CN103795296B - A kind of levitation planar motor - Google Patents
A kind of levitation planar motor Download PDFInfo
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- CN103795296B CN103795296B CN201210434927.7A CN201210434927A CN103795296B CN 103795296 B CN103795296 B CN 103795296B CN 201210434927 A CN201210434927 A CN 201210434927A CN 103795296 B CN103795296 B CN 103795296B
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Abstract
The invention provides a kind of levitation planar motor, comprise coil windings unit and magnetic steel array, described magnetic steel array is formed along first direction and second direction expansion by identical magnetic steel array unit, comprise with four class magnet steel groups of 2*2 matrix array form arrangement in described magnetic steel array unit, every class magnet steel group is that foursquare magnetic steel ingot rearranges around the third direction perpendicular to first direction and second direction by the cross section that four pieces that arrange with 2*2 matrix array form have same size specification, the cross section of every class magnet steel group is in square, 16 magnetic steel ingots in same magnet steel group unit provide 12 kinds of magnetizing directions.The present invention has the magnetic steel ingot of different oblique magnetizing direction by adopting, each magnetic steel ingot is combinationally used regularly simultaneously and provide 12 kinds of magnetizing directions, the servo motion degree of freedom of motor is risen to 6, defines the alternating magnetic field that has good Sine distribution, substantially increase thrust constant.
Description
Technical field
The present invention relates to a kind of electric machine, particularly relate to a kind of levitation planar motor.
Background technology
In the work stage and mask platform of mask aligner, usually adopt the voice coil motor of linear electric motors in conjunction with short stroke of Long travel, and select air-bearing to realize high speed, high-accuracy location.But, in this organization plan, in order to obtain multiple freedom of motion, often need multiple linear electric motors to adopt stacking mode to be realized.This organization plan not only increases the complexity of whole system, reduces mode, and increases the load of bottom linear electric motors, causes the positioning precision of sports platform, controls bandwidth sum movement velocity and decline to a great extent.In addition, when movement travel needs to increase, the manufacturing cost not only geometry rising of air supporting line slideway, and also more and more difficult, become the development bottleneck that large scale wafer manufactures.
In order to solve the problem, there is a kind of motor---levitation planar motor of new structure.The electromagnetic force of generation is applied directly in work stage based on Lorentz force principle by it, can provide multiaxial motion simultaneously.Levitation planar motor generally comprises magnetic steel array and coil windings unit two large divisions, and the magnetic steel array unit in described magnetic steel array is arranged alternately mode, is convenient to very much expand, and efficiently solves the technical bottleneck in Long Distances design.And, by electromagnetic suspension technology, reduce the constraint to moving surface type, the contactless wearing and tearing of the course of work, be applicable to very much the demand of needs Long Distances, vacuum, ultra-clean, Ultra-precision positioning in microelectronics equipment.
In levitation planar motor, thrust constant is a very important design objective.There is provided higher thrust constant effectively can reduce the operating current that magnetic floats motor, thus greatly alleviate the impact that the motor feels hot on Ultra-precision positioning.In order to improve thrust constant, the magnetic steel array unit that levitation planar motor of the prior art adopts is made up of the NS array be alternately arranged, and the degree of freedom of its servo motion is lower, and the precision of control is also lower.
Summary of the invention
The technical problem to be solved in the present invention is, provides a kind of levitation planar motor that can improve thrust constant, and then improves the degree of freedom and the control precision of its servo motion.
For solving above technical problem, the invention provides a kind of levitation planar motor, comprise coil windings unit and magnetic steel array, after the energising of described coil windings unit relative to magnetic steel array along being parallel to described magnetic steel array place plane and orthogonal first direction and second direction are moved, described magnetic steel array is formed along first direction and second direction expansion by identical magnetic steel array unit, comprise with four class magnet steel groups of 2*2 matrix array form arrangement in described magnetic steel array unit, every class magnet steel group is that foursquare magnetic steel ingot rearranges around the third direction perpendicular to first direction and second direction by the cross section that four pieces that arrange with 2*2 matrix array form have same size specification, the cross section of every class magnet steel group is in square, 16 magnetic steel ingots in same magnetic steel array unit provide 12 kinds of magnetizing directions.
Each magnetic steel array unit is made up of around the third direction arranged clockwise perpendicular to described first direction, second direction first kind magnet steel group, the 4th class magnet steel group, Equations of The Second Kind magnet steel group and the 3rd class magnet steel group, and the cross section of described magnetic steel array unit is in square.
Described first kind magnet steel group is by first magnetic steel ingot with the first magnetizing direction, there is the second magnetic steel ingot of the second magnetizing direction, 3rd magnetic steel ingot with the 3rd magnetizing direction and the 4th magnetic steel ingot with the 4th magnetizing direction form around third direction arranged counterclockwise, described first magnetizing direction be parallel to two end faces of place magnetic steel ingot and magnet steel group cornerwise interface and and the angle of third direction be greater than 0 degree and be less than 90 degree, described second magnetizing direction, 3rd magnetizing direction and the 4th magnetizing direction to be rotated around third direction by described first magnetizing direction and obtain, described first to fourth magnetizing direction is uniformly distributed around third direction.
Described Equations of The Second Kind magnet steel group is by having the 5th magnetic steel ingot of the 5th magnetizing direction, the 6th magnetic steel ingot with the 6th magnetizing direction, the 7th magnetic steel ingot with the 7th magnetizing direction and the 8th magnetic steel ingot with the 8th magnetizing direction forms around third direction arranged counterclockwise, described 5th to the 8th magnetizing direction is contrary with described first to fourth magnetizing direction respectively, and the position of described 5th magnetic steel ingot in Equations of The Second Kind magnet steel group is corresponding with the position of described first kind magnetic steel ingot in first kind magnet steel group.
Described 3rd class magnet steel group by have the 9th magnetic steel ingot of the 9th magnetizing direction, the tenth magnetic steel ingot with the tenth magnetizing direction, the 11 magnetic steel ingot with the 11 magnetizing direction and the 12 magnetic steel ingot with the 12 magnetizing direction around third direction clockwise and arranged counterclockwise form, described 9th magnetizing direction along the diagonal of the end face of place magnetic steel ingot, the described 12, the 11 and the tenth magnetic steel ingot respectively by the 9th magnetic steel ingot around third direction be rotated counterclockwise 90 degree, 180 degree and 270 degree obtain.
Described 4th class magnet steel group is by having the 13 magnetic steel ingot of the 11 magnetizing direction, the 14 magnetic steel ingot with the 12 magnetic direction, the 15 magnetic steel ingot with the 9th magnetizing direction and the 16 magnetic steel ingot with the tenth magnetizing direction forms around third direction arranged counterclockwise, and the position of described 13 magnetic steel ingot in the 4th class magnet steel group is corresponding with the position of described 9th magnetic steel ingot in the 3rd class magnet steel group.
Described coil windings unit comprises with four bodies of having an effect of 2*2 matrix array form arrangement, and each body of having an effect is made up of the coil of several parallel arrangements in the same direction, and wherein the coil of adjacent two bodies of having an effect is corresponding to first direction, second direction arrangement respectively.
Optionally, described magnetic steel array is the stationary part of levitation planar motor, and described coil windings unit is the subpart of levitation planar motor.
Optionally, some described coil windings unit expand along first direction and second direction the stationary part being formed as levitation planar motor respectively, and described magnetic steel array is the subpart of levitation planar motor.
The present invention has the magnetic steel ingot of oblique magnetizing direction by adopting, the magnetic steel ingot fixed Combination of different magnetizing direction is become different magnet steel groups, and then each magnet steel group fixed Combination is become magnet steel group unit, each magnet steel group unit provides 12 kinds of oblique magnetizing directions, the servo motion degree of freedom of motor is risen to 6, define the alternating magnetic field that has good Sine distribution, substantially increase thrust constant, thus effectively reduce the operating current of levitation planar motor, alleviate the impact of generating heat and Ultra-precision positioning being brought.
Accompanying drawing explanation
Fig. 1 is the structural representation of the levitation planar motor of the embodiment of the present invention 1;
Fig. 2 is the structural representation of the magnet steel group unit of the levitation planar motor of the embodiment of the present invention 1;
Fig. 3 is the structural representation of the first kind magnet steel group of the levitation planar motor of the embodiment of the present invention 1;
Fig. 4 is the structural representation of the Equations of The Second Kind magnet steel group of the levitation planar motor of the embodiment of the present invention 1;
Fig. 5 is the structural representation of the 3rd class magnet steel group of the levitation planar motor of the embodiment of the present invention 1;
Fig. 6 is the structural representation of the 4th class magnet steel group of the levitation planar motor of the embodiment of the present invention 1;
Fig. 7 is another structural representation of the levitation planar motor of the embodiment of the present invention 1;
Fig. 8 is the structural representation of the levitation planar motor of embodiments of the invention 2;
In figure, 100-coil windings unit; 101-the first has an effect body; 102-the second has an effect body;
200-magnetic steel array; 201-magnetic steel array unit;
310-first kind magnet steel group; 320-Equations of The Second Kind magnet steel group; 330-the three class magnet steel group; 340-the four class magnet steel group;
311-the first magnetic steel ingot; 312-the second magnetic steel ingot; 313-the three magnetic steel ingot, the 314-the four magnetic steel ingot; 321-the five magnetic steel ingot; 322-the six magnetic steel ingot; 323-the seven magnetic steel ingot; 324-the eight magnetic steel ingot; 331-the nine magnetic steel ingot; 332-the ten magnetic steel ingot; 333-the ten one magnetic steel ingot; 334-the ten two magnetic steel ingot; 341-the ten three magnetic steel ingot; 342-the ten four magnetic steel ingot; 343-the ten five magnetic steel ingot; 344-the ten six magnetic steel ingot;
The cornerwise interface of 400-end face;
Embodiment
Below please refer to each accompanying drawing, will be described in detail levitation planar motor provided by the invention, following is described as the preferred embodiments of the present invention.
Embodiment 1
Present embodiments provide a kind of levitation planar motor, comprise coil windings unit 100 and magnetic steel array 200, described coil windings unit 100 comprises with four bodies of having an effect of 2*2 matrix array form arrangement, each body of having an effect is made up of the coil of several parallel arrangements in the same direction, and wherein the coil of adjacent two bodies of having an effect is corresponding to first direction, second direction arrangement respectively.
Please refer to Fig. 1, in the present embodiment, described coil windings unit 100 is made up of four bodies of having an effect, each body of having an effect is made up of three coils, described body of having an effect comprises coil distribution arrangement mutually perpendicular first body 101 and second of having an effect and to have an effect body 102, , after described coil windings unit 100 is energized relative to magnetic steel array along being parallel to described magnetic steel array place plane and orthogonal first direction and second direction are moved, described magnetic steel array 200 is formed along first direction and second direction expansion by identical magnetic steel array unit 201, comprise with four class magnet steel groups of 2*2 matrix array form arrangement in described magnetic steel array unit 201, every class magnet steel group is that foursquare magnetic steel ingot rearranges around the third direction perpendicular to first direction and second direction by the cross section that four pieces that arrange with 2*2 matrix array form have same size specification, the cross section of every class magnet steel group is in square, 16 magnetic steel ingots in same magnetic steel array unit provide 12 kinds of oblique magnetizing directions.
As shown in Figure 1, body of having an effect comprises coil distribution arrangement mutually perpendicular first body 101 and second of having an effect and to have an effect body 102, described first body 101 and second body 102 of having an effect of having an effect arranges formation rectangle, and the described first body 101 and second body 102 of having an effect of having an effect is spaced apart.
Four magnetic steel ingots in same class magnet steel group arrange in the mode of 2*2, and the foursquare cross section of four magnetic steel ingots is combined to form the square sectional of magnet steel group.
Please refer to each accompanying drawing, first direction and second direction orthogonal, two mutually perpendicular limits respectively along the square sectional of magnetic steel ingot are arranged, third direction is perpendicular to the plane at first direction and the common place of second direction, the plane parallel that the cross section of magnet steel group and magnetic steel ingot forms with first direction and second direction, is namely parallel to the end face of magnetic steel ingot.
The present embodiment has the magnet steel group of oblique magnetizing direction by adopting, wherein each magnet steel group combinationally uses the magnetic steel ingot providing 12 kinds of magnetizing directions regularly, the servo motion degree of freedom of motor is risen to 6, define the alternating magnetic field that has good Sine distribution, substantially increase thrust constant, thus effectively reduce the operating current of levitation planar motor, alleviate the impact of generating heat and Ultra-precision positioning being brought.
Described magnet steel group unit is made up of around the third direction arranged clockwise perpendicular to described first direction, second direction first kind magnet steel group the 310, the 4th class magnet steel group 340, Equations of The Second Kind magnet steel group 320 and the 3rd class magnet steel group 330, and the cross section of described magnet steel group unit 201 is in square.
Even, the symmetrical distribution of magnetic steel ingot and magnet steel group, the levitation planar motor that can effectively provide for the present embodiment provides an alternating magnetic field with good Sine distribution, and the magnetizing direction in magnetic field is more comprehensive.
Described first kind magnet steel group 310 is by first magnetic steel ingot 311 with the first magnetizing direction, there is the second magnetic steel ingot 312 of the second magnetizing direction, 3rd magnetic steel ingot 313 with the 3rd magnetizing direction and the 4th magnetic steel ingot 314 with the 4th magnetizing direction form around third direction arranged counterclockwise, described first magnetizing direction be parallel to two end faces of place magnetic steel ingot and magnet steel group cornerwise interface 400 and and the angle of third direction be greater than 0 degree and be less than 90 degree, described second magnetizing direction, 3rd magnetizing direction and the 4th magnetizing direction to be rotated around third direction by described first magnetizing direction and obtain, described first to fourth magnetizing direction is uniformly distributed around third direction.
Described Equations of The Second Kind magnet steel group 320 is by having the 5th magnetic steel ingot 321 of the 5th magnetizing direction, the 6th magnetic steel ingot 322 with the 6th magnetizing direction, the 7th magnetic steel ingot 323 with the 7th magnetizing direction and the 8th magnetic steel ingot 324 with the 8th magnetizing direction forms around third direction arranged counterclockwise, described 5th to the 8th magnetizing direction is contrary with described first to fourth magnetizing direction respectively, and the position of described 5th magnetic steel ingot 321 in Equations of The Second Kind magnet steel group 320 is corresponding with the described position of the first magnetic steel ingot 311 in first kind magnet steel group 310.
Please refer to Fig. 4, the 5th magnetic steel ingot 321 in Equations of The Second Kind magnet steel group provides the 5th magnetizing direction, and the first magnetizing direction that itself and the first magnetic steel ingot 311 provide is reverse; The 6th magnetic steel ingot 322 in Equations of The Second Kind magnet steel group provides the 6th magnetizing direction, the second magnetizing direction that itself and the second magnetic steel ingot 312 provide is reverse, 7th magnetic steel ingot 323 provides the 7th magnetizing direction, the 3rd magnetizing direction that itself and the 3rd magnetic steel ingot 313 provide is reverse, 8th magnetic steel ingot 324 provides the 8th magnetizing direction, and the 4th magnetizing direction that itself and the 4th magnetic steel ingot 314 provide is reverse
Described 3rd class magnet steel group 330 is by having the 9th magnetic steel ingot 331 and 343 of the 9th magnetizing direction, the tenth magnetic steel ingot 332 with the tenth magnetizing direction, the 11 magnetic steel ingot 333 with the 11 magnetizing direction and the 12 magnetic steel ingot 334 with the 12 magnetizing direction forms around third direction arranged counterclockwise, described 9th magnetizing direction along the diagonal of the end face of place magnetic steel ingot, the described 12, the 11 and the tenth magnetic steel ingot respectively by the 9th magnetic steel ingot around third direction be rotated counterclockwise 90 degree, 180 degree and 270 degree obtain.
Described 4th class magnet steel group 340 by there is the 13 magnetic steel ingot 341 of the 11 magnetizing direction, the 14 magnetic steel ingot 342 with the 12 magnetic direction, the 15 magnetic steel ingot 343 with the 9th magnetizing direction and the 16 magnetic steel ingot 344 with the tenth magnetizing direction forms around third direction arranged counterclockwise, the position of described 13 magnetic steel ingot 341 in the 4th class magnet steel group 340 and described 9th magnetic steel ingot 331 in the 3rd class magnet steel group 330 position corresponding.
In the present embodiment, as shown in Figure 5 and Figure 6, the 9th magnetic steel ingot 311 in 3rd class magnet steel group, the tenth magnetic steel ingot the 312, the 11 magnetic steel ingot the 313, the 12 magnetic steel ingot 314 are around third direction arranged clockwise, and the 11 magnetic steel ingot the 341, the 12 magnetic steel ingot 342, the 9th magnetic steel ingot 343 and the tenth magnetic steel ingot 344 in the 4th class magnet steel group are around third direction arranged counterclockwise.
In the present embodiment, as shown in Figure 7, described magnetic steel array 200 is the stationary part of levitation planar motor, and described coil windings unit 100 is the subpart of levitation planar motor.In the course of the work, magnetic steel array unit 200 transfixion, coil windings unit 100 entirety rotates due to Ampere force effect.
Embodiment 2
The difference of the present embodiment and embodiment 1 is only: as shown in Figure 8, some described coil windings unit 100 to be had an effect the coil distribution arrangement of body 102 along the first body 101 and second of having an effect respectively, namely first direction and second direction expand the stationary part being formed as levitation planar motor, and described magnetic steel array unit 200 is the subpart of levitation planar motor.In the present embodiment, the first have an effect coil distribution arrangement of body 102 of body 101 and second of having an effect is respectively first direction and second direction.In the course of the work, coil windings unit 100 transfixion, magnetic steel array unit 200 entirety rotates due to the effect of Ampere force.
In sum, the present invention has the magnet steel group of oblique magnetizing direction by adopting, each magnet steel group combinationally uses the magnetic steel ingot providing 12 kinds of magnetizing directions regularly simultaneously, the servo motion degree of freedom of motor is risen to 6, define the alternating magnetic field that has good Sine distribution, substantially increase thrust Changshu, thus effectively reduce the operating current of levitation planar motor, alleviate the impact of generating heat and Ultra-precision positioning being brought.
Claims (7)
1. a levitation planar motor, comprise coil windings unit and magnetic steel array, after the energising of described coil windings unit relative to magnetic steel array along being parallel to described magnetic steel array place plane and orthogonal first direction and second direction are moved, it is characterized in that: described magnetic steel array is formed along first direction and second direction expansion by identical magnetic steel array unit, comprise with four class magnet steel groups of 2*2 matrix array form arrangement in described magnetic steel array unit, every class magnet steel group is that foursquare magnetic steel ingot forms by the cross section that four pieces that arrange with 2*2 matrix array form have same size specification, the cross section of every class magnet steel group is in square, 16 magnetic steel ingots in same magnetic steel array unit provide 12 kinds of oblique magnetizing directions,
Each magnetic steel array unit is made up of around the third direction arranged clockwise perpendicular to described first direction, second direction first kind magnet steel group, the 4th class magnet steel group, Equations of The Second Kind magnet steel group and the 3rd class magnet steel group, and the cross section of described magnetic steel array unit is in square;
Described first kind magnet steel group is by first magnetic steel ingot with the first magnetizing direction, there is the second magnetic steel ingot of the second magnetizing direction, 3rd magnetic steel ingot with the 3rd magnetizing direction and the 4th magnetic steel ingot with the 4th magnetizing direction form around third direction arranged counterclockwise, described first magnetizing direction be parallel to place magnetic steel ingot and magnet steel group two end faces cornerwise interface and and the angle of third direction be greater than 0 degree and be less than 90 degree, described second magnetizing direction, 3rd magnetizing direction and the 4th magnetizing direction to be rotated around third direction by described first magnetizing direction and obtain, described first to fourth magnetizing direction is uniformly distributed around third direction.
2. levitation planar motor as claimed in claim 1, it is characterized in that: described Equations of The Second Kind magnet steel group is by having the 5th magnetic steel ingot of the 5th magnetizing direction, the 6th magnetic steel ingot with the 6th magnetizing direction, the 7th magnetic steel ingot with the 7th magnetizing direction and the 8th magnetic steel ingot with the 8th magnetizing direction forms around third direction arranged counterclockwise, described 5th to the 8th magnetizing direction is contrary with described first to fourth magnetizing direction respectively, and the position of described 5th magnetic steel ingot in Equations of The Second Kind magnet steel group is corresponding with the position of described first magnetic steel ingot in first kind magnet steel group.
3. the levitation planar motor as described in claim 1 to 2 any one, it is characterized in that: described 3rd class magnet steel group is by the 9th magnetic steel ingot with the 9th magnetizing direction, there is the tenth magnetic steel ingot of the tenth magnetizing direction, 11 magnetic steel ingot with the 11 magnetizing direction and the 12 magnetic steel ingot with the 12 magnetizing direction form around third direction arranged counterclockwise, described 9th magnetizing direction is along the diagonal of the end face of place magnetic steel ingot, described 12, 11 and the tenth magnetic steel ingot be rotated counterclockwise 90 degree by the 9th magnetic steel ingot around third direction respectively, 180 degree and 270 degree obtain,
4. levitation planar motor as claimed in claim 3, it is characterized in that: described 4th class magnet steel group is by having the 13 magnetic steel ingot of the 11 magnetizing direction, the 14 magnetic steel ingot with the 12 magnetic direction, the 15 magnetic steel ingot with the 9th magnetizing direction and the 16 magnetic steel ingot with the tenth magnetizing direction forms around third direction arranged counterclockwise, and the position of described 13 magnetic steel ingot in the 4th class magnet steel group is corresponding with the position of described 9th magnetic steel ingot in the 3rd class magnet steel group.
5. levitation planar motor as claimed in claim 1, it is characterized in that: described coil windings unit comprises with four bodies of having an effect of 2*2 matrix array form arrangement, each body of having an effect is made up of the coil of several parallel arrangements in the same direction, and wherein the coil of adjacent two bodies of having an effect is corresponding to first direction, second direction arrangement respectively.
6. levitation planar motor as claimed in claim 5, it is characterized in that: described magnetic steel array is the stationary part of levitation planar motor, described coil windings unit is the subpart of levitation planar motor.
7. levitation planar motor as claimed in claim 5, is characterized in that: some described coil windings unit expand along first direction and second direction the stationary part being formed as levitation planar motor respectively, and described magnetic steel array is the subpart of levitation planar motor.
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| CN201210434927.7A CN103795296B (en) | 2012-11-02 | 2012-11-02 | A kind of levitation planar motor |
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| CN201210434927.7A CN103795296B (en) | 2012-11-02 | 2012-11-02 | A kind of levitation planar motor |
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| CN105871257B (en) * | 2016-05-05 | 2017-11-17 | 江苏大学 | A kind of torque current distribution method of moving-coil type magnetic suspension permanent magnet planar motor |
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| CN101214617A (en) * | 2007-12-28 | 2008-07-09 | 清华大学 | Moving-coil type large range mobile magnetic floating six-freedom worktable |
| CN201378784Y (en) * | 2009-04-10 | 2010-01-06 | 东南大学 | Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke |
| CN102097982A (en) * | 2011-02-24 | 2011-06-15 | 华中科技大学 | Permanent-magnet synchronous magnetic suspension planar motor |
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| CN100541337C (en) * | 2005-01-17 | 2009-09-16 | 皇家飞利浦电子股份有限公司 | Mobile device |
| US20110074231A1 (en) * | 2009-09-25 | 2011-03-31 | Soderberg Rod F | Hybrid and electic vehicles magetic field and electro magnetic field interactice systems |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101214617A (en) * | 2007-12-28 | 2008-07-09 | 清华大学 | Moving-coil type large range mobile magnetic floating six-freedom worktable |
| CN201378784Y (en) * | 2009-04-10 | 2010-01-06 | 东南大学 | Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke |
| CN102097982A (en) * | 2011-02-24 | 2011-06-15 | 华中科技大学 | Permanent-magnet synchronous magnetic suspension planar motor |
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