CN103105742A - Mask table system of six-degree-of-freedom coarse table with photoelectric position detector measurement function - Google Patents
Mask table system of six-degree-of-freedom coarse table with photoelectric position detector measurement function Download PDFInfo
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Abstract
The invention discloses a mask table system of a six-degree-of-freedom coarse table with a photoelectric position detector measurement function. The coarse table comprises a coarse table body, a driving device and a coarse table gravity balance component, wherein the coarse table body is arranged outside a refined table and covers the refined table, so that six-degree-of-freedom motion of the coarse table is realized; and the mask table system also comprises a phase sensitive detector (PSD) sensor measurement system for measuring a relative position between the refined table and the coarse table and measuring a relative position between the coarse table and a base. According to the mask table system, the posture of a mask table is adjusted, and the speed, the acceleration and the control bandwidth of the mask table are improved; requirements on high motion precision and high positioning precision are met; therefore, the production rate, the graving precision and the resolution of a photoetching machine are improved; furthermore, the measuring precision and the measuring speed are extremely high; and the mask table system can be suitable for high response speed, high acceleration and high motion positioning precision of the mask table.
Description
Technical field
The present invention relates to the mask aligner mask platform system, this system is mainly used in the semiconductor lithography machine, belongs to the semiconductor manufacturing equipment field.
Background technology
In the production run of integrated circuit (IC) chip, the exposure transfer printing (photoetching) of the design configuration of chip on the silicon chip surface photoresist is one of most important operation wherein, and this operation equipment used is called litho machine (exposure machine).The resolution of litho machine and exposure efficiency affect characteristic line breadth (resolution) and the throughput rate of integrated circuit (IC) chip greatly.And as kinematic accuracy and the work efficiency of the mask platform system of litho machine critical system, determined to a great extent again resolution and the exposure efficiency of litho machine.
The advanced scanning projecting photoetching machine ultimate principle is: from the deep UV (ultraviolet light) of light source see through mask on mask platform, lens combination with a part of pattern imaging on mask on certain Chip of silicon chip.For carrying out the exposure of a chip on silicon chip, mask platform and silicon wafer stage need carry out respectively accelerated motion, and reach simultaneously the speed of the desired 4:1 of scan exposure when moving to the exposure reference position.After this, silicon wafer stage moves to the scanning motion direction with uniform speed, mask platform with the speed that is four times in the silicon wafer stage sweep velocity to doing scanning motion with the opposite direction of silicon wafer stage scanning motion, it is split hair synchronous that both motions require to reach, and the whole pattern imagings on mask are on the certain chip (Chip) of silicon chip the most at last.After a chip end of scan, mask platform and silicon wafer stage carry out respectively retarded motion, and simultaneously silicon wafer stage carries out step motion, and the chip that the next one will be exposed moves to the projection objective below.After this, mask platform is accelerated, scans, is slowed down to the direction opposite with last scan direction of motion, and silicon wafer stage according to direction acceleration, scanning, the deceleration of planning, is completed the exposure of a chip in the synchronous scanning process.So constantly repeat, mask platform comes and goes the rectilinear motion that accelerates, scans, slows down, and silicon wafer stage carries out stepping and scanning motion according to the track of planning, completes the exposure of whole silicon chip.
According to the motion requirement to mask platform, mask platform mainly provides and comes and goes the function that the ultraprecise high-speed straight-line moves along the direction of scanning.Its stroke should satisfy 4 times of chip length and add the distance of acceleration and deceleration; Its sweep velocity should be 4 times of silicon wafer stage sweep velocity, and high acceleration also accordingly can be higher than the high acceleration of silicon wafer stage.According to the technical indicator of Typical Foreign litho machine commodity, the type that the stroke of mask platform surpasses 100mm(to be had reaches 200mm), sweep velocity reaches 1000mm/s, and high acceleration reaches 20m/s
2, i.e. 2g.Improve sweep velocity and the acceleration (silicon wafer stage also synchronously improves) of mask platform, can effectively improve the throughput rate of litho machine.
Of paramount importancely be, mask platform must be able to realize and being synchronized with the movement of the superhigh precision of silicon wafer stage scanning motion, and for the 45nm litho machine, its synchronization accuracy requires MA(moving average deviation) less than 2.25nm, MSD(moves standard deviation) less than 5.4nm.Wherein, the alignment precision of MA major effect exposure, MSD major effect exposure resolution ratio.
In order to satisfy the large stroke of mask platform and high speed, high-precision harsh requirement, traditional common drives structure that adopts thick-smart fold layer of mask platform system.The mask platform system is comprised of coarse motion platform and the moving platform of stack essence thereon.Wherein, the coarse motion platform adopts the two-sided driving system of the high speed and large stroke of left linear electric motors and right linear electric motors composition to drive, the air-float guide rail supporting; The moving platform of essence is driven by the voice coil motor of directions X and the voice coil motor of Y-direction, mask platform is carried out the fine setting of real-time high-precision, satisfies the requirement of its kinematic accuracy.This lamination drives structure is when motion, and the bilateral drive structure of the reciprocating bottom linear electric motors of single-degree-of-freedom adopts the air-float guide rail supporting, complex structure, assembly precision requires high, thereby has limited the kinematic accuracy of mask platform, has hindered the raising of its acceleration.
Summary of the invention
In order to improve the acceleration of mask aligner mask platform, speed and bearing accuracy, and then promote the raising of throughput rate, alignment precision and the resolution of litho machine to reduce the assembly precision requirement, the invention provides a kind of mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector.
Technical scheme of the present invention is as follows:
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector, this system comprises essence moving platform, coarse motion platform and frame, described coarse motion platform contains a coarse motion platform stage body and drive unit, it is characterized in that: described coarse motion platform stage body is arranged on the outside of the moving platform of essence, in the middle of the moving platform of essence is enclosed in; Described drive unit comprises large stroke driver module and little stroke driver module two parts, large stroke driver module is comprised of two groups of directions X linear electric motors that are arranged symmetrically in coarse motion platform stage body both sides about X-direction, little stroke driver module is comprised of four groups of two-freedom linear electric motors that drive simultaneously Y-direction and Z direction, four groups of two-freedom linear electric motors are arranged symmetrically in coarse motion platform stage body both sides about X-direction in twos, and are positioned at large stroke driver module below;
described coarse motion platform also comprises two coarse motion platform gravitational equilibrium assemblies, described two coarse motion platform gravitational equilibrium arrangement of components are above coarse motion platform stage body, be arranged symmetrically in coarse motion platform stage body both sides along X-direction, each coarse motion platform gravitational equilibrium assembly comprises a coarse motion platform gravitational equilibrium magnetic conductive board and two coarse motion platform gravitational equilibrium permanent magnets, the permanent magnet array of coarse motion platform gravitational equilibrium magnetic conductive board and directions X linear electric motors links together, coarse motion platform gravitational equilibrium permanent magnet is arranged in coarse motion platform stage body upper surface, side along X-direction is arranged symmetrically with about Y direction, and leave the gap with coarse motion platform gravitational equilibrium magnetic conductive board.
Described mask table system also contains the PSD sensor measuring system, described PSD sensor measuring system comprises four PSD sensor modules that are used for measuring the moving platform of essence and coarse motion platform relative position, described these four PSD sensor groups are arranged in respectively between the moving platform of essence and coarse motion platform stage body, and are arranged symmetrically with about X-axis and Y-axis respectively; This PSD sensor measuring system also comprises four PSD sensor module and two grating scale assemblies of being used for measuring coarse motion platform and pedestal relative position, described these four PSD sensor groups are arranged in respectively coarse motion platform stage body along on two sides of X-direction, and are arranged symmetrically with about Y-axis; Described two grating scale assemblies are arranged between the coarse motion platform gravitational equilibrium magnetic conductive board and coarse motion platform stage body of both sides.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention is characterized in that: described four PSD sensor modules for measuring the moving platform of essence and coarse motion platform relative position all contain PSD sensor, optical fiber light-emitting window, 45 ° of mount pads and LASER Light Source; Be used for measuring smart four PSD sensors that move platform and coarse motion platform relative position and be distributed on respectively coarse motion platform stage body along the inboard of two sides of Y-direction, and be 45 ° of angles with the medial surface of these two sides and place, the optical fiber light-emitting window is arranged on 45 ° of mount pads, and these 45 ° of mount pads are arranged on the position corresponding with the PSD sensor on the moving platform stage body of essence;
Described four PSD sensor modules for measuring coarse motion platform and pedestal relative position all contain PSD sensor, optical fiber light-emitting window, at right angle setting seat and LASER Light Source; Four PSD sensors that are used for measurement coarse motion platform and pedestal relative position are arranged in coarse motion platform stage body along the outside of two sides of directions X, the optical fiber light-emitting window corresponding with the PSD sensor is arranged on the at right angle setting seat, this at right angle setting seat is arranged on pedestal, and the position corresponding with the PSD sensor; Described grating scale assembly comprises grating scale, grating scale erecting frame, grating reading head and grating reading head bracket, described grating scale erecting frame is arranged on the bottom of the coarse motion platform gravitational equilibrium magnetic conductive board of a side, described grating reading head bracket is arranged on coarse motion platform stage body, the position that makes described grating scale and grating reading head install is corresponding, and keeps measurement clearance between grating reading head and grating scale.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, it is characterized in that: described each directions X linear electric motors are comprised of two groups of permanent magnet arrays and one group of coil array; Described each two-freedom linear electric motors are comprised of one group of permanent magnet array and one group of coil array, and share one group of permanent magnet array along two two-freedom linear electric motors of directions X homonymy; Two groups of permanent magnet arrays of directions X linear electric motors and four groups of permanent magnet arrays of two-freedom linear electric motors all are fixed on surface level on frame; Two groups of coil arrays of directions X linear electric motors and four groups of coil arrays of two-freedom linear electric motors are fixed on coarse motion platform stage body respectively.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, it is characterized in that: the moving platform of described essence comprises the moving platform stage body of essence, Lorentz motor and the moving platform gravity compensation assembly of essence; Described Lorentz motor comprises three kinds of Lorentz motors, every kind of Lorentz motor is symmetrically distributed in the moving platform stage body of essence along the two sides of Y direction, wherein, the driving direction of the first Lorentz motor is along X-direction, be arranged symmetrically with about X-axis, at least two of every sides drive the moving platform stage body of essence and move along directions X with around the Z axis sense of rotation; The driving direction of the second Lorentz motor is along Y direction and move the platform barycenter by essence, every side at least one, the smart platform stage body that moves of driving moves along Y-direction; On four angles that are positioned at the moving platform stage body of essence of the third Lorentz motor, be arranged symmetrically with about X-axis simultaneously, two of every sides, its driving direction is along Z-direction, drives the moving platform stage body of essence along the Z direction, move around X-axis sense of rotation and Y-axis sense of rotation.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, it is characterized in that: the moving platform gravity compensation assembly of described essence comprises the moving platform gravity compensation of four essences unit, the moving platform gravity compensation of each essence unit is comprised of the moving platform gravitational equilibrium magnetic conductive board of an essence and the moving platform gravitational equilibrium permanent magnet of essence, the moving platform gravity compensation of described four essences unit is distributed in respectively on four angles of the moving platform stage body of essence, and wherein four moving platform gravitational equilibrium magnetic conductive boards of essence are separately fixed on coarse motion platform stage body; Four moving platform gravitational equilibrium permanent magnets of essence are separately fixed on the moving platform stage body of essence, and corresponding with the position of the moving platform gravitational equilibrium magnetic conductive board of essence, leave the gap simultaneously and between the moving platform gravitational equilibrium magnetic conductive board of essence.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, it is characterized in that: described coarse motion platform stage body is thin-wall case, is made by thyrite.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, it is characterized in that: the moving platform stage body of described essence is thin-wall case, is made by thyrite.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention is characterized in that: the one-dimensional array that the coil array of the coil array of described two groups of directions X linear electric motors and four groups of two-freedom linear electric motors all is comprised of the iron-core-free square coil; Two groups of permanent magnet arrays of described directions X linear electric motors adopt one dimension halbach type permanent magnet array, and the permanent magnet array of two-freedom linear electric motors adopts plane halbach type permanent magnet array.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, have the following advantages and the high-lighting effect: 1. compare with the traditional masks platform that adopts the air-float guide rail supporting, mask platform of the present invention adopts magnetic suspension bearing, simplified system architecture, vibration and the noise of having avoided air supporting to introduce, and can satisfy the required condition of high vacuum degree environment of extreme ultraviolet photolithographic, and the attractive force balance of magnetic levitation system mask platform and appendicular most gravity thereof.2. compare with the bilateral driving junction structure of traditional single-degree-of-freedom coarse motion platform, the structure of six degree of freedom coarse motion platform of the present invention, increased the flexibility of mover in the system, the matching requirements of system had both been reduced, also improve response speed, acceleration and the motion positions precision of mask platform, thereby improved throughput rate, alignment precision and the resolution of litho machine.3. can carry out simultaneously the measurement of two-freedom with photoelectric position detector (PSD) sensor, can reduce the quantity of sensor, saved the space, and measuring accuracy and measuring speed are all higher than traditional electric vortex sensor measuring means, high response speed, high acceleration and the high motion positions precision that can adapt to mask platform, last throughput rate, alignment precision and the resolution that has greatly improved litho machine.
Scheme attached explanation
Fig. 1 is a kind of mask table system structural representation with six degree of freedom coarse motion platform with the PSD measurement of the present invention.
Fig. 2 is the structural representation of the moving platform of the essence of PSD sensor of the present invention and the range observation of coarse motion platform.
Fig. 3 is the coarse motion platform of PSD sensor of the present invention and the structural representation of pedestal range observation.
Fig. 4 is the common structural representation of measuring of PSD sensor of the present invention and grating scale assembly.
Fig. 5 is the structural representation after the mask table system directions X linear electric motors of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention remove the first permanent magnet array.
Fig. 6 is the structural representation after the coil of the mask table system two-freedom linear electric motors of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention removes side the 3rd permanent magnet array.
Fig. 7 is the schematic three dimensional views of the iron-less core coil that adopts in the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention.
Fig. 8 is the schematic diagram of directions X line motor permanent magnet array magnetizing direction in the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention.
Fig. 9 is the schematic diagram of two-freedom line motor permanent magnet array magnetizing direction in the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention.
In figure: the moving platform stage body of 1-essence; 2-coarse motion platform stage body; The 3-the first directions X linear electric motors; The 4-the second directions X linear electric motors; The 5-the first two-freedom linear electric motors; The 6-the second two-freedom linear electric motors; The 7-the three two-freedom linear electric motors; The 8-the four two-freedom linear electric motors; 9-pedestal; 11-coarse motion platform gravitational equilibrium magnetic conductive board; 12-coarse motion platform gravitational equilibrium permanent magnet; 13-first coil array; 14-second largest coil array; The 15-the first small coil array; The 16-the second small coil array; The 17-the three small coil array; The 18-the four small coil array; The 21-the first permanent magnet array; The 22-the second permanent magnet array; The 23-the three permanent magnet array; The moving platform gravitational equilibrium magnetic conductive board of 31-essence; The moving platform gravitational equilibrium permanent magnet of 32-essence; 40-grating scale assembly; 41-grating scale; 42-grating scale erecting frame; 43-grating reading head; 44-grating reading head bracket; 45-PSD sensor; 46-optical fiber light-emitting window; 47-45 ° of mount pads; 48-at right angle setting seat; 51-PSD sensor the first assembly; 52-PSD sensor the second assembly; 53-PSD sensor the 3rd assembly; 54-PSD sensor the 4th assembly; 55-PSD sensor the 5th assembly; 56-PSD sensor the 6th assembly; 57-PSD sensor the 7th assembly; 58-PSD sensor the 8th assembly.
Embodiment
Below in conjunction with accompanying drawing, concrete structure of the present invention, mechanism and the course of work are further described.
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector provided by the invention, as shown in Figure 1, this system comprises coarse motion platform, the moving platform of essence and frame, and the coarse motion platform contains a coarse motion platform stage body 2, drive unit and two coarse motion platform gravitational equilibrium assemblies; Coarse motion platform stage body 2 is enclosed within the outside of the moving platform of essence, is thin-wall case, is made by the thyrite sintering; Described drive unit comprises large stroke driver module and little stroke driver module two parts, as shown in Figure 6 and Figure 7.large stroke driver module is comprised of two groups of the first directions X linear electric motors 3 and second directions X linear electric motors 4 that are arranged symmetrically in coarse motion platform stage body 2 both sides about directions X, is responsible for driving mask platform coarse motion platform and does large stroke linear reciprocating motion on directions X, little stroke driver module is the first two-freedom linear electric motors 5 that drive simultaneously Y-direction and Z direction by four groups, the second two-freedom linear electric motors 6, the 3rd two-freedom linear electric motors 7 and the 4th two-freedom linear electric motors 8 form, these four groups of two-freedom linear electric motors are to be arranged symmetrically in twos coarse motion platform stage body 2 both sides about directions X, and be positioned at below large stroke driver module, described four groups of two-freedom linear electric motors are responsible for regulating mask platform coarse motion platform in the little travel displacement of Y-axis and Z-direction, and around X-axis, the rotation among a small circle of the anglec of rotation of the three degree of freedom that Y-axis and Z axis rotate, employing can make the directions X linear electric motors that the thrust of directions X only is provided based on the control algolithm that d-q decomposes, and the thrust of Y and Z direction is close to zero, Y and Z direction linear electric motors only produce the thrust of Y-direction and Z direction, and the thrust of directions X is close to zero,
Described two coarse motion platform gravitational equilibrium assemblies are arranged symmetrically in coarse motion platform stage body both sides about X-direction, and each coarse motion platform gravitational equilibrium assembly comprises a coarse motion platform gravitational equilibrium magnetic conductive board 11 and two coarse motion platform gravitational equilibrium permanent magnets 12.Each coarse motion platform gravitational equilibrium magnetic conductive board 11 links together with the stationary part of the directions X linear electric motors of the same side, two coarse motion platform gravitational equilibrium permanent magnets 12 are arranged on respectively coarse motion platform stage body 2 along on side two angles of X-direction, and keep certain gap with coarse motion platform gravitational equilibrium magnetic conductive board 11;
In addition, described mask table system also contains the PSD sensor measuring system.The PSD sensor measuring system comprises two parts, a part is comprised of four PSD sensor modules, be used for measuring the relative position between the moving platform of essence and coarse motion platform, another part is comprised of four groups of PSD sensor modules and at least one group of grating scale assembly 40, be used for to measure coarse motion platform and pedestal relative position.
The PSD sensor module is by PSD sensor 45, optical fiber light-emitting window 46, optical fiber light-emitting window mount pad and LASER Light Source, as shown in Figures 2 and 3.Optical fiber light-emitting window 46 is arranged on mount pad, is arranged on the opposite of PSD sensor 45, and optical fiber light-emitting window 46 keeps vertical with the light-sensitive surface of PSD sensor 45; Each PSD sensor module can be measured the displacement of penetrating two degree of freedom in the plane of perpendicular direction with laser simultaneously; The grating scale assembly comprises grating scale 41, grating scale erecting frame 42, grating reading head 43 and grating reading head bracket 44, as shown in Figure 4, grating reading head 43 is arranged in grating reading head bracket 44 and is arranged on coarse motion platform stage body 2 upper surfaces, grating scale 41 is arranged on grating scale erecting frame 42 and is arranged on the bottom of coarse motion platform gravitational equilibrium magnetic conductive board 5, keeps certain interval between grating reading head 43 and grating scale 41; This grating scale assembly can carry out single-degree-of-freedom and measure.
Four PSD sensor modules that are used for measuring the moving platform of essence and coarse motion platform relative position, be respectively PSD sensor the first assembly 51, PSD sensor the second assembly 52, PSD sensor the 3rd assembly 53 and PSD sensor the 4th assembly 54, PSD sensor the first assembly 51 and PSD sensor the second assembly 52 are arranged on the left side of the moving platform stage body 1 of essence, and PSD sensor the 3rd assembly 53 and PSD sensor the 4th assembly 54 are arranged on the right side of the moving platform stage body 1 of essence.wherein, four PSD sensors 45 are uniform respectively is arranged on coarse motion platform stage body 2 along on two inboard beams of Y-direction, PSD sensor photosensitive face and Y direction are 45 ° of angles and vertically place, corresponding optical fiber light-emitting window 46 is arranged in 45 ° of mount pads 47, and be arranged on the position corresponding with the PSD sensor on the moving platform stage body 1 of essence, and the light-sensitive surface that keeps optical fiber light-emitting window 46 and PSD sensor is vertical and have a determining deviation, left along Y direction, four groups of PSD sensors of right both sides, the measurement data of two groups of PSD sensors of each side can be decomposed along X-axis and Y-axis respectively, can calculate along X-axis, the displacement of Y-axis and Z-direction, and around X-axis and the angle of rotating around Z axis, and can measure the angle of rotating around Y-axis along any two PSD sensors of Y direction both sides,
In addition, also have four groups of PSD sensor modules and at least one group of grating scale assembly, be respectively PSD sensor the 5th assembly 55, PSD sensor the 6th assembly 56, PSD sensor the 7th assembly 57, PSD sensor the 8th assembly 58 and grating scale assembly 40, common coarse motion platform and the pedestal relative position measured, as shown in Figure 3, Figure 4.Wherein, four PSD sensors 45 are arranged on respectively coarse motion platform stage body 2 in uniform way along on two outer beams of directions X, PSD sensor photosensitive face is vertical with Y-direction, corresponding optical fiber light-emitting window 46 is arranged on respectively at right angle setting seat 48, and be fixed on position corresponding with the PSD sensor on pedestal 9, keep the light-sensitive surface of optical fiber light-emitting window 46 and PSD sensor vertical and have a determining deviation; PSD sensor the 5th assembly 55 and the 6th assembly 56 combinations of PSD sensor, or PSD sensor the 7th assembly 57 and the 8th assembly 58 combinations of PSD sensor, measure respectively coarse motion platform stage body 2 along the displacement of X-direction and Z-direction, and around X-axis and the angle of rotating around Z axis; Displacement along Y direction is measured by grating scale assembly 40, PSD sensor the 6th assembly 56 and the 7th assembly 57 combinations of PSD sensor, perhaps PSD sensor the 5th assembly 55 and PSD sensor the 8th assembly 58 combinations are measured around Y-axis and the angle of rotating around Z axis;
The mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector of the present invention, each directions X linear electric motors forms by first permanent magnet array 21, second permanent magnet array 22 and one group of large coil array; Each two-freedom linear electric motors is comprised of the 3rd permanent magnet array 23 and one group of small coil array, and shares one group of the 3rd permanent magnet array 23 along two two-freedom linear electric motors of directions X homonymy; The 3rd permanent magnet array 23 of described all directions X linear electric motors first permanent magnet arrays 21 and the second permanent magnet array 22 and all two-freedom linear electric motors all is fixed on surface level on the litho machine frame; Described all large coil arrays and small coil array are separately fixed on coarse motion platform stage body 2;
The one-dimensional array that the large coil array of the directions X linear electric motors of coarse motion of the present invention and the small coil array of two-freedom linear electric motors all are comprised of the iron-core-free square coil (as shown in Figure 7) that adopts the concentric coiling of copper cash, the support of coil adopt nonferromagnetic parts (as aluminium alloy) to make;
The first permanent magnet array 21 of the directions X linear electric motors of coarse motion of the present invention and the second permanent magnet array 22 are bonding one group of one dimension halbach type permanent magnet arrays that adopt the rectangular parallelepiped rare-earth permanent magnet to arrange and form on the square thin yoke of a block length, in the first permanent magnet array 21 and the second permanent magnet array 22, the volume of the magnetizing direction permanent magnet parallel with array direction less than the magnetizing direction permanent magnet vertical with array direction (as shown in Figure 8, " N " in figure, the N utmost point and the S utmost point of " S " expression permanent magnet, the magnetizing direction of permanent magnet is perpendicular to paper at this moment.The 3rd permanent magnet array 23 of described two-freedom linear electric motors is also bonding one group of plane halbach type permanent magnet array that adopts the rectangular parallelepiped rare-earth permanent magnet to arrange and form on the square thin yoke of a block length, in the 3rd permanent magnet array 23, the volume of the magnetizing direction permanent magnet parallel with array direction is also less than the magnetizing direction permanent magnet vertical with array direction, as shown in Figure 9.
The moving platform of essence is six-freedom micro displacement worktable, comprises the moving platform stage body 1 of essence, Lorentz motor and the moving platform gravity compensation assembly of essence; Described Lorentz motor comprises three kinds of Lorentz motors, every kind of Lorentz motor is symmetrically distributed in the moving platform stage body 1 of essence along the two sides of Y direction, wherein, the driving direction of the first Lorentz motor is along X-direction, be arranged symmetrically with about X-axis, at least two of every sides drive the moving platform stage body 1 of essence and move along directions X with around the Z axis sense of rotation; The driving direction of the second Lorentz motor is along Y direction and move the platform barycenter by essence, every side at least one, the smart platform stage body 1 that moves of driving moves along Y-direction; On four angles that are positioned at the moving platform stage body of essence of the third Lorentz motor, be arranged symmetrically with about X-axis simultaneously, two of every sides, its driving direction is along Z-direction, drive the moving platform stage body of essence along the Z direction, move around X-axis sense of rotation and Y-axis sense of rotation, as shown in Figure 2.
the moving platform gravity compensation assembly of essence comprises the four groups of moving platform gravity compensation of essence unit, the moving platform gravity compensation of each essence unit is comprised of the moving platform gravitational equilibrium magnetic conductive board 31 of an essence and the moving platform gravitational equilibrium permanent magnet 32 of essence, the moving platform gravity compensation cell distribution of described four groups of essences is on four angles of the moving platform stage body 1 of essence, wherein the moving platform gravitational equilibrium magnetic conductive board 31 of all essences is fixed on coarse motion platform stage body 2, the moving platform gravitational equilibrium permanent magnet 32 of all essences is fixed on the position of the moving platform gravitational equilibrium magnetic conductive board 31 of each essence corresponding on the moving platform stage body 1 of essence, and has certain gap with the moving platform gravitational equilibrium magnetic conductive board of essence, the moving platform stage body 1 of essence is thin-wall case, made by thyrite,
Mask table system of the present invention is the unloading phase that its working stage being divided into, normal work stage and stop phase, three phases altogether.The unloading phase principle of work as follows: before system's electrifying startup, the attractive force of gravity balance device is less than the gravity of mask stage coarse motion platform and the moving platform of essence, and mask stage stops at a little more than on the fixedly station on the litho machine frame of the second permanent magnet array 22 upper surfaces.After system's electrifying startup, 4 thrusts that the two-freedom linear electric motors provide the Z direction to make progress, promote coarse motion platform mover and partly move upward to the working position, then regulate on the one hand coarse motion platform mover part along the position of Z-direction in the mask stage course of work, and around the rotation of X-direction with around the attitude of these two degree of freedom of rotation of Y-direction, coordinating on the other hand gravity balance device balance coarse motion platform mover part is also mask stage and appendicular gravity thereof, makes the moving platform of coarse motion platform mover part and essence be in all the time suspended state.Meanwhile, 4 two-freedom linear electric motors provide the thrust of Y-direction, adjust the moving platform of coarse motion platform mover part and essence along the translation of Y-axis with around the attitude of two degree of freedom of rotation of Z axis, make the moving Delta of coarse motion platform mover part and essence to the desired position of work and attitude, and regulate in real time aforementioned five degree of freedom in the whole course of work, satisfy system to the positioning requirements of these five degree of freedom.Then, 2 directions X linear electric motors adopt bilateral type of drive, and driving coarse motion platform mover part is also that coarse motion platform mover part and the moving platform of essence carry out acceleration, deceleration and at the uniform velocity to-and-fro movement along directions X, reaches the operating rate of system requirements, the work the unloading phase of completing.
After this, system enters normal work stage, and drive unit is finely tuned speed and the attitude of coarse motion platform mover part and the moving platform of essence in directions X linear electric motors perform regions, satisfies system to its speed and the requirement of position, simultaneously the energy dissipation of bucking-out system.When coarse motion platform mover part and the moving platform of essence move to+latter end of directions X stroke, directions X linear electric motors deceleration work is to stopping, then oppositely accelerate again, make the moving platform of coarse motion platform mover part and essence move to the latter end of the trip to-directions X, directions X linear electric motors deceleration work circulates and so forth to stopping.
At stop phase, when coarse motion platform mover part and the static station of the moving platform low-speed motion of essence top, then all drive units coordinate to slow down and are parked on static station.
Mask table system of the present invention adopts magnetic suspension bearing, does not need air-flotation system, has simplified system architecture, vibration and the noise of having avoided air supporting to introduce, and can satisfy the required condition of high vacuum degree environment of extreme ultraviolet photolithographic.
On the other hand, compare with traditional thick smart fold layer structure, mask table system of the present invention provides a kind of coarse motion platform structure with six-freedom motion function, both guaranteed the thrust of scanning motion and improved kinematic accuracy, the high precision matching requirements of coarse motion platform have been reduced again, under the condition that does not change kinematic accuracy, greatly simplified the accuracy requirement of parts design and manufacturing, improved throughput rate, alignment precision and the resolution of litho machine.
Claims (8)
1. the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector, this system comprises essence moving platform, coarse motion platform and frame, described coarse motion platform contains a coarse motion platform stage body (2) and drive unit, it is characterized in that: described coarse motion platform stage body (2) is arranged on the outside of the moving platform of essence, in the middle of the moving platform of essence is enclosed in; Described drive unit comprises large stroke driver module and little stroke driver module two parts, large stroke driver module is comprised of two groups of directions X linear electric motors that are arranged symmetrically in coarse motion platform stage body (2) both sides about X-direction, little stroke driver module is comprised of four groups of two-freedom linear electric motors that drive simultaneously Y-direction and Z direction, four groups of two-freedom linear electric motors are arranged symmetrically in coarse motion platform stage body (2) both sides about X-direction in twos, and are positioned at large stroke driver module below;
described coarse motion platform also comprises two coarse motion platform gravitational equilibrium assemblies, described two coarse motion platform gravitational equilibrium arrangement of components are in coarse motion platform stage body (2) top, be arranged symmetrically in coarse motion platform stage body (2) both sides along X-direction, each coarse motion platform gravitational equilibrium assembly comprises a coarse motion platform gravitational equilibrium magnetic conductive board (11) and two coarse motion platform gravitational equilibrium permanent magnets (12), coarse motion platform gravitational equilibrium magnetic conductive board (11) links together with the permanent magnet array of directions X linear electric motors, coarse motion platform gravitational equilibrium permanent magnet (12) is arranged in coarse motion platform stage body (2) upper surface, side along X-direction is arranged symmetrically with about Y direction, and leave the gap with coarse motion platform gravitational equilibrium magnetic conductive board (11),
Described mask table system also contains the PSD sensor measuring system, described PSD sensor measuring system comprises four PSD sensor modules that are used for measuring the moving platform of essence and coarse motion platform relative position, described these four PSD sensor modules are arranged between the moving platform of essence and coarse motion platform stage body (2), and are arranged symmetrically with about X-axis and Y-axis respectively; Described PSD sensor measuring system also comprises four PSD sensor module and two grating scale assemblies of being used for measuring coarse motion platform and pedestal (9) relative position, four PSD sensor modules that are used for measurement coarse motion platform and pedestal (9) relative position are arranged in coarse motion platform stage body (2) along two sides of X-direction, and are arranged symmetrically with about Y-axis; Described two grating scale assemblies (40) are arranged between the coarse motion platform gravitational equilibrium magnetic conductive board (11) and coarse motion platform stage body (2) of both sides.
2. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 1, it is characterized in that: described four PSD sensor modules for measuring the moving platform of essence and coarse motion platform relative position all contain PSD sensor (45), optical fiber light-emitting window (46), 45 ° of mount pads (47) and LASER Light Source; Be used for measuring smart four the PSD sensors (45) that move platform and coarse motion platform relative position and be distributed on respectively coarse motion platform stage body (2) along the inboard of two sides of Y-direction, and be 45 ° of angles with the medial surface of these two sides and place, optical fiber light-emitting window (46) is arranged on 45 ° of mount pads (47), and these 45 ° of mount pads (47) are arranged on the position corresponding with the PSD sensor on the moving platform stage body (1) of essence;
Described four PSD sensor modules for measuring coarse motion platform and pedestal relative position all contain PSD sensor (45), optical fiber light-emitting window (46), at right angle setting seat (48) and LASER Light Source; Four PSD sensors that are used for measurement coarse motion platform and pedestal relative position are arranged in coarse motion platform stage body (2) along the outside of two sides of directions X, the optical fiber light-emitting window (46) corresponding with the PSD sensor is arranged at right angle setting seat (48), this at right angle setting seat (48) is arranged on pedestal (9), and the position corresponding with the PSD sensor; Described grating scale assembly comprises grating scale (41), grating scale erecting frame (42), grating reading head (43) and grating reading head bracket (44), described grating scale erecting frame (42) is arranged on the bottom of the coarse motion platform gravitational equilibrium magnetic conductive board (11) of a side, described grating reading head bracket (44) is arranged on coarse motion platform stage body (2), the position that makes described grating scale (41) and grating reading head (43) install is corresponding, and keeps measurement clearance between grating reading head (43) and grating scale (41).
3. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 1, it is characterized in that: described each directions X linear electric motors are comprised of two groups of permanent magnet arrays and one group of coil array; Described each two-freedom linear electric motors are comprised of one group of permanent magnet array and one group of coil array, and share one group of permanent magnet array along two two-freedom linear electric motors of directions X homonymy; Two groups of permanent magnet arrays of directions X linear electric motors and four groups of permanent magnet arrays of two-freedom linear electric motors all are fixed on surface level on frame; Two groups of coil arrays of directions X linear electric motors and four groups of coil arrays of two-freedom linear electric motors are fixed on coarse motion platform stage body (2) respectively.
4. according to the mask table system of the described six degree of freedom coarse motion platform of measuring with photoelectric position detector of claim 1 or 2, it is characterized in that: the moving platform of described essence comprises the moving platform stage body (1) of essence, Lorentz motor and the moving platform gravity compensation assembly of essence; Described Lorentz motor comprises three kinds of Lorentz motors, every kind of Lorentz motor is symmetrically distributed in the moving platform stage body (1) of essence along the two sides of Y direction, wherein, the driving direction of the first Lorentz motor is along X-direction, be arranged symmetrically with about X-axis, at least two of every sides drive the moving platform stage body (1) of essence and move along directions X with around the Z axis sense of rotation; The driving direction of the second Lorentz motor is along Y direction and move the platform barycenter by essence, every side at least one, the smart platform stage body (1) that moves of driving moves along Y-direction; On four angles that are positioned at the moving platform stage body of essence of the third Lorentz motor, be arranged symmetrically with about X-axis simultaneously, two of every sides, its driving direction is along Z-direction, drives the moving platform stage body of essence along the Z direction, move around X-axis sense of rotation and Y-axis sense of rotation.
5. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 4, it is characterized in that: the moving platform gravity compensation assembly of described essence comprises the moving platform gravity compensation of four essences unit, the moving platform gravity compensation of each essence unit is comprised of the moving platform gravitational equilibrium magnetic conductive board (31) of an essence and the moving platform gravitational equilibrium permanent magnet (32) of essence, the moving platform gravity compensation of described four essences unit is distributed in respectively on four angles of the moving platform stage body (1) of essence, wherein four moving platform gravitational equilibrium magnetic conductive boards (31) of essence are separately fixed on coarse motion platform stage body (2), four moving platform gravitational equilibrium permanent magnets (32) of essence are separately fixed on the moving platform stage body (1) of essence, and corresponding with the position of the moving platform gravitational equilibrium magnetic conductive board (31) of essence, leave the gap simultaneously and between the moving platform gravitational equilibrium magnetic conductive board of essence.
6. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 1, it is characterized in that: described coarse motion platform stage body (2) is thin-wall case, is made by thyrite.
7. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 4, it is characterized in that: the moving platform stage body (1) of described essence is thin-wall case, is made by thyrite.
8. according to the mask table system of the six degree of freedom coarse motion platform of measuring with photoelectric position detector claimed in claim 3, it is characterized in that: the one-dimensional array that the coil array of the coil array of described two groups of directions X linear electric motors and four groups of two-freedom linear electric motors all is comprised of the iron-core-free square coil; Two groups of permanent magnet arrays of described directions X linear electric motors adopt one dimension halbach type permanent magnet array, and the permanent magnet array of two-freedom linear electric motors adopts plane halbach type permanent magnet array.
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| CN201310048284.7A CN103105742B (en) | 2013-02-06 | 2013-02-06 | Mask table system of six-degree-of-freedom coarse table with photoelectric position detector measurement function |
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| CN201310048284.7A CN103105742B (en) | 2013-02-06 | 2013-02-06 | Mask table system of six-degree-of-freedom coarse table with photoelectric position detector measurement function |
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Effective date of registration: 20151111 Address after: 100084 Beijing, Haidian District, 100084 box office box office, Tsinghua University, Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing, Haidian District, 100084 box office box office, Tsinghua University, Patentee before: Tsinghua University |