CN203520012U - Moving-iron magnetic suspension planar motor with vacuum hood - Google Patents
Moving-iron magnetic suspension planar motor with vacuum hood Download PDFInfo
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- CN203520012U CN203520012U CN201320605476.9U CN201320605476U CN203520012U CN 203520012 U CN203520012 U CN 203520012U CN 201320605476 U CN201320605476 U CN 201320605476U CN 203520012 U CN203520012 U CN 203520012U
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- permanent magnet
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Abstract
The utility model discloses a moving-iron magnetic suspension planar motor with a vacuum hood, which is mainly applied to semiconductor photoetching equipment. The moving-iron magnetic suspension planar motor comprises a rotor, a stator, an object stage, a vacuum hood and a vacuum pump, wherein the rotor comprises a permanent magnet array connected together with the object stage; the stator comprises a current coil array and a base, wherein the current coil array is arranged on the base, the permanent magnet array is suspended right above the current coil array 1, and a gap is reserved between the permanent magnet array and the current coil array; the rotor and the object stage are arranged in the vacuum hood; the vacuum hood is connected with the base in a sealing way. The moving-iron magnetic suspension planar motor has the characteristics of simple and compact structure, mass center driving, small micropositioner rotor inertia and the like; in addition, the rotor and the object stage are arranged in the vacuum hood, so that some gases released by a pouring sealant of the magnetic suspension planar motor are prevented from generating influences to photoetching during extreme ultraviolet lithography.
Description
Technical field
The utility model relates to the floating worktable of a kind of magnetic, relates in particular to a kind of six-freedom-degree magnetic suspension worktable, is mainly used in semiconductor lithography equipment, belongs to ultraprecise processing and checkout equipment technical field.
Background technology
The micro displacement workbench with high precision and response fast has extremely important status in Modern Manufacturing Technology, is regarded as the important symbol of a national hi-tech development level.In ultra-precision machine tool, ultra-precise micro displacement workbench, for feed system is carried out to error compensation, is realized ultraprecise processing; In large scale integrated circuit is manufactured, ultra-precise micro displacement workbench carries out microposition and micro-feeding for lithographic equipment; In scanning probe microscopy, ultra-precise micro displacement workbench is used for measuring sample surface morphology, carries out nanoprocessing; Aspect bioengineering, ultra-precise micro displacement workbench has been used for the operation to cell, realizes biological operation through engineering approaches; Aspect medical science, ultra-precise micro displacement workbench, for microsurgery, to alleviate doctor's burden, shortens operating time, improves success ratio.Ultra-precise micro displacement workbench is also widely used in fiber alignment, the processing of MEMS system, encapsulation and assembling, and in galvanochemistry processing and other fields.
In semiconductor lithography equipment, litho machine is to manufacture specially integrated circuit.According to the International Technology Roadmap for Semiconductors of version in 2005,2007 by the integrated circuit of the photoetching technique production live width 65nm that is 193nm by wavelength X, and 2010 by the integrated circuit of production live width 45nm, the integrated circuit of production live width 32nm in 2013.The resolution of litho machine is expressed from the next:
By the numerical aperture NA of lithographic projection system and technological parameter k1 are extended to its practical limit and increase immersion system, use the etching system of the excimer light source that wavelength X is 193nm can produce the integrated circuit of 65nm live width, people also wish to continue to use wavelength X for the integrated circuit of 193nm immersion system production 45nm live width.Adopting existing wavelength X is the technology of 193nm, in no case can produce the integrated circuit of 32nm live width, must seek new developing direction, adopts the extreme ultraviolet photolithographic of 13.5nm light can realize more high-resolution leap.
Summarize at present nanoscale micro displacement workbench present Research both at home and abroad, in order to meet the requirement of extreme ultraviolet photolithographic equipment high precision, high-speed, heavy load, high dynamic perfromance.Adopt the silicon wafer stage technology of magnetic-floating plane motor just can meet the requirement of lithographic equipment, but when extreme ultraviolet photolithographic, some casting glues of magnetic-floating plane motor can discharge some gases, can produce certain impact to light source, and the deficiencies such as cable disturbed motion that have a large amount of power supplys and sensor on planar motor, its performance is subject to certain limitation.
Utility model content
The utility model aims to provide a kind of moving-iron type magnetic-floating plane motor can be applicable in extreme ultraviolet photolithographic machine, also can be used in ultraprecise processing and detection to realize six-freedom motion, it is not only had simple in structure, compact, barycenter drives, the features such as micropositioner mover inertia is little, and the impact that can avoid some gases that the casting glue of magnetic-floating plane motor when extreme ultraviolet photolithographic discharges to produce photoetching.
The technical solution of the utility model is as follows:
A moving-iron type magnetic-floating plane motor with vacuum (-tight) housing, this magnetic-floating plane motor is comprised of mover and stator, and mover includes permanent magnet array and objective table, and described permanent magnet array and objective table link together; Stator pack contains hot-wire coil array and pedestal, it is characterized in that: described moving-iron type magnetic-floating plane motor also contains vacuum (-tight) housing and vacuum pump; Described mover is arranged on vacuum (-tight) housing inside, described vacuum (-tight) housing be positioned at outside vacuum pump and link together;
A kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing described in the utility model, it is characterized in that: described hot-wire coil array is comprised of at least four group coil units, each described group coil unit is comprised of linear array three coils in a row, four groups of coil units are horizontally disposed in same plane, wherein two of arbitrary neighborhood groups of coil unit quadrature arrangement; Described hot-wire coil array is arranged on pedestal, and described permanent magnet array is suspended in directly over described hot-wire coil array, and leaves gap with described hot-wire coil array;
A kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing described in the utility model, it is characterized in that: described coil unit adopts the coil groups of lamination quadrature coiling, or adopt the individual layer rectangular coil coil groups of lamination perpendicular array and horizontal positioned from the bottom to top, or the coil groups of employing rectangular coil horizontal positioned, or the coil groups that adopts rectangular coil vertically to place, or adopt lamination quadrature to print the coil groups of PCB circuit; The quantity of each described coil groups is three multiple, and each coil is comprised of electrified wire and coil rack.
A kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing described in the utility model, is characterized in that: the described vacuum (-tight) housing inside environment that is evacuated while being duty;
A kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing described in the utility model, it is characterized in that: it is characterized in that: the permanent magnet array of described magnetic-floating plane motor is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the upper surface of pedestal with Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path; Or the permanent magnet array of described magnetic-floating plane motor is comprised of main permanent magnet and attached permanent magnet, the contrary array format of magnetizing direction according to adjacent two main permanent magnets and the main permanent magnet of edge and attached permanent magnet is adhesively fixed on pedestal upper surface, between each permanent magnet, forms closed magnetic path.
A kind of advantage with the moving-iron type magnetic-floating plane motor of vacuum (-tight) housing described in the utility model is: the utility model not only has the features such as simple in structure, compact, barycenter drives, micropositioner mover inertia is little, and due to mover and objective table are arranged in vacuum (-tight) housing, thereby when extreme ultraviolet photolithographic, the impact of having avoided some gases that the casting glue of magnetic-floating plane motor discharges to produce photoetching.
Accompanying drawing explanation
A kind of tomograph with the moving-iron type magnetic-floating plane motor of vacuum (-tight) housing that Fig. 1 provides for utility model.
Fig. 2 expresses the tomograph of the moving-iron type magnetic-floating plane motor removing after vacuum (-tight) housing.
Fig. 3 is the arrangement schematic diagram of hot-wire coil array and permanent magnet array.
Fig. 4 a and Fig. 4 b express two kinds of permanent magnet array structural representations of magnetic-floating plane motor.
Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d and Fig. 5 e express respectively several different version that coil unit of the present utility model adopts.
The work schematic diagram of the moving-iron type magnetic-floating plane motor with vacuum (-tight) housing that Fig. 6 provides for the utility model.
In figure: 1-hot-wire coil array; 2-permanent magnet array; 3-objective table; 4-vacuum (-tight) housing; 5-pedestal; 10-coil rack; 11-First Line coil unit; 12-the second coil unit; 13-tertiary coil unit; 14-the 4th coil unit; The main permanent magnet of 16-first; The main permanent magnet of 17-second; The attached permanent magnet of 18-.
Embodiment
Below in conjunction with accompanying drawing, theory structure of the present utility model and the course of work are described further.
A kind of tomograph with the moving-iron type magnetic-floating plane motor of vacuum (-tight) housing that Fig. 1, Fig. 2 provide for utility model, this magnetic-floating plane motor contains mover, objective table 3, stator, vacuum (-tight) housing 4 and vacuum pump; Mover contains permanent magnet array 2, and described permanent magnet array 2 links together with objective table 3; Stator contains hot-wire coil array 1 and pedestal 5, and this hot-wire coil array 1 is arranged on pedestal 5; Described permanent magnet array (2) and objective table 3 are suspended in directly over described hot-wire coil array 1, and leave gap with described hot-wire coil array 1; Described mover and objective table 3 are arranged on vacuum (-tight) housing 4 inside, and this vacuum (-tight) housing 4 is tightly connected with pedestal 5, and is connected with the vacuum pump that is positioned at vacuum (-tight) housing outside by gas piping.After the logical three-phase current of hot-wire coil array, permanent magnet array 2 can be suspended on hot-wire coil array 1 with objective table 3, and can be in the plane at hot-wire coil array 1 place along directions X with do the translation motion of large stroke along Y-direction, simultaneously, permanent magnet array 2 is interior along directions X with along Y-direction translation except doing surface level with objective table 3, also can do the motion of other four-degree-of-freedom.
Fig. 3 is the arrangement schematic diagram of hot-wire coil array and permanent magnet array.Hot-wire coil array 1 in stator is arranged on pedestal 5, and described permanent magnet array 2 is suspended in directly over described hot-wire coil array 1, and leaves gap with described hot-wire coil array 1.Described hot-wire coil array 1 is comprised of at least four group coil units, and each group coil unit is comprised of linear array three coils in a row, and four groups of coil units are horizontally disposed in same plane, wherein two of arbitrary neighborhood groups of coil unit quadrature arrangement.
Fig. 4 a and Fig. 4 b express two kinds of permanent magnet array structural representations of magnetic-floating plane motor.As shown in Fig. 4 a, the permanent magnet array 2 of magnetic-floating plane motor is by main permanent magnet (the first main permanent magnet 16; The second main permanent magnet 17), attached permanent magnet 18 forms, main permanent magnet and attached permanent magnet are adhesively fixed in pedestal 5 upper surfaces with Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path; Or the permanent magnet array 2 of described magnetic-floating plane motor is comprised of main permanent magnet and pedestal 5 upper surfaces, according to the contrary array format of the magnetizing direction of adjacent two main permanent magnets, be adhesively fixed on pedestal 5 upper surfaces, between each permanent magnet, form closed magnetic path.As shown in Figure 4 b, the permanent magnet array 2 of magnetic-floating plane motor is comprised of main permanent magnet, attached permanent magnet, the main permanent magnet of adjacent two main permanent magnets and edge and attached permanent magnet are adhesively fixed on pedestal 5 upper surfaces with SN array format, adjacent two main permanent magnets and the main permanent magnet of edge and the magnetic direction opposed of attached permanent magnet form closed magnetic path between each permanent magnet; Or the permanent magnet array 2 of described magnetic-floating plane motor is comprised of main permanent magnet and pedestal 5 upper surfaces, according to the contrary array format of the magnetizing direction of adjacent two main permanent magnets, be adhesively fixed in pedestal 5 upper surfaces, between each permanent magnet, form closed magnetic path.
Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d and Fig. 5 e express respectively several different version that coil unit of the present utility model adopts, and have enumerated altogether five kinds.Coil unit can adopt the coiling of lamination quadrature coil groups (as Fig. 5 a), or adopt individual layer rectangular coil from the bottom to top lamination perpendicular array become the coil groups (5b) of horizontal positioned, or the coil groups (as Fig. 5 c) of employing rectangular coil horizontal positioned, or adopt rectangular coil vertically to place coil groups (as Fig. 5 d), or adopt lamination quadrature printing PCB circuit coil group (as Fig. 5 e); The quantity of each described coil groups is 3 multiple, and each coil is comprised of electrified wire and coil rack 10.Obtain different thrust sizes, can be by increasing the modes such as thickness of the coiling number of turn or change coil winding skeleton.
The course of work of the present utility model is as follows: magnetic direction, hot-wire coil direction of current that the permanent magnet of magnetic transportation by driving moving cell produces, and the Lorentz force direction producing both are mutually vertical.Each group coil unit of hot-wire coil array, under the magnetic fields of permanent magnet array 2, can produce the thrust of orthogonal both direction.In the present embodiment, be in permanent magnet array 2 magnetic field ranges and have four coil units, be respectively First Line coil unit 11, the second coil unit 12, tertiary coil unit 13 and the 4th coil unit 14, as shown in Figure 6.
As shown in 6 figure, the coil position pairwise orthogonal of adjacent two coil units in four coil units, be respectively First Line coil unit 11 parallel with tertiary coil unit 13, the second coil unit 12 and the 4th coil unit 14 parallel, and First Line coil unit 11 is mutually vertical with the second coil unit 12.When the electric current of First Line coil unit 11 and tertiary coil unit 13 logical equidirectionals, react on permanent magnet array 2 after producing Lorentz force, can drive motor mover moving along the X-direction shown in Fig. 6 and Z-direction; When the electric current of the second coil unit 12 and the logical equidirectionals of the 4th coil unit 14, react on permanent magnet array 2 after producing Lorentz force, can drive motor mover moving along the Y direction shown in Fig. 6 and Z-direction; When the logical different big or small electric current of four coil units, after generation Lorentz force, react on permanent magnet array 2, the power of the Z-direction that electric mover is suffered just has difference, and electric mover just can rotate around X-axis, or rotates around Y-axis; When four coil units lead to equidirectional electric current simultaneously, electric mover rotates around Z axis; In the present embodiment, at least need four coil units could realize above-mentioned motion, also can be along X-direction, or increase by two coil units along Y direction, or along X-direction and Y direction, increase by four coil units etc. simultaneously, according to the size requirement of different travel range, suitably increase.
Claims (4)
1. a moving-iron type magnetic-floating plane motor with vacuum (-tight) housing, this magnetic-floating plane motor contains mover, objective table (3) and stator; Mover contains permanent magnet array (2), and described permanent magnet array (2) links together with objective table (3); Stator contains hot-wire coil array (1) and pedestal (5), described hot-wire coil array (1) is arranged on pedestal (5), and described permanent magnet array (2) is suspended in directly over described hot-wire coil array (1), and leaves gap with described hot-wire coil array (1); It is characterized in that: described moving-iron type magnetic-floating plane motor also contains vacuum (-tight) housing (4) and vacuum pump; Described mover and objective table (3) are arranged on vacuum (-tight) housing (4) inside; Described vacuum (-tight) housing (4) is tightly connected with pedestal, and is connected with the vacuum pump that is positioned at vacuum (-tight) housing outside by gas piping.
2. a kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing as claimed in claim 1, it is characterized in that: described hot-wire coil array (1) is comprised of at least four group coil units, every group of coil unit is comprised of linear array three coils in a row, four groups of coil units are horizontally disposed in same plane, wherein two of arbitrary neighborhood groups of coil unit quadrature arrangement.
3. a kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing as claimed in claim 1, it is characterized in that: described coil unit adopts the coil groups (5a) of lamination quadrature coiling, or adopt the individual layer rectangular coil coil groups (5b) of lamination perpendicular array and horizontal positioned from the bottom to top, or the coil groups (5c) of employing rectangular coil horizontal positioned, or the coil groups (5d) that adopts rectangular coil vertically to place, or adopt lamination quadrature to print the coil groups (5e) of PCB circuit; The quantity of each described coil groups is 3 multiple, and each coil is comprised of electrified wire and coil rack (10).
4. a kind of moving-iron type magnetic-floating plane motor with vacuum (-tight) housing as claimed in claim 1, it is characterized in that: it is characterized in that: the permanent magnet array (2) of described magnetic-floating plane motor is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed in the upper surface of pedestal (5) with Halbach array format, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path; Or the permanent magnet array (2) of described magnetic-floating plane motor is comprised of main permanent magnet and attached permanent magnet, according to the contrary array format of magnetizing direction of adjacent two main permanent magnets and the main permanent magnet of edge and attached permanent magnet, be adhesively fixed on pedestal (5) upper surface, between each permanent magnet, form closed magnetic path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320605476.9U CN203520012U (en) | 2013-09-27 | 2013-09-27 | Moving-iron magnetic suspension planar motor with vacuum hood |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320605476.9U CN203520012U (en) | 2013-09-27 | 2013-09-27 | Moving-iron magnetic suspension planar motor with vacuum hood |
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| Publication Number | Publication Date |
|---|---|
| CN203520012U true CN203520012U (en) | 2014-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320605476.9U Expired - Lifetime CN203520012U (en) | 2013-09-27 | 2013-09-27 | Moving-iron magnetic suspension planar motor with vacuum hood |
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| Country | Link |
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| CN (1) | CN203520012U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106571731A (en) * | 2015-10-08 | 2017-04-19 | 上海微电子装备有限公司 | Superconductor maglev planar motor |
| CN108336884A (en) * | 2017-01-19 | 2018-07-27 | 广东极迅精密仪器有限公司 | Gearshift |
| CN112054649A (en) * | 2020-09-18 | 2020-12-08 | 复旦大学 | Magnetic suspension motion platform |
| WO2023226272A1 (en) * | 2022-05-23 | 2023-11-30 | 华中科技大学 | Magnetic suspension planar motor workbench with double-layer winding coarse-fine drive |
| CN117253844A (en) * | 2023-11-20 | 2023-12-19 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
-
2013
- 2013-09-27 CN CN201320605476.9U patent/CN203520012U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106571731A (en) * | 2015-10-08 | 2017-04-19 | 上海微电子装备有限公司 | Superconductor maglev planar motor |
| CN106571731B (en) * | 2015-10-08 | 2019-04-12 | 上海微电子装备（集团）股份有限公司 | A kind of superconductor levitation planar motor |
| CN108336884A (en) * | 2017-01-19 | 2018-07-27 | 广东极迅精密仪器有限公司 | Gearshift |
| CN108336884B (en) * | 2017-01-19 | 2020-07-21 | 广东极迅精密仪器有限公司 | Displacement device |
| CN112054649A (en) * | 2020-09-18 | 2020-12-08 | 复旦大学 | Magnetic suspension motion platform |
| WO2023226272A1 (en) * | 2022-05-23 | 2023-11-30 | 华中科技大学 | Magnetic suspension planar motor workbench with double-layer winding coarse-fine drive |
| CN117253844A (en) * | 2023-11-20 | 2023-12-19 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
| CN117253844B (en) * | 2023-11-20 | 2024-03-08 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100084 Beijing Haidian District Beijing 100084 box 82 box, Tsinghua University Patent Office Co-patentee after: BEIJING U-PRECISION TECH Co.,Ltd. Patentee after: TSINGHUA University Address before: 100084 Beijing Haidian District Beijing 100084 box 82 box, Tsinghua University Patent Office Co-patentee before: U-PRECISION TECH Co.,Ltd. Patentee before: Tsinghua University |
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| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140402 |
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| CX01 | Expiry of patent term |