CN209147920U - A kind of surface whole audience microscopic three-dimensional pattern automatic tester - Google Patents
A kind of surface whole audience microscopic three-dimensional pattern automatic tester Download PDFInfo
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- CN209147920U CN209147920U CN201821817817.8U CN201821817817U CN209147920U CN 209147920 U CN209147920 U CN 209147920U CN 201821817817 U CN201821817817 U CN 201821817817U CN 209147920 U CN209147920 U CN 209147920U
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- stepper motor
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- measurement
- dimensional pattern
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Abstract
A kind of surface whole audience microscopic three-dimensional pattern automatic tester, is able to achieve the switching of contact and non-contact measurement, expands measurement range；It is formed from stepper motor slide unit, pedestal, X/Y to stepper motor guide rail, contact inductance sensor, laser displacement sensor, sensor connecting piece, CCD camera etc.；The CCD camera can be carried out the path planning before detection and the path correction in detection process；By changing position of the measured piece relative to the inductance sensor or laser displacement sensor to the control of stepper motor guide track system to the X/Y, according to the detection path detection of planning；The inductance sensor or laser displacement sensor export the vertical height data of measured point on measured piece when measurement, the position coordinates of measured point and the altitude information are corresponded, the three-dimensional appearance data on tested surface can be obtained, and then can get the surface characteristics parameters such as surface roughness, flatness.
Description
Technical field
The utility model belongs to machine-building detection device field, is related to the height to piece surface whole audience microscopic three-dimensional pattern
Precision is rebuild, and in particular to the measurement method and reality of the surface characteristics parameter such as a kind of available Part Surface Roughness, flatness
Existing device.
Background technique
It is more next to the required precision and quality requirement of piece surface with modern society's Precision Machining and manufacturing development
It is higher.Therefore, can the three dimensional topography of piece surface be measured and be evaluated just seems of crucial importance.It is used at present
The measuring principle of surface profile measurement instrument can be divided into contact and contactless.The measurement method of Mechanical stylus formula is because of it
The continuous improvement of resolution ratio, wider measurement range, more application and higher economy and widely answered
With.The Diamond tip that one radius reaches micron dimension is vertically disposed in the surface of tested part and makees lateral shifting by it
Dynamic, contact pilotage makees vertical undulatory motion with the chamfered shape of measured surface, this micro-displacement is converted into electric signal and is put
Big and processing, this makes it possible to obtain surface roughness parameter values.But because its directly contacted in measurement process with measured piece and with
Generation relative motion, easily cause contact pilotage abrasion and measured piece surface generate scratch the case where.Meanwhile measurement process needs to spend
Take the more time.It can then accomplish non-destructive testing and faster inspection using the instrument of non-contact measurement Part Surface Roughness
Degree of testing the speed.But it is general at high price, and it waits more by force the zero of physical features to the high grade of transparency or surface reflectivity
Precision measured by part is limited.Therefore when actually detected, need the features such as the material according to part, size select contact or
The measuring instrument of non-contact principle.
The present apparatus can easily realize the switching of contact type measurement and non-contact measurement.Utilize high-precision contact
Formula inductance sensor gauge head or high-precision laser displacement sensor obtain the vertical height data on tested part.Pass through data
Acquisition and processing, the vertical height data one that the position coordinates of measured point on tested part and high-precision sensor are measured are a pair of
It should get up, the three-dimensional appearance data on measured piece measured surface can be obtained.According to the higher evaluation criteria of current frequency of use
And method, the program for capableing of automatic screening and extraction data is write, is allowed to be automatically performed tested part surface roughness, flatness
The evaluation of equal characteristic parameters.
Utility model content
The technical issues of the utility model solves is: on the one hand, common surfagauge can only be realized tested
The single straight line of piece surface measures, to can not achieve the measurement and evaluation of piece surface whole audience three-dimensional micro-morphology feature；
On the other hand, it is contemplated that the part of the features such as different materials, size is needed using different methods, the present apparatus can be easily
Realize the switching of contact and contactless measurement.
In order to solve the above-mentioned technical problem, the utility model adopts the following technical solution:
A kind of surface whole audience microscopic three-dimensional pattern automatic tester, it can be achieved that contact and non-contact measurement switching；
Mainly from bottom plate, X/Y to stepper motor guide track system, inductance sensor gauge head, laser displacement sensor, CCD camera, stepping
The composition such as motor slide unit system, regulating part, it is characterised in that: the measurement module of contact type measurement system, by tested zero can be driven
Part is sensed in the X/Y of XY in-plane moving to stepper motor guide track system and the inductance of the measurable a certain point height in tested part surface
Device gauge head composition；The measurement module of contactless measuring system, from that can drive tested part in the X/Y of XY in-plane moving to stepping
The laser displacement sensor of motor slide rails system and the measurable a certain point height in tested part surface composition.
Preferably, in contact and non-contacting measuring system, be equipped with for before detecting path planning and detection
The CCD camera of path correction in the process.
Preferably, the X/Y includes that can control guide rail to walk along X to the X direction guiding rail moved to stepper motor guide track system
Into motor and the Y-direction guide rail stepper motor for moving guide rail along Y-direction.
Preferably, in the measuring device of contact, the through-hole of four " keyway " types is provided on contact regulating part.
Preferably, it in contactless measuring device, has been processed on sensor connecting piece and CCD connector adjustable
" circular arc " type through-hole of angle moves horizontally sliding block for adjusting the horizontal position of sensor connecting piece, contactless regulating part
The position being connected with planar movement sliding block is combined using " well " font, the portion being connected on CCD connector with CCD camera
Position has processed " kidney-shaped " hole, convenient for the adjusting of position each other.
Preferably, the measured piece, which is fixed on to reduce by high-intensitive viscose glue, generates interference to CCD camera
On black acrylic board.
The advantage of the utility model is: can be easy to realize the switching of contact and contact type measurement, therefore survey
It is wide to measure range.Tested part is obtained using high-precision contact inductance sensor gauge head or high-precision laser displacement sensor
On vertical height data.By data acquisition and processing (DAP), by the position coordinates and high-precision sensing of measured point on tested part
The vertical height data that device measures correspond, to obtain the microscopic three-dimensional topographic data on tested part surface.
It is handled again by corresponding program, the evaluation of the characteristic parameters such as Part Surface Roughness, flatness can be completed.Whole device tool
There is the advantages that measurement accuracy is high, compact-sized, manufacturing process is simple, applied widely, high degree of automation, and cost is relatively low.
Detailed description of the invention
Fig. 1 is the axonometric drawing of the contact measuring apparatus of the utility model
Fig. 2 is the contact type measurement joint detail figure of the utility model
Fig. 3 is the axonometric drawing of the non-contact measurement apparatus of the utility model
Fig. 4 is the non-contact measurement joint detail figure of the utility model
Fig. 5,6 be the utility model detection path example
Fig. 7 is the hardware system structure figure of the utility model
Fig. 8 is the preparation process before the contact type measurement of the utility model starts
Fig. 9 is the contact type measurement process of the utility model
Figure 10 is the preparation process before the non-contact measurement of the utility model starts
Figure 11 is the non-contact measurement process of the utility model
Specific embodiment
The utility model is further described below in conjunction with attached drawing:
Referring to Fig.1-5, a kind of to carry out contact or contactless survey to piece surface whole audience microscopic three-dimensional shape characteristic
The method and realization device of amount and evaluation.Mainly from support system, stepper motor slide unit, X/Y to stepper motor guide track system, quilt
Survey connection and the position adjustment, the path CCD of the mounting and clamping system, contact inductance sensor or laser displacement sensor of part
Planning and deviation-rectifying system.
Embodiment 1: contact type measurement.
In the support system, four rubber mats (2) are fixed by screws on the bottom surface of bottom plate (1), bottom plate (1)
Upper surface process location hole, be fixed on the upper table of bottom plate (1) for slid platform base (19) and guide rail fixing seat I (4) will to be connect
Face.Two thin scribing line to intersect vertically are processed in the upper surface of bottom plate (1) simultaneously, convenient for demarcating X/Y to stepper motor guide rail
The center of system.
In the stepper motor slide unit, slid platform base (19) is fixed by screws on bottom plate (1), slide unit stepper motor
(24) vertical displacement movement of slide unit mobile sliding block (22) is controlled.In view of the guarantor to contact inductance sensor gauge head (17)
Shield, proposes higher requirement to the minimum stable engine speed of slide unit stepper motor (24).Before measurement, slide unit mobile sliding block (22) exists
Vertically decline under the control of slide unit stepper motor (24), so that inductance sensor gauge head (17) contact pilotage be driven to be lowered vertically into and quilt
Survey the position that part (12) keep closer distance.CCD camera (14) acquires image, after software is handled, controls guide X
The movement of rail stepper motor (3) and Y-direction guide rail stepper motor (7), so that the center of tested part (12) and inductance sensor are surveyed
The stylus position of head (17) is overlapped in the plane of delineation of CCD camera (14).Then, slide unit stepper motor (24) controls slide unit
Mobile sliding block (22) slowly vertical decline, until the contact pilotage of inductance sensor gauge head (17) is contacted with measured piece (12), and this
Carve inductance sensor gauge head (17) output is the signal in measuring range middle position.After measurement, X direction guiding rail stepper motor
(3) it shuts down with Y-direction guide rail stepper motor (7), then slide unit stepper motor (24) control slide unit mobile sliding block (22) rises
One fixed vertical range.
The X/Y is to stepper motor guide track system, and guide rail fixing seat I (4) is fixed by screws on bottom plate (1), X
Direction guiding rail sliding block (5) is solid relative to guide rail under the constraint of guide rail fixing seat I (4) and the control of X direction guiding rail stepper motor (3)
Reservation I (4) is moved forward and backward along the X direction.The movement synchronous drive of X direction guiding rail sliding block (5) the guide rail that is mounted thereon fix
The movement of seat II (8) and Y-direction guide rail sliding block (9).Constraint and Y-direction guide rail of the Y-direction guide rail sliding block (9) in guide rail fixing seat II (8)
Under the control of stepper motor (7), moved left and right along the Y direction relative to guide rail fixing seat II (8).In measurement process, X/Y
Detection path to stepper motor guide track system according to planning drives tested part (12) relative to inductance sensor gauge head (17)
Movement.
In the tested part mounting and clamping system, in order to avoid CCD camera (14) acquire in image process by measured piece
(12) influence of background locating for, black acrylic board (11) is fixed on X/Y by screw leads to the Y-direction of stepper motor guide track system
On rail sliding block (9).Meanwhile the center in order to mark acrylic board (11), two are processed in the upper surface of acrylic board (11)
I (13) of " cross " scribing line to intersect vertically.Tested part (12) is fixed on acrylic board (11) by double-sided adhesive, and the two is several
What center substantially overlaps.When utility model device is built, X direction guiding rail of the X/Y into stepper motor guide track system is controlled
Stepper motor (3) and Y-direction guide rail stepper motor (7) make " cross " of acrylic board (11) cross on I (13) and bottom plate (1)
II (6) of " cross " scribing line are substantially aligned.In view of the three-dimensional micro-morphology on multiple surfaces of tested part (12) may be measured
Feature, double-sided adhesive used needed for can provide while clinging power, should the surface geometry for not influencing tested part (12),
On the basis of the features such as physics, can relatively easily it be removed from acrylic board (11).Meanwhile on tested part (12) with
The be in contact remaining viscose glue on surface of double-sided adhesive can be easier to remove.
In the contact inductance sensor connection and position adjustment, inductance sensor gauge head (17) passes through spiral shell
Nail (16) is connected with inductance probe connector (18), and inductance probe connector (18) is fixed on contact tune by screw (25)
It saves on part (20), contact regulating part (20) is fixed on slide unit mobile sliding block (22) by screw (21).Contact regulating part
(20) through-hole of " keyway " shape is processed on, is adjusted to adjust contact when building device described in the utility model
The front and back relative position of part (20) and slide unit mobile sliding block (22), and adjustment inductance probe connector (18) and contact are adjusted
The left and right relative position of part (20).
In the CCD path planning and deviation-rectifying system, CCD camera (14) is fixed on bracket (15) by screw (27)
On, bracket (15) is fixed by screws on contact regulating part (20).Developing being capable of automatic path planning and progress path
The software of correction, the information such as shape, size of tested part (12) which can acquire according to CCD camera, is cooked up most
Excellent detection path.Fig. 5,6 give two common detection paths, are guaranteeing that sampled point covers the basis of entire measuring surface
On, the not repeated sampling in detection process has also been accomplished in the control easy to accomplish to measurement accuracy.Similar to the another of measuring route
A advantage is that of avoiding the case where contact pilotage of inductance sensor gauge head (17) collides with the edge of tested part (12), thus
Protective effect is played to the contact pilotage.Software is according to the detection path clustering X direction guiding rail stepper motor (3) and Y planned
Direction guiding rail stepper motor (7), to change the relative position of tested part (12) Yu inductance sensor gauge head (17) contact pilotage.It utilizes
Inductance sensor gauge head (17) measure corresponding points vertical height data, by the position coordinates of measured point on tested part (12) with
Measured vertical height data correspond, and the whole audience microscopic three-dimensional topographic data of tested surface can be obtained.It is measuring
In the process, if not according to the detection path detection of planning, software can be according to the image information that high frequency CCD camera (14) acquire certainly
It is dynamic to identify and carry out path correction in time.
Embodiment 2: non-contact measurement.
Compared with contact measuring apparatus above-mentioned is using inductance sensor gauge head (17), non-contact measurement apparatus is used
High-precision laser displacement sensor (28).
Laser displacement sensor (28) is connected by screw (29) with sensor connecting piece (30), sensor connecting piece
(30) be connected with sliding block (33) is moved horizontally by screw (31,32), move horizontally sliding block (33) pass through screw (45) with it is non-
Contact regulating part (34) is connected.The through-hole of " circular arc " shape, its adjustable phase are processed on sensor connecting piece (30)
For moving horizontally the angle of sliding block (33).Moving horizontally sliding block (33) can drive sensor connecting piece (30) to connect along non-
The through-hole groove of touch regulating part (34) moves left and right.
CCD camera (14) is connected by screw (40) with CCD connector (39), and CCD connector (39) passes through screw
(37,38) are connect with planar movement sliding block (36), and planar movement sliding block (36) passes through screw (35) and contactless regulating part
(34) it connects.By adjusting the relative position of planar movement sliding block (36) and contactless regulating part (34), thus it is possible to vary CCD
Position of the connector (39) on horizontal and vertical direction.The through-hole of " circular arc " shape is equally processed on CCD connector (39),
Angle of the adjustable CCD connector (39) relative to planar movement sliding block (36).On CCD connector (39) and CCD camera
(14) position connected processes " keyway " shape through-hole, the front-rear position of adjustable CCD camera (14).Such design is protected
It has demonstrate,proved equipment and has built and measure flexible regulation in debugging process, enabled whole system that its function and required is better achieved
Precision.
The build process of this non-contact measurement apparatus is similar with aforementioned contact formula device.Control X/Y is electric to stepping first
The movement of X direction guiding rail stepper motor (3) and Y-direction guide rail stepper motor (7) in machine guide track system, so that X/Y is led to stepper motor
Rail system returns to the initial position of movement, i.e. guide rail fixing seat I (4) is overlapped with the center of guide rail fixing seat II (8).Then
Adjust the rotation angle of sensor connecting piece (30), the left-right position for moving horizontally sliding block (33), slide unit stepper motor (24), non-
Front-rear position of the contact regulating part (34) relative to slide unit mobile sliding block (22), to change laser displacement sensor (28)
Tilt angle and left and right, upper and lower, front-rear position.Adjust the water of planar movement sliding block (36) relative to contactless regulating part (34)
Angle relative to planar movement sliding block (36) of flat and vertical position, adjustment CCD connector (39), adjustment CCD camera (14)
Relative to the front-rear position of CCD connector (39), to change tilt angle and the left and right, upper and lower, front and back of CCD camera (14)
Position.The result of adjustment is the laser projection of laser displacement sensor (28) transmitting to the geometric center position of tested part (12)
It sets, while the distance between laser reflection point of measured surface is sensed in laser displacement on laser emission point and tested part (12)
Near the midpoint of device measuring range, and the rule of the tilt angle Ying Qi operation instructions of laser displacement sensor (28)
Determine in angular range；It also needs to guarantee in entire measurement process, tested part (12) can completely be presented on CCD always and take the photograph
Within the scope of the picture of picture head (14), and make the measured surface of tested part (12) and the imaging of CCD camera (14) as far as possible
Angle between plane is small.Due to the angle, the picture of CCD camera (14) in non-contact measurement apparatus acquisition be not by
The true form for surveying part needs to carry out corresponding algorithm process to the image of acquisition.
Before measurement starts, CCD camera (14) acquires image, and software judges that laser displacement senses according to this image information
Whether the laser of device (28) is incident upon the geometric center position of tested part (12), if it does not meet the requirements, then passes through control X/Y
Into stepper motor guide track system, X direction guiding rail stepper motor (3) and Y-direction guide rail stepper motor (7) come so that laser displacement senses
The laser projection of device (28) is in the geometric center position of tested part (12).
For during non-contact measurement data acquisition and processing etc. processes all with contact type measurement mode above-mentioned
It is similar.
Examples detailed above is only to illustrate the technical ideas and features of the present invention, and its object is to allow be familiar with technique section
The content of the utility model can be understood and implement accordingly by grinding personnel and engineers and technicians, and it is practical new that this can not be limited with this
The protection scope of type.All equivalent changes or modifications made according to the spirit of the present invention should all cover in the utility model
Within protection scope.
Claims (6)
1. a kind of surface whole audience microscopic three-dimensional pattern automatic tester, it can be achieved that contact and non-contact measurement switching；It is main
It to be taken the photograph from bottom plate (1), X/Y to stepper motor guide track system, inductance sensor gauge head (17), laser displacement sensor (28), CCD
As head (14), stepper motor slide unit system, regulating part etc. form, it is characterised in that: the measurement module of contact type measurement system, by
Tested part (12) can be driven in the X/Y of XY in-plane moving to stepper motor guide track system and measurable tested part (12) surface
The inductance sensor gauge head (17) of a certain point height forms；The measurement module of contactless measuring system, by tested zero can be driven
Part (12) XY in-plane moving X/Y to a certain point height of stepper motor guide track system and measurable tested part (12) surface
Laser displacement sensor (28) composition.
2. a kind of surface whole audience microscopic three-dimensional pattern automatic tester according to claim 1, it is characterised in that: contacting
In formula and non-contacting measuring system, be equipped with for before detecting path planning and detection process in path correction CCD take the photograph
As head (14).
3. a kind of surface whole audience microscopic three-dimensional pattern automatic tester according to claim 1, it is characterised in that: described
X/Y includes that can control guide rail to the X direction guiding rail stepper motor (3) moved and to make guide rail along Y-direction along X to stepper motor guide track system
Mobile Y-direction guide rail stepper motor (7).
4. a kind of surface whole audience microscopic three-dimensional pattern automatic tester according to claim 1, it is characterised in that: contact
Measuring device in, the through-hole of four " keyway " types is provided on contact regulating part (20).
5. a kind of surface whole audience microscopic three-dimensional pattern automatic tester according to claim 1, it is characterised in that: non-contact
In the measuring device of formula, " circular arc " of adjustable angle has been processed on sensor connecting piece (30) and CCD connector (39)
Type through-hole moves horizontally sliding block (33) for adjusting the horizontal position of sensor connecting piece (30), contactless regulating part (34)
The position that is connected with planar movement sliding block (36) is combined using " well " font, on CCD connector (39) and CCD camera (14)
The position being connected has processed " kidney-shaped " hole, convenient for the adjusting of position each other.
6. a kind of surface whole audience microscopic three-dimensional pattern automatic tester according to claim 1, it is characterised in that: the quilt
It surveys part and is fixed on the black acrylic board (11) that can be reduced to CCD camera (14) generation interference by high-intensitive viscose glue
On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821817817.8U CN209147920U (en) | 2018-11-06 | 2018-11-06 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821817817.8U CN209147920U (en) | 2018-11-06 | 2018-11-06 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
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| Publication Number | Publication Date |
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| CN209147920U true CN209147920U (en) | 2019-07-23 |
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ID=67272560
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821817817.8U Active CN209147920U (en) | 2018-11-06 | 2018-11-06 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN112710272A (en) * | 2019-10-24 | 2021-04-27 | 复盛应用科技股份有限公司 | Golf club head measuring method |
-
2018
- 2018-11-06 CN CN201821817817.8U patent/CN209147920U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN112710272A (en) * | 2019-10-24 | 2021-04-27 | 复盛应用科技股份有限公司 | Golf club head measuring method |
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