CN201378784Y - Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke - Google Patents
Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke Download PDFInfo
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- CN201378784Y CN201378784Y CN200920041086U CN200920041086U CN201378784Y CN 201378784 Y CN201378784 Y CN 201378784Y CN 200920041086 U CN200920041086 U CN 200920041086U CN 200920041086 U CN200920041086 U CN 200920041086U CN 201378784 Y CN201378784 Y CN 201378784Y
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Abstract
A gas-magnetic mixture suspension plane motor with an easy extension horizontal stroke comprises a stator basal body positioned along the horizontal X-Y plane and a rotor basal body floated on the stator basal body and parallel to the stator basal body; two free-degree Halbach permanent magnet arrays in the direction of an axis X and in the direction of an axis Y are embedded on the upper surface of the stator basal body; each pair of magnetic poles of the two free-degree Halbach permanent magnet arrays are arrayed in a four multiplied by four manner by permanent magnets numbered from one to sixteenth; a first thrust winding, a second thrust winding, a third thrust winding and a fourth thrust winding are arranged at four corners of the lower surface of the rotor basal body respectively, wherein the wave-length directions of the first thrust winding and the third thrust winding are equidirectional with the axis X; the wave-length directions of the second thrust winding and the fourth thrust winding are equidirectional with the axis Y; and a first gas static-pressure bearing aircushion, a second gas static-pressure bearing aircushion, a third gas static-pressure bearing aircushion and a fourth gas static-pressure bearing aircushion.
Description
One, technical field:
The utility model relates to a kind of planar motor that can be used for fields such as semiconductor machining industry, high accuracy plotter, and particularly a kind of horizontal throw is the gas-magnet mixing suspended planar motor of the single action minor structure of expansion easily.
Two, background technology:
Fast development along with advanced manufacturing industry, the hi-Fix platform technology has obtained deep research and development, have broad application prospects in fields such as semiconductor industry, little stereolithography, nanometer workbench, high accuracy plotters, wherein most important applications is the high accuracy photoetching locating platform in the semiconductor industry.The photoetching locating platform needs to carry out precise motion control (so being called as planar motor) in the spatial dimension of an almost plane, comprise: realize big stroke motion (being used to realize the quick stepping and the precision sweep of wafer) in horizontal X axle, Y direction, realize small movements and realize minor rotation (being used to realize leveling and focusing) around X-axis, Y-axis, Z axle at the vertical Z direction of principal axis.
First key technology of high precision plane motor is the structural design of planar motor, the structure of planar motor can be divided into many movers structure and single action minor structure two big classes, wherein: the mover platform of many movers structural plan motor often adopts coarse motion platform and the smart moving stacked double-decker of platform, the coarse motion platform is by linear motor driving, smart moving platform is used for proofreading and correct the position error of coarse motion platform and is rocked error by voice coil motor, piezoelectric ceramic actuator, solenoid actuated; The mover platform of single action minor structure planar motor adopts single layer structure, generally by some groups of permanent magnetic linear synchronous motors and solenoid actuated.The research of early stage planar motor concentrates on many movers structure, and HIT, Dutch ASML company, American I Si Corporation have developed the many movers structural plan motor product that is used for photoetching, and applied for relevant patent.The mechanical structure of many movers structural plan motor and dynamics are complicated, and electromagnetic actuator quantity is more, and the control difficulty is big; Double-deck mover platform oeverall quality is bigger, and smart moving platform needs carry out fine positioning again coarse motion platform coarse positioning after, causes the system location slow, and working (machining) efficiency is low.Single action minor structure planar motor then can overcome the above shortcoming of many movers structural plan motor, becomes present research focus.
Second key technology of high precision plane motor is the bearings mode of planar motor mover platform, for realizing the location quick and precisely of high precision plane motor, must realize the nothing friction suspension support of mover platform.Present alternative suspension technology mainly contains following four kinds: electrodynamics suspension, superconductive suspension, gas suspension, magnetic suspension, and wherein: the electrodynamics suspension that utilizes vortex phenomenon to realize can be because of the excessive positioning accuracy that influences planar motor of dispelling the heat; Superconductive suspension implements costliness and complexity under present technical conditions; The gas suspension implementation is simple, and rigidity is also more satisfactory, but the operation principle of gas suspension determines it can only be used to be provided with the nominal levitation position, does not also have the technology of dynamic adjustments air supporting size of gaps at present; The positioning accuracy of magnetic suspension bearing is mainly by the precision decision of air gap transducer, and is lower to the required precision of bearing surface, and can realize the quick adjustment of suspension air gap, but generally needs to add some groups of electromagnet as the magnetic suspension electromagnetic actuator.
The 3rd key technology of high precision plane motor is the electromagnetic actuator design, and wherein: horizontal large-stroke electromagnetic actuator generally adopts permanent magnetic linear synchronous motor, should reduce teeth groove power and pulsating force during design as far as possible; Little stroke and rotary actuator are many by high-speed double electromagnet.Common permanent magnetic linear synchronous motor adopts the single-degree-of-freedom permanent magnet array, and the magnetic field of single-degree-of-freedom permanent magnet array to being the cycle variation, can only produce the monolateral power of this direction along folk prescription; When the common permanent magnetic linear synchronous motor of moving-magnetic type (the single-degree-of-freedom permanent magnet array is installed on the mover) moved, permanent magnet array can not exceed the border of the thrust winding supporting with it, otherwise electromagnetic force is with uncontrollable; When the common permanent magnetic linear synchronous motor of moving-coil type (thrust winding is installed on the mover) moved, thrust winding can not exceed the border of the single-degree-of-freedom permanent magnet array supporting with it, otherwise electromagnetic force is with uncontrollable.Early stage single action minor structure planar motor adopts three groups of above common permanent magnetic linear synchronous motors (to be made of single-degree-of-freedom permanent magnet array that is installed in the mover lower surface at an angle and the supporting thrust winding that is installed in the stator upper surface, or constitute by single-degree-of-freedom permanent magnet array that is installed in the stator upper surface at an angle and the supporting thrust winding that is installed in the mover lower surface) come the big stroke motion of driving level, the expansion of its horizontal throw will be with the cost that increases to of mover platform size, with a kind of planar motor based on 4 groups of common permanent magnetic linear synchronous motors of moving-magnetic type (seeing U.S. doctor MIT thesis " High-precision planar magnetic levitaion ") is that example illustrates this problem: the structure of this planar motor as shown in Figure 1a, 4 groups of single-degree-of-freedom permanent magnet arrays (wavelength direction quadrature of adjacent single-degree-of-freedom permanent magnet array that on behalf of mover platform lower surface, the little square frame of broken lines that 4 length of sides are 100mm install, be used for producing the horizontal electromagnetic force of quadrature), the big square frame of broken lines that 4 length of sides are 150mm is represented 4 groups of thrust winding (wavelength direction is identical with the wavelength direction of supporting single-degree-of-freedom permanent magnet array directly over being positioned at it), during the planar motor operation, the single-degree-of-freedom permanent magnet array can not exceed the border that is positioned at the supporting thrust winding under it, so X-axis stroke S
X, Y-axis stroke S
YBe about 50mm, the mover platform size is about 300mm * 300mm; Referring to Fig. 1 b, establish the permanent magnet array size constancy, as need horizontal throw is expanded to 300mm * 300mm, the size of thrust winding will increase to 400mm * 400mm, and the size of mover platform increases to about 550mm * 550mm.
Three, utility model content:
The horizontal throw that the utility model provides a kind of two-freedom Halbach permanent magnet array type linear electric motors based on four groups of high force-energy density, low pulsating force, zero teeth groove power is the high-speed, high precision gas-magnet mixing suspended planar motor of expansion easily.
For reaching above-mentioned purpose, the technical solution adopted in the utility model has:
A kind of horizontal throw is the gas-magnet mixing suspended planar motor of expansion easily, adopt the single action minor structure, comprise the stator matrix of laying along horizontal X Y plane and float on the stator matrix and the mover matrix parallel with the stator matrix, it is characterized in that: the stator body upper surface is embedded with the two-freedom Halbach permanent magnet array of wavelength direction along X-axis and Y-axis both direction; The lower surface of mover matrix is respectively equipped with first thrust winding, second thrust winding, the 3rd thrust winding, the 4th thrust winding for four jiaos, wherein, the wavelength direction of first thrust winding and the 3rd thrust winding and X-axis in the same way, the wavelength direction of second thrust winding and the 4th thrust winding and Y-axis are in the same way; Lower surface four limits of mover matrix are respectively equipped with the first aerostatic bearing air cushion, the second aerostatic bearing air cushion, the 3rd aerostatic bearing air cushion, the 4th aerostatic bearing air cushion.The non-magnetic stainless steel of stator matrix adopting of the present utility model is made, two-freedom Halbach permanent magnet array is embedded in the groove of stator body upper surface, permanent magnet array upper surface and stator body upper surface maintain an equal level, it is that 0.5mm and flatness are that 00 grade epoxy resin (is smeared the epoxy resin of the about 1mm of a layer thickness at stator matrix and permanent magnet array upper surface that stator matrix and permanent magnet array upper surface are covered with a layer thickness, treat to put down its car thick after the epoxy resin layer drying) to 0.5mm, it is the working face (there be small hole in epoxy resin laminar surface, can't directly be used as the working face of aerostatic bearing air cushion) of the surface finish aluminium sheet of 1mm as the aerostatic bearing air cushion that the upper surface of epoxy resin layer is equipped with thickness.The polyoxymethylene resin of mover matrix adopting high-strength low-density is made.
Electromagnetic actuator of the present utility model adopts 4 groups of two-freedom Halbach permanent magnet array type linear electric motors, is respectively the first two-freedom Halbach permanent magnet array type linear electric motors that the two-freedom Halbach permanent magnet array and first thrust winding constitute, the second two-freedom Halbach permanent magnet array type linear electric motors that the two-freedom Halbach permanent magnet array and second thrust winding constitute, the 3rd two-freedom Halbach permanent magnet array type linear electric motors that two-freedom Halbach permanent magnet array and the 3rd thrust winding constitute, the 4th two-freedom Halbach permanent magnet array type linear electric motors that two-freedom Halbach permanent magnet array and the 4th thrust winding constitute.Two-freedom Halbach permanent magnet array is by magnetic pole being constituted according to the some of array distribution along X-axis and Y direction, every pair of magnetic pole forms (the four-part form single-degree-of-freedom Halbach permanent magnet array fusion by quadrature forms) by first of measure-alike cube shaped～the 16 permanent magnet by 4 * 4 permanent magnet arranged, wherein: first permanent magnet is positioned at the 1st row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0(unit vector of establishing XYZ coordinate system is i, j, k to k, M
0Be magnetization size), second permanent magnet is positioned at the 1st row the 2nd row of permanent magnet matrix, and magnetization intensity vector is the 1st row the 3rd row that 0, the three permanent magnet is positioned at the permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0K, the 4th permanent magnet are positioned at the 1st row the 4th row of permanent magnet matrix, and magnetization intensity vector is-2M
0K, the 5th permanent magnet are positioned at the 2nd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0J, the 6th permanent magnet are positioned at the 2nd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is-M
0J+M
0K, the 7th permanent magnet are positioned at the 2nd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0J, the 8th permanent magnet are positioned at the 2nd row the 4th row of permanent magnet matrix, and magnetization intensity vector is-M
0J-M
0K, the 9th permanent magnet are positioned at the 3rd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I+M
0K, the tenth permanent magnet are positioned at the 3rd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is 2M
0K, the 11 permanent magnet are positioned at the 3rd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0K, the 12 permanent magnet are positioned at the 3rd row the 4th row of permanent magnet matrix, and magnetization intensity vector is the 4th row the 1st row that 0, the ten three permanent magnet is positioned at the permanent magnet matrix, and magnetization intensity vector is M
0I+M
0J, the 14 permanent magnet are positioned at the 4th row the 2nd row of permanent magnet matrix, and magnetization intensity vector is M
0J+M
0K, the 15 permanent magnet are positioned at the 4th row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0J, the 16 permanent magnet are positioned at the 4th row the 4th row of permanent magnet matrix, and magnetization intensity vector is M
0J-M
0K; Each thrust winding adopts slotless not have the annular coil surface winding arrangement of iron core, constitute by 2 pairs of utmost points, every pair of utmost point constitutes three phase windings by 6 circle annular coils, wherein the lower floor limit of the first circle annular coil constitutes first effective edge of first phase winding, the lower floor limit of the 4th circle annular coil constitutes second effective edge of first phase winding, the lower floor limit of the second circle annular coil constitutes first effective edge of second phase winding, the lower floor limit of the 5th circle annular coil constitutes second effective edge of second phase winding, the lower floor limit of the 3rd circle annular coil constitutes first effective edge of third phase winding, and the lower floor limit of the 6th circle annular coil constitutes second effective edge of third phase winding.
The utility model adopts the gas magnetic mixing suspension type bearing to realize the no friction support of planar motor mover platform, utilize 4 groups of aerostatic bearings that the nominal levitation position (gas suspension bearing portions) of mover platform is set, the vertical electromagnetic force of utilizing 4 groups of linear electric motors actuators to provide realizes near the small movements (magnetic suspension bearing part) of the mover platform nominal levitation position.
The utility model is applied to 4 groups of vertical electromagnetic forces and 4 groups of horizontal electromagnetic forces that 4 groups of linear electric motors actuators produce on the mover platform, and then control mover platform carries out the motion of six-freedom degree.
Compared with prior art, the utlity model has following advantage:
The utility model adopts the single action minor structure, compares with stacked many movers structure to have following advantage: the mechanical structure of mover platform is simpler, and difficulty of processing is lower; Kinetic model is simpler, and the control difficulty is lower; Only adopt 4 groups of linear electric motors as electromagnetic actuator, the control difficulty is lower; The polyoxymethylene resin material of mover matrix adopting high-strength low-density is made, and quality is reduced, and can improve the locating speed of mover platform; The position fixing process of many movers structural plan motor is divided into coarse positioning and two steps of fine positioning, and the mover platform that the utility model then drives single layer structure directly navigates to the target location, can improve locating speed.
Electromagnetic actuator of the present utility model is 4 groups of two-freedom Halbach permanent magnet array type linear electric motors, permanent magnet array adopts two-freedom Halbach permanent magnet array, thrust winding adopts slotless not have the annular coil surface winding arrangement of iron core, the actuator of this structure has following advantage: thrust winding adopts slotless configuration, there is not teeth groove power, compare with the linear electric motors that have iron core and winding teeth groove structure, it is more stable to exert oneself, and is more suitable for the hi-Fix application; The groove area ratio of thrust winding reaches 100%, has improved the ability of exerting oneself of actuator, in addition through calculating as can be known, the magnetic field that winding current produced only comprises subharmonic such as 5,7,11,13, do not comprise 3 subharmonic, can reduce the electromagnetism pulsating force, it is more stable that actuator is exerted oneself; Through calculating as can be known, the enhancing of two-freedom Halbach permanent magnet array one side magnetic field (is called strong side, thrust winding is distributed in strong side air gap), one side field weakening (being called weak side), strong side Z-direction magnetic field all is the cycle along X-axis and Y direction and changes and (can be decomposed into two components of wavelength direction along X-axis and wavelength direction along Y-axis, these two components all only contain 5 times, 9 inferior high order harmonic components), X-direction magnetic field is the cycle variation along X-direction and (only contains 5 times, 9 inferior high order harmonic components), Y direction magnetic field is the cycle variation along Y direction and (only contains 5 times, 9 inferior high order harmonic components), the magnetic field bilateral symmetry of two-freedom radial permanent magnet array (being the Asakawa permanent magnet array), and comprise 3 times, 5 times, 7 inferior all odd numbers time high order harmonic component, the strong side magnetic field of two-freedom Halbach permanent magnet array has better sine than the magnetic field of Asakawa permanent magnet array, can reduce the electromagnetism pulsating force, it is more stable that actuator is exerted oneself; By calculating as can be known, when air gap is 1mm, the strong side magnetic field amplitude of the two-freedom Halbach permanent magnet array of equal volume is about 1.6 times of Asakawa permanent magnet array, under the situation of no back iron guiding magnetic circuit, two-freedom Halbach permanent magnet array also can form stronger magnetic field in strong side, the ability of exerting oneself of the two-freedom Halbach permanent magnet array type linear electric motors of same volume can reach about 1.4 times of Asakawa permanent magnet array type linear electric motors, and power can density be promoted; Linear electric motors actuator of the present utility model is the two-freedom actuator, both can provide monolateral power to be used for driving, and can provide vertical force to be used for magnetic suspension control again; Horizontal throw expansion based on the planar motor of common permanent magnetic linear synchronous motor actuator will be with the cost that increases to of mover platform size, and excessive size will significantly increase the difficulty of processing and the quality of mover platform, the shared 1 group of two-freedom Halbach permanent magnet array of 4 groups of thrust winding of the present utility model constitutes 4 groups of two-freedom Halbach permanent magnet array type linear electric motors, require 4 groups of thrust winding not exceed the border of two-freedom Halbach permanent magnet array during operation, the expansion of horizontal throw only need increase the number of pole-pairs of two-freedom Halbach permanent magnet array, the mover platform need not to make any change, has greatly reduced the difficulty of horizontal throw expansion.
The gas magnetic mixing suspension type bearing that the utility model adopts, compare with single air-bearing, magnetic bearing, has following obvious advantage: utilize 4 groups of aerostatic bearings that the nominal levitation position of mover platform is set, it is simple to have brought into play the air-bearing implementation, the advantage that rigidity is desirable, utilize the vertical electromagnetic force that 4 groups of linear electric motors provide to realize near the small movements of the mover platform nominal levitation position, overcome the shortcoming that air-bearing can't dynamic adjustments air supporting size of gaps again.In addition, the vertical electromagnetic force that the utility model directly utilizes 4 groups of linear electric motors to provide is done magnetic suspension control, need not to add electromagnet as the magnetic suspension actuator again, has significantly reduced the quantity of system's electromagnetic actuator, has reduced the control difficulty of system.
Four, description of drawings
Fig. 1 is a kind of horizontal throw extensive diagnostic schematic diagram of planar motor.
Fig. 2 is a structure diagram of the present utility model.
Fig. 3 is a structural representation of the present utility model.
Fig. 4 is the structural representation of two-freedom Halbach permanent magnet array of the present utility model.
Fig. 5 is the magnetic flux density spatial distribution schematic diagram of two-freedom Halbach permanent magnet array of the present utility model.
Fig. 6 is the structural representation of thrust winding of the present utility model.
Fig. 7 is the electromagnetic force configuration schematic diagram that is used for six-freedom motion control of the present utility model.
Main label in the accompanying drawing has:
1 stator matrix
11 two-freedom Halbach permanent magnet arrays
2 mover matrixes
21～24 first～the 4th thrust winding
25～28 first～the 4th aerostatic bearing air cushions
M1～M16 constitutes first～the 16 permanent magnet of two-freedom Halbach permanent magnet array pair of magnets
The lower floor limit of L1 annular coil
The vertical edges of L2, L4 annular coil
The limit, upper strata of L3 annular coil
W1～W6 constitutes first circle～the 6th circle annular coil of a pair of utmost point of thrust winding
First, second effective edge of first phase winding of A, A ' three-phase thrust winding
First, second effective edge of second phase winding of B, B ' three-phase thrust winding
First, second effective edge of the third phase winding of C, C ' three-phase thrust winding
f
1X, f
3XThe first, the monolateral power of the X-direction of the 3rd linear electric motors actuator generation
f
2Y, f
4YThe second, the monolateral power of the Y direction of the 4th linear electric motors actuator generation
f
1Z～f
4ZThe vertical force of the Z-direction that first～the 4th linear electric motors actuator produces
τ
X, τ
Y, τ
ZThe torque that planar motor mover platform is subjected to along X-axis, Y-axis, Z axle
Five, embodiment
Below in conjunction with accompanying drawing structural principle of the present utility model and operation principle are elaborated.
Referring to Fig. 2, Fig. 3, it is the single action minor structure of single layer structure that the utility model adopts the mover platform, comprises the stator matrix of laying along horizontal X Y plane 1 and floats on the stator matrix 1 and the mover matrix 2 parallel with stator matrix 1; Stator matrix 1 upper surface is embedded with the two-freedom Halbach permanent magnet array 11 of wavelength direction along X-axis and Y-axis both direction; The lower surface of mover matrix 2 is respectively equipped with first thrust winding 21, second thrust winding 22, the 3rd thrust winding 23, the 4th thrust winding 24 for four jiaos, wherein, the wavelength direction of first thrust winding 21 and the 3rd thrust winding 23 and X-axis in the same way, the wavelength direction of second thrust winding 22 and the 4th thrust winding 24 and Y-axis are in the same way; The two-freedom Halbach permanent magnet array 11 and first thrust winding 21 constitute the first two-freedom Halbach permanent magnet array type linear electric motors, the two-freedom Halbach permanent magnet array 11 and second thrust winding 22 constitute the second two-freedom Halbach permanent magnet array type linear electric motors, two-freedom Halbach permanent magnet array 11 and the 3rd thrust winding 23 constitute the 3rd two-freedom Halbach permanent magnet array type linear electric motors, and two-freedom Halbach permanent magnet array 11 and the 4th thrust winding 24 constitute the 4th two-freedom Halbach permanent magnet array type linear electric motors; Lower surface four limits of mover matrix 2 are respectively equipped with the first aerostatic bearing air cushion 25, the second aerostatic bearing air cushion 26, the 3rd aerostatic bearing air cushion 27, the 4th aerostatic bearing air cushion 28; Stator matrix 1 adopts non-magnetic stainless steel to make, two-freedom Halbach permanent magnet array 11 is embedded in the groove of stator matrix 1 upper surface, permanent magnet array 11 upper surfaces and stator matrix 1 upper surface maintain an equal level, it is that 0.5mm and flatness are that 00 grade epoxy resin (is smeared the epoxy resin of the about 1mm of a layer thickness at stator matrix 1 and permanent magnet array 11 upper surfaces that stator matrix 1 and permanent magnet array 11 upper surfaces are covered with a layer thickness, treat to put down its car thick after the epoxy resin layer drying) to 0.5mm, it is that the surface finish aluminium sheet of 1mm is as aerostatic bearing air cushion 25 that the upper surface of epoxy resin layer is equipped with thickness, 26,27, (there is small hole in the epoxy resin laminar surface to 28 working face, can't directly be used as aerostatic bearing air cushion 25,26,27,28 working face); Mover matrix 2 adopts the polyoxymethylene resin of high-strength low-density to make, in order to alleviate the oeverall quality of mover platform.
Referring to Fig. 4, two-freedom Halbach permanent magnet array 11 of the present utility model is by magnetic pole being constituted according to the some of array distribution along X-axis and Y direction, a pair of magnetic pole all is τ along the length of X-axis and Y direction, first～the 16 permanent magnet M1～M16 of the cube shaped that the every pair of magnetic pole is 0.25 τ by the length of side forms by 4 * 4 permanent magnet arranged, wherein: the first permanent magnet M1 is positioned at the 1st row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0(unit vector of establishing XYZ coordinate system is i, j, k to k, M
0Be magnetization size), the second permanent magnet M2 is positioned at the 1st row the 2nd row of permanent magnet matrix, and magnetization intensity vector is the 1st row the 3rd row that 0, the three permanent magnet M3 is positioned at the permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0K, the 4th permanent magnet M4 are positioned at the 1st row the 4th row of permanent magnet matrix, and magnetization intensity vector is-2M
0K, the 5th permanent magnet M5 are positioned at the 2nd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0J, the 6th permanent magnet M6 are positioned at the 2nd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is-M
0J+M
0K, the 7th permanent magnet M7 are positioned at the 2nd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0J, the 8th permanent magnet M8 are positioned at the 2nd row the 4th row of permanent magnet matrix, and magnetization intensity vector is-M
0J-M
0K, the 9th permanent magnet M9 are positioned at the 3rd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I+M
0K, the tenth permanent magnet M10 are positioned at the 3rd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is 2M
0K, the 11 permanent magnet M11 are positioned at the 3rd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0K, the 12 permanent magnet M12 are positioned at the 3rd row the 4th row of permanent magnet matrix, and magnetization intensity vector is the 4th row the 1st row that 0, the ten three permanent magnet M13 is positioned at the permanent magnet matrix, and magnetization intensity vector is M
0I+M
0J, the 14 permanent magnet M14 are positioned at the 4th row the 2nd row of permanent magnet matrix, and magnetization intensity vector is M
0J+M
0K, the 15 permanent magnet M15 are positioned at the 4th row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0J, the 16 permanent magnet M16 are positioned at the 4th row the 4th row of permanent magnet matrix, and magnetization intensity vector is M
0J-M
0K.
If M
0Be 795775A/m, through calculating as can be known: two-freedom Halbach permanent magnet array 11 1 side magnetic fields strengthen, and are called strong side (upper surface of two-freedom Halbach permanent magnet array 11 is strong side), and a side field weakening is called weak side; In strong side air gap 1mm place, Z-direction magnetic induction density B
ZAlong the distribution on horizontal X Y plane shown in Fig. 5 a, B
ZAll be the cycle along X-axis and Y-axis and change, can be decomposed into two components of wavelength direction, and these two components all only contain 5 times, 9 inferior high order harmonic components along X-axis and wavelength direction along Y-axis; The X-direction magnetic induction density B
XShown in Fig. 5 b, only contain 5 times, 9 inferior high order harmonic components along the distribution on horizontal X Y plane; The Y direction magnetic induction density B
YShown in Fig. 5 c, only contain 5 times, 9 inferior high order harmonic components along the distribution on horizontal X Y plane.
Referring to Fig. 6 a, thrust winding 21,22,23,24 of the present utility model adopts slotless not have the annular coil surface winding arrangement of iron core, and annular coil is made of the limit L1 of lower floor, vertical edges L2 and L4, limit, upper strata L3.Referring to Fig. 6 b, thrust winding is made of 2 pairs of utmost points, every pair of utmost point constitutes three phase windings by 6 circle annular coils, wherein the lower floor limit of the first circle annular coil W1 constitutes the first effective edge A of first phase winding, the lower floor limit of the 4th circle annular coil W4 constitutes the second effective edge A ' of first phase winding, the lower floor limit of the second circle annular coil W2 constitutes the first effective edge B of second phase winding, the lower floor limit of the 5th circle annular coil W5 constitutes the second effective edge B ' of second phase winding, the lower floor limit of the 3rd circle annular coil W3 constitutes the first effective edge C of third phase winding, and the lower floor limit of the 6th circle annular coil W6 constitutes the second effective edge C ' of third phase winding.Through calculating as can be known: it is 0 that the suffered electromagnetism of the vertical edges L2 of thrust winding and L4 is made a concerted effort; Magnetic field, L3 position, limit, upper strata decays to 0 substantially, thinks that it is 0 that limit, the upper strata suffered electromagnetism of L3 is made a concerted effort; The limit L1 of lower floor of thrust winding 21 produces the monolateral power f along X-direction
1XVertical force f with Z-direction
1Z, the limit L1 of lower floor of thrust winding 23 produces the monolateral power f along X-direction
3XVertical force f with Z-direction
3Z, the limit L1 of lower floor of thrust winding 22 produces the monolateral power f along Y direction
2YVertical force f with Z-direction
2Z, the limit L1 of lower floor of thrust winding 24 produces the monolateral power f along Y direction
4YVertical force f with Z-direction
4Z(the electromagnetic force analytical method can adopt " electrotechnics journal " 2009 the 2nd disclosed electromagnetic force Decoupling Analysis methods of handing over axle to decompose based on d-axis of interim article " based on the planar motor control method of pattern power ").
Fig. 7 has provided a kind of electromagnetic force configuration mode of realizing the motion control of mover platform six-freedom degree, wherein: referring to Fig. 7 a, the monolateral power f of control X-direction
1XAnd f
3XThe may command planar motor moves along X-direction; Referring to Fig. 7 b, the monolateral power f of control Y direction
2YAnd f
4YThe may command planar motor moves along Y direction; Referring to Fig. 7 c, the monolateral power f of control X-direction
1X, f
3XMonolateral power f with Y direction
2Y, f
4YThe may command planar motor is around the torque tau of Z axle
Z, and then control is around the minor rotation θ of Z axle
ZReferring to Fig. 7 d, the vertical force f of control Z-direction
1Z, f
2Z, f
3Z, f
4ZThe may command planar motor near the nominal levitation position along the small movements of Z-direction, and around the torque tau of X-axis, Y-axis
X, τ
Y, and then control is around the minor rotation θ of X-axis, Y-axis
X, θ
Y
Claims (3)
1. the easy gas-magnet mixing suspended planar motor of expansion of a horizontal throw, comprise the stator matrix of laying along horizontal X Y plane (1) and float on stator matrix (1) and go up and the mover matrix (2) parallel with stator matrix (1), it is characterized in that, stator matrix (1) upper surface is embedded with the two-freedom Halbach permanent magnet array (11) of wavelength direction along X-axis and Y-axis both direction, the lower surface of mover matrix (2) is respectively equipped with first thrust winding (21) for four jiaos, second thrust winding (22), the 3rd thrust winding (23), the 4th thrust winding (24), wherein, the wavelength direction of first thrust winding (21) and the 3rd thrust winding (23) and X-axis are in the same way, the wavelength direction of second thrust winding (22) and the 4th thrust winding (24) and Y-axis in the same way, lower surface four limits of mover matrix (2) are respectively equipped with the first aerostatic bearing air cushion (25), the second aerostatic bearing air cushion (26), the 3rd aerostatic bearing air cushion (27), the 4th aerostatic bearing air cushion (28).
2. horizontal throw according to claim 1 is the gas-magnet mixing suspended planar motor of expansion easily, it is characterized in that described two-freedom Halbach permanent magnet array (11) is by magnetic pole being constituted according to the some of array distribution along X-axis and Y direction, described every pair of magnetic pole is by first of measure-alike cube shaped～the 16 permanent magnet (M1～M16) form by 4 * 4 permanent magnet arranged, if the unit vector of XYZ coordinate system is i, j, k, M
0Be magnetization size, first permanent magnet (M1) is positioned at the 1st row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0K, second permanent magnet (M2) are positioned at the 1st row the 2nd row of permanent magnet matrix, and magnetization intensity vector is the 1st row the 3rd row that 0, the three permanent magnet (M3) is positioned at the permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0K, the 4th permanent magnet (M4) are positioned at the 1st row the 4th row of permanent magnet matrix, and magnetization intensity vector is-2M
0K, the 5th permanent magnet (M5) are positioned at the 2nd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I-M
0J, the 6th permanent magnet (M6) are positioned at the 2nd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is-M
0J+M
0K, the 7th permanent magnet (M7) are positioned at the 2nd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I-M
0J, the 8th permanent magnet (M8) are positioned at the 2nd row the 4th row of permanent magnet matrix, and magnetization intensity vector is-M
0J-M
0K, the 9th permanent magnet (M9) are positioned at the 3rd row the 1st row of permanent magnet matrix, and magnetization intensity vector is M
0I+M
0K, the tenth permanent magnet (M10) are positioned at the 3rd row the 2nd row of permanent magnet matrix, and magnetization intensity vector is 2M
0K, the 11 permanent magnet (M11) are positioned at the 3rd row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0K, the 12 permanent magnet (M12) are positioned at the 3rd row the 4th row of permanent magnet matrix, and magnetization intensity vector is the 4th row the 1st row that 0, the ten three permanent magnet (M13) is positioned at the permanent magnet matrix, and magnetization intensity vector is M
0I+M
0J, the 14 permanent magnet (M14) are positioned at the 4th row the 2nd row of permanent magnet matrix, and magnetization intensity vector is M
0J+M
0K, the 15 permanent magnet (M15) are positioned at the 4th row the 3rd row of permanent magnet matrix, and magnetization intensity vector is-M
0I+M
0J, the 16 permanent magnet (M16) are positioned at the 4th row the 4th row of permanent magnet matrix, and magnetization intensity vector is M
0J-M
0K.
3. horizontal throw according to claim 1 is the gas-magnet mixing suspended planar motor of expansion easily, it is characterized in that described thrust winding (21), (22), (23), (24) employing slotless do not have the annular coil surface winding arrangement of iron core, be made of 2 pairs of utmost points, every pair of utmost point constitutes three phase windings by 6 circle annular coils.
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| CN200920041086U CN201378784Y (en) | 2009-04-10 | 2009-04-10 | Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke |
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| CN200920041086U CN201378784Y (en) | 2009-04-10 | 2009-04-10 | Gas-magnetic mixture suspension plane motor with easy extension horizontal stroke |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103795296A (en) * | 2012-11-02 | 2014-05-14 | 上海微电子装备有限公司 | Magnetic-levitation planar motor |
-
2009
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103795296A (en) * | 2012-11-02 | 2014-05-14 | 上海微电子装备有限公司 | Magnetic-levitation planar motor |
| CN103795296B (en) * | 2012-11-02 | 2016-04-20 | 上海微电子装备有限公司 | A kind of levitation planar motor |
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Inventor after: Zhou Gan Inventor after: Huang Xueliang Inventor after: Jiang Hao Inventor after: Zhang Qian Inventor after: Huang Li Inventor after: Zhou Qinbo Inventor after: Fu Meng Inventor before: Zhou Gan Inventor before: Huang Xueliang Inventor before: Zhang Qian Inventor before: Huang Li Inventor before: Zhou Qinbo Inventor before: Fu Meng |
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Free format text: CORRECT: INVENTOR; FROM: ZHOU GAN HUANG XUELIANG ZHANG QIAN HUANG LI ZHOU QINBO FU MENG TO: ZHOU GAN HUANG XUELIANG JIANG HAO ZHANG QIAN HUANG LI ZHOU QINBO FU MENG |
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