CN101610022B - Planar motor adopting groove-type coil - Google Patents

Abstract

A planar motor adopting slot coils is mainly used in the fields of machinery manufacturing equipment and robots. The planar motor includes a mover and a stator. The mover is composed of four one-dimensional coil arrays, and the arrangement directions of adjacent coil arrays are 90° to each other. The coreless slot coils whose sides are upturned into slots are staggered, and the long sides of an adjacent slot coil are embedded between the two long sides of each rectangular coil, or the two long sides of each rectangular coil One long side of two adjacent slot-shaped coils on the left and right is embedded between them, and the long sides of the two coils are arranged on the same plane; the stator is composed of a permanent magnet array. Compared with the coil array composed of rectangular ironless coils, the coil array can generate greater thrust in the periodic magnetic field of the permanent magnet array, thereby improving the thrust and acceleration of the planar motor.

Description

A Planar Motor Using Slotted Coils

technical field

The invention relates to a planar motor, in particular to a planar motor using slot coils, which is mainly used in the fields of manufacturing equipment and robots.

Background technique

In many industrial equipment, we need to drive the workpiece or the worktable to move in the plane and position it precisely on the plane, such as the stage of the microscope, the silicon wafer stage in the lithography machine and other equipment. The traditional plane positioning device is composed of two or more sets of linear drive units stacked vertically. Each set of linear drive units consists of a rotary motor, a set of linear motion conversion mechanism and a set of linear guide rails, or a linear motor and a set of linear guides. A set of linear guide rails. The linear drive unit located on the bottom not only bears the drive of the end bearing table, but also bears the mass of the top linear drive unit, thus causing the plane positioning device to move in multiple directions (such as the X direction and Y direction of the traditional XY table) The serious imbalance of motion inertia affects the improvement of performance indicators such as motion stroke, response speed, and motion accuracy. In this context, a planar motor that uses electromagnetic force to directly drive a single mover to directly realize multi-degree-of-freedom movement came into being. It has broad application prospects and has received extensive attention

According to the constraints on the non-motion degrees of freedom of planar motors and the technical fields involved, planar motors can be divided into air-floating planar motors and magnetic-floating planar motors. vertical and horizontal) constraints. Compared with the air-flotation method, the maglev method has the advantages of simple structure, no need for precision machining on the surface of the base, active restraint of non-motion degrees of freedom, and easy application in a vacuum environment.

The current maglev planar motor generally provides driving force and suspension support by the Lorentz force generated by the energized coil in the air gap magnetic field of the permanent magnet array. As the requirements for the acceleration and load performance indicators of planar motors continue to increase, we need to continuously increase the thrust of planar motors. The structure and arrangement of the coils have a decisive influence on the performance of planar motors.

The coils of planar motors in current literature generally adopt rectangular ironless coils. A typical structure is shown in FIG. 1 , in which the mover 15 of a planar motor includes an air bearing 13 and a coil array 14 . It consists of four coil arrays, and each coil array is formed by linear arrangement of five rectangular ironless coils. In order to improve the electric fluid density of the air gap, the gap between the two long sides of each rectangular ironless coil is very small , and no current distribution. Because the direction of the current in the two long sides of each rectangular ironless coil must be completely opposite, and at the same time the components of the X, Y, and Z directions of the magnetic induction of the permanent magnet array in the air gap are similar on the plane Sinusoidal periodic distribution, as shown in Figure 2, the plane distribution diagram of the Bz component, so when the two long sides of the same coil are in the same area of the magnetic induction intensity direction, the thrust directions generated by these two long sides are completely opposite, will cancel each other out, reducing the efficiency of the motor. If the distance between the two long sides is increased so that they are in two regions with opposite directions of magnetic induction intensity, the direction of the thrust produced by each long side is the same, but the average electric fluid density in the entire air gap will become smaller, and also Will affect the thrust of the motor.

Contents of the invention

The purpose of the present invention is to provide a planar motor using slot coils to solve the defects of the prior art, that is, to improve the utilization rate of the air gap, and to avoid mutual cancellation of thrusts of adjacent long sides as much as possible.

Technical scheme of the present invention is as follows:

A planar motor using slot coils, comprising a mover 4 and a stator 1, the planar motor includes a moving coil structure using a coil array as a mover or a moving iron structure using a coil array as a stator, characterized in that: The coil array described above is composed of a plurality of one-dimensional coil arrays, and each one-dimensional coil array is formed by an interleaved arrangement of ironless rectangular coils 3 and ironless slot coils 2 whose two short sides of the rectangle are upturned into slots. The long sides of an adjacent slot coil 2 are embedded between the two long sides of a rectangular coil 3 or the long sides of two adjacent slot coils are embedded between the two long sides of each rectangular coil, and the two The long sides of the coils are all arranged on the same plane.

The technical feature of the present invention is also that: for the moving coil structure using a coil array as a mover, the coil array is composed of four one-dimensional coil arrays, and the arrangement directions of adjacent coil arrays are 90°; the stator 1 Halbach type permanent magnet array is used.

The technical feature of the present invention is also that: the coil array is a moving iron structure of the stator, the coil array is composed of four one-dimensional coil arrays, and the arrangement directions of adjacent coil arrays are mutually 90°; the moving element 1 adopts Halbach type permanent magnet array.

The technical feature of the present invention is also that: only the long side of an adjacent slot coil 2 is embedded between the two long sides of each rectangular coil 3, the width of the long side of the rectangular coil and the slot coil is the same, and it is a permanent magnet array About half of the polar distance.

A planar motor using slot-shaped coils according to the present invention has the following advantages and outstanding effects: slot-shaped coils are used, that is, through the nested arrangement and corresponding control of slot-shaped coils and rectangular coils, higher While the current density of the air gap body is avoided as much as possible, the mutual cancellation of the thrust of the adjacent long sides is avoided, and the acceleration and load capacity of the planar motor are greatly improved.

Description of drawings

Fig. 1 is a typical structure and arrangement of coils of a planar motor in the prior art.

Fig. 2 is a schematic diagram of the variation relationship of the vertical component of the air gap magnetic induction intensity of the permanent magnet array with respect to the XY coordinates of the present invention.

Fig. 3 is a three-dimensional view of a planar motor using slot coils according to the present invention.

Fig. 4 is a three-dimensional view of a slot coil of a mover of a planar motor using a slot coil according to the present invention.

5 is a three-dimensional schematic diagram of a coil array constituting a mover of a planar motor using slot coils according to the present invention.

In the figure: 1 - stator; 2 - slot coil; 3 - rectangular coil; 4 - mover; 13 - air bearing; 14 - coil array; 15 - mover of planar motor.

Detailed ways

The specific structure, mechanism and working process of the present invention will be further described below in conjunction with the accompanying drawings.

Fig. 3 is a three-dimensional view of a planar motor using a slot coil according to the present invention, including a mover 4 and a stator 1, and the planar motor includes a mover structure using a coil array as a mover or a mover with a coil array as a stator Iron structure, the coil array is composed of a plurality of one-dimensional coil arrays, and each one-dimensional coil array is composed of a rectangular coil 3 without an iron core and a slot-shaped coil without an iron core with two short sides of the rectangle upturned into a slot shape 2 are arranged in a staggered manner, one long side of an adjacent slot coil 2 is embedded between the two long sides of each rectangular coil 3 (as shown in Figure 5), and the two long sides of each rectangular coil can also be One long side of two adjacent slot-shaped coils on the left and right is embedded between them, and the long sides of the two coils are arranged on the same plane; Figure 4 is a three-dimensional view of the slot-shaped coil.

For the moving coil structure using a coil array as the mover, the coil array is composed of four one-dimensional coil arrays, and the arrangement directions of adjacent coil arrays are 90° to each other; the stator 1 adopts a Halbach type permanent magnet array. The coil array is a moving iron structure of the stator, and the coil array is composed of four one-dimensional coil arrays, and the arrangement directions of adjacent coil arrays are 90° to each other; the mover 1 adopts a Halbach type permanent magnet array. The width of the long side of the rectangular coil and the slot coil is the same, and is about half of the pole pitch of the permanent magnet array, that is, about τ/4, where τ is the period of the magnetic induction intensity of the permanent magnet array.

The preferred technical solution of the present invention is: between the two long sides of each rectangular coil 3, only the long side of an adjacent slot coil 2 is embedded, the width of the rectangular coil and the long side of the slot coil are the same, and they are permanent magnets. About half of the array pole pitch.

The permanent magnet array generates an air-gap magnetic field in the air gap between the mover and stator or on the contact surface. FIG. 2 is a schematic diagram of the relationship between the vertical component Bz of the air-gap magnetic induction intensity of the permanent magnet array with respect to XY coordinates obtained through finite element simulation analysis. τ is the period, that is, the distance between two adjacent peaks of the air-gap magnetic induction intensity of the planar permanent magnet array in Fig. 2 . Through the nested arrangement and corresponding control of the long sides of the slot-shaped coil and the long side of the rectangular coil, while achieving a high current density of the air-gap body, it is possible to avoid the mutual cancellation of the thrust of the adjacent long sides, which greatly improves the performance of the planar motor. Acceleration and load capacity.

Claims (3)

1. planar motor that adopts groove-type coil; Comprise mover (4) and stator (1); This planar motor comprises and adopts coil array as the moving-coil structure of mover or the coil array moving-iron type structure as stator; It is characterized in that: described coil array is made up of a plurality of one dimension coil arrays; The groove-type coil (2) that each one dimension coil array upwarps into the no iron core of grooved by the square coil (3) of no iron core and rectangle two minor faces is staggered and forms, and embeds a long limit of two adjacent groove-type coils about embedding between two long limits of a long limit or each square coil of an adjacent groove-type coil (2) between two long limits of each square coil (3), and square coil is identical with the width that groove-type coil is grown the limit; And be about half of permanent magnet array pole span, the long limit of two kinds of coils is all arranged at grade.

2. according to the described a kind of planar motor that adopts groove-type coil of claim 1; It is characterized in that: for the moving-coil structure that adopts coil array as mover; Said coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Said stator (1) adopts Halbach type permanent magnet array.

3. according to the described a kind of planar motor that adopts groove-type coil of claim 1, it is characterized in that: coil array is as the moving-iron type structure of stator, and said coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Said mover (1) adopts Halbach type permanent magnet array.

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