CN110132307A - A kind of straight line dynamic calibration apparatus - Google Patents
A kind of straight line dynamic calibration apparatus Download PDFInfo
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- CN110132307A CN110132307A CN201910433926.2A CN201910433926A CN110132307A CN 110132307 A CN110132307 A CN 110132307A CN 201910433926 A CN201910433926 A CN 201910433926A CN 110132307 A CN110132307 A CN 110132307A
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- slide unit
- air bearing
- bearing slide
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Abstract
A kind of straight line dynamic calibration apparatus disclosed by the invention belongs to digital photogrammetry field in geometric sense metering.The present invention is mainly made of mechanical structure, calibration module two parts.Mechanical mechanism is mainly made of four components: first is that pedestal, second is that linear motion guide rail, third is that air bearing slide unit component, fourth is that linear motor and control system.Calibration module mainly consists of two parts, first is that photography target, second is that magnetic railings ruler and frequency meter.Using linear motor as driving unit, connect the movement of air bearing slide unit, closed loop control function is realized using magnetic railings ruler as feedback distance signal, photogrammetric target is installed on air bearing slide unit, air bearing slide unit can do linear uniform motion together with photography target, digital Photogrammetric System measures the photography target in movement, and measurement result is compared with standard value, realizes the calibration of digital Photogrammetric System dynamic property.0~3.6m of measurement range of the present invention, highest running speed 5m/s guarantee that the uniform motion distance under highest running speed is 1m.
Description
Technical field
The invention belongs to digital photogrammetry fields in geometric sense metering, and in particular to a kind of straight line dynamic calibration apparatus.
Background technique
Digital Photogrammetric System is widely used in the neck such as automobile manufacture, aerospace, shipbuilding after introducing China
Domain.In recent years, have benefited from the data processing methods such as progress and image procossing, feature extraction and the target differentiation of photographic goods
Development, photogrammetric technology is increasingly used in dynamic tracking measurement field.
With the increase of non-contact dynamic measurement demand, domestic and foreign manufacturers are proposed the photography of many measurable behavioral characteristics
Measuring device is applied to fields, the equipment components such as aerospace, impact vibration, life science and has been provided with adopting for thousand hertz
Sample frequency.The dynamic measurement performance that some R&D institutions, China and universities and colleges also start with digital Photogrammetric System is completed every
Task, however for digital Photogrammetric System, there are no unified metering source tracing methods for the country at present, to its dynamic measurement property
The calibration problem concern of energy is less, causes the measurement result of digital Photogrammetric System to lack reliability, influences photogrammetric system
The further genralrlization application of system, especially application under the conditions ofs vibration, high temperature etc..According to existing research, taken the photograph to solve number
Shadow measuring system dynamic calibration problem, using Digital Photogrammetric System to the coordinate of the measurement target under Different Dynamic environment
Measurement result carries out error evaluation.Two kinds of basic and typical dynamic environment are linear uniform motion and uniform circular motion.Base
In both dynamic conditions, Digital Photogrammetric System can sit the target in linear uniform motion or uniform circular motion
Mapping amount verifies Digital Photogrammetric System dynamic measurement characteristics, to realize dynamic calibration.
Straight line dynamic calibration is that photogrammetry targets do linear uniform motion, and Digital Photogrammetric System is under linear uniform motion
Target shot, Digital Photogrammetric System shooting resolves the coordinates of targets value that obtains and is compared with standard value, and verifying is photographed
Whether the measurement to dynamic object of measuring system is in system index claimed range.Straight line dynamic calibration is to solve to photograph
Measure the dynamic calibration problem under target line movement.
Circumference dynamic calibration is that photogrammetry targets point does uniform circular motion, and Digital Photogrammetric System is to uniform circular motion
Under target point shot, Digital Photogrammetric System shooting resolves the coordinates of targets value that obtains and is compared with standard value, verifying
Whether the measurement to dynamic object of Digital Photogrammetric System is in system index claimed range.Circumference dynamic calibration is to solve
Dynamic calibration problem under photogrammetry targets circular motion is more suitable for High frequency photographing measurement system dynamic calibration.
The driving method of linear uniform motion is generally divided into: lead screw and nut driving method, belt and motor drive mode,
Air bearing slide unit and linear motor driving method etc..Feed screw nut driving method main feature has: positioning accuracy height, transmission efficiency
Height, structure are simple, install convenient, are not suitable for high-speed motion.Belt motor driving method main feature has: structure is simple, energy
Buffering absorbing can transmit that power, precision are low, cheap, maintenance is easy under long wheelbase.Air bearing slide unit and linear motor drive
Mode main feature: it runs smoothly, achievable high-speed motion, stroke range still can keep high-precision to control greatly, under long stroke
System etc..
The conventional precision movement platform using mechanical contact driving method, by mechanical friction, malformation, fever
Etc. factors influence, precision can only achieve submicron order.Air bearing slide unit and linear motor actuation techniques be collection machinery, electricity,
Computer is controlled in integrated integrated technology, by the supporting way of static pressure air-bearing, reduces mechanical friction, to measure skill
Art, precision processing technology provide high-precision positioning device.
The straight line dynamic calibration apparatus that the country is developed at present has following deficiency:
(1) linear motor installation site is located at below air bearing slide unit, since mover and the stator installation of linear motor are necessary
Guarantee certain interval, therefore this Standard is difficult.
(2) movement velocity of air bearing slide unit is not able to satisfy High frequency photographing measurement system dynamic calibration demand.
(3) arrangement of floating cushion is in such a way that two working faces support, under high-speed motion above and below air bearing slide unit
Play causes movement velocity unstable.
As the models such as large aircraft, space station, rocket, antenna and commercial product develop, digital Photogrammetric System
The trend that increased significantly also is presented in retention, and the demand of non-contact real time dynamic measurement is carried out using digital Photogrammetric System
It is more and more clear, it needs to carry out that Digital Photogrammetric System is quiet, Dynamic Calibration Technique research, develops that Digital Photogrammetric System is quiet, dynamic is joined
Number calibrating installation.Straight line dynamic calibration apparatus can solve the calibration problem of digital Photogrammetric System straight line dynamic parameter.
Summary of the invention
In order to solve the problems, such as the magnitude tracing and measurement and calibration of current digital Photogrammetric System dynamic parameter, the present invention is public
A kind of straight line dynamic calibration apparatus opened connects the movement of air bearing slide unit, utilizes magnetic railings ruler using linear motor as driving unit
Closed loop control function is realized as feedback distance signal, photogrammetric target is installed on air bearing slide unit, air bearing slide unit is together with photography
Target can do linear uniform motion, and digital Photogrammetric System measures the photography target in movement, measurement result with
Standard value compares, and realizes the calibration of digital Photogrammetric System dynamic property.
0~3.6m of measurement range of the invention, highest running speed 5m/s, and guarantee under highest running speed at the uniform velocity
Move distance is 1m, provides photogrammetric high speed uniform motion dynamic state of parameters standard.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of straight line dynamic calibration apparatus disclosed by the invention mainly consists of two parts, and a part is mechanical structure, the
Two partial collimation modules.
Mechanical mechanism is mainly made of four components: first is that pedestal, second is that linear motion guide rail, third is that air bearing slide unit group
Part, fourth is that linear motor and control system.
The pedestal is for providing stable working reference plane.Five support seat supports are installed in base bottom, wherein three
A main support of support base, two support base Auxiliary supports, five support base height are adjustable, to guarantee that the good depth of parallelism is wanted
It asks；Pedestal uses two-stage " step " type section, and upper level " step " upper surface is equipped with linear motion guide rail, linear motion guide rail
It is fixed, and is bonded secured by bolt and pedestal；Step surface by linear motion guide rail installs linear motor stator electric, and is furnished with phase
Answer shield mounting hole；The uniformly distributed workpiece installing hole position of next stage " step " facilitates the various measured workpiece of installation；Pedestal rear
Installation auxiliary device, the auxiliary device include movement drag chain, pneumatic element, power-supply system.
Preferably, the base material selects marble, the linear motion guide rail is using identical with pedestal big
Fibrous gypsum material.Marble is with linear expansion coefficient is small, rigidity is good, hardness is high, not magnetized good characteristics.
The linear motion guide rail is used for linear movement guide, and the air bearing slide unit under supporting movement state.Straight line fortune
It is smooth that dynamic guide rail linearity can guarantee that air bearing slide unit can be run under high-speed motion；Linear motion guide rail bottom side is beveling
Face limits five freedom degrees of air bearing slide unit, under linear motion, is mutually balanced by the air bearing pressure that floating cushion generates to protect
Hold air bearing slide unit motion straightness and steady；Magnetic railings ruler is installed in linear motion guide rail side, is used for closed-loop control；Guide rail two sides end
End installation electric machine spacing switch and anticollision device, collision-prevention device, for implementing safeguard measure in emergency circumstances.
The air bearing slide unit component is used to provide the motion platform under high-speed motion.The air bearing slide unit is mainly by gas
Camel and slide unit sheet metal component form, and install four pairs of floating cushions by three medial surfaces being perpendicularly to the direction of movement in sheet metal component, with
Guarantee keeping predetermined floating gap after ventilation between floating cushion and linear motion guide rail, mounting means is that upper surface installs two pairs
A pair of of floating cushion is installed in floating cushion, side, and a pair of of floating cushion is installed in bottom；Floating cushion is high-speed large-flow floating cushion, and is used
" circulating type " arrangement, for guaranteeing the stability when movement of air bearing slide unit；Direction installation is moved along a straight line directly in slide unit lateral surface
Line electric mover.
The linear motor and control system is used to provide the linear uniform motion of high speed for air bearing slide unit.Motor stator
It is installed on pedestal, mover is installed on air bearing slide unit；Using magnetic railings ruler as Length Quantity standard in control system, frequency meter is as the time
Amount standard, controller control motor and drive the movement of air bearing slide unit, and magnetic railings ruler feeds back slide unit location information and forms closed loop to controller
Control.
Preferably, linear motor uses U-type groove formula linear motor, exchange 380VAC power supply, the operation of linear motor highest
Speed 5m/s.
The calibration module mainly consists of two parts, first is that photography target, second is that magnetic railings ruler and frequency meter.
The photography target is that the reference object of measured number Digital Photogrammetric System is provided via preparatory static demarcating
Location criteria.Target quantity of photographing be it is two or more, photography target is installed on the air bearing slide unit work of straight line dynamic calibration apparatus
Make on table top, in the movement of air bearing slide unit, photography target keeps corresponding movement；After target of photographing is installed, on air bearing slide unit
Establish target co-ordinates system, position of the calibration photography target in target co-ordinates system, thus to obtain two or more photography targets it
Between relative positional relationship, and in this, as standard value；Measured number Digital Photogrammetric System alignment device middle position is simultaneously kept
It is fixed, guarantee air bearing slide unit in uniform motion, photographs target in the effective range of digital Photogrammetric System；Pass through
It is continuously taken pictures to the photography target in uniform speed motion state, via subsequent calculating, obtains to photograph under corresponding speed and survey
Amount system compares the position measurements of photography target with standard value, and verifying measured number Digital Photogrammetric System is moved
State measurement performance.
The magnetic railings ruler and frequency meter is for providing velocity standard amount.The Length Quantity of the straight line dynamic calibration apparatus is joined
Number passes system to Length Quantity by magnetic railings ruler and traces to the source, and temporal frequency amount passes system to time quantum by frequency meter and traces to the source.Based on straight
Line motor driven air bearing slide unit uniform motion, the speed of the uniform motion calculated by magnetic railings ruler and frequency meter as standard speed,
It is clapped using digital Photogrammetric System to being arranged on air bearing slide unit and carry out the photogrammetric target of linear uniform motion
Measurement is taken the photograph, gained measurement result is the measurement result under the point-to-point speed.
The working method of a kind of straight line dynamic calibration apparatus disclosed by the invention are as follows: straight-line electric is driven by control system
Machine, drives air bearing slide unit to carry out linear uniform motion, and tested photography target is set to air bearing slide unit working face, the movement of air bearing slide unit
Displacement is provided by magnetic railings ruler in the process, and temporal frequency amount is provided by frequency meter, and tested Digital Photogrammetric System is to being set to air bearing
The photography target of slide unit working face carries out dynamic parameter calibration.
The utility model has the advantages that
1, a kind of straight line dynamic calibration apparatus disclosed by the invention, by the movement speed that different uniform motion sections is arranged
Degree, digital Photogrammetric System carry out shooting measurement to the photography target under certain speed uniform motion, obtain measurement object
Location information, which is compared with the photography target position standard value demarcated in a static condition, is counted
Word Digital Photogrammetric System verifies digital Photogrammetric System to the measurement error of the target in linear uniform motion state
Straight line dynamic property, the i.e. calibration of the straight line dynamic parameter of realization digital Photogrammetric System.
2, a kind of straight line dynamic calibration apparatus disclosed by the invention provides uniform rectilinear's fortune by straight line dynamic calibration apparatus
Photogrammetry targets under dynamic state, it is significant to the dynamic calibration problem of digital Photogrammetric System.
Detailed description of the invention
Fig. 1 is a kind of straight line dynamic calibration apparatus functional block diagram disclosed by the invention；
Fig. 2 is a kind of straight line dynamic calibration apparatus overall construction drawing for not installing shield；
Fig. 3 is linear motor and control section main structure figure of the invention；
Fig. 4 is air bearing support section side block diagram of the invention.
Wherein: 1-pedestal, 2-linear motion guide rails, 3 shields, 4-air bearing slide units, 5-photogrammetric targets, 6-
Move drag chain, 7-Pneumatic assemblies, 8-linear motor stator electrics, 9 linear motor rotors, 10-floating cushions.
Specific embodiment
Objects and advantages in order to better illustrate the present invention with reference to the accompanying drawing do further summary of the invention with example
Explanation.
Embodiment 1:
As shown in Figure 1, a kind of straight line dynamic calibration apparatus disclosed in the present embodiment, for solving current digital photogrammetry
The magnitude tracing and measurement and calibration problem of the comprehensive parameters such as the relevant dynamic parameter of system.A kind of straight line disclosed in the present embodiment is dynamic
State calibrating installation is divided into two parts, first is that mechanical structure, second is that calibration module.Mechanical structure is hardware foundation of the invention,
It is made of altogether four components, respectively marble pedestal 1, linear motion guide rail 2,4 component of air bearing slide unit, linear motor and control
System accordingly installs respective components on four components.Calibration module is to setting by digital Photogrammetric System in gas
Photography target on slick and frivolous platform 4 is shot, and target position standard volume is obtained by calibration in advance, length standard amount and time frequency
Rate standard volume passes through magnetic railings ruler respectively and frequency meter obtains.Pass through the digital photogrammetry system under different linear uniform motion speed
The measurement united to target relative position, measurement result are compared with standard volume, realize and join to digital Photogrammetric System dynamic
Several calibrations.
As shown in Figure 2,3, 4, the mechanical structure mainly includes that marble pedestal 1 plays overall support, has line
Swollen coefficient is small, rigidity is good, hardness is high, not magnetized good characteristics.Using two-stage " step " type structure, rigidity with higher and
Stability makes full use of " step " type structure that can reduce station height.It is a pair of straight in the upper working face installation 20 of high step
Line motor stator 8 and the marble linear motion guide rail 2 isometric with marble pedestal 1；In the upper working face mounting portion of low step
Divide photogrammetric tooling and installation shield 3.
Marble linear motion guide rail 2 is used to provide the air bearing slide unit under linear movement guide function and supporting movement state
4.Marble linear motion guide rail 2 guarantees good straightness by processing；The structure of marble linear motion guide rail 2 is bottom
Side is scarf, and lift of gas is evenly distributed and is easy to keep balancing；Marble linear motion guide rail 2 pastes magnetic along the direction of motion
Grid ruler, magnetic railings ruler is for providing closed-loop control and length standard amount；2 both-side ends of marble linear motion guide rail install motor
Limit switch and anticollision device, collision-prevention device, for implementing safeguard measure in emergency circumstances.
Air bearing slide unit 4 and four pairs of big flow floating cushions are fitted on marble linear motion guide rail 2；Floating cushion is height
Fast big flow floating cushion, and " circulating type " is used to arrange, it ensure that stability when air bearing slide unit 4 moves；By sliding in air bearing
Three medial surfaces that platform 4 is perpendicularly to the direction of movement install four pairs of floating cushions, are led with guaranteeing after ventilation floating cushion with linear motion
Certain floating gap is kept between rail 2, mounting means is that upper surface installs two pairs, and a pair of of floating cushion, bottom peace are installed in side
Fill a pair of of floating cushion；Slide unit lateral surface move along a straight line direction installation linear motor rotor 9；The setting photography of air bearing slide unit 4 is surveyed
Target 5 is measured, Digital Photogrammetric System dynamic calibration is used for.
7 air supply pipe of Pneumatic assembly and driver control function cable pass through movement drag chain 6 and air bearing slide unit 4 and marble
Pedestal 1 connects.
A kind of working method of straight line dynamic calibration apparatus disclosed in the present embodiment are as follows: straight-line electric is driven by control system
Machine, drives air bearing slide unit 4 to carry out linear uniform motion, and tested photography target is set to 4 working face of air bearing slide unit, air bearing slide unit 4
Displacement is provided by magnetic railings ruler in motion process, and temporal frequency amount is provided by frequency meter, and tested Digital Photogrammetric System is to being set to
The photography target of 4 working face of air bearing slide unit carries out dynamic parameter calibration.
Above-described specific descriptions have carried out further specifically the purpose of invention, technical scheme and beneficial effects
It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention
It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection scope within.
Claims (9)
1. a kind of straight line dynamic calibration apparatus, it is characterised in that: mainly consist of two parts, a part is mechanical structure, second
Partial collimation module；
Mechanical mechanism is mainly made of four components: first is that pedestal (1), second is that linear motion guide rail (2), third is that air bearing slide unit
(4) component, fourth is that linear motor and control system；
The calibration module mainly consists of two parts, first is that photography target, second is that magnetic railings ruler (8) and frequency meter.
2. a kind of straight line dynamic calibration apparatus as described in claim 1, it is characterised in that: the pedestal (1) is for providing
Stable working reference plane；Five support seat supports are installed in pedestal (1) bottom, wherein three main supports of support base, two supports
Seat Auxiliary support, five support base height are adjustable, to guarantee good depth of parallelism requirement；Pedestal (1) uses two-stage " step "
Type section, upper level " step " upper surface are equipped with linear motion guide rail (2), and linear motion guide rail (2) passes through bolt and pedestal
(1) fixed, and be bonded secured；The other step surface of linear motion guide rail (2) installs linear motor stator electric, and is furnished with corresponding shield
(3) mounting hole；The uniformly distributed workpiece installing hole position of next stage " step " facilitates the various measured workpiece of installation；Pedestal (1) rear peace
Auxiliary device is filled, the auxiliary device includes movement drag chain (6), pneumatic element, power-supply system.
3. a kind of straight line dynamic calibration apparatus as described in claim 1, it is characterised in that: the linear motion guide rail (2)
Air bearing slide unit (4) for linear movement guide, and under supporting movement state；Linear motion guide rail (2) straightness can guarantee
Air bearing slide unit (4) runs smooth under high-speed motion；Linear motion guide rail (2) bottom side is scarf, limits air bearing slide unit
(4) five freedom degrees are mutually balanced by the air bearing pressure that floating cushion (10) generate under linear motion to keep air bearing sliding
Platform (4) motion straightness and steady；Magnetic railings ruler (8) are installed in linear motion guide rail (2) side, are used for closed-loop control；Guide rail two sides
Electric machine spacing switch and anticollision device, collision-prevention device are installed in end, for implementing safeguard measure in emergency circumstances.
4. a kind of straight line dynamic calibration apparatus as claimed in claim 1 or 2, it is characterised in that: described air bearing slide unit (4) group
Part is used to provide the motion platform under high-speed motion；The air bearing slide unit (4) is mainly by floating cushion (10) and slide unit sheet metal component
Composition installs four pairs of floating cushions (10) by three medial surfaces being perpendicularly to the direction of movement in sheet metal component, to guarantee after ventilation
Predetermined floating gap is kept between floating cushion (10) and linear motion guide rail (2), mounting means is that two pairs of air bearings are installed in upper surface
It pads (10), a pair of of floating cushion (10) is installed in side, and a pair of of floating cushion (10) is installed in bottom；Floating cushion (10) is high-speed large-flow gas
Camel (10), and " circulating type " is used to arrange, for guaranteeing stability when air bearing slide unit (4) movement；On slide unit lateral surface edge
Linear movement direction installs linear motor rotor (9).
5. a kind of straight line dynamic calibration apparatus as described in claim 1, it is characterised in that: the linear motor and control system
System is for providing the linear uniform motion of high speed for air bearing slide unit (4)；Motor stator is installed on pedestal (1), and mover is installed on gas
Slick and frivolous platform (4)；Magnetic railings ruler (8) are used as Length Quantity standard in control system, frequency meter is as time quantum standard, controller control
Motor drives air bearing slide unit (4) movement, and magnetic railings ruler (8) feeds back slide unit location information and forms closed-loop control to controller.
6. a kind of straight line dynamic calibration apparatus as described in claim 1, it is characterised in that: the photography target is measurand
The reference object of word Digital Photogrammetric System provides location criteria via preparatory static demarcating；Target quantity of photographing is two or more
A, photography target is installed on air bearing slide unit (4) work top of straight line dynamic calibration apparatus, when air bearing slide unit (4) move,
Target of photographing keeps corresponding movement；It photographs after target installation, target co-ordinates system, calibration photography is established on air bearing slide unit (4)
Position of the target in target co-ordinates system, thus to obtain the relative positional relationship between two or more photography targets, and with this
As standard value；Measured number Digital Photogrammetric System alignment device middle position is simultaneously kept fixed, and guarantees air bearing slide unit (4) even
When speed movement, target is photographed in the effective range of digital Photogrammetric System；By in uniform speed motion state
Photography target continuously taken pictures, via subsequent calculating, obtain under corresponding speed Digital Photogrammetric System to the position of photography target
Measurement result is set, is compared with standard value, the dynamic measurement performance of measured number Digital Photogrammetric System is verified.
7. a kind of straight line dynamic calibration apparatus as described in claim 1, it is characterised in that: the magnetic railings ruler (8) and frequency
Meter is for providing velocity standard amount；The Length Quantity parameter of the straight line dynamic calibration apparatus is passed by magnetic railings ruler (8) to Length Quantity
System is traced to the source, and temporal frequency amount passes system to time quantum by frequency meter and traces to the source；It is even based on linear motor driving air bearing slide unit (4)
Speed movement, the speed of the uniform motion calculated by magnetic railings ruler (8) and frequency meter use digital photogrammetry system as standard speed
It unites and carries out shooting measurement to being arranged on air bearing slide unit (4) and carry out the photogrammetric target (5) of linear uniform motion, gained is surveyed
Measuring result is the measurement result under the point-to-point speed.
8. a kind of straight line dynamic calibration apparatus as claimed in claim 2, it is characterised in that: pedestal (1) material selection is big
Fibrous gypsum, the linear motion guide rail (2) is using the identical marble material with pedestal (1).
9. a kind of straight line dynamic calibration apparatus as claimed in claim 2, it is characterised in that: linear motor is straight using U-type groove formula
Line motor, exchange 380VAC power supply, linear motor highest running speed 5m/s.
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| CN201811510273 | 2018-12-11 | ||
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| CN110849541A (en) * | 2019-11-28 | 2020-02-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | High and low temperature pulsating pressure tracing method and device |
| CN110849541B (en) * | 2019-11-28 | 2021-07-06 | 中国航空工业集团公司北京长城计量测试技术研究所 | High and low temperature pulsating pressure tracing method and device |
| CN110986848A (en) * | 2019-12-20 | 2020-04-10 | 合肥富煌君达高科信息技术有限公司 | Precise distance measuring device and calibration method thereof |
| CN110986848B (en) * | 2019-12-20 | 2021-07-20 | 合肥富煌君达高科信息技术有限公司 | Precise distance measuring device and calibration method thereof |
| CN112629564A (en) * | 2021-01-06 | 2021-04-09 | 哈尔滨工业大学 | High-acceleration high-precision linear vibration table |
| CN112629564B (en) * | 2021-01-06 | 2023-02-28 | 哈尔滨工业大学 | High-acceleration high-precision linear vibration table |
| CN113624135A (en) * | 2021-08-25 | 2021-11-09 | 工业和信息化部电子第五研究所 | Pose measuring system |
| CN114577103A (en) * | 2021-09-28 | 2022-06-03 | 长光（沧州）光栅传感技术有限公司 | Magnetic grid precision calibration detection device and detection method thereof |
| CN114577103B (en) * | 2021-09-28 | 2023-09-08 | 长光（沧州）光栅传感技术有限公司 | Magnetic grid precision calibration detection method |
| CN114290082A (en) * | 2021-12-13 | 2022-04-08 | 中国航空工业集团公司北京长城计量测试技术研究所 | Lightweight air flotation workbench |
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