CN110057337B - Free-form surface measuring method and device based on reference plane comparison measurement - Google Patents
Free-form surface measuring method and device based on reference plane comparison measurement Download PDFInfo
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- CN110057337B CN110057337B CN201910268999.0A CN201910268999A CN110057337B CN 110057337 B CN110057337 B CN 110057337B CN 201910268999 A CN201910268999 A CN 201910268999A CN 110057337 B CN110057337 B CN 110057337B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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Abstract
The invention discloses a free-form surface measuring method and device based on reference plane comparison measurement, and belongs to the technical field of optical precision detection. The invention uses high-precision plane flat crystals as a reference datum plane of an X-Y plane, utilizes a high-precision height measuring sensor and a free-form surface measuring sensor which are coaxially installed to respectively detect the height information of the high-precision plane flat crystals and the surface of a measured free-form surface, utilizes the height information of the surface of the high-precision plane flat crystals acquired by the high-precision height measuring sensor to monitor and compensate the straightness errors of an X-direction air-floating guide rail and a Y-direction air-floating guide rail, and carries out dimension reduction error separation on the surface morphology of the free-form surface to realize the nanometer precision detection of the morphology of the free-form surface. The invention can realize the three-dimensional linear positioning and scanning measurement with high precision provided by the free-form surface detection, can inhibit the influence of the motion linearity error of the guide rail X, Y on the free-form surface measurement, reduces the influence of Z-axis Abbe error on the measurement, and realizes the large-range nanometer precision measurement of the free-form surface.
Description
Technical Field
The invention belongs to the technical field of optical precision detection, and relates to a high-precision detection method and device for a free-form surface, which can be used for nano-precision detection of the free-form surface in a precision optical system.
Technical Field
The free-form surface element has the largest surface appearance freedom degree, is easy to eliminate aberration in an imaging system, and has the advantages of improving the imaging quality of an optical system, improving the resolution capability, increasing the action distance, simplifying the structure of an instrument, reducing the volume and weight of the instrument, improving the reliability and the like. The free-form surface optical system is used to replace the optical system composed of plane, spherical mirror, coaxial secondary curved mirror, etc. in the past to improve the imaging quality, reduce the volume and weight of the system, and further solve the problems of imaging precision, portability, reliability, etc. has become an important trend of the development of the optical system.
However, the free-form surface increases the degree of freedom of design and puts higher demands on optical design, processing and detection, and as optical CAD and numerical control diamond point processing techniques are successfully applied in optical design and manufacturing, the design and processing of the free-form surface is no longer a major technical obstacle, but the measurement problem becomes a difficult problem to be researched and solved urgently. The processing precision of the diamond point processing technology on the free-form surface shape mainly depends on the measurement accuracy of the space coordinates of each point on the surface shape, so whether the surface shape of an element can meet the design requirement or not is ensured by a high-precision detection technology.
At present, the international surface profile measuring method of the free-form surface is mainly divided into three major categories, namely a light field image detection method, a chromatography scanning detection method and a probe three-dimensional scanning detection method. The image detection method has the advantages that the sample does not need to be scanned in the measurement process, the measurement speed is high, but the method cannot adapt to high-precision measurement of the free curved surface with any inclination angle change, and is easily influenced by characteristic differences of the surface reflectivity, the roughness and the like of the sample. The principle of the chromatography scanning method is simple, but the size and the material of a part to be measured are limited to a certain extent, the requirement on the operation environment is high, and the measurement precision of the existing instrument is low and is only 1-10 mm. The probe three-dimensional scanning detection method is characterized in that a probe is adopted to carry out point-by-point positioning on the surface of a measured free-form surface sample, the surface appearance of the sample is obtained by measuring the coordinate reconstruction of each position point, and a coordinate measuring machine is usually used for driving the probe or the sample to carry out detection.
The traditional probe three-dimensional scanning measurement method comprises the following steps: a sharpness method, a time-of-flight method, and a confocal positioning method. The definition method utilizes a digital image processing technology to judge the imaging quality of an optical system, and finds the point with the clearest imaging as a fixed focus position, but the limitation of diffraction is very obvious, the aiming positioning sensitivity is low, the precision floats between 1% and 2%, and the positioning precision is only in the micron order. The time-of-flight method is simple in measurement principle, does not need image processing, but is low in resolution, and the measurement precision is about 20-50 mm, so that the method is not suitable for a precision measurement environment. The sensitivity of the interference method is very high, the theoretical limit of axial positioning can reach 1nm, but the requirement on the measurement environment is strict, the interference method is easily influenced by the characteristic difference of the surface of the sample such as the inclination angle, the roughness and the like, and the practical engineering application is greatly limited. The confocal legal focus has higher precision and strong environmental interference resistance, has certain inhibition capability on the influence of the surface attribute difference of the sample, and has axial positioning resolution up to 200 nm.
In summary, the measurement accuracy of the existing measurement method is greatly influenced by the characteristic differences of the surface roughness, the undulation, the inclination angle and the like of the sample, and is a main technical bottleneck for improving the measurement accuracy of the free-form surface profile at present.
Aiming at the problems, the invention uses a high-precision plane flat crystal as a reference datum plane of an X-Y plane, and a sensor for monitoring the datum plane and a sensor for measuring the height information of a free-form surface are coaxially arranged, thereby reducing Abbe errors caused by the inclination of a guide rail and a truss; the method has the advantages that the straightness errors of the X-direction air-floating guide rail and the Y-direction air-floating guide rail are monitored and compensated through the height change of the reference surface, the dimension reduction error separation of the free-form surface high-precision measurement is realized, and a high-precision three-dimensional linear positioning and scanning measurement means is provided for the free-form surface detection by combining a macro-micro span scale nanometer precision undisturbed driving and positioning method of the residual air recovery type air-floating guide rail.
Disclosure of Invention
In order to improve the detection precision and efficiency of the free-form surface and overcome the defects of the prior art, the free-form surface measuring method and device based on reference plane comparison measurement disclosed by the invention aim to solve the technical problems that: the method has the advantages that high-precision three-dimensional linear positioning and scanning measurement are provided by realizing free-form surface detection, the influence of the motion straightness error of the guide rail X, Y on free-form surface measurement can be inhibited, the influence of Z-axis Abbe error on measurement is reduced, and large-range and nanometer precision measurement of the free-form surface is realized.
The purpose of the invention is realized by the following technical scheme.
The invention discloses a free-form surface measuring method based on reference plane comparison measurement, which uses a high-precision plane flat crystal as a reference plane of an X-Y surface, utilizes a high-precision height measuring sensor and a free-form surface measuring sensor which are coaxially installed to respectively detect the height information of the surface of the high-precision plane flat crystal and the surface of a measured free-form surface, then utilizes the height information of the surface of the high-precision plane flat crystal obtained by the high-precision height measuring sensor to monitor and compensate the straightness errors of an X-direction air-floatation guide rail and a Y-direction air-floatation guide rail, and carries out dimension reduction error separation on the surface appearance of the free-form surface obtained by the free-form surface measuring sensor to realize the nanometer precision detection of the appearance; the high-precision height measuring sensor and the free-form surface measuring sensor are coaxially arranged on the truss, and the axis of the high-precision height measuring sensor and the axis of the free-form surface measuring sensor are parallel to the Z-direction air floatation guide rail, so that Abbe errors caused by Z-axis movement can be reduced; the method specifically comprises the following steps:
the method comprises the following steps: placing the high-precision plane flat crystal on a reference flat crystal attitude adjusting device, monitoring the surface of the high-precision plane flat crystal by using a high-precision height measuring sensor, and adjusting the attitude of the reference flat crystal attitude adjusting device to be vertical to a Z-direction air floatation guide rail;
step two: placing the high-precision plane flat crystal on a free-form surface sample posture adjusting device, monitoring the surface of the high-precision plane flat crystal by using a free-form surface measuring sensor, and adjusting the posture of the free-form surface sample posture adjusting device to be perpendicular to a Z-direction air floatation guide rail;
step three: respectively placing a measured free-form surface sample and a high-precision plane flat crystal on a free-form surface sample attitude adjusting device and a reference flat crystal attitude adjusting device, driving a truss to move along the Z direction by utilizing a Z-direction air-floating guide rail, and simultaneously obtaining Z-direction surface height information of the high-precision plane flat crystal and the measured free-form surface sample by using a high-precision height measuring sensor and a free-form surface measuring sensor;
step four: when the surface inclination angle of the measured free-form surface sample exceeds the inclination angle measuring range of the free-form surface measuring sensor, judging the posture by a longitudinal minimum region method, and adjusting the posture adjusting device of the free-form surface sample to enable the inclination angle of the measured free-form surface sample to be within the measurable range of the free-form surface measuring device; then, driving the X-direction air-floating guide rail and the Y-direction air-floating guide rail to scan the tested free-form surface sample along a snake-shaped path, and acquiring surface height data of each measuring point through a high-precision height measuring sensor and a free-form surface measuring sensor to realize X-Y plane scanning detection of the profile of the tested free-form surface sample;
step five: compensating linear motion errors in X-Y plane scanning detection by using surface height data obtained by measuring with a high-precision height measuring sensor, and obtaining three-dimensional shape data { D } of a free-form surface sample11(x,y,z),D12(x,y,z),…,D1N(x,y,z),D21(x,y,z),D22(x,y,z),…,D2N(x,y,z),…,Dij(x,y,z),…,DMNAnd (x, y, z) fitting to obtain the overall surface profile of the measured free-form surface sample, and solving a representation polynomial of the surface profile of the free-form surface so as to realize the nanometer precision detection of the free-form surface morphology.
In the free-form surface measuring method based on reference plane comparison measurement, the free-form surface sample posture adjusting device is used for improving the measuring range of a measured free-form surface sample;
the free-form surface measuring device based on reference plane comparison measurement disclosed by the invention integrates a residual gas recovery type air-floating guide rail technology, a large-stroke lead screw driving technology, a nano-scale piezoelectric ceramic driving technology and an undisturbed coupler technology to realize macro-micro span nano precision undisturbed driving and measurement, adopts a contour measuring mode of a gantry structure three-coordinate measuring machine, and comprises an active air-floating vibration isolation spring, an air-floating vibration isolation base, an X-direction air-floating guide rail, a gantry, a high-precision height measuring sensor, a free-form surface measuring sensor, a Y-direction air-floating guide rail, a Z-direction air-floating guide rail, a free-form surface sample attitude adjusting device, a reference flat crystal attitude adjusting device and a truss;
the X-direction air floatation guide rail and the portal frame are fixed on the air floatation vibration isolation base, the Y-direction air floatation guide rail is installed on the portal frame, and the Z-direction air floatation guide rail is installed on a guide sleeve of the Y-direction air floatation guide rail; the free-form surface sample attitude adjusting device and the reference flat crystal attitude adjusting device are arranged on a guide sleeve of the X-direction air-floating guide rail in parallel and are vertical to the Z-direction air-floating guide rail; the high-precision height measuring sensor and the free-form surface measuring sensor are coaxially fixed on the Z-direction air-floating guide rail through the truss and are parallel to the Z-direction air-floating guide rail.
The free-form surface measuring device based on reference plane comparison measurement, disclosed by the invention, places a high-precision plane flat crystal on a reference flat crystal attitude adjusting device as an X-Y reference plane device; the high-precision height measuring sensor is used for monitoring and compensating the straightness errors of the X-direction air-floating guide rail and the Y-direction air-floating guide rail, realizing the dimension reduction and separation of the straightness errors of the X-Y plane and improving the measurement precision of the free-form surface appearance; and (3) performing dimension reduction error separation on the free-form surface morphology obtained by the free-form surface measurement sensor to realize nanometer precision detection of the free-form surface morphology.
In the free-form surface measuring device based on reference plane comparison measurement, the free-form surface sample posture adjusting device adopts a three-point supporting structure and is used for improving the measurable range of the measured free-form surface sample.
Has the advantages that:
1) the free-form surface measuring method and the device based on reference plane comparison measurement, disclosed by the invention, use the high-precision plane flat crystal as the free-form surface three-dimensional measuring method of the X-Y reference plane, can greatly reduce the influence of the guide rail straightness error of X, Y on the Z-direction measurement sensitive direction of the free-form surface; by utilizing the mode of coaxially mounting the high-precision height sensor for monitoring the flat crystal and the free-form surface measuring sensor, the Abbe error caused by Z-axis movement can be greatly reduced, and the scanning detection precision of the free-form surface sample profile can be improved to 50 nm;
2) the invention discloses a free-form surface measuring method and a device based on reference plane comparison measurement.A spherical air-flotation free-form surface sample posture adjusting device based on a three-point supporting structure design can adjust the posture of a measured free-form surface sample through piezoelectric ceramics, and can improve the dip angle measuring range of the profile of the measured free-form surface sample from 15 degrees to 45 degrees;
3) the invention discloses a free-form surface measuring method and a device based on reference plane comparison measurement, and the three-dimensional scanning driving positioning method based on nanometer precision of a motion error decoupling undisturbed driving technical scheme can realize nanometer feeding resolution and positioning in a movement range larger than 100mm, can improve the precision of a free-form surface sample in X-direction and Y-direction scanning detection, and improves the X, Y-direction position and size measurement precision from 2 mu m to 0.6 mu m.
Drawings
FIG. 1a) is a schematic view of a free-form surface measurement method and apparatus based on reference plane comparison measurement according to the present invention;
FIG. 1b) is a schematic diagram of a free-form surface measuring method and apparatus based on reference plane comparison measurement according to the present invention;
FIG. 2 is a schematic diagram of the X-Y in-plane scanning detection path of the free-form surface measuring device based on reference plane comparison measurement according to the present invention;
FIG. 3 is a schematic diagram of a free-form surface sample attitude adjusting device in the free-form surface measuring device and method based on reference plane comparison measurement according to the present invention;
the reference numbers in the figure are 1-an active air flotation vibration isolation spring, 2-an air flotation vibration isolation base, a 3-X-direction air flotation guide rail, 4-a portal frame, 5-a high-precision height measurement sensor, 6-a free-form surface measurement sensor, 7-Y-direction air flotation guide rail, 8-Z-direction air flotation guide rail, 9-a free-form surface sample attitude adjusting device, 10-a reference flat crystal attitude adjusting device, 11-a truss, 12-a measurement point and 13-a supporting point.
Detailed Description
The invention is further illustrated by the following figures and examples.
In the free-form surface measuring method based on reference plane comparison measurement of the embodiment, firstly, a high-precision plane flat crystal is used as a Z-direction reference reflector, a high-precision free-form surface measuring sensor 6 and a high-precision height measuring sensor 5 for monitoring the plane flat crystal are coaxially arranged on a truss, and the truss is driven to move by a Z-direction air-floating guide rail 8; the influence of the straightness of the X-direction air-floating guide rail 3 and the Y-direction air-floating guide rail 7 on the sensitive measurement Z direction of the free-form surface is reduced by processing the displacement measurement result of the corresponding high-precision height measurement sensor 5, so that the nanometer precision detection of the free-form surface is realized; then, the X-direction air-floating guide rail 3 is used for driving the free-form surface sample attitude adjusting device and the reference flat-crystal attitude adjusting device to move, the X-direction scanning measurement of the free-form surface sample is realized, and the Y-direction air-floating guide rail 7 is used for driving the Z-direction air-floating guide rail 8 to move along the Y direction, so that the Y-direction scanning measurement of the free-form surface sample is realized; and finally, performing reverse modeling according to the measured surface profile data of the plurality of free-form surface samples, fitting the surface profile of the measured free-form surface sample, and realizing the nanometer precision detection of the measured free-form surface. According to the free-form surface dimension reduction error separation detection method, the invention constructs a free-form surface non-contact dimension reduction error separation detection device which uses a spectrum confocal displacement measurement sensor as a free-form surface measurement sensor 6 and a high-precision height measurement sensor 5.
Example 1
As shown in fig. 1(a), the free-form surface measurement device based on reference plane comparison measurement disclosed in this embodiment includes an active air-bearing vibration isolation spring 1, an air-bearing vibration isolation base 2, an X-direction air-bearing guide rail 3, a gantry 4, a high-precision height measurement sensor 5, a free-form surface measurement sensor 6, a Y-direction air-bearing guide rail 7, a Z-direction air-bearing guide rail 8, a free-form surface sample attitude adjustment device 9, a reference plano-crystalline attitude adjustment device 10, and a truss 11;
the method for measuring a free-form surface based on reference plane comparison measurement disclosed by the embodiment comprises the following detection steps:
the method comprises the following steps: placing a high-precision plane flat crystal on a reference flat crystal attitude adjusting device 10, monitoring the surface of the high-precision plane flat crystal by using a high-precision height measuring sensor 5, and adjusting the attitude of the reference flat crystal attitude adjusting device 10 to be vertical to a Z-direction air floatation guide rail 8;
step two: placing the high-precision plane flat crystal on a free-form surface sample posture adjusting device 9, monitoring the surface of the high-precision plane flat crystal by using a free-form surface measuring sensor 6, and adjusting the posture of the free-form surface sample posture adjusting device 9 to be vertical to a Z-direction air floatation guide rail 8;
step three: respectively placing a measured free-form surface sample and a high-precision plane flat crystal on a free-form surface sample attitude adjusting device 9 and a reference flat crystal attitude adjusting device 10, driving a truss 11 to move along the Z direction by utilizing a Z-direction air-floating guide rail 8, and simultaneously obtaining Z-direction surface height information of the high-precision plane flat crystal and the measured free-form surface sample through a high-precision height measuring sensor 5 and a free-form surface measuring sensor 6;
step four: when the surface inclination angle of the measured free-form surface sample exceeds the inclination angle measuring range of the free-form surface measuring sensor 6, judging the posture by a longitudinal minimum area method, and adjusting the posture adjusting device 9 of the free-form surface sample to enable the inclination angle of the measured free-form surface sample to be in the measurable range of the system; then, driving the X-direction air-floating guide rail 3 and the Y-direction air-floating guide rail 7 to scan the tested free-form surface sample along a snake-shaped path, and acquiring surface height data of each measuring point 12 through the high-precision height measuring sensor 5 and the free-form surface measuring sensor 6 to realize X-Y plane scanning detection of the profile of the tested free-form surface sample;
step five: compensating linear motion errors in X-Y plane scanning detection by using surface height data measured by the high-precision height measuring sensor 5, and obtaining three-dimensional shape data { D } of the free-form surface sample11(x,y,z),D12(x,y,z),…,D1N(x,y,z),D21(x,y,z),D22(x,y,z),…,D2N(x,y,z),…,,Dij(x,y,z),…,DMNAnd (x, y, z) fitting to obtain the overall surface profile of the measured free-form surface sample, and solving a representation polynomial of the surface profile of the free-form surface so as to realize the nanometer precision detection of the free-form surface morphology.
Example 2
As shown in fig. 1(b), the free-form surface measurement device based on reference plane comparison measurement disclosed in this embodiment includes an active air-bearing vibration isolation spring 1, an air-bearing vibration isolation base 2, an X-direction air-bearing guide rail 3, a gantry 4, a high-precision height measurement sensor 5, a free-form surface measurement sensor 6, a Y-direction air-bearing guide rail 7, a Z-direction air-bearing guide rail 8, a free-form surface sample attitude adjustment device 9, a reference plano-crystalline attitude adjustment device 10, and a truss 11;
the free-form surface to be measured and the high-precision plane are mounted on a Z axis, and two coaxial spectral confocal distance measuring sensors are mounted on a snake-shaped driven X-direction air-floating guide rail 3 through a truss 11;
the method for measuring a free-form surface based on reference plane comparison measurement disclosed by the embodiment comprises the following detection steps:
the method comprises the following steps: placing a high-precision plane flat crystal on a reference flat crystal attitude adjusting device 10, monitoring the surface of the high-precision plane flat crystal by using a high-precision height measuring sensor 5, and adjusting the attitude of the reference flat crystal attitude adjusting device 10 to be vertical to a Z-direction air floatation guide rail 8;
step two: placing the high-precision plane flat crystal on a free-form surface sample posture adjusting device 9, monitoring the surface of the high-precision plane flat crystal by using a free-form surface measuring sensor 6, and adjusting the posture of the free-form surface sample posture adjusting device 9 to be vertical to a Z-direction air floatation guide rail 8;
step three: respectively placing a measured free-form surface sample and a high-precision plane flat crystal on a free-form surface sample attitude adjusting device 9 and a reference flat crystal attitude adjusting device 10, driving a truss 11 to move along the Z direction by using a Z-direction air-floating guide rail 8, and simultaneously obtaining Z-direction surface height information of the high-precision plane flat crystal and the measured free-form surface sample by using a high-precision height measuring sensor 5 and a free-form surface measuring sensor 6;
step four: compensating linear motion errors in X-Y plane scanning detection by using surface height data measured by the high-precision height measuring sensor 5, and obtaining three-dimensional shape data { D } of the free-form surface sample11(x,y,z),D12(x,y,z),…,D1N(x,y,z),D21(x,y,z),D22(x,y,z),…,D2N(x,y,z),…,Dij(x,y,z),…,DMNAnd (x, y, z) fitting to obtain the overall surface profile of the measured free-form surface sample, and solving a representation polynomial of the surface profile of the free-form surface so as to realize the nanometer precision detection of the free-form surface morphology.
While the invention has been described in connection with specific embodiments thereof, it will be understood that it is not intended to limit the scope of the invention, which is defined by the appended claims, any modifications that may be made based on the claims.
Claims (3)
1. The free-form surface measuring method based on reference plane comparison measurement is characterized in that: the method utilizes a free-form surface measuring device to realize measurement, the device adopts a contour measuring mode of a gantry structure three-coordinate measuring machine, and comprises an active air-flotation shock-insulation spring (1), an air-flotation shock-insulation base (2), an X-direction air-flotation guide rail (3), a gantry (4), a high-precision height measuring sensor (5), a free-form surface measuring sensor (6), a Y-direction air-flotation guide rail (7), a Z-direction air-flotation guide rail (8), a free-form surface sample attitude adjusting device (9), a reference flat-crystal attitude adjusting device (10) and a truss (11);
the vibration isolation device comprises an active air-flotation vibration isolation spring (1), an X-direction air-flotation guide rail (3) and a portal frame (4), wherein the air-flotation vibration isolation base (2) is arranged on the active air-flotation vibration isolation spring (1), the Y-direction air-flotation guide rail (7) is arranged on the portal frame (4), and a Z-direction air-flotation guide rail (8) is arranged on a guide sleeve of the Y-direction air-flotation guide rail (7); the free-form surface sample attitude adjusting device (9) and the reference flat crystal attitude adjusting device (10) are arranged on a guide sleeve of the X-direction air-floating guide rail (3) in parallel and are vertical to the Z-direction air-floating guide rail (8); the high-precision height measuring sensor (5) and the free-form surface measuring sensor (6) are coaxially fixed on the Z-direction air-floating guide rail (8) through a truss (11) and are parallel to the Z-direction air-floating guide rail (8);
the method comprises the steps that a high-precision plane flat crystal is used as a reference datum plane of an X-Y plane, the height information of the surface of the high-precision plane flat crystal and the height information of the surface of a measured free-form surface are respectively detected by a high-precision height measuring sensor (5) and a free-form surface measuring sensor (6) which are coaxially installed, then the height information of the surface of the high-precision plane flat crystal, which is acquired by the high-precision height measuring sensor (5), is used for monitoring and compensating the straightness errors of an X-direction air-floating guide rail (3) and a Y-direction air-floating guide rail (7), and dimension reduction error separation is carried out on the surface morphology of the free-form surface, which is acquired by the free-; the high-precision height measuring sensor (5) and the free-form surface measuring sensor (6) are coaxially arranged on the truss (11), and the axis of the high-precision height measuring sensor is parallel to the Z-direction air-floating guide rail (8), so that Abbe errors caused by Z-axis movement can be reduced; the method specifically comprises the following steps of,
the method comprises the following steps: placing the high-precision plane flat crystal on a reference flat crystal attitude adjusting device (10), monitoring the surface of the high-precision plane flat crystal by using a high-precision height measuring sensor (5), and adjusting the attitude of the reference flat crystal attitude adjusting device (10) to be vertical to a Z-direction air floatation guide rail (8);
step two: placing the high-precision plane flat crystal on a free-form surface sample attitude adjusting device (9), monitoring the surface of the high-precision plane flat crystal by using a free-form surface measuring sensor (6), and adjusting the attitude of the free-form surface sample attitude adjusting device (9) to enable the attitude of the free-form surface sample attitude adjusting device to be vertical to a Z-direction air floatation guide rail (8);
step three: respectively placing a measured free-form surface sample and a high-precision plane flat crystal on a free-form surface sample attitude adjusting device (9) and a reference flat crystal attitude adjusting device (10), driving a truss (11) to move along the Z direction by utilizing a Z-direction air-floating guide rail (8), and simultaneously obtaining Z-direction surface height information of the high-precision plane flat crystal and the measured free-form surface sample through a high-precision height measuring sensor (5) and a free-form surface measuring sensor (6);
step four: when the surface inclination angle of the measured free-form surface sample exceeds the inclination angle measuring range of the free-form surface measuring sensor (6), judging the posture by a longitudinal minimum area method, and adjusting a free-form surface sample posture adjusting device (9) to enable the inclination angle of the measured free-form surface sample to be within the measurable range of the free-form surface measuring device; then, driving an X-direction air-floating guide rail (3) and a Y-direction air-floating guide rail (7) to scan the tested free-form surface sample along a snake-shaped path, and acquiring surface height data of each measuring point (12) through a high-precision height measuring sensor (5) and a free-form surface measuring sensor (6) to realize X-Y plane scanning detection of the profile of the tested free-form surface sample;
step five: surface height data obtained by measuring with a high-precision height measuring sensor (5) is used for compensating linear motion errors in X-Y plane scanning detection, and three-dimensional shape data { D (dimension) of a free-form surface sample11(x,y,z),D12(x,y,z),…,D1N(x,y,z),D21(x,y,z),D22(x,y,z),…,D2N(x,y,z),…,Dij(x,y,z),…,DMNAnd (x, y, z) fitting to obtain the overall surface profile of the measured free-form surface sample, and solving a representation polynomial of the surface profile of the free-form surface so as to realize the nanometer precision detection of the free-form surface morphology.
2. The free-form surface measurement method based on reference plane comparison measurement according to claim 1, characterized in that: the free-form surface sample posture adjusting device (9) is used for improving the measuring range of the measured free-form surface sample.
3. The free-form surface measurement method based on reference plane comparison measurement according to claim 1, characterized in that: the free-form surface sample posture adjusting device (9) adopts a three-point supporting structure and is used for improving the measuring range of the measured free-form surface sample.
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