CN203838476U - Integrated coarse and fine moving masking platform driven by planar motor - Google Patents
Integrated coarse and fine moving masking platform driven by planar motor Download PDFInfo
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- CN203838476U CN203838476U CN201420219639.4U CN201420219639U CN203838476U CN 203838476 U CN203838476 U CN 203838476U CN 201420219639 U CN201420219639 U CN 201420219639U CN 203838476 U CN203838476 U CN 203838476U
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Abstract
The utility model discloses an integrated coarse and fine moving masking platform driven by a planar motor. The integrated coarse and fine moving masking platform comprises an integrated coarse and fine moving masking platform movable platform, a balance mass, the drive motor, a mask plate, a base, a vibration isolation system and a measuring system. The vibration isolation system is located between the balance mass and the base, and the mask plate is installed on the integrated coarse and fine moving masking platform movable platform. The drive motor of the masking platform movable platform is a moving-iron type planar motor, a rotor of the planar motor is a permanent magnet array installed on the top face of the masking platform movable platform, and a stator of the planar motor is a coil array installed on the balance mass. According to the integrated coarse and fine moving masking platform, the designing complexity of the drive motor of the masking platform movable platform can be lowered; compared with a linear motor, the planar motor can provide push force in the more directions, the number of motors is reduced, the structure of the integrated coarse and fine moving masking platform movable platform is more compact, the inherent frequency and the control bandwidth of the integrated coarse and fine moving masking platform movable platform are improved, and thus control precision is improved.
Description
Technical field
The utility model relates to the rough micro-moving mechanism one mask platform that a kind of planar motor drives, and relates in particular to the electric motor driven rough micro-moving mechanism one of moving iron type planar mask platform, is mainly used in technical field of manufacturing semiconductors.
Background technology
Photoetching process has directly determined the characteristic dimension of large scale integrated circuit, is the critical process that large scale integrated circuit is manufactured.Litho machine is one of most important equipment in photoetching process.Projection objective system, alignment system and ultraprecise workpiece table system are three large core technologies of litho machine.Wherein, ultraprecise workpiece table system comprises the mask platform system of carrying mask plate and the silicon wafer stage system two parts that carry silicon chip.
Mask platform system partly consists of driving motor, mask plate, pedestal, vibrating isolation system and the measuring system etc. of the moving platform of mask platform, balance mass, moving platform.Photo-etching machine exposal technological requirement, the moving platform of mask platform carry mask plate under the driving of driving motor along direction of scanning large stroke (> 132mm) back and forth do " accelerate-at the uniform velocity-slow down " motion, other degree-of-freedom micros (± 2mm).According to the moving platform structure difference of mask platform, the moving platform of mask platform be can be divided into and the mask platform of rough micro-moving mechanism rhythmo structure and the mask platform that the moving platform of mask platform adopts rough micro-moving mechanism integrative-structure adopted.For the mask platform of rough micro-moving mechanism rhythmo structure, the moving platform of mask platform is comprised of the coarse motion platform of large stroke motion and micropositioner two parts of high precision fine tuning.For the mask platform of rough micro-moving mechanism integrative-structure, large stroke motion and high precision fine tuning are completed by the moving platform of an independent rough micro-moving mechanism one mask platform.
The moving platform of mask platform of rough micro-moving mechanism integrative-structure, has the features such as light, the few cable disturbance of quality, and in the mask platform course of work, power consumption is little, lower for the requirement of motor thrust, and theoretical model is more accurate, and some scholars have launched research to it.In prior art, adopt linear motor to drive the six-freedom motion of the moving platform of rough micro-moving mechanism one mask platform, each linear motor can provide along the thrust of motor mover direction of motion with perpendicular to the thrust of motor mover direction of motion.For controlling leveling, the focusing motion of the moving platform of rough micro-moving mechanism one mask platform, at least need three linear motors that vertical direction thrust is provided; For controlling the moving platform six-freedom motion of rough micro-moving mechanism one mask platform, at least also need two other linear motor, its thrust providing is different from the thrust direction that aforesaid linear motor provides.Due to structural limitations, these two kinds of electric motor structures are generally different, increased the design complexities of the moving platform driving motor of rough micro-moving mechanism one mask platform; The linear motor of two kinds of different structures is arranged on the moving platform of rough micro-moving mechanism one mask platform side by side, has increased the width of the moving platform of rough micro-moving mechanism one mask platform, has reduced the natural frequency of the moving platform of rough micro-moving mechanism one mask platform and has controlled bandwidth, affects control accuracy.
Utility model content
The purpose of this utility model is to provide the magnetic levitation rough micro-moving mechanism one mask platform that a kind of planar motor drives, be intended to solve the complicacy designing because of the moving platform driving motor of mask platform that adopts linear electric motors to bring in prior art, cause the width of the moving platform of rough micro-moving mechanism one mask platform to increase, reduced the intrinsic frequent rate of the moving platform of rough micro-moving mechanism one mask platform and controlled bandwidth, and then having affected control accuracy.
The technical solution of the utility model is as follows:
The rough micro-moving mechanism one mask platform that the utility model provides a kind of planar motor to drive, comprises that rough micro-moving mechanism one mask platform move driving motor, mask plate, pedestal, vibrating isolation system and measuring system that platform, balance mass, rough micro-moving mechanism one mask platform move platform; Vibrating isolation system is between balance mass and pedestal, and mask plate is arranged on the moving platform of rough micro-moving mechanism one mask platform, it is characterized in that: the driving motor of the moving platform of this rough micro-moving mechanism one mask platform is moving iron type planar motor; Moving iron type planar motor mover is the permanent magnet array that is arranged on the moving platform of rough micro-moving mechanism one mask platform both sides, and moving iron type planar motor stator is the coil array being arranged in balance mass.
Rough micro-moving mechanism one mask platform described in the utility model, the air floating structure that also comprises the moving platform gravity of rough micro-moving mechanism one mask platform that affords redress, in described air floating structure, air-floatation planar is arranged on the moving platform of rough micro-moving mechanism one mask platform, and pore mounting structure is arranged in balance mass.
Rough micro-moving mechanism one mask platform described in the utility model, the magnetic suspension structure that also comprises the moving platform gravity of rough micro-moving mechanism one mask platform that affords redress, described magnetic suspension structure mover is arranged on the moving platform of rough micro-moving mechanism one mask platform, and magnetic suspension structure stator is arranged in balance mass.
Rough micro-moving mechanism one mask platform described in the utility model, it drives planar motor rotor permanent magnet array arrangement form is two-dimentional Halbach array; Planar motor stator coil array arrangement form has two kinds, a kind of for to arrange along Y-direction, and another kind is arranged along Z direction.
Rough micro-moving mechanism one mask platform described in the utility model adopts transmissive mask plate, and the moving platform of rough micro-moving mechanism one mask platform is hollow type structure, and mask plate position is the moving platform hollow space of rough micro-moving mechanism one mask platform.
Rough micro-moving mechanism one mask platform described in the utility model adopts reflection type mask plate, and the moving platform of rough micro-moving mechanism one mask platform is real heart type structure, and mask plate position is the moving platform of rough micro-moving mechanism one mask platform bottom.
The utility model compared with prior art, have the following advantages and the technique effect of high-lighting: rough micro-moving mechanism one mask platform described in the utility model, use the six-freedom motion of the moving platform of moving iron type planar direct motor drive rough micro-moving mechanism one mask platform of single structure, effectively reduce the design complexities of the moving platform motor of rough micro-moving mechanism one mask platform; Compare with linear motor, planar motor can provide more multidirectional thrust, reduces the quantity of motor, makes the moving platform structure of rough micro-moving mechanism one mask platform compacter, improve the natural frequency of the moving platform of rough micro-moving mechanism one mask platform and control bandwidth, and then improving control accuracy.
Accompanying drawing explanation
Fig. 1 is the rough micro-moving mechanism one mask platform structural representation that the planar motor that provides of the utility model drives.
Fig. 2 is the rough micro-moving mechanism one mask platform structure vertical view that the planar motor that provides of the utility model drives.
Fig. 3 is moving iron type planar motor rotor permanent magnet array arrangement schematic diagram of the present utility model.
Fig. 4 is moving iron type planar stator coils of motor array arrangement schematic diagram of the present utility model.
Fig. 5 a be the utility model for deep ultraviolet (DUV) litho machine, the moving platform structure vertical view of rough micro-moving mechanism one mask platform that planar motor drives.
Fig. 5 b is the cut-open view of A-A face in Fig. 5 a.
Fig. 6 a be the utility model for extreme ultraviolet (EUV) litho machine, the moving platform structure vertical view of rough micro-moving mechanism one mask platform that planar motor drives.
Fig. 6 b is the cut-open view of B-B face in Fig. 6 a.
In figure: 100-rough micro-moving mechanism one mask platform is moved platform; 101-transmissive mask plate; 102-reflection type mask plate; 200-balance mass; 300-moving iron type planar motor; 301-moving iron type planar motor mover; 302-moving iron type planar motor stator; 410-air floating structure; 412-pore mounting structure; 420-magnetic suspension structure; 422-magnetic suspension structure stator; 500-vibrating isolation system.
Embodiment
Below in conjunction with accompanying drawing, principle of the present utility model, structure and embodiment are described in further detail.
Fig. 1 and Fig. 2 are respectively normal axomometric drawing and the vertical views of the rough micro-moving mechanism one mask platform structure that drives of the planar motor that provides of the utility model.The rough micro-moving mechanism one mask platform that this planar motor drives comprises that rough micro-moving mechanism one mask platform move driving motor, mask plate, pedestal 001, vibrating isolation system 500 and measuring system that platform 100, balance mass 200, rough micro-moving mechanism one mask platform move platform; Vibrating isolation system 500 is between balance mass and pedestal, and mask plate is arranged on the moving platform of rough micro-moving mechanism one mask platform.The driving motor of the moving platform of this rough micro-moving mechanism one mask platform adopts moving iron type planar motor 300, moving iron type planar motor mover 301 is for being arranged on the permanent magnet array of the moving platform of rough micro-moving mechanism one mask platform 100 both sides, and moving iron type planar motor stator 302 is for being arranged on the coil array in balance mass 200.The six-freedom motion of the moving platform 100 of this rough micro-moving mechanism one mask platform (the moving large stroke motion of platform Y-direction of rough micro-moving mechanism one mask platform and the fine setting of other five degree of freedom) is driven by the planar motor 300 (permanent magnet array) that is arranged in the moving platform of rough micro-moving mechanism one mask platform 100 both sides.
When the moving platform 100 of rough micro-moving mechanism one mask platform adopts pneumatically supported support pattern, moving platform 100 gravity of vertical force compensation rough micro-moving mechanism one mask platform that provided by air floating structure 410; When the moving platform 100 of rough micro-moving mechanism one mask platform adopts maglev support pattern, moving platform 100 gravity of vertical force compensation rough micro-moving mechanism one mask platform that provided by magnetic suspension structure 420.
The air-floatation planar of described air floating structure 410 is arranged on the moving platform 100 of rough micro-moving mechanism one mask platform, and pore mounting structure 412 is arranged in balance mass 200.
Described magnetic suspension structure mover is arranged on the moving platform 100 of rough micro-moving mechanism one mask platform, magnetic suspension structure stator 422 is arranged in balance mass 200: magnetic suspension structure stator 422 is arranged in the moving platform of rough micro-moving mechanism one mask platform 100 tops, and it moves platform 100 for rough micro-moving mechanism one mask platform gravitation is straight up provided; Magnetic suspension structure stator 422 is arranged in the moving platform of rough micro-moving mechanism one mask platform 100 belows, and it provides repulsion straight up; When magnetic suspension structure stator 422 is arranged in the moving platform of rough micro-moving mechanism one mask platform 100 upper and lower both sides, its resultant direction providing straight up.
Fig. 3 is the mover 301 of moving iron type planar motor described in the utility model, is the permanent magnet array being arranged on the moving platform 100 of rough micro-moving mechanism one mask platform, and its arrangement form is two-dimentional Halbach array.
Fig. 4 is the stator 302 of moving iron type planar motor described in the utility model, and for to be arranged on the coil array in balance mass 200, its arrangement form has two kinds, a kind ofly along Y-direction, arranges, and another kind of directions X is arranged.
Fig. 5 a be the utility model for deep ultraviolet (DUV) litho machine, the vertical view of moving platform 100 structures of rough micro-moving mechanism one mask platform that planar motor drives, Fig. 5 b is the cut-open view of A-A face in Fig. 5 a.This rough micro-moving mechanism one mask platform 100 adopts transmissive mask plate 101, and the moving platform 100 of rough micro-moving mechanism one mask platform is hollow type structure, and mask plate position is moving platform 100 hollow spaces of rough micro-moving mechanism one mask platform.
Fig. 6 a be the utility model for extreme ultraviolet (EUV) litho machine, the vertical view of moving platform 100 structures of rough micro-moving mechanism one mask platform that planar motor drives, Fig. 6 b is the cut-open view of B-B face in Fig. 6 a.This rough micro-moving mechanism one mask platform 100 adopts reflection type mask plate 102, and the moving platform 100 of rough micro-moving mechanism one mask platform is real heart type structure, and mask plate position is the moving platform of rough micro-moving mechanism one mask platform 100 bottoms.
Claims (6)
1. the rough micro-moving mechanism one mask platform that planar motor drives, comprises that rough micro-moving mechanism one mask platform move driving motor, mask plate, pedestal (001), vibrating isolation system (500) and measuring system that platform (100), balance mass (200), rough micro-moving mechanism one mask platform move platform; Vibrating isolation system is between balance mass and pedestal, and mask plate is arranged on the moving platform of rough micro-moving mechanism one mask platform, it is characterized in that: the driving motor of the moving platform of this rough micro-moving mechanism one mask platform is moving iron type planar motor (300); Moving iron type planar motor mover (301) is for being arranged on the permanent magnet array of the moving platform of rough micro-moving mechanism one mask platform both sides, and moving iron type planar motor stator (302) is for being arranged on the coil array in balance mass.
2. the rough micro-moving mechanism one mask platform that a kind of planar motor according to claim 1 drives, it is characterized in that: this rough micro-moving mechanism one mask stage also comprises the air floating structure (410) of the moving platform gravity of rough micro-moving mechanism one mask platform that affords redress, in described air floating structure, air-floatation planar is arranged on the moving platform of rough micro-moving mechanism one mask platform, and pore mounting structure (412) is arranged in balance mass.
3. the rough micro-moving mechanism one mask platform that a kind of planar motor according to claim 1 drives, it is characterized in that: this rough micro-moving mechanism one mask stage also comprises the magnetic suspension structure (420) of the moving platform gravity of rough micro-moving mechanism one mask platform that affords redress, described magnetic suspension structure mover is arranged on the moving platform of rough micro-moving mechanism one mask platform, and magnetic suspension structure stator (422) is arranged in balance mass.
4. the rough micro-moving mechanism one mask platform driving according to a kind of planar motor described in claim 1,2 or 3, is characterized in that: planar motor rotor permanent magnet array arrangement form is two-dimentional Halbach array; Planar motor stator coil array arrangement form has two kinds, a kind of for to arrange along Y-direction, and another kind is arranged along Z direction.
5. the rough micro-moving mechanism one mask platform driving according to a kind of planar motor described in claim 1,2 or 3, it is characterized in that: the mask plate of this rough micro-moving mechanism one mask platform adopts transmissive mask plate (101), the moving platform of rough micro-moving mechanism one mask platform is hollow type structure, and mask plate position is the moving platform hollow space of rough micro-moving mechanism one mask platform.
6. the rough micro-moving mechanism one mask platform driving according to a kind of planar motor described in claim 1 or 3, it is characterized in that: the mask plate of this rough micro-moving mechanism one mask platform adopts reflection type mask plate (102), the moving platform of rough micro-moving mechanism one mask platform is real heart type structure, and mask plate position is the moving platform of rough micro-moving mechanism one mask platform bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420219639.4U CN203838476U (en) | 2014-04-28 | 2014-04-28 | Integrated coarse and fine moving masking platform driven by planar motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420219639.4U CN203838476U (en) | 2014-04-28 | 2014-04-28 | Integrated coarse and fine moving masking platform driven by planar motor |
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| CN203838476U true CN203838476U (en) | 2014-09-17 |
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| CN201420219639.4U Active CN203838476U (en) | 2014-04-28 | 2014-04-28 | Integrated coarse and fine moving masking platform driven by planar motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103926805A (en) * | 2014-04-28 | 2014-07-16 | 清华大学 | Planar motor-driven coarse motion and fine motion integrated mask platform |
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2014
- 2014-04-28 CN CN201420219639.4U patent/CN203838476U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103926805A (en) * | 2014-04-28 | 2014-07-16 | 清华大学 | Planar motor-driven coarse motion and fine motion integrated mask platform |
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| C14 | Grant of patent or utility model | ||
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| CP01 | Change in the name or title of a patent holder |
Address after: 100084 Beijing Haidian District 100084 box 82 box, Tsinghua University Patent Office Co-patentee after: U-PRECISION TECH CO., LTD. Patentee after: Tsinghua University Address before: 100084 Beijing Haidian District 100084 box 82 box, Tsinghua University Patent Office Co-patentee before: U-Precision Tech Co., Ltd. Patentee before: Tsinghua University |
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| CP01 | Change in the name or title of a patent holder |