CN102723842B

CN102723842B - Multi-freedom and long travel magnetic suspension working bench

Info

Publication number: CN102723842B
Application number: CN201210235533.9A
Authority: CN
Inventors: 寇宝泉; 张鲁; 张赫; 罗俊
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2012-07-09
Filing date: 2012-07-09
Publication date: 2014-01-22
Anticipated expiration: 2032-07-09
Also published as: CN102723842A

Abstract

The invention provides a multi-freedom and long travel magnetic suspension working bench, which is suitable for a high-precision magnetic suspension working bench used in a vacuum environment. The working bench is formed by a magnetic suspension balance mass framework and a multi-freedom motion unit; the magnetic suspension balancing mass framework is mainly formed by a balancing mass framework and the magnetic suspension unit, wherein the magnetic suspension unit is used for supporting a stator framework and a rotor framework of the balancing mass framework, thus the stator framework cannot be contacted with the rotor framework; the multi-freedom motion unit is mainly formed by a Y-direction long travel linear motor, an X-direction short travel linear motor and a Z-direction magnetic suspension regulating unit, wherein the stators and the rotors of the Y-direction long travel linear motor, the X-direction short travel linear motor and the Z-direction magnetic suspension regulating unit are fixedly connected with the stator framework and the rotor framework respectively, and are used for regulating the 6-DOF motion of the rotor framework. The working bench is particularly used in the vacuum environment.

Description

The long stroke magnetic suspension of multiple degrees of freedom workbench

Technical field

The present invention relates to the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench, belong to machine field.

Background technology

Modern precision, ultraprecise process unit have urgent demand to height response, high-speed, high-precision multi-degree-of-freedom workbench, as the even robot driving etc. of machining, electronic product production, mechanical handling, manufacturing automation instrumentation.Conventionally these workbench produce power drive by rotary electromotor, then by mechanical devices such as belt, ball screws, are converted to multifreedom motion.Complicated due to mechanical device, transmission accuracy and speed are all restricted, and need frequent adjustment, cause that cost is high, poor reliability, volume be larger.Initial two-freedom workbench is to be realized by two linear electric motors that directly drive, adopt stacked Drive Structure, this structure has increased the complexity of drive system, forms the pattern of higher-dimension motion from not breaking away from essence the stack of low-dimensional motion.For the linear electric motors of bottom, carry the gross mass of upper strata linear electric motors and associated mechanical components thereof, thereby have a strong impact on location and control accuracy.And directly utilize electromagnetic energy to produce the planar motor of plane motion, there is the feature of the high and low hear rate of force density, high-speed, high accuracy and high reliability, because having saved from the rectilinear motion that rotatablely moves again to the intermediate conversion device of plane motion, can be control object with being made of one of motor structure, there is the good and advantages of simple structure and simple of fast, highly sensitive, the servo-actuated property of reaction.According to the generation principle of planar motor electromagnetic push, planar motor can be divided into and become magnetic resistance type, synchronized model and induction type.Wherein, that synchronized model planar motor has is simple in structure, thrust is large, efficiency is high and the good combination property such as fast response time, in multiple-degree-of-freedom planar drive unit, has broad application prospects.

At present, the support pattern of precision stage mainly contains linear slide bearing, linear roller bearing, line slideway and straight line air-float guide rail etc., and linear slide bearing and linear roller bearing are only suitable for the supporting of short stroke movable body; Line slideway claims again line slideway auxiliary, slide rail, linear movement guide rail, linear slide rail, linear rolling track, have that positioning precision is high, bearing capacity is strong, it is little to wear and tear, adapt to high-speed motion, stroke is unrestricted and assembling easily and the advantage such as tool interchangeability, become indispensable critical function parts in various lathes, numerical control machining center, precise electronic machinery.Straight line air-float guide rail has at a high speed, high accuracy, zerofriction force, without wearing and tearing, noiselessness, do not need lubricated wet goods advantage.But line slideway and straight line air-float guide rail can not be applied in vacuum, super-clean environment.

Magnetic suspension linear guide rail is by a kind of guide rail of magnetic field force bearing load or floating platform, does not have Mechanical Contact between its stator, mover, and mover can reach the very high speed of service and supporting precision.Compare with traditional machine tool guideway, magnetic suspension linear guide rail have without friction, without wearing and tearing, without lubricated, energy consumption is low, noise is little, the life-span is long, without oil pollution, safeguard simply, the advantage such as operating temperature range is large, be specially adapted to high speed, vacuum, the particular surroundings such as ultra-clean.Meanwhile, due to not contact between relative motion surface, thereby thoroughly eliminated creeping phenomenon, not because of precise decreasing and the life problems of wearing and tearing and contact fatigue produces.

In high-precision workbench (as mask aligner mask platform), in order to improve motion control precision, to reduce shock and vibration, conventionally adopt balance mass framework to cushion the reaction force that linear electric motors high-speed motion produces, balance mass framework generally adopts air-float guide rail supporting, but air-float guide rail can not be used in vacuum environment.

Summary of the invention

The invention provides a kind of high-precision magnetic suspension workbench that vacuum environment is used that is applicable to.

The long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench comprises magnetic levitation balanced Quality framework and multifreedom motion unit; Magnetic levitation balanced Quality framework comprises balance mass framework and magnetic suspension unit; Multifreedom motion unit comprises stator upper substrate, stator infrabasal plate, mover substrate, the long stroke linear electric motors of two cover Y-directions, two cover X-direction short stroke linear electric motors and two cover Z-direction magnetic suspension adjustment units; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit, and mover substrate is suspended in this rotor frame;

Balance mass framework comprises rotor frame, two mover frameworks, rotor frame is by two upper side plate, two side plates and the frame structures that lower side plate forms, described mover framework is rectangular structure, two mover frameworks are separately fixed at the two ends of the rotor frame of multifreedom motion unit, and described two mover frameworks are embedded in respectively in the upper side plate, side plate at rotor frame two ends and groove that lower side plate forms; Magnetic suspension unit comprises the rotor permanent magnet of the plate shaped parallel magnetization of six chunks and the stator permanent magnet of the plate shaped parallel magnetization of six chunks, described six chunk rotor permanent magnet are divided into two groups, and three rotor permanent magnet of every group are separately fixed at above a mover framework, below and the side adjacent with rotor frame; Described six chunk stator permanent magnets are divided into two groups, three stator permanent magnets in every group are respectively fixed to the medial surface of the lower surface of the upper side plate of rotor frame one end, the upper surface of lower side plate and side plate, between the stator permanent magnet that position is corresponding and rotor permanent magnet, be air gap, and the corresponding rotor permanent magnet in position is contrary with the magnetizing direction of stator permanent magnet;

The long stroke linear electric motors of Y-direction of multifreedom motion unit are parallel to each other along the axis of Y-direction and the axis along Y-direction of Z-direction magnetic suspension adjustment unit along axis, the X-direction short stroke linear electric motors of Y-direction, the long stroke linear electric motors of two cover Y-directions arrange along Y-direction symmetrical mirror picture, two cover X-direction short stroke linear electric motors arrange along Y-direction symmetrical mirror picture, and two cover Z-direction magnetic suspension adjustment units arrange along Y-direction symmetrical mirror picture;

The long stroke linear electric motors of Y-direction are bilateral primary structure, and are short secondary, moving secondary structure, and the upper elementary and stator upper substrate of the long stroke linear electric motors of Y-direction is fixedly connected with, and the lower elementary and stator infrabasal plate of the long stroke linear electric motors of Y-direction is fixedly connected with; Secondary and the mover substrate of the long stroke linear electric motors of Y-direction is fixedly connected with, and the long stroke linear electric motors of described Y-direction are for adjusting mover substrate along the movement travel of Y-direction;

X-direction short stroke linear electric motors are bilateral primary structure, and are short secondary, moving secondary structure, and the upper elementary and stator upper substrate of X-direction short stroke linear electric motors is fixedly connected with, and the lower elementary and stator infrabasal plate of X-direction short stroke linear electric motors is fixedly connected with; Secondary and the mover substrate of X-direction short stroke linear electric motors is fixedly connected with, and described X-direction short stroke linear electric motors are for adjusting mover substrate along the movement travel of X-direction;

Z-direction magnetic suspension adjustment unit consists of primary and secondary, it between primary and secondary, is air gap, the upper elementary and stator upper substrate of Z-direction magnetic suspension adjustment unit is fixedly connected with, the lower elementary iron core of Z-direction magnetic suspension adjustment unit is fixed on the stator infrabasal plate of multifreedom motion unit, secondary and the mover substrate of Z-direction magnetic suspension adjustment unit is fixedly connected with, and described Z-direction magnetic suspension adjustment unit is for adjusting mover substrate along the movement travel of Z-direction.

In the long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench, upper secondary permanent magnet in the long stroke linear electric motors of Y-direction is identical with the structure of lower secondary permanent magnet, can adopt existing various magnet structure to realize, for example: can adopt Surface Mount magnet structure, built-in permanent magnetic body structure or Halbach magnet structure.At this, only provide a kind of embodiment of concrete Surface Mount magnet structure: described lower secondary permanent magnet by polylith permanent magnet along Y-direction be equidistantly arranged in row, every permanent magnet is parallel magnetization, and the magnetizing direction of two adjacent permanent magnets is contrary.

Magnetic levitation balanced Quality framework also can add active force and control magnetic suspension unit.

Magnetic suspension workbench of the present invention adopts magnetic levitation balanced Quality framework to reduce vibration and the impact in working table movement, workbench mover is moving secondary structure, mover is that Entirely contactless supports, realized the 6DOF motion control of electric mover, and control easily, heavy moving parts is light, and system dynamic characteristic is good, control precision is high, in vacuum environment.

Accompanying drawing explanation

Fig. 1 to Fig. 3 is the structural representation of the long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench.

Fig. 4 to Fig. 6 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment two, and wherein, Fig. 4 is secondary structure schematic diagram, and Fig. 5 is lower primary structure schematic diagram, and Fig. 6 is the partial enlarged drawing of Fig. 5.

Fig. 7 to Fig. 9 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment three, and wherein, Fig. 7 is secondary structure schematic diagram, and Fig. 8 is lower primary structure schematic diagram, and Fig. 9 is the partial enlarged drawing of Fig. 8.

Figure 10 to Figure 12 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment four, and wherein, Figure 10 is secondary structure schematic diagram, and Figure 11 is lower primary structure schematic diagram, and Figure 12 is the partial enlarged drawing of Figure 11.

Figure 13 to Figure 15 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment five, and wherein, Figure 13 is secondary structure schematic diagram, and Figure 14 is lower primary structure schematic diagram, and Figure 15 is the partial enlarged drawing of Figure 14.

Figure 16 to Figure 18 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment six, and wherein, Figure 16 is secondary structure schematic diagram, and Figure 17 is lower primary structure schematic diagram, and Figure 18 is the partial enlarged drawing of Figure 17.

Figure 19 to Figure 21 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment seven, and wherein, Figure 19 is secondary structure schematic diagram, and Figure 20 is lower primary structure schematic diagram, and Figure 21 is the partial enlarged drawing of Figure 20.

Figure 22 to Figure 24 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment eight, and wherein, Figure 22 is secondary structure schematic diagram, and Figure 23 is lower primary structure schematic diagram, and Figure 24 is the partial enlarged drawing of Figure 23.

Figure 25 to Figure 27 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment nine, and wherein, Figure 25 is secondary structure schematic diagram, and Figure 26 is lower primary structure schematic diagram, and Figure 27 is the partial enlarged drawing of Figure 26.

Figure 28 to Figure 30 is the structural representation of the long stroke magnetic suspension of a kind of multiple degrees of freedom workbench described in embodiment ten, and wherein, Figure 28 is secondary structure schematic diagram, and Figure 29 is lower primary structure schematic diagram, and Figure 30 is the partial enlarged drawing of Figure 29.

Embodiment

Embodiment one: the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment comprises magnetic levitation balanced Quality framework 1 and multifreedom motion unit 2; Magnetic levitation balanced Quality framework 1 comprises balance mass framework and magnetic suspension unit; Multifreedom motion unit 2 comprises stator upper substrate 2-1, stator infrabasal plate 2-2, mover substrate 2-3, the long stroke linear electric motors of two cover Y-directions, two cover X-direction short stroke linear electric motors and two cover Z-direction magnetic suspension adjustment units; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit 2, and mover substrate 2-3 is suspended in this rotor frame;

Balance mass framework 1 comprises rotor frame, two mover framework 1-5, rotor frame is by two upper side plate 1-1, two side plate 1-2 and the frame structures that lower side plate 1-3 forms, described mover framework 1-5 is rectangular structure, two mover framework 1-5 are separately fixed at the two ends of the rotor frame of multifreedom motion unit 2, and described two mover framework 1-5 are embedded in respectively in upper side plate 1-1, the side plate 1-2 at rotor frame two ends and the groove of lower side plate 1-3 composition; Magnetic suspension unit comprises the rotor permanent magnet 1-6 of the plate shaped parallel magnetization of six chunks and the stator permanent magnet 1-4 of the plate shaped parallel magnetization of six chunks, described six rotor permanent magnet 1-6 are divided into two groups, and three rotor permanent magnet 1-6 of every group are separately fixed at above a mover framework 1-5, below and the side adjacent with rotor frame; Described six stator permanent magnet 1-4 are divided into two groups, three stator permanent magnet 1-4 in every group are respectively fixed to the lower surface of upper side plate 1-1 of rotor frame one end, the medial surface of the upper surface of lower side plate and side plate 1-2, between the stator permanent magnet 1-4 that position is corresponding and rotor permanent magnet 1-6, be air gap, and the corresponding rotor permanent magnet 1-6 in position is contrary with the magnetizing direction of stator permanent magnet 1-4;

Embodiment two: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the long stroke linear electric motors of described Y-direction upper elementary and lower elementary take secondaryly look like to be symmetrical arranged as reference mirror, lower elementary primary substrate 4-4 and the armature winding 4-3 of comprising, described primary substrate 4-4 is fixed on the upside of stator infrabasal plate 2-2, described armature winding 4-3 is heterogeneous symmetric winding, this armature winding 4-3 is divided into i section along Y-direction, i is natural number, and i >=1; Every section of armature winding is heterogeneous symmetric winding, and described i section armature winding forms a line and is fixed on primary substrate 4-4 above along Y-direction, and the effective edge of described armature winding is all perpendicular with Y-direction; Secondary secondary permanent magnet 4-1, upper permanent magnet retaining plate, lower secondary permanent magnet 4-2 and the lower permanent magnet retaining plate of comprising of the long stroke linear electric motors of Y-direction, described upper permanent magnet retaining plate and lower permanent magnet retaining plate symmetry are fixed on mover substrate upper and lower surface, and upper secondary permanent magnet 4-1 fixes or be embedded on permanent magnet retaining plate; Lower secondary permanent magnet 4-2 fixes or is embedded on lower permanent magnet retaining plate;

In X-direction short stroke linear electric motors, elementary elementary iron core and the armature winding 3-3 of comprising on every limit, described armature winding is fixed on the air gap side of elementary iron core, the armature winding on every limit consists of j coil, j coil equidistantly arranged along Y-direction, j is natural number, and j >=1, and the effective edge of each coil is parallel to Y-direction, X-direction short stroke linear electric motors secondary by secondary upper permanent magnet 3-1, secondary lower permanent magnet 3-2, upper permanent magnet retaining plate and lower permanent magnet retaining plate form, upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate 2-3, secondary upper permanent magnet 3-1 is fixed on the upside of permanent magnet retaining plate, secondary lower permanent magnet 3-2 is fixed on the downside of lower permanent magnet retaining plate, and, secondary upper permanent magnet 3-1 and secondary lower permanent magnet 3-2 mirror image are symmetrical arranged, wherein, secondary upper permanent magnet 3-1 is comprised of the two row permanent magnets that are parallel to each other that arrange along X-direction, and described two row permanent magnets are corresponding with two effective edges of coil in corresponding armature winding respectively, all permanent magnets are parallel magnetization, and the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary,

Elementary elementary iron core, armature winding and the primary permanent magnet body 5-5 of comprising in every limit of Z-direction magnetic suspension adjustment unit, described elementary 5-4 unshakable in one's determination is divided into k section along Y-direction, k is natural number, and k >=1, the iron core memeber that every section of elementary iron core is Г shape by two cross sections forms, primary permanent magnet body is flat permanent magnet body 5-5, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form door font; Armature winding consists of a plurality of coils, and the vertical stem stem of two Г shape iron cores in every section of elementary iron core is wound with respectively a coil, and described two coils are connected in series; Secondary magnetic secondary metal yoke plate 5-1 and the secondary metal yoke plate of the magnetic 5-2 of comprising, described upper magnetic secondary metal yoke plate 5-1 and the secondary metal yoke plate of magnetic 5-2 mirror image symmetry are arranged on the upper and lower surface of mover substrate 2-3.

When the equal value of the j in present embodiment and k is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Fig. 1 to 6.

Embodiment three: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, and the two public one shares secondary;

Elementary elementary 5-4 unshakable in one's determination and the armature winding 5-3 of comprising on every limit in Z-direction magnetic suspension adjustment unit, described elementary 5-4 unshakable in one's determination is plate shaped iron core, described armature winding is fixed on the air gap side of elementary iron core, described armature winding consists of 2k coil, 2k coil is divided into capable two row of k, and described two alignment circles be arranged in parallel along X-direction, and k is natural number, and k >=1, the parallel and Y-direction of the effective edge of each coil;

The elementary armature winding 3-3 that comprises on every limit in X-direction short stroke linear electric motors, described armature winding 3-3 is formed a line and is formed by j coil, the parallel and Y-direction of the effective edge of each coil, and this alignment circle is fixed on the air gap side of the armature winding of Z-direction magnetic suspension adjustment unit, j is natural number, and j >=1;

Described shared secondary by upper secondary permanent magnet 6-1, lower secondary permanent magnet 6-2, upper permanent magnet retaining plate and lower permanent magnet retaining plate form, described upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate, upper secondary permanent magnet 6-1 and lower secondary permanent magnet 6-2 are mirror image and are symmetrical arranged, and be separately fixed on permanent magnet retaining plate and lower permanent magnet retaining plate, upper secondary permanent magnet 6-1 is comprised of the two row permanent magnets that be arranged in parallel along X-direction, described two row permanent magnets are corresponding with two effective edges of the coil of armature winding in X-direction short stroke linear electric motors respectively, the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary.

In present embodiment, the value of j and k does not have positive connection, and design according to actual needs both can.

In present embodiment, in described X-direction short stroke linear electric motors, two effective edges of an alignment circle of the armature winding 3-3 on every limit can be separately fixed at two centers that are listed as this coil of the armature winding 5-3 of the Z-direction magnetic suspension adjustment unit corresponding with it, are convenient to the operation of motor manufacture craft.

When the equal value of the j in present embodiment and k is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Fig. 7 to 9.

Embodiment four: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the long stroke linear electric motors of described Y-direction upper elementary and lower elementary take secondaryly look like to be symmetrical arranged as reference mirror, lower elementary primary substrate 4-4 and the armature winding 4-3 of comprising, described primary substrate 4-4 is fixed on the upside of stator infrabasal plate 2-2, described armature winding 4-3 is heterogeneous symmetric winding, this armature winding 4-3 is divided into i section along Y-direction, i is natural number, and i >=1; Described i section winding forms a line and is fixed on primary substrate 4-4 along Y-direction, secondary secondary permanent magnet 4-1, upper permanent magnet retaining plate, lower secondary permanent magnet 4-2 and the lower permanent magnet retaining plate of comprising of the long stroke linear electric motors of Y-direction, described upper permanent magnet retaining plate and lower permanent magnet retaining plate symmetry are fixed on mover substrate upper and lower surface, and upper secondary permanent magnet 4-1 fixes or be embedded on permanent magnet retaining plate; Lower secondary permanent magnet 4-2 fixes or is embedded on lower permanent magnet retaining plate;

In X-direction short stroke linear electric motors, elementary elementary iron core and the armature winding of comprising on every limit, described armature winding is fixed on the air gap side of elementary iron core, the armature winding on every limit consists of j coil, j coil equidistantly arranged along Y-direction, j is natural number, and j >=1, and the effective edge of each coil is parallel to Y-direction, X-direction short stroke linear electric motors secondary by secondary upper permanent magnet 3-1, secondary lower permanent magnet 3-2, upper permanent magnet retaining plate and lower permanent magnet retaining plate form, upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate 2-3, secondary upper permanent magnet 3-1 is fixed on the upside of permanent magnet retaining plate, secondary lower permanent magnet 3-2 is fixed on the downside of lower permanent magnet retaining plate, and, secondary upper permanent magnet 3-1 and secondary lower permanent magnet 3-2 mirror image are symmetrical arranged, wherein, secondary upper permanent magnet 3-1 is comprised of the two row permanent magnets that are parallel to each other that arrange along X-direction, and described two row permanent magnets are corresponding with two effective edges of coil in corresponding armature winding respectively, all permanent magnets are parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, and the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary,

Elementary elementary iron core and the armature winding of comprising in every limit of Z-direction magnetic suspension adjustment unit, described elementary iron core is divided into k section along Y-direction, k is natural number, and k >=1, the iron core memeber that every section of elementary iron core is Г shape by two cross sections forms, primary permanent magnet body is flat permanent magnet body, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form door font, armature winding consists of a plurality of coils, and the vertical stem stem of two Г shape iron cores in every section of elementary iron core is wound with respectively a coil, and described two coils are connected in series, Z-direction magnetic suspension adjustment unit secondary comprises secondary permanent magnet 7-1, lower secondary permanent magnet 7-2, upper permanent magnet retaining plate and lower permanent magnet retaining plate form, described upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate 2-3, upper secondary permanent magnet 7-1 and lower secondary permanent magnet 7-2 are mirror image and are symmetrical arranged, and be separately fixed on permanent magnet retaining plate and lower permanent magnet retaining plate, upper secondary permanent magnet 7-1 is comprised of the two row permanent magnets that be arranged in parallel along X-direction, described two row permanent magnets respectively two Г shape iron core memebers elementary with Z-direction magnetic suspension adjustment unit are corresponding, the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary.

When the equal value of the j in present embodiment and k is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 10 to 12.

Embodiment five: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one shares secondary, described shared secondary two the secondary iron cores that comprise, described two secondary mirror image symmetries unshakable in one's determination are fixed on the upper of mover substrate 2-3, lower surface, on the air gap side surface of described secondary iron core, along X-direction, be provided with two secondary salient poles, described two secondary salient poles are parallel to each other,

X-direction short stroke linear electric motors and Z-direction magnetic suspension adjustment unit public one integrated elementary, this integrated elementary be bilateral structure, integrated elementary elementary 5-6 unshakable in one's determination, armature winding 5-7 and the primary permanent magnet body 5-8 of comprising on each limit, elementary 5-6 unshakable in one's determination is divided into k section along Y-direction, k is natural number, and k >=1; The shape of every section of elementary iron core is identical, the cross section of described elementary iron core is E font, along the armature winding on every section of elementary iron core of Y-direction, by two coils, formed, two primary coils are respectively on the stem stem of elementary both sides unshakable in one's determination, primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, described primary permanent magnet body is fixed on the end face of center pinch of elementary iron core.

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 13 to 15.

Embodiment six: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described share secondaryly consists of the two couples of secondary metal yoke plate of magnetic 5-3, the every secondary metal yoke plate of magnetic 5-3 is plate shaped, and the two secondary metal yoke plate of magnetic 5-3 in the every couple of secondary metal yoke plate of magnetic 5-3 are separately fixed at the upper and lower surface of mover substrate 2-3 of multifreedom motion unit along the two ends of X-direction;

Described integrated elementary elementary 6-1 unshakable in one's determination, armature winding 6-3 and the two primary permanent magnet body 6-2 of comprising, elementary 6-1 unshakable in one's determination is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, the iron core memeber that wherein upper iron core is Г shape by two cross sections forms, the flat permanent magnet body that primary permanent magnet body 6-2 is parallel magnetization, the horizontal segment of described two Г shape iron core memebers is oppositely arranged and a primary permanent magnet body 6-2 formation character "door" form structure is fixed in centre; On vertical section of two Г shape iron core memebers of every section of elementary iron core, be all wound with a coil, all coils forms armature winding 6-3; Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of vertical section of two Г shape iron core memebers outside described upper iron core and lower iron core close on along X-direction is separately fixed at; Between vertical section of two Г shape iron core memebers inside described upper iron core and lower iron core close on along X-direction, be the secondary metal yoke plate of magnetic 5-3; Described upper iron core and lower iron core are separately fixed at stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

In present embodiment, the secondary metal yoke plate of magnetic 5-3 can be fixed on the surface of mover substrate 2-3, can also embed mover substrate 2-3 and fix.

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 16 to 18.

Embodiment seven: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described integrated elementary elementary 6-1 unshakable in one's determination, armature winding 6-3 and the primary permanent magnet body 6-2 of comprising, elementary 6-1 unshakable in one's determination is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, primary permanent magnet body is is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding 6-3; In the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at, upper surface and the lower surface of one end unshakable in one's determination, fix by primary permanent magnet body 6-2 on the end face of the other end that this centre is unshakable in one's determination; Between vertical section inside described upper iron core and lower iron core close on along X-direction, be the secondary metal yoke plate of magnetic 5-3; Described upper iron core and lower iron core are separately fixed at stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 19 to 21.

Embodiment eight: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one secondary, and the two elementary combine form integrated elementary;

Described integrated elementary elementary 6-1 unshakable in one's determination, armature winding 6-3 and the two primary permanent magnet body 6-2 of comprising, elementary 6-1 unshakable in one's determination is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding 6-3; Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at; The end of vertical section that described upper iron core and lower iron core close on inner side along X-direction is fixing by a primary permanent magnet body 6-2 respectively, between described two primary permanent magnet body 6-2, is the secondary metal yoke plate of magnetic 5-3; Described upper iron core and lower iron core are separately fixed at stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 22 to 24.

Embodiment nine: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one secondary, and the two elementary combine form integrated elementary;

Described share secondaryly consists of two couples of secondary yoke plate 5-4 and two secondary permanent magnet 5-5, the plate permanent magnet that described secondary permanent magnet 5-5 is parallel magnetization, and described magnetizing direction is horizontal direction; Every secondary yoke plate 5-4 is that strip is dull and stereotyped, two secondary yoke plate 5-4 in every couple of secondary yoke plate 5-4 are separately fixed at the upper and lower surface of mover substrate 2-3 of multifreedom motion unit along the two ends of X-direction, and two secondary permanent magnet 5-5 are separately fixed on the outside end face of two secondary yoke plate 5-4; Two secondary yoke plate 5-4, two secondary permanent magnet 5-5 and described mover substrate 2-3 form slab construction;

Described integrated elementary elementary 6-1 unshakable in one's determination and the armature winding 6-3 of comprising, elementary 6-1 unshakable in one's determination is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding 6-3; Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at; Between vertical section inside described upper iron core and lower iron core close on along X-direction, be secondary; Described upper iron core and lower iron core are separately fixed at stator upper substrate 2-1 and the infrabasal plate 2-2 of multifreedom motion unit.

In present embodiment, secondary yoke plate 5-4 can be fixed on the surface of mover substrate 2-3, can also embed mover substrate 2-3 and fix.

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 25 to 27.

Embodiment ten: present embodiment is a kind of concrete structure of the long stroke magnetic suspension of the multiple degrees of freedom described in embodiment one workbench, in present embodiment, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described share secondaryly consists of two couples of secondary yoke plate 5-4 and four secondary permanent magnet 5-5, the plate permanent magnet that described secondary permanent magnet 5-5 is parallel magnetization, and described magnetizing direction is parallel to Z-direction; Every secondary yoke plate 5-4 is strip flat board, and two secondary yoke plate 5-4 of every couple of secondary yoke plate 5-4 are separately fixed at the upper and lower surface of mover substrate 2-3 of multifreedom motion unit along the two ends of X-direction; The air gap side of every secondary yoke plate 5-4 is all fixed with a secondary permanent magnet 5-5;

When the k value in present embodiment is 4, the structure of the long stroke magnetic suspension of the multiple degrees of freedom workbench described in present embodiment is referring to shown in Figure 28 to 30.

Upper secondary permanent magnet 4-1 in the long stroke linear electric motors of Y-direction described in above-mentioned each execution mode is identical with the structure of lower secondary permanent magnet 4-2, can adopt existing various magnet structure to realize, for example: can adopt Surface Mount magnet structure, built-in permanent magnetic body structure or Halbach magnet structure.At this, only provide a kind of embodiment of concrete Surface Mount magnet structure: described lower secondary permanent magnet 4-2 by polylith permanent magnet along Y-direction be equidistantly arranged in row, every permanent magnet is parallel magnetization, and the magnetizing direction of two adjacent permanent magnets is contrary.

Magnetic levitation balanced Quality framework in the long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench also can add active force and control magnetic suspension unit.

Concrete structure in the long stroke magnetic suspension of multiple degrees of freedom of the present invention workbench is not limited to the described concrete structure of above-mentioned each execution mode, can also be the reasonable combination of the described technical characterictic of each execution mode.

Claims

1. the long stroke magnetic suspension of multiple degrees of freedom workbench, this workbench comprises magnetic levitation balanced Quality framework (1) and multifreedom motion unit (2); Magnetic levitation balanced Quality framework (1) comprises balance mass framework and magnetic suspension unit; Multifreedom motion unit (2) comprises stator upper substrate (2-1), stator infrabasal plate (2-2), mover substrate (2-3), the long stroke linear electric motors of two cover Y-directions, two cover X-direction short stroke linear electric motors and two cover Z-direction magnetic suspension adjustment units; Stator upper substrate and stator infrabasal plate are fixedly connected to form the rotor frame of multifreedom motion unit (2), and mover substrate (2-3) is suspended in this rotor frame;

Balance mass framework (1) comprises rotor frame, two mover frameworks (1-5), the frame structure that rotor frame is comprised of two upper side plates (1-1), two side plates (1-2) and lower side plates (1-3), described mover framework (1-5) is rectangular structure, two mover frameworks (1-5) are separately fixed at the two ends of the rotor frame of multifreedom motion unit (2), and described two mover frameworks (1-5) are embedded in respectively in the upper side plate (1-1), side plate (1-2) at rotor frame two ends and groove that lower side plate (1-3) forms; Magnetic suspension unit comprises the rotor permanent magnet (1-6) of the plate shaped parallel magnetization of six chunks and the stator permanent magnet (1-4) of the plate shaped parallel magnetization of six chunks, described six chunk rotor permanent magnet (1-6) are divided into two groups, and three rotor permanent magnet (1-6) of every group are separately fixed at a mover framework (1-5), and the side adjacent with rotor frame above below; Described six chunk stator permanent magnets (1-4) are divided into two groups, three stator permanent magnets (1-4) in every group are respectively fixed to the lower surface of upper side plate (1-1) of rotor frame one end, the medial surface of the upper surface of lower side plate and side plate (1-2), between the stator permanent magnet (1-4) that position is corresponding and rotor permanent magnet (1-6), be air gap, and the corresponding rotor permanent magnet (1-6) in position is contrary with the magnetizing direction of stator permanent magnet (1-4);

2. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, it is characterized in that, the long stroke linear electric motors of described Y-direction upper elementary and lower elementary take secondaryly look like to be symmetrical arranged as reference mirror, lower elementary primary substrate (4-4) and the armature winding (4-3) of comprising, described primary substrate (4-4) is fixed on the upside of stator infrabasal plate (2-2), and described armature winding (4-3) is heterogeneous symmetric winding, and this armature winding (4-3) is divided into i section along Y-direction, i is natural number, and i >=1; Every section of armature winding is heterogeneous symmetric winding, and described i section armature winding forms a line and is fixed on primary substrate (4-4) above along Y-direction, and the effective edge of described armature winding is all perpendicular with Y-direction; Secondary secondary permanent magnet (4-1), upper permanent magnet retaining plate, lower secondary permanent magnet (4-2) and the lower permanent magnet retaining plate of comprising of the long stroke linear electric motors of Y-direction, described upper permanent magnet retaining plate and lower permanent magnet retaining plate symmetry are fixed on mover substrate upper and lower surface, and upper secondary permanent magnet (4-1) is fixed or is embedded on permanent magnet retaining plate; Lower secondary permanent magnet (4-2) is fixed or is embedded on lower permanent magnet retaining plate;

In X-direction short stroke linear electric motors, elementary elementary iron core and the armature winding (3-3) of comprising on every limit, described armature winding is fixed on the air gap side of elementary iron core, the armature winding on every limit consists of j coil, j coil equidistantly arranged along Y-direction, j is natural number, and j >=1, and the effective edge of each coil is parallel to Y-direction, X-direction short stroke linear electric motors secondary by secondary upper permanent magnet (3-1), secondary lower permanent magnet (3-2), upper permanent magnet retaining plate and lower permanent magnet retaining plate form, upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate (2-3), secondary upper permanent magnet (3-1) is fixed on the upside of permanent magnet retaining plate, secondary lower permanent magnet (3-2) is fixed on the downside of lower permanent magnet retaining plate, and, secondary upper permanent magnet (3-1) and secondary lower permanent magnet (3-2) mirror image are symmetrical arranged, wherein, secondary upper permanent magnet (3-1) is comprised of the two row permanent magnets that are parallel to each other that arrange along X-direction, and described two row permanent magnets are corresponding with two effective edges of coil in corresponding armature winding respectively, all permanent magnets are parallel magnetization, and the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary,

Elementary elementary iron core, armature winding and the primary permanent magnet body (5-5) of comprising in every limit of Z-direction magnetic suspension adjustment unit, described elementary iron core (5-4) is divided into k section along Y-direction, k is natural number, and k >=1, the iron core memeber that every section of elementary iron core is Г shape by two cross sections forms, primary permanent magnet body is flat permanent magnet body (5-5), and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form door font; Armature winding consists of a plurality of coils, and the vertical stem stem of two Г shape iron cores in every section of elementary iron core is wound with respectively a coil, and described two coils are connected in series; The secondary secondary metal yoke plate of magnetic (5-1) and the secondary metal yoke plate of magnetic (5-2) of comprising, the secondary metal yoke plate of the secondary metal yoke plate of described upper magnetic (5-1) and magnetic (5-2) mirror image symmetry is arranged on the upper and lower surface of mover substrate (2-3).

3. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, is characterized in that, the X-direction short stroke linear electric motors of multifreedom motion unit and Z-direction magnetic suspension adjustment unit are integrated morphology, and the two public one shares secondary;

Elementary elementary iron core (5-4) and the armature winding (5-3) of comprising on every limit in Z-direction magnetic suspension adjustment unit, described elementary iron core (5-4) is plate shaped iron core, described armature winding is fixed on the air gap side of elementary iron core, described armature winding consists of 2k coil, 2k coil is divided into capable two row of k, and described two alignment circles be arranged in parallel along X-direction, and k is natural number, and k >=1, the parallel and Y-direction of the effective edge of each coil;

The elementary armature winding (3-3) that comprises on every limit in X-direction short stroke linear electric motors, described armature winding (3-3) is formed a line and is formed by j coil, parallel and the Y-direction of the effective edge of each coil, this alignment circle is fixed on the air gap side of the armature winding of Z-direction magnetic suspension adjustment unit, j is natural number, and j >=1;

Described shared secondary by upper secondary permanent magnet (6-1), lower secondary permanent magnet (6-2), upper permanent magnet retaining plate and lower permanent magnet retaining plate form, described upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate, upper secondary permanent magnet (6-1) and lower secondary permanent magnet (6-2) are mirror image and are symmetrical arranged, and be separately fixed on permanent magnet retaining plate and lower permanent magnet retaining plate, upper secondary permanent magnet (6-1) is comprised of the two row permanent magnets that be arranged in parallel along X-direction, described two row permanent magnets are corresponding with two effective edges of the coil of armature winding in X-direction short stroke linear electric motors respectively, the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary.

4. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, it is characterized in that the long stroke linear electric motors of described Y-direction upper elementary and lower elementary take secondaryly look like to be symmetrical arranged as reference mirror, lower elementary primary substrate (4-4) and the armature winding (4-3) of comprising, described primary substrate (4-4) is fixed on the upside of stator infrabasal plate (2-2), described armature winding (4-3) is heterogeneous symmetric winding, this armature winding (4-3) is divided into i section along Y-direction, and i is natural number, and i >=1; Described i section winding forms a line and is fixed on primary substrate (4-4) along Y-direction, secondary secondary permanent magnet (4-1), upper permanent magnet retaining plate, lower secondary permanent magnet (4-2) and the lower permanent magnet retaining plate of comprising of the long stroke linear electric motors of Y-direction, described upper permanent magnet retaining plate and lower permanent magnet retaining plate symmetry are fixed on mover substrate upper and lower surface, and upper secondary permanent magnet (4-1) is fixed or is embedded on permanent magnet retaining plate; Lower secondary permanent magnet (4-2) is fixed or is embedded on lower permanent magnet retaining plate;

In X-direction short stroke linear electric motors, elementary elementary iron core and the armature winding of comprising on every limit, described armature winding is fixed on the air gap side of elementary iron core, the armature winding on every limit consists of j coil, j coil equidistantly arranged along Y-direction, j is natural number, and j >=1, and the effective edge of each coil is parallel to Y-direction, X-direction short stroke linear electric motors secondary by secondary upper permanent magnet (3-1), secondary lower permanent magnet (3-2), upper permanent magnet retaining plate and lower permanent magnet retaining plate form, upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate (2-3), secondary upper permanent magnet (3-1) is fixed on the upside of permanent magnet retaining plate, secondary lower permanent magnet (3-2) is fixed on the downside of lower permanent magnet retaining plate, and, secondary upper permanent magnet (3-1) and secondary lower permanent magnet (3-2) mirror image are symmetrical arranged, wherein, secondary upper permanent magnet (3-1) is comprised of the two row permanent magnets that are parallel to each other that arrange along X-direction, and described two row permanent magnets are corresponding with two effective edges of coil in corresponding armature winding respectively, all permanent magnets are parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, and the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary,

Elementary elementary iron core (5-4) and the armature winding (5-3) of comprising in every limit of Z-direction magnetic suspension adjustment unit, described elementary iron core is divided into k section along Y-direction, k is natural number, and k >=1, the iron core memeber that every section of elementary iron core is Г shape by two cross sections forms, primary permanent magnet body is flat permanent magnet body, and is fixed in the middle of the horizontal segment of two Г shape iron core memebers that are oppositely arranged, and makes elementary iron core and primary permanent magnet body form door font; Armature winding consists of a plurality of coils, and the vertical stem stem of two Г shape iron cores in every section of elementary iron core is wound with respectively a coil, and described two coils are connected in series;

The secondary secondary permanent magnet (7-1) that comprises of Z-direction magnetic suspension adjustment unit, lower secondary permanent magnet (7-2), upper permanent magnet retaining plate and lower permanent magnet retaining plate form, described upper permanent magnet retaining plate and lower permanent magnet retaining plate mirror image symmetry are fixed on the upper and lower surface of mover substrate (2-3), upper secondary permanent magnet (7-1) and lower secondary permanent magnet (7-2) are mirror image and are symmetrical arranged, and be separately fixed on permanent magnet retaining plate and lower permanent magnet retaining plate, upper secondary permanent magnet (7-1) is comprised of the two row permanent magnets that be arranged in parallel along X-direction, described two row permanent magnets respectively two Г shape iron core memebers elementary with Z-direction magnetic suspension adjustment unit are corresponding, the magnetizing direction of permanent magnet that is positioned at same row is identical, the magnetizing direction of permanent magnet that is positioned at different lines is contrary.

5. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one shares secondary, described shared secondary two the secondary iron cores that comprise, described two secondary mirror image symmetries unshakable in one's determination are fixed on the upper and lower surface of mover substrate (2-3), on the air gap side surface of described secondary iron core, along X-direction, be provided with two secondary salient poles, described two secondary salient poles are parallel to each other;

X-direction short stroke linear electric motors and Z-direction magnetic suspension adjustment unit public one integrated elementary, this integrated elementary be bilateral structure, integrated elementary elementary iron core (5-6), armature winding (5-7) and the primary permanent magnet body (5-8) of comprising on each limit, elementary iron core (5-6) is divided into k section along Y-direction, k is natural number, and k >=1; The shape of every section of elementary iron core is identical, the cross section of described elementary iron core is E font, along the armature winding on every section of elementary iron core of Y-direction, by two coils, formed, two primary coils are respectively on the stem stem of elementary both sides unshakable in one's determination, primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, described primary permanent magnet body is fixed on the end face of center pinch of elementary iron core.

6. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described share secondaryly consists of two pairs of secondary metal yoke plates of magnetic (5-3), the every secondary metal yoke plate of magnetic (5-3) is plate shaped, and the secondary metal yoke plates of two magnetic (5-3) in every pair of secondary metal yoke plate of magnetic (5-3) are separately fixed at the upper and lower surface of mover substrate (2-3) of multifreedom motion unit along the two ends of X-direction;

Described integrated elementary elementary iron core (6-1), armature winding (6-3) and the two primary permanent magnet bodies (6-2) of comprising, elementary iron core (6-1) is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, the iron core memeber that wherein upper iron core is Г shape by two cross sections forms, the flat permanent magnet body that primary permanent magnet body (6-2) is parallel magnetization, the horizontal segment of described two Г shape iron core memebers is oppositely arranged and a primary permanent magnet body (6-2) formation character "door" form structure is fixed in centre; On vertical section of two Г shape iron core memebers of every section of elementary iron core, be all wound with a coil, all coils forms armature winding (6-3); Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of vertical section of two Г shape iron core memebers outside described upper iron core and lower iron core close on along X-direction is separately fixed at; Between vertical section of two Г shape iron core memebers inside described upper iron core and lower iron core close on along X-direction, it is the secondary metal yoke plate of magnetic (5-3); Described upper iron core and lower iron core are separately fixed at stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

7. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described integrated elementary elementary iron core (6-1), armature winding (6-3) and the primary permanent magnet body (6-2) of comprising, elementary iron core (6-1) is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, primary permanent magnet body is is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding (6-3); In the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at, upper surface and the lower surface of one end unshakable in one's determination, fix by primary permanent magnet body (6-2) on the end face of the other end that this centre is unshakable in one's determination; Between vertical section inside described upper iron core and lower iron core close on along X-direction, it is the secondary metal yoke plate of magnetic (5-3); Described upper iron core and lower iron core are separately fixed at stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

8. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described integrated elementary elementary iron core (6-1), armature winding (6-3) and the two primary permanent magnet bodies (6-2) of comprising, elementary iron core (6-1) is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, primary permanent magnet body is the flat permanent magnet body of parallel magnetization, and the air gap place plane that described magnetizing direction is adjacent is perpendicular, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding (6-3); Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at; The end of vertical section that described upper iron core and lower iron core close on inner side along X-direction is fixing by a primary permanent magnet body (6-2) respectively, is the secondary metal yoke plate of magnetic (5-3) between described two primary permanent magnet bodies (6-2); Described upper iron core and lower iron core are separately fixed at stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

9. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described shared secondary by two pairs of secondary yoke plates (5-4) and two secondary permanent magnets (5-5) formation, the plate permanent magnet that described secondary permanent magnet (5-5) is parallel magnetization, and described magnetizing direction is horizontal direction; Every secondary yoke plate (5-4) is that strip is dull and stereotyped, two secondary yoke plates (5-4) in every pair of secondary yoke plate (5-4) are separately fixed at the upper and lower surface of mover substrate (2-3) of multifreedom motion unit along the two ends of X-direction, and two secondary permanent magnets (5-5) are separately fixed on the outside end face of two secondary yoke plates (5-4); Two secondary yoke plates (5-4), two secondary permanent magnets (5-5) form slab construction with described mover substrate (2-3);

Described integrated elementary elementary iron core (6-1) and the armature winding (6-3) of comprising, elementary iron core (6-1) is divided into k section along Y-direction, and k is natural number, and k >=1; Every section of elementary iron core is comprised of upper iron core, lower iron core and middle iron core, described upper iron core and lower iron core look like to be symmetrical arranged with place unshakable in one's determination, centre level crossing, wherein upper iron core is door shaped iron core, the opening direction of described upper iron core and lower iron core is oppositely arranged, two of upper iron core are vertically wound with respectively a coil in section, two of lower iron core are vertically wound with respectively a coil in section, and all coils forms armature winding (6-3); Upper surface and the lower surface of one end unshakable in one's determination in the middle of the end of two vertical sections outside described upper iron core and lower iron core close on along X-direction is separately fixed at; Between vertical section inside described upper iron core and lower iron core close on along X-direction, be secondary; Described upper iron core and lower iron core are separately fixed at stator upper substrate (2-1) and the infrabasal plate (2-2) of multifreedom motion unit.

10. the long stroke magnetic suspension of multiple degrees of freedom according to claim 1 workbench, the X-direction short stroke linear electric motors and the Z-direction magnetic suspension adjustment unit that it is characterized in that multifreedom motion unit are integrated morphology, the two public one share secondary, and the two elementary combine form integrated elementary;

Described shared secondary by two pairs of secondary yoke plates (5-4) and four secondary permanent magnets (5-5) formation, the plate permanent magnet that described secondary permanent magnet (5-5) is parallel magnetization, and described magnetizing direction is for being parallel to Z-direction; Every secondary yoke plate (5-4) is strip flat board, and two secondary yoke plates (5-4) of every pair of secondary yoke plate (5-4) are separately fixed at the upper and lower surface of mover substrate (2-3) of multifreedom motion unit along the two ends of X-direction; The air gap side of every secondary yoke plate (5-4) is all fixed with a secondary permanent magnet (5-5);