CN101610022A - A kind of planar motor that adopts groove-type coil - Google Patents
A kind of planar motor that adopts groove-type coil Download PDFInfo
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- CN101610022A CN101610022A CNA2009100888943A CN200910088894A CN101610022A CN 101610022 A CN101610022 A CN 101610022A CN A2009100888943 A CNA2009100888943 A CN A2009100888943A CN 200910088894 A CN200910088894 A CN 200910088894A CN 101610022 A CN101610022 A CN 101610022A
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- planar motor
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000003491 array Methods 0.000 claims abstract description 11
- 238000004804 winding Methods 0.000 claims abstract description 7
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 230000001133 acceleration Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000000737 periodic effect Effects 0.000 abstract description 2
- 238000007667 floating Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
A kind of planar motor that adopts groove-type coil is mainly used in mechanical production devices and robot field.This planar motor comprises mover and stator, described mover is made up of four one dimension coil arrays, the orientation of adjacent windings array is mutually 90 °, the no iron core groove-type coil that each one dimension coil array upwarps into grooved by no iron core square coil and rectangle two minor faces is staggered and forms, embed the long limit of an adjacent groove-type coil between two long limits of each square coil, or a long limit of two adjacent groove-type coils about embedding between two long limits of each square coil, and the long limit of two kinds of coils is all arranged at grade; Described stator is made up of permanent magnet array.Compare with the coil array that the rectangle iron-less core coil is formed, this coil array can produce bigger thrust in the periodic magnetic field of permanent magnet array, thereby improves the thrust and the acceleration of planar motor.
Description
Technical field
The present invention relates to a kind of planar motor, particularly a kind of planar motor that adopts groove-type coil is mainly used in manufacturing equipment and robot field.
Background technology
In many industrial equipments, we need drive workpiece or workbench is done plane motion and in the plane it accurately located for example microscopical objective table, equipment such as the silicon chip platform in the mask aligner.Traditional two-dimensional positioning system overlaps or overlaps the linear drives unit more by two and vertically is formed by stacking, every cover linear drives unit is made up of a turning motor, a cover linear motion conversion mechanism and a cover line slideway, perhaps is made up of linear electric motors and a cover line slideway.The driving that end holds the part platform is not only born in the linear drives unit that is positioned at bottom, but also the quality of carrying top layer linear drives unit, so caused two-dimensional positioning system (as the directions X and the Y direction of traditional X-ray Y workbench) movement inertia seriously unbalanced on a plurality of directions, thereby influenced the raising of performance index such as movement travel, response speed, kinematic accuracy.Under this background, adopt electromagnetic force directly to drive single mover and realize that directly the planar motor of multifreedom motion then arises at the historic moment, it has avoided the thinking that traditional multiple degrees of freedom workbench lamination drives, and has broad application prospects in the two-dimensional positioning system of precision, is subjected to paying close attention to widely
According to the way of restraint of the non-freedom of motion of planar motor and the technical field that relates to, planar motor can be divided into air-floatation planar motor and magnetic-floating plane motor, they adopt the floating mode of air supporting and magnetic to realize the constraint of (as beat, vertical hectare and horizontal hectare) of non-freedom of motion respectively.Than the air supporting mode, that the floating mode of magnetic has is simple in structure, base-plates surface need not Precision Machining, can realize the active constraint of non-freedom of motion, advantage such as easily use in vacuum environment.
The Lorentz force that present magnetic-floating plane motor is generally produced in the permanent magnet array air-gap field by hot-wire coil provides actuating force and the supporting that suspends.Along with the requirement to planar motor acceleration and load performance index improves constantly, we need improve constantly the thrust of planar motor.The structure of coil and arrangement have decisive influence to the performance of planar motor.
The coil of the planar motor in the document generally adopts the rectangle iron-less core coil at present.A kind of typical structure is the mover 15 of planar motor among the figure as shown in Figure 1, comprises air-bearing 13 and coil array 14.Be made up of four coil arrays, each coil array is formed by five rectangle iron-less core coil linear array, and in order to improve the electrofluid density of air gap, the space between two long limits of each rectangle iron-less core coil is very little, and does not have CURRENT DISTRIBUTION.Because the sense of current in two long limits of each rectangle iron-less core coil must be opposite fully, the X of the magnetic flux density of while permanent magnet array in air gap, Y, component on three directions of Z all is the periodic distribution of similar sine in the plane, the flat distribution map of Bz component as shown in Figure 2 is so when two long limits of same coil were in the identical zone of magnetic flux density direction, the thrust direction that these two long limits produce was opposite fully, can cancel out each other, reduce efficiency of motor.If when increasing the distance on two long limits and making it be in two opposite zones of magnetic flux density direction, the direction of the thrust that every long limit produces is identical, but the average current volume density in the whole air gap will diminish, and also can influence the thrust of motor.
Summary of the invention
The purpose of this invention is to provide a kind of planar motor that adopts groove-type coil,, promptly improve the utilance of air gap, avoid cancelling out each other of adjacent long edges thrust again as far as possible to solve the defective that prior art exists.
Technical scheme of the present invention is as follows:
A kind of planar motor that adopts groove-type coil, comprise mover 4 and stator 1, described planar motor comprises and adopts coil array as the moving-coil structure of mover or the coil array moving-iron type structure as stator, it is characterized in that: described coil array is made up of a plurality of one dimension coil arrays, the no iron core groove-type coil 2 that each one dimension coil array upwarps into grooved by no iron core square coil 3 and rectangle two minor faces is staggered and forms, the long limit of two adjacent groove-type coils about embedding between two long limits of the long limit of an adjacent groove-type coil 2 of embedding or each square coil between two long limits of each square coil 3, and the long limit of two kinds of coils is all arranged at grade.
Technical characterictic of the present invention also is: for the moving-coil structure that adopts coil array as mover, described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described stator 1 adopts Halbach type permanent magnet array.
Technical characterictic of the present invention also is: coil array is as the moving-iron type structure of stator, and described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described mover 1 adopts Halbach type permanent magnet array.
Technical characterictic of the present invention also is: only embed the long limit of an adjacent groove-type coil 2 between two long limits of each square coil 3, square coil is identical with the width on the long limit of groove-type coil, and is about half of permanent magnet array pole span.
A kind of planar motor of groove-type coil that adopts of the present invention has the following advantages and the high-lighting effect: adopted groove-type coil, i.e. nested arrangement and control corresponding by groove-type coil and square coil, when realizing higher air gap body current density, avoid cancelling out each other of adjacent long edges thrust as far as possible, improved the acceleration and the carrying load ability of planar motor greatly.
Description of drawings
Fig. 1 is a kind of typical structure and the arrangement of the coil of prior art midplane motor.
Fig. 2 is the variation relation schematic diagram of permanent magnet array gap density vertical component of the present invention about the XY coordinate.
Fig. 3 is a kind of 3-D view that adopts the planar motor of groove-type coil of the present invention.
Fig. 4 is the 3-D view of groove-type coil of the mover of a kind of planar motor that adopts groove-type coil of the present invention.
Fig. 5 is the schematic three dimensional views of a coil array of the composition mover of a kind of planar motor that adopts groove-type coil of the present invention.
Among the figure: the 1-stator; The 2-groove-type coil; The 3-square coil; The 4-mover; The 13-air-bearing; The 14-coil array; The mover of 15-planar motor.
Embodiment
Below in conjunction with accompanying drawing concrete structure of the present invention, mechanism and the course of work are further described.
Fig. 3 is a kind of 3-D view that adopts the planar motor of groove-type coil of the present invention, comprise mover 4 and stator 1, this planar motor comprises and adopts coil array as the moving-coil structure of mover or the coil array moving-iron type structure as stator, described coil array is made up of a plurality of one dimension coil arrays, the groove-type coil 2 that each one dimension coil array upwarps into the no iron core of grooved by the square coil 3 of no iron core and rectangle two minor faces is staggered and forms, embed a long limit (as shown in Figure 5) of an adjacent groove-type coil 2 between two long limits of each square coil 3, also can be with a long limit of two adjacent groove-type coils about embedding between two long limits of each square coil, and the long limit of two kinds of coils is all arranged at grade; Fig. 4 is the 3-D view of groove-type coil.
For the moving-coil structure that adopts coil array as mover, described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described stator 1 adopts Halbach type permanent magnet array.Coil array is as the moving-iron type structure of stator, and described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described mover 1 adopts Halbach type permanent magnet array.Square coil is identical with the width on the long limit of groove-type coil, and is about half of permanent magnet array pole span, and promptly about τ/4, τ is the cycle of permanent magnet array magnetic flux density.
The preferred technical solution of the present invention is: only embed the long limit of an adjacent groove-type coil 2 between two long limits for each square coil 3, square coil is identical with the width on the long limit of groove-type coil, and is about half of permanent magnet array pole span.
In the air gap of permanent magnet array between mover and stator or produce air-gap field on the contact-making surface.Fig. 2 is the variation relation schematic diagram of the gap density vertical component Bz of the permanent magnet array that obtains by the finite element simulation analysis about the XY coordinate.τ is the cycle, i.e. distance between the gap density two adjacent peak values of Fig. 2 midplane permanent magnet array.By the nested arrangement and the control corresponding on long limit of groove-type coil and the long limit of square coil, when realizing higher air gap body current density, avoided cancelling out each other of adjacent long edges thrust as far as possible, improved the acceleration and the carrying load ability of planar motor greatly.
Claims (4)
1. planar motor that adopts groove-type coil, comprise mover (4) and stator (1), this planar motor comprises and adopts coil array as the moving-coil structure of mover or the coil array moving-iron type structure as stator, it is characterized in that: described coil array is made up of a plurality of one dimension coil arrays, the groove-type coil (2) that each one dimension coil array upwarps into the no iron core of grooved by the square coil (3) of no iron core and rectangle two minor faces is staggered and forms, a long limit of two adjacent groove-type coils about embedding between two long limits of a long limit of an adjacent groove-type coil of embedding (2) or each square coil between two long limits of each square coil (3), and the long limit of two kinds of coils is all arranged at grade.
2. according to the described a kind of planar motor that adopts groove-type coil of claim 1, it is characterized in that: for the moving-coil structure that adopts coil array as mover, described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described stator (1) adopts Halbach type permanent magnet array.
3. according to the described a kind of planar motor that adopts groove-type coil of claim 1, it is characterized in that: coil array is as the moving-iron type structure of stator, and described coil array is made up of four one dimension coil arrays, and the orientation of adjacent windings array is mutually 90 °; Described mover (1) adopts Halbach type permanent magnet array.
4. according to claim 1,2 or 3 described a kind of planar motors that adopt groove-type coil, it is characterized in that: the long limit that only embeds an adjacent groove-type coil (2) between two long limits of each square coil (3), square coil is identical with the width on the long limit of groove-type coil, and is about half of permanent magnet array pole span.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100888943A CN101610022B (en) | 2009-07-21 | 2009-07-21 | Planar motor adopting groove-type coil |
| PCT/CN2010/075310 WO2011009398A1 (en) | 2009-07-21 | 2010-07-20 | Planar motor adopting groove-type coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100888943A CN101610022B (en) | 2009-07-21 | 2009-07-21 | Planar motor adopting groove-type coil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101610022A true CN101610022A (en) | 2009-12-23 |
| CN101610022B CN101610022B (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100888943A Active CN101610022B (en) | 2009-07-21 | 2009-07-21 | Planar motor adopting groove-type coil |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101610022B (en) |
| WO (1) | WO2011009398A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011009398A1 (en) * | 2009-07-21 | 2011-01-27 | 清华大学 | Planar motor adopting groove-type coil |
| CN102270908A (en) * | 2011-07-22 | 2011-12-07 | 华中科技大学 | Planar motor in double-shaft decoupling structure |
| WO2013078860A1 (en) * | 2011-11-30 | 2013-06-06 | 哈尔滨工业大学 | Concentric-winding permanent magnet synchronous planar motor |
| US9766054B2 (en) | 2012-02-17 | 2017-09-19 | Shanghai Micro Electronics Equipment Co., Ltd. | Planar motor rotor displacement measuring device and its measuring method |
| CN111490662A (en) * | 2019-01-29 | 2020-08-04 | 广东极迅精密仪器有限公司 | Planar motor displacement device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103633884B (en) * | 2013-12-02 | 2015-12-02 | 江苏大学 | A kind of magnetic suspension permanent magnet planar motor based on pressure sensor group plays float method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4839543A (en) * | 1988-02-04 | 1989-06-13 | Trilogy Systems Corporation | Linear motor |
| JP3907357B2 (en) * | 1998-11-12 | 2007-04-18 | キヤノン株式会社 | Stepped coil manufacturing method |
| US6570273B2 (en) * | 2001-01-08 | 2003-05-27 | Nikon Corporation | Electric linear motor |
| US7105955B2 (en) * | 2004-04-16 | 2006-09-12 | Asml Netherlands B.V. | Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method |
| CN100592610C (en) * | 2005-10-27 | 2010-02-24 | 西安交通大学 | Dynamic magnetic synchronous surface motor |
| CN100553082C (en) * | 2006-12-29 | 2009-10-21 | 清华大学 | A kind of ultra-thin 3DOF planar motor |
| CN101214617B (en) * | 2007-12-28 | 2012-09-05 | 清华大学 | Moving-coil type large range mobile magnetic floating six-freedom worktable |
| CN101610022B (en) * | 2009-07-21 | 2012-05-30 | 清华大学 | Planar motor adopting groove-type coil |
-
2009
- 2009-07-21 CN CN2009100888943A patent/CN101610022B/en active Active
-
2010
- 2010-07-20 WO PCT/CN2010/075310 patent/WO2011009398A1/en active Application Filing
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011009398A1 (en) * | 2009-07-21 | 2011-01-27 | 清华大学 | Planar motor adopting groove-type coil |
| CN102270908A (en) * | 2011-07-22 | 2011-12-07 | 华中科技大学 | Planar motor in double-shaft decoupling structure |
| CN102270908B (en) * | 2011-07-22 | 2013-04-17 | 华中科技大学 | Planar motor in double-shaft decoupling structure |
| WO2013078860A1 (en) * | 2011-11-30 | 2013-06-06 | 哈尔滨工业大学 | Concentric-winding permanent magnet synchronous planar motor |
| US9766054B2 (en) | 2012-02-17 | 2017-09-19 | Shanghai Micro Electronics Equipment Co., Ltd. | Planar motor rotor displacement measuring device and its measuring method |
| CN111490662A (en) * | 2019-01-29 | 2020-08-04 | 广东极迅精密仪器有限公司 | Planar motor displacement device |
| WO2020155830A1 (en) * | 2019-01-29 | 2020-08-06 | 广东极迅精密仪器有限公司 | Planar motor displacement device |
| CN111490662B (en) * | 2019-01-29 | 2022-04-26 | 苏州隐冠半导体技术有限公司 | Planar motor displacement device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011009398A1 (en) | 2011-01-27 |
| CN101610022B (en) | 2012-05-30 |
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Effective date of registration: 20151112 Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University |