CN102723842A

CN102723842A - Multi-freedom and long travel magnetic suspension working bench

Info

Publication number: CN102723842A
Application number: CN2012102355339A
Authority: CN
Inventors: 寇宝泉; 张鲁; 张赫; 罗俊
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2012-07-09
Filing date: 2012-07-09
Publication date: 2012-10-10
Anticipated expiration: 2032-07-09
Also published as: CN102723842B

Abstract

The invention provides a multi-freedom and long travel magnetic suspension working bench, which is suitable for a high-precision magnetic suspension working bench used in a vacuum environment. The working bench is formed by a magnetic suspension balance mass framework and a multi-freedom motion unit; the magnetic suspension balancing mass framework is mainly formed by a balancing mass framework and the magnetic suspension unit, wherein the magnetic suspension unit is used for supporting a stator framework and a rotor framework of the balancing mass framework, thus the stator framework cannot be contacted with the rotor framework; the multi-freedom motion unit is mainly formed by a Y-direction long travel linear motor, an X-direction short travel linear motor and a Z-direction magnetic suspension regulating unit, wherein the stators and the rotors of the Y-direction long travel linear motor, the X-direction short travel linear motor and the Z-direction magnetic suspension regulating unit are fixedly connected with the stator framework and the rotor framework respectively, and are used for regulating the 6-DOF motion of the rotor framework. The working bench is particularly used in the vacuum environment.

Description

The long stroke magnetic suspension of multiple degrees of freedom workbench

Technical field

The present invention relates to the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench, belong to machine field.

Background technology

Modern precision, ultraprecise process unit have urgent demand to height response, high-speed, high-precision multiple degrees of freedom workbench, like machining, electronic product production, mechanical handling, manufacturing automation instrumentation even robot driving etc.Usually these workbench produce power drive by rotary electromotor, again by mechanical devices such as belt, ball screws, convert multifreedom motion into.Because mechanical device is complicated, transmission accuracy and speed all are restricted, and the frequent adjustment of need, cause cost height, poor reliability, volume bigger.Initial two-freedom workbench is realized by two direct driving linear motor; Adopt stacked Drive Structure; This structure has increased the complexity of drive system, from not breaking away from the pattern of low dimension motion stack formation higher-dimension motion in essence.For the linear electric motors of bottom, carry the gross mass of upper strata linear electric motors and associated mechanical components thereof, thereby have a strong impact on location and control accuracy.And directly utilize electromagnetic energy to produce the planar motor of plane motion; Have the characteristics of the high and low hear rate of force density, high-speed, high accuracy and high reliability; Because of having saved from the rectilinear motion that rotatablely moves again to the intermediate conversion device of plane motion; Can be controlling object with being made of one of motor structure, have that reaction is fast, highly sensitive, servo-actuated property reaches advantages of simple structure and simple well.According to the generation principle of planar motor electromagnetic push, can planar motor be divided into change magnetic resistance type, synchronized model and induction type.Wherein, good comprehensive performances such as that the synchronized model planar motor has is simple in structure, thrust is big, efficient is high and response speed is fast has broad application prospects in the multiple-degree-of-freedom planar drive unit.

At present, the support pattern of precision stage mainly contains linear slide bearing, linear roller bearing, line slideway and straight line air-float guide rail etc., and linear slide bearing and linear roller bearing only are fit to the supporting of short stroke movable body; Line slideway is claimed line slideway auxiliary, slide rail, linear movement guide rail, linear slide rail, linear rolling track again; Have that positioning accuracy height, bearing capacity are strong, wearing and tearing are little, adapt to high-speed motion, stroke is unrestricted and assembling easily and advantages such as tool interchangeability, become indispensable critical function parts in various lathes, numerical control machining center, the precise electronic machinery.The straight line air-float guide rail has at a high speed, high accuracy, zerofriction force, no wearing and tearing, noiselessness, need not lubricate the wet goods advantage.But line slideway and straight line air-float guide rail can not be used in vacuum, super-clean environment.

The magnetic suspension linear guide rail is a kind of novel guide rail that leans on magnetic field force bearing load or floating platform, does not have Mechanical Contact between its stator, the mover, and mover can reach the very high speed of service and supporting precision.Compare with traditional machine tool guideway; The magnetic suspension linear guide rail has and does not have friction, does not have wearing and tearing, need not to lubricate, energy consumption is low, noise is little, the life-span is long, no oil pollution, maintenance simply, advantages such as operating temperature range is big, be specially adapted to particular surroundingss such as high speed, vacuum, ultra-clean.Simultaneously, because not contact between relative motion surface, thereby thoroughly eliminated creeping phenomenon, not because of the precise decreasing and the life problems of wearing and tearing and contact fatigue is produced.

In high-precision workbench (like mask aligner mask platform); In order to improve the motion control precision, to reduce shock and vibration; Usually adopt the balance mass framework to cushion the reaction force that the linear electric motors high-speed motion produces; The balance mass framework generally adopts the air-float guide rail supporting, but air-float guide rail can not use in vacuum environment.

Summary of the invention

The invention provides a kind of high-precision magnetic suspension workbench that is applicable to that vacuum environment is used.

The long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench comprises magnetic levitation balanced quality framework and multifreedom motion unit; Magnetic levitation balanced quality framework comprises balance mass framework and magnetic suspension unit; The multifreedom motion unit comprises that stator upper substrate, stator infrabasal plate, mover substrate, two cover Y overlap Z to the magnetic suspension adjustment unit to long stroke linear electric motors, two cover X to short stroke linear electric motors and two; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit, and the mover substrate is suspended in this rotor frame;

The balance mass framework comprises rotor frame, two mover frameworks; Rotor frame is gone up side plate, two side plates and the frame structure that following side plate is formed by two; Said mover framework is a rectangular structure; Two mover frameworks are separately fixed at the two ends of the rotor frame of multifreedom motion unit, and said two mover frameworks are embedded in respectively in the last side plate, side plate at rotor frame two ends and the groove that following side plate is formed; Magnetic suspension unit comprises the rotor permanent magnet of the plate shaped parallel magnetization of six chunks and the stator permanent magnet of the plate shaped parallel magnetization of six chunks; Said six rotor permanent magnet are divided into two groups, and three rotor permanent magnet of every group are separately fixed at above the mover framework, following and adjacent with rotor frame side; Said six stator permanent magnets are divided into two groups; Three stator permanent magnets in every group are respectively fixed to the lower surface of the last side plate of rotor frame one end, the upper surface of following side plate and the medial surface of side plate; Be air gap between corresponding stator permanent magnet in position and the rotor permanent magnet, and the magnetizing direction of corresponding rotor permanent magnet in position and stator permanent magnet is opposite;

The Y of multifreedom motion unit to long stroke linear electric motors along Y to axis, X to the short stroke linear electric motors along Y to axis and Z to the magnetic suspension adjustment unit along Y to axis be parallel to each other; Two cover Y are provided with to the symmetrical mirror picture along Y to long stroke linear electric motors; Two cover X are provided with to the symmetrical mirror picture along Y to the short stroke linear electric motors, and two cover Z are provided with to the symmetrical mirror picture along Y to the magnetic suspension adjustment unit;

Y is bilateral primary structure to long stroke linear electric motors, and is short secondary, moving secondary structure, and Y is fixedly connected to the last elementary and stator upper substrate of long stroke linear electric motors, and Y is fixedly connected to the following elementary and stator infrabasal plate of long stroke linear electric motors; Y is fixedly connected with the mover substrate to the secondary of long stroke linear electric motors, said Y to long stroke linear electric motors be used to adjust the mover substrate along Y to movement travel;

X is bilateral primary structure to the short stroke linear electric motors, and is short secondary, moving secondary structure, and X is fixedly connected to the last elementary and stator upper substrate of short stroke linear electric motors, and X is fixedly connected to the following elementary and stator infrabasal plate of short stroke linear electric motors; X is fixedly connected with the mover substrate to the secondary of short stroke linear electric motors, said X to the short stroke linear electric motors be used to adjust the mover substrate along X to movement travel;

Z is made up of primary and secondary to the magnetic suspension adjustment unit; It between the primary and secondary air gap; Z is fixedly connected to the last elementary and stator upper substrate of magnetic suspension adjustment unit; Z is fixed on the stator infrabasal plate of multifreedom motion unit to the following elementary iron core of magnetic suspension adjustment unit, and Z is fixedly connected with the mover substrate to the secondary of magnetic suspension adjustment unit, said Z to the magnetic suspension adjustment unit be used to adjust the mover substrate along Z to movement travel.

In the long stroke magnetic suspension of the multiple degrees of freedom of the present invention workbench; The last secondary permanent magnet of Y in long stroke linear electric motors is identical with the structure of following secondary permanent magnet; Can adopt existing various magnet structures to realize, for example: can adopt Surface Mount magnet structure, built-in permanent magnetic body structure or Halbach magnet structure.At this, only provide a kind of embodiment of concrete Surface Mount magnet structure: said down secondary permanent magnet by the polylith permanent magnet along Y to equidistantly be arranged in row, every permanent magnet is parallel magnetization, and the magnetizing direction of two adjacent permanent magnets is opposite.

Magnetic levitation balanced quality framework also can add active force control magnetic suspension unit.

Magnetic suspension workbench of the present invention adopts magnetic levitation balanced quality framework to reduce vibration and impact in the working table movement, and the workbench mover is moving secondary structure, and mover is that complete noncontact is supported; Realized the 6DOF motion control of electric mover; And control easily, and heavy moving parts is light, and system dynamic characteristic is good; Control precision is high, in vacuum environment.

Description of drawings

Fig. 1 to Fig. 3 is the structural representation of the long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench.

Fig. 4 to Fig. 6 is the structural representation of the long stroke magnetic suspension of embodiment two described a kind of multiple degrees of freedoms workbench, and wherein, Fig. 4 is the secondary structure sketch map, and Fig. 5 is following primary structure sketch map, and Fig. 6 is the partial enlarged drawing of Fig. 5.

Fig. 7 to Fig. 9 is the structural representation of the long stroke magnetic suspension of embodiment three described a kind of multiple degrees of freedoms workbench, and wherein, Fig. 7 is the secondary structure sketch map, and Fig. 8 is following primary structure sketch map, and Fig. 9 is the partial enlarged drawing of Fig. 8.

Figure 10 to Figure 12 is the structural representation of the long stroke magnetic suspension of embodiment four described a kind of multiple degrees of freedoms workbench, and wherein, Figure 10 is the secondary structure sketch map, and Figure 11 is following primary structure sketch map, and Figure 12 is the partial enlarged drawing of Figure 11.

Figure 13 to Figure 15 is the structural representation of the long stroke magnetic suspension of embodiment five described a kind of multiple degrees of freedoms workbench, and wherein, Figure 13 is the secondary structure sketch map, and Figure 14 is following primary structure sketch map, and Figure 15 is the partial enlarged drawing of Figure 14.

Figure 16 to Figure 18 is the structural representation of the long stroke magnetic suspension of embodiment six described a kind of multiple degrees of freedoms workbench, and wherein, Figure 16 is the secondary structure sketch map, and Figure 17 is following primary structure sketch map, and Figure 18 is the partial enlarged drawing of Figure 17.

Figure 19 to Figure 21 is the structural representation of the long stroke magnetic suspension of embodiment seven described a kind of multiple degrees of freedoms workbench, and wherein, Figure 19 is the secondary structure sketch map, and Figure 20 is following primary structure sketch map, and Figure 21 is the partial enlarged drawing of Figure 20.

Figure 22 to Figure 24 is the structural representation of the long stroke magnetic suspension of embodiment eight described a kind of multiple degrees of freedoms workbench, and wherein, Figure 22 is the secondary structure sketch map, and Figure 23 is following primary structure sketch map, and Figure 24 is the partial enlarged drawing of Figure 23.

Figure 25 to Figure 27 is the structural representation of the long stroke magnetic suspension of embodiment nine described a kind of multiple degrees of freedoms workbench, and wherein, Figure 25 is the secondary structure sketch map, and Figure 26 is following primary structure sketch map, and Figure 27 is the partial enlarged drawing of Figure 26.

Figure 28 to Figure 30 is the structural representation of the long stroke magnetic suspension of embodiment ten described a kind of multiple degrees of freedoms workbench, and wherein, Figure 28 is the secondary structure sketch map, and Figure 29 is following primary structure sketch map, and Figure 30 is the partial enlarged drawing of Figure 29.

Embodiment

Embodiment one: the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench comprises magnetic levitation balanced quality framework 1 and multifreedom motion unit 2; Magnetic levitation balanced quality framework 1 comprises balance mass framework and magnetic suspension unit; Multifreedom motion unit 2 comprises that stator upper substrate 2-1, stator infrabasal plate 2-2, mover substrate 2-3, two cover Y overlap Z to the magnetic suspension adjustment unit to long stroke linear electric motors, two cover X to short stroke linear electric motors and two; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit 2, and mover substrate 2-3 is suspended in this rotor frame;

Balance mass framework 1 comprises rotor frame, two mover framework 1-5; Rotor frame is gone up side plate 1-1, two side plate 1-2 and the frame structure that following side plate 1-3 forms by two; Said mover framework 1-5 is a rectangular structure; Two mover framework 1-5 are separately fixed at the two ends of the rotor frame of multifreedom motion unit 2, and said two mover framework 1-5 are embedded in respectively in the last side plate 1-1, side plate 1-2 at rotor frame two ends and the groove that following side plate 1-3 forms; Magnetic suspension unit comprises the rotor permanent magnet 1-6 of the plate shaped parallel magnetization of six chunks and the stator permanent magnet 1-4 of the plate shaped parallel magnetization of six chunks; Said six rotor permanent magnet 1-6 are divided into two groups, and three rotor permanent magnet 1-6 of every group are separately fixed at above the mover framework 1-5, following and adjacent with rotor frame side; Said six stator permanent magnet 1-4 are divided into two groups; Three stator permanent magnet 1-4 in every group are respectively fixed to the lower surface of the last side plate 1-1 of rotor frame one end, the upper surface of following side plate and the medial surface of side plate 1-2; Between corresponding stator permanent magnet 1-4 in position and the rotor permanent magnet 1-6 is air gap, and the magnetizing direction of corresponding rotor permanent magnet 1-6 in position and stator permanent magnet 1-4 is opposite;

Embodiment two: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; Said Y to long stroke linear electric motors last elementary and following elementary with secondary for reference mirror looks like to be symmetrical set, following elementary primary substrate 4-4 and the elementary winding 4-3 of comprising, said primary substrate 4-4 is fixed on the upside of stator infrabasal plate 2-2; Said elementary winding 4-3 is heterogeneous symmetric winding; To being divided into the i section, i is a natural number to this elementary winding 4-3, and i >=1 along Y; Every section elementary winding is heterogeneous symmetric winding, and the elementary winding of said i section is fixed on to forming a line on the primary substrate 4-4 along Y, the effective edge of said elementary winding all with Y to perpendicular; Y is to secondary secondary permanent magnet 4-1, last permanent magnet fixed head, following secondary permanent magnet 4-2 and the following permanent magnet fixed head of comprising of long stroke linear electric motors; The said permanent magnet fixed head of going up is fixed on mover substrate upper and lower surfaces with following permanent magnet fixed head symmetry, goes up secondary permanent magnet 4-1 and fixes or be embedded on the permanent magnet fixed head; Secondary permanent magnet 4-2 fixes or is embedded in down on the permanent magnet fixed head down;

X is in the short stroke linear electric motors; The elementary elementary iron core and the elementary winding 3-3 of comprising on every limit, said elementary winding is fixed on the air gap side of elementary iron core, and the elementary winding on every limit is made up of j coil; J coil along Y to equidistant arrangement; J is a natural number, and j >=1, the effective edge of each coil be parallel to Y to; X is made up of secondary last permanent magnet 3-1, secondary permanent magnet 3-2 down, last permanent magnet fixed head and following permanent magnet fixed head to the secondary of short stroke linear electric motors; Last permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate 2-3; Secondary upward permanent magnet 3-1 is fixed on the upside of permanent magnet fixed head; Secondary permanent magnet 3-2 down is fixed on down the downside of permanent magnet fixed head, and secondary upward permanent magnet 3-1 and secondary permanent magnet 3-2 mirror image down are symmetrical set; Wherein, The secondary permanent magnet 3-1 that goes up is by forming to the two row permanent magnets that are parallel to each other that are provided with along X, and said two row permanent magnets respectively with corresponding elementary winding in two effective edges of coil corresponding, all permanent magnets are parallel magnetization; And the magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite;

Z is to elementary elementary iron core, elementary winding and the primary permanent magnet body 5-5 of comprising in every limit of magnetic suspension adjustment unit; To being divided into the k section, k is a natural number to said elementary 5-4 unshakable in one's determination, and k >=1 along Y; The iron core memeber that every section elementary iron core is a Г shape by two cross sections constitutes; The primary permanent magnet body is flat permanent magnet body 5-5, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form the door font; Elementary winding is made up of a plurality of coils, and two the Г shapes vertical stem stem unshakable in one's determination in every section elementary iron core is wound with a coil respectively, and said two coils are connected in series; Secondary magnetic secondary metal yoke plate 5-1 and the secondary metal yoke plate of the magnetic 5-2 of comprising, said upward magnetic secondary metal yoke plate 5-1 and the secondary metal yoke plate of magnetic 5-2 mirror image symmetry are installed on the upper and lower surface of mover substrate 2-3.

When the j in this execution mode and the equal value of k were 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Fig. 1 to 6.

Embodiment three: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit, the two public one shared secondary;

The elementary elementary 5-4 unshakable in one's determination and the elementary winding 5-3 of comprising on Z every limit in the magnetic suspension adjustment unit, said elementary 5-4 unshakable in one's determination is plate shaped iron core, said elementary winding is fixed on the air gap side of elementary iron core; Said elementary winding is made up of 2k coil; 2k coil is divided into capable two row of k, and to laterally arranging, k is a natural number to said two alignment circles along X; And k >=1, the effective edge of each coil parallel with Y to;

X every limit elementary in the short stroke linear electric motors comprises elementary winding 3-3; Said elementary winding 3-3 is formed a line by j coil and constitutes, the effective edge of each coil parallel with Y to, this alignment circle is fixed on the air gap side of Z to the elementary winding of magnetic suspension adjustment unit; J is a natural number, and j >=1;

Said shared secondary by last secondary permanent magnet 6-1, down secondary permanent magnet 6-2, go up the permanent magnet fixed head and following permanent magnet fixed head is formed; Said upward permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate; Last secondary permanent magnet 6-1 is mirror image with following secondary permanent magnet 6-2 and is symmetrical set and is separately fixed on permanent magnet fixed head and the following permanent magnet fixed head; Go up secondary permanent magnet 6-1 by forming to the two row permanent magnets that laterally arrange along X; Said two row permanent magnets are corresponding with two effective edges of the coil of X elementary winding in the short stroke linear electric motors respectively; The magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite.

In this execution mode, the value of j and k does not have positive connection, and design according to actual needs both can.

In this execution mode; Two effective edges of the alignment circle of said X elementary winding 3-3 on every limit in the short stroke linear electric motors can be separately fixed at the Z corresponding with it to the center that two of the elementary winding 5-3 of magnetic suspension adjustment unit is listed as this coil, are convenient to the operation of motor manufacture craft.

When the j in this execution mode and the equal value of k were 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Fig. 7 to 9.

The specific embodiment four: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the specific embodiment one described multiple degrees of freedom workbench; In the present embodiment; Said Y to long stroke linear electric motors last elementary and following elementary with secondary for reference mirror looks like to be symmetrical set, following elementary primary substrate 4-4 and the elementary winding 4-3 of comprising, said primary substrate 4-4 is fixed on the upside of stator infrabasal plate 2-2; Said elementary winding 4-3 is heterogeneous symmetric winding; To being divided into the i section, i is a natural number to this elementary winding 4-3, and i >=1 along Y; Said i section winding is fixed on the primary substrate 4-4 along Y to forming a line; Y is to secondary secondary permanent magnet 4-1, last permanent magnet fixed head, following secondary permanent magnet 4-2 and the following permanent magnet fixed head of comprising of long stroke linear electric motors; The said permanent magnet fixed head of going up is fixed on mover substrate upper and lower surface with following permanent magnet fixed head symmetry, goes up secondary permanent magnet 4-1 and fixes or be embedded on the permanent magnet fixed head; Secondary permanent magnet 4-2 fixes or is embedded in down on the permanent magnet fixed head down;

X is in the short stroke linear electric motors; The elementary elementary iron core and the elementary winding of comprising on every limit, said elementary winding is fixed on the air gap side of elementary iron core, and the elementary winding on every limit is made up of j coil; J coil along Y to equidistant arrangement; J is a natural number, and j >=1, the effective edge of each coil be parallel to Y to; X is made up of secondary last permanent magnet 3-1, secondary permanent magnet 3-2 down, last permanent magnet fixed head and following permanent magnet fixed head to the secondary of short stroke linear electric motors; Last permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate 2-3; Secondary upward permanent magnet 3-1 is fixed on the upside of permanent magnet fixed head, and secondary permanent magnet 3-2 down is fixed on down the downside of permanent magnet fixed head, and; Secondary upward permanent magnet 3-1 and secondary permanent magnet 3-2 mirror image down are symmetrical set; Wherein, the secondary permanent magnet 3-1 that goes up is by forming to the two row permanent magnets that are parallel to each other that are provided with along X, and said two row permanent magnets respectively with corresponding elementary winding in two effective edges of coil corresponding; All permanent magnets are parallel magnetization; And plane, the air gap that said magnetizing direction is adjacent place is perpendicular, and it is identical to be positioned at the magnetizing direction of permanent magnet of same row, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite;

Z is to elementary elementary iron core and the elementary winding of comprising in every limit of magnetic suspension adjustment unit; To being divided into the k section, k is a natural number to said elementary iron core, and k >=1 along Y; The iron core memeber that every section elementary iron core is a Г shape by two cross sections constitutes; The primary permanent magnet body is the flat permanent magnet body, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form the door font; Elementary winding is made up of a plurality of coils, and two the Г shapes vertical stem stem unshakable in one's determination in every section elementary iron core is wound with a coil respectively, and said two coils are connected in series; Z forms to secondary secondary permanent magnet 7-1, time secondary permanent magnet 7-2, last permanent magnet fixed head and the following permanent magnet fixed head of comprising of magnetic suspension adjustment unit; Said upward permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate 2-3; Last secondary permanent magnet 7-1 is mirror image with following secondary permanent magnet 7-2 and is symmetrical set and is separately fixed on permanent magnet fixed head and the following permanent magnet fixed head; Go up secondary permanent magnet 7-1 by forming to the two row permanent magnets that laterally arrange along X; Said two row permanent magnets are corresponding to two elementary Г shape iron core memebers of magnetic suspension adjustment unit with Z respectively; The magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite.

When the j in this execution mode and the equal value of k were 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 10 to 12.

Embodiment five: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, said shared secondary two the secondary iron cores that comprise, said two secondary mirror image symmetries unshakable in one's determination are fixed on the upper and lower surface of mover substrate 2-3; The air gap side surface upper edge X of said secondary iron core is to being provided with two secondary salient poles, and said two secondary salient poles are parallel to each other;

X to short stroke linear electric motors and Z to the magnetic suspension adjustment unit public one integrated elementary; This integrated elementary be bilateral structure, integrated elementary elementary 5-6 unshakable in one's determination, elementary winding 5-7 and the primary permanent magnet body 5-8 of comprising on each limit, elementary 5-6 unshakable in one's determination along Y to being divided into the k section; K is a natural number, and k >=1; The shape of every section elementary iron core is identical; The cross section of said elementary iron core is the E font; Be made up of two coils along the elementary winding of Y on every section elementary iron core, on the stem stem of elementary both sides unshakable in one's determination, the primary permanent magnet body is the flat permanent magnet body of parallel magnetization respectively for two primary coils; And plane, the air gap that said magnetizing direction is adjacent place is perpendicular, and said primary permanent magnet body is fixed on the end face of center pinch of elementary iron core.

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 13 to 15.

Embodiment six: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Saidly sharedly secondaryly constitute by the two couples of secondary metal yoke plate of magnetic 5-3; The every secondary metal yoke plate of magnetic 5-3 is plate shaped, the upper and lower surface of mover substrate 2-3 that the two secondary metal yoke plate of magnetic 5-3 among the every couple of secondary metal yoke plate of the magnetic 5-3 are separately fixed at the multifreedom motion unit along X to two ends;

Said integrated elementary elementary 6-1 unshakable in one's determination, elementary winding 6-3 and two primary permanent magnet body 6-2 of comprising, to being divided into the k section, k is a natural number to elementary 6-1 unshakable in one's determination, and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is Г shape by two cross sections iron core memeber constitutes; Primary permanent magnet body 6-2 is the flat permanent magnet body of parallel magnetization, and the horizontal segment of said two Г shape iron core memebers is oppositely arranged and a primary permanent magnet body of center fixed 6-2 forms character; All be wound with a coil on vertical section of two Г shape iron core memebers of every section elementary iron core, all coils is formed elementary winding 6-3; Said upper iron core and following upper surface and lower surface along X end unshakable in one's determination in the middle of vertical section end of two Г shape iron core memebers that close on the outside is separately fixed at unshakable in one's determination; Said upper iron core and down unshakable in one's determinationly be the secondary metal yoke plate of magnetic 5-3 to closing between vertical section of two inboard Г shape iron core memebers along X; Said upper iron core and following iron core are separately fixed at the stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

In this execution mode, the secondary metal yoke plate of magnetic 5-3 can be fixed on the surface of mover substrate 2-3, can also embed mover substrate 2-3 and fix.

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 16 to 18.

Embodiment seven: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Said integrated elementary elementary 6-1 unshakable in one's determination, elementary winding 6-3 and the primary permanent magnet body 6-2 of comprising, to being divided into the k section, k is a natural number to elementary 6-1 unshakable in one's determination, and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and the primary permanent magnet body is for to be the flat permanent magnet body of parallel magnetization, and the plane, air gap place that said magnetizing direction is adjacent is perpendicular; Said upper iron core is oppositely arranged with following opening direction unshakable in one's determination; Two of upper iron core vertically are wound with a coil respectively on the section, are wound with a coil respectively on following two vertical sections unshakable in one's determination, and all coils is formed elementary winding 6-3; Said upper iron core and down upper surface and lower surface along X end unshakable in one's determination in the middle of two that close on the outside vertically the end of section is separately fixed at unshakable in one's determination are fixed on the end face of the other end that this centre is unshakable in one's determination by primary permanent magnet body 6-2; Said upper iron core and following iron core are the secondary metal yoke plate of magnetic 5-3 along X to closing between inboard vertical section; Said upper iron core and following iron core are separately fixed at the stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 19 to 21.

Embodiment eight: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one secondary, and the two elementary combine form integrated elementary;

Said integrated elementary elementary 6-1 unshakable in one's determination, elementary winding 6-3 and two primary permanent magnet body 6-2 of comprising, to being divided into the k section, k is a natural number to elementary 6-1 unshakable in one's determination, and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and the primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the plane, air gap place that said magnetizing direction is adjacent is perpendicular; Said upper iron core is oppositely arranged with following opening direction unshakable in one's determination; Two of upper iron core vertically are wound with a coil respectively on the section, are wound with a coil respectively on following two vertical sections unshakable in one's determination, and all coils is formed elementary winding 6-3; Said upper iron core and following upper surface and the lower surface that is separately fixed at a middle end unshakable in one's determination along X to the end of two vertical sections of closing on the outside unshakable in one's determination; Said upper iron core is unshakable in one's determination fixing respectively by a primary permanent magnet body 6-2 to closing on vertical section inboard end along X with down, is the secondary metal yoke plate of magnetic 5-3 between said two primary permanent magnet body 6-2; Said upper iron core and following iron core are separately fixed at the stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 22 to 24.

Embodiment nine: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one secondary, and the two elementary combine form integrated elementary;

Saidly sharedly secondaryly be made up of two couples of secondary yoke plate 5-4 and two secondary permanent magnet 5-5, said secondary permanent magnet 5-5 is the plate permanent magnet of parallel magnetization, and said magnetizing direction is a horizontal direction; Every secondary yoke plate 5-4 is that strip is dull and stereotyped; The upper and lower surface of mover substrate 2-3 that two secondary yoke plate 5-4 among the every couple of secondary yoke plate 5-4 are separately fixed at the multifreedom motion unit along X to two ends, two secondary permanent magnet 5-5 are separately fixed on the outside end face of two secondary yoke plate 5-4; Two secondary yoke plate 5-4, two secondary permanent magnet 5-5 and said mover substrate 2-3 form slab construction;

Said integrated elementary elementary 6-1 unshakable in one's determination and the elementary winding 6-3 of comprising, to being divided into the k section, k is a natural number to elementary 6-1 unshakable in one's determination, and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and said upper iron core is oppositely arranged with opening direction unshakable in one's determination down, is wound with a coil respectively on two vertical sections of upper iron core; Be wound with a coil respectively on following two vertical sections unshakable in one's determination, all coils is formed elementary winding 6-3; Said upper iron core and following upper surface and the lower surface that is separately fixed at a middle end unshakable in one's determination along X to the end of two vertical sections of closing on the outside unshakable in one's determination; Said upper iron core and following iron core are secondary along X between inboard vertical section to closing on; Said upper iron core and following iron core are separately fixed at the stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

In this execution mode, secondary yoke plate 5-4 can be fixed on the surface of mover substrate 2-3, can also embed mover substrate 2-3 and fix.

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 25 to 27.

Embodiment ten: this execution mode is a kind of concrete structure of the long stroke magnetic suspension of embodiment one described multiple degrees of freedom workbench; In this execution mode; The X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Saidly sharedly secondaryly be made up of two couples of secondary yoke plate 5-4 and four secondary permanent magnet 5-5, said secondary permanent magnet 5-5 is the plate permanent magnet of parallel magnetization, and said magnetizing direction be parallel to Z to; Every secondary yoke plate 5-4 is the strip flat board, the upper and lower surface of mover substrate 2-3 that two secondary yoke plate 5-4 of every couple of secondary yoke plate 5-4 are separately fixed at the multifreedom motion unit along X to two ends; The air gap side of every secondary yoke plate 5-4 all is fixed with a secondary permanent magnet 5-5;

When the k value in this execution mode was 4, the structure of the long stroke magnetic suspension of the described multiple degrees of freedom of this execution mode workbench was referring to shown in Figure 28 to 30.

The last secondary permanent magnet 4-1 of the described Y of above-mentioned each execution mode in long stroke linear electric motors is identical with the structure of following secondary permanent magnet 4-2; Can adopt existing various magnet structures to realize, for example: can adopt Surface Mount magnet structure, built-in permanent magnetic body structure or Halbach magnet structure.At this, only provide a kind of embodiment of concrete Surface Mount magnet structure: said down secondary permanent magnet 4-2 by the polylith permanent magnet along Y to equidistantly be arranged in row, every permanent magnet is parallel magnetization, and the magnetizing direction of two adjacent permanent magnets is opposite.

Magnetic levitation balanced quality framework in the long stroke magnetic suspension of the multiple degrees of freedom of the present invention workbench also can add active force control magnetic suspension unit.

Concrete structure in the long stroke magnetic suspension of the multiple degrees of freedom of the present invention workbench is not limited to the described concrete structure of above-mentioned each execution mode, can also be the reasonable combination of the described technical characterictic of each execution mode.

Claims

1. the long stroke magnetic suspension of multiple degrees of freedom workbench, this workbench comprise magnetic levitation balanced quality framework (1) and multifreedom motion unit (2); Magnetic levitation balanced quality framework (1) comprises balance mass framework and magnetic suspension unit; Multifreedom motion unit (2) comprises that stator upper substrate (2-1), stator infrabasal plate (2-2), mover substrate (2-3), two cover Y overlap Z to the magnetic suspension adjustment unit to long stroke linear electric motors, two cover X to short stroke linear electric motors and two; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit (2), and mover substrate (2-3) is suspended in this rotor frame;

Balance mass framework (1) comprises rotor frame, two mover frameworks (1-5); Rotor frame is gone up the frame structure that side plate (1-1), two side plates (1-2) and a following side plate (1-3) are formed by two; Said mover framework (1-5) is a rectangular structure; Two mover frameworks (1-5) are separately fixed at the two ends of the rotor frame of multifreedom motion unit (2), and said two mover frameworks (1-5) are embedded in respectively in the last side plate (1-1), side plate (1-2) at rotor frame two ends and the groove that following side plate (1-3) is formed; Magnetic suspension unit comprises the rotor permanent magnet (1-6) of the plate shaped parallel magnetization of six chunks and the stator permanent magnet (1-4) of the plate shaped parallel magnetization of six chunks; Said six rotor permanent magnet (1-6) are divided into two groups, and three rotor permanent magnet (1-6) of every group are separately fixed at top, following and adjacent with the rotor frame side of a mover framework (1-5); Said six stator permanent magnets (1-4) are divided into two groups; Three stator permanent magnets (1-4) in every group are respectively fixed to the lower surface of the last side plate (1-1) of rotor frame one end, the upper surface of following side plate and the medial surface of side plate (1-2); Between corresponding stator permanent magnet in position (1-4) and the rotor permanent magnet (1-6) is air gap, and the corresponding rotor permanent magnet in position (1-6) is opposite with the magnetizing direction of stator permanent magnet (1-4);

2. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench is characterized in that, said Y is to the last elementary of long stroke linear electric motors and elementaryly look like to be symmetrical set for reference mirror with secondary down; Following elementary primary substrate (4-4) and the elementary winding (4-3) of comprising; Said primary substrate (4-4) is fixed on the upside of stator infrabasal plate (2-2), and said elementary winding (4-3) is heterogeneous symmetric winding, this elementary winding (4-3) along Y to being divided into the i section; I is a natural number, and i >=1; Every section elementary winding is heterogeneous symmetric winding, and the elementary winding of said i section is fixed on to forming a line on the primary substrate (4-4) along Y, the effective edge of said elementary winding all with Y to perpendicular; Y is to secondary secondary permanent magnet (4-1), last permanent magnet fixed head, following secondary permanent magnet (4-2) and the following permanent magnet fixed head of comprising of long stroke linear electric motors; The said permanent magnet fixed head of going up is fixed on mover substrate upper and lower surfaces with following permanent magnet fixed head symmetry, goes up secondary permanent magnet (4-1) and fixes or be embedded on the permanent magnet fixed head; Secondary permanent magnet (4-2) is fixed or is embedded in down on the permanent magnet fixed head down;

X is in the short stroke linear electric motors; The elementary elementary iron core and the elementary winding (3-3) of comprising on every limit, said elementary winding is fixed on the air gap side of elementary iron core, and the elementary winding on every limit is made up of j coil; J coil along Y to equidistant arrangement; J is a natural number, and j >=1, the effective edge of each coil be parallel to Y to; X is made up of secondary last permanent magnet (3-1), secondary permanent magnet (3-2) down, last permanent magnet fixed head and following permanent magnet fixed head to the secondary of short stroke linear electric motors; Last permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate (2-3); Secondary upward permanent magnet (3-1) is fixed on the upside of permanent magnet fixed head; Secondary permanent magnet (3-2) down is fixed on down the downside of permanent magnet fixed head, and secondary upward permanent magnet (3-1) and secondary permanent magnet (3-2) mirror image down are symmetrical set; Wherein, The secondary permanent magnet (3-1) of going up is by forming to the two row permanent magnets that are parallel to each other that are provided with along X, and said two row permanent magnets respectively with corresponding elementary winding in two effective edges of coil corresponding, all permanent magnets are parallel magnetization; And the magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite;

Z is to elementary elementary iron core, elementary winding and level permanent magnet (5-5) the primary permanent magnet body (5-5) of comprising in every limit of magnetic suspension adjustment unit; To being divided into the k section, k is a natural number to said elementary iron core (5-4), and k >=1 along Y; The iron core memeber that every section elementary iron core is a Г shape by two cross sections constitutes; The primary permanent magnet body is flat permanent magnet body (5-5), and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form the door font; Elementary winding is made up of a plurality of coils, and two the Г shapes vertical stem stem unshakable in one's determination in every section elementary iron core is wound with a coil respectively, and said two coils are connected in series; Secondary secondary metal yoke plate of magnetic (5-1) and the secondary metal yoke plate of magnetic (5-2) of comprising, said upward secondary metal yoke plate of magnetic (5-1) and the secondary metal yoke plate of magnetic (5-2) mirror image symmetry are installed on the upper and lower surface of mover substrate (2-3).

3. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench is characterized in that the X of multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit, the two public one shared secondary;

The elementary elementary iron core (5-4) and the elementary winding (5-3) of comprising on Z every limit in the magnetic suspension adjustment unit, said elementary iron core (5-4) is plate shaped iron core, said elementary winding is fixed on the air gap side of elementary iron core; Said elementary winding is made up of 2k coil; 2k coil is divided into capable two row of k, and to laterally arranging, k is a natural number to said two alignment circles along X; And k >=1, the effective edge of each coil parallel with Y to;

The elementary elementary winding (3-3) that comprises on X every limit in the short stroke linear electric motors; Said elementary winding (3-3) is formed a line by j coil and constitutes; The effective edge of each coil parallel with Y to; This alignment circle is fixed on the air gap side of Z to the elementary winding of magnetic suspension adjustment unit, and j is a natural number, and j >=1;

Said shared secondary by last secondary permanent magnet (6-1), down secondary permanent magnet (6-2), go up the permanent magnet fixed head and following permanent magnet fixed head is formed; Said upward permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate; Last secondary permanent magnet (6-1) and following secondary permanent magnet (6-2) are mirror image and are symmetrical set and are separately fixed on permanent magnet fixed head and the following permanent magnet fixed head; Go up secondary permanent magnet (6-1) by forming to the two row permanent magnets that laterally arrange along X; Said two row permanent magnets are corresponding with two effective edges of the coil of X elementary winding in the short stroke linear electric motors respectively; The magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite.

4. the long stroke magnetic suspension of multiple degrees of freedom according to claim 2 workbench; It is characterized in that said Y to long stroke linear electric motors last elementary and following elementary with secondary for reference mirror looks like to be symmetrical set, following elementary primary substrate (4-4) and the elementary winding (4-3) of comprising, said primary substrate (4-4) is fixed on the upside of stator infrabasal plate (2-2); Said elementary winding (4-3) is heterogeneous symmetric winding; To being divided into the i section, i is a natural number to this elementary winding (4-3), and i >=1 along Y; Said i section winding is fixed on to forming a line on the primary substrate (4-4) along Y; Y is to secondary secondary permanent magnet (4-1), last permanent magnet fixed head, following secondary permanent magnet (4-2) and the following permanent magnet fixed head of comprising of long stroke linear electric motors; The said permanent magnet fixed head of going up is fixed on mover substrate upper and lower surfaces with following permanent magnet fixed head symmetry, goes up secondary permanent magnet (4-1) and fixes or be embedded on the permanent magnet fixed head; Secondary permanent magnet (4-2) is fixed or is embedded in down on the permanent magnet fixed head down;

X is in the short stroke linear electric motors; The elementary elementary iron core and the elementary winding of comprising on every limit, said elementary winding is fixed on the air gap side of elementary iron core, and the elementary winding on every limit is made up of j coil; J coil along Y to equidistant arrangement; J is a natural number, and j >=1, the effective edge of each coil be parallel to Y to; X is made up of secondary last permanent magnet (3-1), secondary permanent magnet (3-2) down, last permanent magnet fixed head and following permanent magnet fixed head to the secondary of short stroke linear electric motors; Last permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate (2-3); Secondary upward permanent magnet (3-1) is fixed on the upside of permanent magnet fixed head, and secondary permanent magnet (3-2) down is fixed on down the downside of permanent magnet fixed head, and; Secondary upward permanent magnet (3-1) and secondary permanent magnet (3-2) mirror image down are symmetrical set; Wherein, the secondary permanent magnet (3-1) of going up is by forming to the two row permanent magnets that are parallel to each other that are provided with along X, and said two row permanent magnets respectively with corresponding elementary winding in two effective edges of coil corresponding; All permanent magnets are parallel magnetization; And plane, the air gap that said magnetizing direction is adjacent place is perpendicular, and it is identical to be positioned at the magnetizing direction of permanent magnet of same row, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite;

Z is to elementary elementary iron core (5-4) and the elementary winding (5-3) of comprising in every limit of magnetic suspension adjustment unit; To being divided into the k section, k is a natural number to said elementary iron core, and k >=1 along Y; The iron core memeber that every section elementary iron core is a Г shape by two cross sections constitutes; The primary permanent magnet body is the flat permanent magnet body, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form the door font; Elementary winding is made up of a plurality of coils, and two the Г shapes vertical stem stem unshakable in one's determination in every section elementary iron core is wound with a coil respectively, and said two coils are connected in series;

Z forms to secondary secondary permanent magnet (7-1), time secondary permanent magnet (7-2), last permanent magnet fixed head and the following permanent magnet fixed head of comprising of magnetic suspension adjustment unit; Said upward permanent magnet fixed head and following permanent magnet fixed head mirror image symmetry are fixed on the upper and lower surfaces of mover substrate (2-3); Last secondary permanent magnet (7-1) and following secondary permanent magnet (7-2) are mirror image and are symmetrical set and are separately fixed on permanent magnet fixed head and the following permanent magnet fixed head; Go up secondary permanent magnet (7-1) by forming to the two row permanent magnets that laterally arrange along X; Said two row permanent magnets are corresponding to two elementary Г shape iron core memebers of magnetic suspension adjustment unit with Z respectively; The magnetizing direction of permanent magnet that is positioned at same row is identical, and the magnetizing direction of permanent magnet that is positioned at different lines is opposite.

5. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary; Said shared secondary two the secondary iron cores that comprise; Said two secondary mirror image symmetries unshakable in one's determination are fixed on the upper and lower surface of mover substrate (2-3), and the air gap side surface upper edge X of said secondary iron core is to being provided with two secondary salient poles, and said two secondary salient poles are parallel to each other;

X to short stroke linear electric motors and Z to the magnetic suspension adjustment unit public one integrated elementary; This integrated elementary be bilateral structure; Integrated elementary elementary iron core (5-6), elementary winding (5-7) and the primary permanent magnet body (5-8) of comprising on each limit; To being divided into the k section, k is a natural number to elementary iron core (5-6), and k >=1 along Y; The shape of every section elementary iron core is identical; The cross section of said elementary iron core is the E font; Be made up of two coils along the elementary winding of Y on every section elementary iron core, on the stem stem of elementary both sides unshakable in one's determination, the primary permanent magnet body is the flat permanent magnet body of parallel magnetization respectively for two primary coils; And plane, the air gap that said magnetizing direction is adjacent place is perpendicular, and said primary permanent magnet body is fixed on the end face of center pinch of elementary iron core.

6. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Saidly sharedly secondaryly constitute by two pairs of secondary metal yoke plates of magnetic (5-3); The every secondary metal yoke plate of magnetic (5-3) is plate shaped, the upper and lower surface of mover substrate (2-3) that the secondary metal yoke plates of two magnetic (5-3) in every pair of secondary metal yoke plate of magnetic (5-3) are separately fixed at the multifreedom motion unit along X to two ends;

Said integrated elementary elementary iron core (6-1), elementary winding (6-3) and the two primary permanent magnet bodies (6-2) of comprising, to being divided into the k section, k is a natural number to elementary iron core (6-1), and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is Г shape by two cross sections iron core memeber constitutes; Primary permanent magnet body (6-2) is the flat permanent magnet body of parallel magnetization, and the horizontal segment of said two Г shape iron core memebers is oppositely arranged and a primary permanent magnet body of center fixed (6-2) forms character; All be wound with a coil on vertical section of two Г shape iron core memebers of every section elementary iron core, all coils is formed elementary winding (6-3); Said upper iron core and following upper surface and lower surface along X end unshakable in one's determination in the middle of vertical section end of two Г shape iron core memebers that close on the outside is separately fixed at unshakable in one's determination; Said upper iron core and down unshakable in one's determinationly be the secondary metal yoke plate of magnetic (5-3) to closing between vertical section of two inboard Г shape iron core memebers along X; Said upper iron core and following iron core are separately fixed at the stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

7. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Said integrated elementary elementary iron core (6-1), elementary winding (6-3) and the primary permanent magnet body (6-2) of comprising, to being divided into the k section, k is a natural number to elementary iron core (6-1), and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and the primary permanent magnet body is for to be the flat permanent magnet body of parallel magnetization, and the plane, air gap place that said magnetizing direction is adjacent is perpendicular; Said upper iron core is oppositely arranged with following opening direction unshakable in one's determination; Two of upper iron core vertically are wound with a coil respectively on the section, are wound with a coil respectively on following two vertical sections unshakable in one's determination, and all coils is formed elementary winding (6-3); Said upper iron core and down upper surface and lower surface along X end unshakable in one's determination in the middle of two that close on the outside vertically the end of section is separately fixed at unshakable in one's determination are fixed on the end face of the other end that this centre is unshakable in one's determination by primary permanent magnet body (6-2); Said upper iron core and following iron core are the secondary metal yoke plate of magnetic (5-3) along X to closing between inboard vertical section; Said upper iron core and following iron core are separately fixed at the stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

8. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one secondary, and the two elementary combine form integrated elementary;

Said integrated elementary elementary iron core (6-1), elementary winding (6-3) and the two primary permanent magnet bodies (6-2) of comprising, to being divided into the k section, k is a natural number to elementary iron core (6-1), and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and the primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the plane, air gap place that said magnetizing direction is adjacent is perpendicular; Said upper iron core is oppositely arranged with following opening direction unshakable in one's determination; Two of upper iron core vertically are wound with a coil respectively on the section, are wound with a coil respectively on following two vertical sections unshakable in one's determination, and all coils is formed elementary winding (6-3); Said upper iron core and following upper surface and the lower surface that is separately fixed at a middle end unshakable in one's determination along X to the end of two vertical sections of closing on the outside unshakable in one's determination; Said upper iron core is unshakable in one's determination fixing respectively by a primary permanent magnet body (6-2) to closing on vertical section inboard end along X with down, is the secondary metal yoke plate of magnetic (5-3) between said two primary permanent magnet bodies (6-2); Said upper iron core and following iron core are separately fixed at the stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

9. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one secondary, and the two elementary combine form integrated elementary;

Said shared secondary by two pairs of secondary yoke plates (5-4) and two secondary permanent magnets (5-5) formation, said secondary permanent magnet (5-5) is the plate permanent magnet of parallel magnetization, and said magnetizing direction is a horizontal direction; Every secondary yoke plate (5-4) is that strip is dull and stereotyped; The upper and lower surface of mover substrate (2-3) that two secondary yoke plates (5-4) in every pair of secondary yoke plate (5-4) are separately fixed at the multifreedom motion unit along X to two ends, two secondary permanent magnets (5-5) are separately fixed on the outside end face of two secondary yoke plates (5-4); Two secondary yoke plates (5-4), two secondary permanent magnets (5-5) form slab construction with said mover substrate (2-3);

Said integrated elementary elementary iron core (6-1) and the elementary winding (6-3) of comprising, to being divided into the k section, k is a natural number to elementary iron core (6-1), and k >=1 along Y; Every section elementary iron core is by upper iron core, following unshakable in one's determination composition the unshakable in one's determination and middle; Said upper iron core looks like to be symmetrical set with middle place unshakable in one's determination level crossing with unshakable in one's determination down; Wherein upper iron core is the door shaped iron core, and said upper iron core is oppositely arranged with opening direction unshakable in one's determination down, is wound with a coil respectively on two vertical sections of upper iron core; Be wound with a coil respectively on following two vertical sections unshakable in one's determination, all coils is formed elementary winding (6-3); Said upper iron core and following upper surface and the lower surface that is separately fixed at a middle end unshakable in one's determination along X to the end of two vertical sections of closing on the outside unshakable in one's determination; Said upper iron core and following iron core are secondary along X between inboard vertical section to closing on; Said upper iron core and following iron core are separately fixed at the stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

10. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench; The X that it is characterized in that the multifreedom motion unit is integrated morphology to short stroke linear electric motors and Z to the magnetic suspension adjustment unit; The two public one shared secondary, and the two elementary combine form integrated elementary;

Saidly sharedly secondaryly be made up of two pairs of secondary yoke plates (5-4) and four secondary permanent magnets (5-5), said secondary permanent magnet (5-5) is the plate permanent magnet of parallel magnetization, and said magnetizing direction for be parallel to Z to; Every secondary yoke plate (5-4) is the strip flat board, the upper and lower surface of mover substrate (2-3) that two secondary yoke plates (5-4) of every pair of secondary yoke plate (5-4) are separately fixed at the multifreedom motion unit along X to two ends; The air gap side of every secondary yoke plate (5-4) all is fixed with a secondary permanent magnet (5-5);