CN109269393A - A kind of surface whole audience microscopic three-dimensional pattern automatic tester - Google Patents
A kind of surface whole audience microscopic three-dimensional pattern automatic tester Download PDFInfo
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- CN109269393A CN109269393A CN201811312838.9A CN201811312838A CN109269393A CN 109269393 A CN109269393 A CN 109269393A CN 201811312838 A CN201811312838 A CN 201811312838A CN 109269393 A CN109269393 A CN 109269393A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The method and device that a kind of pair of piece surface microscopic three-dimensional shape characteristic is measured and evaluated, is able to achieve the switching of contact and non-contact measurement, expands measurement range；It is formed from stepper motor slide unit, pedestal, X/Y to stepper motor guide rail, contact inductance sensor, laser displacement sensor, sensor connecting piece, CCD camera etc.；The CCD camera can be carried out the path planning before detection and the path correction in detection process；By changing position of the measured piece relative to the inductance sensor or laser displacement sensor to the control of stepper motor guide track system to the X/Y, according to the detection path detection of planning；The inductance sensor or laser displacement sensor export the vertical height data of measured point on measured piece when measurement, the position coordinates of measured point and the altitude information are corresponded, the three-dimensional appearance data on tested surface can be obtained, and then can get the surface characteristics parameters such as surface roughness, flatness.
Description
Technical field
The invention belongs to machine-building detection device field, it is related to the high-precision to piece surface whole audience microscopic three-dimensional pattern
It rebuilds, and in particular to a kind of measurement method of the surface characteristics parameter such as available Part Surface Roughness, flatness and realize dress
It sets.
Background technique
It is more next to the required precision and quality requirement of piece surface with modern society's Precision Machining and manufacturing development
It is higher.Therefore, can the three dimensional topography of piece surface be measured and be evaluated just seems of crucial importance.It is used at present
The measuring principle of surface profile measurement instrument can be divided into contact and contactless.The measurement method of Mechanical stylus formula is because of it
The continuous improvement of resolution ratio, wider measurement range, more application and higher economy and widely answered
With.The Diamond tip that one radius reaches micron dimension is vertically disposed in the surface of tested part and makees lateral shifting by it
Dynamic, contact pilotage makees vertical undulatory motion with the chamfered shape of measured surface, this micro-displacement is converted into electric signal and is put
Big and processing, this makes it possible to obtain surface roughness parameter values.But because its directly contacted in measurement process with measured piece and with
Generation relative motion, easily cause contact pilotage abrasion and measured piece surface generate scratch the case where.Meanwhile measurement process needs to spend
Take the more time.It can then accomplish non-destructive testing and faster inspection using the instrument of non-contact measurement Part Surface Roughness
Degree of testing the speed.But it is general at high price, and it waits more by force the zero of physical features to the high grade of transparency or surface reflectivity
Precision measured by part is limited.Therefore when actually detected, need the features such as the material according to part, size select contact or
The measuring instrument of non-contact principle.
Apparatus of the present invention can easily realize the switching of contact type measurement and non-contact measurement.Using high-precision
Contact inductance sensor gauge head or high-precision laser displacement sensor obtain the vertical height data on tested part.Pass through
Data acquisition and processing (DAP), the vertical height data one that the position coordinates of measured point on tested part and high-precision sensor are measured
One is mapped, and the three-dimensional appearance data on measured piece measured surface can be obtained.According to the higher evaluation of current frequency of use
Standard and method write the program for capableing of automatic screening and extraction data, are allowed to be automatically performed tested part surface roughness, put down
The evaluation of the characteristic parameters such as face degree.
Summary of the invention
Technical problem solved by the present invention is on the one hand, common surfagauge can only realize tested part
The single straight line on surface measures, to can not achieve the measurement and evaluation of piece surface whole audience three-dimensional micro-morphology feature；It is another
Aspect, it is contemplated that the part of the features such as different materials, size is needed using different methods, the present apparatus can be easily carried out
The switching of contact and contactless measurement.
In order to solve the above-mentioned technical problem, the present invention adopts the following technical scheme:
It is a kind of that contact or non-contact measurement and evaluation can be carried out to piece surface whole audience microscopic three-dimensional shape characteristic
Method and realization device, mainly from support system, stepper motor slide unit, X/Y to stepper motor guide track system, the dress of tested part
Clipping system, the connection of contact inductance sensor or laser displacement sensor and position adjustment, CCD path planning and correction
System.
In the support system, four Rubber shockproof foots pad are fixed by screws on the bottom surface of bottom plate.For the ease of
Apparatus of the present invention have processed two vertically in the position pair during building and parts fixation to be measured, in the upper surface of bottom plate
" cross " of intersection is carefully crossed, and intersection point characterizes X/Y to the center of stepper motor guide track system.
In the stepper motor slide unit, stepper motor controls the vertical lift of the mobile sliding block of slide unit by lead screw, into
And the components such as contact inductance sensor or laser displacement sensor, CCD camera is driven to do corresponding vertical displacement movement.
The X/Y is fixed by screws in the upper surface of bottom plate to stepper motor guide track system.To X, Y-direction two
The control of a stepper motor can be achieved to be fixed on movement of the part to be measured in X/Y plane in the system.
In the mounting and clamping system of the part to be measured, black acrylic board is fixed by screws in X/Y to stepper motor guide rail
In system.The upper surface of acrylic board processed two intersect vertically in careful scribing line, convenient for characterization X/Y indirectly to step
Into the initial origin position of motor slide rails system.Part to be measured is fixed on acrylic board by double-sided adhesive.
In the connection of the contact inductance sensor or laser displacement sensor and position adjustment, contact electricity
Sense transducer probe assembly or laser displacement sensor are fixed by screws on connector, and connector is fixed by screws in regulating part
On, regulating part is fixed by screws on the mobile sliding block of aforementioned slide unit.
In the CCD path planning and deviation-rectifying system, CCD camera is fixed by screws on connecting plate, connecting plate
It is fixed by screws on regulating part.Before measurement, CCD camera acquires the surface shape and dimension information of part to be measured, intelligence
Software is with detecting path according to the information planning.For be likely to occur in detection process not according to the detection path of planning into
Row detection situations such as, intelligence software can according to CCD camera high-frequency acquire image information automatic identification and carry out in time
Detect the correction in path.
Present invention has an advantage that the switching of contact and contact type measurement can be easy to realize, therefore measure model
It encloses wide.It is obtained on tested part using high-precision contact inductance sensor gauge head or high-precision laser displacement sensor
Vertical height data.By data acquisition and processing (DAP), the position coordinates of measured point on tested part and high-precision sensor are surveyed
The vertical height data obtained correspond, to obtain the microscopic three-dimensional topographic data on tested part surface.Lead to again
Corresponding program processing is crossed, the evaluation of the characteristic parameters such as Part Surface Roughness, flatness can be completed.Whole device, which has, to be surveyed
The advantages that accuracy of measurement is high, compact-sized, manufacturing process is simple, applied widely, high degree of automation, and cost is relatively low.
Detailed description of the invention
Fig. 1 is the axonometric drawing of contact measuring apparatus of the invention
Fig. 2 is contact type measurement joint detail figure of the invention
Fig. 3 is the axonometric drawing of non-contact measurement apparatus of the invention
Fig. 4 is non-contact measurement joint detail figure of the invention
Fig. 5 is detection path example of the invention
Fig. 6 is hardware system structure figure of the invention
Fig. 7 is the preparation process before contact type measurement of the invention starts
Fig. 8 is contact type measurement process of the invention
Fig. 9 is the preparation process before non-contact measurement of the invention starts
Figure 10 is non-contact measurement process of the invention
Specific embodiment
Below in conjunction with attached drawing, invention is further explained:
Referring to Fig.1-5, a kind of to carry out contact or contactless survey to piece surface whole audience microscopic three-dimensional shape characteristic
The method and realization device of amount and evaluation.Mainly from support system, stepper motor slide unit, X/Y to stepper motor guide track system, quilt
Survey connection and the position adjustment, the path CCD of the mounting and clamping system, contact inductance sensor or laser displacement sensor of part
Planning and deviation-rectifying system.
Embodiment 1: contact type measurement.
In the support system, four rubber mats (2) are fixed by screws on the bottom surface of bottom plate (1), bottom plate (1)
Upper surface process location hole, be fixed on the upper table of bottom plate (1) for slid platform base (19) and guide rail fixing seat I (4) will to be connect
Face.Two thin scribing line to intersect vertically are processed in the upper surface of bottom plate (1) simultaneously, convenient for demarcating X/Y to stepper motor guide rail
The center of system.
In the stepper motor slide unit, slid platform base (19) is fixed by screws on bottom plate (1), slide unit stepper motor
(24) vertical displacement movement of slide unit mobile sliding block (22) is controlled.In view of the guarantor to contact inductance sensor gauge head (17)
Shield, proposes higher requirement to the minimum stable engine speed of slide unit stepper motor (24).Before measurement, slide unit mobile sliding block (22) exists
Vertically decline under the control of slide unit stepper motor (24), so that inductance sensor gauge head (17) contact pilotage be driven to be lowered vertically into and quilt
Survey the position that part (12) keep closer distance.CCD camera (14) acquires image, after software is handled, controls X direction guiding rail
The movement of stepper motor (3) and Y-direction guide rail stepper motor (7), so that the center of tested part (12) and inductance sensor gauge head
(17) stylus position is overlapped in the plane of delineation of CCD camera (14).Then, slide unit stepper motor (24) control slide unit moves
Movable slider (22) slowly vertical decline, until the contact pilotage of inductance sensor gauge head (17) is contacted with measured piece (12), and this moment
What inductance sensor gauge head (17) exported is the signal in measuring range middle position.After measurement, X direction guiding rail stepper motor
(3) it shuts down with Y-direction guide rail stepper motor (7), then slide unit stepper motor (24) control slide unit mobile sliding block (22) rises
One fixed vertical range.
To stepper motor guide track system, guide rail fixing seat I (4) is fixed by screws on bottom plate (1) X/Y, X to
Guide rail slide block (5) is fixed under the constraint of guide rail fixing seat I (4) and the control of X direction guiding rail stepper motor (3) relative to guide rail
I (4) of seat are moved forward and backward along the X direction.The movement synchronous drive of X direction guiding rail sliding block (5) the guide rail fixing seat being mounted thereon
The movement of II (8) and Y-direction guide rail sliding block (9).Y-direction guide rail sliding block (9) is walked in the constraint of guide rail fixing seat II (8) and Y-direction guide rail
Into under the control of motor (7), moved left and right along the Y direction relative to guide rail fixing seat II (8).In measurement process, X/Y is to step
Detection path into motor slide rails system according to planning drives tested part (12) to move relative to inductance sensor gauge head (17).
In the tested part mounting and clamping system, in order to avoid CCD camera (14) acquire in image process by measured piece
(12) influence of background locating for, black acrylic board (11) is fixed on X/Y by screw leads to the Y-direction of stepper motor guide track system
On rail sliding block (9).Meanwhile the center in order to mark acrylic board (11), two are processed in the upper surface of acrylic board (11)
" cross " scribing line (13) to intersect vertically.Tested part (12) is fixed on acrylic board (11) by double-sided adhesive, and the two is several
What center substantially overlaps.When apparatus of the present invention are built, X direction guiding rail stepping of the X/Y into stepper motor guide track system is controlled
Motor (3) and Y-direction guide rail stepper motor (7), " cross " for making " cross " of acrylic board (11) to cross on (13) and bottom plate (1)
Scribing line (6) is substantially aligned.It is used in view of the three-dimensional micro-morphology feature on multiple surfaces of tested part (12) may be measured
Double-sided adhesive needed for can provide while clinging power, should be in spies such as surface geometry, the physics for not influencing tested part (12)
On the basis of sign, can relatively easily it be removed from acrylic board (11).Meanwhile on tested part (12) with double-sided adhesive phase
The remaining viscose glue of contact surface can be easier to remove.
In the contact inductance sensor connection and position adjustment, inductance sensor gauge head (17) passes through screw
(16) it is connected with inductance probe connector (18), inductance probe connector (18) is fixed on contact adjusting by screw (25)
On part (20), contact regulating part (20) is fixed on slide unit mobile sliding block (22) by screw (21).Contact regulating part
(20) through-hole of " keyway " shape is processed on, so that contact regulating part can be adjusted when building device of the present invention
(20) the front and back relative position of sliding block (22), and adjustment inductance probe connector (18) and contact regulating part are moved with slide unit
(20) left and right relative position.
In the CCD path planning and deviation-rectifying system, CCD camera (14) is fixed on bracket (15) by screw (27)
On, bracket (15) is fixed by screws on contact regulating part (20).Developing being capable of automatic path planning and progress path
The software of correction, the information such as shape, size of tested part (12) which can acquire according to CCD camera, is cooked up most
Excellent detection path.Fig. 5 gives two common detection paths, is guaranteeing that sampled point covers the basis of entire measuring surface
On, the not repeated sampling in detection process has also been accomplished in the control easy to accomplish to measurement accuracy.Similar to the another of measuring route
A advantage is that of avoiding the case where contact pilotage of inductance sensor gauge head (17) collides with the edge of tested part (12), thus
Protective effect is played to the contact pilotage.Software is according to the detection path clustering X direction guiding rail stepper motor (3) and Y planned
Direction guiding rail stepper motor (7), to change the relative position of tested part (12) Yu inductance sensor gauge head (17) contact pilotage.It utilizes
Inductance sensor gauge head (17) measure corresponding points vertical height data, by the position coordinates of measured point on tested part (12) with
Measured vertical height data correspond, and the whole audience microscopic three-dimensional topographic data of tested surface can be obtained.It is measuring
In the process, if not according to the detection path detection of planning, software can be according to the image information that high frequency CCD camera (14) acquire certainly
It is dynamic to identify and carry out path correction in time.
Embodiment 2: non-contact measurement.
Compared with contact measuring apparatus above-mentioned is using inductance sensor gauge head (17), non-contact measurement apparatus is used
High-precision laser displacement sensor (28).
Laser displacement sensor (28) is connected by screw (29) with sensor connecting piece (30), sensor connecting piece
(30) be connected with sliding block (33) is moved horizontally by screw (31,32), move horizontally sliding block (33) pass through screw (45) with it is non-
Contact regulating part (34) is connected.The through-hole of " circular arc " shape, its adjustable phase are processed on sensor connecting piece (30)
For moving horizontally the angle of sliding block (33).Moving horizontally sliding block (33) can drive sensor connecting piece (30) along non-contact
The through-hole groove of formula regulating part (34) moves left and right.
CCD camera (41) is connected by screw (40) with CCD connector (39), and CCD connector (39) passes through screw
(37,38) are connect with planar movement sliding block (36), and planar movement sliding block (36) passes through screw (35) and contactless regulating part
(34) it connects.By adjusting the relative position of planar movement sliding block (36) and contactless regulating part (34), thus it is possible to vary CCD connects
Position of the fitting (39) on horizontal and vertical direction.The through-hole that " circular arc " shape is equally processed on CCD connector (39), can
To adjust angle of the CCD connector (39) relative to planar movement sliding block (36).On CCD connector (39) and CCD camera
(41) position connected processes " keyway " shape through-hole, the front-rear position of adjustable CCD camera (41).Such design is protected
It has demonstrate,proved equipment and has built and measure flexible regulation in debugging process, enabled whole system that its function and required is better achieved
Precision.
The build process of this non-contact measurement apparatus is similar with aforementioned contact formula device.Control X/Y is electric to stepping first
The movement of X direction guiding rail stepper motor (3) and Y-direction guide rail stepper motor (7) in machine guide track system, so that X/Y is led to stepper motor
Rail system returns to the initial position of movement, i.e. guide rail fixing seat I (4) is overlapped with the center of guide rail fixing seat II (8).Then
Adjust the rotation angle of sensor connecting piece (30), the left-right position for moving horizontally sliding block (33), slide unit stepper motor (24), non-
Front-rear position of the contact regulating part (34) relative to slide unit mobile sliding block (22), to change inclining for laser displacement sensor (28)
Rake angle and left and right, upper and lower, front-rear position.Adjust the level of planar movement sliding block (36) relative to contactless regulating part (34)
And angle, adjustment CCD camera (41) phase of vertical position, adjustment CCD connector (39) relative to planar movement sliding block (36)
For the front-rear position of CCD connector (39), to change tilt angle and the left and right, upper and lower, anteroposterior position of CCD camera (41)
It sets.The result of adjustment is the laser projection of laser displacement sensor (28) transmitting to the geometric center position of tested part (12),
The distance between laser emission point and the laser reflection point of measured surface on tested part (12) are in laser displacement sensor simultaneously
Near the midpoint of measuring range, and the tilt angle of laser displacement sensor (28) should be in the regulation of its operation instructions
In angular range；It also needs to guarantee in entire measurement process, tested part (12) can completely be presented on CCD camera always
(41) within the scope of picture, and make the measured surface of tested part (12) and the imaging plane of CCD camera (41) as far as possible
Between angle it is small.Due to the angle, the picture of CCD camera (41) acquisition in non-contact measurement apparatus is not measured piece
True form, need to carry out corresponding algorithm process to the image of acquisition.
Before measurement starts, CCD camera (41) acquires image, and software judges that laser displacement senses according to this image information
Whether the laser of device (28) is incident upon the geometric center position of tested part (12), if it does not meet the requirements, then passes through control X/Y
Into stepper motor guide track system, X direction guiding rail stepper motor (3) and Y-direction guide rail stepper motor (7) come so that laser displacement senses
The laser projection of device (28) is in the geometric center position of tested part (12).
For during non-contact measurement data acquisition and processing etc. processes all with contact type measurement mode above-mentioned
It is similar.
The foregoing examples are merely illustrative of the technical concept and features of the invention, its object is to allow be familiar with technique scientific research people
Member and engineers and technicians can understand the contents of the present invention and implement accordingly, and protection model of the invention can not be limited with this
It encloses.Equivalent change or modification made by all spirit according to the present invention, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of device for measuring and evaluating for tested part surface microscopic three dimensional topography is, it can be achieved that contact and non-connect
The switching of touch measurement；Mainly from bottom plate (1), X/Y to stepper motor guide track system, inductance sensor gauge head (17), laser position
The composition such as displacement sensor (28), CCD camera (14), stepper motor slide unit system, regulating part, it is characterised in that: contact is surveyed
In amount, X/Y drives the measured piece relative to the inductance sensor gauge head according to planning to stepper motor guide track system
Detect path movement；In non-contact measurement, X/Y drives the measured piece to swash relative to described to stepper motor guide track system
Optical displacement sensor is moved according to the detection path of planning, and intelligence software exports the inductance sensor or displacement sensor
The measured piece on the position coordinates of vertical height data and the measured point of measured point correspond, to obtain
The three-dimensional appearance data of measured surface on the measured piece.
2. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: apparatus of the present invention can be easily carried out the switching of the contact and non-contact measurement mode, increase
Measurement range is added, when switching need to only change the sensor type and the sensor connecting piece, the CCD are imaged
The connector etc. of head (14).
3. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: the three-dimensional appearance data of measured surface on the measured piece of acquisition, software is to the three-dimensional appearance number
According to extracting and handling, the characteristic parameters such as surface roughness, the flatness on the measured surface can be then obtained.
4. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
Set, it is characterised in that: in contact and non-cpntact measurement, CCD camera (14) be used for measure before detection path planning and
Detection path correction in measurement process.
5. according to claim 1 or one kind described in 3 is measured and is evaluated for tested part surface microscopic three dimensional topography
Device, it is characterised in that: the contact pilotage of the contact inductance sensor gauge head is made vertical with the chamfered shape of measured surface
This micro-displacement is converted into electric signal and is amplified and handled, the vertical of the measured point can be obtained by undulatory motion
Altitude information；The vertical height data of each measured point and the position coordinates of the measured point are corresponded
Obtain the three-dimensional appearance data of measured surface on the tested part.
6. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: the vertical fluctuating on the measured surface is converted into electric signal and added by the laser displacement sensor
To amplify and handle, the vertical height data of the measured point can be obtained；By the vertical height data of each measured point
It corresponds with the position coordinates of the measured point, the three-dimensional appearance number of measured surface on the tested part can be obtained
According to.
7. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: in contact type measurement, before measurement starts, slide unit stepper motor (24) controls inductance sensor gauge head (17)
Drop to the position apart from the measured piece certain altitude, system controls X/Y according to the image information of CCD camera (14) acquisition
The movement of X direction guiding rail stepper motor (3) and Y-direction guide rail stepper motor (7) into stepper motor guide track system, so that the quilt
The stylus position of the geometric center position and inductance sensor gauge head (17) of surveying part is flat in the image of the CCD camera (14)
It is overlapped in face；Then under the control of slide unit stepper motor (24), quilt described in the stylus contact of inductance sensor gauge head (17)
Part is surveyed, and inductance sensor gauge head (17) output at this time is the signal in its measuring range middle position, at this time slide unit stepping
Motor (24) shuts down, and measurement process starts.
8. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: in the measuring device of contact, the logical of four " keyway " types has been processed on contact regulating part (20)
Hole, position adjustment of such design convenient for apparatus of the present invention in build process.
9. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: in contactless measuring device, processed on sensor connecting piece (30) and CCD connector (39)
The combination of the through-hole and " circular arc " type through-hole of adjustable respective angle moves horizontally sliding block (33) for adjusting sensor connection
The horizontal position of part (30), the position that contactless regulating part (34) is connected with planar movement sliding block (36) use " well " font
It combines, the level and vertical position of such adjustable CCD connector (39) of design, is imaged on CCD connector (39) with CCD
The position that head (41) is connected has processed the through-hole of " keyway " type, is conveniently adjusted the front-rear position of CCD camera (41).
10. a kind of dress for measuring and evaluating for tested part surface microscopic three dimensional topography according to claim 1
It sets, it is characterised in that: the measured piece is placed on black acrylic board, and the background for avoiding the measured piece from placing takes the photograph CCD
Interference is generated when acquiring and handle information as head.
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| CN201811312838.9A CN109269393A (en) | 2018-11-06 | 2018-11-06 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
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| CN201811312838.9A CN109269393A (en) | 2018-11-06 | 2018-11-06 | A kind of surface whole audience microscopic three-dimensional pattern automatic tester |
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| CN110220483A (en) * | 2019-06-28 | 2019-09-10 | 江苏省百斯特检测技术有限公司 | Three axial plane degree detection systems of one kind and its detection method |
| CN110258665A (en) * | 2019-06-24 | 2019-09-20 | 大成科创基础建设股份有限公司 | It is a kind of to prevent superfilled detection device for novel stake top |
| CN110285751A (en) * | 2019-05-28 | 2019-09-27 | 中国北方车辆研究所 | Automate ring shaped multi-tooth component bottom of the tooth axial surface roughness measuring instrument |
| CN110726359A (en) * | 2019-11-29 | 2020-01-24 | 吉林大学 | Three-dimensional surface profile tracking measurement precision adjustment and acquisition device |
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| CN112616032A (en) * | 2020-12-10 | 2021-04-06 | 重庆市新众誉科技有限公司 | CCD sensor using analog quantity output |
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