CN100553082C - A kind of ultra-thin 3DOF planar motor - Google Patents
A kind of ultra-thin 3DOF planar motor Download PDFInfo
- Publication number
- CN100553082C CN100553082C CN 200610169826 CN200610169826A CN100553082C CN 100553082 C CN100553082 C CN 100553082C CN 200610169826 CN200610169826 CN 200610169826 CN 200610169826 A CN200610169826 A CN 200610169826A CN 100553082 C CN100553082 C CN 100553082C
- Authority
- CN
- China
- Prior art keywords
- motor
- driver element
- group
- coil
- driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Linear Motors (AREA)
Abstract
A kind of ultra-thin 3DOF planar motor belongs to semiconductor equipment field.Satisfy lithographic equipment and simultaneously require high accuracy simultaneously to require high-speed micro displacement workbench executive component for providing a kind of, the invention discloses a kind of ultra-thin 3DOF planar motor, form by coil block and permanent magnet assembly, comprise three groups of driver elements, on individual layer, realize planar 3 degrees of freedom, wherein the driving axis of two groups of driver elements is parallel but do not overlap the 3rd group of drive unit drives axis and preceding two groups quadrature; Every group of driver element comprises the driver element of one or more coils series connection, actuating force direction unanimity, and each driver element contains one along the coil of motor movement plane coiling and two pairs of permanent magnets up and down.Say that from overall performance planar motor of the present invention has compact conformation, thrust is big, precision is high and can integral body realize advantages such as three-degree-of-freedom motion.
Description
Technical field
The present invention relates to a kind of fine motion 3DOF planar motor, relate in particular to a kind of ultra-thin 3DOF planar motor, belong to semiconductor equipment field.
Background technology
The development of integrated circuits process is followed Moore's Law always, that is: the performance of integrated circuit improved 1 times in per 18 months, and characteristic size was dwindled in per 3 years
Doubly.Improving constantly of integrated circuit integrated level and constantly reducing of characteristic size have been brought series of advantages to integrated circuit, as low-power consumption, and low cost and high-performance.Also give semiconductor manufacturing facility, especially lithographic equipment simultaneously, brought revolutionary challenge.Node of the every raising of integrated circuit characteristic size just requires the resolution of lithographic equipment to improve a class.In lithographic equipment, the ultra-precise micro displacement platform with nanoscale motion and positioning accuracy is one of its critical component, and it directly affects the exposure resolution ratio that lithographic equipment can reach.It is generally acknowledged that the positioning accuracy of ultra-precise micro displacement platform should be not less than 1/5 of integrated circuit characteristic size, will reach 1/10 usually.
The silicon chip platform of lithographic equipment and mask platform for realizing the ultraprecise setting movement, coarse motion platform and the multiple degrees of freedom ultra-precise micro displacement platform structure combining forms of adopting on version more.At present, the ultra-precise micro displacement platform has three classes usually, and servomotor is by ball-screw transmission/line slideway support, Piezoelectric Ceramic/flexible hinge support guide and voice coil motor or variable reluctance motor driving/air supporting or magnetic over draft support.
Preceding two kinds of micropositioners are because factor affecting such as the frictional damping of support system is non-linear, can't satisfy all that lithographic equipment is high-speed, the requirement of heavy load, high dynamic characteristic.The micropositioner that adopts voice coil motor/air supporting to support can satisfy the requirement of lithographic equipment, but exists structural integrity poor, and stage body is thicker, the high deficiency of barycenter, and its performance is subjected to certain limitation.
The direct drive-type 3DOF of electromagnetic force planar motor is a kind of by the direct motor that drives with 3DOF motion in the formation plane of 3 groups of electromagnetic forces that preestablish direction.
Control the size of specific direction electromagnetic force by the size of controlling certain coil electric current in 3 groups of coils, make the planar motor mover produce the precision micro-displacement of respective direction.The planar motor mover directly is subjected to 3 groups of produced simultaneously electromagnetic actuation force effects of electromagnetic drive unit.The Electromagnetic Drive element that is converted to the basis with magnetic field energy have noncontact driving, stroke big, do not have advantages such as hysteresis, high response force, Drive Control Technique maturation.
Summary of the invention
The purpose of this invention is to provide and a kind ofly satisfy lithographic equipment and simultaneously require high accuracy simultaneously to require high-speed micro displacement workbench executive component, technical scheme is as follows:
A kind of ultra-thin 3DOF planar motor, described planar motor is made up of coil block and permanent magnet assembly, comprise three groups of driver elements, on individual layer, realize planar 3 degrees of freedom, wherein the driving axis of two groups of driver elements is parallel but do not overlap the 3rd group of drive unit drives axis and preceding two groups quadrature; Every group of driver element comprises the driver element of one or more coils series connection, actuating force direction unanimity, and each driver element contains one along the coil of motor movement plane coiling and two pairs of permanent magnets up and down.
In the present invention, the coil block of described planar motor is to be embedded in the single plane skeleton by the whole coil of planar motor to form; The permanent magnet assembly of described planar motor comprises up and down pair of planar skeleton, and both link and become one, and at the permanent magnet and the iron yoke of the last lower plane skeleton direction embedding corresponding with coil; Described coil block is positioned between the last lower plane skeleton of permanent magnet assembly, and guarantees the gap.
In the present invention, described permanent magnet is arranged in two sides of the effective driving direction of coil, and pole orientation is opposite, and is fixed on the iron yoke, forms magnetic confining field.
As one embodiment of the present invention, described planar motor can comprise three driver elements, wherein two driver elements are independently, form first group and second group of driver element respectively, when two coils in these two driver elements pass to the equidirectional electric current, motor is realized the Y direction translational, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; The 3rd driver element is as the 3rd group of driver element, in order to realize the translation of motor directions X.
As one embodiment of the present invention, described planar motor can comprise four driver elements, wherein two driver elements are independently, form first group and second group of driver element respectively, when the coil in these two driver elements passes to the equidirectional electric current, motor is realized the Y direction translational, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element diagonal angle is arranged, and two driver element coil series connection or independent, forms the 3rd group of driver element, in order to realize the translation of motor directions X.
As one embodiment of the present invention, described planar motor can comprise four driver elements, wherein two driver elements are independently, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the Y direction translational, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element symmetric arrangement, and two driver element coil series connection or independent form the 3rd group of driver element, in order to realize the translation of motor directions X.
As one embodiment of the present invention, described planar motor can comprise five driver elements, wherein coil series connection in twos in four driver elements, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the directions X translation, and when the coil in these two groups of driver elements passed to current in opposite, motor was realized the rotation around the Z axle; The another one driver element forms the 3rd group of driver element, in order to realize motor Y direction translational.
As one embodiment of the present invention, described planar motor can comprise six driver elements, wherein coil series connection in twos in four driver elements, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the directions X translation, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element coil series connection forms the 3rd group of driver element, in order to realize motor Y direction translational.
The advantage of planar motor of the present invention is: all coils of described planar motor is all in the skeleton coiling of same plane, and all permanent magnets are installed in respectively in two plane skeletons, cause planar motor to have superthin structure, and structural integrity is good.Described planar motor is respectively arranged a pair of permanent magnet up and down at two sides of the effective driving direction of coil, and increases the iron yoke, causes planar motor magnetic circuit closure, and it is bigger that unitary current produces thrust, and Linearity is more excellent between input current and the thrust output.Described planar motor can comprise two driver elements at least at directions X, causes planar motor to increase in directions X thrust, to satisfy the quick stepping requirement of mask aligner; Described planar motor mover light weight inertia is little, causes planar motor to possess the high speed of realizing, the high possibility of quickening.Say that from overall performance planar motor of the present invention has compact conformation, thrust is big, precision is high and can integral body realize advantages such as three-degree-of-freedom motion.
Description of drawings
Fig. 1 is the graphics of the single driver element of 3DOF planar motor of the present invention.
Fig. 2 is the magnetic circuit figure of the single driver element of 3DOF planar motor of the present invention.
Fig. 3 arranges schematic diagram for first embodiment of 3DOF planar motor of the present invention.
Fig. 4 is second embodiment graphics of 3DOF planar motor of the present invention.
Fig. 5 is second embodiment three-dimensional, exploded view of 3DOF planar motor of the present invention.
Fig. 6 is second embodiment three-dimensional micromodule of 3DOF planar motor of the present invention exploded view.
Fig. 7 a to Fig. 7 c has shown three kinds of operating states of second embodiment of 3DOF planar motor of the present invention.
Fig. 8 arranges schematic diagram for the 3rd embodiment of 3DOF planar motor of the present invention.
Fig. 9 arranges schematic diagram for the 4th embodiment of 3DOF planar motor of the present invention.
Figure 10 arranges schematic diagram for the 5th embodiment of 3DOF planar motor of the present invention.
Figure 11 arranges schematic diagram for the 6th embodiment of 3DOF planar motor of the present invention.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing.
To shown in Figure 6, ultra-thin 3DOF planar motor of the present invention is made up of coil block 1 and permanent magnet assembly 2 as Fig. 1.In the present invention, whole coils embeds in the single plane skeleton, as coil block 1.Permanent magnet assembly 2 comprises upper and lower plane skeleton, and both link and become one, and last lower plane skeleton and coil counterparty are to embedding permanent magnet and iron yoke.Coil block 1 is positioned on the permanent magnet assembly 2 between the lower plane skeleton, and guarantees suitable gap.In actual applications, according to the structure of micropositioner, can the selection wire coil assembly as stator or as mover.Described planar motor comprises three groups of driver elements, realizes planar 3 degrees of freedom on individual layer, and wherein the driving axis of two groups of driver elements is parallel but do not overlap the 3rd group of drive unit drives axis and preceding two groups quadrature; Every group of driver element comprises the driver element of one or more coil series connection, actuating force direction unanimity.
As shown in Figure 1, ultra-thin each driver element of 3DOF planar motor of the present invention all comprises one along the coil of motor movement plane coiling and two pairs of permanent magnets up and down, described permanent magnet is arranged in two sides of the effective driving direction of coil, and permanent magnet and coil keep suitable gap.Permanent magnet is fixed on the iron yoke (permanent magnet and iron yoke all with last lower plane skeletal fixation) up and down, and described iron yoke guiding magnetic circuit is closure state, improving the thrust that unitary current produces, and improves the linearity between input current and the power output.
As shown in Figure 2, each driver element magnetic circuit of 3DOF planar motor of the present invention all is closure state.Magnetic field arranges that by two pairs of magnetic poles opposite permanent magnet produces, and acts on two sides of the effective driving direction of coil, and magnetic field magnetic flux density direction remains vertical with the direction of the winding current.
As shown in Figure 3, ultra-thin 3DOF planar motor first embodiment of the present invention comprises three groups of driver elements, and every group of driver element only comprises a driver element.Wherein first drive unit drives 45 forms first group and second group of driver element respectively with the 3rd driver element 47 parallel axes but do not overlap, and second driver element, 46 driving directions and the above two quadratures form the 3rd group of driver element.Second driver element 46 is in order to realize motor Y direction translational, and first driver element 45, the 3rd driver element 47 work alone, when the two coil passes to the equidirectional electric current, in order to realize the translation of motor directions X, when passing to current in opposite, produce moment loading, motor is realized rotating around the Z axle.
3DOF planar motor second embodiment of the present invention such as Fig. 4-shown in Figure 6.Coil block 1 comprises coil rack 5 and embeds in the coil rack 5, and it is axially perpendicular to first coil 6, second coil 7, tertiary coil 8 and the 4th coil 9 of coil rack 5 upper surfaces.First coil 6 and the tertiary coil 8 that are located at two diagonal positions can be connected or work alone, and form the 3rd group of driver element, and second coil 7 and the 4th coil 9 form first group and second group of driver element respectively.Permanent magnet assembly 2 comprises plane skeleton 3, lower plane skeleton 4, below eight permanent magnets 10, following four iron yokes 18, above eight permanent magnets 22, top four iron yokes 30, and connector 34.Last plane skeleton 3, lower plane skeleton 4, above four iron yokes 30, below four iron yokes 18 be fixedly connected by connector 34, above eight permanent magnets 22, following eight permanent magnets 10 be bonded and fixed at top four iron yokes 30 respectively, below on four iron yokes 18.
Shown in Fig. 7 a-Fig. 7 c, 3DOF planar motor of the present invention is based on lorentz principle work.Coil block 1 current i direction, permanent magnet assembly 2 magnetic flux density E directions, and it is vertical in twos to produce electromagnetic force F direction three.When 8 series connection of first coil 6 and tertiary coil and when passing to DC power supply, vertically pass embedded part of coil magnetic field because permanent magnet assembly 2 produces, and form closed magnetic path, will produce electromagnetic force shown in Fig. 7 a.The direction of the direction of electromagnetic force F and hot-wire coil current i and the direction of magnetic flux density E are vertical mutually, cause planar motor to realize the directions X translation.When second coil 7 and the work of the 4th coil 9, and when passing to the equidirectional DC power supply, planar motor is realized the Y direction translational, shown in Fig. 7 b.And when second coil 7 and the 4th coil 9 passed to the rightabout DC power supply, permanent magnet assembly 2 suffered two electromagnetic force F produced moments, and planar motor will be realized rotation, shown in Fig. 7 c.
With first embodiment is basic model, and 3DOF planar motor of the present invention can derive various configuration modes, and various configuration modes all comprise three groups of driver elements.Fig. 8 to Figure 10 has shown several typical configuration modes, but the present invention is not limited to this.
Fig. 8 arranges schematic diagram for the 3rd embodiment of 3DOF planar motor of the present invention, this embodiment adopts four driver elements, wherein second driver element 46 and 4 wheel driven moving cell 48 coils series connection or independent, form the 3rd group of driver element, coil passes to the equidirectional electric current, and drive motors is realized the directions X translation; First driver element 45,47 of the 3rd driver elements work alone, and form first group and second group of driver element respectively, and the two coil passes to the equidirectional electric current, and drive motors is realized the Y direction translational; The two coil passes to current in opposite, realizes rotating around the Z axle.
Fig. 9 arranges schematic diagram for the 4th embodiment of 3DOF planar motor of the present invention.This embodiment adopts five driver elements.Wherein the 3rd driver element 47 is as the 3rd group of driver element, and drive motors is realized the Y direction translational.First driver element 45 and the series connection of second driver element, 46 coils, as first group of driver element, 4 wheel driven moving cell 48 and the series connection of the 5th driver element 49 coils, as second group of driver element, first group and second group of driver element work alone, the two coil passes to the equidirectional electric current, and drive motors is realized the directions X translation; The two coil passes to current in opposite, realizes rotating around the Z axle.
Figure 10 arranges schematic diagram for the 5th embodiment of 3DOF planar motor of the present invention.This embodiment adopts six driver elements.Wherein the 3rd driver element 47 and 4 wheel driven moving cell 48 coils series connection, as the 3rd group of driver element, drive motors is realized the Y direction translational.First driver element 45 and the series connection of second driver element, 46 coils, as first group of driver element, the 5th driver element 49 and the series connection of the 6th driver element 50 coils, as second group of driver element, first group and second group of driver element work alone, the two coil passes to the equidirectional electric current, and drive motors is realized the directions X translation; The two coil passes to current in opposite, realizes rotating around the Z axle.
Figure 11 arranges schematic diagram for the 6th embodiment of 3DOF planar motor of the present invention.This embodiment adopts six driver elements.Wherein second driver element 46 and the 5th driver element 49 coils series connection, as the 3rd group of driver element, drive motors is realized the Y direction translational.First driver element 45 and the series connection of 4 wheel driven moving cell 48 coils, as first group of driver element, the 3rd driver element 47 and the series connection of the 6th driver element 50 coils, as second group of driver element, first group and second group of driver element work alone, the two coil passes to the equidirectional electric current, and drive motors is realized the directions X translation; The two coil passes to current in opposite, realizes rotating around the Z axle.
Claims (7)
1. ultra-thin 3DOF planar motor, described planar motor is made up of coil block and permanent magnet assembly, it is characterized in that: described planar motor comprises three groups of driver elements, on individual layer, realize planar 3 degrees of freedom, wherein the driving axis of two groups of driver elements is parallel but do not overlap the 3rd group of drive unit drives axis and preceding two groups quadrature; Every group of driver element comprises the driver element of one or more coils series connection, actuating force direction unanimity, and each driver element contains one along the coil of motor movement plane coiling and two pairs of permanent magnets up and down; The coil block of described planar motor is to be embedded in the single plane skeleton by the whole coil of planar motor to form; The permanent magnet assembly of described planar motor comprises the skeleton of pair of planar up and down that is unified into to one, and the permanent magnet and the iron yoke that embed in the last lower plane skeleton direction corresponding with coil; Described coil block is between permanent magnet assembly, and the assurance gap.
2. planar motor according to claim 1 is characterized in that: the described up and down two pairs of permanent magnets are arranged in two sides of the effective driving direction of coil, and the pole orientation of two pairs of permanent magnets is opposite, and is fixed on the iron yoke, forms magnetic confining field.
3. planar motor according to claim 1, it is characterized in that: described planar motor comprises three driver elements, wherein two driver elements are independently, form first group and second group of driver element respectively, when two coils in these two driver elements pass to the equidirectional electric current, motor is realized the Y direction translational, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; The 3rd driver element is as the 3rd group of driver element, in order to realize the translation of motor directions X.
4. planar motor according to claim 1, it is characterized in that: described planar motor comprises four driver elements, wherein two driver elements are independently, form first group and second group of driver element respectively, when the coil in these two driver elements passes to the equidirectional electric current, motor is realized the Y direction translational, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element diagonal angle is arranged, and two driver element coil series connection or independent, forms the 3rd group of driver element, in order to realize the translation of motor directions X.
5. planar motor according to claim 1 is characterized in that: described planar motor comprises four driver elements,
Wherein two driver elements are independently, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the Y direction translational, when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element symmetric arrangement, and two driver element coil series connection or independent form the 3rd group of driver element, in order to realize the translation of motor directions X.
6. planar motor according to claim 1, it is characterized in that: described planar motor comprises five driver elements, wherein coil series connection in twos in four driver elements, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the directions X translation, and when the coil in these two groups of driver elements passed to current in opposite, motor was realized the rotation around the Z axle; The another one driver element forms the 3rd group of driver element, in order to realize motor Y direction translational.
7. planar motor according to claim 1, it is characterized in that: described planar motor comprises six driver elements, wherein coil series connection in twos in four driver elements, form first group and second group of driver element respectively, when the coil in these two groups of driver elements passes to the equidirectional electric current, motor is realized the directions X translation, and when two coils in these two driver elements passed to current in opposite, motor was realized the rotation around the Z axle; Two other driver element coil series connection forms the 3rd group of driver element, in order to realize motor Y direction translational.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610169826 CN100553082C (en) | 2006-12-29 | 2006-12-29 | A kind of ultra-thin 3DOF planar motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610169826 CN100553082C (en) | 2006-12-29 | 2006-12-29 | A kind of ultra-thin 3DOF planar motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1996726A CN1996726A (en) | 2007-07-11 |
| CN100553082C true CN100553082C (en) | 2009-10-21 |
Family
ID=38251699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610169826 Active CN100553082C (en) | 2006-12-29 | 2006-12-29 | A kind of ultra-thin 3DOF planar motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100553082C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101610022B (en) * | 2009-07-21 | 2012-05-30 | 清华大学 | Planar motor adopting groove-type coil |
| CN102545528B (en) * | 2010-12-30 | 2015-01-21 | 上海微电子装备有限公司 | Planar motor and reticle stage system applying same |
| CN102136301B (en) * | 2011-03-10 | 2012-08-22 | 清华大学 | Three-DOF (degree of freedom) positioning device |
| CN102270908B (en) * | 2011-07-22 | 2013-04-17 | 华中科技大学 | Planar motor in double-shaft decoupling structure |
| CN105720782A (en) * | 2016-04-21 | 2016-06-29 | 哈尔滨理工大学 | Linear motor capable of rotating and freely moving in plane |
-
2006
- 2006-12-29 CN CN 200610169826 patent/CN100553082C/en active Active
Non-Patent Citations (2)
| Title |
|---|
| 永磁同步平面电动机三自由度运动控制器. 曹家勇，朱煜，汪劲松，尹文生，段广洪，王春洪.中国电机工程学报，第26卷第17期. 2006 |
| 永磁同步平面电动机三自由度运动控制器. 曹家勇，朱煜，汪劲松，尹文生，段广洪，王春洪.中国电机工程学报，第26卷第17期. 2006 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1996726A (en) | 2007-07-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Trumper et al. | Magnet arrays for synchronous machines | |
| CN100507724C (en) | 6 freedom degree micromotion operating platform | |
| CN102681364B (en) | Six-degree-of-freedom magnetic suspension micro-positioner | |
| CN100479985C (en) | XYZ-axes table | |
| CN100553082C (en) | A kind of ultra-thin 3DOF planar motor | |
| CN100521468C (en) | Permanent-magnet synchronous planar motor | |
| US20160380524A1 (en) | Flat voice coil motor | |
| CN101075098A (en) | Ultrathin triple-freedom inching work table | |
| CN106891306B (en) | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure | |
| CN103226295A (en) | Lithography machine silicon wafer bench micro-motion workbench | |
| CN101978585A (en) | Multi-degree-of-freedom actuator and stage device | |
| CN101741289B (en) | Short stroke multiple freedom degree magnetic levitation planar motor | |
| CN104122759A (en) | Planar motor driven magnetic suspension coarse/micro motion integrated reticle stage | |
| CN107659208B (en) | Two-dimensional linear moving-iron type micro-angular displacement electromagnetic activation device and its actuation method | |
| CN101741290A (en) | Magnetic suspension inching platform with six degrees of freedom | |
| CN103383526A (en) | Coarse/precision laminated workbench | |
| CN102130567A (en) | Voice coil motor | |
| CN100592610C (en) | Dynamic magnetic synchronous surface motor | |
| CN109870881A (en) | The macro box-like long stroke precision movement platform of micro-group | |
| CN101610022A (en) | A kind of planar motor that adopts groove-type coil | |
| CN205544874U (en) | Receive positioner a little and voice coil motor thereof | |
| CN101752983A (en) | Long-travel high-accuracy multiple-degree-of-freedom planar motor | |
| CN106300874B (en) | A kind of multiple degrees of freedom long stroke linear motor | |
| CN102163572B (en) | Six-degree-of-freedom locating device | |
| CN107925336A (en) | Transverse magnetic flux linear electric machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20151112 Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University |