CN108225213A - The non-contact dimensionality reduction error separate detection method of free form surface and device - Google Patents
The non-contact dimensionality reduction error separate detection method of free form surface and device Download PDFInfo
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- CN108225213A CN108225213A CN201810054768.5A CN201810054768A CN108225213A CN 108225213 A CN108225213 A CN 108225213A CN 201810054768 A CN201810054768 A CN 201810054768A CN 108225213 A CN108225213 A CN 108225213A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention belongs to optical precision detection technique fields, are related to the non-contact dimensionality reduction error separate detection method of free form surface and device, and the nano-precision available for Free-form Surface Parts pattern detects.This method, as reference mirror, reduces X to the influence detected with Y-direction air-float guide rail straightness to free form surface surface profile high-precision, so as to reduce the 21 of three coordinate measuring machine errors using high precision plane optical flat；Using contactless elevation carrection sensor, the elevation information of Quick Acquisition free form surface surface profile.Using the method for the tested Free-form Surface Parts posture of spherical surface air-flotation workbench adjustment with three-point support structure, by adjusting Free-form Surface Parts posture, the inclination angle detection range of Free-form Surface Parts profile is improved.The device includes：Active air supporting shock insulation spring, air supporting vibration isolation pedestal, X to air-float guide rail, Y-direction air-float guide rail, portal frame, contactless elevation carrection sensor, laser interferometer displacement measure microscope group, Z-direction air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer.
Description
Technical field
The invention belongs to optical precision detection technique fields, are related to a kind of free form surface high-precision detecting method and device,
Nano-precision detection available for free form surface in precision optical system.
Technical background
Free form surface element has maximum surface topography degree of freedom, easily eliminates aberration in imaging systems, and having improves
Optical system imaging quality, improve resolution capability, increase operating distance, simplify apparatus structure, reduce equipment instrument and weight and
The advantages that improving reliability can significantly improve the image quality for measuring optical system, resolving power, improve weaponry performance；
With freeform optics system come instead of the past optical system being made of plane, spherical mirror, coaxial quadratic surface mirror etc. come
The problems such as improving image quality, reducing system bulk and weight, and then solve imaging precision, portability and reliability has become
The important trend of optical system development.
But free form surface proposes higher want while design freedom is increased to design, processing and detection
It asks, as optics CAD and numerical control diamond point processing technology are succeeded application in optical design and fabrication, free form surface
Design has no longer been major technical barrier with processing, but measurement problem has become the problem urgently researched and solved.Diamond
Point processing technology depends primarily on the machining accuracy of free-curved-surface shape the accuracy of measurement of each point space coordinate in the shape of opposite,
Therefore whether component side shape can meet design requirement and have to pass through high-precision detection technique to ensure.
It can be mainly divided into light field image mensuration, chromatography in the surface profile measurement method of free form surface in the world at present
Scanning probe method and probe 3-D scanning probe method three categories.Image detection method measurement process is surveyed without being scanned to sample
Amount speed is fast, but it can not adapt to the free form surface high-acruracy survey of arbitrary angle variation, while is vulnerable to sample surfaces reflection
The property differences such as rate, roughness influence.Computed tomography scanning method principle is simple, but size to tested part and material have a fixed limit
System is more demanding to running environment, and existing Instrument measuring precision is 1~10mm, and measurement accuracy is relatively low.Probe three-dimensional scanning measurement
Method positions tested free form surface sample surfaces using probe point by point, reconstructs to obtain by the coordinate for measuring each location point
Sample surface morphology usually drives probe or sample to be detected by coordinate measuring machine, and this method is measured due to having at present
Precision is high, and the advantages such as applied widely are increasingly becoming the mainstream technology of free-float space robot.
Traditional probe three-dimensional scanning measurement method includes：Resolution method, time-of-flight method and confocal positioning mode.Clarity
Method judges the image quality of optical system using digital image processing techniques, finds imaging and the most clearly puts as fixed
Burnt position, but it is diffraction limited fairly obvious, and aiming positioning sensitivity is relatively low, and precision is floated between 1%~2%, positioning accurate
Degree is only micron dimension.Time-of-flight method measuring principle is simple, does not need to image procossing, but resolution ratio is relatively low, and measurement accuracy is about
For 20~50mm, it is not suitable in accurate measurement environment.The sensitivity of interference technique is very high, and the theoretical limit of axially position can
Reach 1nm, but harshness is required to measuring environment, and easily by the property differences shadow such as the inclination angle of sample surfaces, roughness
It rings, practical engineering application is by larger limitation.Confocal method Focus accuracy is higher, and environment resistant interference performance is strong, and to sample table
Face attribute difference influences have certain rejection ability, and axially position resolving power can reach 200nm.
In conclusion measurement accuracy deficiency is primarily present in existing measuring method, it is impossible to overcome sample surfaces roughness, rise
The influence of the property differences such as volt, inclination angle is the main bottleneck of current restraint of liberty curved surface profile measurement precision.Based on above-mentioned feelings
Condition, the present invention by the use of high precision plane optical flat as the reference datum of X-Y plane, by laser interferometer monitoring and compensation X to
With the straightness error of Y-direction air-float guide rail, the free form surface height measured to the non-contact elevation carrection sensor of high-precision carries out
Dimensionality reduction error separate detects so as to fulfill the nano-precision of free form surface.
The core concept of patent of the present invention is the reference datum by the use of high precision plane optical flat as X-Y plane, by swashing
Optical interferometer monitors and compensation X is to the straightness error with Y-direction air-float guide rail, realizes the dimensionality reduction error of free form surface contact measurement
Separation, macro-micro- across scale nanometer precision unperturbed driving and localization method with reference to residual air recovery type air-float guide rail, are free form surface
Detection provides the positioning of high accuracy three-dimensional straight line and scanning survey means, is worked using the spherical surface air supporting with three-point support structure
The method of the tested Free-form Surface Parts posture of platform adjustment, by adjusting Free-form Surface Parts posture, improves the inclination angle of free form surface
Detection range can carry out quick nanometer accuracy measurement to the free form surface with fine structure.
Invention content
The purpose of the invention is to improve the precision and efficiency of detecting of free form surface, overcome the deficiencies in the prior art carries
Go out a kind of free form surface nano-precision detection method and its device.
Residual air recovery type air-float guide rail, macro-micro- across scale nanometer precise movements error solution the present invention is based on our inventions
Coupling unperturbed drives realizes nano-precision 3-D scanning and positioning with localization method；A wide range of tune based on aerostatic bearing technology
Incline aligning technology, realize free form surface sample pose adjustment, improve measurement range；It is carried out in Z-direction using high precision plane optical flat
Nano-precision laser interferometer displacement measures, and reduces X to the influence measured with Y-direction air-float guide rail straightness Free-Form Surface Profile,
Realize the nano-precision detection of free form surface.
The purpose of the present invention is what is be achieved through the following technical solutions.
The free form surface nano-precision detection method of the present invention, includes the following steps：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture and refers to optical flat posture
In adjusting apparatus, by the distance between laser interferometer measurement laser interferometry microscope group and high precision plane optical flat, adjustment is certainly
By curved surface sample device for adjusting posture and the posture with reference to optical flat device for adjusting posture, ensure vertical with Z-direction air-float guide rail；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions and with reference on optical flat device for adjusting posture, using Z-direction air-float guide rail drive contactless elevation carrection sensor and
Laser interferometer displacement measures microscope group and is moved along Z-direction, obtains the Z-direction apparent height of tested free form surface sample profile and inclination angle letter
Breath；
Step 3：Using X to air-float guide rail, air supporting guide sleeve is made equidistantly to move in X direction, each measurement point is repeated to walk
Rapid two, if certain point Free-Form Surface Profile slope is larger, can ensure freely by adjusting free form surface sample device for adjusting posture
The inclination angle at any point be in the range of it can survey on curved surface sample, realize the X of free form surface sample profile to Scanning Detction；
Step 4：A free form surface sample profile X is often completed to Scanning Detction, using Y-direction air-float guide rail, along Y-direction etc.
Spacing shifting moves a step, and repeats step 3, realizes the Y-direction Scanning Detction of free form surface sample profile；
Step 5：Tested free form surface sample carry out X to straight-line motion accuracy during Y-direction Scanning Detction by laser interference
The displacement data that instrument measurement obtains compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,Dij(x,y,z),…,DMN(x, y, z) } fitting, the integral face type profile of tested free form surface sample is obtained, is solved certainly
By the characterization multinomial of curved surface profile, the nano-precision detection of free form surface is realized.
The free form surface nano-precision detection device of the present invention, including：Active air supporting shock insulation spring, air supporting vibration isolation pedestal, X
Microscope group, Y-direction air-float guide rail, Z-direction are measured to air-float guide rail, portal frame, contactless elevation carrection sensor, laser interferometer displacement
Air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer；
The present invention uses the profile measurement mode of gantry structure three coordinate measuring machine, wherein, air supporting vibration isolation pedestal is mounted on
On active air supporting shock insulation spring, vibration isolation is played the role of by active air supporting vibration isolation spring；X is fixedly mounted on to air-float guide rail
On air supporting vibration isolation pedestal, X is equipped with air supporting guide sleeve on air-float guide rail, and will be based on three-point support structure and design free form surface sample
Product device for adjusting posture and reference optical flat device for adjusting posture are installed in parallel on air supporting guide sleeve；Non-contact elevation carrection sensor
Microscope group is measured with laser interferometer displacement to be installed in parallel on Z-direction air-float guide rail, Z-direction air-float guide rail is mounted on Y-direction air-float guide rail, Y
It is separately mounted on portal frame to air-float guide rail and laser interferometer, portal frame is fixedly mounted on air supporting shock insulation pedestal.
Advantageous effect
Present invention comparison prior art has following remarkable advantage：
1) using high precision plane optical flat as the 3 D Measurement of Free Form Surface method of X-Y reference data planes, substantially subtract
Small X, Y-direction guide rail straightness error measure free form surface Z-direction the influence of sensitive direction, can be by free form surface sample profile
Scanning Detction precision is increased to 100nm；
2) the spherical surface air supporting free form surface sample device for adjusting posture based on three-point support structure design, passes through piezoelectric ceramics
The posture of tested free form surface sample can be adjusted, the inclination angle of tested free form surface sample profile non-contact measurement can be surveyed
Range is measured to improve to 45 ° from 15 °；
3) the 3-D scanning driving localization method of the nano-precision based on kinematic error decoupling unperturbed actuation techniques scheme can
Nanoscale feeding resolution ratio and positioning is realized in the moving range more than 100mm, can improve free form surface sample carry out X to
With precision during Y-direction Scanning Detction, X, Y-direction positions and dimensions measurement accuracy is made to be improved from 2 μm to 0.6 μm.
Description of the drawings
Fig. 1 is free form surface nano-precision detection device of the present invention and method schematic diagram；
Fig. 2 is that surface sweeping detects path signal in the X-Y plane of free form surface nano-precision detection device of the present invention and method
Figure；
Fig. 3 shows for free form surface sample device for adjusting posture in free form surface nano-precision detection device of the present invention and method
It is intended to；
Figure label, 1- active air supporting vibration isolations spring, 2- air-float guide rails, 3- are snakelike to drive X to air-float guide rail, 4- gantry
The non-contact elevation carrection sensor of frame, 5-, 6- measure laser interferometry microscope group, 7-Y to air-float guide rail, 8-Z to air-float guide rail,
9- samples device for adjusting posture, 10- are with reference to optical flat device for adjusting posture, 11- laser interferometer, 12- measurement points, 13- supporting points.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
The free form surface nanometer accuracy measurement method of the present invention drives non-contact elevation carrection to pass including Z-direction air-float guide rail
Sensor and laser interferometer displacement measure microscope group movement, and laser interferometer displacement, which measures microscope group movement, can make to be placed on reference to optical flat posture
The displacement measurement of high precision plane optical flat in adjusting apparatus changes, using high precision plane optical flat as Z-direction laser
Interference displacement measuring basis speculum by handling the displacement measurement of laser interferometer, reduces X to air-float guide rail and Y-direction
Influence of the air-float guide rail straightness to free form surface sensitive measurement Z-direction detects so as to fulfill the nano-precision of free form surface；Its
It is secondary, free form surface sample device for adjusting posture is driven to air-float guide rail using X and moved with reference to optical flat device for adjusting posture, realize
Free form surface sample X drives Z-direction air-float guide rail to be moved along Y-direction, realizes free form surface to scanning survey using Y-direction air-float guide rail 7
The surface sweeping of sample Y-direction measures；Finally, according to several free form surface sample surface profiles data measured, reverse modeling, fitting are carried out
Go out tested free form surface sample surface profiles, realize the nano-precision detection of tested free form surface.
According to the non-contact dimensionality reduction error separate detection method of free form surface, patent of the present invention is constructed using Spectral Confocal position
The non-contact dimensionality reduction error separate detection device of free form surface of measurement sensor.
Embodiment 1
As shown in Figure 1, the inventive system comprises：Active air supporting shock insulation spring, air supporting vibration isolation pedestal, X to air-float guide rail,
Portal frame, Spectral Confocal distance measurement sensor, laser interferometer displacement measure microscope group, Y-direction air-float guide rail, Z-direction air-float guide rail, from
By curved surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer；
Free form surface nano-precision detection method, detecting step are as follows：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture 9 and refers to optical flat appearance
In state adjusting apparatus 10, the distance between laser interferometry microscope group 6 and high precision plane optical flat is measured by laser interferometer 11,
Free form surface sample device for adjusting posture 9 and the posture with reference to optical flat device for adjusting posture 10 are adjusted, is ensured and Z-direction air-float guide rail
8 is vertical；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions 9 and with reference on optical flat device for adjusting posture 10, Spectral Confocal range measurement is driven to sense using Z-direction air-float guide rail 8
Device 5 and laser interferometer displacement measure microscope group 6 and are moved along Z-direction, obtain the Z-direction apparent height of tested free form surface sample profile and incline
Angle information；
Step 3：As shown in Fig. 2, along snakelike driving X to air-float guide rail 3 and Y-direction air-float guide rail 7, to each measurement point 12
Step 2 is repeated, the apparent height of each measurement point 12 is acquired and obliquity information realizes that the X-Y of free form surface sample profile is put down
Surface scan detects；
Step 4：Tested free form surface sample carry out X to straight-line motion accuracy during Y-direction Scanning Detction by laser interference
Instrument 11 measures obtained displacement data and compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } data fitting, obtain the integral face of tested free form surface sample
Type profile solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of free form surface.
The specific embodiment of the present invention is described, but these explanations cannot be understood to limit above in association with attached drawing
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (8)
1. the non-contact dimensionality reduction error separate detection method of free form surface, it is characterised in that include the following steps：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture (9) and refers to optical flat posture
In adjusting apparatus (10), measured between laser interferometry microscope group (6) and high precision plane optical flat by laser interferometer (11)
Distance, adjustment free form surface sample device for adjusting posture (9) and the posture with reference to optical flat device for adjusting posture (10), guarantee and Z
It is vertical to air-float guide rail (8)；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample pose adjustment dress
It puts on (9) and with reference on optical flat device for adjusting posture (10), non-contact elevation carrection is driven to sense using Z-direction air-float guide rail (8)
Device (5) and laser interferometer displacement measure microscope group (6) and are moved along Z-direction, obtain the Z-direction apparent height of tested free form surface sample profile
And obliquity information；
Step 3：When tested free form surface sample surfaces inclination angle is larger, the inclination angle more than non-contact elevation carrection sensor (5) is surveyed
When measuring range, pose discrimination is carried out by longitudinal minimum area method, using the piezoelectric ceramics positioned at supporting point (13), adjusts spherical surface
The posture of air-flotation workbench, makes the inclination angle of tested free form surface sample in the range of system can be surveyed, and X is driven to gas along serpentine path
Floating guide rail (3) and Y-direction air-float guide rail (7) repeat step 2 to each measurement point (12), acquire the table of each measurement point (12)
Face height and obliquity information realize the X-Y plane Scanning Detction of free form surface sample profile；
Step 4：Tested free form surface sample carry out X to straight-line motion accuracy during Y-direction Scanning Detction by laser interferometer
(11) it measures obtained displacement data to compensate, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of free form surface pattern.
2. the non-contact dimensionality reduction error separate detection method of free form surface according to right 1, it is characterised in that：Use high-precision
Reference datum of the plane-parallel crystal as X-Y plane by laser interferometer (11) monitors and compensates X to air-float guide rail (3) and Y-direction
The straightness error of air-float guide rail (7) detaches free form surface pattern error dimensionality reduction, realizes the nano-precision of free form surface pattern
Detection.
3. the non-contact dimensionality reduction error separate detection method of free form surface according to claim 1, it is characterised in that：Using receiving
Meter Jing Du elevation carrection sensors by dimensionality reduction error separating method, are realized the nano-precision detection of free form surface pattern, are improved
Free-float space robot efficiency, and the free form surface with fine structure is quickly measured.
4. the non-contact dimensionality reduction error separate detection method of free form surface according to claim 1, which is characterized in that based on three
The spherical surface air supporting free form surface sample device for adjusting posture (9) of point support structure designs is adjusted tested free by piezoelectric ceramics
The posture of curved surface sample improves the measurement range of tested free form surface sample profile.
5. the non-contact dimensionality reduction error separate detection device of free form surface, using the profile measurement side of gantry structure three coordinate measuring machine
Formula, it is characterised in that including：Active air supporting shock insulation spring (1), air supporting vibration isolation pedestal (2), X are to air-float guide rail (3), portal frame
(4), non-contact elevation carrection sensor (5), laser interferometer displacement measurement microscope group (6), Y-direction air-float guide rail (7), Z-direction air supporting are led
Rail (8), free form surface sample device for adjusting posture (9), with reference to optical flat device for adjusting posture (10), laser interferometer (11)；Its
In, air supporting vibration isolation pedestal (2) plays vibration isolation on active air supporting shock insulation spring (1), by active air supporting vibration isolation spring (1)
Effect；X is fixedly mounted on to air-float guide rail (3) on air supporting vibration isolation pedestal (2), X is equipped with air supporting on air-float guide rail (3)
Guide sleeve, and three-point support structure design free form surface sample device for adjusting posture (8) will be based on and filled with reference to optical flat pose adjustment
(9) are put to be installed in parallel on air supporting guide sleeve；Non-contact height sensor (5) peace parallel with laser interferometer displacement measurement microscope group (6)
On Z-direction air-float guide rail (8), Z-direction air-float guide rail (8) is mounted on Y-direction air-float guide rail (7), Y-direction air-float guide rail (7) and laser
Interferometer (11) is separately mounted on portal frame (4), and portal frame is fixedly mounted on air supporting shock insulation pedestal (2).
6. the non-contact dimensionality reduction error separate detection device of free form surface according to claim 5, it is characterised in that：It will be high-precision
Plane-parallel crystal is spent as X-Y reference data plane devices, by adjusting free form surface sample device for adjusting posture (9) and with reference to flat
The posture of brilliant device for adjusting posture (10) is vertical with Z-direction air-float guide rail (8), inhibits X to air-float guide rail (3) and Y-direction air-float guide rail
(7) straightness error realizes X-Y plane straightness dimensionality reduction error separate, improves the measurement accuracy of free form surface pattern.
7. the non-contact dimensionality reduction error separate detection device of free form surface according to claim 5, it is characterised in that：Using non-
The characteristic of contact height sensor (5) carries out high-precision elevation carrection to free form surface sample surfaces, avoids simple scan process
In repetition fixed-focus problem, to sample direct laminar analysis measurement improves free-float space robot efficiency, can to fine structure from
It is quickly measured by curved surface.
8. the non-contact dimensionality reduction error separate detection device of free form surface according to claim 5, which is characterized in that by residual air
Recovery type air-float guide rail technology, big stroke lead screw actuation techniques, nanoscale Piezoelectric Ceramic technology, laser interference length-measuring technology
With unperturbed connector technological incorporation, realize macro-micro- across scale nanometer precision unperturbed driving and measure, provided for free form surface high-precision
3 d-line positioning and the scanning survey means of degree.
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