form output waveform signals when corresponding coil horizontal thrust direction is moved.
Fig. 6 is a kind of coil arrangement mode of two driver elements on identical thrust direction.
Fig. 7 is another kind of permanent-magnet planar motor mover platform structure.
Among the figure: the 1-permanent magnet array; The 2-coil array; The 3-driver element; The 4-coil; The 5-Hall array; The 6-horizontal thrust is the corresponding Hall array of coil of directions X; The 7-horizontal thrust is the corresponding Hall array of coil of Y direction; The 8-linear hall sensor; The 9-operational amplifier of sampling; The 10-sum operational amplifier; First driver element of 11-Y direction; Second driver element of 12-Y direction; First driver element of 15-X direction; Second driver element of 16-X direction; The coil of first driver element of 15a-X direction; The coil of first driver element of 15b-X direction; The coil of first driver element of 15c-X direction; The coil of second driver element of 16a-X direction; The coil of second driver element of 16b-X direction; The coil of second driver element of 16c-X direction.
Embodiment
A kind of phase hunting detection method for permanent magnet planar motor that adopts linear Hall array provided by the invention; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil; And Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed; Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion;
C. with the output signal of each linear hall sensor of Hall array respectively through separately sampling operational amplifier 9 modulation; Voltage signal after making obtains the output signal of Hall array through sum operational amplifier 10 additions, perhaps the output signal of each linear hall sensor of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through sampling operational amplifier 9 modulation backs separately;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
The another kind of phase hunting detection method for permanent magnet planar motor that adopts linear Hall array provided by the invention; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, has two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and on the horizontal thrust direction, differ the coil of 2N pole span p, corresponding a Hall array, wherein N=0,1,2,3 ... (being that N is zero or positive integer); Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion;
C. each linear hall sensor output signal of Hall array is modulated through the operational amplifier 9 of sampling separately respectively; Voltage signal after making obtains the output signal of Hall array by sum operational amplifier 10 additions, perhaps each linear hall sensor output signal of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through the operational amplifier 9 modulation backs of sampling separately;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
Below in conjunction with accompanying drawing the present invention is done further explain.
Fig. 1 is a kind of embodiment floor map that adopts the phase hunting detection method for permanent magnet planar motor of linear Hall array provided by the invention; Described permanent-magnet planar motor contains permanent magnet array 1 and coil array 2, and the coil arrangement direction becomes 45 (or along X-direction or along Y direction) to arrange with the permanent magnet array orientation, and each adjacent driven cell orientation is arranged mutually at an angle of 90; The corresponding Hall array of each coil; And Hall array goes out with the level of this coil place driver element that force direction is vertical to be placed, and said Hall array is made up of six linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span; Referring to figs. 2 and 3; In this instance, coil 4 corresponding Hall arrays 5 are made up of six linear hall sensors of equidistance in two times of pole span 2p, and the distance between the linear hall sensor is p/3.
The parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion.
Respectively through operational amplifier 9 modulation of sampling separately, the voltage signal after making obtains the output signal of Hall array through sum operational amplifier 10 additions with each linear hall sensor output signal of Hall array.As shown in Figure 4, each linear hall sensor output terminal links to each other with separately sampling operational amplifier respectively, and the operational amplifier output terminal of sampling separately links to each other with the input end of sum operational amplifier.
After operational amplifier 9 modulation of sampling separately, also can directly adopt microprocessor to gather the output signal that addition obtains Hall array respectively each linear hall sensor output signal of Hall array.
The output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship; Signal as the electric current commutation; To be the corresponding Hall array 7 of the coil of Y direction move or horizontal thrust is the corresponding Hall array 6 of the coil of directions X when the Y direction moves the output signal is all constant basically along directions X horizontal thrust; To be the corresponding Hall array 7 of the coil of Y direction move or the horizontal thrust all positive and negative alternate of output signal that is the corresponding Hall array 6 of the coil of directions X when directions X moves along the Y direction horizontal thrust; Waveform is near sinusoidal, and is as shown in Figure 5.Thereby realize the phase-detection of permanent-magnet planar motor.
Because the periodicity in permanent magnet array magnetic field, the horizontal thrust direction is identical and on the horizontal thrust direction, differ the coil of 2N pole span p, can a shared Hall array, wherein N=0,1,2,3 ...With reference to shown in Figure 6; Directions X first driver element 15 is identical with directions X second driver element 16 horizontal thrust directions; Be directions X; Wherein the coil 16a of second driver element of the coil 15a of first driver element of directions X and directions X on directions X at a distance of four pole span p; Therefore the coil 16a of second driver element of the coil 15a of first driver element of directions X and directions X can a shared Hall array; In like manner the coil 16b of second driver element of the coil 15b of first driver element of directions X and directions X can a shared Hall array, and the coil 16c of the coil 15c of first driver element of directions X and second driver element of directions X can a shared Hall array; Similar with the directions X driver element, the coil that first driver element 11 of Y direction is corresponding with second driver element of Y direction also can shared Hall array.
A driver element among Fig. 1 and Fig. 6 is three-phase coil, and the distance in the corresponding Hall array of a phase coil in the driver element, Hall array distance each other and driver element between the coil equates; Shown in Fig. 7, driver element is five phase coils, then needs five groups of Hall arrays with the coil equidistance to seek mutually and measures.Adopt the phase hunting detection method for permanent magnet planar motor of linear Hall array can realize situation to any coil arrangement.
Claims (3)
1. phase hunting detection method for permanent magnet planar motor that adopts linear Hall array; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil; And Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed; Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in permanent-magnet planar motor direction of motion;
C. with the output signal of each linear hall sensor of Hall array respectively through separately sampling operational amplifier (9) modulation; Voltage signal after modulating obtains the output signal of Hall array through sum operational amplifier (10) addition, perhaps the output signal of each linear hall sensor of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through sampling operational amplifier (9) modulation back separately;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
2. phase hunting detection method for permanent magnet planar motor that adopts linear Hall array; Described permanent-magnet planar motor contains permanent magnet array and coil array; Described coil array is made up of two above driver elements; Each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, has two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and on the horizontal thrust direction, differ the coil of 2N pole span p, corresponding Hall array, and wherein, N equals zero or greater than zero integer; Said Hall array is made up of two above linear hall sensors, and linear hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of linear hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in permanent-magnet planar motor direction of motion;
C. each linear hall sensor output signal of Hall array is modulated through the operational amplifier of sampling separately (9) respectively; Voltage signal after modulating obtains the output signal of Hall array by sum operational amplifier (10) addition, perhaps each linear hall sensor output signal of Hall array is directly obtained the output signal of Hall array respectively with microprocessor collection addition through the operational amplifier of sampling separately (9) modulation back;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the phase-detection of permanent-magnet planar motor.
3. a kind of phase hunting detection method for permanent magnet planar motor that adopts linear Hall array according to claim 1 and 2 is characterized in that: described permanent-magnet planar motor is motive loop permanent magnetic planar motor or moving-iron type permanent-magnet planar motor; Said coil ribbon core or ribbon core not.
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| CN102790474B (en) * | 2011-05-19 | 2014-11-12 | 上海微电子装备有限公司 | Method for detecting initial position of planar motor |
| CN103256882B (en) * | 2012-02-17 | 2016-01-20 | 上海微电子装备有限公司 | A kind of levitation planar motor initialized location detection method adopting Hall array |
| CN102607388B (en) | 2012-02-17 | 2014-09-24 | 清华大学 | Rotor displacement measurement device and method for planar motor |
| CN102607391B (en) * | 2012-03-01 | 2014-06-18 | 清华大学 | Method for measuring displacement of planar motor rotor |
| CN103822576B (en) * | 2013-11-25 | 2017-01-18 | 江苏大学 | Method using linear Hall sensor group to detect permanent magnet plane motor rotor coil phase |
| CN104949610B (en) * | 2014-03-24 | 2018-08-24 | 上海微电子装备（集团）股份有限公司 | Magnetic floats cable stage motor magnetic to Barebone and its alignment methods |
| CN111208454B (en) * | 2020-01-09 | 2021-11-30 | 河北工业大学 | Hall-coil combined type three-dimensional magnetic characteristic measurement sensing box |
| CN112713685B (en) * | 2021-01-11 | 2022-07-12 | 光华临港工程应用技术研发(上海)有限公司 | In-wheel motor |
| CN115752195A (en) * | 2022-11-09 | 2023-03-07 | 哈尔滨工业大学 | Hall sensor magnetic field position information detection method based on three-phase balance condition |
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Effective date of registration: 20151110 Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University |