CN108362221A - A kind of free form surface pattern nano-precision detection method and device - Google Patents
A kind of free form surface pattern nano-precision detection method and device Download PDFInfo
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- CN108362221A CN108362221A CN201810054769.XA CN201810054769A CN108362221A CN 108362221 A CN108362221 A CN 108362221A CN 201810054769 A CN201810054769 A CN 201810054769A CN 108362221 A CN108362221 A CN 108362221A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention belongs to optical precision detection technique fields, are related to a kind of the nano-precision contour outline measuring set and method of Free-form Surface Parts, can be used for the nano-precision detection of Free-form Surface Parts.The device includes：Active air supporting shock insulation spring, air supporting vibration isolation pedestal, X to air-float guide rail, portal frame, laser differential confocal fixed-focus triggering measuring system, laser interferometer displacement measure microscope group, Y-direction air-float guide rail, Z-direction air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer；Using the profile measurement mode of gantry structure three coordinate measuring machine, combined high precision plane-parallel crystal is as reference mirror, X is reduced to the influence with Y-direction air-float guide rail straightness to free form surface surface profile high-precision detection, to reduce by 21 errors of three coordinate measuring machine.It is tested the posture of Free-form Surface Parts using the spherical surface air-flotation workbench adjustment with three-point support structure, realizes the high-precision detection of Free-form Surface Parts profile.
Description
Technical field
The invention belongs to optical precision detection technique field, it is related to a kind of free form surface pattern high-precision detecting method and dress
It sets, can be used for the nano-precision detection of free form surface pattern in precision optical system.
Technical background
Free form surface element has maximum surface topography degree of freedom, easily eliminates aberration in imaging systems, and having improves
Optical system imaging quality, improve resolution capability, increase operating distance, simplify apparatus structure, reduce equipment instrument and weight and
The advantages that improving reliability can significantly improve the image quality for measuring optical system, resolving power, improve weaponry performance；
With freeform optics system come instead of the past optical system being made of plane, spherical mirror, coaxial quadratic surface mirror etc. come
The problems such as improving image quality, reducing system bulk and weight, and then solve imaging precision, portability and reliability has become
The important trend of optical system development.
But free form surface proposes higher want while increasing design freedom to design, processing and detection
It asks, as optics CAD and numerical control diamond point processing technology are succeeded application in optical design and fabrication, free form surface
Design has no longer been major technical barrier with processing, but measurement problem has become the problem urgently researched and solved.Light Buddha's warrior attendant
The measurement that stone point processing technology depends primarily on the machining accuracy of free-curved-surface shape each point space coordinate in the shape of opposite is accurate
Degree, therefore whether component side shape can meet design requirement and have to pass through high-precision detection technique to ensure.
It can be mainly divided into light field image mensuration, chromatography in the surface profile measurement method of free form surface in the world at present
Scanning probe method and probe 3-D scanning probe method three categories.Image detection method measurement process is surveyed without being scanned to sample
Amount speed is fast, but it can not adapt to the free form surface high-acruracy survey of arbitrary angle variation, while being vulnerable to sample surfaces reflection
The property differences such as rate, roughness influence.Computed tomography scanning method principle is simple, but size to tested part and material have a fixed limit
System is more demanding to running environment, and existing Instrument measuring precision is 1~10mm, and measurement accuracy is relatively low.Probe three-dimensional scanning measurement
Method positions tested free form surface sample surfaces using probe point by point, and the coordinate by measuring each location point reconstructs to obtain
Sample surface morphology usually drives probe or sample to be detected by coordinate measuring machine, and this method is measured due to having at present
Precision is high, and the advantages such as applied widely are increasingly becoming the mainstream technology of free-float space robot.
Traditional probe three-dimensional scanning measurement method includes：Contact probe method, Resolution method, time-of-flight method and confocal fixed
Position method.Contact probe method has very high measurement accuracy, good reliability and stability, but the measurement data obtained needs basis
Probe gauge head shape compensates, and since there are contact forces for measurement, but cannot be measured to the samples such as soft, frangible,
And sample surfaces after polishing may be scratched.Resolution method is using digital image processing techniques to the image quality of optical system
Judged, finding imaging, the most clearly point is used as fixed-focus position, but diffraction limited fairly obvious, aims at positioning sensitivity
Relatively low, precision is floated between 1%~2%, and positioning accuracy is only micron dimension.Time-of-flight method measuring principle is simple, is not required to
Image procossing is wanted, but resolution ratio is relatively low, measurement accuracy is about 20~50mm, is not suitable in accurate measurement environment.Interference technique
Sensitivity it is very high, the theoretical limit of axially position can reach 1nm, but measuring environment is required it is harsh, and be easy by
It is influenced to property differences such as the inclination angle of sample surfaces, roughness, practical engineering application is by larger limitation.Confocal method Focus accuracy
Higher, environment resistant interference performance is strong, and influences have certain rejection ability to sample surfaces attribute difference, axially position point
Distinguish that power can reach 200nm.
In conclusion being primarily present measurement accuracy deficiency in existing measurement method, sample surfaces roughness cannot be overcome, risen
The influence of the property differences such as volt, inclination angle is the main bottleneck of current restraint of liberty curved surface profile measurement precision.Based on above-mentioned feelings
Condition, the present invention propose that the normalization laser differential confocal high-precision fixed-focus triggering of resistance to surface change of pitch angle and anti-scattering variation measures
New method carries out the triggering of high-precision fixed-focus to free form surface pattern and measures, and using high precision plane optical flat as the ginseng of X-Y plane
Reference plane is examined, X is monitored and compensated by laser interferometer to the straightness error with Y-direction air-float guide rail, realizes free form surface shape
The dimensionality reduction error separate of looks, to realize the nano-precision detection of free form surface pattern.
The core concept of patent of the present invention is using high precision plane optical flat as the reference datum of X-Y plane, by swashing
Optical interferometer monitors and compensation X is to the straightness error with Y-direction air-float guide rail, realizes the dimensionality reduction error point of free form surface pattern
From, and the normalization laser differential confocal high-precision fixed-focus triggering changed by resistance to surface change of pitch angle and anti-scattering measures new side
Method carries out the triggering of nano-precision fixed-focus to free form surface pattern and measures, in conjunction with the macro-micro- across scale of residual air recovery type air-float guide rail
Nano-precision unperturbed drives and localization method, and provide the positioning of high accuracy three-dimensional straight line for free form surface Shape measure surveys with scanning
Amount means directly measure sample using differential confocal curve linear section, reduce Focus tracking requirement, can be to fine structure
Free form surface pattern carry out quick nanometer accuracy measurement.
Invention content
The purpose of the invention is to improve the precision and efficiency of detecting of free form surface pattern, the prior art is overcome not
Foot proposes a kind of free form surface pattern nano-precision detection method and its device.
The present invention is based on the residual air recovery type air-float guide rail of our inventions, macro-micro- across scale nanometer precise movements error solutions
Coupling unperturbed drives realizes nano-precision 3-D scanning and positioning with localization method；A wide range of tune based on aerostatic bearing technology
Incline aligning technology, realizes free form surface sample pose adjustment, it is ensured that the inclination angle at any point can be surveyed in range in system；In Z-direction
Using high precision plane optical flat carry out nano-precision laser interferometer displacement measurement, reduce X to Y-direction air-float guide rail straightness to from
By the influence of curved surface profile measurement, the precision of Z-direction laser differential confocal fixed-focus triggering detection is improved, realizes free form surface pattern
Nano-precision detects.
The purpose of the present invention is what is be achieved through the following technical solutions.
The free form surface pattern nano-precision detection method of the present invention, includes the following steps：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture and refers to optical flat posture
In adjusting apparatus, by laser interferometer measurement laser interferometry microscope group between high precision plane optical flat at a distance from, adjustment from
By curved surface sample device for adjusting posture and with reference to the posture of optical flat device for adjusting posture, ensure vertical with Z-direction air-float guide rail；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions and with reference on optical flat device for adjusting posture, the triggering of laser differential confocal fixed-focus is driven to measure using Z-direction air-float guide rail
System and laser interferometer displacement measure microscope group and are moved along Z-direction, are obtained and are tested certainly according to obtained laser differential confocal response curve
By the Z-direction apparent height and obliquity information of curved surface pattern；
Step 3：Using X to air-float guide rail, air supporting guide sleeve is made equidistantly to move in X direction, each measurement point is repeated to walk
Rapid two, when tested free form surface sample surfaces inclination angle is larger, cause the laser of laser differential confocal fixed-focus triggering measuring system poor
When dynamic confocal response light intensity is weaker, by adjusting free form surface sample device for adjusting posture, ensure on free form surface sample arbitrarily
The inclination angle of any can surveyed in range, realize the X of free form surface pattern to Scanning Detction；
Step 4：Often free form surface pattern X of completion is equidistant along Y-direction using Y-direction air-float guide rail to Scanning Detction
Shifting moves a step, and repeats step 3, realizes the Y-direction Scanning Detction of free form surface pattern；
Step 5：Tested free form surface sample carry out X to straight-line motion accuracy when Y-direction Scanning Detction by laser interference
The displacement data that instrument measurement obtains compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of free form surface pattern.
The free form surface pattern nano-precision detection device of the present invention, including：Active air supporting shock insulation spring, air supporting vibration isolation base
Seat, X measure microscope group, Y-direction gas to air-float guide rail, portal frame, laser differential confocal fixed-focus triggering measuring system, laser interferometer displacement
Floating guide rail, Z-direction air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer
The present invention uses the profile measurement mode of gantry structure three coordinate measuring machine, wherein air supporting vibration isolation pedestal is mounted on
On active air supporting shock insulation spring, vibration isolation is played the role of by active air supporting vibration isolation spring；X is fixedly mounted on to air-float guide rail
On air supporting vibration isolation pedestal, X is equipped with air supporting guide sleeve on air-float guide rail, and will be based on three-point support structure and design free form surface sample
Product device for adjusting posture and reference optical flat device for adjusting posture are installed in parallel on air supporting guide sleeve；Laser differential confocal fixed-focus triggers
Measuring system and laser interferometer displacement measure microscope group and are installed in parallel on Z-direction air-float guide rail, and Z-direction air-float guide rail is mounted on Y-direction gas
Floating guide rail, Y-direction air-float guide rail and laser interferometer are separately mounted on portal frame, and portal frame is fixedly mounted on air supporting shock insulation pedestal
On.
Advantageous effect
The present invention, which compares prior art, has following remarkable advantage：
1) high precision plane optical flat is used substantially to subtract as the 3 D Measurement of Free Form Surface method of X-Y reference data planes
Small X, Y-direction guide rail straightness error measure free form surface Z-direction the influence of sensitive direction, theoretically can be by free form surface pattern
Scanning Detction precision be increased within 50nm；
2) the normalization laser differential confocal high-precision fixed-focus triggering of resistance to surface change of pitch angle and anti-scattering variation measures new
Method is, it can be achieved that surface angle changes the free form surface high-precision surface axial direction fixed-focus detection trigger up to 25 °, and can improve
The accuracy of detection and speed of free form surface pattern；
3) the spherical surface air supporting free form surface sample device for adjusting posture based on three-point support structure design, passes through piezoelectric ceramics
The posture that tested free form surface sample can be adjusted can be by tested free form surface pattern according to the range of the piezoelectric ceramics of selection
Measurement range maximum improve to 45 °；
4) the 3-D scanning driving localization method that the nano-precision of unperturbed actuation techniques scheme is decoupled based on kinematic error can
Nanoscale feeding resolution ratio and positioning is realized in the moving range more than 100mm, can by free form surface sample carry out X to
Precision when Y-direction Scanning Detction is improved from 2 μm to 0.6 μm.
Description of the drawings
Fig. 1 is free form surface pattern nano-precision detection device of the present invention and method schematic diagram；
Fig. 2 is that laser differential confocal fixed-focus of the present invention triggers measuring principle schematic diagram；
Fig. 3 is that surface sweeping detects path in the X-Y plane of free form surface pattern nano-precision detection device of the present invention and method
Schematic diagram；
Fig. 4 is that free form surface sample pose adjustment fills in free form surface pattern nano-precision detection device of the present invention and method
Set schematic diagram；
Figure label, 1- active air supporting vibration isolations spring, 2- air-float guide rails, the snakelike driving X of 3- are to air-float guide rail, the gantry 4-
Frame, 5- laser differential confocal fixed-focus triggering measuring system, 6- measure laser interferometry microscope group, 7-Y to air-float guide rail, 8-Z to
Air-float guide rail, 9- samples device for adjusting posture, 10- are with reference to optical flat device for adjusting posture, 11- laser interferometer, 12- laser differentials
Confocal response curve zero crossing, 13- laser differential confocal response curve approximately linears section, 14- measurement points, 15- supporting points.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and examples.
The free form surface pattern nanometer accuracy measurement method of the present invention, including Z-direction air-float guide rail drive laser differential confocal
Fixed-focus triggers measuring system and laser interferometer displacement measures microscope group movement, and differential confocal signal strength is changed correspondingly, obtained differential
Confocal response curve utilizes differential confocal response curve " zero crossing " and laser differential confocal fixed-focus triggering measuring system focus position
Accurate corresponding characteristic is set, by " zero crossing " come the accurate focus for capturing laser differential confocal fixed-focus and triggering measuring system, in fact
The nanometer accuracy measurement of existing free form surface pattern；Laser interferometer displacement, which measures microscope group movement, can make to be placed on reference to optical flat posture tune
The displacement measurement of high precision plane optical flat in engagement positions changes, and is done high precision plane optical flat as Z-direction laser
Displacement measurement reference mirror is related to, by handling the displacement measurement of laser interferometer, reduces X to air-float guide rail and Y-direction gas
Floating influence of the guide rail linearity to free form surface pattern sensitive measurement Z-direction；Secondly, it is driven to air-float guide rail using X freely bent
Face sample device for adjusting posture and reference optical flat device for adjusting posture move, and realize that free form surface sample X to scanning survey, is utilized
Y-direction air-float guide rail 7 drives Z-direction air-float guide rail to be moved along Y-direction, realizes that free form surface sample Y-direction surface sweeping measures；Finally, according to survey
Several free form surface sample surface profiles data obtained carry out reverse modeling, fit tested free form surface sample surface profiles,
Realize the nano-precision detection for being tested free form surface pattern.
Based on free form surface pattern nano-precision detection method of the present invention, free form surface as shown in Figure 1 is built
Pattern nano-precision detection device.
Embodiment 1
As depicted in figs. 1 and 2, the inventive system comprises：Active air supporting shock insulation spring, air supporting vibration isolation pedestal, X are to air supporting
Guide rail, portal frame, laser differential confocal fixed-focus triggering measuring system, laser interferometer displacement measure microscope group, Y-direction air-float guide rail, Z-direction
Air-float guide rail, free form surface sample device for adjusting posture, with reference to optical flat device for adjusting posture, laser interferometer；
Free form surface pattern nano-precision detection method, detecting step are as follows：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture 9 and refers to optical flat appearance
In state adjusting apparatus 10, by laser interferometer 11 measure laser interferometry microscope group 6 between high precision plane optical flat at a distance from,
Free form surface sample device for adjusting posture 9 and the posture with reference to optical flat device for adjusting posture 10 are adjusted, is ensured and Z-direction air-float guide rail
8 is vertical；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions 9 and with reference on optical flat device for adjusting posture 10, laser differential confocal fixed-focus is driven to trigger using Z-direction air-float guide rail 8
Measuring system 5 and laser interferometer displacement measure microscope group 6 and are moved along Z-direction, according to laser differential confocal response curve approximately linear section
13 and the displacement information that measures of laser interferometer 11 obtain laser differential confocal response curve zero crossing 12, to obtain it is tested from
By the Z-direction apparent height and obliquity information of curved surface pattern；
Step 3：As shown in figure 3, along snakelike driving X to air-float guide rail 3 and Y-direction air-float guide rail 7, to each measurement point 14
Step 2 is repeated, the apparent height of each measurement point 14 is acquired and obliquity information realizes that the X-Y plane of free form surface pattern is swept
Retouch detection；
Step 4：Tested free form surface sample carry out X to straight-line motion accuracy when Y-direction Scanning Detction by laser interference
Instrument 11 measures obtained displacement data and compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of free form surface pattern.
Embodiment 2
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, free form surface pattern nano-precision detection method, detecting step are as follows：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture 9 and refers to optical flat appearance
In state adjusting apparatus 10, by laser interferometer 11 measure laser interferometry microscope group 6 between high precision plane optical flat at a distance from,
Free form surface sample device for adjusting posture 9 and the posture with reference to optical flat device for adjusting posture 10 are adjusted, is ensured and Z-direction air-float guide rail
8 is vertical；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample posture tune
In engagement positions 9 and with reference on optical flat device for adjusting posture 10, laser differential confocal fixed-focus is driven to trigger using Z-direction air-float guide rail 8
Measuring system 5 and laser interferometer displacement measure microscope group 6 and are moved along Z-direction, according to laser differential confocal response curve and laser interference
The displacement information that instrument 11 measures obtains the Z-direction apparent height and obliquity information for being tested free form surface pattern；
Step 3：When tested free form surface sample surfaces inclination angle is larger, the triggering of laser differential confocal fixed-focus is caused to measure system
When the laser differential confocal response light intensity of system 5 is weaker, pose discrimination is carried out as shown in figure 4, being sent out by longitudinal Minimum Area, is utilized
Positioned at the piezoelectric ceramics of supporting point 15, the posture of spherical surface air-flotation workbench is adjusted, makes the inclination angle of tested free form surface sample be
System can be surveyed in range, along snakelike driving X to air-float guide rail 3 and Y-direction air-float guide rail 7, repeat step 2 to each measurement point 14, adopt
Collect the X-Y plane Scanning Detction of the apparent height and obliquity information realization free form surface pattern of each measurement point 14；
Step 4：Tested free form surface sample carry out X to straight-line motion accuracy when Y-direction Scanning Detction by laser interference
Instrument 11 measures obtained displacement data and compensates, by free form surface sample three-dimensional appearance data { D11(x,y,z),D12(x,y,
z),…,D12(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of free form surface pattern.
The specific implementation mode of the present invention is described above in association with attached drawing, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (9)
1. a kind of Free-form Surface Parts profile nano-precision detection method, it is characterised in that include the following steps：
Step 1：High precision plane optical flat is respectively placed in free form surface sample device for adjusting posture (9) and refers to optical flat posture
In adjusting apparatus (10), measured between laser interferometry microscope group (6) and high precision plane optical flat by laser interferometer (11)
Distance, adjustment free form surface sample device for adjusting posture (9) and the posture with reference to optical flat device for adjusting posture (10), guarantee and Z
It is vertical to air-float guide rail (8)；
Step 2：Tested free form surface sample and high precision plane optical flat are individually positioned in free form surface sample pose adjustment dress
It sets on (9) and with reference on optical flat device for adjusting posture (10), drives laser differential confocal fixed-focus to touch using Z-direction air-float guide rail (8)
Hair measuring system (5) and laser interferometer displacement measure microscope group (6) and are moved along Z-direction, approximate according to laser differential confocal response curve
The displacement information that linearity range (13) and laser interferometer (11) measure obtains laser differential confocal response curve zero crossing (12), from
And obtain the Z-direction apparent height and obliquity information for being tested free form surface sample profile；
Step 3：When tested free form surface sample surfaces inclination angle is larger, laser differential confocal fixed-focus is caused to trigger measuring system (5)
Laser differential confocal response light intensity it is weaker when, by longitudinal minimum area method carry out pose discrimination, using positioned at supporting point
(15) piezoelectric ceramics adjusts the posture of spherical surface air-flotation workbench, makes the inclination angle of tested free form surface sample that can survey model in system
In enclosing, drives X to air-float guide rail (3) and Y-direction air-float guide rail (7) along serpentine path, step 2 is repeated to each measurement point (14),
Acquire the apparent height of each measurement point (14) and the X-Y plane scanning inspection of obliquity information realization free form surface sample profile
It surveys；
Step 4：Tested free form surface sample carry out X to straight-line motion accuracy when Y-direction Scanning Detction by laser interferometer
(11) it measures obtained displacement data to compensate, by free form surface sample three-dimensional appearance data { D11(x,y,z),D14(x,y,
z),…,D14(x,y,z),Dij(x,y,z),…,DMN(x, y, z) } fitting, obtain the integral face type wheel of tested free form surface sample
Exterior feature solves the characterization multinomial of free form surface surface profile, realizes the nano-precision detection of Free-form Surface Parts profile.
2. a kind of Free-form Surface Parts profile nano-precision detection method according to right 1, it is characterised in that：Using high-precision
Reference datum of the plane-parallel crystal as X-Y plane is spent, X is monitored and compensated by laser interferometer (11) to air-float guide rail (3) and Y
To the straightness error of air-float guide rail (7), free form surface pattern error dimensionality reduction is made to detach, realizes the nanometer essence of free form surface pattern
Degree detection.
3. a kind of Free-form Surface Parts profile nano-precision detection method according to right 1, which is characterized in that use anti-table
Face change of pitch angle and the normalization laser differential confocal high-precision fixed-focus of anti-scattering variation trigger new method of measuring, realize that surface is inclined
Angle variation realizes the nanometer essence of Free-form Surface Parts profile up to 45 ° of free form surface high-precision surface axial direction fixed-focus detection trigger
Degree detection.
4. a kind of Free-form Surface Parts profile nano-precision detection method according to claim 1, which is characterized in that use
It normalizes laser differential confocal high-precision fixed-focus and triggers measurement method, directly utilize laser differential confocal response curve approximately linear
Section (13) quickly measures sample topography, reduces Focus tracking requirement, improves free-float space robot efficiency, realizing has fine knot
The free form surface pattern of structure quickly measures.
5. a kind of Free-form Surface Parts profile nano-precision detection method according to claim 1, which is characterized in that be based on
The spherical surface air supporting free form surface sample device for adjusting posture (9) of three-point support structure design, is adjusted by piezoelectric ceramics and is tested certainly
By the posture of curved surface sample, the measurement range for being tested free form surface sample profile is improved.
6. a kind of Free-form Surface Parts profile nano-precision detection device, using the profile measurement of gantry structure three coordinate measuring machine
Mode, it is characterised in that including：Active air supporting shock insulation spring (1), air supporting vibration isolation pedestal (2), X are to air-float guide rail (3), portal frame
(4), laser differential confocal fixed-focus triggering measuring system (5), laser interferometer displacement measure microscope group (6), Y-direction air-float guide rail (7), Z
To air-float guide rail (8), free form surface sample device for adjusting posture (9), with reference to optical flat device for adjusting posture (10), laser interferometer
(11)；Wherein, air supporting vibration isolation pedestal (2) is mounted on active air supporting shock insulation spring (1), passes through active air supporting vibration isolation spring (1)
Play the role of vibration isolation；X is fixedly mounted on to air-float guide rail (3) on air supporting vibration isolation pedestal (2), X pacifies on air-float guide rail (3)
Equipped with air supporting guide sleeve, and three-point support structure design free form surface sample device for adjusting posture (8) will be based on and refer to optical flat appearance
State adjusting apparatus (9) is installed in parallel on air supporting guide sleeve；Laser differential confocal fixed-focus triggers measuring system (5) and laser interference position
Shift measurement microscope group (6) is installed in parallel on Z-direction air-float guide rail (8), and Z-direction air-float guide rail (8) is mounted on Y-direction air-float guide rail (7), Y
It is separately mounted on portal frame (4) to air-float guide rail (7) and laser interferometer (11), portal frame is fixedly mounted on air supporting shock insulation base
On seat (2).
7. a kind of Free-form Surface Parts profile nano-precision detection device according to claim 6, it is characterised in that：It will be high
Precision face optical flat is as X-Y reference data plane devices, by adjusting free form surface sample device for adjusting posture (9) and reference
The posture of optical flat device for adjusting posture (10) is vertical with Z-direction air-float guide rail (8), can effectively inhibit X to air-float guide rail (3) and
The straightness error of Y-direction air-float guide rail (7) realizes X-Y plane straightness dimensionality reduction error separate, improves the survey of free form surface pattern
Accuracy of measurement.
8. a kind of Free-form Surface Parts profile nano-precision detection device according to claim 6, which is characterized in that this dress
The Free-form Surface Parts profile surface sweeping mode set includes：Simple scan and Single Slice Mode；Simple scan utilizes laser differential confocal
Fixed-focus triggers measuring system (5) and carries out the triggering measurement of single-point fixed-focus；Single Slice Mode is measured using the triggering of laser differential confocal fixed-focus
The characteristic of the differential confocal curve linear section of system (5) reduces Focus tracking requirement, to the direct laminar analysis measurement of sample.
9. a kind of Free-form Surface Parts profile nano-precision detection method according to claim 6, it is characterised in that：It will be remaining
Gas recovery type air-float guide rail technology, big stroke lead screw actuation techniques, nanoscale Piezoelectric Ceramic technology, laser interference length-measuring skill
Art and unperturbed connector technological incorporation are realized macro-micro- across scale nanometer precision unperturbed driving and are measured, height is provided for free form surface
3 d-line positioning and the scanning survey means of precision.
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| CN112857253A (en) * | 2021-01-22 | 2021-05-28 | 华侨大学 | Surface three-dimensional shape measuring device for large-size wafer |
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