CN103383526A - Coarse/precision laminated workbench - Google Patents
Coarse/precision laminated workbench Download PDFInfo
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- CN103383526A CN103383526A CN2013101534088A CN201310153408A CN103383526A CN 103383526 A CN103383526 A CN 103383526A CN 2013101534088 A CN2013101534088 A CN 2013101534088A CN 201310153408 A CN201310153408 A CN 201310153408A CN 103383526 A CN103383526 A CN 103383526A
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Abstract
A coarse/precision laminated workbench is mainly applied in semiconductor photoetching equipment. The workbench provided by the invention contains a first electromagnetism driver module for driving a precision stage to rotate around the Z axis in the X,Y directions in a horizontal plane and a second electromagnetism driver module for driving the precision stage to rotate around the X, Y axis in the Z direction. There are respectively four groups of the first and second electromagnetism driver modules. Four first electromagnetism driver modules and four second electromagnetism driver modules are arranged alternatingly. A permanent magnet, a yoke and a permanent magnet framework of each first electromagnetism driver module and a permanent magnet and a permanent magnet framework of each second electromagnetism driver module together form a runner part of the precision stage. Coils, coil skeletons and microchecker bases of the four first electromagnetism driver modules and the four second electromagnetism driver modules together form a stator part of the precision stage. The coarse/precision laminated workbench provided by the invention has a simpler and more compact structure, is centroid driven and has small inertia of the runner of the microchecker.
Description
Technical field
The present invention relates to the moving platform of a kind of essence, relate in particular to the moving platform of a kind of six degree of freedom essence, be mainly used in semiconductor lithography equipment, belong to ultraprecise processing and checkout equipment technical field.
Background technology
The moving platform of essence with high precision and response fast has extremely important status in Modern Manufacturing Technology, be regarded as the important symbol of a national hi-tech development level.In ultra-precision machine tool, the moving platform of ultraprecise essence is used for feed system is carried out error compensation, realizes ultraprecise processing; In large scale integrated circuit was made, the moving platform of ultraprecise essence was used for lithographic equipment and carries out microposition and little feeding; In scanning probe microscopy, the moving platform of ultraprecise essence is used for measuring sample surface morphology, carries out nanoprocessing; Aspect bioengineering, the moving platform of ultraprecise essence is used for completing the operation to cell, realizes biological operation through engineering approaches; Aspect medical science, the moving platform of ultraprecise essence is used for microsurgery, in order to alleviate doctor's burden, shortens operating time, improves success ratio.The moving platform of ultraprecise essence also is widely used in fiber alignment, the processing of MEMS system, encapsulation and assembling, and in the galvanochemistry processing and other fields.
In semiconductor lithography equipment, photo-etching machine silicon chip platform and mask platform adopt thick smart rhythmo structure mostly, comprise a moving platform of ultraprecise essence.This micropositioner is superimposed on the coarse motion platform, is used for the coarse motion platform is carried out accuracy compensation.The moving platform bearing accuracy of essence has determined the exposure accuracy of litho machine, and movement velocity has determined the production efficiency of litho machine.Therefore, the developed countries such as the U.S., Japan, Europe all are considered as one of litho machine core technology to the moving platform technology of ultraprecise essence, and China's Related product is carried out strict restriction of import.
Summarize the moving platform present Research of at present domestic and international nanoscale essence, ultra-precision stage has three classes usually, servomotor supports the moving platform of essence by ball-screw-transmission/line slideway, Piezoelectric Ceramic/moving platform of flexible hinge support guide essence, and voice coil motor or variable reluctance motor driving/air supporting or the moving platform of magnetic over draft support essence.
Front two kinds of micropositioners are due to the factors such as the frictional damping of support system is non-linear impact, can't satisfy all that lithographic equipment is high-speed, the requirement of heavy load, high dynamic perfromance.The micropositioner that adopts voice coil motor/air supporting to support can satisfy the requirement of lithographic equipment, but exists structural integrity poor, and stage body is thicker, the high deficiency of barycenter, and its performance is subject to certain limitation.
Tsing-Hua University has applied for the moving platform (application number: 200710118130.5) of a kind of 6DOF essence on June 29th, 2007, a kind of moving platform of six degree of freedom essence that is applied in photo-etching machine silicon chip platform is provided, employing without the voice coil motor of frictional damping as drives structure, although greatly improved bearing accuracy, but this structural volume is large, structure is not compact, can not adapt to well the needs of double-platform switching system.
Summary of the invention
The present invention aims to provide a kind of thick smart fold layer worktable that can be applicable in photo-etching machine silicon chip platform, the characteristics such as make that it has that volume is little, compact conformation, barycenter drive, and micropositioner mover inertia is little.
Technical scheme of the present invention is as follows:
A kind of thick smart fold layer worktable contains the moving platform of an essence and a coarse motion platform, and it is characterized in that: described stacking workbench also comprises a counterbalance weight and four isolators; Described coarse motion platform contains a coarse motion platform skeleton, four moving-iron type electromagnetic force driver modules and four air-bearings; The moving platform of described essence is arranged on the centre position of coarse motion platform skeleton, the moving platform stator skeleton of essence and coarse motion platform skeleton link together, described four air-bearings are arranged on four jiaos of coarse motion platform skeleton, and form air film with the counterbalance weight upper surface, support coarse motion platform mover part and move along the counterbalance weight upper surface; Arrange four isolators on angle, four of the belows of counterbalance weight; Wherein two moving-iron type electromagnetic force driver modules are arranged on the center line of coarse motion platform along X-direction, and are arranged symmetrically with about Y-axis, and two other moving-iron type electromagnetic force driver module is arranged on the center line of coarse motion platform along Y direction, and is arranged symmetrically with about X-axis; Each moving-iron type electromagnetic force driver module comprises permanent magnet assembly and long loop assembly two parts, permanent magnet assembly is comprised of main permanent magnet, attached permanent magnet and permanent magnet skeleton, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of permanent magnet skeleton with the Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, form closed magnetic path between each permanent magnet, this permanent magnet assembly is fixed on the bottom surface of coarse motion platform skeleton by the permanent magnet skeleton, and places along the edge direction of coarse motion platform skeleton; Each long loop assembly is lain in a horizontal plane in the deep trouth of counterbalance weight side by side by at least three elongated rectangular coils, and the long loop assembly leaves the gap with corresponding permanent magnet assembly.
A kind of thick smart fold layer worktable of the present invention, it is characterized in that: the moving platform of described essence comprises a wafer-supporting platform, the moving platform mover skeleton of essence, the moving platform stator skeleton of essence, and four the first electromagnetic force driver modules and four the second electromagnetic force driver modules; Four sides of described wafer-supporting platform are mirror surface, and mirror surface is vertical with surface level, and adjacent two mirror surfaces are orthogonal; Wherein two electromagnetic force driver modules of described the first electromagnetic force driver module are arranged symmetrically with about Y-axis along X-axis, and two other electromagnetic force driver module is arranged symmetrically with about X-axis along Y-axis; Described the second electromagnetic force driver module is arranged in four quadrants of the moving platform stator skeleton of essence, four the second electromagnetic force driver modules and four alternate layouts of the first electromagnetic force driver module; Each the first electromagnetic force driver module and each the second electromagnetic force driver module comprise an electromagnetic force driver element at least, and each electromagnetic force driver element is made of permanent magnet, yoke, permanent magnet skeleton, hot-wire coil and coil rack; The moving platform mover skeleton of the permanent magnet of the permanent magnet of four the first electromagnetic force driver modules and yoke, four the second electromagnetic force driver modules and yoke and essence forms the mover part of the moving platform of essence jointly; The moving platform stator skeleton of the hot-wire coil of four the first electromagnetic force driver module machines, four the second electromagnetic force driver modules and coil rack and essence forms the stationary part of the moving platform of essence jointly; Mover part and the stationary part of the moving platform of described essence are arranged in below wafer-supporting platform, and the mover partial fixing of wafer-supporting platform and the moving platform of essence together.
Technical characterictic of the present invention also is: the permanent magnet skeleton of described coarse motion platform skeleton and moving-iron type electromagnetic force driver module adopts carbon fiber to add aluminum honeycomb material and processes.
A kind of thick smart fold layer worktable of the present invention is characterized in that: the permanent magnet of the moving platform the first electromagnetic force driver module of essence comprises up and down two parts set of permanent magnets, and hot-wire coil and leaves the gap between two parts set of permanent magnets of up and down; Every part set of permanent magnets is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of yoke with the Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, forms closed magnetic path between each permanent magnet.
The permanent magnet of the moving platform the second electromagnetic force driver module of essence comprises outer magnetic ring and internal magnetic ring, and the axis of outer magnetic ring and internal magnetic ring is along the Z-direction coaxial arrangement, and outer magnetic ring is identical with the internal magnetic ring magnetizing direction, radially and by the annulus outside surface points to the center of circle; Hot-wire coil is cylindrical coil, between internal magnetic ring and outer magnetic ring, and with interior outer magnetic ring coaxial arrangement; Also be furnished with a gravitational equilibrium magnetic post on the central axis of the second electromagnetic force driver element, the axis of this gravitational equilibrium magnetic post is coaxial with interior outer magnetic ring along Z-direction, and is fixed on the moving platform stator skeleton of essence, and its magnetizing direction is along Z-direction.
The advantage of the moving platform of essence of the present invention is: thick smart fold layer worktable adopts parallel-connection structure to realize six-freedom motion, have the advantages such as volume is little, compact conformation, barycenter driving, micropositioner adopts electromagnetic force directly to drive, therefore there is not mechanical friction, undamped has higher displacement resolution; Coarse motion platform drive motor adopts the elongated rectangular coil groups, under the prerequisite that does not affect kinematic accuracy, has avoided the manufacturing difficulty of extensive halbach magnetic steel array, has increased again the drive motor stroke; The moving stylobate of essence is in lorentz principle work, and linear between thrust output and input current, movement control technology is ripe.The use of silicon carbide ceramic part has improved system performance greatly, and catoptron is integrated on housing, has both reduced the part number, has reduced again the high-precision requirement of mirror assembly assembling.
Description of drawings
The tomograph of a kind of thick smart fold layer worktable that Fig. 1 provides for invention.
Fig. 2 is the tomograph that removes a kind of thick smart fold layer worktable of wafer-supporting platform provided by the invention.
Fig. 3 is that moving-iron type electromagnetic force driver module of the present invention adopts the arrangement of four groups.
Fig. 4 is moving-iron type electromagnetic force the 4th driver module provided by the invention (cut-open view).
In figure: the 1-wafer-supporting platform; The 2-counterbalance weight; 3-coarse motion platform skeleton; The 4-air-bearing; The 5-isolator; 7a-moving-iron type electromagnetic force the first driver module; 7b-moving-iron type electromagnetic force the second driver module; 7c-moving-iron type electromagnetic force the 3rd driver module; 7d-moving-iron type electromagnetic force the 4th driver module; 8-the first electromagnetic force driver module; 9-the second electromagnetic force driver module; The moving platform stator skeleton of 10-essence; 11-permanent magnet skeleton; The moving platform mover skeleton of 12-essence; 15-moving-iron type electromagnetic force driver module coil block, the main permanent magnet of 16-first, the main permanent magnet of 17-second, the attached permanent magnet of 18-first; The attached permanent magnet of 19-second.
Embodiment
Fig. 1 is the tomograph of a kind of thick smart fold layer worktable provided by the invention.This worktable contains the moving platform of essence, coarse motion platform, counterbalance weight 2 and isolator 5.the moving platform of essence and coarse motion platform lamination are placed on the counterbalance weight upper surface, the moving platform of essence is by a wafer-supporting platform 1, the moving platform mover skeleton 12 of essence, the moving platform stator skeleton 10 of essence and electromagnetic force driver module form, described wafer-supporting platform 1 is fixed on the top of the moving platform mover skeleton 12 of essence, the electromagnetic force driver module of the moving platform of essence comprises that four groups can be realized in surface level along directions X, Y-direction and rotate the first electromagnetic force driver module 8 of three degree of freedom motion and four groups around Z axis and realize that the moving platforms of essence are along the Z direction, the second electromagnetic force driver module 9 of the motion of the three degree of freedom that rotates and rotate around Y-axis around X-axis, this electromagnetic force driver module is respectively square and is distributed on the moving platform of essence, and the first electromagnetic force driver module 8 and the second electromagnetic force driver module 9 are spaced apart, described four groups of the first electromagnetic force driver modules 8 and four groups of the second electromagnetic force driver modules 9 be moving-iron type Lorentz motor, the magnet steel partial fixing of each electromagnetic force driver element is on the moving platform mover skeleton 12 of essence, the coiler part of each electromagnetic force driver element is fixed on the moving platform stator skeleton 10 of essence, minute surface is processed in the bottom surface of the moving platform mover skeleton 12 of essence, as the catoptron use of laser interferometer.
The permanent magnet of the first electromagnetic force driver module 8 comprises up and down two parts set of permanent magnets, and hot-wire coil and leaves the gap between two parts set of permanent magnets of up and down; Every part set of permanent magnets is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of yoke with the Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, forms closed magnetic path between each permanent magnet.The permanent magnet of the second electromagnetic force driver module 9 comprises outer magnetic ring and internal magnetic ring, and the axis of outer magnetic ring and internal magnetic ring is along the Z-direction coaxial arrangement, and outer magnetic ring is identical with the internal magnetic ring magnetizing direction, radially and by the annulus outside surface points to the center of circle; Hot-wire coil is cylindrical coil, between internal magnetic ring and outer magnetic ring, and with interior outer magnetic ring coaxial arrangement; Also be furnished with a gravitational equilibrium magnetic post on the central axis of the second electromagnetic force driver element, the axis of this gravitational equilibrium magnetic post is coaxial with interior outer magnetic ring along Z-direction, and is fixed on the moving platform stator of essence, and its magnetizing direction is along Z-direction.
the coarse motion platform contains coarse motion platform skeleton 3, four air-bearings 4 and four groups of moving-iron type electromagnetic force driver modules, the moving platform of essence is arranged on the center of coarse motion platform skeleton 3, coarse motion platform skeleton 3 adopts carbon fiber to add aluminum honeycomb material and processes, characteristics with the light and high mode of quality, stationary part and the coarse motion platform skeleton 3 of the moving platform of essence link together, four air-bearings 4 are separately positioned on four angles of coarse motion platform skeleton 3, these four air-bearing 4 bottom surfaces and counterbalance weight 2 upper surfaces form the air film that one deck has certain rigidity, support the mover part of coarse motion platform and do frictionless motion along counterbalance weight 2 upper surfaces, arrange four isolators 5 on below counterbalance weight 2 four jiaos, avoid other vibrations that ground is transmitted that kinematic system is exerted an influence.Described moving-iron type electromagnetic force driver module is respectively moving-iron type electromagnetic force the first driver module 7a, moving-iron type electromagnetic force the second driver module 7b, moving-iron type electromagnetic force the 3rd driver module 7c and moving-iron type electromagnetic force the 4th driver module 7d.Each group moving-iron type electromagnetic force driver module is realized the motion of two degree of freedom; Four groups of moving-iron type electromagnetic force driver modules, wherein electromagnetic force the first driver module 7a and moving-iron type electromagnetic force the 3rd driver module 7c are arranged in the center line of coarse motion platform along Y direction, and be arranged symmetrically with about X-axis, moving-iron type electromagnetic force the second driver module 7b and moving-iron type electromagnetic force the 4th driver module 7d are arranged in the center line of coarse motion platform along X-direction in addition, and be arranged symmetrically with about Y-axis, as shown in Figure 4.This arrangement has avoided making the difficulty of large-scale halbach magnetic steel array, and is conducive to the heat radiation of motor coil, is the motor arrangement scheme of relatively optimizing.
moving-iron type electromagnetic force driver module comprises permanent magnet assembly and coil block two parts, permanent magnet assembly is by the first main permanent magnet 16, the second main permanent magnet 17, the first attached permanent magnet 18 and the second attached permanent magnet 19 form, as shown in Figure 4, be followed successively by the first attached permanent magnet 18 along the directions X order, the first main permanent magnet 16, the second attached permanent magnet 19 and the second main permanent magnet 17, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of permanent magnet skeleton 11 with the Halbach array format, magnetizing direction as shown in Figure 4, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, form closed magnetic path between each permanent magnet, the permanent magnet skeleton 11 of moving-iron type electromagnetic force driver module adopts carbon fiber to add aluminum honeycomb material and processes, have quality light, the characteristics that mode is high, moving-iron type electromagnetic force driver module coil block is positioned at permanent magnet one side, and leaves the gap, electromagnetic force the first driver module 7a and moving-iron type electromagnetic force the 3rd driver module 7c, realize the coarse motion platform along Y-axis and Z-direction translation and rotatablely move around X-axis and Z-direction, moving-iron type electromagnetic force the second driver module 7b and moving-iron type electromagnetic force the 4th driver module 7d realize that the coarse motion platform rotatablely moves along the translation of X-direction and Z-direction with around Y-axis and Z-direction.
The below introduces the principle of work of this thick smart fold layer worktable.The moving platform of essence is the precise motion assembly of a six degree of freedom, but the high precision of implementation space six-freedom degree, the motion of little stroke precision, the motion of large stroke is responsible for by the coarse motion platform, this coarse motion platform is driven by four groups of moving-iron type electromagnetic forces the first driver module, can be along realizing moving in surface level at counterbalance weight 2 upper surfaces.As shown in Figure 3, when moving-iron type electromagnetic force the first driver module 7a and the logical equidirectional electric current of moving-iron type electromagnetic force the 3rd driver module 7c, realize that the coarse motion platform moves along directions X, when moving-iron type electromagnetic force the second driver module 7b and the logical equidirectional electric current of moving-iron type electromagnetic force the 4th driver module 7d, realize that the coarse motion platform moves along Y-direction; When moving-iron type electromagnetic force the first driver module 7a and the logical current in opposite of moving-iron type electromagnetic force the 3rd driver module 7c, or when moving-iron type electromagnetic force the second driver module 7b and the logical current in opposite of moving-iron type electromagnetic force the 4th driver module 7d, realize that the coarse motion platform moves around the Z direction rotation.
Claims (4)
1. a thick smart fold layer worktable, contain the moving platform of an essence and a coarse motion platform, and it is characterized in that: described stacking workbench also comprises a counterbalance weight (2) and four isolators (5); Described coarse motion platform contains a coarse motion platform skeleton (3), four moving-iron type electromagnetic force driver modules and four air-bearings (4); The moving platform of described essence is arranged on the centre position of coarse motion platform skeleton (3), the moving platform stator skeleton (10) of essence links together with coarse motion platform skeleton (3), described four air-bearings (4) are arranged on four jiaos of coarse motion platform skeleton (3), and form air film with counterbalance weight (2) upper surface, support coarse motion platform mover part and move along counterbalance weight (2) upper surface; Arrange four isolators (5) on angle, four of the belows of counterbalance weight (2); Wherein two moving-iron type electromagnetic force driver modules are arranged on the center line of coarse motion platform along X-direction, and are arranged symmetrically with about Y-axis, and two other moving-iron type electromagnetic force driver module is arranged on the center line of coarse motion platform along Y direction, and is arranged symmetrically with about X-axis; Each moving-iron type electromagnetic force driver module comprises permanent magnet assembly and long loop assembly two parts, permanent magnet assembly is comprised of main permanent magnet, attached permanent magnet and permanent magnet skeleton, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of permanent magnet skeleton with the Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, form closed magnetic path between each permanent magnet, this permanent magnet assembly is fixed on the bottom surface of coarse motion platform skeleton (3) by the permanent magnet skeleton, and places along the edge direction of coarse motion platform skeleton (3); Each long loop assembly is lain in a horizontal plane in the deep trouth of counterbalance weight (2) side by side by at least three elongated rectangular coils, and the long loop assembly leaves the gap with corresponding permanent magnet assembly.
2. a kind of thick smart fold layer worktable as claimed in claim 1, it is characterized in that: the moving platform of described essence comprises a wafer-supporting platform (1), the moving platform mover skeleton (6) of essence, the moving platform stator skeleton (10) of essence, and four the first electromagnetic force driver modules (8) and four the second electromagnetic force driver modules (9); Four sides of described wafer-supporting platform (1) are mirror surface, and mirror surface is vertical with surface level, and adjacent two mirror surfaces are orthogonal; Wherein two electromagnetic force driver modules of described the first electromagnetic force driver module (8) are arranged symmetrically with about Y-axis along X-axis, and two other electromagnetic force driver module is arranged symmetrically with about X-axis along Y-axis; Described the second electromagnetic force driver module (9) is arranged in four quadrants of the moving platform stator skeleton (10) of essence, four the second electromagnetic force driver modules (9) and the alternate layout of four the first electromagnetic force driver modules (8); Each the first electromagnetic force driver module (8) and each the second electromagnetic force driver module (9) comprise an electromagnetic force driver element at least, and each electromagnetic force driver element is made of permanent magnet, yoke, permanent magnet skeleton, hot-wire coil and coil rack; The common mover part that forms the moving platform of essence of the moving platform mover skeleton (6) of the permanent magnet of the permanent magnet of four the first electromagnetic force driver modules and yoke, four the second electromagnetic force driver modules and yoke and essence; The common stationary part that forms the moving platform of essence of the moving platform stator skeleton (10) of the hot-wire coil of four the first electromagnetic force driver module machines, four the second electromagnetic force driver modules and coil rack and essence; Mover part and the stationary part of the moving platform of described essence are arranged in below wafer-supporting platform (1), and the mover partial fixing of wafer-supporting platform (1) and the moving platform of essence together.
3. a kind of thick smart fold layer worktable as claimed in claim 1 is characterized in that: the permanent magnet skeleton (11) of described coarse motion platform skeleton (3) and moving-iron type electromagnetic force driver module adopts carbon fiber to add aluminum honeycomb material and processes.
4. according to a kind of thick smart fold layer worktable claimed in claim 2, it is characterized in that: the permanent magnet of the moving platform the first electromagnetic force driver module of essence comprises up and down two parts set of permanent magnets, and hot-wire coil and leaves the gap between two parts set of permanent magnets of up and down; Every part set of permanent magnets is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of yoke with the Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, forms closed magnetic path between each permanent magnet.
The permanent magnet of the second electromagnetic force driver module of the moving platform of described essence comprises outer magnetic ring and internal magnetic ring, and the axis of outer magnetic ring and internal magnetic ring is along the Z-direction coaxial arrangement, and outer magnetic ring is identical with the internal magnetic ring magnetizing direction, radially and by the annulus outside surface points to the center of circle; Hot-wire coil is cylindrical coil, between internal magnetic ring and outer magnetic ring, and with interior outer magnetic ring coaxial arrangement; Also be furnished with a gravitational equilibrium magnetic post on the central axis of the second electromagnetic force driver element, the axis of this gravitational equilibrium magnetic post is coaxial with interior outer magnetic ring along Z-direction, and is fixed on the moving platform stator skeleton (10) of essence, and its magnetizing direction is along Z-direction.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017142481A1 (en) * | 2016-02-16 | 2017-08-24 | Agency For Science, Technology And Research | High precision localizing platforms |
| CN109870881A (en) * | 2019-03-20 | 2019-06-11 | 哈尔滨工业大学 | The macro box-like long stroke precision movement platform of micro-group |
| CN112441389A (en) * | 2019-09-03 | 2021-03-05 | 佳能株式会社 | Processing system and article manufacturing method |
| WO2022041673A1 (en) * | 2020-08-26 | 2022-03-03 | 清华大学 | Vertical protection method and device based on dual-stage motion system of photolithography machine |
| CN114888384A (en) * | 2022-06-02 | 2022-08-12 | 哈尔滨工业大学 | Electric spark plane shaking motor |
| WO2023184316A1 (en) * | 2022-03-31 | 2023-10-05 | 深圳华大智造科技股份有限公司 | Motion platform and related device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060082753A1 (en) * | 2004-10-19 | 2006-04-20 | Asml Netherlands B.V. | Actuator assembly and lithographic apparatus comprising such an actuator assembly |
| CN101075098A (en) * | 2007-04-27 | 2007-11-21 | 清华大学 | Ultrathin triple-freedom inching work table |
| CN102880009A (en) * | 2012-09-04 | 2013-01-16 | 清华大学 | Six-degree-of-freedom micro-motion worktable |
| CN103019046A (en) * | 2012-12-19 | 2013-04-03 | 哈尔滨工业大学 | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control |
-
2013
- 2013-04-27 CN CN201310153408.8A patent/CN103383526B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060082753A1 (en) * | 2004-10-19 | 2006-04-20 | Asml Netherlands B.V. | Actuator assembly and lithographic apparatus comprising such an actuator assembly |
| CN101075098A (en) * | 2007-04-27 | 2007-11-21 | 清华大学 | Ultrathin triple-freedom inching work table |
| CN102880009A (en) * | 2012-09-04 | 2013-01-16 | 清华大学 | Six-degree-of-freedom micro-motion worktable |
| CN103019046A (en) * | 2012-12-19 | 2013-04-03 | 哈尔滨工业大学 | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017142481A1 (en) * | 2016-02-16 | 2017-08-24 | Agency For Science, Technology And Research | High precision localizing platforms |
| CN109870881A (en) * | 2019-03-20 | 2019-06-11 | 哈尔滨工业大学 | The macro box-like long stroke precision movement platform of micro-group |
| CN112441389A (en) * | 2019-09-03 | 2021-03-05 | 佳能株式会社 | Processing system and article manufacturing method |
| US11926485B2 (en) | 2019-09-03 | 2024-03-12 | Canon Kabushiki Kaisha | Processing system and article manufacturing method |
| WO2022041673A1 (en) * | 2020-08-26 | 2022-03-03 | 清华大学 | Vertical protection method and device based on dual-stage motion system of photolithography machine |
| WO2023184316A1 (en) * | 2022-03-31 | 2023-10-05 | 深圳华大智造科技股份有限公司 | Motion platform and related device |
| CN114888384A (en) * | 2022-06-02 | 2022-08-12 | 哈尔滨工业大学 | Electric spark plane shaking motor |
| CN114888384B (en) * | 2022-06-02 | 2024-04-05 | 哈尔滨工业大学 | Electric spark plane shaking motor |
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| CN103383526B (en) | 2015-09-30 |
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