CN105466343B - Measurement of in-plane motion devices and methods therefor - Google Patents
Measurement of in-plane motion devices and methods therefor Download PDFInfo
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Abstract
The present invention provides a kind of measurement of in-plane motion devices and methods therefors, it include: plane motion stator, plane motion mover and at least three measurement modules between the plane motion stator and the plane motion mover, two survey first directions in three measurement modules, another surveys second direction, the first direction and the second direction are vertical, it can achieve the purpose of measurement Rz corner plane motion bigger than normal, the high-acruracy survey for realizing X, Y, Rz plane motion improves the accuracy of measurement；Meanwhile measurement axis into will not be brought the error of non-measured axis without mechanical return difference using cydariform bearing in measurement module, plane motion mover is adapted in Rx, Ry, the micro variation of Z-direction.
Description
Technical Field
The invention relates to a plane motion measurement technology, in particular to a plane motion measurement device and a plane motion measurement method.
Background
The lithography machine production process is a series of extremely complex, expensive, and time-consuming lithography processes. The photoetching precision and the yield of the photoetching machine directly determine the design and the manufacture of photoetching equipment, and the market urgently waits for the photoetching equipment with high yield, high precision and high quality. Under the promotion of technical requirements, foreign main photoetching equipment manufacturers adopt a balance mass or counter-force external guiding technology to overcome the counter-acting force generated when a photoetching machine workpiece table moves, so that the limitation of yield and system precision is broken through.
The mass balancing technology enables the load mass, the speed and the acceleration of the workpiece table coarse movement module to be greatly increased; meanwhile, the force of the motion reaction of the workpiece table on the basic frame is greatly reduced, the damping difficulty of the photoetching machine system is reduced to a great extent, and the interference of the workpiece table motion system on exposure is avoided.
However, the introduction of the balance mass technology makes the structural design tend to be complex, at present, a workpiece table balance mass system has two structures of a double-layer balance mass and a single-layer balance mass, and an actuator for positioning control mainly has two modes, one mode is a direct drive control mode by adopting a linear motor, and the other mode is realized by adopting a rotating motor through structural motion transmission. The X, Y and Rz axes of the balance mass are controlled in a combined mode through the motion of a mechanism by adopting a common rotating motor, the system needs to be decoupled, the actuator system and the measuring system are relatively complex, and the difficulty in formulating a control strategy and an architecture scheme is high. With the development of linear motor technology, the combination of three linear motors tends to be more and more in balanced mass drive and architecture design. The three linear motors can respectively and independently control the X axis, the Y axis and the Rz axis, no movement coupling exists, an actuator system and a measuring system are relatively simple, and a control strategy and an architecture scheme are easy to make.
The multi-axis motion system measurement in the lithography equipment generally adopts the combined measurement of interferometer, grating, difference and the like. The interferometer has high measurement precision, but is sensitive to environmental temperature change, the Rz-direction detection range is only +/-2 mrad, and the interferometer is usually only used for nanometer precision measurement of a micromotion module and the like. The differential measurement precision can meet the requirement of the plane motion measurement precision, but the measurement stroke is shorter, generally within the range of +/-2 mm, so the differential measurement method is not suitable for the plane motion measurement of the balance mass. At present, grating measurement is mostly adopted in the operation measurement of the balance mass plane. The working temperature of the grating ruler can be 0-50 ℃, the grating ruler is not sensitive to the temperature change of the measurement environment, the measurement repetition precision is high, and the grating ruler is widely used in high-precision positioning and high-speed motion scenes.
However, in the current grating measurement, the problem of low zero position accuracy and repeatability of the balance mass relative to the base frame cannot be solved, and the slight position change of the balance mass in the Rx, Ry and Z axes usually brings errors into the measurement axis, so that the measurement result is inaccurate.
Disclosure of Invention
The invention aims to provide a plane motion measuring device and a method thereof, which adopt an XXY or XYY layout mode, utilize three groups of measuring modules to achieve the purpose of measuring plane motion with larger Rz rotation angles, realize the high-precision measurement of X, Y, Rz plane motion, realize the relative operation measurement of a plane motion rotor and a plane motion stator, and adapt to the working condition with larger Rz rotation angles; meanwhile, a drum bearing is adopted in the measuring module, mechanical return difference is avoided, the measuring device is allowed to operate under a complex working condition, micro displacement of the balance mass rotor Rx/Ry/Z is allowed, and errors cannot be brought into a measuring shaft.
To achieve the above and other related objects, the present invention provides a plane movement measuring device: the planar motion measuring device comprises a planar motion stator, a planar motion rotor and at least three measuring modules positioned between the planar motion stator and the planar motion rotor, wherein two of the three measuring modules measure a first direction, the other measuring module measures a second direction, and the first direction is perpendicular to the second direction. The first measuring module and the second measuring module are positioned on the same side of the planar motion stator or/and the planar motion mover, and the third measuring module is positioned on the opposite side of the first measuring module and the second measuring module.
Optionally, each of the measurement modules includes a grating ruler and a reading head, the grating ruler is relatively installed on the planar moving stator or the mover, and the reading head is relatively installed on the planar moving mover or the stator.
Optionally, each of the measurement modules measures data of X-axis offset or Y-axis offset before and after the planar moving mover moves, and the data obtained by the three measurement modules is used to calculate a horizontal movement amount and an Rz-axis offset of the planar moving mover relative to the planar moving stator.
Optionally, 2 of the three measurement modules are used for measuring X/Y axial data, and another measurement module is used for measuring Y/X axial data.
Optionally, each of the measurement modules further includes a cross mechanical guide rail, which is connected to the planar motion stator and the planar motion mover, and is configured to support the motion of the planar motion mover; the cross mechanical guide rail comprises an X-direction guide rail and a Y-direction guide rail, and the planar motion rotor moves in the X-axis direction and the Y-axis direction.
Optionally, a drum bearing is disposed on the Y-direction guide rail, and the drum bearing is used for connecting the planar motion mover and the Y-direction guide rail.
Optionally, the Y-direction guide rail is a slideway, and the drum bearing is attached to one side of the slideway.
Optionally, the planar motion device further comprises a motor, and the planar motion mover moves relative to the planar motion stator under the driving of the motor.
Correspondingly, the invention also provides a plane movement measuring method, which uses the plane movement measuring device and comprises the following steps: measuring position coordinates of the planar motion stator; after the planar motion rotor moves relative to the planar motion stator, measuring the position coordinate of the planar motion rotor; and then the horizontal movement amount and the RZ-direction offset of the planar motion mover relative to the planar motion stator are calculated according to the measured data.
Optionally, the position coordinates comprise at least three data (a set of data) of X-axis and Y-axis, X1, X2, Y or X, Y1, Y2, respectively.
Compared with the prior art, the plane motion measuring device and the plane motion measuring method provided by the invention have the beneficial effects that:
1. at least three measuring modules are arranged between the planar motion stator and the planar motion rotor, two of the three measuring modules measure a first direction, the other measuring module measures a second direction, and the first direction is vertical to the second direction, so that the purpose of measuring planar motion with a large Rz rotation angle is achieved, high-precision measurement of X, Y, Rz planar motion is realized, and the measuring accuracy is improved;
2. according to the invention, the position coordinates of the planar motion rotor before and after the motion are measured, namely the absolute value of the motion amount of the planar motion rotor is measured by the measuring module, so that the problems of low zero position precision and low repeatability of the planar motion measuring device are avoided;
3. the measuring module of the invention adopts the drum bearing, has no mechanical return difference, can not bring the error of a non-measuring shaft into the measuring shaft, and can adapt to the micro-change of the planar motion mover in the Rx, Ry and Z directions.
Drawings
Fig. 1 is a schematic plan view of a plane motion measurement apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic position diagram of a measurement module in the planar motion measurement apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a plane motion measurement apparatus according to a third embodiment of the present invention.
Fig. 4 is a schematic diagram of the position of a drum bearing in a planar motion measurement apparatus according to a third embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a plane motion measurement apparatus according to a fourth embodiment of the present invention.
Fig. 6 is a schematic diagram illustrating the position of a drum bearing in a plane motion measuring apparatus according to a fourth embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In describing the embodiments of the present invention in detail, the drawings are not necessarily to scale, and the drawings are not intended to limit the invention.
The plane movement measuring device of the present invention can be widely applied to various fields, especially plane movement of the balance mass, and is described below by way of a preferred embodiment, although the present invention is not limited to this specific embodiment, and general alternatives known to those skilled in the art are certainly within the scope of the present invention.
[ EXAMPLES one ]
Please refer to fig. 1, which is a schematic plan view of a plane motion measurement apparatus according to an embodiment of the present invention. As shown in fig. 1, the plane movement measuring apparatus includes: the planar motion measuring device comprises a planar motion stator 10, a planar motion rotor 11 and three measuring modules positioned between the planar motion stator 10 and the planar motion rotor 11, wherein a first measuring module 12a and a second measuring module 12b in the three measuring modules measure a first direction, a third measuring module 12c measures a second direction, and the first direction is perpendicular to the second direction.
In this embodiment, the measurement module includes a grating scale 121 and a reading head 122, the grating scale 121 is mounted on the planar moving stator 10, and the reading head 122 is mounted on the planar moving mover 11, as shown in fig. 2. In other embodiments, the positions of the grating scale 121 and the reading head 122 may be interchanged, that is, the grating scale 121 is mounted on the planar moving stator 10, the reading head 122 is mounted on the planar moving mover 11, and the specific positions of the grating scale and the reading head in the measurement module are determined according to the condition and the actual movement of the planar motion measurement apparatus.
The measuring module measures the movement of the planar motion mover 11Data of front and back X-axis offset or Y-axis offset, the data obtained by the three measurement modules, are used to calculate the amount of horizontal motion of the planar motion mover 11 relative to the planar motion stator 10 and RZAnd (4) a direction offset. Referring to fig. 1, the first measurement module 12a measures X-axis data, the second measurement module 12b measures Y-axis data, and the third measurement module 12c measures Y-axis data, i.e. in the form of XYY, so as to obtain the horizontal motion amount of the planar motion mover 11 relative to the planar motion stator 10 and the RZAnd (4) a direction offset.
In the embodiment, three motors are provided, as shown in fig. 1, a first electrode 13a is close to the first module 12a, and a second module 12b, the first electrode 13a is located between the first measuring module 12a and the second module 12b, the second electrode 13b and a third electrode 13c are close to the third module 12c, and the third module 12c is located between the second electrode 13b and the third electrode 13c, and the planar moving mover 11 moves under the driving of the motor 13. An air floating pad is further disposed between the planar motion stator 10 and the planar motion mover 11, and the air floating pad is mounted on the planar motion stator 10, so that the planar motion mover 11 does frictionless motion on the air floating pad.
The measurement module 12 further includes a cross mechanical guide rail, connected to the planar motion stator 10 and the planar motion mover 11, and configured to support the motion of the planar motion mover 11 on the planar motion stator 10; the cross mechanical guide rail comprises an X-direction guide rail and a Y-direction guide rail, so that the planar motion mover can move in the X-axis direction and the Y-axis direction; a drum bearing is arranged on the Y-direction guide rail and used for connecting the planar motion mover and the Y-direction guide rail; the Y-direction guide rail is a slide way, and the drum bearing is attached to one side of the slide way. Since fig. 1 is a plan view of the plane movement measuring device, only the cross mechanical guide will be described briefly, and the detailed description will be given in the following embodiments.
[ example two ]
On the basis of the first embodiment, the first measurement module 12a measures X-axis data, the second measurement module 12b measures Y-axis data, and the third measurement module 12c measures X-axis data, that is, in the form of XXY, so as to obtain the amount of horizontal movement and the amount of RZ-direction offset of the planar motion mover 11 relative to the planar motion stator 10.
The planar motion measuring device measures position coordinates of the planar motion rotor 11 before and after motion through the three measuring modules in the form of XXY or XYY, so that the horizontal motion amount and the RZ-direction offset of the planar motion rotor 11 relative to the planar motion stator 10 are obtained, the absolute value of the motion amount of the planar motion rotor is measured by the measuring modules, and the problems of low zero position precision and low repeatability of the planar motion measuring device are solved.
[ EXAMPLE III ]
Please refer to fig. 3, which is a schematic structural diagram of a plane motion measurement apparatus according to a third embodiment of the present invention. As shown in fig. 3, a base 30 (corresponding to a planar motion stator) is installed on a bottom frame module, an X-directional guide rail 31 is installed on the base 30, a grating scale 34 is adhered on the base 30, a reading head 35 is installed on a slider of the X-directional guide rail 31, a Y-directional guide rail 36 is installed on a slider of the X-directional guide rail 31, a connection block 38 is installed on a slider of the Y-directional guide rail 36, a drum bearing 37 is partially fitted in a corresponding circular hole of the connection block 38, an upper portion of the drum bearing 37 is connected to an adaptor 39, and the adaptor 39 is fixedly connected to a planar motion mover.
When the plane motion measuring device works, the X-direction guide rail 31 and the Y-direction guide rail 36 form two orthogonal moving pairs, the upper drum bearing 37 is provided with a rotating pair, can freely perform Z-direction displacement in a hole on the adapter 39, and can be decoupled in the RxRy direction in a circular hole due to the drum shape. The reading head 35 moves together with the slider of the X-guide 31, the reading head cable of which is switched to the base 30 by means of a drag chain 32, and the electrical plug 33 of the reading head 35 is fixed to the base 30.
In this embodiment, for an application condition with a short stroke, the reading head 35 may be mounted on the base 30, and the grating scale 34 may be mounted on the slider of the X-guide rail 31.
As shown in fig. 4, the maximum diameter of the drum bearing 37 is in zero clearance fit with the circular hole on the connecting block 38, so that no return difference exists in the motion structure, and therefore, errors of a non-measuring axis cannot be brought into the measuring axis, and the drum bearing is suitable for micro-changes of the planar motion mover in the directions of Rx, Ry and Z.
[ EXAMPLE IV ]
On the basis of the third embodiment, the Y-directional guide rail is a slideway. Please refer to fig. 5, which is a schematic structural diagram of a plane motion measurement apparatus according to a fourth embodiment of the present invention. As shown in fig. 5, a base 40 (corresponding to a planar motion stator) is installed on a bottom frame module, an X-directional guide rail 41 is installed on the base 40, a grating ruler 44 is adhered on the base 40, a reading head 45 is installed on a sliding block of the X-directional guide rail 41, a sliding groove 46 is a sliding channel with a groove and is installed on the sliding block of the X-directional guide rail 41, a magnet 48 is arranged on the left side of the sliding groove 46, a drum bearing 47 is placed in the sliding groove 46 and is made of martensitic stainless steel, in other embodiments, other materials known to those skilled in the art can be adopted and can be subjected to the adsorption force of the magnet 48, the upper part of the drum bearing 47 is connected to an adapter 49, and the adapter 49 is fixedly connected to a planar motion mover.
When the drum bearing 47 moves in the slide of the slide groove 46, the drum bearing 47 always moves along the side having the magnet 48 due to the attraction force of the magnet 48 on the left side, eliminating the movement backlash in the moving structure. Since the reading head 45 moves together with the slider of the X-guide rail 41, its reading head cable is switched to said base 40 by means of the drag chain 42, the electrical plug 43 of the reading head being fixed to said base 40.
In this embodiment, for an application condition with a short stroke, the reading head 45 may be mounted on the base 40, and the grating ruler 44 may be mounted on the slider of the X-directional guide rail 41.
As shown in fig. 6, the slide groove 46 does not have to be fitted to the maximum diameter of the drum bearing 47, and only the slide surface on the side where the magnet 48 is mounted is smooth and hard. The attraction force of the magnets 48 to the drum bearing in the direction of the chute is related to the acceleration of the balance mass and the friction losses inside the mechanism, and the required magnetic attraction force can be calculated. The magnetic force in the structure can also be other forces, such as spring tension and the like. The chute 46 and the drum bearing 47 move synchronously by magnetic force or spring tension, etc., without mechanical backlash, so that non-measuring shaft errors are not brought into the measuring shaft.
It should be noted that in the third and fourth embodiments, only one measuring module on the base is described, and actually, two other measuring modules are also provided on the base 30 or the upper 40, and the description is not repeated because the structure of the measuring module is the same as that of the measuring module shown in the embodiments.
Correspondingly, the invention also provides a plane movement measuring method, which adopts the plane movement measuring device and comprises the following steps: measuring position coordinates of the planar motion stator; after the planar motion rotor moves relative to the planar motion stator, measuring the position coordinate of the planar motion rotor; and then the horizontal movement amount and the RZ-direction offset of the planar motion mover relative to the planar motion stator are calculated according to the measured data. Wherein the coordinates comprise three data of X-axis and Y-axis, X1, X2, Y or X, Y1, Y2 respectively.
In summary, in the present invention, three measurement modules are disposed between the planar motion stator and the planar motion mover, the first measurement module and the second measurement module are located at the same side of the planar motion stator or/and the planar motion mover, and the third measurement module is located at the opposite side of the first measurement module and the second measurement module, so as to achieve the purpose of measuring planar motion with a large Rz rotation angle, achieve high-precision measurement of X, Y, Rz planar motion, and improve the accuracy of measurement; according to the invention, the position coordinates of the planar motion rotor before and after the motion are measured, namely the absolute value of the motion amount of the planar motion rotor is measured by the measuring module, so that the problems of low zero position precision and low repeatability of the planar motion measuring device are avoided; the measuring module of the invention adopts the drum bearing, has no mechanical return difference, can not bring the error of a non-measuring shaft into the measuring shaft, and can adapt to the micro-change of the planar motion mover in the Rx, Ry and Z directions.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (8)
1. A planar motion measurement device, comprising: the planar motion device comprises a planar motion stator, a planar motion rotor, a connector and at least three measurement modules positioned between the planar motion stator and the planar motion rotor, wherein two of the three measurement modules measure a first direction, the other measurement module measures a second direction, and the first direction is vertical to the second direction; wherein,
each measuring module further comprises a cross mechanical guide rail, which is connected with the planar motion stator and the planar motion rotor and is used for supporting the motion of the planar motion rotor; the cross mechanical guide rail comprises an X-direction guide rail and a Y-direction guide rail, so that the planar motion mover can move in the X-axis direction and the Y-axis direction; a drum bearing is arranged on the Y-direction guide rail and used for connecting the planar motion mover and the Y-direction guide rail; the adaptor is fixedly connected to the motion rotor, one end of the drum bearing is connected with the adaptor, and the adaptor is provided with a hole matched with one end of the drum bearing, so that the drum bearing moves in the hole along the direction of the Z axis.
2. The planar motion measurement device of claim 1 wherein each of the measurement modules comprises a grating scale oppositely mounted on the planar motion stator or mover and a read head oppositely mounted on the planar motion mover or stator.
3. The planar motion measuring apparatus as claimed in claim 1, wherein each of the measuring modules measures data of X-axis offset or Y-axis offset of the planar motion mover before and after the planar motion mover moves, respectively, and the data obtained by the three measuring modules is used to calculate the amount of horizontal motion and Rz-direction offset of the planar motion mover relative to the planar motion stator.
4. The planar motion measurement apparatus of claim 1 wherein 2 of the three measurement modules are configured to measure X/Y axial data and another of the three measurement modules is configured to measure Y/X axial data.
5. The planar motion measuring apparatus of claim 1, wherein the Y-guide is a slide and the drum bearing is attached to one side of the slide.
6. The planar motion measuring apparatus of claim 1, further comprising a motor, wherein the planar motion mover moves relative to the planar motion stator under the drive of the motor.
7. A planar motion measuring method using the planar motion measuring apparatus according to any one of claims 1 to 6, comprising: measuring position coordinates of the planar motion stator; after the planar motion rotor moves relative to the planar motion stator, measuring the position coordinate of the planar motion rotor; and then the horizontal motion amount and Rz-direction offset of the planar motion mover relative to the planar motion stator are calculated according to the measured data.
8. The planar motion measurement method of claim 7, wherein the position coordinates comprise at least three data of X-axis and Y-axis, X1, X2, Y or X, Y1, Y2, respectively.
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| CN1503340A (en) * | 2002-11-21 | 2004-06-09 | 奥林巴斯株式会社 | Chip check apparatus |
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| CN105466343A (en) | 2016-04-06 |
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