CN106441153A - Device and method for detecting contours of large-caliber aspheric surface components - Google Patents
Device and method for detecting contours of large-caliber aspheric surface components Download PDFInfo
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- CN106441153A CN106441153A CN201610936001.6A CN201610936001A CN106441153A CN 106441153 A CN106441153 A CN 106441153A CN 201610936001 A CN201610936001 A CN 201610936001A CN 106441153 A CN106441153 A CN 106441153A
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- guide rail
- aspheric surface
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- profile
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention belongs to the technical field of optical precision tests, and relates to a device and a method for precisely detecting large-caliber aspheric surfaces. The device and the method can be used for detecting the contours of large aspheric surface components in precision optical systems in a high-precision manner. The device is of an open type contour instrument structure with rotary-linear datum common base planes on the basis of linear/rotary datum technologies and the like, so that the contours of the large-caliber aspheric surface components can be detected on the basis of precision flotation rotary centers in the high-precision manner. The device and the method have the advantages that common base plane designs for rotary-linear datum systems, turning designs for measurement frames and designs for open type non-gantry structures are adopted, Abbe errors of instruments can be reduced, the movement precision of a precision linear flotation guide rail can be realized to the greatest extent, and parameters of the contour of a mother line of each to-be-detected aspheric surface can be directly measured by a sensing measuring system which synchronously moves with the precision linear flotation guide rail; the contours of multiple mother lines of the to-be-detected aspheric surfaces can be measured by the aid of precision flotation rotary technologies, and the contours of the large-caliber aspheric surfaces can be quickly detected in the high-precision manner by means of fitting.
Description
Technical field
The invention belongs to optical precision technical field of measurement and test, is related to a kind of heavy caliber precision Aspherical-surface testing device and side
Method, can be used for the high precision test of the medium-and-large-sized High-precision aspheric component side shape profile of precision optical system.
Technical background
Large-scale high-precision aspherical optical element, plays pole in the precision optical systems such as camera space, astronomical telescope
Its important effect.In aspherical mirror machining, in order to meet the design requirement of aspheric face shape and roughness, which typically adopts
The manufacturing process such as process-detect-reprocess-detect again, to a certain extent, obtain it is critical only that for High-precision aspheric element
Reliable, effective detection technique can be provided to instruct processing, especially in the aspheric milling of large-aperture optical and
In the polishing stage, the high-acruracy survey of aspheric surface is the key of decision face shape convergence precision and convergence rate.At present, aspheric
The high precision test in face has become as the greatest problem for being faced in High-precision aspheric Optical element manufacturing.
At present, conventional main measurement method has contact type probe scanning method, optical probe scanning method and Through Optical Interference Spectra,
Wherein contact type scanning measurement method is mainly used in detection of the large spherical surface aspherical mirror at the attrition process stage, and optics is non-to be connect
Touch scanning method and Through Optical Interference Spectra are applied to grind later stage and polishing stage, are especially fitted due to its non-cpntact measurement
Detection together in minute surface after processing through final molding.
Through Optical Interference Spectra includes zero-bit interferometric method and non-zero interferometric method, mainly include aberration-free point, zero-compensation mirror method,
Calculate holography method, shearing interference method, stitching interferometry etc..Zero-bit interferometric method be by the structure of design compensation device and position come
The normal aberration of tested aspheric surface theory shape is fully compensated, realizes the zero testing of face shape error.The method accuracy of detection height,
Highly reliable, it is the basis of reference of current aspheric surface detection.But, null test needs design and tested aspheric surface phase
The auxiliary element of coupling, does not have versatility, thus testing cost is higher, and measure the cycle is longer, especially to large-caliber convex aspheric
During the detection of face, cost is higher.And, the method also exist system debug that required precision is higher, compensating glass design and debug with
And high precision test difficult, calculate that holographic plate strain line frequency is excessive to be introduced medium-high frequency error and be difficult to the problems such as making.
Non-zero interferometric method need not be fully compensated whole normal aberrations of tested surface when aspheric surface is detected, but detecting system
There is intrinsic hysterisis error, interference pattern does not directly reflect the face shape error information of tested surface.
Probe scanning method typically directly test tested surface shape obtaining the three-dimensional information of each sampled point, then by analysis,
The measurement of aspheric surface error, its principle simple, intuitive, it is not necessary to auxiliary device and element, instrument mark are realized in fitting and reconstruction
Measurement coordinate system can be set up after fixed, the radius of curvature of aspherical mirror vertex can also be measured simultaneously.The method is applied to arbitrarily
The surface testing of bore non-spherical element, which has the disadvantage using simple scan, less efficient, the measurement original being based on due to popping one's head in
Reason, its response speed is limited, and time of measuring is longer, and the change of environmental condition can introduce measurement error, and surface shape measurement precision is limited.
At present, the certainty of measurement of existing aspheric surface contour measurement instrument is largely determined by spindle rotation accuracy, line slideway
Site error and sensing technology etc. between precision, benchmark, do not make full use of the compensability of space reference kinematic error.
For the problems referred to above, the present invention proposes independently to separate and the accurate aspherical profile of standard of compensation kinematic error is swept
Measurement apparatus and method is retouched, using the open contourograph structural principle in revolution linear datum cobasis face, realizes heavy caliber (straight
More than footpath Ф 400mm) aspherical profile high-precision rapid survey.
Content of the invention
The invention aims to improving the precision and efficiency of detecting of large-scale precision aspherical profile, it is proposed that Yi Zhong great
Bore non-spherical element profile high-precision detection device and method.
Space turn error list indexing isolation technics that the present invention is invented based on us, straight line/rotative benchmark technology and
Error separating technology etc. between benchmark, it is achieved that the high accuracy based on the aperture aspherical element profile of the accurate air supporting centre of gyration
Detection.
The purpose of the present invention is achieved through the following technical solutions.
The aperture aspherical contour machining detection means of the present invention, using the open of revolution linear datum cobasis face
Contourograph structure, including pedestal, accurate straight line air-float guide rail, accurate air supporting rotary table, guide rail straight-line motion accuracy laser
Monitoring system, air-flotation workbench adjustment system, sensing measurement system and Measurement and Control System.
Wherein, accurate straight line air-float guide rail, accurate air supporting rotary table, guide rail straight-line motion accuracy laser monitoring system
It is fixed on pedestal, accurate air-float guide rail linear motion is positioned at the lower section of accurate air supporting rotary table side；Guide rail straight line is transported
Dynamic error laser monitoring system is placed in parallel with accurate straight line air-float guide rail, its straight-line motion accuracy detecting module and sensing measurement
System is consolidated；Sensing measurement system be fixed on and the connected cross measure arm of axle sleeve of accurate straight line air-float guide rail on,
And one-dimensional rectilinear scanning motion can be made with the axial direction of the accurate straight line air-float guide rail in axle sleeve edge, sensing measurement system in motor process
The axial direction of system is vertical with the direction of motion of accurate straight line air-float guide rail.
The aperture aspherical profile high-precision detecting method of the present invention, including using accurate air supporting rotary table adjustment
Tested aspheric pose, using accurate straight line air-float guide rail drive sensing measurement system along tested aspheric surface center bus
Direction is scanned measurement, while being separated using guide rail straight-line motion accuracy laser monitoring system, the accurate straight line air supporting of compensation is led
The straight-line motion accuracy of rail, realizes nano level rectilinear scanning motion, obtains the profile of tested bus；Then, computer is utilized
The accurate air supporting rotary table of Measurement and Control System control rotates different angles, obtains tested aspheric by sensing measurement system
The profile value of a plurality of bus in face；Finally, tested aspheric integral face shape profile is gone out by a plurality of bus contour fitting, realizes quilt
Survey the high precision test of aspherical profile.
The aperture aspherical profile high-precision detecting method of the present invention, realizes the high precision measurement of tested aspherical profile
Feature comprise the following steps：
Step one：Accurate air supporting rotary table is driven to carry out gyration, using sensing measurement system to accurate air supporting
The working surface profile of rotary table is measured, and obtains the pose parameter of accurate air supporting rotary table, according to the pose
Driving parameter air-flotation workbench adjustment system makes the work top of accurate air supporting rotary table no incline；
Step 2：Tested aspheric surface is placed on accurate air supporting rotary table, computer is driven by Measurement and Control System
Dynamic precision air supporting rotary table carries out gyration, by be fixed on and accurate straight line air-float guide rail the connected vertical survey of axle sleeve
Radial direction sensor-based system on amount arm is detected to tested aspheric radial contour, adjusts tested aspheric surface according to measurement result
Position makes which with accurate air supporting rotary table coaxial placement；
Step 3：Accurate straight line air-float guide rail is moved as one-dimensional scanning along tested aspheric generatrix direction, while driving
Sensing measurement system carries out one-dimensional profile scanning survey along tested aspheric surface generatrix direction, measures tested aspheric surface in this bus side
Profile information upwards；Accurate straight line air-float guide rail is during one-dimensional rectilinear scanning motion, and its straight-line motion accuracy is by guide rail
Straight-line motion accuracy laser monitoring system monitoring, compensation；
Step 4：Computer rotates an angle, weight according to the scanning pattern control precision air supporting rotary table of planning
Multiple step 3, measurement again obtains the profile information of one bus of tested aspheric surface；
Step 5：Repeated measure step 3 and step 4, until tested aspheric overall profile scanning is completed, by a plurality of
Bus contour fitting goes out tested aspheric integral face shape profile, realizes tested aspheric high-accurate outline measurement.
Beneficial effect
Present invention contrast prior art has following remarkable advantage：
1) design of revolution linear datum system cobasis face and the design of turning back of measurement bay, reduce instrument to greatest extent
Device Abbe error, makes the kinematic accuracy of measurement guide rail farthest be played；
2) open non-gantry structure design, is easy to extension, the detecting system of aperture aspherical element processing bore
Fusion and workpiece carrying with debug, Large components caliber size is mainly determined by the range of movement of basic rack；
3) straight line air-supporting slide rail system kinematic error laser detection system using being easy to meter level aperture aspherical element
Processing and detection.
Feature of the present invention：
1., using open non-gantry structure design, the linear motion guide rail in system is placed directly on workbench, is passed
Sensor is connected with guide rail so that system motion width is most short, it is little to deform in measurement process, can improve the inspection of aperture aspherical element
Survey precision；
2. high accuracy air supporting straight line technology is adopted, is eliminated and disturb to measuring environment because of the gas produced by the discharge of waste gas
Impact, be remarkably improved the certainty of measurement of measuring system；
3. technology is turned round using high accuracy air supporting, the rotating accuracy of rotary system is improve, is remarkably improved measuring system
Certainty of measurement；
4. using the eccentric adjustment workbench based on aerostatic bearing technology, realize system high accuracy adjust incline, regulation of mental activities,
It is remarkably improved the certainty of measurement of measuring system；
5. adopt high-precision laser linear datum technology, it is ensured that system precision of rectilinear motion, systematic survey essence can be improved
Degree.
Description of the drawings
Fig. 1 is aperture aspherical element profile detection means of the present invention and its method schematic diagram；
Fig. 2 is that scanning pattern of the aperture aspherical element profile detection method of the present invention based on sequential scan principle is illustrated
Figure；
Fig. 3 a) implement schematic diagram for aperture aspherical element profile detection means of the present invention；
Fig. 3 b) for aperture aspherical element profile detection means of the present invention computer controls connection diagram；
Wherein：1- pedestal, 2- precision straight line air-float guide rail, 3- precision air supporting rotary table, 4- guide rail linear motion are by mistake
Difference laser monitoring system, 5- sensing measurement system, 6- straight-line motion accuracy detecting module, 7- Measurement and Control System, 8- axle sleeve, 9-
Cross measure arm, 10- aspherical mirror, 11- air-flotation workbench adjustment system, 12- computer, 13- vertical survey arm, 14- are radially
Sensor-based system, 15- generatrix direction.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
The basic thought of the present invention is：Set using the design of revolution linear datum system cobasis face and turning back for measurement bay
Meter and open non-gantry structure design, reduce instrument Abbe error, have played accurate straight line air supporting to greatest extent and led
The kinematic accuracy of rail, using the sensing measurement system being synchronized with the movement with accurate straight line air-float guide rail to a tested aspheric mother
Line profile parameter is directly measured；Technology is turned round using accurate air supporting, the measurement of a plurality of bus profile of tested aspheric surface is realized,
The profile parameters of whole aspheric surface are obtained using fitting, it is achieved that the high accuracy quick detection of aperture aspherical profile.
Embodiment 1
As depicted in figs. 1 and 2, aperture aspherical element profile machining and testing method, detecting step is as follows：
Tested aspheric surface 10 is placed on accurate air supporting rotary table 3, and sensing measurement system 5 is fixed on and accurate straight line
On the connected cross measure arm 9 of the axle sleeve 8 of air-float guide rail 2, and one-dimensional rectilinear scanning motion can be made with axle sleeve 8, in measurement process
Sensing measurement system to be ensured 5 is vertical with the direction of motion of accurate straight line air-float guide rail 2, and sensing measurement system 5 is along tested non-
10 generatrix direction 15 of sphere carries out one-dimensional scanning linear motion, while utilizing guide rail straight-line motion accuracy laser monitoring system 4 pairs
The straight-line motion accuracy of accurate straight line air-float guide rail 2 is monitored, separates, compensates, and realizes nano level rectilinear scanning motion, real
The existing profile measurement on a generatrix direction.
As shown in Fig. 2 along generatrix direction 15, it is scanned measurement to tested aspheric surface 10 using sensing measurement system 5, can
Measure the N number of profile measurement data on a bus.
Computer 12 controls accurate air supporting rotary table 3 to rotate an angle by control system 7, repeats above-mentioned scanning
Measurement process, you can measurement obtains the outline data of a plurality of bus.
It is fitted processing according to profile measurement data, the integral face shape profile of tested aspheric surface 10 is obtained, realizes quilt
Survey the high-accurate outline measurement of aspheric surface 10.
Embodiment 2
In conjunction with shown in Fig. 1 and Fig. 3, aperture aspherical processing detection means is mainly by pedestal 1, accurate straight line air-float guide rail
2nd, accurate air supporting rotary table 3, guide rail straight-line motion accuracy laser monitoring system 4, air-flotation workbench adjustment system 11, measurement
Sensor-based system 5, control system 7, computer 12 etc. are constituted, accurate straight line air-float guide rail 2, guide rail straight-line motion accuracy laser monitoring
System 4 is each attached on pedestal 1, and is distributed in around accurate air supporting rotary table 3.Wherein, sensing measurement system 5 is fixed on
On the connected cross measure arm 9 of the axle sleeve 8 of accurate straight line air-float guide rail 2, and can be with axle sleeve 8 along accurate straight line air-float guide rail 2
Axial direction makees one-dimensional rectilinear scanning motion；Radial direction sensor-based system 14 is fixed on and is connected with the axle sleeve 8 of accurate straight line air-float guide rail 2
Vertical survey arm 13 on, and its measurement direction is consistent with 10 radial direction of tested aspheric surface；Accurate straight line air-float guide rail 2 is located at
The lower section of accurate 3 side of air supporting rotary table；Guide rail straight-line motion accuracy laser monitoring system 4 is placed on accurate air supporting revolution
The axis direction of workbench 3, and be placed in parallel with accurate straight line air-float guide rail 2, guide rail straight-line motion accuracy laser monitoring system 4
Straight-line motion accuracy detecting module 6 be fixedly arranged at together with sensing measurement system 5 on cross measure arm 9；Computer 12 is by control
System processed realizes measurement in aperture aspherical detection means, adjustment, scan function.
The detection process of tested aspheric surface 10 is as follows：
1) computer 12 drives accurate air supporting rotary table 3 to carry out gyration by Measurement and Control System 7, using biography
Sensed quantity system 5 measures the surface profile parameters of accurate air supporting rotary table 3, and computer 12 is analyzed to which, obtains essence
The pose parameter of close air supporting rotary table 3, adjusts system 11 by air-flotation workbench and is adjusted according to the pose parameter, eliminate
The inclination of accurate air supporting rotary table 3；
2) tested aspheric surface 10 is placed on accurate air supporting rotary table 3, Measurement and Control System 7 controls accurate air supporting to return
Revolving worktable 3 is at the uniform velocity rotated, and by radial direction sensor-based system 14, the radial contour of tested aspheric surface 10 is monitored, computer
12 place bias according to the measurement result of radial direction sensor-based systems 14 to tested aspheric surface 10 is adjusted, make tested aspheric surface 10 with
Accurate air supporting rotary table 3 is coaxial；
3) accurate straight line air-float guide rail 2 is driven to make one-dimensional scanning motion, sensing measurement system 5 is synchronized with the movement with which, to quilt
Surveying aspheric surface 10 carries out one-dimensional scanning along generatrix direction 15, measures face shape profile of the tested aspheric surface 10 on generatrix direction 15；
Accurate straight line air-float guide rail 2 is in one-dimensional scanning motor process, and its linearity is by guide rail straight-line motion accuracy laser monitoring system 4
Monitoring, is separated by straight-line motion accuracy, compensates, realize nano level rectilinear scanning motion；
4) computer 12 control accurate air supporting rotary table 3 rotate a set angle, repeat step 3, obtain tested
Outline data on 10 generatrix direction of aspheric surface；
5) repeat step 4, can obtain profile measurement data of the tested aspheric surface 10 on a plurality of generatrix direction；
6) computer 12 is fitted according to the outline data on a plurality of generatrix direction for measuring, and obtains tested aspheric surface 10
Complete face shape profile, it is achieved that the high-acruracy survey of the tested aspheric surface profile of heavy caliber.
Above in association with accompanying drawing, the specific embodiment of the present invention is described, but these explanations can not be understood to limit
The scope of the present invention, protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (4)
1. aperture aspherical profile high-precision detection device, it is characterised in that：Using opening for revolution linear datum cobasis face
Formula contourograph structure is put, including pedestal (1), accurate straight line air-float guide rail (2), accurate air supporting rotary table (3), guide rail straight line
Kinematic error laser monitoring system (4), air-flotation workbench adjustment system (11), sensing measurement system (5) and Measurement and Control System
(7)；
Wherein, accurate straight line air-float guide rail (2), accurate air supporting rotary table (3), guide rail straight-line motion accuracy laser monitoring system
System (4) is fixed on pedestal (1), and accurate air-float guide rail linear motion (2) is located under accurate air supporting rotary table (3) side
Side；Guide rail straight-line motion accuracy laser monitoring system (4) is placed in parallel with accurate straight line air-float guide rail (2), and its linear motion is by mistake
Difference detecting module (6) is consolidated with sensing measurement system (5)；Sensing measurement system (5) is fixed on and accurate straight line air supporting
On the axle sleeve (8) connected cross measure arm (9) of guide rail (2), and can be with the axle of the accurate straight line air-float guide rail (2) in axle sleeve (8) edge
Make one-dimensional rectilinear scanning motion to direction, in motor process, the axial direction of sensing measurement system (5) is led with accurate straight line air supporting
The direction of motion of rail (2) is vertical.
2. aperture aspherical profile high-precision detecting method, it is characterised in that：Adjusted using accurate air supporting rotary table (3)
Tested aspheric surface (10) pose, using accurate straight line air-float guide rail (2) drive sensing measurement system (5) along tested aspheric surface
(10) generatrix direction (15) at center is scanned measurement, while using guide rail straight-line motion accuracy laser monitoring system (4) point
From the straight-line motion accuracy of, compensation accurate straight line air-float guide rail (2), nano level rectilinear scanning motion is realized, obtains tested mother
The profile of line；Then, computer (12) is rotated different using the accurate air supporting rotary table (3) of Measurement and Control System (7) control
Angle, obtain the profile value of a plurality of bus of tested aspheric surface (10) by sensing measurement system (5)；Finally, by a plurality of mother
Line profile fits the integral face shape profile of tested aspheric surface (10), realizes the high precision test of tested aspheric surface (10) profile.
3. aperture aspherical profile high-precision detecting method according to claim 2, it is characterised in that：Realize tested non-
The feature of the high precision measurement of sphere (10) profile is comprised the following steps：
Step one：Accurate air supporting rotary table (3) is driven to carry out gyration, using sensing measurement system (5) to accurate gas
The working surface profile of float back into revolving worktable (3) is measured, and obtains the pose parameter of accurate air supporting rotary table (3), according to
Air-flotation workbench adjustment system (11) is driven so that the work top of accurate air supporting rotary table (3) is no inclined according to the pose parameter
Tiltedly；
Step 2：Tested aspheric surface (10) is placed on accurate air supporting rotary table (3), computer (12) is controlled by measurement
System (7) drives accurate air supporting rotary table (3) to carry out gyration, by being fixed on and accurate straight line air-float guide rail (2)
Radial direction sensor-based system (14) on axle sleeve (8) connected vertical survey arm (13) is carried out to the radial contour of tested aspheric surface (10)
Detection, makes which with accurate air supporting rotary table (3) coaxial placement according to measurement result adjustment tested aspheric surface (10) position；
Step 3：The generatrix direction (15) of accurate straight line air-float guide rail (2) along tested aspheric surface (10) makees one-dimensional scanning motion, with
When drive sensing measurement system (5) carry out one-dimensional profile scanning survey along tested aspheric surface (10) generatrix direction (15), measure by
Survey profile information of the aspheric surface (10) on this generatrix direction (15)；Accurate straight line air-float guide rail (2) are transported in one-dimensional linear scanning
During dynamic, its straight-line motion accuracy is monitored by guide rail straight-line motion accuracy laser monitoring system (4), compensation；
Step 4：Computer (12) rotates an angle according to scanning pattern control precision air supporting rotary table (3) of planning,
Repeat step three, measurement again obtains the profile information of (10) buses of tested aspheric surface；
Step 5：Repeated measure step 3 and step 4, until the overall profile scanning of tested aspheric surface (10) is completed, by a plurality of
Bus contour fitting goes out the integral face shape profile of tested aspheric surface (10), and the high-accurate outline for realizing tested aspheric surface (10) is surveyed
Amount.
4. aperture aspherical contour detecting device according to claim 1, is further characterized in that：Sensing measurement system
(5) non-contact sensor measuring system or contact-sensing measuring system are included.
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| CN107796320A (en) * | 2017-11-07 | 2018-03-13 | 安徽博流体传动股份有限公司 | The small radius of spherical crown detecting system of oil distribution casing, cylinder body |
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
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| CN109759953A (en) * | 2018-12-26 | 2019-05-17 | 中国科学院长春光学精密机械与物理研究所 | The contour detecting device and its detection method of large plane |
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN110345859A (en) * | 2019-07-10 | 2019-10-18 | 杭州电子科技大学 | Realize the self-adjusting aspheric surface swing arm detection device of gauge head pose and method |
| CN111023971A (en) * | 2019-12-19 | 2020-04-17 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN113587845A (en) * | 2021-07-29 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture lens contour detection device and detection method |
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| CN107121116A (en) * | 2017-05-25 | 2017-09-01 | 重庆大学 | Screw type face combination property detection platform |
| CN107796320A (en) * | 2017-11-07 | 2018-03-13 | 安徽博流体传动股份有限公司 | The small radius of spherical crown detecting system of oil distribution casing, cylinder body |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
| CN108225213B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | free-form surface non-contact dimensionality reduction error separation detection method and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN109759953A (en) * | 2018-12-26 | 2019-05-17 | 中国科学院长春光学精密机械与物理研究所 | The contour detecting device and its detection method of large plane |
| CN109955148A (en) * | 2019-03-18 | 2019-07-02 | 中国工程物理研究院激光聚变研究中心 | For aspherical optical element intermediate frequency ripple error in level detecting apparatus and method |
| CN109955148B (en) * | 2019-03-18 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | In-situ detection device and method for medium-frequency ripple error of aspheric optical element |
| CN110345859A (en) * | 2019-07-10 | 2019-10-18 | 杭州电子科技大学 | Realize the self-adjusting aspheric surface swing arm detection device of gauge head pose and method |
| CN110345859B (en) * | 2019-07-10 | 2024-02-20 | 杭州电子科技大学 | Aspheric surface shape swinging arm type detection device and method for realizing self-adjustment of measuring head pose |
| CN111023971A (en) * | 2019-12-19 | 2020-04-17 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN111023971B (en) * | 2019-12-19 | 2021-06-01 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN113587845A (en) * | 2021-07-29 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture lens contour detection device and detection method |
| CN114383532A (en) * | 2021-12-24 | 2022-04-22 | 上海交通大学 | Three-dimensional contour detection device for spherical optical lens |
| CN114383532B (en) * | 2021-12-24 | 2023-02-17 | 上海交通大学 | Three-dimensional contour detection device for spherical optical lens |
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