CN204205909U - A kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor - Google Patents
A kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor Download PDFInfo
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- CN204205909U CN204205909U CN201420563364.6U CN201420563364U CN204205909U CN 204205909 U CN204205909 U CN 204205909U CN 201420563364 U CN201420563364 U CN 201420563364U CN 204205909 U CN204205909 U CN 204205909U
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Abstract
The utility model discloses a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor.Comprise permanent magnet excitation part and armature winding part, after superposition, leave air gap; The two-dimentional permanent magnet array of permanent magnet excitation sticks in the side of yoke portion near armature winding part, and, longitudinal cross-section symmetrical about X-axis and Y-axis by structure is that three trapezoidal permanent magnet modules and magnetic conduction block combiner form; Two covers of the winding that armature winding is placed respectively in X direction and the winding that Y-direction is placed are hollow winding, independent of one another between double winding, be that an angle of 90 degrees stacks along Z-direction, winding adopts heterogeneous structure, with being in parallel with phase winding in cover winding or connecting, star or triangle between each phase, is adopted to connect.Contactless between the utility model stator and mover, reduce hysteresis and accumulated error; Winding independent of each other make magnetic field and electromagnetic force easy to adjust.Magnet structure improves pushing force density and stock utilization.There is lightweight, fast response time, control is simple and range of movement is wide advantage.
Description
Technical field
The utility model relates to motor, especially relates to a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor.
Background technology
Along with scientific and technological progress, high speed, high accuracy become the important development direction of machining, at package equipment for micro-electron as eutectic die Bonder, full-automatic gold wire bonder and IC chip manufacturing equipment, more and more higher requirement is proposed to driver positioning precision, the speed of service, driving dimension.
Planar motor driving method, compared with conventional multidimensional combined drive platform, has been abandoned the intermediate conversion device such as leading screw, screw rod again to plane motion from rotary motion to rectilinear motion, has been eliminated the existence of accumulated error; The magnetic steel array of integrated form and armature winding structure make system drive scope be more prone to expansion; Single movable body structure makes system response more quick.Especially can realize maglev permanent-magnet planar motor and reduce moving surface constraint, eliminate frictional dissipation, further increase driving precision, compare with reluctance type planar motor with induction type, have that structure is simple, positioning precision is high, system effectiveness advantages of higher especially, show good application prospect at the modern precision such as mask aligner, super hot investment casting equipment in field.
Existing permanent-magnet planar motor has slotless can be divided into two large classes according to armature winding part: the permanent-magnet planar motor of first kind spline structure, has higher air gap flux density, higher pushing force density, but the existence of teeth groove thrust limits the raising driving precision; Equations of The Second Kind is anodontia, and slot type structure can have non iron-core to be divided into two groups according to armature winding part again, wherein armature winding part coreless type permanent-magnet planar motor, compared with other structures, eliminate the mutual attraction of permanent magnet excitation and windings section, eliminate the existence of force oscillation, when especially adopting moving-coil structure, there is mover quality low, the advantage of faster system response, but also to there is effective air gap high simultaneously, the shortcoming that pushing force density is lower.
Summary of the invention
In order to when the above-mentioned advantage of maintenance armature winding part coreless type permanent-magnet planar motor, its pushing force density of further raising, the purpose of this utility model is to provide a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor, by changing permanent magnet module shape and winding construction to improve pushing force density.
The technical solution adopted in the utility model is:
The utility model comprises permanent magnet excitation part and armature winding part, leaves air gap after permanent magnet excitation part and armature winding part superposition.
Described permanent magnet excitation part, comprise two-dimentional permanent magnet array and yoke portion, two dimension permanent magnet array sticks in the side of yoke portion near armature winding part, and, longitudinal cross-section symmetrical about X-axis and Y-axis by structure is that three trapezoidal permanent magnet modules and a magnetic conduction block combiner form;
Armature winding part, comprise the winding of winding and the Y-direction placement of placing in X direction respectively, double winding is hollow centralized winding, independent of one another between double winding, be that an angle of 90 degrees stacks along Z-direction, winding adopts heterogeneous structure, with being in parallel with phase winding in cover winding or connecting, adopts star or triangle to connect between each phase.
Three described permanent magnet modules, first permanent magnet module is the main pole module that vertical direction magnetizes, and is longitudinal profile, and namely Z axis section is trapezoidal, horizontal profile is foursquare hexahedron structure, and the surperficial length of side τ near air gap side
1abe greater than the surperficial length of side τ near side, yoke portion
1c; Second permanent magnet module is the edge auxiliary magnetic pole module that horizontal direction magnetizes, and is longitudinal profile, and namely Z axis section is trapezoidal, horizontal profile is the hexahedron structure of rectangle, is the contrary rectangle in length limit near surface and the surface of side, close yoke portion of air gap side; 3rd permanent magnet module is the bight auxiliary secondary module magnetized in diagonal, is longitudinal profile, and namely Z axis section is trapezoidal, horizontal profile is foursquare hexahedron structure, and the surperficial length of side τ near air gap side
3abe less than the surperficial length of side τ near side, yoke portion
3c, magnetizing direction and plane-parallel, by one jiao of sensing diagonal angle foursquare in horizontal profile; Described magnetic conduction modular structure size is identical with first permanent magnet module physical dimension.
In described two-dimentional permanent magnet array, placement second permanent magnet module is all close in four sides of first permanent magnet module; The 3rd permanent magnet module is all placed in the position at four angles of first permanent magnet module; The equal placement module of mid portion of first permanent magnet module central point line of any two identical polars; When the upper and lower surface side of first permanent magnet module is parallel with yoke portion side, colleague is identical with first permanent magnet module polarity corresponding under same column mutually; Row and column spacing between adjacent two opposite polarity first permanent magnet module central point is a pole span τ; Observe from winding side, if outside first permanent magnet module magnetizing direction Vertical dimension, i.e. N pole, then second permanent magnet module around and the 3rd permanent magnet module magnetizing direction point to first permanent magnet module center; If in first permanent magnet module magnetizing direction Vertical dimension, i.e. S pole, then second permanent magnet module around and the 3rd permanent magnet module magnetizing direction deviate from first permanent magnet module center.
Described armature winding part, adopt moving-coil structure, permanent magnet excitation part is the stationary part of planar motor, and described armature winding part is the subpart of planar motor; Or adopting moving-magnetic type structure, armature winding is the stationary part of planar motor, and permanent magnet excitation part is the subpart of planar motor.
Comprise two corresponding up and down cover permanent magnet excitation part and armature winding part; Armature winding part is clipped in the middle of upper and lower permanent magnet excitation part, all there is air gap between armature winding part and upper and lower permanent magnet excitation part; In upper and lower two-layer two-dimentional permanent magnet array, first permanent magnet module center is corresponding, and polarity is contrary between the two, and namely N pole and S pole are toward each other, and the magnetic line of force forms loop through two cover permanent magnet arrays and yoke portion, two-layer air gap and armature winding; Motor adopts moving-coil structure, and described permanent magnet excitation part is the stationary part of planar motor, and described armature winding is the subpart of planar motor.
The beneficial effect that the utility model has is:
1) contactless between stator and mover, avoid the existence of frictional force, reduce hysteresis and accumulated error.
2) winding construction independent of each other makes magnetic field and electromagnetic force regulate more flexible.
3) unique magnet structure improves pushing force density and stock utilization.
4) advantages such as planar motor described in the utility model has lightweight, fast response time, control is simple, range of movement is wide, may be used on needing three-dimensional precise to drive and the occasion of location.
Accompanying drawing explanation
Fig. 1 is embodiment 1 unilateral magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor electric machine structure schematic diagram.
Fig. 2 is the utility model two dimension permanent magnet array structural representation (winding side vertical view).
Fig. 3 is the utility model two dimension permanent magnet array structure upward view.
Fig. 4 is the utility model armature winding structure schematic diagram.
Fig. 5 is embodiment 3 Double-edge type magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor electric machine structure schematic diagram.
In figure: 1: permanent magnet excitation part; 2: armature winding part; 1-1: two-dimentional permanent magnet array, 1-2: yoke portion; 2-1: the winding placed in X direction; 2-2: the winding placed along Y-direction; 1-1-1: the first permanent magnet module; 1-1-2: the second permanent magnet module; 1-1-3: the three permanent magnet module; 1-1-4: magnetic conduction module.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
embodiment 1:
As shown in Figure 1, described in the present embodiment a kind of unilateral magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor comprise permanent magnet excitation part 1 and armature winding 2 two large divisions, permanent magnet excitation part 1 is stator, armature winding 2 is mover, two parts are plate armature, separated from one another, between there is air gap.Described permanent magnet excitation part comprises two-dimentional permanent magnet array 1-1 and yoke portion 1-2 two parts, two dimension permanent magnet array 1-1 sticks in yoke portion 1-2 near the side of winding,, longitudinal cross-section symmetrical about X-axis and Y-axis by structure is that trapezoidal, horizontal cross-section is rectangle three permanent magnet modules 1-1-1,1-1-2, a 1-1-3 and magnetic conduction module 1-1-4 combine, to play the effect improving motor pushing force density.
As shown in Figures 2 and 3, in described two-dimentional permanent magnet array 1-1, three permanent magnet modules are respectively: first permanent magnet module 1-1-1 is the main pole module that vertical direction magnetizes, for longitudinal profile (i.e. Z axis section) for trapezoidal, horizontal profile are foursquare hexahedron structure, near the surperficial length of side τ of air gap side
1abe greater than the surperficial length of side τ near side, yoke portion
1c; Second permanent magnet module 1-1-2 is the edge auxiliary magnetic pole module that horizontal direction magnetizes, and for longitudinal profile (i.e. Z axis section) for trapezoidal, horizontal profile are the hexahedron structure of rectangle, the surface near air gap side is long is τ
1a, wide is τ
3a, the surface of side, close yoke portion is long is τ
3c, wide is τ
1c; 3rd permanent magnet module 1-1-3 is the bight auxiliary secondary module magnetized in diagonal, for longitudinal profile (i.e. Z axis section) for trapezoidal, horizontal profile are foursquare hexahedron structure, near the surperficial length of side τ of air gap side
3abe less than the surperficial length of side τ near side, yoke portion
3c, and meet relation τ
1a+ τ
3a=τ, τ
1c+ τ
3c=τ, magnetizing direction and plane-parallel, by one jiao of sensing diagonal angle foursquare in horizontal profile; Magnetic conduction module 1-1-4 physical dimension is identical with first permanent magnet module 1-1-1.Three described permanent magnet modules and a magnetic conduction module 1-1-4, also can adopt the hexahedron by the polylith length of side is different to combine.Described permanent magnet module can select NdFeB material, and described magnetic conduction module can adopt the permeability magnetic materials such as electrical pure iron.Show as first the surperficial length of side τ of permanent magnet module 1-1-1 near side, yoke portion according to analysis
1cwith the surperficial length of side τ near air gap side
1aratio τ
1c: τ
1awhen=0.6, the permanent magnet of same volume can produce higher air gap flux density.
Second permanent magnet module 1-1-2 described in placement is all close in four sides of described first permanent magnet module 1-1-1; Described 3rd permanent magnet module 1-1-3 is all placed in the position at four angles of first permanent magnet module 1-1-1; The mid portion of first permanent magnet module 1-1-1 central point line of any two identical polars all places described magnetic conduction module 1-1-4, and magnetic conduction module 1-1-4 is clipped in the middle of four second permanent magnet module 1-1-2; Colleague is identical with first permanent magnet module 1-1-1 polarity corresponding under same column mutually; First permanent magnet module 1-1-1 polarity corresponding to first permanent magnet module 1-1-1 center of every four adjacent same polarities in contrast; Row and column spacing between adjacent two opposite polarity first permanent magnet module 1-1-1 central point is a pole span τ; Observe from winding side, if first permanent magnet module 1-1-1 magnetizing direction Vertical dimension outer (N pole), then second permanent magnet module 1-1-2 and the 3rd permanent magnet module 1-1-3 magnetizing direction around points to first permanent magnet module 1-1-1 center; If in first permanent magnet module 1-1-1 magnetizing direction Vertical dimension (S pole), then second permanent magnet module 1-1-2 and the 3rd permanent magnet module 1-1-3 magnetizing direction around deviates from first permanent magnet module 1-1-1 center.
Reference three-phase windings is Fig. 1 and Fig. 4 of example, described armature winding 2 comprises the winding 2-1 placed in X direction and the winding 2-2 two parts placed along Y-direction, and double winding is hollow centralized winding construction, and independent of one another between the two, stack along Z-direction is orthogonal, be 90 degrees to each other; Winding adopts heterogeneous structure, and with being in parallel with phase winding in cover winding or connecting, adopt star or triangle to connect between each phase, winding span is identical with the centralized winding construction of existing magneto with distribution; The average X of the winding 2-1 placed in X direction is 2k τ to length and the average Y-direction length along the winding 2-2 of Y-direction placement, and wherein k is natural number.When motor runs, realizing the adjustment of X-direction thrust, Y-direction thrust and Z-direction suspending power by controlling electric current in Y-direction winding and X-direction winding and phase place respectively, realizing precision actuation and the location of three degree of freedom.
The winding 2-1 placed in X direction described in the present embodiment and the winding 2-2 placed along Y-direction, due to different from the relative altitude of permanent magnet excitation part 1, electromagnetic property there are differences, in order to improve both electromagnetic symmetry, the height away from the winding of permanent magnet excitation part 1 can higher than the winding near excitation part.Also multi-layer winding structure can be adopted in enforcement, such as when the winding 2-1 number of plies of placing in X direction is 2, when the winding 2-2 number of plies along Y-direction placement is 2, be in series or parallel connection with each layer in cover winding, and along Z axis stack order adopt X to, Y-direction, Y-direction, X to or Y-direction, X to the structure of, Y-direction, also can improve the electromagnetic symmetry of double winding to, X.
Described yoke portion 1-2 can be made up of permeability magnetic material iron block, and also can be made up of non-magnet_conductible material aluminium or piece of stainless steel, surface area is more than or equal to permanent magnet array total body surface area, and manufacturing process is identical with common electric machine.
embodiment 2:
The present embodiment 2 is only with the difference of embodiment 1: described unilateral magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor permanent magnet excitation part 1 is mover, armature winding 2 is stator, the average X of the winding 2-1 placed in X direction no longer includes the restriction of concrete numerical value to length with along the average Y-direction length of the winding 2-2 of Y-direction placement, be greater than mover length, because armature cost is lower, the present embodiment more easily expands mover range of movement.Because permanent magnet array has magnetic circuit of one's own, in the present embodiment, yoke portion material is preferably chosen as aluminium, now little on the close impact of magnetic, and can alleviate mover weight.
embodiment 3:
Shown in figure 5, the present embodiment 3 is with the difference of embodiment 1: described a kind of Double-edge type magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor, comprises two corresponding up and down cover permanent magnet excitation part 1 and a set of armature winding part 2; Armature winding 2 is clipped in the middle of upper and lower two cover permanent magnet excitation parts 1, forms " sandwich " formula structure, and all there is air gap between upper and lower two-layer two-dimentional permanent magnet array 1-1; In upper and lower two-layer two-dimentional permanent magnet array 1-1, first permanent magnet module 1-1-1 center is corresponding, and polarity contrary (N pole and S pole are toward each other), the magnetic line of force is through two cover two-dimentional permanent magnet array 1-1(and yoke portion 1-2), two-layer air gap and armature winding 2 forms loop; Motor adopts moving-coil structure, and described permanent magnet excitation part is the stationary part of planar motor, and described armature winding is the subpart of planar motor; Because in this structure, armature winding part flux density level component is lower, therefore the adjustment of X-direction and Y-direction thrust when running, is realized mainly through the electric current controlled in the winding 2-2 that places along Y-direction in armature winding and the winding 2-1 placed in X direction, realize precision actuation and the location of two degrees of freedom.In the present embodiment when armature winding 2 both sides air gap height is identical, the electromagnetic force that the winding 2-1 placed in X direction and the winding 2-2 along Y-direction placement produces has good symmetry.In order to keep both sides air gap identical in mechanical structure, the form combined by support and line slideway, the Z axis height of fixing mover, only allow X to Y-direction two degrees of freedom.
The utility model can utilize microrobot, mask aligner or package equipment for micro-electron etc. need the occasion of precision actuation and operation, described stator need be fixed in the stationary components in process equipment during use, subpart, for driving the moving component in process equipment, realizes Precision Machining and the driving of equipment by the Lorentz force between planar motor stator and mover.
Claims (5)
1. a magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor, comprises permanent magnet excitation part (1) and armature winding part (2), leaves air gap after permanent magnet excitation part (1) and armature winding part (2) superposition; It is characterized in that:
Described permanent magnet excitation part (1), comprise two-dimentional permanent magnet array (1-1) and yoke portion (1-2), two dimension permanent magnet array (1-1) sticks in yoke portion (1-2) near the side of armature winding part (2), by structure about X-axis with Y-axis is symmetrical, longitudinal cross-section is that three trapezoidal permanent magnet modules (1-1-1,1-1-2,1-1-3) and a magnetic conduction module (1-1-4) combine;
Armature winding part (2), comprise the winding (2-2) of winding (2-1) and the Y-direction placement of placing in X direction respectively, double winding is hollow centralized winding, independent of one another between double winding, be that an angle of 90 degrees stacks along Z-direction, winding adopts heterogeneous structure, with being in parallel with phase winding in cover winding or connecting, adopts star or triangle to connect between each phase.
2. a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor according to claim 1, it is characterized in that: three described permanent magnet modules, the main pole module that first permanent magnet module (1-1-1) is magnetized for vertical direction, for longitudinal profile, namely Z axis section is trapezoidal, horizontal profile is foursquare hexahedron structure, and the surperficial length of side τ near air gap side
1abe greater than the surperficial length of side τ near side, yoke portion
1c; The edge auxiliary magnetic pole module that second permanent magnet module (1-1-2) is magnetized for horizontal direction, for longitudinal profile, namely Z axis section is trapezoidal, horizontal profile is the hexahedron structure of rectangle, is the contrary rectangle in length limit near surface and the surface of side, close yoke portion of air gap side; 3rd permanent magnet module (1-1-3) is the bight auxiliary secondary module magnetized in diagonal, is longitudinal profile, and namely Z axis section is trapezoidal, horizontal profile is foursquare hexahedron structure, and the surperficial length of side τ near air gap side
3abe less than the surperficial length of side τ near side, yoke portion
3c, magnetizing direction and plane-parallel, by one jiao of sensing diagonal angle foursquare in horizontal profile; Described magnetic conduction module (1-1-4) physical dimension is identical with first permanent magnet module (1-1-1) physical dimension.
3. a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor according to claim 1, it is characterized in that: in described two-dimentional permanent magnet array, placement second permanent magnet module (1-1-2) is all close in four sides of first permanent magnet module (1-1-1); The 3rd permanent magnet module (1-1-3) is all placed in the position at four angles of first permanent magnet module (1-1-1); The equal placement module of mid portion (1-1-4) of first permanent magnet module (1-1-1) central point line of any two identical polars; When the upper and lower surface side of first permanent magnet module (1-1-1) is parallel with yoke portion side, colleague is identical with first permanent magnet module (1-1-1) polarity corresponding under same column mutually; Row and column spacing between adjacent two opposite polarity first permanent magnet module (1-1-1) central point is a pole span τ; Observe from winding side, if outside first permanent magnet module (1-1-1) magnetizing direction Vertical dimension, i.e. N pole, then second permanent magnet module (1-1-2) around and the 3rd permanent magnet module (1-1-3) magnetizing direction point to first permanent magnet module (1-1-1) center; If in first permanent magnet module (1-1-1) magnetizing direction Vertical dimension, i.e. S pole, then second permanent magnet module (1-1-2) around and the 3rd permanent magnet module (1-1-3) magnetizing direction deviate from first permanent magnet module (1-1-1) center.
4. a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor according to claim 1, it is characterized in that: described armature winding part (2), adopt moving-coil structure, the stationary part that permanent magnet excitation part (1) is planar motor, the subpart that described armature winding part (2) is planar motor; Or adopt moving-magnetic type structure, the stationary part that armature winding (2) is planar motor, the subpart that permanent magnet excitation part (1) is planar motor.
5. a kind of magnetic suspension multiple degrees of freedom permanent magnetic synchronous plane electromotor motor according to claim 1, is characterized in that: it is characterized in that: comprise two corresponding up and down cover permanent magnet excitation part (1) and armature winding part (2);
Armature winding part (2) is clipped in the middle of upper and lower permanent magnet excitation part (1), all there is air gap between armature winding part (2) and upper and lower permanent magnet excitation part (1); In upper and lower two-layer two-dimentional permanent magnet array, first permanent magnet module center is corresponding, and polarity is contrary between the two, and namely N pole and S pole are toward each other, and the magnetic line of force forms loop through two cover permanent magnet arrays and yoke portion, two-layer air gap and armature winding; Motor adopts moving-coil structure, and described permanent magnet excitation part is the stationary part of planar motor, and described armature winding is the subpart of planar motor.
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| CN104218771A (en) * | 2014-09-28 | 2014-12-17 | 浙江理工大学 | Magnetic-suspension permanent-magnet synchronous planar motor with multiple degrees of freedom |
| WO2017049747A1 (en) * | 2015-09-23 | 2017-03-30 | 歌尔声学股份有限公司 | Linear vibration motor |
| CN106787597A (en) * | 2016-12-30 | 2017-05-31 | 蒋钧超 | A kind of two axis stepping motor with micro-step control of adjustable attitude |
| CN107623427A (en) * | 2016-07-15 | 2018-01-23 | 麦克纳莫绅有限公司 | Transportation system's disc assembly |
| CN110313120A (en) * | 2017-01-31 | 2019-10-08 | C.C.M.贝希尔公司 | The positioning device of plane |
| CN111404350A (en) * | 2020-02-19 | 2020-07-10 | 哈尔滨工业大学 | Non-equal-height two-dimensional chamfering Halbach permanent magnet array suitable for planar motor |
| CN113101984A (en) * | 2021-04-16 | 2021-07-13 | 英诺维尔智能科技（苏州）有限公司 | High-cleanliness biological pharmaceutical sterile liquid operation platform based on magnetic suspension technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104218771A (en) * | 2014-09-28 | 2014-12-17 | 浙江理工大学 | Magnetic-suspension permanent-magnet synchronous planar motor with multiple degrees of freedom |
| WO2017049747A1 (en) * | 2015-09-23 | 2017-03-30 | 歌尔声学股份有限公司 | Linear vibration motor |
| US10574126B2 (en) | 2015-09-23 | 2020-02-25 | Goertek Inc. | Linear vibration motor |
| CN107623427B (en) * | 2016-07-15 | 2020-07-14 | 麦克纳莫绅有限公司 | Transport system disc assembly |
| CN107623427A (en) * | 2016-07-15 | 2018-01-23 | 麦克纳莫绅有限公司 | Transportation system's disc assembly |
| US10686355B2 (en) | 2016-07-15 | 2020-06-16 | Magnemotion, Inc. | Transport system puck assembly |
| CN106787597A (en) * | 2016-12-30 | 2017-05-31 | 蒋钧超 | A kind of two axis stepping motor with micro-step control of adjustable attitude |
| CN106787597B (en) * | 2016-12-30 | 2019-08-27 | 蒋钧超 | A kind of two axis stepping motor with micro-step control of adjustable posture |
| US11201533B2 (en) | 2017-01-31 | 2021-12-14 | C.C.M. Beheer B.V. | Planar positioning device |
| CN110313120B (en) * | 2017-01-31 | 2021-10-29 | C.C.M.贝希尔公司 | Planar positioning device |
| CN110313120A (en) * | 2017-01-31 | 2019-10-08 | C.C.M.贝希尔公司 | The positioning device of plane |
| CN111404350A (en) * | 2020-02-19 | 2020-07-10 | 哈尔滨工业大学 | Non-equal-height two-dimensional chamfering Halbach permanent magnet array suitable for planar motor |
| CN111404350B (en) * | 2020-02-19 | 2022-05-13 | 哈尔滨工业大学 | Non-equal-height two-dimensional chamfering Halbach permanent magnet array suitable for planar motor |
| CN113101984A (en) * | 2021-04-16 | 2021-07-13 | 英诺维尔智能科技（苏州）有限公司 | High-cleanliness biological pharmaceutical sterile liquid operation platform based on magnetic suspension technology |
| CN117253844A (en) * | 2023-11-20 | 2023-12-19 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
| CN117253844B (en) * | 2023-11-20 | 2024-03-08 | 季华实验室 | Six-degree-of-freedom arc-shaped magnetic levitation micro-motion stage and device transfer device |
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