CN109870881A - The macro box-like long stroke precision movement platform of micro-group - Google Patents
The macro box-like long stroke precision movement platform of micro-group Download PDFInfo
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Abstract
The macro box-like long stroke precision movement platform of micro-group, belongs to two-dimentional precision stage technical field.The present invention solves the problems, such as that both existing plane motion platform high position precision and long movement travel cannot be considered in terms of.The present invention is mainly made of upper layer ultra-precise micro displacement platform and lower layer's two-dimensional long-stroke macro-moving stage two parts, and the short stroke adjustment of the two-dimensional long-stroke movement and Z-direction in X-Y plane may be implemented.When entire working platform, the movement of a wide range of long stroke is realized that the positioning accuracy of integral platform can reach micron order by lower layer's two-dimensional long-stroke macro-moving stage；Then, after the motion parts of entire platform reach predetermined position, then by the ultraprecise adjustment of upper layer ultra-precise micro displacement platform realization small range short stroke, nano grade positioning precision is finally realized.Present invention is mainly used for the fields such as modern precision test and high-grade process unit.
Description
Technical field
The present invention relates to a kind of novel macro box-like long stroke precision movement platforms of micro-group, belong to two-dimentional precision stage technology
Field.
Background technique
Traditional two-dimensional surface movement mechanism is usually to pass through two groups of the superposition linear motions by rotating electric machine driving to convert
Made of mechanism, there is a series of problems, such as friction, sideshake, deformation in this structure, positioning accuracy is extremely difficult to the essences such as litho machine
Close, ultraprecise modern manufacturing machines demands.
Currently, the planar motion mechanism in lithography machine stage system be mostly by two or the superposition of more linear motors and
It is formed, the positioning accuracy of this mechanism is greatly improved relative to traditional mechanism, but does not get rid of " low-dimensional fitness machine still
Structure is superimposed as higher-dimension movement mechanism " mode, the gross mass of upper layer driving motor and associated mechanical connector, for lower layer
Still burden is very big for linear motor, limits the movement travel of platform.Therefore, the existing high positioning accurate of plane motion platform
Degree and urgent need to resolve the problem of long movement travel.
Summary of the invention
The present invention is to solve both existing plane motion platform high position precision and long movement travel and cannot be considered in terms of
The problem of, the present invention provides a kind of macro box-like long stroke precision movement platforms of micro-group.
The macro box-like long stroke precision movement platform of micro-group, including upper layer ultra-precise micro displacement platform, lower layer's two-dimensional long-stroke are macro
Moving platform and common board, upper layer ultra-precise micro displacement platform and lower layer's two-dimensional long-stroke macro-moving stage share common board；
Air supply channel is equipped in common board, and its bottom surface is equipped with air bearing nozzle, air bearing nozzle is connected to air supply channel；
Upper layer ultra-precise micro displacement platform, for realizing the adjustment of two-dimentional short stroke ultraprecise and Z-direction in X-Y plane
Short stroke adjustment；
Air bearing connection is carried out between lower layer's two-dimensional long-stroke macro-moving stage and common board；
Lower layer's two-dimensional long-stroke macro-moving stage is also used to realize the two-dimensional long-stroke movement in X-Y plane；
Long stroke refers to 1 meter or more of stroke；
Short stroke refers to millimetre-sized stroke.
Preferably, ultra-precise micro displacement platform in upper layer includes mover substrate, two sets of X to voice coil motor, two sets of Y-direction voice coils electricity
Machine and four sets of Z-direction gravity compensators；
Two sets of X are arranged to voice coil motor, two sets of Y-direction voice coil motors and four sets of Z-direction gravity compensators in mover substrate and public affairs
Altogether between plate；
Stator substrate of the common board as upper layer ultra-precise micro displacement platform；
Two sets of X are to voice coil motor, for realizing X of the upper layer ultra-precise micro displacement platform in X-Y plane to short stroke superfinishing
Close adjustment；
Two sets of Y-direction voice coil motors, for realizing Y-direction short stroke superfinishing of the upper layer ultra-precise micro displacement platform in X-Y plane
Close adjustment；
Four sets of Z-direction gravity compensators, for completely cutting off vibration and mover substrate being adjusted and supported in the short stroke of Z-direction.
Preferably, lower layer's two-dimensional long-stroke macro-moving stage is realized using cored permanent magnetic synchronous plane electromotor motor；Lower layer
Two-dimensional long-stroke macro-moving stage includes the Halbach permanent magnet array and coil array group of stator base, two-dimensional symmetric distribution；
Common board is also used as the iron core yoke plate of cored permanent magnetic synchronous plane electromotor motor；
Coil array group is fixed on the lower surface of iron core yoke plate, and the two is collectively as cored permanent magnetic synchronous plane electromotor electricity
The mover of machine；
Halbach permanent magnet array is bonded in stator base, and the two is collectively as cored permanent magnetic synchronous plane electromotor electricity
The stator of machine；
Electromagnetic energy is converted directly into two-dimensional surface and moved by coil array group and the interaction of Halbach permanent magnet array.
Preferably, lower layer's two-dimensional long-stroke macro-moving stage is realized using cored permanent magnetic synchronous plane electromotor motor；
Lower layer's two-dimensional long-stroke macro-moving stage includes the Halbach permanent magnet array and line of stator base, two-dimensional symmetric distribution
Enclose array group；
The Halbach permanent magnet array of two-dimensional symmetric distribution is fixed on the bottom surface of common board, and the two is collectively as having
The mover of the permanent magnetic synchronous plane electromotor motor of iron core；
Iron core yoke plate of the stator base as cored permanent magnetic synchronous plane electromotor motor；
Coil array group is fixed in stator base, and the two is determined collectively as cored permanent magnetic synchronous plane electromotor motor
Son；
Electromagnetic energy is converted directly into two-dimensional surface and moved by Halbach permanent magnet array and the interaction of coil array group.
Preferably, coil array group is formed by four sets of one-dimensional coil array combinations；
Wherein, two sets of one-dimensional coil arrays are for generating X-direction driving force, and another two sets of one-dimensional coil arrays are for generating Y
Direction driving force, and two sets of one-dimensional coil arrays for generating equidirectional driving force are distributed in diagonal line.
Preferably, two sets of X are fixed to the stator of voice coil motor, two sets of Y-direction voice coil motors and four sets of Z-direction gravity compensators
In common board；
Two sets of X are fixed on mover base to the mover of voice coil motor, two sets of Y-direction voice coil motors and four sets of Z-direction gravity compensators
On plate；
Stator and the mover relative motion in Z-direction in every set Z-direction gravity compensator, and the two carries out magnetic over draft support；
Every set X is to the X in X-Y plane of stator and mover of voice coil motor to relative motion；
Y-direction relative motion of the stator and mover of every set Y-direction voice coil motor in X-Y plane.
Preferably, two sets of X surround rectangular to voice coil motor and two sets of Y-direction voice coil motors, and two sets of X are to voice coil motor
It is oppositely arranged, two sets of Y-direction voice coil motors are oppositely arranged；
Four sets of Z-direction gravity compensators are uniformly arranged on the outside of the rectangle being encircled into.
Planar motor is a kind of calutron that electromagnetic energy can be converted to directly to two-dimensional surface movement, which has
Rotary motion is transformed into linear motion due to not needing conversion equipment and arrived again by the advantages that precision is high, loss is low, motion range is big
Plane motion, so can be by control object with motor being made of one structure, tool by the two-dimensional motion mechanism of planar motor driving
There are the series of advantages such as structure is simple, loss is low, precision is high, reaction is fast.So being moved by the two-dimensional surface of planar motor driving
Mechanism is in two-dimensional ultraprecise two-dimensional positioning system, especially as Optical Coatings for Photolithography in modern semiconductors microfabrication equipment
It has broad application prospects.
Principle analysis: the macro box-like long stroke precision movement platform of micro-group is mainly by upper layer ultra-precise micro displacement platform and lower layer two
Long stroke macro-moving stage two parts composition is tieed up, the short row of the two-dimensional long-stroke movement and Z-direction in X-Y plane may be implemented
Journey adjustment.When entire working platform, the movement of a wide range of long stroke is realized by lower layer's two-dimensional long-stroke macro-moving stage, whole flat
The positioning accuracy of platform can reach micron order；Then, after the motion parts of entire platform reach predetermined position, then by upper layer superfinishing
Close micromotion platform realizes the ultraprecise adjustment of small range short stroke, finally realizes nano grade positioning precision.
The invention has the beneficial effects that the box-like long stroke precision movement platform of macro micro-group proposed by the present invention uses gas
Over draft support, so that the mechanical friction between the motion platform motion parts and static part is eliminated, so that positioning accuracy is improved, and
The fast accurate positioning in two-dimensional surface can be achieved, it is a series of excellent to have that thrust density is big, dynamic response is fast, positioning accuracy is high etc.
Point, meanwhile, lower layer's two-dimensional long-stroke macro-moving stage realizes the movement of long stroke, and since upper layer ultra-precise micro displacement platform is under
Layer two-dimensional long-stroke macro-moving stage shares common board to mitigate the mass motion weight of platform, and it is overweight to avoid upper platform,
So that the movement travel of lower layer's platform is restricted, to further realize the movement travel for improving lower layer's platform.To sum up, it realizes
The macro box-like long stroke precision movement platform of micro-group of the present invention realizes both high position precision and long movement travel simultaneously
It takes into account.
The present invention is tested in modern precision and the fields such as high-grade process unit have broad application prospects and potentiality.
Detailed description of the invention
Fig. 1 and Fig. 2 is the three-dimensional assembling exploded view of the box-like long stroke precision movement platform of macro micro-group of the present invention.
Fig. 3 is the three-dimensional assembling exploded view of lower layer's two-dimensional long-stroke macro-moving stage.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art without making creative work it is obtained it is all its
Its embodiment, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
The present invention will be further explained below with reference to the attached drawings and specific examples, but not as the limitation of the invention.
Illustrate present embodiment referring to Fig. 1 and Fig. 2, the macro box-like long stroke precise motion of micro-group described in present embodiment is flat
Platform, including upper layer ultra-precise micro displacement platform 100, lower layer's two-dimensional long-stroke macro-moving stage 200 and common board 300, upper layer ultraprecise
Micromotion platform 100 and lower layer's two-dimensional long-stroke macro-moving stage 200 share common board 300；Air supply channel is equipped in common board 300,
And its bottom surface is equipped with air bearing nozzle 301, air bearing nozzle 301 is connected to air supply channel；
Upper layer ultra-precise micro displacement platform 100, for realizing in X-Y plane two-dimentional short stroke ultraprecise adjustment and Z
The short stroke in direction adjusts；
Air bearing connection is carried out between lower layer's two-dimensional long-stroke macro-moving stage 200 and common board 300；
Lower layer's two-dimensional long-stroke macro-moving stage 200 is also used to realize the two-dimensional long-stroke movement in X-Y plane；
Long stroke refers to 1 meter or more of stroke；
Short stroke refers to millimetre-sized stroke.
It is long that the macro box-like long stroke precision movement platform of micro-group described in present embodiment may be implemented in the two dimension in X-Y plane
The adjustment of the short stroke of stroke motion and Z-direction.
When entire working platform, the movement of a wide range of long stroke is realized by lower layer's two-dimensional long-stroke macro-moving stage 200, whole
The positioning accuracy of body platform can reach micron order；Then, after the motion parts of entire platform reach predetermined position, then by upper layer
Ultra-precise micro displacement platform 100 realizes the ultraprecise adjustment of small range short stroke, finally realizes nano grade positioning precision.
Air bearing supporting way realizes the support of the box-like long stroke precision movement platform motion parts of macro micro-group, should to eliminate
Mechanical friction between motion platform motion parts and static part；To improve positioning accuracy, meanwhile, lower layer's two-dimensional long-stroke
Macro-moving stage 200 realizes the movement of long stroke, and since upper layer ultra-precise micro displacement platform 100 and lower layer's two-dimensional long-stroke are macro dynamic
Platform 200 shares common board 300 to mitigate the mass motion weight of platform, improves entire platform motion parts to greatest extent
Response speed, so that it is obtained optimal dynamic property.To sum up, the box-like long stroke precision fortune of macro micro-group of the present invention is realized
Moving platform realizes taking into account for high position precision and long movement travel, while can obtain very high dynamic property again.
Upper layer ultra-precise micro displacement platform 100 in the box-like long stroke precision movement platform of macro micro-group as finally realizing
The final carrier of Ultra-precision positioning.
Illustrate this preferred embodiment referring to Fig. 1 and Fig. 2, in this preferred embodiment, upper layer ultra-precise micro displacement platform 100
Including 101, two sets of X of mover substrate to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensators 104；
Two sets of X are arranged to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensators 104 in mover
Between substrate 101 and common board 300；
Stator substrate of the common board 300 as upper layer ultra-precise micro displacement platform 100；
Two sets of X are to voice coil motor 102, for realizing X of the upper layer ultra-precise micro displacement platform 100 in X-Y plane to short row
The adjustment of journey ultraprecise；
Two sets of Y-direction voice coil motors 103, for realizing Y-direction short row of the upper layer ultra-precise micro displacement platform 100 in X-Y plane
The adjustment of journey ultraprecise；
Four sets of Z-direction gravity compensators 104, for completely cut off vibration and to mover substrate 101 Z-direction short stroke adjustment and
Support.
In this preferred embodiment, due to upper layer ultra-precise micro displacement platform 100 and lower layer's two-dimensional long-stroke macro-moving stage 200
By the way of air bearing support, it can effectively completely cut off the vibration of lower layer's platform bring by four sets of Z-direction gravity compensators 104, into one
Step improves the positioning accuracy of upper layer ultra-precise micro displacement platform 100.
Mover substrate 101 is as finally realizing Ultra-precision positioning in the box-like long stroke precision movement platform of macro micro-group
Final carrier.
Illustrate this preferred embodiment referring to Fig. 1 and Fig. 2, in this preferred embodiment, lower layer's two-dimensional long-stroke is macro dynamic flat
Platform 200 is realized using cored permanent magnetic synchronous plane electromotor motor；
Lower layer's two-dimensional long-stroke macro-moving stage 200 includes the Halbach permanent magnetism battle array of stator base 201, two-dimensional symmetric distribution
Column 202 and coil array group 203；
Iron core yoke plate of the common board 300 also as cored permanent magnetic synchronous plane electromotor motor；
Coil array group 203 is fixed on the lower surface of iron core yoke plate, and the two is flat collectively as cored permanent-magnet synchronous
The mover of face motor；
Halbach permanent magnet array 202 is bonded in stator base 201, and the two is collectively as cored permanent-magnet synchronous
The stator of planar motor；
Electromagnetic energy is converted directly into two-dimensional surface and transported by coil array group 203 and the interaction of Halbach permanent magnet array 202
It is dynamic.
In this preferred embodiment, lower layer's two-dimensional long-stroke macro-moving stage 200 is using cored permanent magnetic synchronous plane electromotor electricity
Machine is realized, is realized the thrust density with higher of lower layer's two-dimensional long-stroke macro-moving stage 200, is kept its dynamic response fast, is realized
Long stroke movement.
In this preferred real mode, in cored permanent magnetic synchronous plane electromotor electric machine structure form, transported using coil array group 203
Dynamic mode.
The static part of stator base 201 and Halbach permanent magnet array 202 as entire motion platform；
Mover substrate 101 and two sets of X are to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensations
A motion parts of the mover of device 104 collectively as entire motion platform；
Common board 300 and two sets of X are to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensators
Another motion parts of 104 stator collectively as entire motion platform.
When entire working platform, the movement of a wide range of long stroke is realized by lower layer's two-dimensional long-stroke macro-moving stage 200, whole
The positioning accuracy of body platform can reach micron order；Then, (motion parts refer in addition to stator base the motion parts of entire platform
Other parts other than 201 and Halbach permanent magnet array 202) reach predetermined position after, then by upper layer ultra-precise micro displacement platform
100 realize the ultraprecise adjustment of small range short stroke, finally realize nano grade positioning precision.
Illustrate this preferred embodiment referring to Fig. 3, in this preferred embodiment, lower layer's two-dimensional long-stroke macro-moving stage 200
It is realized using cored permanent magnetic synchronous plane electromotor motor；
Lower layer's two-dimensional long-stroke macro-moving stage 200 includes the Halbach permanent magnetism battle array of stator base 201, two-dimensional symmetric distribution
Column 202 and coil array group 203；
The Halbach permanent magnet array 202 of two-dimensional symmetric distribution is fixed on the bottom surface of common board 300, and the two is common
Mover as cored permanent magnetic synchronous plane electromotor motor；
Iron core yoke plate of the stator base 201 as cored permanent magnetic synchronous plane electromotor motor；
Coil array group 203 is fixed in stator base 201, and the two is collectively as cored permanent magnetic synchronous plane electromotor electricity
The stator of machine；
Electromagnetic energy is converted directly into two-dimensional surface and transported by Halbach permanent magnet array 202 and the interaction of coil array group 203
It is dynamic.In this preferred embodiment, lower layer's two-dimensional long-stroke macro-moving stage 200 is real using cored permanent magnetic synchronous plane electromotor motor
It is existing, it realizes the thrust density with higher of lower layer's two-dimensional long-stroke macro-moving stage 200, keep its dynamic response fast, realize long row
Cheng Yundong.
In this preferred real mode, in cored permanent magnetic synchronous plane electromotor electric machine structure form, using Halbach permanent magnet array
The mode of 202 movements.
The static part of stator base 201 and coil array group 203 as entire motion platform；
Mover substrate 101 and two sets of X are to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensations
A motion parts of the mover of device 104 collectively as entire motion platform；
Common board 300 and two sets of X are to 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensators
Another motion parts of 104 stator collectively as entire motion platform.
When entire working platform, the movement of a wide range of long stroke is realized by lower layer's two-dimensional long-stroke macro-moving stage 200, whole
The positioning accuracy of body platform can reach micron order；Then, (motion parts refer in addition to stator base the motion parts of entire platform
201 and coil array group 203 other than other parts) reach predetermined position after, then realized by upper layer ultra-precise micro displacement platform 100
The ultraprecise of small range short stroke adjusts, and finally realizes nano grade positioning precision.
Illustrate this preferred embodiment referring to Fig. 1 and Fig. 2, in this preferred embodiment, coil array group 203 is by four set one
Dimension coil array is composed；
Wherein, two sets of one-dimensional coil arrays are for generating X-direction driving force, and another two sets of one-dimensional coil arrays are for generating Y
Direction driving force, and two sets of one-dimensional coil arrays for generating equidirectional driving force are distributed in diagonal line.
This preferred embodiment realizes the object between planar motor different directions thrust by way of Structural assignments as far as possible
Understand coupling, reduces control difficulty caused by coupled problem as possible.
Illustrate this preferred embodiment referring to Fig. 1 to Fig. 3, in this preferred embodiment, two sets of X are to voice coil motor 102, two
The stator of set Y-direction voice coil motor 103 and four sets of Z-direction gravity compensators 104 is fixed in common board 300；
Two sets of X are fixed to the mover of 102, two sets of Y-direction voice coil motors 103 of voice coil motor and four sets of Z-direction gravity compensators 104
On mover substrate 101；
Stator and the mover relative motion in Z-direction in every set Z-direction gravity compensator 104, and the two carries out magnetic over draft support；
Every set X is to the X in X-Y plane of stator and mover of voice coil motor 102 to relative motion；
Y-direction relative motion of the stator and mover of every set Y-direction voice coil motor 102 in X-Y plane.
In this preferred embodiment, Z-direction gravity compensator 104 is that no Mechanical Contact, nothing are rubbed using the effect of magnetic over draft support
Wipe, without abrasion, without lubrication, low noise, convenient for safeguarding, anti-vibration performance is superior, can quickly adjust in a short period of time, expire
Sufficient platform high dynamic demand, and its rigidity can be adjusted as needed.
Illustrate this preferred embodiment referring to Fig. 1 to Fig. 3, in this preferred embodiment, two sets of X are to 102 He of voice coil motor
Two sets of Y-direction voice coil motors 103 surround rectangular, and two sets of X are oppositely arranged to voice coil motor 102, two sets of Y-direction voice coil motors 103
It is oppositely arranged；
Four sets of Z-direction gravity compensators 104 are uniformly arranged on the outside of the rectangle being encircled into.
In this preferred embodiment, two sets of X make to the arrangement of voice coil motor 102 and two sets of Y-direction voice coil motors 103
Its lower section for being evenly arranged in mover substrate 101 ensure that the stationarity of mover substrate 101, four sets of Z-direction gravity compensators 104
Uniformly it is arranged on the outside of the rectangle being encircled into, further ensures the stationarity of mover substrate 101, to further increases
The positioning accuracy of layer ultra-precise micro displacement platform 100.
Although describing the present invention herein with reference to specific embodiment, it should be understood that, these realities
Apply the example that example is only principles and applications.It should therefore be understood that can be carried out to exemplary embodiment
Many modifications, and can be designed that other arrangements, without departing from spirit of the invention as defined in the appended claims
And range.It should be understood that different appurtenances can be combined by being different from mode described in original claim
Benefit requires and feature described herein.It will also be appreciated that the feature in conjunction with described in separate embodiments can be used
Other embodiments.
Claims (7)
1. the macro box-like long stroke precision movement platform of micro-group, which is characterized in that including upper layer ultra-precise micro displacement platform (100), under
Layer two-dimensional long-stroke macro-moving stage (200) and common board (300), upper layer ultra-precise micro displacement platform (100) and the long row of lower layer's two dimension
Journey macro-moving stage (200) shares common board (300)；
Air supply channel is equipped in common board (300), and its bottom surface is equipped with air bearing nozzle (301), air bearing nozzle (301) and gas supply
Channel connection；
Upper layer ultra-precise micro displacement platform (100), for realizing in X-Y plane two-dimentional short stroke ultraprecise adjustment and the side Z
To short stroke adjustment；
Air bearing connection is carried out between lower layer's two-dimensional long-stroke macro-moving stage (200) and common board (300)；
Lower layer's two-dimensional long-stroke macro-moving stage (200) is also used to realize the two-dimensional long-stroke movement in X-Y plane；
Long stroke refers to 1 meter or more of stroke；
Short stroke refers to millimetre-sized stroke.
2. the box-like long stroke precision movement platform of macro micro-group according to claim 1, which is characterized in that upper layer ultraprecise is micro-
Moving platform (100) includes mover substrate (101), two sets of X to voice coil motor (102), two sets of Y-direction voice coil motors (103) and four sets of Z
To gravity compensator (104)；
Two sets of X are to voice coil motor (102), two sets of Y-direction voice coil motors (103) and four sets of Z-direction gravity compensator (104) settings dynamic
Between submount (101) and common board (300)；
Stator substrate of the common board (300) as upper layer ultra-precise micro displacement platform (100)；
Two sets of X are to voice coil motor (102), for realizing X of the upper layer ultra-precise micro displacement platform (100) in X-Y plane to short row
The adjustment of journey ultraprecise；
Two sets of Y-direction voice coil motors (103), for realizing Y-direction short row of the upper layer ultra-precise micro displacement platform (100) in X-Y plane
The adjustment of journey ultraprecise；
Four sets of Z-direction gravity compensators (104), for completely cut off vibration and to mover substrate (101) Z-direction short stroke adjust and
Support.
3. the box-like long stroke precision movement platform of macro micro-group according to claim 2, which is characterized in that the long row of lower layer's two dimension
Journey macro-moving stage (200) is realized using cored permanent magnetic synchronous plane electromotor motor；Lower layer's two-dimensional long-stroke macro-moving stage (200) packet
Include the Halbach permanent magnet array (202) and coil array group (203) of stator base (201), two-dimensional symmetric distribution；
Iron core yoke plate of the common board (300) also as cored permanent magnetic synchronous plane electromotor motor；
Coil array group (203) is fixed on the lower surface of iron core yoke plate, and the two is collectively as cored permanent magnetic synchronous plane electromotor
The mover of motor；
Halbach permanent magnet array (202) is bonded on stator base (201), and the two is collectively as cored permanent-magnet synchronous
The stator of planar motor；
Electromagnetic energy is converted directly into two-dimensional surface and transported by coil array group (203) and Halbach permanent magnet array (202) interaction
It is dynamic.
4. the box-like long stroke precision movement platform of macro micro-group according to claim 2, which is characterized in that the long row of lower layer's two dimension
Journey macro-moving stage (200) is realized using cored permanent magnetic synchronous plane electromotor motor；
Lower layer's two-dimensional long-stroke macro-moving stage (200) includes the Halbach permanent magnetism battle array of stator base (201), two-dimensional symmetric distribution
Arrange (202) and coil array group (203)；
The Halbach permanent magnet array (202) of two-dimensional symmetric distribution is fixed on the bottom surface of common board (300), and the two is common
Mover as cored permanent magnetic synchronous plane electromotor motor；
Iron core yoke plate of the stator base (201) as cored permanent magnetic synchronous plane electromotor motor；
Coil array group (203) is fixed on stator base (201), and the two is collectively as cored permanent magnetic synchronous plane electromotor electricity
The stator of machine；
Electromagnetic energy is converted directly into two-dimensional surface and transported by Halbach permanent magnet array (202) and coil array group (203) interaction
It is dynamic.
5. the box-like long stroke precision movement platform of macro micro-group according to claim 3 or 4, which is characterized in that coil array
Group (203) is formed by four sets of one-dimensional coil array combinations；
Wherein, two sets of one-dimensional coil arrays are for generating X-direction driving force, and another two sets of one-dimensional coil arrays are for generating Y-direction
Driving force, and two sets of one-dimensional coil arrays for generating equidirectional driving force are distributed in diagonal line.
6. the box-like long stroke precision movement platform of macro micro-group according to claim 2, which is characterized in that two sets of X are to voice coil
The stator of motor (102), two sets of Y-direction voice coil motors (103) and four sets of Z-direction gravity compensators (104) is fixed on common board (300)
On；
Two sets of X are solid to the mover of voice coil motor (102), two sets of Y-direction voice coil motors (103) and four sets of Z-direction gravity compensators (104)
It is scheduled on mover substrate (101)；
Stator and the mover relative motion in Z-direction in every set Z-direction gravity compensator (104), and the two carries out magnetic over draft support；
Every set X is to the X in X-Y plane of stator and mover of voice coil motor (102) to relative motion；
Y-direction relative motion of the stator and mover of every set Y-direction voice coil motor (102) in X-Y plane.
7. the box-like long stroke precision movement platform of macro micro-group according to claim 1, which is characterized in that two sets of X are to voice coil
Motor (102) and two sets of Y-direction voice coil motors (103) are surrounded rectangular, and two sets of X are oppositely arranged to voice coil motor (102), and two sets
Y-direction voice coil motor (103) is oppositely arranged；
Four sets of Z-direction gravity compensators (104) are uniformly arranged on the outside of the rectangle being encircled into.
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Effective date of registration: 20231226 Address after: No. 189 Fangjiadai Road, Gongshu District, Hangzhou City, Zhejiang Province, 310005 Patentee after: HANGZHOU ZHONGYA MACHINERY Co.,Ltd. Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: HARBIN INSTITUTE OF TECHNOLOGY |