CN104009674A - Six-degree-of-freedom short stroke magnetic levitation workbench - Google Patents
Six-degree-of-freedom short stroke magnetic levitation workbench Download PDFInfo
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- CN104009674A CN104009674A CN201410264738.9A CN201410264738A CN104009674A CN 104009674 A CN104009674 A CN 104009674A CN 201410264738 A CN201410264738 A CN 201410264738A CN 104009674 A CN104009674 A CN 104009674A
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Abstract
The invention relates to a six-degree-of-freedom magnetic levitation workbench, in particular to a six-degree-of-freedom short stroke magnetic levitation workbench, and belongs to the field of motors. The six-degree-of-freedom short stroke magnetic levitation workbench solves the problem that an existing six-degree-of-freedom short stroke magnetic levitation workbench is high in heating amount, large in loss, complex in structure, small in platform height, large in thermotropy, poor in dynamic behavior and low in location accuracy. The six-degree-of-freedom short stroke magnetic levitation workbench comprises two positive force supporting units, two negative force supporting units, two X-directional driving units, two Y-directional driving units, four Z-directional driving units, an upper movable base plate, a lower movable base plate, an upper fixed base plate and a lower fixed base plate; the upper movable base plate, the lower movable base plate, the upper fixed base plate and the lower fixed base plate are arranged in parallel, the upper fixed base plate is located between the upper movable base plate and the lower movable base plate, and the lower movable base plate is located between the upper fixed base plate and the lower fixed base plate; the upper movable base plate is fixedly connected with the lower movable base plate, and the upper fixed base plate is fixedly connected with the lower fixed base plate. The six-degree-of-freedom short stroke magnetic levitation workbench is small in loss, simple in structure, easy to control and suitable for the vacuum environment.
Description
Technical field
The present invention relates to a kind of six degree of freedom magnetic suspension workbench, belong to machine field.
Background technology
Modern precision, ultraprecise process unit have urgent demand to height response, high-speed, high-precision short stroke magnetic suspension workbench, as the even robot driving etc. of machining, electronic product production, mechanical handling, manufacturing automation instrumentation.Conventionally these devices produce power drive by rotary electromotor, then by the mechanical device such as belt, ball screw, are converted to rectilinear motion.Due to mechanical device complexity, transmission accuracy and speed are all restricted, and need frequent adjustment, cause that cost is high, poor reliability, volume be larger.Initial short stroke magnetic suspension workbench is to be realized by two linear electric motors that directly drive, adopt stacked Drive Structure, this structure has increased the complexity of drive system, forms the pattern of higher-dimension motion from not breaking away from essence the stack of low-dimensional motion.For the linear electric motors of bottom, carry the gross mass of upper strata linear electric motors and associated mechanical components thereof, thereby have a strong impact on location and control accuracy.And directly utilize electromagnetic energy to produce the multiple-degree-of-freedom planar motor of plane motion, there is the feature of the high and low hear rate of force density, high-speed, high accuracy and high reliability, because having saved from the rectilinear motion that rotatablely moves again to the intermediate conversion device of plane motion, can be control object with being made of one of motor structure, there is the good and advantages of simple structure and simple of fast, highly sensitive, the servo-actuated property of reaction.
Figure 21 and 22 is depicted as a kind of constituted mode of short stroke magnetic suspension workbench.This six-freedom-degree magnetic short stroke magnetic suspension workbench is made up of octagon flat board, fixing base, four groups of horizontal non-contact electromagnetic driving mechanisms and four groups of magnetic suspension vertical support mechanisms.Horizontal non-contact electromagnetic driving mechanism and magnetic suspension vertical support mechanism all adopt voice coil motor structure, and the elementary of voice coil motor fixed, collateral motion.The 90 ° of symmetrical four edges that are wherein of octagon flat board are connected with the mover of horizontal non-contact electromagnetic driving mechanism; The 90 ° of symmetrical other four edges that are of octagon flat board are connected with the mover of magnetic suspension vertical support mechanism.The stator of the stator of horizontal non-contact electromagnetic driving mechanism and magnetic suspension vertical support mechanism is fixed on fixing base.Configure size and the direction of voice coil motor primary winding current by level of control, controlled making is used in the size of directions X on mover, Y-direction electromagnetic force and direction and size and direction around Z axis deflection electromagnetic torque; Simultaneously, by controlling size and the direction of arranged perpendicular voice coil motor primary winding current, size that can control action Z direction electromagnetic force on mover and direction and around X-axis, around size and the direction of Y-axis deflection electromagnetic torque, thus realize the six-freedom motion control of workbench.
But there are the following problems for this six degree of freedom short stroke magnetic suspension workbench: arranged perpendicular voice coil motor need to be switched on all the time, to produce the electromagnetic force of vertical direction, the deadweight of counteracting platform mover.Therefore, the caloric value of coil is high, loss is large.Meanwhile, the structure relative complex of voice coil motor, pushing force density are low, and the rigidity of platform is low, thermal deformation is large, and poor dynamic, the positioning precision of system are low.
Summary of the invention
Six degree of freedom short stroke magnetic suspension workbench of the present invention has solved that the caloric value that existing six degree of freedom short stroke magnetic suspension workbench exists is high, loss large, complex structure, podium level is low, thermal denaturation is large and dynamic characteristic is looked into, positioning precision is low problem.
A kind of six degree of freedom short stroke magnetic suspension workbench of the present invention, by two groups of positive force support units, two groups of negative force support units, two groups of X to driver element, two groups of Y-direction driver elements, four groups of Z-direction driver elements, the moving substrate A1 of upside, the moving substrate B1 of downside, above determine substrate D 1 and determine substrate C1 and form down; Upside moves the moving substrate B1 of substrate A1, downside, above determine substrate D 1 and determine substrate C1 and be arranged in parallel mutually down, and above determines substrate D 1 and move between substrate A1 and lower moving substrate B1 at upside, and downside moves substrate B1 to be determined substrate D 1 and determines between substrate C1 down upper; The moving substrate of upside moves substrate with downside and is fixed together, and above determines substrate D 1 and determines substrate C1 and be fixed together down; The structure of two groups of positive force support units is identical, by upper mover, lower mover and stator composition; The structure of two groups of negative force support units is identical, by upper mover, lower mover and stator composition; Two groups of X are identical to the structure of driver element, by upper mover, lower mover and stator composition; The structure of two groups of Y-direction driver elements is identical, by upper mover, lower mover and stator composition; The structure of four groups of Z-direction driver elements is identical, by mover and stator composition; The mover of the upper mover of positive force support unit, the upper mover of negative force support unit, Z-direction driver element, X is all fixed on the moving substrate A1 of upside bottom surface to the upper mover of driver element and the upper mover of Y-direction driver element; The lower mover of positive force support unit, the lower mover of negative force support unit, X are all fixed on the upper surface of the moving substrate B1 of downside to the lower mover of driver element and the lower mover of Y-direction driver element; The stator of positive force support unit, the stator of negative force support unit, X are all fixed on and above determine on substrate D 1 to the stator of driver element and the stator of Y-direction driver element, on this, determining between the moving substrate A1 of substrate D 1 and upside is upper air gap, and this determines between substrate D 1 and the moving substrate B1 of downside is lower air gap; The stator of Z-direction driver element is fixed on the lower upper surface of determining substrate C1; Two groups of positive force support units, two groups of negative force support units, two groups of X to driver element and two groups of Y-direction driver elements taking the center of determining substrate as the center of circle, along the circumferencial direction interphase distribution of same radius R 1, wherein: the line of the line of two groups of positive force support units and two groups of negative force support units is crossing and be 90 ° of angles; Two groups of X are crossing and be 90 ° of angles to the line of driver element and the connection of two groups of Y-direction driver elements; Following center of determining substrate is the center of circle respectively, being R2 along radius, circumferencial direction is uniformly distributed for four groups of Z-direction driver elements; R1 ≠ R2; On the upper mover of positive force support unit, lower mover and stator, be all fixed with permanent magnet, it is to promote the moving substrate A1 of upside and the moving substrate B1 of downside power upwards that all permanent magnets in positive force support unit produce magnetic field force; On the upper mover of negative force support unit, lower mover and stator, be all fixed with permanent magnet, it is to promote the moving substrate A1 of upside and the moving downward power of substrate B1 of downside that all permanent magnets in negative force support unit produce magnetic field force; The magnetic field force acting in conjunction that positive force support unit and negative force support unit produce makes the moving substrate A1 of upside and the moving substrate B1 of downside unsettled and be stabilized in and determine substrate D 1 and lower top of determining substrate C1 respectively.
What above-mentioned positive force support unit produced acts on the vertical force upwards on moving substrate, is greater than the downward vertical force that negative force support unit produces, and then realizes the effect that supports two moving substrates.
In the present invention, the concrete structure of above-mentioned positive force support unit can be: on it, mover comprises permanent magnet ZL1 on mover, and on this mover, permanent magnet ZL1 is fixed on the lower surface of the moving substrate A1 of upside; Under positive force support unit, mover comprises permanent magnet ZL2 under mover, and under this mover, permanent magnet ZL2 is fixed on the upper surface of the moving substrate B1 of downside; On mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 is strip, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary; The structure of the positive force support unit stator in the present invention can comprise on stator permanent magnet under permanent magnet and stator, on stator, permanent magnet is fixed on and determines the upper surface of substrate D 1 position corresponding with permanent magnet ZL1 on mover, on stator, the magnetizing direction of permanent magnet is contrary with the magnetizing direction of permanent magnet ZL1 on mover, is upper air gap between the two; Under stator, permanent magnet is fixed on the lower surface and the position that under mover, permanent magnet ZL2 is corresponding of on stator, determining substrate D 1, and under stator, the magnetizing direction of permanent magnet is identical with the magnetizing direction of permanent magnet ZL2 under mover, is lower air gap between the two.
On above-mentioned mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 is made up of two block length strip permanent magnets respectively, and two block length strip permanent magnets are measure-alike, magnetizing direction is identical, and two block length strip permanent magnets are arranged in juxtaposition.
On above-mentioned mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 can also be made up of two block length strip permanent magnets respectively, two block length strip permanent magnets are measure-alike, two block length strip permanent magnets are horizontal direction parallel and magnetize, the magnetizing direction of two block length strip permanent magnets is contrary, and two block length strip permanent magnets are arranged in juxtaposition; On mover, on permanent magnet ZL1 and stator, between permanent magnet, form repulsion, under mover, under permanent magnet ZL2 and stator, between permanent magnet, form suction.
The structure of the negative force support unit in the present invention can be: on it, mover comprises permanent magnet FL1 on mover, and on this mover, permanent magnet FL1 is fixed on the lower surface of the moving substrate A1 of upside; Under negative force support unit, mover comprises permanent magnet FL2 under mover, and under this mover, permanent magnet FL2 is fixed on the upper surface of the moving substrate B1 of downside; On mover, under permanent magnet FL1 and mover, permanent magnet FL2 is plate shaped, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary; Negative force support unit stator comprises stator permanent magnet FL3, stator permanent magnet FL3 is mounted in and determines position corresponding with permanent magnet FL1 on mover on substrate D 1, the magnetizing direction of stator permanent magnet FL3 is identical with the magnetizing direction of permanent magnet FL1 on mover, is upper air gap between the two; It under stator permanent magnet FL3 and mover, between permanent magnet FL2, is lower air gap.
On mover on above-mentioned negative force support unit in mover, between the moving substrate A1 of permanent magnet FL1 and upside, can be provided with permanent magnet retaining plate.
Under mover under above-mentioned negative force support unit in mover, between the moving substrate B1 of permanent magnet FL2 and downside, can be provided with permanent magnet retaining plate.
Stator permanent magnet FL3 in positive force support unit described in the present invention can also be made up of two permanent magnets, and described two permanent magnets are mounted in respectively upper surface and the lower surface of determining substrate D 1.
Z-direction driver element in the present invention can adopt the motor of dual-edge plane structure to realize, and what mover was bilateral structure is secondary, and stator is elementary; Elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and described gas gap plane is perpendicular to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and armature winding effective edge is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of including in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
X in the present invention is identical with the structure of Y-direction driver element to driver element, all can adopt the motor of dual-edge plane structure to realize, upper mover and lower mover be respectively bilateral secondary two secondary, stator is elementary, elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and gas gap plane is parallel to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and the effective edge of armature winding is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of comprising in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
The moving substrate A1 of described upside in the present invention, the moving substrate B1 of downside, above determine substrate D 1 and the lower material of determining substrate C1 is all nonmagnetic substances.
Six degree of freedom short stroke magnetic suspension workbench of the present invention, utilize two groups of positive force support units and two groups of negative force support units to carry out the static state support of workbench, due to the opposite direction of positive force support unit and negative force support unit generation magnetic field force, therefore greatly reduce the rigidity of workbench, again because the magnetic field force that adopts magnetic material to produce is realized support, do not need loss electric energy, and then avoid existing employing arranged perpendicular voice coil motor to realize the problem that caloric value that magnetic suspension control causes is high and loss is large, reach the effect of the loss that reduces workbench.
Six degree of freedom short stroke magnetic suspension workbench of the present invention is by controlling size and the direction of two groups of X to driver element, two groups of Y-direction driver element coil currents, can control action on moving substrate the size of directions X, Y-direction electromagnetic force and direction and size and direction around the torque of Z axis rotating electromagnetic, control convenient, flexible.
Six degree of freedom short stroke magnetic suspension workbench of the present invention is by controlling size and the direction of electric current in four groups of Z-direction driver element coils, can control action on moving substrate the size of Z direction electromagnetic force and direction and around X-axis, around size and the direction of Y-axis rotating electromagnetic torque, thereby realize the six-freedom motion control of six degree of freedom short stroke magnetic suspension workbench.
The loss of six degree of freedom short stroke magnetic suspension workbench of the present invention is little, rigidity is low, the linearity good, simple in structure, control easily, positioning precision is high.Six degree of freedom short stroke magnetic suspension workbench of the present invention is applicable to the various situations that need high precision magnetic levitation workbench, and is particularly useful for using under vacuum environment.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of six degree of freedom short stroke magnetic suspension workbench described in embodiment ten, Fig. 2 is the upper structural representation of determining substrate D 1 in Fig. 1, on this, determine to be fixed with X to the armature winding of driver element and the armature winding of Y-direction driver element on substrate D 1, and be respectively arranged with on the stator that embeds positive force support unit the groove of permanent magnet under permanent magnet and stator in symmetrical both sides.Fig. 3 is the upward view of the moving substrate A1 of upside in Fig. 1, in this figure, on the moving substrate A1 of this upside, be fixed with the mover, X of upper mover, the Z-direction driver element of upper mover, the negative force support unit of positive force support unit to the upper mover of driver element and the upper mover of Y-direction driver element.Fig. 4 is the vertical view of the moving substrate B1 of downside in Fig. 1, is fixed with the stator, X of lower mover, the Z-direction driver element of lower mover, the negative force support unit of positive force support unit to the lower mover of driver element and the lower mover of Y-direction driver element on the moving substrate B1 of this downside.Fig. 5 is that the six degree of freedom short stroke magnetic suspension workbench shown in Fig. 1 is removed the structural representation afterwards of the structure shown in Fig. 3.
Fig. 6 is the structural representation of a kind of six degree of freedom short stroke magnetic suspension workbench described in embodiment 11, Fig. 7 is the upper structural representation of determining substrate D 1 in Fig. 6, on this, determine to be fixed with X to the armature winding of driver element and the armature winding of Y-direction driver element on substrate D 1, and be respectively arranged with on the stator that embeds positive force support unit the groove of permanent magnet under permanent magnet and stator in symmetrical both sides.Fig. 8 is the upward view of the moving substrate A1 of upside in Fig. 6, in this figure, on the moving substrate A1 of this upside, be fixed with the mover, X of upper mover, the Z-direction driver element of upper mover, the negative force support unit of positive force support unit to the upper mover of driver element and the upper mover of Y-direction driver element.Fig. 9 is the vertical view of the moving substrate B1 of downside in Fig. 6, is fixed with the stator, X of lower mover, the Z-direction driver element of lower mover, the negative force support unit of positive force support unit to the lower mover of driver element and the lower mover of Y-direction driver element on the moving substrate B1 of this downside.Figure 10 is that the six degree of freedom short stroke magnetic suspension workbench shown in Fig. 6 is removed the structural representation afterwards of the structure shown in Fig. 8.
Figure 11 is the structural representation of a kind of six degree of freedom short stroke magnetic suspension workbench described in embodiment 12, Figure 12 is the upper structural representation of determining substrate D 1 in Figure 11, on this, determine to be fixed with X to the armature winding of driver element and the armature winding of Y-direction driver element on substrate D 1, and be provided with on the stator that embeds positive force support unit the groove of the stator permanent magnet FL3 of permanent magnet, negative force support unit under permanent magnet and stator.Figure 13 is the upward view of the moving substrate A1 of upside in Figure 11, in this figure, on the moving substrate A1 of this upside, be fixed with the mover, X of upper mover, the Z-direction driver element of upper mover, the negative force support unit of positive force support unit to the upper mover of driver element and the upper mover of Y-direction driver element.Figure 14 is that the six degree of freedom short stroke magnetic suspension workbench shown in Figure 11 is removed the structural representation afterwards of the structure shown in Figure 13.
Figure 15 is the structural representation of a kind of six degree of freedom short stroke magnetic suspension workbench described in embodiment 13, Figure 16 is the upper structural representation of determining substrate D 1 in Figure 15, on this, determine to be fixed with X to the armature winding of driver element and the armature winding of Y-direction driver element on substrate D 1, and be provided with on the stator that embeds positive force support unit the groove of the stator permanent magnet FL3 of permanent magnet, negative force support unit under permanent magnet and stator.Figure 17 is the upward view of the moving substrate A1 of upside in Figure 15, in this figure, on the moving substrate A1 of this upside, be fixed with the mover, X of upper mover, the Z-direction driver element of upper mover, the negative force support unit of positive force support unit to the upper mover of driver element and the upper mover of Y-direction driver element.Figure 18 is that the six degree of freedom short stroke magnetic suspension workbench shown in Figure 15 is removed the structural representation afterwards of the structure shown in Figure 17.
Figure 19 is a kind of structural representation of X of the present invention to driver element and Y-direction driver element, wherein figure (a) is traditional secondary structure, two permanent magnets of the N utmost point that every limit is secondary and the S utmost point are pasted and fixed on secondary yoke plate, permanent magnet is parallel magnetization, and magnetizing direction is perpendicular to air gap place plane; Figure (b) is Halbach secondary structure.
Figure 20 is a kind of structural representation of Z-direction driver element of the present invention.
Figure 21 and Figure 22 are the structural representations of a kind of existing short stroke magnetic suspension workbench mentioned in background technology.
Embodiment
Embodiment one: a kind of six degree of freedom short stroke magnetic suspension workbench described in present embodiment by two groups of positive force support units, two groups of negative force support units, two groups of X to driver element, two groups of Y-direction driver elements, four groups of Z-direction driver elements, the moving substrate A1 of upside, the moving substrate B1 of downside, above determine substrate D 1 and determine substrate C1 and form down;
Upside moves the moving substrate B1 of substrate A1, downside, above determine substrate D 1 and determine substrate C1 and be arranged in parallel mutually down, and above determines substrate D 1 and move between substrate A1 and lower moving substrate B1 at upside, and downside moves substrate B1 to be determined substrate D 1 and determines between substrate C1 down upper; The moving substrate of upside moves substrate with downside and is fixed together, and above determines substrate D 1 and determines substrate C1 and be fixed together down;
The structure of two groups of positive force support units is identical, by upper mover, lower mover and stator composition; The structure of two groups of negative force support units is identical, by upper mover, lower mover and stator composition; Two groups of X are identical to the structure of driver element, by upper mover, lower mover and stator composition; The structure of two groups of Y-direction driver elements is identical, by upper mover, lower mover and stator composition; The structure of four groups of Z-direction driver elements is identical, by mover and stator composition;
The mover of the upper mover of positive force support unit, the upper mover of negative force support unit, Z-direction driver element, X is all fixed on the moving substrate A1 of upside bottom surface to the upper mover of driver element and the upper mover of Y-direction driver element;
The stator of the lower mover of positive force support unit, the lower mover of negative force support unit, Z-direction driver element, X is all fixed on the moving substrate B1 of downside upper surface to the lower mover of driver element and the lower mover of Y-direction driver element;
The stator of positive force support unit, the stator of negative force support unit, X are all fixed on and above determine on substrate D 1 to the stator of driver element and the stator of Y-direction driver element, on this, determining between the moving substrate A1 of substrate D 1 and upside is upper air gap, and this determines between substrate D 1 and the moving substrate B1 of downside is lower air gap;
Two groups of positive force support units, two groups of negative force support units, two groups of X to driver element and two groups of Y-direction driver elements taking the center of determining substrate as the center of circle, along the circumferencial direction interphase distribution of same radius R 1, wherein: the line of the line of two groups of positive force support units and two groups of negative force support units is crossing and be 90 ° of angles; Two groups of X are crossing and be 90 ° of angles to the line of driver element and the connection of two groups of Y-direction driver elements;
Following center of determining substrate is the center of circle respectively, being R2 along radius, circumferencial direction is uniformly distributed for four groups of Z-direction driver elements; R1 ≠ R2;
On the upper mover of positive force support unit, lower mover and stator, be all fixed with permanent magnet, it is to promote the moving substrate A1 of upside and the moving substrate B1 of downside power upwards that all permanent magnets in positive force support unit produce magnetic field force; On the upper mover of negative force support unit, lower mover and stator, be all fixed with permanent magnet, it is to promote the moving substrate A1 of upside and the moving downward power of substrate B1 of downside that all permanent magnets in negative force support unit produce magnetic field force; The magnetic field force acting in conjunction that positive force support unit and negative force support unit produce makes the moving substrate A1 of upside and the moving substrate B1 of downside unsettled and be stabilized in and determine substrate D 1 and lower top of determining substrate C1 respectively.
Embodiment two: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, on described positive force support unit, mover comprises permanent magnet ZL1 on mover, and on this mover, permanent magnet ZL1 is fixed on the lower surface of the moving substrate A1 of upside; Under positive force support unit, mover comprises permanent magnet ZL2 under mover, and under this mover, permanent magnet ZL2 is fixed on the upper surface of the moving substrate B1 of downside; On mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 is strip, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary;
Positive force support unit stator comprises on stator permanent magnet under permanent magnet and stator, on stator, permanent magnet is fixed on and determines the upper surface of substrate D 1 position corresponding with permanent magnet ZL1 on mover, on stator, the magnetizing direction of permanent magnet is contrary with the magnetizing direction of permanent magnet ZL1 on mover, is upper air gap between the two; Under stator, permanent magnet is fixed on the lower surface and the position that under mover, permanent magnet ZL2 is corresponding of on stator, determining substrate D 1, and under stator, the magnetizing direction of permanent magnet is identical with the magnetizing direction of permanent magnet ZL2 under mover, is lower air gap between the two.
Embodiment three: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, on described mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 is made up of two block length strip permanent magnets respectively, two block length strip permanent magnets are measure-alike, magnetizing direction is identical, and two block length strip permanent magnets are arranged in juxtaposition.
Embodiment four: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, on described mover, under permanent magnet ZL1 and mover, permanent magnet ZL2 is made up of two block length strip permanent magnets respectively, two block length strip permanent magnets are measure-alike, two block length strip permanent magnets are horizontal direction parallel and magnetize, the magnetizing direction of two block length strip permanent magnets is contrary, and two block length strip permanent magnets are arranged in juxtaposition; On mover, on permanent magnet ZL1 and stator, between permanent magnet, form repulsion, under mover, under permanent magnet ZL2 and stator, between permanent magnet, form suction.
Embodiment five: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, on described negative force support unit, mover comprises permanent magnet FL1 on mover, and on this mover, permanent magnet FL1 is fixed on the lower surface of the moving substrate A1 of upside; Under negative force support unit, mover comprises permanent magnet FL2 under mover, and under this mover, permanent magnet FL2 is fixed on the upper surface of the moving substrate B1 of downside; On mover, under permanent magnet FL1 and mover, permanent magnet FL2 is plate shaped, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary;
Negative force support unit stator comprises stator permanent magnet FL3, stator permanent magnet FL3 is mounted in and determines position corresponding with permanent magnet FL1 on mover on substrate D 1, the magnetizing direction of stator permanent magnet FL3 is identical with the magnetizing direction of permanent magnet FL1 on mover, is upper air gap between the two; It under stator permanent magnet FL3 and mover, between permanent magnet FL2, is lower air gap.
Embodiment six: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, the stator permanent magnet FL3 of described positive force support unit is made up of two permanent magnets, and described two permanent magnets are mounted in respectively upper surface and the lower surface of determining substrate D 1.
Embodiment seven: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, described Z-direction driver element is the motor of dual-edge plane structure, and what mover was bilateral structure is secondary, and stator is elementary; Elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and described gas gap plane is perpendicular to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and armature winding effective edge is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of including in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
Embodiment eight: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, described X is identical with the structure of Y-direction driver element to driver element, be the motor of dual-edge plane structure, upper mover and lower mover be respectively bilateral secondary two secondary, stator is elementary, elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and gas gap plane is parallel to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and the effective edge of armature winding is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of comprising in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
Embodiment nine: the difference of the six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment one is, described upside moves substrate A1, the moving substrate B1 of downside, above determines substrate D 1 and the lower material of determining substrate C1 is all nonmagnetic substances.
Embodiment ten: referring to Fig. 1 to 5 explanation present embodiment.The concrete structure of the of the present invention a kind of six degree of freedom short stroke magnetic suspension workbench described in present embodiment.In present embodiment, the moving substrate A1 of upside is octagonal slab construction, the mover of described four groups of Z-direction driver elements is separately positioned on the position of four minor faces, lower moving substrate B1 is octagonal slab construction, moving substrate A1 is fixedly connected with upside, above determine substrate D 1 between the moving substrate A1 of upside and lower moving substrate B1, and be positioned at the inner side of the mover of four groups of Z-direction driver elements.Described X is parallel to Y-axis to the effective edge of the coil of the armature winding of driver element, and the effective edge of the armature winding of Y-direction driver element is parallel to X-axis.
Embodiment 11: referring to Fig. 6 to 10 explanation present embodiment.A kind of six degree of freedom short stroke magnetic suspension workbench described in present embodiment and the difference of embodiment ten are, described X to the coil of the coil side of the armature winding of driver element and the armature winding of Y-direction driver element respectively with X-axis and Y week are 45° angle, four coils are switched on simultaneously, to produce X to electromagnetic force, Y-direction electromagnetic force and the deflection torque around Z axis.
Embodiment 12: referring to Figure 11 to 14 explanation present embodiment.The concrete structure of the of the present invention a kind of six degree of freedom short stroke magnetic suspension workbench described in present embodiment.In present embodiment, upside moves substrate A1, the moving substrate B1 of downside and lower slab construction of determining substrate C1 and be rectangle, the mover of described four groups of Z-direction driver elements be arranged in parallel with the four edges shape of the moving substrate A1 of the upside of rectangle respectively, and the mover of described four groups of Z-direction driver elements is arranged on the center of the moving substrate A1 of upside, above determine substrate D 1 for centre is with the rectangular flat structure of through hole, described through hole is for embedding the mover of described four groups of Z-direction driver elements, the centre on upper every limit of determining substrate D 1 is respectively arranged with four rectangular preiections, described four rectangular preiections are for being determined substrate C1 and be fixedly connected with lower by supporter, described X is parallel to Y-axis to the effective edge of the coil of the armature winding of driver element, and the effective edge of the armature winding of Y-direction driver element is parallel to X-axis.
Embodiment 13: referring to Figure 15 to 18 explanation present embodiment.Described in a kind of six degree of freedom short stroke magnetic suspension workbench described in present embodiment and embodiment 12, the difference of structure is, described X has been rotated counterclockwise 45° angle separately to the coil of the coil of the armature winding of driver element and the armature winding of Y-direction driver element.
Claims (9)
1. a six degree of freedom short stroke magnetic suspension workbench, it is characterized in that, this six degree of freedom short stroke magnetic suspension workbench by two groups of positive force support units, two groups of negative force support units, two groups of X to driver element, two groups of Y-direction driver elements, four groups of Z-direction driver elements, the moving substrate (A1) of upside, the moving substrate (B1) of downside, above determine substrate (D1) and determine substrate (C1) formation down;
Upside moves the moving substrate (B1) of substrate (A1), downside, above determines substrate (D1) and determine substrate (C1) and be arranged in parallel mutually down, and above determine substrate (D1) and be positioned between the moving substrate (A1) of upside and lower moving substrate B1, downside moves substrate (B1) and is positioned at and determines substrate (D1) and determine between substrate (C1) down; The moving substrate of upside moves substrate with downside and is fixed together, and above determines substrate (D1) and determines substrate (C1) and be fixed together down;
The structure of two groups of positive force support units is identical, by upper mover, lower mover and stator composition; The structure of two groups of negative force support units is identical, by upper mover, lower mover and stator composition; Two groups of X are identical to the structure of driver element, by upper mover, lower mover and stator composition; The structure of two groups of Y-direction driver elements is identical, by upper mover, lower mover and stator composition; The structure of four groups of Z-direction driver elements is identical, by mover and stator composition;
The mover of the upper mover of positive force support unit, the upper mover of negative force support unit, Z-direction driver element, X is all fixed on the moving substrate (A1) of upside bottom surface to the upper mover of driver element and the upper mover of Y-direction driver element;
The lower mover of positive force support unit, the lower mover of negative force support unit, X are all fixed on the upper surface of the moving substrate (B1) of downside to the lower mover of driver element and the lower mover of Y-direction driver element;
The stator of positive force support unit, the stator of negative force support unit, X are all fixed on and above determine on substrate (D1) to the stator of driver element and the stator of Y-direction driver element, on this, determining between the moving substrate (A1) of substrate (D1) and upside is upper air gap, and this determines between substrate D 1 and the moving substrate (B1) of downside is lower air gap;
The stator of Z-direction driver element is fixed on the lower upper surface of determining substrate (C1);
Two groups of positive force support units, two groups of negative force support units, two groups of X to driver element and two groups of Y-direction driver elements taking the center of determining substrate as the center of circle, along the circumferencial direction interphase distribution of same radius R 1, wherein: the line of the line of two groups of positive force support units and two groups of negative force support units is crossing and be 90 ° of angles; Two groups of X are crossing and be 90 ° of angles to the line of driver element and the connection of two groups of Y-direction driver elements;
Following center of determining substrate is the center of circle respectively, being R2 along radius, circumferencial direction is uniformly distributed for four groups of Z-direction driver elements; R1 ≠ R2;
On the upper mover of positive force support unit, lower mover and stator, be all fixed with permanent magnet, all permanent magnets in positive force support unit produce magnetic field force for promoting the moving substrate (A1) of upside and the moving substrate (B1) of downside power upwards; On the upper mover of negative force support unit, lower mover and stator, be all fixed with permanent magnet, all permanent magnets in negative force support unit produce magnetic field force for promoting the moving substrate (A1) of upside and the moving downward power of substrate (B1) of downside; The magnetic field force acting in conjunction that positive force support unit and negative force support unit produce makes upside move substrate (A1) and downside, and to move substrate (B1) unsettled and be stabilized in and determine substrate (D1) and lower top of determining substrate (C1) respectively.
2. six degree of freedom short stroke magnetic suspension workbench according to claim 1, it is characterized in that, on positive force support unit, mover comprises permanent magnet on mover (ZL1), and permanent magnet on this mover (ZL1) is fixed on the lower surface of the moving substrate (A1) of upside; Under positive force support unit, mover comprises permanent magnet under mover (ZL2), and permanent magnet under this mover (ZL2) is fixed on the upper surface of the moving substrate (B1) of downside; Under permanent magnet on mover (ZL1) and mover, permanent magnet (ZL2) is strip, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary;
Positive force support unit stator comprises on stator permanent magnet under permanent magnet and stator, on stator, permanent magnet is fixed on the upper surface position corresponding with permanent magnet on mover (ZL1) of determining substrate (D1), on stator, the magnetizing direction of permanent magnet is contrary with the magnetizing direction of permanent magnet on mover (ZL1), is upper air gap between the two; Under stator, permanent magnet is fixed on the lower surface position corresponding with permanent magnet under mover (ZL2) of determining substrate (D1) on stator, under stator, the magnetizing direction of permanent magnet is identical with the magnetizing direction of permanent magnet under mover (ZL2), is lower air gap between the two.
3. six degree of freedom short stroke magnetic suspension workbench according to claim 2, it is characterized in that under permanent magnet on mover (ZL1) and mover, permanent magnet (ZL2) is all made up of two block length strip permanent magnets respectively, two block length strip permanent magnets are measure-alike, magnetizing direction is identical, and two block length strip permanent magnets are arranged in juxtaposition.
4. six degree of freedom short stroke magnetic suspension workbench according to claim 2, it is characterized in that under permanent magnet on mover (ZL1) and mover, permanent magnet (ZL2) is all made up of two block length strip permanent magnets respectively, two block length strip permanent magnets are measure-alike, two block length strip permanent magnets are horizontal direction parallel and magnetize, the magnetizing direction of two block length strip permanent magnets is contrary, and two block length strip permanent magnets are arranged in juxtaposition; On permanent magnet on mover (ZL1) and stator, between permanent magnet, form repulsion, under permanent magnet under mover (ZL2) and stator, between permanent magnet, form suction.
5. six degree of freedom short stroke magnetic suspension workbench according to claim 1, it is characterized in that on negative force support unit, mover comprises permanent magnet on mover (FL1), permanent magnet on this mover (FL1) is fixed on the lower surface of the moving substrate (A1) of upside; Under negative force support unit, mover comprises permanent magnet under mover (FL2), and permanent magnet under this mover (FL2) is fixed on the upper surface of the moving substrate (B1) of downside; Under permanent magnet on mover (FL1) and mover, permanent magnet (FL2) is plate shaped, and all along vertical direction parallel magnetization, and the magnetizing direction of the two is contrary;
Negative force support unit stator comprises stator permanent magnet (FL3), stator permanent magnet (FL3) is mounted in determines the upper position corresponding with permanent magnet on mover (FL1) of substrate (D1), the magnetizing direction of stator permanent magnet (FL3) is identical with the magnetizing direction of permanent magnet on mover (FL1), is upper air gap between the two; Under stator permanent magnet (FL3) and mover, between permanent magnet (FL2), be lower air gap.
6. six degree of freedom short stroke magnetic suspension workbench according to claim 5, the stator permanent magnet (FL3) that it is characterized in that described positive force support unit is made up of two permanent magnets, and described two permanent magnets are mounted in respectively upper surface and the lower surface of determining substrate (D1).
7. six degree of freedom short stroke magnetic suspension workbench according to claim 1, is characterized in that Z-direction driver element is the motor of dual-edge plane structure, and what mover was bilateral structure is secondary, and stator is elementary; Elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and described gas gap plane is perpendicular to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and armature winding effective edge is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of including in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
8. six degree of freedom short stroke magnetic suspension workbench according to claim 1, it is characterized in that X is identical with the structure of Y-direction driver element to driver element, be the motor of dual-edge plane structure, upper mover and lower mover be respectively bilateral secondary two secondary, stator is elementary, elementary bilateral secondary between, between the two, be two air gaps, two air gaps are parallel to each other, and gas gap plane is parallel to XY plane; Elementary armature winding and the primary substrate of comprising, armature winding sticks on the plate shaped primary substrate being made up of non-magnet material, or embeds in primary substrate, and the effective edge of armature winding is parallel to XY plane; Secondary secondary permanent magnet and the secondary yoke plate of comprising in every limit, secondary permanent magnet is pasted and fixed on secondary yoke plate, and bilateral secondary permanent magnet forms series circuit.
9. six degree of freedom short stroke magnetic suspension workbench according to claim 1, it is characterized in that, described upside moves the moving substrate (B1) of substrate (A1), downside, above determines substrate (D1) and the lower material of determining substrate (C1) is all nonmagnetic substances.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108519693A (en) * | 2018-04-16 | 2018-09-11 | 京东方科技集团股份有限公司 | A kind of substrate alignment apparatus, substrate and substrate alignment method |
| CN108768214A (en) * | 2018-06-22 | 2018-11-06 | 河北医科大学第二医院 | Six degree of freedom controllable type magnetic suspension mechanism and its six degree of freedom control method |
| CN110896289A (en) * | 2019-12-05 | 2020-03-20 | 哈尔滨工业大学 | Multipoint magnetic suspension gravity unloading device |
| CN110939683A (en) * | 2019-12-05 | 2020-03-31 | 哈尔滨工业大学 | Large-load low-power-consumption magnetic suspension vibration isolation platform |
| CN113175871A (en) * | 2021-04-29 | 2021-07-27 | 南京理工大学 | Positioning platform equipment |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040007920A1 (en) * | 2002-07-09 | 2004-01-15 | Nikon Corporation | Methods and apparatus for initializing a planar motor |
| CN101527484A (en) * | 2009-04-10 | 2009-09-09 | 东南大学 | Gas-magnet mixing suspended planar motor with easily expanded horizontal stroke |
| JP2009284567A (en) * | 2008-05-19 | 2009-12-03 | Yaskawa Electric Corp | Magnetic float control device |
| CN101741290A (en) * | 2009-12-24 | 2010-06-16 | 哈尔滨工业大学 | Magnetic suspension inching platform with six degrees of freedom |
| CN103066894A (en) * | 2012-12-12 | 2013-04-24 | 清华大学 | Six degrees of freedom magnetic levitation workpiece table |
-
2014
- 2014-06-13 CN CN201410264738.9A patent/CN104009674B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040007920A1 (en) * | 2002-07-09 | 2004-01-15 | Nikon Corporation | Methods and apparatus for initializing a planar motor |
| JP2009284567A (en) * | 2008-05-19 | 2009-12-03 | Yaskawa Electric Corp | Magnetic float control device |
| CN101527484A (en) * | 2009-04-10 | 2009-09-09 | 东南大学 | Gas-magnet mixing suspended planar motor with easily expanded horizontal stroke |
| CN101741290A (en) * | 2009-12-24 | 2010-06-16 | 哈尔滨工业大学 | Magnetic suspension inching platform with six degrees of freedom |
| CN103066894A (en) * | 2012-12-12 | 2013-04-24 | 清华大学 | Six degrees of freedom magnetic levitation workpiece table |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108519693A (en) * | 2018-04-16 | 2018-09-11 | 京东方科技集团股份有限公司 | A kind of substrate alignment apparatus, substrate and substrate alignment method |
| CN108768214A (en) * | 2018-06-22 | 2018-11-06 | 河北医科大学第二医院 | Six degree of freedom controllable type magnetic suspension mechanism and its six degree of freedom control method |
| CN108768214B (en) * | 2018-06-22 | 2019-07-19 | 河北医科大学第二医院 | Six degree of freedom controllable type magnetic suspension mechanism and its six degree of freedom control method |
| CN110896289A (en) * | 2019-12-05 | 2020-03-20 | 哈尔滨工业大学 | Multipoint magnetic suspension gravity unloading device |
| CN110939683A (en) * | 2019-12-05 | 2020-03-31 | 哈尔滨工业大学 | Large-load low-power-consumption magnetic suspension vibration isolation platform |
| CN110896289B (en) * | 2019-12-05 | 2022-11-04 | 哈尔滨工业大学 | Multipoint magnetic suspension gravity unloading device |
| CN113175871A (en) * | 2021-04-29 | 2021-07-27 | 南京理工大学 | Positioning platform equipment |
| WO2023116040A1 (en) * | 2021-12-24 | 2023-06-29 | 北京华卓精科科技股份有限公司 | Six-degree-of-freedom motion mechanism capable of multi-layer heat dissipation |
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